CN116005113A - High-performance coating correction plate - Google Patents
High-performance coating correction plate Download PDFInfo
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- CN116005113A CN116005113A CN202211645371.6A CN202211645371A CN116005113A CN 116005113 A CN116005113 A CN 116005113A CN 202211645371 A CN202211645371 A CN 202211645371A CN 116005113 A CN116005113 A CN 116005113A
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- correction plate
- correction
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Abstract
The invention discloses a high-performance coating correction plate, which comprises a vacuum cavity and a driving motor, wherein an evaporation source is arranged in the middle of the bottom end face of the inner cavity of the vacuum cavity, a coating umbrella stand is arranged in the middle of the top end face of the inner cavity of the vacuum cavity, the driving motor is arranged in the middle of the left end face of the vacuum cavity, the tail end of a motor shaft of the driving motor penetrates through the inner cavity of the vacuum cavity and is fixedly connected with a connecting disc, the upper part of the right end face of the connecting disc is fixedly connected with a supporting plate, the right side of the lower end face of the supporting plate is provided with a mounting seat, the inner cavity of the mounting seat is movably connected with a first correction plate, the right side of the first correction plate is provided with an extension device, the lower end face of the first correction plate is arranged on a supporting device, and the tail end of the supporting device is arranged on the lower part of the right end face of the connecting disc.
Description
Technical Field
The invention relates to the technical field of coating correction plates, in particular to a high-performance coating correction plate.
Background
Uniformity of the film is critical for high throughput during the coating process, especially as film requirements become more stringent and throughput increases to reduce cost and remain competitive. When the geometric structure design of the chamber is insufficient to achieve enough uniformity, a film thickness correction plate is placed in front of the substrate to improve the uniformity of the film layer;
the prior art scheme has the following problems when in use:
1. uneven coating;
2. the correction plate cannot adjust the length;
there is a need for improvement in view of the above-mentioned problems.
Disclosure of Invention
The invention provides the following technical scheme: the invention aims to provide a high-performance coated correction plate so as to solve the problems that the prior coated film is uneven and the length of the correction plate cannot be adjusted in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions: a high performance coated correction plate comprising:
the vacuum cavity is provided with an evaporation source in the middle of the bottom end face of the inner cavity of the vacuum cavity, and a film coating umbrella stand is arranged in the middle of the top end face of the inner cavity of the vacuum cavity;
the driving motor is arranged in the middle of the left end face of the vacuum cavity, the tail end of a motor shaft of the driving motor penetrates through and extends to the inner cavity of the vacuum cavity and is fixedly connected with a connecting disc, the upper part of the right end face of the connecting disc is fixedly connected with a supporting plate, the right side of the lower end face of the supporting plate is provided with a mounting seat, the inner cavity of the mounting seat is movably connected with a first correction plate, the right side of the first correction plate is provided with an extension device, the lower end face of the first correction plate is arranged on a supporting device, and the tail end of the supporting device is arranged on the lower part of the right end face of the connecting disc.
Preferably, the extension device comprises a limit groove, a second correction plate, a connecting block and a transmission device, wherein the limit groove is formed in the right side of the upper end face of the transverse plate of the first correction plate, the second correction plate is arranged in an inner cavity of the limit groove, the connecting block is arranged on the left side of the upper end face of the second correction plate, the transmission device is arranged in the middle of the upper end face of the first correction plate, and the transmission device is connected with the connecting block.
Preferably, the transmission device comprises a mounting plate, a vertical plate, a driving motor and a screw rod, wherein the mounting plate is fixedly connected to the right side of the upper end face of the first correction plate, the vertical plate is fixedly connected to the middle part of the left side of the upper end face of the first correction plate, the driving motor is fixedly connected to the middle part of the left end face of the vertical plate, an output shaft of the driving motor penetrates through and extends to the right side of the vertical plate and is fixedly connected with the screw rod, and the tail end of the screw rod penetrates through the connecting block and is movably connected to the left end face of the mounting plate.
Preferably, the cross sections of the limiting groove and the second correction plate are trapezoidal, and the limiting groove is matched with the second correction plate
Preferably, the supporting device comprises a connecting seat, an electric telescopic rod and a connecting piece, wherein the connecting seat is fixedly connected to the lower end face of the lower transverse plate of the first correcting plate and the lower part of the right end face of the connecting disc, the connecting piece is movably connected to the inner cavity of the connecting seat, and the electric telescopic rod is movably connected to the opposite end faces of the two groups of connecting pieces.
