CN115955141A - Integrated two-degree-of-freedom stepping actuator based on piezoelectric drive - Google Patents
Integrated two-degree-of-freedom stepping actuator based on piezoelectric drive Download PDFInfo
- Publication number
- CN115955141A CN115955141A CN202310240908.9A CN202310240908A CN115955141A CN 115955141 A CN115955141 A CN 115955141A CN 202310240908 A CN202310240908 A CN 202310240908A CN 115955141 A CN115955141 A CN 115955141A
- Authority
- CN
- China
- Prior art keywords
- guide rail
- flexible
- piezoelectric
- degree
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The application discloses step-by-step executor of two degrees of freedom of integrated form based on piezoelectricity drive relates to piezoelectric motor technical field, including stator, guide rail, actuating mechanism and moving the rotor four bibliographic categories branch, sliding guide includes guide rail A and guide rail B, guide rail A and guide rail B symmetry set up on the flexible mechanism lower surface, guide rail A, guide rail B and flexible mechanism lower surface constitute the guide rail spout, the stator assemble in the guide rail spout, actuating mechanism includes flexible mechanism, piezoceramics A and piezoceramics B, flexible mechanism is including moving rotor mount pad, board type flexible hinge, the flexible hinge of positive circle type and flexible installation frame. The invention utilizes the inverse piezoelectric effect of the two piezoelectric ceramics to push the flexible mechanism to generate periodic deformation, and further drives the movable rotor to generate linear displacement and rotation angle displacement output, thereby realizing linear-rotation two-degree-of-freedom motion.
Description
Technical Field
The invention belongs to the technical field of piezoelectric motors, and particularly relates to an integrated two-degree-of-freedom stepping actuator based on piezoelectric driving.
Background
With the gradual manifestation of the application potential of the single-degree-of-freedom piezoelectric actuator in the technical fields of aerospace, optical instruments, biomedical treatment, integrated circuits and the like, the multiple-degree-of-freedom piezoelectric actuator also becomes a hot spot for research of numerous scientific researchers. The traditional multi-degree-of-freedom actuator mainly uses an electromagnetic motor as a driving force, and the driving mode has low positioning accuracy and electromagnetic interference. Compared with the traditional multi-degree-of-freedom actuator, the multi-degree-of-freedom piezoelectric actuator based on the inverse piezoelectric effect of the piezoelectric material has the advantages of simple structure, quick response, high precision, no magnetic field interference and the like. In addition, the traditional multi-degree-of-freedom actuator needs a plurality of parts to be matched together, the control difficulty is high, and the cost of the micro actuator for realizing power output through a mechanical structure is high.
Disclosure of Invention
The invention aims at the problems that the traditional multi-degree-of-freedom actuator has a complex structure, occupies a large space, is easy to have electromagnetic interference, is difficult to control, and has high cost and the like when a micro actuator for realizing power output through a mechanical structure. The piezoelectric driving based integrated two-degree-of-freedom stepping actuator adopts piezoelectric ceramics as a driving unit according to a stepping principle, can realize linear motion along a guide rail direction and rotary motion of a rotating shaft of a orbiting rotor, and can control the output precision of the actuator by adjusting the screwing degree of an adjusting bolt.
The specific technical scheme is as follows: the integrated two-degree-of-freedom stepping actuator based on piezoelectric driving comprises four parts, namely a stator, a sliding guide rail, a driving mechanism and a moving rotor.
The sliding guide rail comprises a guide rail A and a guide rail B, the guide rail A and the guide rail B are symmetrically arranged on the lower surface of the flexible mechanism, the guide rail A, the guide rail B and the lower surface of the flexible mechanism form a guide rail sliding groove, and the stator is assembled in the guide rail sliding groove;
the drive mechanism comprises a flexible mechanism, a piezoelectric ceramic A and a piezoelectric ceramic B, wherein the flexible mechanism comprises a movable rotor mounting seat, a plate type flexible hinge, a right circular type flexible hinge and a flexible mounting frame, two pairs of plate type flexible hinges are mounted on the inner side of one end of the flexible mounting frame, each pair of plate type flexible hinges form a piezoelectric ceramic mounting groove, the two pairs of plate type flexible hinges are respectively connected with the movable rotor mounting seat through a right circular type flexible hinge, and the movable rotor is mounted on the movable rotor mounting seat.
