CN115955610A - Filter device, video spectral imaging system and preparation method thereof - Google Patents
Filter device, video spectral imaging system and preparation method thereof Download PDFInfo
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- CN115955610A CN115955610A CN202211564644.4A CN202211564644A CN115955610A CN 115955610 A CN115955610 A CN 115955610A CN 202211564644 A CN202211564644 A CN 202211564644A CN 115955610 A CN115955610 A CN 115955610A
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- 238000000701 chemical imaging Methods 0.000 title claims abstract description 29
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 50
- 239000004038 photonic crystal Substances 0.000 claims description 50
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 48
- 239000000377 silicon dioxide Substances 0.000 claims description 25
- 239000004408 titanium dioxide Substances 0.000 claims description 24
- 235000012239 silicon dioxide Nutrition 0.000 claims description 23
- 230000003595 spectral effect Effects 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 15
- 238000000231 atomic layer deposition Methods 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- 150000002484 inorganic compounds Chemical class 0.000 claims description 7
- 229910010272 inorganic material Inorganic materials 0.000 claims description 7
- 238000001228 spectrum Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 abstract description 17
- 230000010354 integration Effects 0.000 abstract description 4
- 238000001914 filtration Methods 0.000 description 18
- 238000002834 transmittance Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000010183 spectrum analysis Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
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Abstract
The invention belongs to an imaging system, and aims to solve the problems that a light splitting device in a traditional spectral imaging system is large in self space volume, and the assembly between the light splitting device and an objective lens system and a receiving system can further increase the volume, complicate the structure and reduce the integration degree of the spectral imaging system. In the preparation method of the imaging system, the filter device can be directly processed on the detector.
Description
Technical Field
The invention belongs to an imaging system, and particularly relates to a filter device, a video spectral imaging system and a preparation method thereof.
Background
In the common color imaging technology, each pixel point comprises information of three spectral bands of red, green and blue, so that the color information of a target can be identified and restored, and the shape information of the target is further constructed. Multispectral imaging techniques are on top of the common color imaging techniques and contain more information that the human eye cannot observe. In the hyperspectral imaging technology, longitudinal one-dimensional spectral information and transverse two-dimensional spatial image information are collected simultaneously, a data cube is constructed, characteristics such as materials and components of target objects at corresponding positions can be identified by analyzing the spectral information on each pixel point, the positions and moving paths of the target objects can be identified rapidly, visually in real time according to the imaged image spatial information, the analysis has deeper and wider advantages due to the characteristic of map integration, and the hyperspectral imaging method is widely applied to the aspects of remote sensing technology, agricultural science, biotechnology, space exploration, food safety and the like.
Compared with a common color imaging system, the multispectral imaging system needs a spectral modulation device with stronger working capacity, so that channels for collecting spectral information are increased. Conventional spectrometers and spectral imaging systems typically employ a prism, grating, interferometer or filter turret as the light splitting device. However, these beam splitting devices are limited by the operation principle and the device size, and have a large spatial volume, and the assembly of the beam splitting devices with the objective lens system and the receiving system further increases the volume of the spectral imaging system, makes the structure more complicated, and reduces the integration level. With the development of modern microelectronic technology, the size of various common devices is continuously reduced, and a miniaturized and on-chip integrated spectral imaging system will become one of the mainstream of the development of the spectral imaging technology in the future.
Disclosure of Invention
The invention provides a filter device, a video spectral imaging system and a preparation method thereof, aiming at solving the technical problems that the volume of a light splitting device in the traditional spectrometer and the spectral imaging system is large, and the assembly of the light splitting device with an objective lens system and a receiving system can further increase the volume of the spectral imaging system, complicate the structure and reduce the integration level.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
a filter device is characterized by comprising a plurality of filter structures, wherein each filter structure comprises an upper reflector, a resonant cavity and a lower reflector which are sequentially attached from top to bottom;
the upper reflector and the lower reflector are both Bragg reflectors, and the structures of the upper reflector and the lower reflector are mirror-symmetrical about the resonant cavity; n groups of photonic crystal structures are filled in the resonant cavity, N is an integer larger than 1, each group of photonic crystal structures correspondingly forms a spectrum channel, and the filling rates of the photonic crystal structures in the resonant cavity are different;
and inorganic compounds are filled in gaps of the photonic crystal structure in the resonant cavity.