Preferably, the first correction plate is in a ladder shape, a rubber pad is arranged in the middle of the left end face of the vertical plate of the first correction plate, and the left end face of the rubber pad is attached to the right end face of the supporting plate.
Preferably, the outer ring of the left end surface of the connecting disc is uniformly provided with grooves, the inner cavity of each groove is provided with balls, and the outer wall of each ball is attached to the left end surface of the inner cavity of the vacuum cavity.
Preferably, the first correction plate and the second correction plate are positioned between the evaporation source and the film coating umbrella stand.
Compared with the prior art, the invention has the beneficial effects that:
1. through the first correction plate and the extension device, the light control device senses, when the light control device cannot detect the correction plate, the controller sends out an instruction, the driving motor is started, the driving motor drives the screw rod to rotate, the screw rod drives the connecting block to move left and right through the cooperation of the limiting groove and the second correction plate, the connecting block drives the second correction plate to move left and right, and the second correction plate can block the evaporant right above the shielding evaporation source;
2. through mount pad, step-type first correction board and strutting arrangement, start electric telescopic handle, make first correction board rotate around the mount pad, further make first correction board and wait the distance change of coating film work piece, electric telescopic handle can carry out real-time continuous action according to coating film thickness error, makes first correction board be in the optimum height to obtain the best coating film thickness homogeneity.
Drawings
FIG. 1 is a schematic view of a front cross-sectional structure of the present invention;
FIG. 2 is an enlarged schematic view of the structure of FIG. 1A according to the present invention;
FIG. 3 is a schematic diagram of a right-side cross-sectional structure of a correction plate according to the present invention;
fig. 4 is a schematic view of the supporting device structure of the present invention.
In the figure: 1. a vacuum chamber; 2. a vapor deposition source; 3. a film plating umbrella stand; 4. a driving motor; 5. a connecting disc; 6. a support plate; 7. a mounting base; 8. a support device; 81. a connecting seat; 82. an electric telescopic rod; 83. a connecting piece; 9. a ball; 10. a first correction plate; 11. a limit groove; 12. a second correction plate; 13. a mounting plate; 14. a vertical plate; 15. a drive motor; 16. a screw rod; 17. and (5) connecting a block.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-4, the present invention provides a technical solution: a high performance coated correction plate comprising:
the vacuum chamber 1, the middle part of the bottom end surface of the inner cavity of the vacuum chamber 1 is provided with an evaporation source 2, the middle part of the top end surface of the inner cavity of the vacuum chamber 1 is provided with a film plating umbrella stand 3, and the evaporation source 2 corresponds to the film plating umbrella stand 3;
the driving motor 4, driving motor 4 sets up in vacuum chamber 1 left end face middle part, driving motor 4's motor shaft end runs through and extends to vacuum chamber 1 inner chamber and fixedly connected with connection pad 5, connection pad 5 can rotate, be fit for the coating film of different angles, improve the commonality of correction board, connection pad 5 right-hand member face upper portion fixedly connected with backup pad 6, terminal surface right side is provided with mount pad 7 under the backup pad 6, mount pad 7 inner chamber swing joint has first correction board 10, first correction board 10 right side is provided with extension device, terminal surface setting in strutting arrangement 8 under the first correction board 10, strutting arrangement 8 end sets up in connection pad 5 right-hand member face lower part.
Referring to fig. 2, the extending device includes a limiting groove 11, a second correcting plate 12, a connecting block 17 and a transmission device, the right side of the upper end face of the transverse plate of the first correcting plate 10 is provided with the limiting groove 11, the inner cavity of the limiting groove 11 is provided with the second correcting plate 12, the second correcting plate 12 is isosceles trapezoid, the distance between the bottom end face of the second correcting plate 12 and the bottom end face of the first correcting plate 10 is 2-3mm, the left side of the upper end face of the second correcting plate 12 is provided with the connecting block 17, the middle part of the upper end face of the first correcting plate 10 is provided with the transmission device, the transmission device is connected with the connecting block 17, the end face of the connecting block 17 is transversely provided with a threaded hole matched with the screw rod 16, and the connecting block 17 is in threaded connection with the screw rod 16.