Furthermore, the two piezoelectric ceramic mounting grooves are symmetrically distributed about the central axis of the flexible mechanism and are respectively positioned on two sides of the movable rotor mounting seat.
Further, the flexible mechanism is integrally processed by a whole block of elastic metal material.
Furthermore, the movable rotor is a part with a rotating shaft, the movable rotor is mounted on the movable rotor mounting seat through the rotating shaft, and the rotating shaft of the movable rotor is in transition fit with the central hole of the movable rotor mounting seat.
Furthermore, a rotating shaft of the moving rotor penetrates through the gasket, the center hole of the rotor mounting seat, the gasket, the elastic ring and the other gasket in sequence and then is matched and locked with the nut.
Furthermore, an adjusting bolt is respectively installed on the outer side surfaces of the guide rail A and the guide rail B.
Furthermore, the driving mechanism further comprises a pre-tightening gasket A, a pre-tightening bolt A, a pre-tightening gasket B and a pre-tightening bolt B, wherein the pre-tightening gasket A and the pre-tightening bolt A are used for adjusting the pre-tightening force of the piezoelectric ceramic A, and the pre-tightening gasket B and the pre-tightening bolt B are used for adjusting the pre-tightening force of the piezoelectric ceramic B.
Further, the elastic metal material is 65Mn spring steel subjected to quenching treatment.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention relates to an integrated two-degree-of-freedom stepping actuator based on piezoelectric drive, which is specially designed with a flexible mechanism comprising a moving rotor mounting seat, plate type flexible hinges, a perfect circle type flexible hinge and a flexible mounting frame and a guide rail chute matched with a stator, wherein two pairs of plate type flexible hinges are pushed to realize periodic telescopic deformation by utilizing time sequence strain of two piezoelectric ceramics under the excitation of in-phase sawtooth wave driving voltages and out-phase sawtooth wave driving voltages, so that the moving rotor mounting seat is driven by the two perfect circle type flexible hinges to generate linear displacement or rotate around a central hole of the moving rotor mounting seat, and the moving rotor can realize the motion of two degrees of freedom in linear-rotation under the action of friction force or friction torque of the central hole on a rotating shaft of the moving rotor;
2. the rotor can realize linear motion along the advancing direction of the stator by applying same-phase sawtooth wave driving signals for slowly increasing pressure and rapidly reducing pressure to the two symmetrically arranged piezoelectric ceramics, the rotor can complete rotary motion by taking a rotating shaft as the center by applying out-of-phase sawtooth wave driving signals to the symmetrically arranged piezoelectric ceramics, and when the two piezoelectric ceramics which are matched with each other to work adopt sawtooth wave driving signals which are opposite to the sawtooth wave driving signals, the rotor can realize linear motion or rotary motion in opposite directions;
3. the piezoelectric ceramic is used as a driving unit, so that the power integration degree is high, the structure is simple, flexible control is convenient, electromagnetic interference influence can be eliminated, and the reliability of the actuator is high;
4. the invention has good application prospect in the technical fields of aerospace, optical instruments, biomedical treatment, integrated circuits and the like, and the motion output of two degrees of freedom of linear and rotation further widens the application range of the multi-degree-of-freedom piezoelectric actuator in the field of precision motor driving.
Drawings
Fig. 1 is a schematic perspective view of an integrated two-degree-of-freedom stepping actuator based on piezoelectric driving;
FIG. 2 is a top view of an integrated two-degree-of-freedom stepper actuator based on piezoelectric actuation;
FIG. 3 is a schematic view of the assembly of the movable rotor and the flexible mechanism of the integrated two-degree-of-freedom stepping actuator based on piezoelectric actuation;
FIG. 4 is a top view of the flexible mechanism of the integrated two-degree-of-freedom stepper actuator based on piezoelectric actuation of FIG. 1;
FIG. 5 is a waveform diagram of driving signals of the integrated two-degree-of-freedom stepping actuator based on piezoelectric driving, wherein (a) is an in-phase sawtooth wave signal and (b) is an out-of-phase sawtooth wave signal;
FIG. 6 is a driving schematic diagram of an integrated two-degree-of-freedom stepping actuator based on piezoelectric driving to generate linear displacement output;
FIG. 7 is a driving schematic diagram of an integrated two-degree-of-freedom stepping actuator based on piezoelectric driving to generate a rotational angular displacement output;
in the figure: 1. pre-tightening the bolt A; 2. pre-tightening the gasket A; 3. a piezoelectric ceramic A; 4. adjusting the bolt A; 5. a guide rail A; 6. a stator; 7. a moving rotor; 8. a flexible mechanism; 9. a piezoelectric ceramic B; 10. pre-tightening the gasket B; 11. a guide rail B; 12. pre-tightening the bolt B; 13. adjusting a bolt B; 14. a moving rotor mounting base; 15. a plate-type flexible hinge; 16. a right circular flexible hinge; 17. an elastic ring; 18. a gasket; 19. and (6) flexibly installing a frame.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Example 1
Referring to fig. 1 to 4, the integrated two-degree-of-freedom stepping actuator based on piezoelectric driving according to the present embodiment includes four parts, namely a stator 6, a sliding guide rail, a driving mechanism, and a moving rotor 7.
