CN115930623A - Multiple temperature control device of diffusion furnace - Google Patents
Multiple temperature control device of diffusion furnace Download PDFInfo
- Publication number
- CN115930623A CN115930623A CN202310129049.6A CN202310129049A CN115930623A CN 115930623 A CN115930623 A CN 115930623A CN 202310129049 A CN202310129049 A CN 202310129049A CN 115930623 A CN115930623 A CN 115930623A
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- thermocouple
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- 238000009792 diffusion process Methods 0.000 title claims abstract description 42
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 230000001681 protective effect Effects 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 13
- 238000009434 installation Methods 0.000 claims description 13
- 239000003381 stabilizer Substances 0.000 claims description 11
- 230000009347 mechanical transmission Effects 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 5
- 238000009413 insulation Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 6
- 239000012774 insulation material Substances 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention relates to the technical field of thermocouples, in particular to a diffusion furnace multiple temperature control device; including installing at the outside three control by temperature change thermocouple of furnace body, detect the thermocouple, controller and degree of depth regulating unit, degree of depth regulating unit includes three degree of depth adjustment mechanism, every degree of depth adjustment mechanism all includes the mounting bracket, the swivel becket, drive assembly, first threaded rod, the gag lever post, connecting plate and two centre gripping subassemblies, utilize two centre gripping subassemblies with the firm back of control by temperature change thermocouple centre gripping, start drive assembly, drive the swivel becket through drive gear and rotate on the mounting bracket, because the inside threaded connection of swivel becket has first threaded rod, make first threaded rod precession in the inside of swivel becket, and cooperate the gag lever post to carry on spacingly to the connecting plate, thereby drive the direction removal of connecting plate to the furnace body, adjust the degree of depth of the detection end of control by temperature change thermocouple in the inside of furnace body, improve the detection scope of control by temperature change thermocouple.
Description
Technical Field
The invention relates to the technical field of thermocouples, in particular to a diffusion furnace multiple temperature control device.
Background
The current universal diffusion furnace is only provided with an external thermocouple, only the temperature of the furnace tube wall can be monitored, the actual temperature participating in the diffusion reaction in the middle of the furnace tube cannot be monitored, the temperature of the furnace tube wall is lower than the temperature of the diffusion reaction in the production process, the internal temperature is monitored externally, the induction of temperature fluctuation is delayed, and the diffusion temperature cannot be monitored accurately in time.
In order to solve the above problems, prior art patent publication No. (CN 201873778U) discloses a diffusion furnace multiple temperature control device, which has a temperature control thermocouple and a detection thermocouple, wherein the temperature control thermocouple is inserted into the diffusion furnace, the detection thermocouple is arranged on the outer surface of the furnace wall of the diffusion furnace, the temperature control thermocouple is used for temperature control inside and outside the diffusion furnace, and the temperature control thermocouple inserted into the diffusion furnace can directly set the temperature, so that the process can be intuitively adjusted; the detection thermocouple connected with the outside can measure the temperature of the diffusion furnace wall, and macroscopically detects whether the set temperature of the diffusion furnace is reached, so that the condition of silicon wafer reworking caused by unstable and uniform diffusion temperature is reduced, and the equipment utilization rate is improved.
However, when the existing multiple temperature control device for the diffusion furnace is used, the temperature control thermocouple is fixedly installed outside the furnace body, the depth of the detection end of the temperature control thermocouple in the furnace is fixedly arranged, the adjustment cannot be performed, and the detection range is small.
Disclosure of Invention
The invention aims to provide a diffusion furnace multiple temperature control device, and aims to solve the technical problems that when the conventional diffusion furnace multiple temperature control device is used, a temperature control thermocouple is fixedly arranged outside a furnace body, and the detection end of the temperature control thermocouple is fixedly arranged at the depth in the furnace, so that the adjustment cannot be performed, and the detection range is small.