Referring to fig. 2, the transmission device includes a mounting plate 13, a vertical plate 14, a driving motor 15 and a screw rod 16, wherein the mounting plate 13 is fixedly connected to the right side of the upper end surface of the first correction plate 10, the vertical plate 14 is fixedly connected to the middle part of the left side of the upper end surface of the first correction plate 10, the driving motor 15 is fixedly connected to the middle part of the left end surface of the vertical plate 14, the output shaft of the driving motor 15 extends to the right side of the vertical plate 14 in a penetrating manner and is fixedly connected with the screw rod 16, the tail end of the screw rod 16 penetrates through a connecting block 17 and is movably connected to the left end surface of the mounting plate 13, the length of the screw rod 16 is greater than the length of the second correction plate 12, the second correction plate 12 can completely enter the limiting groove 11, and the length of the correction plate is effectively smaller.
Referring to fig. 3, the cross sections of the limiting groove 11 and the second correction plate 12 are trapezoidal, and the limiting groove 11 is matched with the second correction plate 12, so that the second correction plate 12 can slide left and right in the limiting groove 11, and has a limiting function.
Referring to fig. 4, the supporting device 8 includes a connecting seat 81, an electric telescopic rod 82 and a connecting piece 83, wherein the connecting seat 81 is fixedly connected to the lower end surface of the lower transverse plate of the first correcting plate 10 and the lower part of the right end surface of the connecting disc 5, the connecting piece 83 is movably connected to the inner cavity of the connecting seat 81, the opposite end surfaces of the connecting piece 83 are planar, the upper end and the lower end of the electric telescopic rod 82 are welded with the connecting piece 83, the stability of the electric telescopic rod 82 is ensured, and the opposite end surfaces of the two groups of connecting pieces 83 are movably connected with the electric telescopic rod 82.
Referring to fig. 1, the first correction plate 10 is in a step shape, a rubber pad is disposed in the middle of the left end face of the vertical plate of the first correction plate 10, the left end face of the rubber pad is attached to the right end face of the supporting plate 6, the step-shaped first correction plate 10 can ensure that the electric telescopic rod 82 stretches normally, the first correction plate 10 is driven to swing, and the distance between the first correction plate 10 and a workpiece to be coated is adjusted, so that the first correction plate 10 is at an optimal height, and optimal uniformity of the thickness of the coated film is obtained.
Referring to fig. 1, the outer ring of the left end face of the connecting disc 5 is uniformly provided with grooves, the inner cavity of the grooves is provided with balls 9, the outer wall of each ball 9 is attached to the left end face of the inner cavity of the vacuum cavity 1, the grooves are arc-shaped grooves, the balls 9 are matched with the grooves, the connecting disc 5 is guaranteed to rotate and simultaneously has a supporting function, the correction plate is guaranteed to be suitable for coating work at different angles, and universality is improved.
Referring to fig. 1, the first correction plate 10 and the second correction plate 12 are located between the evaporation source 2 and the film plating umbrella stand 3, and the first correction plate 10 and the second correction plate 12 are located below the substrate, so as to shield the evaporation material directly above the evaporation source, avoid a great amount of waste phenomenon of the film plating material, and avoid uneven film plating.
Working principle: when the device is used, the driving motor 4 is started according to the angle of the substrate, the driving motor 4 drives the connecting disc 5 to rotate, the connecting disc 5 drives the first correction plate 10 and the extending device to rotate, the device is suitable for coating films of different substrates, the light control device senses, when the light control device cannot detect the correction plate, the controller sends out instructions, the driving motor 15 is started, the driving motor 15 drives the screw rod 16 to rotate, the screw rod 16 is matched with the second correction plate 12 through the limiting groove 11 to have a limiting effect, the screw rod 16 drives the connecting block 17 to move left and right, the connecting block 17 drives the second correction plate 12 to move left and right, the second correction plate 12 is guaranteed to block and shelter from an evaporant right above the evaporation source 2, the electric telescopic rod 82 is started while coating films are carried out, the first correction plate 10 is enabled to rotate around the mounting seat 7, further distance between the first correction plate 10 and a workpiece to be coated is enabled to change, and the electric telescopic rod 82 can continuously act in real time according to coating film thickness errors, and the first correction plate 10 is enabled to be at an optimal height, and optimal coating film thickness uniformity is obtained.
Although the present invention has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present invention.