The stator 6 can be fixedly connected with the workbench through bolts and plays a role in guiding the whole actuator;
the sliding guide rail comprises a guide rail A5 and a guide rail B11, wherein the guide rail A5 and the guide rail B11 are symmetrically fixed on the lower surface of the flexible mechanism 8 through bolts, the guide rail A5, the guide rail B11 and the lower surface of the flexible mechanism 8 form a guide rail sliding groove, the stator 6 is assembled in the guide rail sliding groove, the whole actuator can output linear movement displacement along the extension direction of the stator 6 under the action of the sliding guide rail, the adjusting bolt A4 is installed on the outer side surface of the guide rail A5, the adjusting bolt B13 is installed on the outer side surface of the guide rail B11, the guide rail A5 and the adjusting bolt A4 work in a matched mode, the guide rail B11 and the adjusting bolt B13 work in a matched mode, the friction force between the stator 6 and the guide rail can be controlled by adjusting the positions of the adjusting bolt A4 and the adjusting bolt B13 in the working process, and the effect of adjusting the linear displacement stepping precision of the actuator is achieved.
As shown in fig. 1, the driving mechanism includes a flexible mechanism 8, a piezoelectric ceramic A3, a pre-tightening washer A2, a pre-tightening bolt A1, a piezoelectric ceramic B9, a pre-tightening washer B10, and a pre-tightening bolt B12. As shown in fig. 4, the flexible mechanism 8 includes a rotor mounting base 14, a plate-type flexible hinge 15, a circular flexible hinge 16, and a flexible mounting frame 19, the flexible mounting frame 19 is square, and the guide rails A5 and B11 are respectively fixed to the lower surfaces of the frames on both sides of the flexible mounting frame 19. Two pairs of plate-type flexible hinges 15 are mounted on the inner side of one end of the flexible mounting frame 19, each pair of plate-type flexible hinges 15 forms a piezoelectric ceramic mounting groove, the two piezoelectric ceramic mounting grooves are symmetrically distributed around the central axis of the flexible mechanism 8, the two pairs of plate-type flexible hinges 15 are respectively connected with the movable rotor mounting seat 14 through a right circular flexible hinge 16, namely, one ends of the two piezoelectric ceramic mounting grooves are connected with the flexible mounting frame 19, the other ends of the two pairs of plate-type flexible hinges are connected with the movable rotor mounting seat 14 through the two right circular flexible hinges 16, and the two pairs of plate-type flexible hinges 15 are respectively positioned on two sides of the movable rotor mounting seat 14; piezoelectric ceramic A3 is installed in the mounting groove on the right side of flexible mechanism 8, and can adjust piezoelectric ceramic A3's initial pretightening force through pretension gasket A2 and pretension bolt A1, and piezoelectric ceramic B9 is installed in the mounting groove on the left side of flexible mechanism 8, and can adjust piezoelectric ceramic B9's initial pretightening force through pretension gasket B10 and pretension bolt B12.
Further, in order to ensure that the plate-type flexible hinge 15, the circular flexible hinge 16 and the flexible mounting frame 19 have better deformation accuracy, the whole flexible mechanism 8 is integrally processed by a whole block of elastic metal material, and the elastic metal material is 65Mn spring steel subjected to quenching treatment.
The movable rotor 7 is arranged on the movable rotor mounting seat 14, and the specific connection mode can be selected from connection modes such as threaded connection, clamping connection, sleeving connection and the like.