In order to achieve the purpose, the invention provides a diffusion furnace multiple temperature control device which comprises three temperature control thermocouples, detection thermocouples, a controller and a depth adjusting unit, wherein the three temperature control thermocouples are arranged outside a furnace body, the detection ends of the three temperature control thermocouples are all inserted into the furnace body, the three temperature control thermocouples correspond to the front section area, the middle section area and the rear section area of the furnace body respectively, the detection thermocouples are arranged on the outer wall of the furnace body, and the three temperature control thermocouples and the detection thermocouples are all electrically connected with the controller;
the degree of depth regulating unit includes three degree of depth adjustment mechanism, be provided with threely on the lateral wall of furnace body degree of depth adjustment mechanism, every degree of depth adjustment mechanism respectively with one the control by temperature change thermocouple is corresponding, every degree of depth adjustment mechanism all includes mounting bracket, swivel becket, drive assembly, first threaded rod, gag lever post, connecting plate and two centre gripping subassemblies, the mounting bracket with furnace body fixed connection, and be located on the lateral wall of furnace body, the mounting bracket is kept away from the one end of furnace body is rotated and is connected with the swivel becket, the internal thread of swivel becket is connected with first threaded rod, first threaded rod is close to the one end of furnace body is passed through the bearing and is rotated the connection on the connecting plate, the connecting plate is kept away from the one side of furnace body is provided with the gag lever post, the connecting plate is close to the both sides of the one side of furnace body all are provided with the centre gripping subassembly, the gag lever post is kept away from the one end of connecting rod runs through the mounting bracket, two the centre gripping subassembly is used for right the control by temperature change thermocouple carries out the centre gripping, still be provided with drive assembly on the mounting bracket, the outside of swivel becket is provided with drive gear, drive assembly's output with drive gear mechanical transmission.
The driving assembly comprises a driving motor, a reduction gearbox and a driving gear, the driving motor is installed on the installation frame, the reduction gearbox is arranged at the output end of the driving motor, the driving gear is arranged at the output end of the reduction gearbox, and the driving gear is meshed with the transmission gear.
The clamping assembly comprises a fixing plate, a second threaded rod and a clamping block, the fixing plate is detachably connected with the connecting plate and located on one side of the fixing plate, the second threaded rod is connected to the fixing plate in a threaded mode, the second threaded rod is close to one end of the temperature control thermocouple and is provided with the clamping block, and the second threaded rod is far away from one end of the clamping block and is provided with a hand wheel.
Wherein, the mounting bracket includes mounting panel and four stabilizer blades, it is connected with to rotate on the mounting panel the swivel becket, four base angle departments of mounting panel all are provided with the stabilizer blade, every the stabilizer blade is kept away from the one end of mounting panel all with the lateral wall welding of furnace body.
The diffusion furnace multiple temperature control device further comprises a plurality of protective shells, each protective shell covers the driving gear and the corresponding transmission gear, the protective shells are close to one surfaces of the mounting rack and are provided with fixing feet, and the fixing feet are detachably connected with the mounting rack.
Wherein, every the protective housing all includes first casing and second casing, first casing with the second casing is located respectively drive gear's both sides, first casing is close to the one side of mounting bracket is provided with fixed foot, the second casing with first casing is dismantled and is connected, and is located first casing is kept away from the one side of fixed foot.
According to the multiple temperature control device for the diffusion furnace, after the temperature control thermocouple is firmly clamped by the two clamping components, the driving component is started, the transmission gear drives the rotating ring to rotate on the mounting rack, the first threaded rod is connected to the internal thread of the rotating ring, and after the rotating ring rotates, the first threaded rod is screwed in the rotating ring and is matched with the limiting rod to limit the connecting plate, so that the connecting plate is driven to move towards the furnace body, the depth of the detection end of the temperature control thermocouple in the furnace body is adjusted, and the detection range of the temperature control thermocouple is enlarged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic structural view of a diffusion furnace multiple temperature control apparatus according to a first embodiment of the present invention.
Fig. 2 is a schematic structural view of a depth adjusting mechanism in the first embodiment of the present invention.
Fig. 3 is an enlarged view of a portion of the structure of fig. 2 a according to the present invention.
Fig. 4 is an enlarged view of a portion of the structure of fig. 2B according to the present invention.
Fig. 5 is a schematic structural view of a depth adjusting mechanism in a second embodiment of the present invention.
