CN116000401A - Soldering vacuum furnace - Google Patents
Soldering vacuum furnace Download PDFInfo
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- CN116000401A CN116000401A CN202310173674.0A CN202310173674A CN116000401A CN 116000401 A CN116000401 A CN 116000401A CN 202310173674 A CN202310173674 A CN 202310173674A CN 116000401 A CN116000401 A CN 116000401A
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Abstract
The invention relates to the technical field of chip processing, in particular to a soldering vacuum furnace, which comprises the following components: the upper vacuum furnace is opposite to the lower vacuum furnace, a vacuum cavity is arranged in the upper vacuum furnace and is in butt joint and sealing with the lower vacuum furnace through a cavity driving assembly and a sealing assembly, the cavity driving assembly is arranged at the top of the outer side of the upper vacuum furnace, the sealing assembly is arranged at one end of the vacuum cavity opposite to the lower vacuum furnace, the cavity driving assembly is fixedly connected with the upper end of the vacuum cavity, the vacuum cavity is driven by the cavity driving assembly through the cooperation butt joint between the upper vacuum furnace and the lower vacuum furnace, the vacuum cavity is abutted to the inner cavity of the lower vacuum furnace, the vacuum cavity is sealed by the sealing assembly on the vacuum cavity, the sealing assembly can realize quick replacement of a sealing ring, the compactness between the sealing ring and the vacuum cavity is improved, the problem of high cost caused by integral replacement of the vacuum cavity and the sealing structure is solved, and the production efficiency is improved.
Description
Technical Field
The invention relates to the technical field of chip processing, in particular to a soldering vacuum furnace.
Background
The packaging of semiconductor chips needs to be performed in a vacuum environment, and is generally realized in a vacuum furnace mode. The vacuum furnace in the prior art is provided with a plurality of temperature areas, which are divided into a preheating area, a welding area and a cooling area, wherein the preheating area is protected by nitrogen and is not in a completely low-oxygen environment; the welding area is in a vacuum environment. After the chip is welded, a door connected between the welding area and the cooling area is opened, the chip enters the cooling area from the welding area, and meanwhile, the door connected between the welding area and the preheating area is opened, and the preheated chip is sent into the welding area for welding, so that the front door and the rear door of the welding area are simultaneously opened in the process of completing one welding process and carrying out the next welding process, and the vacuum environment of the welding area is damaged by the cooling area and the preheating area; the chip is in the online welding of first chamber, second chamber, third chamber.
Therefore, the invention provides the vacuum cavity capable of realizing quick disassembly and replacement of the sealing structure, and simultaneously ensuring that the upper vacuum cavity and the lower vacuum cavity are tightly sealed.
Disclosure of Invention
To solve the technical problems.
The application provides a soldering vacuum furnace, include: the upper vacuum furnace is opposite to the lower vacuum furnace, a vacuum cavity is arranged in the upper vacuum furnace and is in butt joint sealing with the lower vacuum furnace through a cavity driving assembly and a sealing assembly, the cavity driving assembly is arranged at the top of the outer side of the upper vacuum furnace, the sealing assembly is arranged at one end of the vacuum cavity opposite to the lower vacuum furnace, the cavity driving assembly is fixedly connected with the upper end of the vacuum cavity, the sealing assembly comprises a sealing ring and a compression ring strip, the sealing ring is arranged at one end of the vacuum cavity opposite to the lower vacuum furnace and is in sealing connection with the inner cavity of the lower vacuum furnace, and the compression ring strip is in butt joint with one end of the sealing ring away from the lower vacuum furnace.
Further, the sealing ring comprises an upper sealing strip and a lower sealing magnetic ring, the upper sealing strip and the lower sealing magnetic ring are integrally formed, the upper sealing strip is arranged at the butt joint end of the vacuum cavity and the lower vacuum furnace through a sealing groove, and the sealing groove is arranged at one end of the vacuum cavity, which is opposite to the lower vacuum furnace.
Further, the lower sealing magnetic ring is located at the bottom of the sealing groove, the lower sealing magnetic ring is connected with the sealing groove through a magnetic ring, and powder capable of being magnetically connected with the magnetic ring, such as iron powder, magnetic powder and the like, is placed in a hollow ring formed by the lower sealing magnetic ring.