Specifically, the whole movable rotor 7 is a part with a rotating shaft, preferably a disc part with a rotating shaft, wherein a thread is processed at one end of the rotating shaft away from the disc, as shown in fig. 3, during assembly, the rotating shaft part of the movable rotor 7 sequentially penetrates through the gasket 18, the central hole of the movable rotor mounting seat 14, the gasket 18, the elastic ring 17 and the other gasket 18, and is finally matched and locked with a nut, wherein the rotating shaft of the movable rotor 7 and the central hole of the movable rotor mounting seat 14 are in transition fit, and the diameter of the central hole is slightly larger than that of the rotating shaft, so that the outer surface of the rotating shaft is in frictional contact with the inner surface of the central hole. In addition, the pre-tightening friction force between the movable rotor 7 and the movable rotor mounting seat 14 can be adjusted by adjusting the screwing degree of the nut, the elastic ring 17 is applied to ensure that the continuous friction force exists between the movable rotor and the movable rotor mounting seat, the problem that the whole motion output efficiency of the actuator is influenced due to the nut looseness in the long-term working process of the actuator is avoided, and the output precision of the rotational angular displacement of the actuator is further improved.
The load can be fixedly arranged in a threaded hole on the upper surface of a disc of the movable rotor 7 through a bolt, linear displacement output along the extension direction of the stator 6 or rotation angle displacement output by taking the rotating shaft of the movable rotor 7 as the center is realized by utilizing the mutual matching of the driving mechanism, the sliding guide rail and the movable rotor 7, and finally, the two-degree-of-freedom motion of the integrated stepping actuator is realized.
In this embodiment, the driving mechanism is divided into two symmetrically arranged A, B portions, and the piezoceramic mounting grooves on the left and right sides of the driving mechanism have the same structure and are symmetrically distributed with the center line of the flexible mechanism 8 as an axis. The piezoelectric ceramics A3 and the piezoelectric ceramics B9 can drive the flexible mounting frame 19, the plate-type flexible hinge 15, the right circular flexible hinge 16 and the moving rotor mounting seat to output linear motion along the length direction of the stator 6 or rotate around the rotating shaft of the moving rotor 7 as a center under the drive of different drive signals, so that the moving rotor 7 is driven to realize motion output of two degrees of freedom, namely linear and rotation, under the action of friction force or friction torque. The movable rotor 7 and the flexible mechanism 8 are assembled together in a mode of bolts, gaskets 18 and elastic rings 17, so that the problem that the whole motion output efficiency of the actuator is influenced due to the problem of nut looseness in the long-term working process of the actuator is avoided, and the output precision of the rotational displacement of the actuator is further improved.
Example 2
The present embodiment will be described in detail with reference to fig. 5 to 7, and the present embodiment will further describe the piezoelectric driving-based integrated two-degree-of-freedom step actuator described in example 1. In this embodiment, the piezoelectric ceramic A3 and the piezoelectric ceramic B9 both use sawtooth voltage driving signals. When the same-phase sawtooth wave signals shown in fig. 5 (a) are simultaneously applied to the piezoelectric ceramics A3 and the piezoelectric ceramics B9, the moving rotor 7 outputs linear displacement along the advancing direction of the stator 6, and the specific working principle is shown in fig. 6; when the out-of-phase sawtooth wave signals shown in fig. 5 (B) are applied to the piezoelectric ceramics A3 and the piezoelectric ceramics B9, the rotor 7 realizes the output of the angular displacement of the rotor around the rotation axis of the rotor, and the specific working principle is shown in fig. 7.