Fig. 6 is a schematic structural view of a depth adjusting mechanism in a third embodiment of the present invention.
101-furnace body, 102-temperature control thermocouple, 103-detection thermocouple, 104-controller, 105-mounting rack, 106-rotating ring, 107-driving component, 108-first threaded rod, 109-limiting rod, 110-connecting plate, 111-clamping component, 112-driving motor, 113-reduction box, 114-driving gear, 115-fixing plate, 116-second threaded rod, 117-clamping block, 118-mounting plate, 119-supporting leg, 120-transmission gear, 121-handwheel, 201-protective shell, 202-first shell, 203-second shell, 204-fixing leg, 301-heat insulation box, 302-box body, 303-mounting wing plate.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
The first embodiment:
referring to fig. 1 to 4, fig. 1 is a schematic structural view of a diffusion furnace multiple temperature control device according to a first embodiment, fig. 2 is a schematic structural view of a depth adjustment mechanism according to the first embodiment, fig. 3 is an enlarged view of a portion of a structure at a in fig. 2, and fig. 4 is an enlarged view of a portion of a structure at B in fig. 2.
The invention provides a diffusion furnace multiple temperature control device: including installing at the outside three control by temperature change thermocouple 102 of furnace body 101, detecting thermocouple 103, controller 104 and degree of depth regulating unit, degree of depth regulating unit includes three degree of depth adjustment mechanism, every degree of depth adjustment mechanism all includes mounting bracket 105, rotating ring 106, drive assembly 107, first threaded rod 108, gag lever post 109, connecting plate 110 and two clamping components 111, drive assembly 107 includes driving motor 112, reducing gear box 113 and drive gear 114, two clamping components 111 all includes fixed plate 115, second threaded rod 116 and grip block 117, mounting bracket 105 includes mounting panel 118 and four stabilizer blades 119. The problems that when the existing diffusion furnace multiple temperature control device is used, the temperature control thermocouple 102 is fixedly installed outside the furnace body 101, the detection end of the temperature control thermocouple 102 is located at the depth in the furnace and is fixedly arranged, adjustment cannot be carried out, and the detection range is small are solved through the scheme.
For the specific embodiment, the detection ends of the three temperature control thermocouples 102 are all inserted into the furnace body 101, the three temperature control thermocouples 102 correspond to the front section, the middle section and the rear section of the furnace body 101, the detection thermocouple 103 is installed on the outer wall of the furnace body 101, the three temperature control thermocouples 102 and the detection thermocouple 103 are electrically connected to the controller 104, the temperature control thermocouple 102 is used for performing temperature control inside the furnace body 101, the detection end of the temperature control thermocouple 102 inserted into the furnace body 101 can directly set the temperature, the process is intuitively adjusted, the detection thermocouple 103 externally connected can measure the temperature of the outer wall of the furnace body 101, and whether the set temperature of the diffusion furnace is reached or not is macroscopically checked, so that the occurrence of product rework caused by unstable and uniform diffusion temperature is reduced, and the utilization rate of the equipment is improved.
Wherein, the outer sidewall of the furnace body 101 is provided with three depth adjusting mechanisms, each depth adjusting mechanism corresponds to one temperature-controlled thermocouple 102, the mounting frame 105 is fixedly connected with the furnace body 101 and is located on the outer sidewall of the furnace body 101, one end of the mounting frame 105, which is far away from the furnace body 101, is rotatably connected with the rotating ring 106, the internal thread of the rotating ring 106 is connected with the first threaded rod 108, one end of the first threaded rod 108, which is close to the furnace body 101, is rotatably connected to the connecting plate 110 through a bearing, one side of the connecting plate 110, which is far away from the furnace body 101, is provided with the limiting rod 109, both sides of one side of the connecting plate 110, which is close to the furnace body 101, are provided with the clamping assemblies 111, one end of the limiting rod 109, which is far away from the connecting rod, penetrates through the mounting frame 105, the two clamping assemblies 111 are used for clamping the temperature-controlled thermocouples 102, the mounting frame 105 is further provided with the driving assembly 107, the external transmission gear 120 is provided with the driving assembly 107, the output end of the driving assembly 107 is in mechanical transmission with the transmission gear 120, the transmission gear assembly 107 is connected with the rotating ring 106, the first threaded rod 108 is connected with the rotating ring 106, and drives the first threaded rod 106, which drives the first threaded rod 108 to move in the furnace body 101, and drives the inner portion of the furnace body 101, and drives the connecting plate 106, and drives the first threaded rod 108 to move in the process, thereby improving the detection range of the temperature-controlled thermocouple 102.