Further, a plurality of expansion nails are arranged on one side, far away from the lower sealing magnetic ring, of the magnetic ring, all the expansion nails are connected with the bottom of the sealing groove through expansion holes, and the expansion holes are formed in the bottom of the sealing groove and are opposite to the expansion nails.
Further, the clamping ring strips are four groups and are respectively arranged around the vacuum cavity through the rotating shafts, one end of each clamping ring strip can be abutted against the lower sealing magnetic ring of the sealing ring, the clamping ring strips are connected with the vacuum cavity through the clamping mechanism, and the clamping mechanism is arranged around the vacuum cavity.
Further, the clamping mechanism comprises a plurality of cross pins, each cross pin is movably arranged around the cavity opening of the vacuum cavity through a pin hole, the upper end and the lower end of each cross pin can extend out of the pin hole, one end, close to the compression ring strip, of each cross pin can be connected with the compression ring strip, the pin holes are uniformly formed around the cavity opening of the vacuum cavity, and the cross pins are connected with the pin holes through springs.
Further, each spring is sleeved at the lower end of the corresponding cross pin, and two ends of the spring are respectively abutted with the middle part of the cross pin and the bottom of the pin hole;
when the vacuum cavity is not contacted with the lower vacuum furnace, the spring is in an extension state, the spring jacks up the cross pin, the upper end of the cross pin extends out of the pin hole, and the lower end of the cross pin retracts and pulls the compression ring strip, so that the compression ring strip is not contacted with the lower sealing magnetic ring;
when the vacuum cavity is in contact with the lower vacuum furnace, the end part of the lower vacuum furnace extrudes the upper end of the extended cross pin, the cross pin compresses the spring, and the lower end of the cross pin pushes the compression ring strip to extrude the lower sealing magnetic ring.
Further, the cavity driving assembly comprises a driving motor and a lifting seat, the driving motor is fixedly arranged at the top of the upper vacuum furnace through a motor seat, the lifting seat is connected with the driving motor through a gear and a rack, the gear is fixedly arranged at the output end of the driving motor, the rack is vertically arranged at one side of the lifting seat, and the lifting seat is connected with the top of the upper vacuum furnace through a guide rod group;
when the driving motor rotates positively, the driving motor drives the gear to rotate positively, the gear and the rack are meshed for transmission, and then the lifting seat and the guide rod of the guide rod group are driven to move downwards, and the guide rod of the guide rod group pushes the vacuum cavity to approach the vacuum furnace downwards;
otherwise, the driving motor is reversed, so that the vacuum cavity is lifted upwards and separated from the lower vacuum furnace.
Further, the upper end of the guide rod group is fixedly connected with the lifting seat, and the lower end of the guide rod group penetrates through the upper vacuum furnace to be fixedly connected with the top of the vacuum cavity.
Further, the limit seat is installed for one side of driving motor to the lift seat, is connected through direction slide rail and two spacing sensing rail seats between limit seat and the lift seat, and direction slide rail fixed mounting is in the one side of the relative rack of lift seat, and two spacing sensing rail seats are installed respectively at the upper and lower both ends of limit seat, and direction slide rail can with two spacing sensing rail seat sliding connection.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the vacuum furnace, the vacuum furnace and the lower vacuum furnace are matched and butted, the cavity driving assembly is used for driving the vacuum chamber, the vacuum chamber is butted and tightly butted to the inner cavity of the lower vacuum furnace, the vacuum chamber is sealed by the sealing assembly on the vacuum chamber, the sealing assembly can be rapidly replaced, the tightness between the sealing ring and the vacuum chamber is improved, the high cost problem caused by the integral replacement of the vacuum chamber and the sealing structure is solved, and the production efficiency is improved.
2. In order to further improve the sealing effect between the sealing ring and the vacuum cavity, the lower sealing magnetic ring and the magnetic ring of the sealing ring are tightly pressed by the clamping mechanism and the compression ring strip, the lower sealing magnetic ring is pressed by the compression ring strip, so that the lower sealing magnetic ring is deformed, the magnetic connection between internal magnetic powder and the magnetic ring is increased, and meanwhile, the deformation clamping joint is formed at the joint of the end part of the compression ring strip and the upper sealing strip and the lower sealing magnetic ring, so that the sealing ring is further clamped.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic diagram of a second perspective structure of the present invention;
FIG. 3 is a schematic perspective view of a third embodiment of the present invention;
FIG. 4 is a front view of the present invention;
FIG. 5 is a top view of the present invention;
FIG. 6 is a schematic diagram showing a three-dimensional structure of the present invention;
FIG. 7 is a schematic diagram showing a three-dimensional structure of the present invention;
FIG. 8 is a schematic diagram of a perspective view of an upper vacuum furnace and a vacuum chamber;
FIG. 9 is an exploded view of the seal assembly;
fig. 10 is an enlarged view at B in fig. 9;
FIG. 11 isbase:Sub>A cross-sectional view at A-A in FIG. 5;
FIG. 12 is a perspective view in section of the present invention;
FIG. 13 is a cross-sectional view of a second perspective structure of the present invention;
fig. 14 is an enlarged view of fig. 11 at C;
fig. 15 is an enlarged view of D in fig. 13.
The reference numerals in the figures are: 1. the upper vacuum furnace, 2, the lower vacuum furnace, 3, a vacuum cavity, 3a, a sealing groove, 3b, an expansion hole, 3c, a pin hole, 4, a cavity driving component, 4a, a driving motor, 4b, a motor seat, 4c, a gear, 4d, a rack, 4e, a lifting seat, 4f, a guide rod group, 4g, a limiting seat, 4g1, a limiting sensing rail seat, 4h, a guide sliding rail, 5, a sealing component, 5a, a sealing ring, 5a1, an upper sealing strip, 5a2, a lower sealing magnetic ring, 5a3, magnetic powder, 5b, a compression ring strip, 5c, a rotating shaft, 5d, a clamping and pressing mechanism, 5d1, a cross pin, 5d2, a spring, 5e, a magnetic ring, 5e1 and an expansion nail.
Detailed Description
The following description is presented to enable one of ordinary skill in the art to make and use the invention. The preferred embodiments in the following description are by way of example only and other obvious variations will occur to those skilled in the art.
As shown in fig. 1 to 8, the following preferred technical solutions are provided:
a soldering vacuum oven comprising: the upper vacuum furnace 1 and the lower vacuum furnace 2, the upper vacuum furnace 1 is opposite to the lower vacuum furnace 2, a vacuum cavity 3 is arranged in the upper vacuum furnace 1, the vacuum cavity 3 is in butt joint sealing with the lower vacuum furnace 2 through a cavity driving component 4 and a sealing component 5, the cavity driving component 4 is arranged at the top of the outer side of the upper vacuum furnace 1, the sealing component 5 is arranged at one end of the vacuum cavity 3 opposite to the lower vacuum furnace 2, the cavity driving component 4 is fixedly connected with the upper end of the vacuum cavity 3, the sealing component 5 comprises a sealing ring 5a and a compression ring strip 5b, the sealing ring 5a is arranged at one end of the vacuum cavity 3 opposite to the lower vacuum furnace 2 and in sealing connection with an inner cavity of the lower vacuum furnace 2, and the compression ring strip 5b is in butt joint with one end of the sealing ring 5a away from the lower vacuum furnace 2.
Specifically, in order to solve the technical problems of sealing between an upper vacuum furnace 2 and a lower vacuum furnace 2 and quick disassembly and replacement of a sealing structure, the invention utilizes the cavity driving assembly 4 to drive the vacuum cavity 3 through the matching butt joint between the upper vacuum furnace 1 and the lower vacuum furnace 2, the vacuum cavity 3 is abutted against the inner cavity of the lower vacuum furnace 2, the vacuum cavity 3 is sealed through the matching of the sealing assembly 5 on the vacuum cavity 3, the sealing assembly 5 can realize quick replacement of the sealing ring 5a, the tightness between the sealing ring 5a and the vacuum cavity 3 is improved, the problem of high cost caused by integral replacement of the vacuum cavity 3 and the sealing structure is solved, and the production efficiency is improved.
As shown in fig. 9 to 14, the following preferred technical solutions are provided:
the sealing ring 5a comprises an upper sealing strip 5a1 and a lower sealing magnetic ring 5a2, the upper sealing strip 5a1 and the lower sealing magnetic ring 5a2 are integrally formed, the upper sealing strip 5a1 is arranged at the butt joint end of the vacuum cavity 3 and the lower vacuum furnace 2 through a sealing groove 3a, and the sealing groove 3a is arranged at one end of the vacuum cavity 3 opposite to the lower vacuum furnace 2.
The lower sealing magnetic ring 5a2 is located at the bottom of the sealing groove 3a, the lower sealing magnetic ring 5a2 is connected with the sealing groove 3a through a magnetic ring 5e, and powder, such as iron powder, magnetic powder 5a3 and the like, which can be magnetically connected with the magnetic ring 5e is placed in a hollow ring formed by the lower sealing magnetic ring 5a2.
Specifically, in order to solve the technical problem of connection between the sealing ring 5a and the vacuum cavity 3, the sealing groove 3a is arranged on the vacuum cavity 3, so that the sealing ring 5a is installed, meanwhile, the sealing ring 5a is clamped and magnetically attracted in the sealing groove 3a by utilizing the unique structure of the sealing ring 5a and the magnetic ring 5e, and when the sealing ring 5a needs to be replaced, the sealing ring 5a can be directly pulled out of the sealing groove 3a by placing powder of magnetic materials, such as magnetic powder 5a3, iron powder and the like, in a hollow ring formed by the lower sealing magnetic ring 5a2 of the sealing ring 5a, and the sealing ring 5a is adsorbed on the magnetic ring 5e at the bottom of the sealing groove 3a.
As shown in fig. 10 to 14, the following preferred technical solutions are provided:
one side of the magnetic ring 5e far away from the lower sealing magnetic ring 5a2 is provided with a plurality of expansion nails 5e1, all expansion nails 5e1 are connected with the bottom of the sealing groove 3a through expansion holes 3b, and the expansion holes 3b are arranged at the bottom of the sealing groove 3a and are opposite to the expansion nails 5e1.
Specifically, in order to solve the installation problem between the magnetic ring 5e and the sealing groove 3a, the invention fixes the magnetic ring 5e at the bottom of the sealing groove 3a by arranging a plurality of expansion nails 5e1 at one end of the magnetic ring 5e and matching with expansion holes 3b formed at the bottom of the sealing groove 3a, so as to prevent the magnetic ring 5e from being pulled out of the sealing groove 3a together due to the magnetic connection between the magnetic ring 5e and the magnetic powder 5a3 in the lower sealing magnetic ring 5a2 when the sealing ring 5a is replaced.
As shown in fig. 12 to 15, the following preferred technical solutions are provided:
the clamping ring strips 5b are four groups and are respectively arranged around the vacuum cavity 3 through rotating shafts, one end of each clamping ring strip 5b can be abutted against the lower sealing magnetic ring 5a2 of the corresponding sealing ring 5a, the clamping ring strips 5b are connected with the vacuum cavity 3 through clamping mechanisms 5d, and the clamping mechanisms 5d are arranged around the vacuum cavity 3.
Specifically, in order to further improve the sealing effect between the sealing ring 5a and the vacuum cavity 3, the lower sealing magnetic ring 5a2 and the magnetic ring 5e of the sealing ring 5a are tightly pressed by matching the clamping mechanism 5d and the compression ring strip 5b, the lower sealing magnetic ring 5a2 is pressed by the compression ring strip 5b, the lower sealing magnetic ring 5a2 is deformed, the magnetic connection between the internal magnetic powder 5a3 and the magnetic ring 5e is increased, and meanwhile, the deformation clamping joint is formed at the joint of the end part of the compression ring strip 5b and the upper sealing strip 5a1 as well as the lower sealing magnetic ring 5e, so that the sealing ring 5a is further clamped.
As shown in fig. 10 to 14, the following preferred technical solutions are provided:
the clamping mechanism 5d comprises a plurality of cross pins 5d1, each cross pin 5d1 is movably mounted around the cavity opening of the vacuum cavity 3 through a pin hole 3c, the upper end and the lower end of each cross pin 5d1 can extend out of the corresponding pin hole 3c, one end, close to the compression ring strip 5b, of each cross pin 5d1 can be connected with the compression ring strip 5b, the corresponding pin holes 3c are uniformly formed in the periphery of the cavity opening of the vacuum cavity 3, and the cross pins 5d1 are connected with the corresponding pin holes 3c through springs 5d 2.