Further, the materials of the photonic crystal structures of the groups are different.
Further, the heights of all photonic crystal structures are the same.
Furthermore, the upper reflector comprises five silicon dioxide layers and five titanium dioxide layers, wherein the silicon dioxide layers and the titanium dioxide layers are alternately arranged in sequence, and the silicon dioxide layer is positioned on the outermost side.
Further, the thickness of the silicon dioxide layer is the same as that of the titanium dioxide layer, and the silicon dioxide layer and the titanium dioxide layer are both one fourth of the working wavelength of the resonant cavity.
Further, the inorganic compound is silica.
Meanwhile, the invention provides a video spectral imaging system which is characterized by comprising an objective lens module, a detector and the filter device;
the objective module is positioned above the upper reflector of the filter device, a gap is reserved between the lower surface of the objective module and the upper surface of the upper reflector, and the objective module is used for converging and collimating reflected light of a target to be measured and then transmitting the reflected light to the upper reflector of the filter device;
the lower reflecting mirror is attached to the receiving surface of the detector.
Correspondingly, the invention also provides a preparation method of the video spectral imaging system, which is characterized by comprising the following steps of:
s1, preparing a lower reflecting mirror on a receiving surface of a detector by adopting an atomic layer deposition method;
s2, respectively etching photonic crystal structures with different filling rates on the upper surface of the lower reflector corresponding to the spectral channels in the filtering structures by adopting an electron beam etching method, and filling inorganic compounds in gaps of all the photonic crystal structures to obtain a resonant cavity positioned above the lower reflector;
s3, preparing an upper reflector on the upper surface of the resonant cavity by adopting an atomic layer deposition method;
and S4, installing an objective lens module above the upper reflector, and enabling a gap to be reserved between the lower surface of the objective lens module and the upper surface of the upper reflector so as to finish the preparation of the video spectral imaging system.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention provides a filter device, wherein an upper reflector and a lower reflector are Bragg reflectors, an F-P cavity is formed by the Bragg reflectors and a resonant cavity, a photonic crystal structure is filled in the resonant cavity, a plurality of spectrum channels are arranged in each filter structure, the filling rates of the photonic crystal structures corresponding to the spectrum channels in the resonant cavity are different, the integral filtering capacity of the filter device can be changed by regulating and controlling the filling rate of the photonic crystal structure, and compared with the existing on-chip step type and mosaic type filters, the processing difficulty is reduced to a certain extent.
2. The photonic crystal structures of all groups are made of different materials, so that the working bandwidth of the filter can be effectively expanded.
3. All the photonic crystal structures in the invention have the same height, so that the filtering structure has no complex structure in the longitudinal direction, and the complexity of the filtering structure is further simplified while the filtering effect is ensured.
4. The upper reflector and the lower reflector both adopt the silicon dioxide layer and the titanium dioxide layer, the absorption of the two materials in visible or near-infrared wave bands is extremely low and negligible, so that the transmittance of the filter device can reach more than 98%, and the half-height width of transmitted wind can be further reduced by matching with a multilayer structure, so that the spectral resolution of the filter device is further improved.
5. The invention also provides a video spectral imaging system, which combines a spectral analysis system and a snapshot imaging system, can acquire information of a target in real time, has simple structure, improves the transmittance and the resolution to a certain extent while realizing multispectral imaging, and can change the working spectral band of the filter by using the filter under the condition that the imaging system only adjusts partial structural parameters. The imaging system has the potential of being suitable for various scenes, and can be used as a spectral analysis instrument under certain conditions through structural design.
6. Correspondingly, the invention also provides a preparation method of the imaging system, the integral preparation method is adopted, the filter can be directly processed on the detector, the later assembly process is avoided, and the processing error possibly caused by the later assembly is avoided to a certain extent.
Drawings
FIG. 1 is a schematic diagram of a video spectral imaging system according to the present invention;
FIG. 2 is a schematic diagram of a filter structure in an embodiment of a filter device according to the invention;
FIG. 3 is a schematic diagram of different filling ratios of photonic crystal structures in various groups in an embodiment of a filter device according to the present invention;
FIG. 4 is a schematic diagram of a filter device embodiment of the present invention including four spectral channels;
FIG. 5 is a schematic diagram of a video spectral imaging system in which a filter device includes nine filter structures, each filter structure including nine spectral channels, according to an embodiment of the present invention;
fig. 6 is a schematic diagram illustrating a transmittance simulation result of an embodiment of a video spectral imaging system according to the present invention.