As shown in fig. 6-7, the specific working process of the present invention is as follows:
1. as shown in fig. 6, when the same-phase sawtooth wave driving voltage excitation signal shown in fig. 5 (a) is applied to both the piezoelectric ceramics A3 and the piezoelectric ceramics B9, the initial state voltage of the two piezoelectric ceramics is 0, and the two piezoelectric ceramics are in the original state, and when the voltage slowly increases to U, the two piezoelectric ceramics slowly extend by the distance L1 under the inverse piezoelectric effect, at this time, the two pairs of plate-shaped flexible hinges 15 deform by the extension distance L1 under the pushing of the piezoelectric ceramics, the moving rotor mounting base 14 generates the linear displacement L1 under the driving of the plate-shaped flexible hinges 15 and the perfect circular flexible hinges 16, and then the moving rotor 7 generates the linear displacement by the distance L1 under the pushing of the moving rotor mounting base 14. When the driving voltage drops to 0 sharply, the two piezoelectric ceramics lose voltage excitation and recover to original lengths quickly, the plate type flexible hinge 15 recovers to the original positions without the pressure of the piezoelectric ceramics driving force, at the moment, the movable rotor 7 generates small displacement L2 backwards under the action of load and self-weight inertia thereof, the movable rotor 7 generates linear displacement (L1-L2) relative to the stator 6 through the driving of a sawtooth wave waveform signal, namely, the piezoelectric actuator outputs the linear displacement with the step precision of (L1-L2), and the pre-tightening friction force between the sliding guide rail and the stator 6 can be controlled by adjusting the tightening degree of the adjusting bolt A4 and the adjusting bolt B13, so that the linear displacement output precision of the actuator is further adjusted. The movable rotor 7 can generate displacement output moving in the opposite direction by applying opposite sawtooth wave driving signals to the piezoelectric ceramics A3 and the piezoelectric ceramics B9;
2. as shown in fig. 7, when the sawtooth wave signals out of phase shown in fig. 5 (B) are applied to the piezoelectric ceramic A3 and the piezoelectric ceramic B9, the initial state signal voltage of the piezoelectric ceramic A3 is 0 and the initial state signal voltage of the piezoelectric ceramic B9 is 0, both of which are in the original state. With the gradual increase of the driving voltage of the piezoelectric ceramic A3 to U, the driving voltage of the piezoelectric ceramic B9 is gradually decreased to-U, and under the inverse piezoelectric effect of the piezoelectric ceramic, the displacement output of the piezoelectric ceramic A3 is L, the displacement output of the piezoelectric ceramic B9 is L, that is, the shortening of the piezoelectric ceramic is L. In the process, the rotor mounting seat 14 rotates counterclockwise by an angle theta along the central axis thereof under the driving of the torque generated by the deformation of the piezoelectric ceramic mounting groove 1 The movable rotor 7 follows the rotation angle theta of the mounting seat under the action of inertia 1 . When the driving voltage of the piezoelectric ceramic A3 is suddenly reduced to 0 and the driving voltage of the piezoelectric ceramic B9 is suddenly increased to 0, the piezoelectric ceramic A3 and the piezoelectric ceramic B9 are quickly recovered to the original length, the movable rotor mounting seat 14 is driven by the plate-type flexible hinge 15 and the right-circular flexible hinge 16 to return to the initial position, and the rotating shaft of the movable rotor 7 rotates clockwise by an angle theta under the friction action of the central hole of the movable rotor mounting seat 14 2 . Driven by a sawtooth waveform signal, the movable rotor 7 generates anticlockwise angular displacement (theta) relative to the movable rotor mounting seat 14 1 -θ 2 ) That is, the step precision of the output rotary angular displacement of the piezoelectric actuator is (theta) 1 -θ 2 ). By applying a reverse sawtooth wave drive signal to the piezoelectric ceramics A3 and the piezoelectric ceramics B9, the rotor 7 can output a rotational angular displacement in the clockwise direction around its rotation axis.
The piezoelectric actuator is driven by two piezoelectric ceramics through the action of an in-phase sawtooth waveform, the movable rotor 7 can generate linear displacement output along the advancing or retreating direction of the stator 6, and the movable rotor 7 can generate rotation angle displacement output around the rotating shaft thereof in the anticlockwise or clockwise direction under the drive of an out-phase sawtooth waveform signal. The process is circularly reciprocated, and the piezoelectric actuator can realize linear-rotary motion with two degrees of freedom.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. The piezoelectric drive-based integrated two-degree-of-freedom stepping actuator is characterized by comprising a stator (6), a sliding guide rail, a driving mechanism and a moving rotor (7);
the sliding guide rail comprises a guide rail A (5) and a guide rail B (11), the guide rail A (5) and the guide rail B (11) are symmetrically arranged on the lower surface of the flexible mechanism (8), the guide rail A (5), the guide rail B (11) and the lower surface of the flexible mechanism (8) form a guide rail sliding chute, and the stator (6) is assembled in the guide rail sliding chute;
actuating mechanism includes flexible mechanism (8), piezoceramics A (3) and piezoceramics B (9), flexible mechanism (8) are including moving rotor mount pad (14), board type flexible hinge (15), just circular type flexible hinge (16) and flexible installing frame (19), two pairs of board type flexible hinge (15) are installed to the one end inboard of flexible installing frame (19), and every is a piezoceramics mounting groove of board type flexible hinge (15) constitution, and two pairs of board type flexible hinge (15) link to each other with moving rotor mount pad (14) through a just circular type flexible hinge (16) respectively, move rotor (7) install in move on rotor mount pad (14).
2. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving as claimed in claim 1, wherein the two piezoelectric ceramic mounting grooves are symmetrically distributed about the central axis of the flexible mechanism (8) and are respectively located on two sides of the rotor mounting seat (14).
3. Integrated two-degree-of-freedom stepping actuator based on piezoelectric actuation according to claim 2, wherein the flexible mechanism (8) is integrally formed from a single piece of resilient metal material.
4. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving as claimed in any one of claims 1 to 3, wherein the moving rotor (7) is a part with a rotating shaft, the moving rotor (7) is mounted on the moving rotor mounting seat (14) through the rotating shaft, and the rotating shaft of the moving rotor (7) is in transition fit with the central hole of the moving rotor mounting seat (14).
5. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving as claimed in claim 4, wherein a rotating shaft of the moving rotor (7) penetrates through the gasket (18), the central hole of the moving rotor mounting seat (14), the gasket (18), the elastic ring (17) and the other gasket (18) in sequence and then is matched and locked with the nut.
6. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving as claimed in claim 4, wherein the outer side surfaces of the guide rail A (5) and the guide rail B (11) are respectively provided with an adjusting bolt.
7. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving as claimed in claim 4, wherein the driving mechanism further comprises a pre-tightening gasket A (2), a pre-tightening bolt A (1), a pre-tightening gasket B (10) and a pre-tightening bolt B (12), the pre-tightening gasket A (2) and the pre-tightening bolt A (1) are used for adjusting the pre-tightening force of the piezoelectric ceramic A (3), and the pre-tightening gasket B (10) and the pre-tightening bolt B (12) are used for adjusting the pre-tightening force of the piezoelectric ceramic B (9).
8. The integrated two-degree-of-freedom stepping actuator based on piezoelectric driving as claimed in claim 3, wherein the elastic metal material is 65Mn spring steel which is subjected to quenching treatment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310240908.9A CN115955141B (en) | 2023-03-14 | 2023-03-14 | Integrated two-degree-of-freedom stepping actuator based on piezoelectric driving |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310240908.9A CN115955141B (en) | 2023-03-14 | 2023-03-14 | Integrated two-degree-of-freedom stepping actuator based on piezoelectric driving |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115955141A true CN115955141A (en) | 2023-04-11 |
| CN115955141B CN115955141B (en) | 2023-05-26 |
Family
ID=85903374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310240908.9A Active CN115955141B (en) | 2023-03-14 | 2023-03-14 | Integrated two-degree-of-freedom stepping actuator based on piezoelectric driving |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115955141B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116191927A (en) * | 2023-05-04 | 2023-05-30 | 吉林大学 | Planar three-degree-of-freedom actuator based on piezoelectric bimorph driving |
| CN116388609A (en) * | 2023-05-26 | 2023-07-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN103916045A (en) * | 2014-02-21 | 2014-07-09 | 西安交通大学 | Stepping type rotation driving device and method on basis of piezoelectric ceramics |
| CN104362889A (en) * | 2014-11-14 | 2015-02-18 | 西安交通大学 | Self-adaptation stepping type angular displacement piezoelectric actuator and method |
| CN107953120A (en) * | 2018-01-12 | 2018-04-24 | 长春工业大学 | Piezoelectricity stick-slip micro-nano angular displacement platform and its driving method |
| CN112865597A (en) * | 2021-03-30 | 2021-05-28 | 吉林大学 | Time-lag effect inertial piezoelectric driver based on flexible hinge |
| CN112994515A (en) * | 2021-02-03 | 2021-06-18 | 哈尔滨工业大学 | Wide-speed-range two-degree-of-freedom large-scale piezoelectric platform and excitation method thereof |
| CN115242121A (en) * | 2022-08-05 | 2022-10-25 | 吉林大学 | Piezoelectric stepping actuator based on synchronous double-foot driving |