Specifically, in order to solve the technical problem that the pressure ring strip 5b is connected with the lower sealing magnetic ring 5a2, the pressure ring strip 5b is pressed against the lower sealing magnetic ring 5a2 through the cross pin 5d1, the cross pin 5d1 and the pressure ring strip 5b can be made of magnetic materials, and synchronous movement of the cross pin 5d1 and the pressure ring strip 5b is realized by connection of the cross pin 5d1 and the pressure ring strip 5 b.
As shown in fig. 14, the following preferred technical scheme is provided:
each spring 5d2 is sleeved at the lower end of the corresponding cross pin 5d1, and two ends of each spring 5d2 are respectively abutted with the middle part of the cross pin 5d1 and the bottom of the pin hole 3 c;
when the vacuum cavity 3 is not in contact with the lower vacuum furnace 2, the spring 5d2 is in an extended state, the spring 5d2 jacks up the cross pin 5d1, the upper end of the cross pin 5d1 extends out of the pin hole 3c, and the lower end of the cross pin 5d1 retracts and pulls the compression ring strip 5b, so that the compression ring strip 5b is not in contact with the lower sealing magnetic ring 5a 2;
when the vacuum chamber 3 is in contact with the lower vacuum furnace 2, the end part of the lower vacuum furnace 2 presses the upper end of the extended cross pin 5d1, the cross pin 5d1 compresses the spring 5d2, and the lower end of the cross pin 5d1 simultaneously pushes the compression ring strip 5b to press the lower sealing magnetic ring 5a2.
Specifically, in order to solve the technical problems of tight extension and resetting of the cross pin 5d1, the invention realizes the linkage among the cross pin 5d1, the compression ring strip 5b and the lower sealing magnetic ring 5a2 by the contact of the lower vacuum furnace 2 and the vacuum cavity 3 through the cooperation of the spring 5d2 and the cross pin 5d 1.
As shown in fig. 2 and 11, the following preferred technical solutions are provided:
the cavity driving assembly 4 comprises a driving motor 4a and a lifting seat 4e, the driving motor 4a is fixedly arranged at the top of the upper vacuum furnace 1 through a motor seat 4b, the lifting seat 4e is connected with the driving motor 4a through a gear 4c and a rack 4d, the gear 4c is fixedly arranged at the output end of the driving motor 4a, the rack 4d is vertically arranged at one side of the lifting seat 4e, and the lifting seat 4e is connected with the top of the upper vacuum furnace 1 through a guide rod group 4 f; the upper end of the guide rod group 4f is fixedly connected with the lifting seat 4e, and the lower end of the guide rod group 4f passes through the upper vacuum furnace 1 and is fixedly connected with the top of the vacuum cavity 3.
When the driving motor 4a rotates positively, the driving motor 4a drives the gear 4c to rotate positively, the gear 4c and the rack 4d are meshed for transmission, and then the lifting seat 4e and the guide rod of the guide rod group 4f are driven to move downwards, and the guide rod of the guide rod group 4f pushes the vacuum cavity 3 to approach the downward vacuum furnace 2;
conversely, the driving motor 4a is reversed, and the vacuum chamber 3 is lifted upward and separated from the lower vacuum furnace 2.
The lifting seat 4e is provided with a limiting seat 4g relative to one side of the driving motor 4a, the limiting seat 4g is connected with the lifting seat 4e through a guide sliding rail 4h and two limiting sensing rail seats 4g1, the guide sliding rail 4h is fixedly arranged on one surface of the lifting seat 4e relative to the rack 4d, the two limiting sensing rail seats 4g1 are respectively arranged at the upper end and the lower end of the limiting seat 4g, and the guide sliding rail 4h can be in sliding connection with the two limiting sensing rail seats 4g 1.
Specifically, in order to solve the problem of up-and-down movement of the vacuum chamber 3 and the matching between the vacuum chamber 3 and the lower vacuum furnace 2, the invention realizes the matching between the vacuum chamber 3 and the lower vacuum furnace 2 through the chamber driving assembly 4, and the travel of the vacuum chamber 3 is limited through the connection of the two limit sensing rail seats 4g1 and the guide sliding rail 4h, so that the extrusion between the vacuum chamber 3 and the lower vacuum furnace 2 caused by excessive movement is prevented, and the sealing assembly 5 is damaged.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made therein without departing from the spirit and scope of the invention, which is defined by the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. A soldering vacuum furnace, comprising: go up vacuum furnace (1) and lower vacuum furnace (2), go up vacuum furnace (1) and just to vacuum furnace (2) down, install vacuum chamber (3) in going up vacuum furnace (1), vacuum chamber (3) are sealed through cavity drive assembly (4) and seal assembly (5) and lower vacuum furnace (2) butt joint, outside top at last vacuum furnace (1) is installed in cavity drive assembly (4), seal assembly (5) are installed in vacuum chamber (3) just to the one end of vacuum furnace (2) down, cavity drive assembly (4) and the upper end fixed connection of vacuum chamber (3), seal assembly (5) include sealing washer (5 a) and clamping ring strip (5 b), sealing washer (5 a) are installed in vacuum chamber (3) just to the one end of vacuum furnace (2) down and with the inner chamber sealing connection of vacuum furnace (2) down, one end butt joint of keeping away from vacuum furnace (2) with sealing washer (5 a).
2. The soldering vacuum furnace according to claim 1, wherein the sealing ring (5 a) comprises an upper sealing strip (5 a 1) and a lower sealing magnetic ring (5 a 2), the upper sealing strip (5 a 1) and the lower sealing magnetic ring (5 a 2) are integrally formed, the upper sealing strip (5 a 1) is installed at the butt joint end of the vacuum cavity (3) and the lower vacuum furnace (2) through a sealing groove (3 a), and the sealing groove (3 a) is arranged at one end of the vacuum cavity (3) opposite to the lower vacuum furnace (2).
3. A soldering vacuum furnace according to claim 2, characterized in that the lower sealing magnetic ring (5 a 2) is positioned at the bottom of the sealing groove (3 a), the lower sealing magnetic ring (5 a 2) is connected with the sealing groove (3 a) through a magnetic ring (5 e), and powder, such as iron powder, magnetic powder (5 a 3) and the like, which can be magnetically connected with the magnetic ring (5 e) is placed in a hollow ring formed by the lower sealing magnetic ring (5 a 2).
4. A soldering vacuum furnace according to claim 3, characterized in that a plurality of expansion nails (5 e 1) are arranged on one side of the magnetic ring (5 e) far away from the lower sealing magnetic ring (5 a 2), all expansion nails (5 e 1) are connected with the bottom of the sealing groove (3 a) through expansion holes (3 b), and the expansion holes (3 b) are arranged at the bottom of the sealing groove (3 a) and are opposite to the expansion nails (5 e 1).
5. The soldering vacuum furnace according to claim 1, wherein the number of the press ring strips (5 b) is four, the press ring strips are respectively arranged on the periphery of the vacuum chamber (3) through rotating shafts, one end of each press ring strip (5 b) can be abutted with the lower sealing magnetic ring (5 a 2) of the sealing ring (5 a), the press ring strips (5 b) are connected with the vacuum chamber (3) through clamping mechanisms (5 d), and the clamping mechanisms (5 d) are arranged on the periphery of the vacuum chamber (3).
6. The soldering vacuum furnace according to claim 5, wherein the clamping mechanism (5 d) comprises a plurality of cross pins (5 d 1), each cross pin (5 d 1) is movably mounted around the cavity opening of the vacuum cavity (3) through a pin hole (3 c), the upper end and the lower end of each cross pin (5 d 1) can extend out of the corresponding pin hole (3 c), one end, close to the compression ring strip (5 b), of each cross pin (5 d 1) can be connected with the compression ring strip (5 b), the pin holes (3 c) are uniformly formed around the cavity opening of the vacuum cavity (3), and the cross pins (5 d 1) are connected with the pin holes (3 c) through springs (5 d 2).
7. The soldering vacuum furnace according to claim 6, wherein each spring (5 d 2) is sleeved at the lower end of the corresponding cross pin (5 d 1), and two ends of the spring (5 d 2) are respectively abutted with the middle part of the cross pin (5 d 1) and the bottom of the pin hole (3 c);
when the vacuum cavity (3) is not in contact with the lower vacuum furnace (2), the spring (5 d 2) is in an extension state, the spring (5 d 2) jacks up the cross pin (5 d 1), the upper end of the cross pin (5 d 1) extends out of the pin hole (3 c), and the lower end of the cross pin (5 d 1) retracts and pulls the compression ring strip (5 b) so that the compression ring strip (5 b) is not in contact with the lower sealing magnetic ring (5 a 2);
when the vacuum cavity (3) is in contact with the lower vacuum furnace (2), the end part of the lower vacuum furnace (2) extrudes the upper end of the extended cross pin (5 d 1), the cross pin (5 d 1) compresses the spring (5 d 2), and the lower end of the cross pin (5 d 1) pushes the compression ring strip (5 b) to extrude the lower sealing magnetic ring (5 a 2).