Wherein: the device comprises an objective lens module 1, a filter 2, a detector 3, a filter 4, an upper reflector 5, a resonant cavity 6, a lower reflector 7, a reflector 8, a silicon dioxide layer 9, a titanium dioxide layer 10 and a photonic crystal structure 11.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
As shown in fig. 1, the present invention provides a multispectral video imaging system with high transmittance and high resolution for visible light or near-infrared band light, which includes an objective module 1, a filter 2 and a detector 3. The objective lens module 1 is used for collecting reflected light of an external target to be measured as incident light of the imaging system, the objective lens module 1 gathers and collimates the incident light to a certain degree, transmits the incident light to the filter device 2 after gathering and collimating, splits the incident light through the filter device 2, and finally receives the incident light by the detector 3. The entire structure may be encapsulated to maintain its stability. The filter device 2 comprises a resonant cavity 6 composed of Bragg resonance based on photonic crystal regulation and control, and is used for replacing a traditional optical filter, and the filter characteristic of the filter device is changed by adjusting the filling rate of a photonic crystal structure 11 in the resonant cavity 6, so that the establishment of a multispectral channel is realized.
The filter device 2 comprises a plurality of filter structures 4, and each filter structure 4 corresponds to one pixel. As shown in fig. 2, the filter structure 4 includes an upper mirror 5, a resonant cavity 6 and a lower mirror 7, in a specific embodiment of the present invention, the upper mirror 5 and the lower mirror 7 are both composed of a titanium dioxide layer 10 and a silicon dioxide layer 9 alternately, which respectively form bragg mirrors, and have a good reflection effect and can achieve an effect of increasing reflectivity to a certain extent. As a preferred scheme, the upper reflector 5 and the lower reflector 7 are formed by alternately stacking five silicon dioxide layers 9 and five titanium dioxide layers 10 in sequence, one silicon dioxide layer 9 and one titanium dioxide layer 10 form a group of reflector structures 8, that is, the upper reflector 5 and the lower reflector 7 both include five groups of reflector structures 8, and the outermost layer is a silicon dioxide layer 9, the resonant cavity 6 is located between the titanium dioxide located at the lowermost layer in the upper reflector 5 and the titanium dioxide located at the uppermost layer in the lower reflector 7, so that the resonant cavity 6 is located between the upper reflector 5 and the lower reflector 7, and the lower surface of the lower reflector 7 is attached to the upper surface of the detector 3. In other embodiments of the present invention, the order of the silicon dioxide layer 9 and the titanium dioxide layer 10 can be adjusted, and whether the silicon dioxide layer 9 or the titanium dioxide layer 10 is located at the outermost side can be adjusted, as long as the lower mirror 7 and the upper mirror 5 have the same structure and are mirror-symmetrical about the resonator 6. The filter structure 4 composed of the upper reflector 5, the lower reflector 7 and the resonant cavity 6 actually forms a fabry-perot (F-P) cavity. The upper reflector 5 and the lower reflector 7 can be prepared by using an atomic layer deposition method and can be directly processed on the detector 3, so that the integrated processing of the filter and the detector 3 is realized.
The titanium dioxide sub-wavelength photonic crystal structure 11 is filled in the resonant cavity 6, under the condition that the height of the photonic crystal structure 11 is not changed, the transverse filling rate of the photonic crystal structure 11 can be controlled, the transverse filling rate can be adjusted by changing the period and characteristic dimension parameters of the photonic crystal structure 11, the effective refractive index of the resonant cavity 6 is further controlled, the change of the effective refractive index in the resonant cavity 6 can cause the change of the resonant frequency of the resonant cavity, the filtering capability of the filtering structure 4 is changed, and the processing process is effectively simplified. As shown in fig. 3, the filling ratio of each set of photonic crystal structures 11 is different for different spectral channels in the resonant cavity 6 of one filtering structure 4, and the material of each set of photonic crystal structures 11 is also different in the embodiment shown in fig. 3. When the period size of the photonic crystal structure 11 is smaller than half of the selected wavelength, the specific structure of the photonic crystal structure 11 only affects the effective refractive index of the photonic crystal structure, and the effective refractive index of the photonic crystal layer can be controlled within a range by regulating and controlling the filling rate of the photonic crystal superstructure.
The titanium dioxide sub-wavelength photonic crystal structure 11 filled in the resonant cavity 6 of each filtering structure 4 further comprises spectral channels of N wave bands, wherein N is greater than 1 and is an integer, the N spectral channels form a mosaic-type multispectral filtering structure 4, one mosaic-type multispectral filtering structure 4 is regarded as an image element, and a plurality of filtering structures 4 are integrated to form a filtering device 2, so that the imaging effect is achieved.
In other embodiments of the present invention, the material of the photonic crystal structure 11 may also be other materials than titanium dioxide, and may be specifically selected according to the use scenario and the actual processing specific application. In addition, the material of the photonic crystal structure 11 may also be a plurality of materials to expand the working bandwidth of the filter structure 4, for example, the photonic crystal structure 11 of silicon material is introduced into the infrared band. When the materials of the photonic crystal structure 11 in the upper reflector 5 and the resonant cavity 6 and the material of the lower reflector 7 are selected, the material with high transmittance can be selected as much as possible, and in principle, the overall transmittance of the filter device 2 should be greater than or equal to 90%. In addition, the optical thickness of the titanium dioxide layer 10 and the silicon dioxide layer 9 is 1/4 of the working wavelength of the selected resonant cavity 6, and if the optical thickness is changed to other materials, the optical thickness can be correspondingly adopted.
Therefore, the filter structure 4 in the invention is an F-P cavity formed by a Bragg resonant filter based on photonic crystal regulation, the filtering performance of the F-P cavity is influenced by the effective refractive index in the resonant cavity 6, and the filtering characteristic of the F-P cavity, namely the transmission peak of the filter, can be regulated and controlled by regulating and controlling the filling rate of the photonic crystal structure 11 after the sub-wavelength photonic crystal structure 11 is added into the resonant cavity 6. In addition, the working waveband of the filter device 2 is related to the optical thicknesses of titanium dioxide and silicon dioxide, and the working area can be flexibly changed by adjusting the optical thicknesses of the titanium dioxide and the silicon dioxide, so that the working area can cover the visible light and infrared light waveband ranges.
As shown in fig. 4, an embodiment of the filter device 2 of the present invention includes a plurality of filter structures 4, each filter structure 4 includes four spectral channels, the photonic crystal structures 11 in the spectral channels have the same height, and only the period is different from the characteristic size, so that the filter structure 4 is manufactured without a complex structure in the longitudinal direction.
When a video spectral imaging system is prepared, a filtering structure 4 can be directly deposited on a detector 3, the filtering structure 4 is specific, an atomic layer deposition method is used for preparing a lower reflector 7 on the surface of the detector 3, an electron beam etching method is used for etching the upper surface of the lower reflector 7, for different spectral channels, the required sub-wavelength photonic crystal structure 11 is etched in the areas corresponding to different spectral channels, the period and the characteristic dimension of the photonic crystal structure 11 corresponding to each spectral channel are different, after the etching is finished, the atomic layer deposition technology is used for filling silicon dioxide in the photonic crystal gap, a resonant cavity 6 is obtained after the filling is finished, and an upper reflector 5 is prepared on the upper surface of the resonant cavity 6 by using the atomic layer deposition method, so that the filtering structure 4 is obtained. The filter device 2 is manufactured in its entirety by integrating a plurality of filter structures 4. The filling of photonic crystal gaps in the upper reflector 5, the lower reflector 7 and the resonant cavity 6 of each filter structure 4 is consistent. In other embodiments of the present invention, the material filled in the photonic crystal gap may be other inorganic compounds.
Fig. 5 is a schematic diagram of a filter structure 4 with N =9 and a filter device 2 including 9 filter structures 4, where the filter structures 4 corresponding to multiple pixels are integrated on the upper surface of the detector 3 to form a mosaic-type imaging structure, and each pixel in the mosaic-type imaging structure is a single pixel having N spectral channel outputs. The imaging effect of high image resolution is realized by integrating a large number of filter structures 4 which are arranged on the detector 3, and the real-time video hyperspectral imaging of visible or near-infrared wave bands can be realized by means of the real-time imaging function of the detector 3. The detector 3 may employ a CCD detector 3 or a CMOS detector 3.
As shown in fig. 6, a diagram showing simulation results of the transmission peak of the filter device 2 shown in fig. 5 is shown, in which the abscissa represents the wavelength band and the ordinate represents the transmittance. Because the materials specifically selected for the upper reflector 5 and the lower reflector 7 of the filter device 2 are titanium dioxide and silicon dioxide, the absorption of the two materials in the visible or near-infrared band is extremely low and negligible, the transmittance of the filter device 2 prepared from the materials can reach more than 98% theoretically, and the filter device has extremely high transmittance, and the existence of the plurality of layers of Bragg reflectors further reduces the half-height width of the transmission peak, so that the spectral resolution of the filter device 2 is further improved.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A filter device, characterized in that: the filter structure comprises a plurality of filter structures (4), wherein each filter structure (4) comprises an upper reflector (5), a resonant cavity (6) and a lower reflector (7) which are sequentially attached from top to bottom;
the upper reflector (5) and the lower reflector (7) are Bragg reflectors, and the structures of the upper reflector (5) and the lower reflector (7) are mirror-symmetrical about the resonant cavity (6); n groups of photonic crystal structures (11) are filled in the resonant cavity (6), N is an integer greater than 1, each group of photonic crystal structures (11) correspondingly form a spectrum channel, and the filling rates of the photonic crystal structures (11) in the resonant cavity (6) are different;
and inorganic compounds are filled in gaps of the photonic crystal structure (11) in the resonant cavity (6).
2. A filter device as claimed in claim 1, wherein: the photonic crystal structures (11) of each group are made of different materials.
3. A filter device as claimed in claim 1 or 2, characterized in that: the heights of all the photonic crystal structures (11) are the same.
4. A filter device according to claim 3, wherein: the upper reflector (5) comprises five silicon dioxide layers (9) and five titanium dioxide layers (10), wherein the silicon dioxide layers (9) and the titanium dioxide layers (10) are sequentially and alternately arranged, and the silicon dioxide layer (9) is positioned on the outermost side.
5. A filter device as claimed in claim 4, wherein: the thickness of the silicon dioxide layer (9) is the same as that of the titanium dioxide layer (10), and the silicon dioxide layer and the titanium dioxide layer are both one fourth of the working wavelength of the resonant cavity (6).
6. A filter device as claimed in claim 5, wherein: the inorganic compound is silica.
7. A video spectral imaging system, characterized by: comprising an objective module (1), a detector (3), and a filter device (2) according to any one of claims 1 to 6;
the objective lens module (1) is positioned above the upper reflector (5) of the filter device (2), a gap is reserved between the lower surface of the objective lens module (1) and the upper surface of the upper reflector (5), and the objective lens module (1) is used for transmitting reflected light of a target to be detected to the upper reflector (5) of the filter device (2) after being converged and collimated;
the lower reflecting mirror (7) is attached to the receiving surface of the detector (3).
8. A method for preparing the video spectral imaging system of claim 7, comprising the steps of:
s1, preparing a lower reflecting mirror (7) on a receiving surface of a detector (3) by adopting an atomic layer deposition method;
s2, respectively etching photonic crystal structures (11) with different filling rates on the upper surface of the lower reflector (7) corresponding to the spectral channels in the filter structures (4) by adopting an electron beam etching method, and filling inorganic compounds in gaps of all the photonic crystal structures (11) to obtain a resonant cavity (6) above the lower reflector (7);
s3, preparing an upper reflector (5) on the upper surface of the resonant cavity (6) by adopting an atomic layer deposition method;
and S4, installing the objective lens module (1) above the upper reflector (5) to enable a gap to be reserved between the lower surface of the objective lens module (1) and the upper surface of the upper reflector (5), and finishing the preparation of the video spectral imaging system.
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| CN202211564644.4A CN115955610A (en) | 2022-12-07 | 2022-12-07 | Filter device, video spectral imaging system and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116539155A (en) * | 2023-07-04 | 2023-08-04 | 徐州光引科技发展有限公司 | Spectral filter and spectrometer based on multistage resonant cavity structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116539155A (en) * | 2023-07-04 | 2023-08-04 | 徐州光引科技发展有限公司 | Spectral filter and spectrometer based on multistage resonant cavity structure |
| CN116539155B (en) * | 2023-07-04 | 2023-09-15 | 徐州光引科技发展有限公司 | Spectral filter and spectrometer based on multistage resonant cavity structure |
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