Secondly, the driving motor 112 is installed on the installation frame 105, the output end of the driving motor 112 is provided with the reduction gearbox 113, the output end of the reduction gearbox 113 is provided with the driving gear 114, the driving gear 114 is meshed with the transmission gear 120, the driving motor 112 is started, the reduction gearbox 113 is utilized to slow down the output rotating speed and then drive the driving gear 114 to rotate, and the driving gear 114 is meshed with the transmission gear 120, so that the rotating ring 106 rotates on the installation frame 105.
Simultaneously, fixed plate 115 with connecting plate 110 is dismantled and is connected, and is located one side of fixed plate 115, threaded connection has on the fixed plate 115 second threaded rod 116, second threaded rod 116 is close to the one end of control by temperature change thermocouple 102 is provided with grip block 117, second threaded rod 116 is kept away from the one end of grip block 117 is provided with hand wheel 121, rotates hand wheel 121 drives second threaded rod 116 is in rotate on the fixed plate 115, thereby pass through second threaded rod 116 drives grip block 117 to control by temperature change thermocouple 102's direction removes.
In addition, the last rotation of mounting panel 118 is connected with swivel 106, four base angles departments of mounting panel 118 all are provided with stabilizer blade 119, every stabilizer blade 119 is kept away from the one end of mounting panel 118 all with the lateral wall welding of furnace body 101 will stabilizer blade 119 is fixed on the lateral wall of furnace body 101, thereby accomplish the installation of mounting bracket 105, because four stabilizer blade 119 all with mounting panel 118 fixed connection is making during mounting bracket 105, adopts the integrated into one piece technique to make, and the structure is more firm.
When the multiple temperature control device for the diffusion furnace is used, the temperature control thermocouple 102 is used for temperature control in the furnace body 101, the detection end of the temperature control thermocouple 102 inserted into the furnace body 101 can be directly set for temperature, and an intuitive adjustment process is adopted, the detection thermocouple 103 connected with the outside can be used for measuring the temperature of the outer wall of the furnace body 101, and whether the set temperature of the diffusion furnace is reached is macroscopically checked, so that the condition that the product is reworked due to unstable and uniform diffusion temperature is reduced, the utilization rate of equipment is improved, the two clamping components 111 are used for clamping the temperature control thermocouple 102 firmly, the driving component 107 is started, the transmission gear 120 is used for driving the rotating ring 106 to rotate on the mounting frame 105, the first threaded rod 108 is connected with the rotating ring 106 through internal threads, after the rotating process of the rotating ring 106, the first threaded rod 108 is screwed in the rotating ring 106, and is matched with the limiting rod 109 for limiting the connecting plate 110, so that the connecting plate 110 is driven to move towards the direction of the furnace body 101, the detection end of the temperature control thermocouple 102 is adjusted to further improve the detection range of the thermocouple 102 in the furnace body 101.
The second embodiment:
referring to fig. 5 based on the first embodiment, fig. 5 is a schematic structural diagram of a depth adjusting mechanism in the second embodiment.
The invention provides a diffusion furnace multiple temperature control device which further comprises a plurality of protective cases 201, wherein each protective case 201 comprises a first case 202 and a second case 203.
To this embodiment, every drive gear 114 and the corresponding outside of drive gear 120 all covers and is equipped with protective housing 201, protective housing 201 is close to the one side of mounting bracket 105 all is provided with fixed foot 204, fixed foot 204 with mounting bracket 105 is dismantled and is connected drive gear 114 and the corresponding outside cover of drive gear 120 is established protective housing 201, utilizes protective housing 201 is right drive gear 114 with drive gear 120 protects to avoid external environment to cause the influence to drive gear 114 with the meshing department of drive gear 120.