8. The soldering vacuum furnace according to claim 1, wherein the cavity driving assembly (4) comprises a driving motor (4 a) and a lifting seat (4 e), the driving motor (4 a) is fixedly arranged at the top of the upper vacuum furnace (1) through a motor seat (4 b), the lifting seat (4 e) is connected with the driving motor (4 a) through a gear (4 c) and a rack (4 d), the gear (4 c) is fixedly arranged at the output end of the driving motor (4 a), the rack (4 d) is vertically arranged at one side of the lifting seat (4 e), and the lifting seat (4 e) is connected with the top of the upper vacuum furnace (1) through a guide rod group (4 f);
when the driving motor (4 a) rotates positively, the driving motor (4 a) drives the gear (4 c) to rotate positively, the gear (4 c) and the rack (4 d) are meshed for transmission, and then the lifting seat (4 e) and the guide rods of the guide rod group (4 f) are driven to move downwards, and the guide rods of the guide rod group (4 f) push the vacuum cavity (3) to approach the vacuum furnace (2);
otherwise, the driving motor (4 a) is reversed, so that the vacuum cavity (3) is lifted upwards and separated from the lower vacuum furnace (2).
9. The soldering vacuum furnace according to claim 8, wherein the upper end of the guide rod group (4 f) is fixedly connected with the lifting seat (4 e), and the lower end of the guide rod group (4 f) penetrates through the upper vacuum furnace (1) to be fixedly connected with the top of the vacuum cavity (3).
10. The soldering vacuum furnace according to claim 8, wherein a limit seat (4 g) is installed on one side of the lifting seat (4 e) opposite to the driving motor (4 a), the limit seat (4 g) is connected with the lifting seat (4 e) through a guide sliding rail (4 h) and two limit sensing rail seats (4 g 1), the guide sliding rail (4 h) is fixedly installed on one surface of the lifting seat (4 e) opposite to the rack (4 d), the two limit sensing rail seats (4 g 1) are respectively installed at the upper end and the lower end of the limit seat (4 g), and the guide sliding rail (4 h) can be in sliding connection with the two limit sensing rail seats (4 g 1).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310173674.0A CN116000401B (en) | 2023-02-24 | 2023-02-24 | Soldering vacuum furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310173674.0A CN116000401B (en) | 2023-02-24 | 2023-02-24 | Soldering vacuum furnace |
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| CN116000401A true CN116000401A (en) | 2023-04-25 |
| CN116000401B CN116000401B (en) | 2023-09-12 |
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| CN203962461U (en) * | 2014-07-29 | 2014-11-26 | 上海汇森益发工业炉有限公司 | The seal arrangement of the cooling blower fan of vacuum furnace |
| CN211202867U (en) * | 2019-11-06 | 2020-08-07 | 东莞市健时自动化设备有限公司 | Vacuum furnace sealing structure of reflow soldering machine |
| CN113492244A (en) * | 2020-03-20 | 2021-10-12 | 上海朗仕电子设备有限公司 | External transmission mechanism for vacuum reflow soldering furnace |
| CN212930933U (en) * | 2020-06-04 | 2021-04-09 | 安徽宁磁电子科技有限公司 | Vacuum furnace for sintering high-performance samarium cobalt permanent magnet material |
| CN213747810U (en) * | 2020-10-09 | 2021-07-20 | 沈阳沈真真空技术有限责任公司 | Small part sealing structure of vacuum furnace |
| CN213454948U (en) * | 2020-10-21 | 2021-06-15 | 武汉市广源宏达实业有限公司 | Sealing structure for multi-chamber vacuum furnace |
| CN214291291U (en) * | 2020-12-29 | 2021-09-28 | 康耐威(苏州)半导体科技有限公司 | High-weather-resistance vacuum mechanism for reflow oven |
| CN216347719U (en) * | 2021-12-17 | 2022-04-19 | 抚顺荣盛机械制造有限公司 | Vacuum furnace with strong sealing performance |
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