Claims (8)
1. The high performance coating film correction board, characterized by, include:
the vacuum chamber (1), the middle part of the bottom end surface of the inner cavity of the vacuum chamber (1) is provided with an evaporation source (2), and the middle part of the top end surface of the inner cavity of the vacuum chamber (1) is provided with a film coating umbrella stand (3);
the driving motor (4), driving motor (4) set up in vacuum chamber (1) left end face middle part, the motor shaft end of driving motor (4) runs through and extends to vacuum chamber (1) inner chamber and fixedly connected with connection pad (5), connection pad (5) right-hand member face upper portion fixedly connected with backup pad (6), terminal surface right side is provided with mount pad (7) under backup pad (6), mount pad (7) inner chamber swing joint has first correction board (10), first correction board (10) right side is provided with extension device, terminal surface sets up in strutting arrangement (8) under first correction board (10), strutting arrangement (8) end set up in connection pad (5) right-hand member face lower part.
2. The high performance coated correction plate of claim 1, wherein: the extending device comprises a limiting groove (11), a second correcting plate (12), a connecting block (17) and a transmission device, wherein the limiting groove (11) is formed in the right side of the upper end face of the transverse plate of the first correcting plate (10), the second correcting plate (12) is arranged in an inner cavity of the limiting groove (11), the connecting block (17) is arranged on the left side of the upper end face of the second correcting plate (12), the transmission device is arranged in the middle of the upper end face of the first correcting plate (10), and the transmission device is connected with the connecting block (17).
3. The high performance coated correction plate of claim 2, wherein: the transmission device comprises a mounting plate (13), a vertical plate (14), a driving motor (15) and a screw rod (16), wherein the mounting plate (13) is fixedly connected to the right side of the upper end face of the first correction plate (10), the vertical plate (14) is fixedly connected to the middle part of the left side of the upper end face of the first correction plate (10), the driving motor (15) is fixedly connected to the middle part of the left end face of the vertical plate (14), an output shaft of the driving motor (51) penetrates and extends to the right side of the vertical plate (14) and is fixedly connected with the screw rod (16), and the tail end of the screw rod (16) penetrates through a connecting block (17) and is movably connected to the left end face of the mounting plate (13).
4. The high performance coated correction plate of claim 2, wherein: the cross sections of the limiting groove (11) and the second correction plate (12) are trapezoidal, and the limiting groove (11) is matched with the second correction plate (12).
5. The high performance coated correction plate of claim 1, wherein: the supporting device (8) comprises a connecting seat (81), an electric telescopic rod (82) and connecting pieces (83), wherein the connecting seat (81) is fixedly connected to the lower end face of the lower transverse plate of the first correcting plate (10) and the lower part of the right end face of the connecting disc (5), the connecting pieces (83) are movably connected to the inner cavities of the connecting seats (81), and the electric telescopic rods (82) are movably connected to the opposite end faces of the connecting pieces (83).
6. The high performance coated correction plate of claim 1, wherein: the first correction plate (10) is in a ladder shape, a rubber pad is arranged in the middle of the left end face of the vertical plate of the first correction plate (10), and the left end face of the rubber pad is attached to the right end face of the supporting plate (6).
7. The high performance coated correction plate of claim 1, wherein: the outer ring of the left end face of the connecting disc (5) is uniformly provided with grooves, the inner cavities of the grooves are provided with balls (9), and the outer walls of the balls (9) are attached to the left end face of the inner cavity of the vacuum cavity (1).
8. The high performance coated correction plate of claim 1, wherein: the first correction plate (10) and the second correction plate (12) are positioned between the vapor deposition source (2) and the film plating umbrella stand (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211645371.6A CN116005113A (en) | 2022-12-21 | 2022-12-21 | High-performance coating correction plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211645371.6A CN116005113A (en) | 2022-12-21 | 2022-12-21 | High-performance coating correction plate |
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| Publication Number | Publication Date |
|---|---|
| CN116005113A true CN116005113A (en) | 2023-04-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211645371.6A Pending CN116005113A (en) | 2022-12-21 | 2022-12-21 | High-performance coating correction plate |
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| CN (1) | CN116005113A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117721421A (en) * | 2024-02-07 | 2024-03-19 | 成都国泰真空设备有限公司 | Device and method for eliminating layering phenomenon of film-forming spectroscopic curve at low temperature |
-
2022
- 2022-12-21 CN CN202211645371.6A patent/CN116005113A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117721421A (en) * | 2024-02-07 | 2024-03-19 | 成都国泰真空设备有限公司 | Device and method for eliminating layering phenomenon of film-forming spectroscopic curve at low temperature |
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