The first housing 202 and the second housing 203 are respectively located on two sides of the driving gear 114, one side of the first housing 202, which is close to the mounting rack 105, is provided with the fixing feet 204, the second housing 203 is detachably connected with the first housing 202 and located on one side of the first housing 202, which is away from the fixing feet 204, after the first housing 202 and the second housing 203 are respectively located on two sides of the driving gear 114, the fixing feet 204 are fixed on the mounting rack 105 by using screws, and the second housing 203 is fixed on one side of the first housing 202, which is away from the fixing feet 204, by using screws, so as to complete the installation of the protective shell 201.
When the multiple temperature control device of the diffusion furnace in the embodiment is used, the first shell 202 and the second shell 203 are respectively placed on two sides of the driving gear 114, the fixing feet 204 are fixed on the mounting rack 105 through screws, the second shell 203 is fixed on one surface, far away from the fixing feet 204, of the first shell 202 through screws, so that the protective shell 201 is installed, the driving gear 114 and the corresponding external part of the transmission gear 120 are covered with the protective shell 201, the driving gear 114 and the transmission gear 120 are protected through the protective shell 201, and therefore the influence of the external environment on the meshing position of the driving gear 114 and the transmission gear 120 is avoided.
The third embodiment:
referring to fig. 6 on the basis of the first embodiment, fig. 6 is a schematic structural diagram of a depth adjustment mechanism in a third embodiment.
The invention provides a diffusion furnace multiple temperature control device, which further comprises a plurality of heat insulation boxes 301, wherein each heat insulation box 301 comprises a box body 302 and a mounting wing plate 303.
For the specific embodiment, the heat insulation boxes 301 are respectively arranged outside the driving motors 112 and the corresponding reduction gearbox 113, the heat insulation boxes 301 are made of heat insulation materials, one end, close to the corresponding mounting rack 105, of each heat insulation box 301 is detachably connected with the mounting rack 105, the heat insulation boxes 301 are arranged outside the driving motors 112 and the corresponding reduction gearbox 113, the heat insulation boxes 301 are made of heat insulation materials, and the driving motors 112 and the corresponding reduction gearbox 113 are protected by the heat insulation boxes 301, so that the influence on the operation of the driving motors 112 due to overhigh external temperature of the furnace body 101 is avoided.
The box body 302 covers the driving motor 112 and the corresponding reduction gearbox 113, the installation wing plate 303 is arranged on the periphery of one end, close to the installation frame 105, of the box body 302, the installation wing plate 303 is detachably connected with the installation frame 105, the box body 302 covers the driving motor 112 and the corresponding reduction gearbox 113, and then the installation wing plate 303 is fixed on the installation frame 105 through screws, so that the installation of the heat insulation box 301 is completed.
When the multiple temperature control device for the diffusion furnace is used, the box body 302 is covered outside the driving motor 112 and the corresponding reduction gearbox 113, the mounting wing plate 303 is fixed on the mounting frame 105 through screws, so that the heat insulation box 301 is mounted, the heat insulation box 301 is arranged outside the driving motor 112 and the corresponding reduction gearbox 113, the driving motor 112 and the corresponding reduction gearbox 113 are protected by the heat insulation box 301 due to the fact that the heat insulation box 301 is made of heat insulation materials, and therefore the situation that the external temperature of the furnace body 101 is too high and influences are caused on the operation of the driving motor 112 is avoided.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (6)
1. A diffusion furnace multiple temperature control device comprises three temperature control thermocouples, detection thermocouples and a controller, wherein the three temperature control thermocouples are arranged outside a furnace body, the detection ends of the three temperature control thermocouples are all inserted into the furnace body, the three temperature control thermocouples correspond to the front section area, the middle section area and the rear section area of the furnace body respectively, the detection thermocouples are arranged on the outer wall of the furnace body, the three temperature control thermocouples and the detection thermocouples are all electrically connected with the controller,
the furnace body is characterized by further comprising a depth adjusting unit, wherein the depth adjusting unit comprises three depth adjusting mechanisms, the outer side wall of the furnace body is provided with the three depth adjusting mechanisms, and each depth adjusting mechanism corresponds to one temperature control thermocouple;
every degree of depth adjustment mechanism all includes mounting bracket, swivel ring, drive assembly, first threaded rod, gag lever post, connecting plate and two centre gripping subassemblies, the mounting bracket with furnace body fixed connection, and be located on the lateral wall of furnace body, the mounting bracket is kept away from the one end of furnace body is rotated and is connected with the swivel ring, the inside threaded connection of swivel ring has first threaded rod, first threaded rod is close to the one end of furnace body is passed through the bearing and is rotated the connection on the connecting plate, the connecting plate is kept away from the one side of furnace body is provided with the gag lever post, the connecting plate is close to the both sides of the one side of furnace body all are provided with the centre gripping subassembly, the gag lever post is kept away from the one end of connecting rod is run through the mounting bracket, two the centre gripping subassembly is used for right the control by temperature change thermocouple carries out the centre gripping, still be provided with on the mounting bracket drive assembly, the outside of swivel ring is provided with drive gear mechanical transmission.
2. The multiple temperature control apparatus of a diffusion furnace according to claim 1,
the driving assembly comprises a driving motor, a reduction gearbox and a driving gear, the driving motor is installed on the installation frame, the reduction gearbox is arranged at the output end of the driving motor, the driving gear is arranged at the output end of the reduction gearbox, and the driving gear is meshed with the transmission gear.
3. The diffusion furnace multiple temperature control apparatus of claim 1,
two the centre gripping subassembly all includes fixed plate, second threaded rod and grip block, the fixed plate with the connection is dismantled to the connecting plate and is connected, and is located one side of fixed plate, threaded connection has on the fixed plate the second threaded rod, the second threaded rod is close to the one end of control by temperature change thermocouple is provided with the grip block, the second threaded rod is kept away from the one end of grip block is provided with the hand wheel.
4. The multiple temperature control apparatus of a diffusion furnace according to claim 1,
the mounting bracket includes mounting panel and four stabilizer blades, it is connected with to rotate on the mounting panel the swivel becket, four base angle departments of mounting panel all are provided with the stabilizer blade, every the stabilizer blade is kept away from the one end of mounting panel all with the lateral wall welding of furnace body.
5. The diffusion furnace multiple temperature control apparatus of claim 2,
the multiple temperature control device of diffusion furnace still includes a plurality of protective housings, every drive gear with correspond drive gear's outside all covers and is equipped with the protective housing, the protective housing is close to the one side of mounting bracket all is provided with fixed foot, fixed foot with the mounting bracket is dismantled and is connected.
6. The diffusion furnace multiple temperature control apparatus of claim 5,
every the protective housing all includes first casing and second casing, first casing with the second casing is located respectively drive gear's both sides, first casing is close to the one side of mounting bracket is provided with fixed foot, the second casing with first casing is dismantled and is connected, and is located first casing is kept away from the one side of fixed foot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310129049.6A CN115930623A (en) | 2023-02-17 | 2023-02-17 | Multiple temperature control device of diffusion furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310129049.6A CN115930623A (en) | 2023-02-17 | 2023-02-17 | Multiple temperature control device of diffusion furnace |
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| CN115930623A true CN115930623A (en) | 2023-04-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310129049.6A Pending CN115930623A (en) | 2023-02-17 | 2023-02-17 | Multiple temperature control device of diffusion furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116499274A (en) * | 2023-06-27 | 2023-07-28 | 四川领先微晶玻璃有限公司 | Temperature measurement system used in industrial sintering furnace |
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2023
- 2023-02-17 CN CN202310129049.6A patent/CN115930623A/en active Pending
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| JP2005233741A (en) * | 2004-02-19 | 2005-09-02 | Sumitomo Electric Ind Ltd | Temperature-measuring part, heating furnace using the part, and furnace temperature control method of heating furnace |
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| CN116499274B (en) * | 2023-06-27 | 2023-08-25 | 四川领先微晶玻璃有限公司 | Temperature measurement system used in industrial sintering furnace |
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