| CN115441769A (en) * | 2022-11-07 | 2022-12-06 | 吉林大学 | Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving |
| CN115566930A (en) * | 2022-11-10 | 2023-01-03 | 吉林大学 | Large-stroke piezoelectric actuator capable of outputting continuous angular displacement |
-
2023
- 2023-03-14 CN CN202310240908.9A patent/CN115955141B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN103916045A (en) * | 2014-02-21 | 2014-07-09 | 西安交通大学 | Stepping type rotation driving device and method on basis of piezoelectric ceramics |
| CN104362889A (en) * | 2014-11-14 | 2015-02-18 | 西安交通大学 | Self-adaptation stepping type angular displacement piezoelectric actuator and method |
| CN107953120A (en) * | 2018-01-12 | 2018-04-24 | 长春工业大学 | Piezoelectricity stick-slip micro-nano angular displacement platform and its driving method |
| CN112994515A (en) * | 2021-02-03 | 2021-06-18 | 哈尔滨工业大学 | Wide-speed-range two-degree-of-freedom large-scale piezoelectric platform and excitation method thereof |
| CN112865597A (en) * | 2021-03-30 | 2021-05-28 | 吉林大学 | Time-lag effect inertial piezoelectric driver based on flexible hinge |
| CN115242121A (en) * | 2022-08-05 | 2022-10-25 | 吉林大学 | Piezoelectric stepping actuator based on synchronous double-foot driving |
| CN115441769A (en) * | 2022-11-07 | 2022-12-06 | 吉林大学 | Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving |
| CN115566930A (en) * | 2022-11-10 | 2023-01-03 | 吉林大学 | Large-stroke piezoelectric actuator capable of outputting continuous angular displacement |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116191927A (en) * | 2023-05-04 | 2023-05-30 | 吉林大学 | Planar three-degree-of-freedom actuator based on piezoelectric bimorph driving |
| CN116388609A (en) * | 2023-05-26 | 2023-07-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
| CN116388609B (en) * | 2023-05-26 | 2023-08-04 | 吉林大学 | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115955141B (en) | 2023-05-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN115955141B (en) | Integrated two-degree-of-freedom stepping actuator based on piezoelectric driving | |
| US6664710B1 (en) | Electromechanical motor | |
| US5079471A (en) | High torque harmonic traction motor | |
| EP0449048B1 (en) | Piezoelectric motor | |
| CN115441769B (en) | Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving | |
| CN110460264B (en) | Piezoelectric driver for improving performance based on four-foot coupling motion mode and control method | |
| CN110752771A (en) | Novel efficient piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN116191927B (en) | Planar three-degree-of-freedom actuator based on piezoelectric bimorph driving | |
| CN210431263U (en) | Novel piezoelectric rotation precision driving platform | |
| CN110912444B (en) | Bionic creeping type piezoelectric actuator | |
| CN110995058A (en) | Novel piezoelectric rotation precision driving platform based on parasitic inertia principle | |
| CN116388609B (en) | Flat-rotary two-degree-of-freedom piezoelectric actuator driven based on inertial stepping principle | |
| CN110855181B (en) | Rotary piezoelectric driving device based on asymmetric triangular hinge mechanism | |
| CN110912448B (en) | Piezoelectric driving platform based on asymmetric triangle flexible hinge mechanism | |
| CN110768571A (en) | Novel bionic creeping type piezoelectric precision driving device based on parasitic inertia principle | |
| CN115566930B (en) | Large-stroke piezoelectric actuator capable of outputting continuous angular displacement | |
| US5341056A (en) | Magnetostrictive motor system | |
| CN111193435A (en) | Rotary actuator | |
| CN114567206A (en) | Piezoelectric stick-slip rotary motion platform | |
| CN210225279U (en) | Piezoelectric driver for improving performance based on four-foot coupling motion mode | |
| CN109818528B (en) | Stepping type rotary piezoelectric motor and driving method thereof | |
| CN118264149B (en) | Plane three-degree-of-freedom inertial stepping piezoelectric actuator | |
| CN111181437B (en) | Variable friction driving device | |
| CN210469144U (en) | Novel high-efficient piezoelectricity rotation precision drive platform | |
| US11533004B2 (en) | Rotary motor having a rotation unit configured to make an elastic deformation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |