CN115910885A - Half automatic unloading equipment of going up - Google Patents

Abstract

The invention relates to the technical field of feeding and discharging equipment, and discloses a semi-automatic feeding and discharging equipment, which comprises: the flower basket adjusting assembly can drive the flower basket to adjust the position so as to adjust the feeding and discharging positions of the flower basket; the feeding and discharging conveying assembly for the flower basket is used for conveying the flower basket and the empty flower basket which are loaded with the silicon wafers to be processed to the flower basket adjusting assembly and taking the flower basket and the empty flower basket which are loaded with the processed silicon wafers out of the flower basket adjusting assembly; the silicon wafer feeding and conveying assembly can take out the silicon wafer to be processed in the flower basket and convey the processed silicon wafer into the flower basket; in this scheme, whole piece silicon chip and half silicon chip can use the basket of flowers of the same kind of specification to carry, when carrying half silicon chip and go up unloading, can adjust the unloading position of basket of flowers through basket of flowers adjusting part, make it correspond with the last unloading conveyor components of silicon chip, need not to change the specification of basket of flowers, guarantee normal transport operation, and then make the utilization ratio of going up the unloading basket of flowers higher, promoted conveying efficiency.

Description

Half automatic unloading equipment of going up

Technical Field

The invention belongs to the technical field of semiconductors, and particularly relates to semi-automatic feeding and discharging equipment.

Background

In the processing processes of film coating and the like, the silicon wafers need to be loaded and unloaded, the existing method is mostly manually placed, but material cracking or corner breaking is easily caused by manual grabbing, the rejection rate is high, the position between adjacent silicon wafers has high requirements, manual loading is not easy, time and labor are wasted, and the efficiency is low; resulting in lower production efficiency and higher labor cost.

With the continuous and deep upgrading of the national industry, the automatic production is urgently required by various industries for improving the production efficiency and reducing the cost. Factories in the photovoltaic industry and in the silicon wafer related industry are increasingly active for automated production or reduction of labor. A lot of domestic photovoltaic enterprises invest heavy gold, and more automatic equipment is applied in the processes of silicon material extraction, silicon wafer sorting and the like.

More and more manual operations become automatic high-efficient production, original artifical inserted sheet has become automatic film inserting machine, and original manual work is put into the spool box and is also become to have automatic feeding machine to accomplish, has realized automatic production.

However, most of the existing automatic feeding and discharging equipment is used for feeding and discharging whole silicon wafers, half silicon wafers are conveyed by adopting small-specification baskets, the utilization rate of the baskets is low, and the conveying efficiency is reduced; in addition, the structural mode of the existing half-piece guide mechanism increases the guide time, the number of the card problems is large, and the overall feeding and discharging efficiency of the equipment is low.

Disclosure of Invention

The invention aims to provide a semi-automatic loading and unloading device to solve at least one of the problems in the background art.

In order to solve the technical problems, the specific technical scheme of the invention is as follows:

some embodiments of the application provide a half automatic unloading equipment of going up, include:

a main frame;

the flower basket adjusting assembly is connected to the main frame; the position of the flower basket can be driven to be adjusted, and the feeding and discharging positions of the flower basket are further adjusted;

the feeding and discharging conveying assembly for the flower basket is connected with the main frame, arranged on the other side of the flower basket adjusting assembly, corresponds to the flower basket adjusting assembly, and is used for conveying the flower basket and the empty flower basket loaded with the silicon wafers to be processed to the flower basket adjusting assembly and taking the flower basket and the empty flower basket loaded with the processed silicon wafers out of the flower basket adjusting assembly;

and the silicon wafer feeding and discharging conveying assembly is connected to the main frame, arranged on the other side of the flower basket adjusting assembly and corresponds to the main frame, and can take out the silicon wafer to be processed in the flower basket and convey the processed silicon wafer into the flower basket.

Preferably, in an embodiment of the above described semi-automatic loading and unloading apparatus, the feeding and discharging assembly includes:

the silicon wafer discharging and conveying mechanism is connected with the main frame, can correspond to the flower basket bracket and is used for conveying the silicon wafers loaded in the flower basket with the silicon wafers to be processed to a region to be processed, and the silicon wafers to be processed are grabbed to the processing region by the mechanical arm for processing;

and the silicon wafer feeding conveying mechanism is connected with the main frame, can correspond to the flower basket bracket and is used for conveying the processed silicon wafers to the empty flower basket corresponding to the flower basket bracket, and when the empty flower basket is fully loaded with the processed silicon wafers, the processed silicon wafers are transferred to a finished product area through the flower basket circulation assembly II and the discharging flower basket conveying mechanism.

Preferably, the defective product detection module is connected to the main frame, is arranged on a transmission path of the silicon wafer feeding and conveying mechanism, and is used for monitoring the processed silicon wafers, screening defective products in the processed silicon wafers, enabling the screened defective product silicon wafers to enter corresponding empty baskets, and when the empty baskets are fully loaded with the defective product silicon wafers, transferring the defective product silicon wafers to a defective product area through the basket circulation assembly II and the defective product basket conveying mechanism.

Preferably, in an embodiment of the above semi-automatic loading and unloading device, the device further includes a fragment box disposed at the bottom of the defective product detection module, and the defective product detection module detects a damaged silicon wafer and transfers the damaged silicon wafer into the fragment box.

Preferably, in an embodiment of the above semi-automatic loading and unloading apparatus, the apparatus further includes a plurality of silicon wafer caching mechanisms, which are respectively connected to the transportation paths of the silicon wafer unloading and conveying mechanism and the silicon wafer loading and conveying mechanism, and can store a certain amount of silicon wafers through a storage component.

Preferably, in an embodiment of the above semi-automatic loading and unloading equipment, the equipment further includes a plurality of silicon wafer regulating assemblies, which are respectively connected to the silicon wafer unloading conveying mechanism and the silicon wafer loading conveying mechanism on the conveying path, and can adjust the positions of passing silicon wafers.

Preferably, in an embodiment of the above semi-automatic loading and unloading apparatus, the apparatus further includes a plurality of silicon wafer overturning assemblies respectively disposed at the unloading end of the silicon wafer unloading conveying mechanism and the loading end of the silicon wafer unloading conveying mechanism, and a storage component of the apparatus can be adjusted in angle and is used for storing the silicon wafers to be processed conveyed by the silicon wafer unloading conveying mechanism and the processed silicon wafers conveyed by the manipulator.

Preferably, in an embodiment of the above-mentioned feeding and discharging equipment in semi-piece automation, the basket of flowers adjusting part is provided with at least two sets, and is arranged side by side, and all includes:

the flower basket bracket lifting mechanism is arranged in the middle of the main rack, and a lifting component of the flower basket bracket lifting mechanism can move towards the top along the bottom of the main rack;

a basket support, the outer side of which is connected with the lifting component of the basket support lifting mechanism;

the flower basket moving mechanism is connected to the bottom of the flower basket bracket, and a moving part of the flower basket moving mechanism can enter the inner side of the flower basket bracket and move in a direction vertical to the feeding and discharging of the flower basket;

the flower basket conveying mechanism is arranged on a moving part of the flower basket moving mechanism, and the conveying direction of the flower basket conveying mechanism is consistent with the feeding direction and the discharging direction of the flower basket.

Preferably, in an embodiment of the above semi-automatic feeding and discharging apparatus, the basket adjusting assembly further includes: the flower basket limiting mechanism is arranged at the top of the flower basket bracket, and a limiting part of the flower basket limiting mechanism can enter the inner side of the flower basket bracket to limit the flower basket.

Preferably, the basket adjusting assembly further comprises: and the detection component is arranged at the top of the flower basket bracket and used for detecting the position of the silicon wafer in the flower basket.

Preferably, in an embodiment of the above mentioned semi-automatic feeding and discharging apparatus for flower basket, the feeding and discharging conveying assembly for flower basket includes:

the first basket circulation assembly is connected with the main frame, a circulation component of the first basket circulation assembly can correspond to the basket bracket, conveys the basket loaded with the silicon wafers to be processed to the basket bracket, and receives the empty basket in the basket bracket and the basket loaded with the processed silicon wafers;

the feeding basket conveying mechanism is connected with the main frame, corresponds to the basket circulation assembly I, and is used for conveying the basket loaded with the silicon wafers to be processed to the basket circulation assembly I;

the empty flower basket recycling mechanism is connected with the main rack, corresponds to the first flower basket circulating assembly and is used for recycling the empty flower basket received by the first flower basket circulating assembly;

the blanking basket conveying mechanism is connected with the main frame, corresponds to the basket circulation assembly and is used for recovering a basket loaded with processed silicon wafers and received by the basket circulation assembly;

the defective product basket conveying mechanism is connected with the main frame, corresponds to the basket circulation assembly and is used for recovering the baskets loaded with the defective product silicon wafers and received by the basket circulation assembly;

the flower basket circulation assembly II is connected with the main frame, and a circulation component of the flower basket circulation assembly II can correspond to the flower basket bracket and is used for receiving the empty flower basket and conveying the empty flower basket to the flower basket bracket;

and the hollow basket conveying mechanism is connected to the main frame, corresponds to the basket circulation assembly II and is used for conveying the hollow baskets to the basket circulation assembly II.

Through the technical scheme, compared with the prior art, the invention has the beneficial effects that:

in this scheme, whole piece silicon chip and half silicon chip can use the basket of flowers of the same kind of specification to carry, when carrying half silicon chip and go up unloading, can adjust the unloading position of basket of flowers through basket of flowers adjusting part, make it correspond with the last unloading conveyor components of silicon chip, need not to change the specification of basket of flowers, guarantee normal transport operation, and then make the utilization ratio of going up the unloading basket of flowers higher, promoted conveying efficiency.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a perspective view of an embodiment of the present invention;

FIG. 2 is a top view provided by an embodiment of the present invention;

FIG. 3 is a schematic illustration of a mainframe mounting provided by an embodiment of the present invention;

FIGS. 4-5 are schematic views of the basket adjusting assembly of the present invention;

FIG. 6 is a schematic structural diagram of a conveying mechanism of a flower basket according to an embodiment of the present invention;

FIG. 7 is a schematic structural view of a basket clamping mechanism in an embodiment of the present invention;

FIG. 8 is a schematic structural diagram of a basket stop mechanism according to an embodiment of the present invention;

FIGS. 9-10 are schematic structural views of a basket moving mechanism according to an embodiment of the present invention;

FIG. 11 is a schematic structural diagram of a silicon wafer blanking conveying mechanism according to an embodiment of the present invention;

FIG. 12 is a schematic structural diagram of a silicon wafer flipping module according to an embodiment of the present invention;

FIG. 13 is a front view of a wafer flipping module according to an embodiment of the present invention.

In the figure:

1. a basket adjusting assembly; 10. a basket support lifting mechanism; 11. a flower basket bracket; 12. a basket moving mechanism; 120. a first cylinder; 121. a first connecting plate; 122. a first fixing plate; 123. a first guide rail sliding block mechanism; 124. a first limiting part; 13. a basket of flowers conveying mechanism; 130. a first driving motor; 131. a belt drive mechanism; 132. a first belt conveying mechanism; 133. a first limit stop; 134. a second limit stop is arranged; 14. a flower basket limiting mechanism; 140. a limiting mechanism mounting plate; 141 cylinder two; 142. a limiting push plate; 143. a basket of flowers limiting component; 15. a detection section; 16. a basket clamping mechanism; 160. a third cylinder; 161. a second connecting plate; 162. a clamping plate; 2. a feeding and discharging conveying assembly of the flower basket; 20. the device comprises a first basket circulation assembly, a first basket circulation assembly 21, a feeding basket conveying mechanism 22 and an empty basket recovery mechanism; 23. a hollow basket conveying mechanism; 24. a second basket circulation assembly 25 and a blanking basket conveying mechanism; 26. a defective flower basket conveying mechanism; 30. a silicon wafer blanking conveying mechanism; 31. a silicon wafer feeding and conveying mechanism; 32. a defective item detection module; 33. a fragment box; 4. a main frame; 5. a silicon wafer caching mechanism; 50. a lifting module; 51. caching a groove plate; 52. mounting a plate; 6. arranging a silicon wafer into a module; 61. a synchronous belt mechanism III; 62. a regulating wheel mounting plate; 63. a regulating wheel; 7. a silicon wafer overturning component; 70. a storage rack lifting mechanism; 71. a first movable base; 72. a linear guide rail sliding block mechanism IV; 73. a telescoping mechanism; 74. a second movable base; 75. turning over a motor; 76. a gear steering box; 77. a turnover plate; 78. a slide base; 79. a linear guide rail sliding block mechanism V; 80. a synchronous belt mechanism IV; 81. and a silicon wafer storage rack.

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In the description of the present application, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the present application and simplifying the description, but do not indicate or imply that the referred device or element must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application.

The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, the meaning of "a plurality" is two or more unless otherwise specified.

In the description of the present application, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in this application will be understood to be a specific case for those of ordinary skill in the art.

For a better understanding of the objects, structure and function of the invention, reference should be made to the following detailed description taken in conjunction with the accompanying drawings.

Referring to fig. 1-13, in some embodiments according to the present application, there is provided a semi-automatic loading and unloading apparatus, comprising:

the flower basket adjusting assembly 1 can drive the flower basket to adjust the position, and further adjust the feeding and discharging positions of the flower basket;

the feeding and discharging conveying component 2 for the flower basket is arranged on one side of the flower basket adjusting component 1, corresponds to the flower basket adjusting component 1, and is used for conveying the flower basket and the empty flower basket loaded with the silicon wafers to be processed to the flower basket adjusting component 1 and taking the flower basket and the empty flower basket loaded with the processed silicon wafers out of the flower basket adjusting component 1;

and the silicon wafer feeding and discharging conveying assembly is arranged on one side of the flower basket adjusting assembly 1, corresponds to the silicon wafer feeding and discharging conveying assembly, can take out the silicon wafer to be processed in the flower basket, and conveys the processed silicon wafer into the flower basket.

Through above-mentioned technical scheme, the technical effect that this application can reach lies in:

when carrying half silicon chip and go up unloading, can adjust the unloading position of basket of flowers through basket of flowers adjusting part, make its and silicon chip unloading conveyor components correspond, need not to change the specification of basket of flowers, improved the utilization ratio of basket of flowers, and then promoted conveying efficiency.

In another preferred embodiment of the present application, the on-silicon-wafer blanking conveying assembly includes:

the silicon wafer discharging and conveying mechanism 30 is connected to the main frame 4, can correspond to the basket bracket 11, and is used for conveying the silicon wafers loaded in the basket to be processed to the area to be processed, and the silicon wafers to be processed are grabbed to the processing area by the manipulator for processing;

silicon chip material loading conveyor mechanism 31 connects in main frame 4, can correspond with basket of flowers bracket 11 for with the processing silicon chip transportation to the empty basket of corresponding in the basket of flowers bracket 11, when fully loading the processing silicon chip in the empty basket of flowers, through basket of flowers circulation subassembly two 24 and unloading basket of flowers conveyor mechanism 25 shift to the finished product district.

Specifically, the defective product detecting module 32 is connected to the main frame 4, is arranged on a transmission path of the silicon wafer feeding and conveying mechanism 31, and is used for monitoring the processed silicon wafers, screening out defective products in the processed silicon wafers, enabling the screened defective product silicon wafers to enter corresponding empty baskets, and when the empty baskets are fully loaded with the defective product silicon wafers, transferring the defective product silicon wafers to a defective product area through the basket transferring assembly two 24 and the defective product basket conveying mechanism 26.

Specifically, the silicon wafer blanking conveying mechanism 30 comprises two telescopic belt lines and two transition belt lines, wherein the two telescopic belt lines are conveying lines with adjustable conveying line lengths and are respectively arranged at two ends of the transition belt line to form a complete conveying line, and the telescopic belt lines are driven by a servo motor and pushed by a cylinder to enter the inside of the flower basket to carry out wafer taking and placing work; the servo motor drives the transition belt line to convey the silicon wafer.

Specifically, the silicon wafer feeding conveying mechanism 31 comprises two telescopic belt lines and two transition belt lines, wherein the two telescopic belt lines are conveying lines with the length of the conveying lines adjustable and are respectively arranged at two ends of the transition belt lines to form a complete conveying line, and the telescopic belt lines are driven by a servo motor and pushed by a cylinder to enter the inside of the flower basket to take and place wafers; the servo motor drives the transition belt line to convey the silicon wafer.

In another preferred embodiment of the present application, the wafer shredder further includes a fragment box 33 disposed at the bottom of the defective detecting module 32, and the defective detecting module 32 transfers the damaged silicon wafer into the fragment box 33 after detecting the damaged silicon wafer.

In another preferred embodiment of the present application, the present application further comprises a plurality of silicon wafer buffering mechanisms 5, which are respectively connected to the transportation paths of the silicon wafer blanking and conveying mechanism 30 and the silicon wafer feeding and conveying mechanism 31, and can store a certain amount of silicon wafers through the storage component.

Specifically, the silicon wafer caching mechanism 5 comprises a lifting module 50, a caching trough plate 51 and a mounting plate 52; the lifting module 50 is a linear module and is vertically arranged on one side of the silicon wafer blanking conveying mechanism 30 and the silicon wafer blanking conveying mechanism 31, the cache groove plate 51 is fixed on a moving part of the linear module through the cache mounting plate 52, the cache groove plate 51 is controlled to move up and down, and the silicon wafers are stored and taken.

In another preferred embodiment of the present application, the silicon wafer normalizing device 6 further includes a plurality of silicon wafer normalizing assemblies, which are respectively connected to the transportation paths of the silicon wafer blanking conveying mechanism 30 and the silicon wafer feeding conveying mechanism 31, and can adjust the positions of the passing silicon wafers.

Specifically, the silicon wafer regulating assembly 6 comprises a third linear guide rail sliding block mechanism, a third synchronous belt mechanism 61, a regulating wheel mounting plate 62 and a regulating wheel 63, the third linear guide rail sliding block mechanism is fixed on the rack of the silicon wafer blanking conveying mechanism 30 or the silicon wafer blanking conveying mechanism 31, the third synchronous belt mechanism 61 is arranged on one side of the third linear guide rail sliding block mechanism, a belt of the third synchronous belt mechanism is fixed with a sliding block of the third linear guide rail sliding block mechanism, the regulating wheel mounting plate 62 is provided with two opposite blocks which are respectively arranged on two sides of the rack of the silicon wafer blanking conveying mechanism 30 or the silicon wafer blanking conveying mechanism 31, the bottom of the third synchronous belt mechanism is fixed on the top of the sliding block of the third linear guide rail sliding block mechanism, the regulating wheel 63 is provided with a plurality of silicon wafers which are respectively connected to the regulating wheel mounting plate 62 in parallel and rotating mode, the third synchronous belt mechanism 61 can drive the regulating wheel mounting plate 62 and the regulating wheel 63 to move on the third linear guide rail sliding block mechanism, the silicon wafers transported on the silicon wafer blanking conveying mechanism 30 or the silicon wafer blanking conveying mechanism 31 are regulated in the left and right direction, the silicon wafers are prevented from falling, smooth feeding and discharging are ensured, and discharging efficiency is improved.

In another preferred embodiment of the present application, the silicon wafer turning assembly 7 further includes a plurality of silicon wafer turning assemblies, which are respectively disposed at the discharging end of the silicon wafer discharging and conveying mechanism 30 and the feeding end of the silicon wafer feeding and conveying mechanism 31, and the storage component of the silicon wafer turning assembly can be adjusted angularly for storing the silicon wafers to be processed conveyed by the silicon wafer discharging and conveying mechanism 30 and the processed silicon wafers conveyed by the robot.

Specifically, the silicon wafer overturning assembly 7 comprises a storage rack lifting mechanism 70, a first moving base 71, a fourth linear guide rail sliding block mechanism 72, a telescopic mechanism 73, a second moving base 74, an overturning motor 75, a gear steering box 76, an overturning plate 77, a sliding base 78, a fifth linear guide rail sliding block mechanism 79, a fourth synchronous belt mechanism 80 and a silicon wafer storage rack 81; the storage rack lifting mechanism 70 is vertically fixed at the discharging end of the silicon wafer discharging and conveying mechanism 30 and the feeding end of the silicon wafer discharging and conveying mechanism 31, the first moving base 71 is fixed on a moving part of the storage rack lifting mechanism 70, two groups of linear guide rail sliding block mechanisms 72 are arranged, and are respectively fixed on the upper surface of the first moving base 71, the telescopic mechanisms 73 are fixed on the first moving base 71 and are positioned between the two groups of linear guide rail sliding block mechanisms four 72, the second moving base 74 is fixed on sliding blocks of the two groups of linear guide rail sliding block mechanisms four 72, the bottom of the second moving base is connected with the telescopic ends of the telescopic mechanisms 73, the second moving base 74 is of an L-shaped structure, mounting holes are formed in the side wall of the second moving base, the output shaft end of the turning box 76 penetrates through the mounting holes and is fixed on the second moving base 74, the turning motor 75 is fixed on the turning box 76, the output shaft of the turning box is connected with the input shaft of the turning box 76, the middle part of the turning plate 77 is vertically fixed with the output shaft of the turning box 76, the sliding base 78 is parallel to the first moving base 71, one end of the turning plate is fixed with the turning plate 77, the five linear guide rail sliding block mechanisms 79 are fixed on the bottom of the sliding base 78, the synchronous belt mechanism 80 is installed below the sliding block mechanisms 78, the sliding block mechanism, the sliding track of the four linear guide rail mechanisms 78, the sliding block mechanisms 72 is connected with the sliding block mechanisms 79, and is consistent with the sliding block mechanisms 79; the silicon chip storage rack 81 is connected above the sliding base 78 in a sliding manner, and the bottom of the silicon chip storage rack is connected with a sliding block of the linear guide rail sliding block mechanism five 79 through a sliding connection plate;

the storage rack lifting mechanism 70 can adjust the height of the silicon wafer storage rack 81 in the process of loading the silicon wafers, so as to realize the loading and unloading operation;

the second movable base 74 can be driven by the telescopic mechanism 73 to move on the track of the fourth linear guide rail sliding block mechanism 72, so that the primary position adjustment of the silicon wafer storage rack 81 is realized;

the turnover motor 75 can drive the gear turning box 76 to act, so as to drive the turnover plate 77 to rotate, and turnover of the silicon wafer storage rack 81 is realized;

the fourth synchronous belt mechanism 80 can drive the silicon wafer storage rack 81 to move on the sliding base 78 and the fifth linear guide rail sliding block mechanism 79, so that secondary position adjustment of the silicon wafer storage rack 81 is realized.

The silicon wafer overturning mechanism can realize position adjustment and angle adjustment of the silicon wafer, enables the silicon wafer to be adaptive to the grabbing position of the mechanical arm device, is favorable for improving the grabbing efficiency of the grabbing operation, and improves the working efficiency of the whole device.

In another preferred embodiment of the present application, the apparatus further comprises a main frame 4, and the basket adjusting assembly 1, the basket feeding and discharging conveyor assembly 2 and the silicon wafer feeding and discharging conveyor assembly are all connected to the main frame 4.

Specifically, above-mentioned main frame 4 is provided with double-deck support body structure, and through the section bar concatenation to a plurality of square structures, towards the one side of outside, can install baffle or door body structure.

In another preferred embodiment of the present application, the basket adjusting assembly 1 is provided with four sets, and arranged side by side, each comprising:

the flower basket bracket lifting mechanism 10 is preferably a linear module, a drag chain structure is wrapped outside a circuit of the flower basket bracket lifting mechanism, a track of the linear module is fixed on a middle frame body of the main frame 4 in the vertical direction, and a flower basket bracket mounting plate is fixed on a lifting component of the linear module and can move to the top along the bottom of the main frame 4;

the flower basket bracket 11 is of a square structure, the top and the bottom of the flower basket bracket are respectively a top plate and a bottom plate, the edges of the opposite sides are connected through a connecting column body, the front side and the rear side of the connecting column body are communicated to form a feeding and discharging channel, and the outer side of the connecting column body is fixed on the flower basket bracket mounting plate;

the flower basket moving mechanism 12 is connected to the bottom of the flower basket bracket 11, and a moving part of the flower basket moving mechanism 12 can enter the inner side of the flower basket bracket 11 and move in a direction vertical to the feeding and discharging of the flower basket;

the basket conveying mechanism 13 is arranged on a moving part of the basket moving mechanism 12, and the conveying direction of the basket conveying mechanism is consistent with the feeding and discharging directions of the basket;

the flower basket limiting mechanism 14 is arranged at the top of the flower basket bracket 11, and a limiting part of the flower basket limiting mechanism can enter the inner side of the flower basket bracket 11 to limit the flower basket;

and the detection component 15 is arranged at the top of the flower basket bracket 11 and is used for detecting the position of the silicon wafer in the flower basket.

Specifically, the basket moving mechanism 12 includes: the device comprises a first air cylinder 120, a first connecting plate 121, a first fixing plate 122 and a first guide rail sliding block mechanism 123; the first cylinder 120 is fixed on the outer side of a bottom plate of the flower basket bracket 11, a dodging hole is formed in the bottom plate of the flower basket bracket 11 corresponding to the telescopic rod stretching direction of the first cylinder 120, one end of a first connecting plate 121 is vertically fixed at the end portion of the telescopic rod of the first cylinder 120, the other end penetrates into the flower basket bracket 11 along the dodging hole, a first guide rail slider mechanism 123 is fixed on the inner side wall of the bottom plate of the flower basket bracket 11 and is provided with two groups of holes which are respectively located on two sides of the dodging hole and perpendicular to the direction of feeding and discharging of the flower basket, the bottom plate surface of a first fixing plate 122 is fixed on sliders of the two groups of guide rail slider mechanisms 123, the bottom of the first fixing plate is connected with the penetrating end of the first connecting plate 121, the flower basket conveying mechanism 13 is installed on the first fixing plate 122, the first cylinder 120 can drive the first connecting plate 121 and the first fixing plate 122 to slide along the rail of the first guide rail slider mechanism 123, and further drive the flower basket conveying mechanism 13 to adjust the feeding and discharging positions.

Specifically, a plurality of first limiting parts 124 are fixed on the inner side wall of the bottom plate of the basket support 11, and the first limiting parts 124 are arranged on the moving tracks of the first fixing plates 122 and can limit the moving range of the basket conveying mechanism 13.

Specifically, the basket conveying mechanism 13 includes: the device comprises a first driving motor 130, a belt transmission mechanism 131, a first belt conveying mechanism 132 and a transmission shaft; the first belt conveying mechanisms 132 are arranged in two groups and are respectively arranged at two ends of the first fixing plate 122 and linked through transmission shafts, the transmission direction is consistent with the feeding and discharging direction of the flower basket, the first driving motor 130 is fixed on the first fixing plate 122 and is located between the two groups of first belt conveying mechanisms 132, driving wheels of the first belt conveying mechanisms 131 are fixed on output shafts of the first driving motor 130, driven wheels are fixed on the transmission shafts, the first driving motors 130 can drive the first belt conveying mechanisms 131 to act, and therefore the first belt conveying mechanisms 132 can transport the flower basket.

Specifically, the two sides of the feeding and discharging direction of the belt conveying mechanism one 132 are provided with a first limit stop 133, the downstream position of the running track is provided with a second limit stop 134, the flower basket can be ensured to enter the flower basket bracket 11 along the correct angle, the moving accuracy is ensured, the falling risk is prevented, and the problem of cards is solved.

Specifically, the basket of flowers stop gear 14 includes: stop gear mounting panel 140, cylinder two 141, spacing push pedal 142 and basket of flowers spacing part 143, it has the mounting hole to open on the roof of basket of flowers bracket 11, stop gear mounting panel 140 gets into basket of flowers bracket 11 inboard along the mounting hole, and the lateral wall is fixed with the skeleton of basket of flowers bracket 11, the middle part of stop gear mounting panel 140 is opened along the direction of action of basket of flowers moving mechanism 12 has the bar hole, the both ends in bar hole are equipped with the detection part mounting hole respectively, cylinder two 141 passes through the cylinder mounting panel to be fixed in one side of bar trompil, its telescopic link can penetrate in the basket of flowers bracket 11 along the bar hole, spacing push pedal 142 is fixed on cylinder two 141's telescopic link, can penetrate in the basket of flowers bracket 11 along the bar hole, basket of flowers spacing part 143 sets up in the bottom of spacing push pedal 142, correspond with the spacing hole at basket of unloading top, can effectively restrict the position of basket of flowers, prevent that the basket of flowers from taking place the swing, guarantee that the silicon chip goes on smoothly.

Specifically, two detection components 15, preferably laser detection components, are provided, and are respectively disposed at the tops of the corresponding detection component mounting holes, so that the blanking condition of the silicon wafers in the flower basket can be judged according to the principle of receiving laser beam signals.

Specifically, the flower basket clamping device comprises two groups of flower basket clamping mechanisms 16, wherein the two groups of flower basket clamping mechanisms 16 are symmetrically arranged on the outer sides of two belt conveying mechanisms I132 and respectively comprise an air cylinder III 160, a connecting plate II 161 and a clamping plate 162, the air cylinder III 160 is fixed on the outer side of the corresponding belt conveying mechanism I132, one end of the connecting plate II 161 is vertically fixed on an expansion link of the air cylinder III 160, and the clamping plate 162 is fixed at the other end of the connecting plate II 161; after the basket of flowers got into basket of flowers bracket through belt conveyor mechanism 132, the cylinder of both sides is three 160 and carries out the relative motion through two 161 and the clamp plate 162 of drive connecting plate, and two clamp plates 162 can press from both sides tight basket of flowers, and it rocks, crooked, drops to place the basket of flowers when the operation of unloading in the morning, strengthens its stability.

In another preferred embodiment of the present application, the basket feeding and discharging conveying assembly 2 comprises:

the first basket circulation assembly 20 is connected to the main frame 4, can correspond to the basket bracket 11, can transport a basket loaded with silicon wafers to be processed to the basket bracket 11, and can receive an empty basket in the basket bracket 11 and a basket loaded with processed silicon wafers;

the feeding basket conveying mechanism 21 is connected to the main frame 4, arranged corresponding to the basket circulation assembly I20 and used for conveying the basket loaded with the silicon wafers to be processed to the basket circulation assembly I20;

the empty flower basket recycling mechanism 22 is connected to the main frame 4, arranged corresponding to the first flower basket circulating assembly 20 and used for recycling the empty flower basket received by the first flower basket circulating assembly 20;

the blanking basket conveying mechanism 25 is connected with the main frame 4, arranged corresponding to the basket circulation assembly I20 and used for recovering the baskets loaded with the processed silicon wafers and received by the basket circulation assembly I20;

the defective product basket conveying mechanism 26 is connected to the main frame 4, arranged corresponding to the basket circulation assembly I20 and used for recovering the baskets loaded with the defective product silicon wafers and received by the basket circulation assembly I20;

the second basket circulation assembly 24 is connected to the main frame 4, and a circulation part of the second basket circulation assembly can correspond to the basket bracket 11 and is used for receiving the empty baskets and conveying the empty baskets to the basket bracket 11;

empty basket of flowers conveying mechanism 23 connects in main frame 4, and it sets up to correspond with basket of flowers circulation subassembly two 24 for transport empty basket of flowers to basket of flowers circulation subassembly two 24.

Specifically, the first basket circulation assembly 20 comprises a first linear guide rail sliding block mechanism, a first synchronous belt mechanism and a second belt conveying mechanism; two groups of linear guide rail sliding block mechanisms are arranged, and the two groups of guide rails are horizontally fixed on a framework at the bottom of the main frame body at intervals and are vertical to the feeding and discharging direction of the flower basket bracket 11; the synchronous belt mechanism I is arranged between the guide rails of the linear guide rail slide block mechanism I, a transmission belt on one side of the synchronous belt mechanism I is fixed with the slide blocks of the linear guide rail slide block mechanism I, two groups of belt conveying mechanisms II are arranged oppositely, transmission wheels of the two groups of belt conveying mechanisms II are connected through a transmission rod and can be driven synchronously through a motor, and the two groups of belt conveying mechanisms II are fixed on the slide blocks of the linear guide rail slide block mechanism I through mounting plates; through the action of synchronous belt mechanism one, can drive belt transport mechanism two and slide along the guide rail of linear guide rail slider mechanism one, when there are a plurality of basket of flowers adjusting part 1, can be through the position that changes belt transport mechanism two, carry the basket of flowers that is loaded with the silicon chip of treating processing on material loading basket of flowers conveying mechanism 21 to different basket of flowers brackets on, transport the empty basket of flowers that unloading was accomplished to empty basket of flowers recovery mechanism 22 on different basket of flowers brackets 11, carry the basket of flowers that is loaded with the silicon chip of processing on different basket of flowers brackets on to unloading basket of flowers conveying mechanism 25, transport the basket of flowers that is loaded with the silicon chip of wastrel on different basket of flowers brackets 11 to wastrel basket of flowers conveying mechanism, accomplish automatic dispatch, the degree of freedom is higher, the automated control of being more convenient for.

Specifically, the basket circulation assembly II 24 comprises a linear guide rail sliding block mechanism II, a synchronous belt mechanism II and a belt conveying mechanism III; two groups of linear guide rail sliding block mechanisms are arranged, and the two groups of guide rails are horizontally fixed on a framework in the middle of the main frame body at intervals and are vertical to the feeding and discharging direction of the flower basket bracket 11; the two groups of belt conveying mechanisms are connected through a transmission rod and can be driven synchronously through a motor, and the two groups of belt conveying mechanisms are fixed on the sliding blocks of the linear guide rail sliding block mechanism II through mounting plates; through the action of the second synchronous belt mechanism, the guide rail of the second linear guide rail slider mechanism of the third belt conveying mechanism can be driven to slide, when a plurality of flower basket adjusting assemblies 1 exist, empty flower baskets conveyed by the third belt conveying mechanism can be conveyed to different flower basket brackets through changing the positions of the third belt conveying mechanism, silicon wafers which are processed are loaded, and automatic feeding is achieved.

Specifically, the feeding basket conveying mechanism 21, the empty basket recycling mechanism 22, the empty basket conveying mechanism 23, the discharging basket conveying mechanism 25 and the defective basket conveying mechanism 26 are all conveying belt mechanisms, a basket conveying line is formed by two side-by-side conveying belt mechanisms, and is driven by a motor, a strip-shaped stop block is fixed on the outer side of each conveying belt mechanism, so that the baskets are prevented from shifting in the movement process, and the stability of transportation is ensured; wherein, the feeding basket conveying mechanism 21, the empty basket recovery mechanism 22, the discharging basket conveying mechanism 25 and the defective basket conveying mechanism 26 are all arranged at the bottom of the main frame body, and the empty basket conveying mechanism 23 is arranged at the middle position of the main frame body.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (11)

1. The utility model provides an automatic go up unloading equipment which characterized in that includes:

a main frame;

the flower basket adjusting assembly is connected to the main frame; the position of the flower basket can be driven to be adjusted, and the feeding and discharging positions of the flower basket are further adjusted;

the feeding and discharging conveying assembly for the flower basket is connected with the main frame, arranged on the other side of the flower basket adjusting assembly, corresponds to the flower basket adjusting assembly, and is used for conveying the flower basket and the empty flower basket loaded with the silicon wafers to be processed to the flower basket adjusting assembly and taking the flower basket and the empty flower basket loaded with the processed silicon wafers out of the flower basket adjusting assembly;

and the silicon wafer feeding and discharging conveying component is connected to the main frame, arranged on the other side of the flower basket adjusting component, corresponds to the flower basket adjusting component, can take out the silicon wafer to be processed in the flower basket, and conveys the processed silicon wafer into the flower basket.

2. The semi-automatic loading and unloading device according to claim 1, wherein the silicon wafer loading and unloading conveying assembly comprises:

the silicon wafer discharging and conveying mechanism is connected with the main frame, can correspond to the basket bracket and is used for conveying the silicon wafers loaded in the basket of the silicon wafers to be processed to the area to be processed, and the silicon wafers to be processed are grabbed to the processing area by the mechanical arm to be processed;

and the silicon wafer feeding conveying mechanism is connected with the main frame, can correspond to the flower basket bracket and is used for conveying the processed silicon wafers to the empty flower basket corresponding to the flower basket bracket, and when the empty flower basket is fully loaded with the processed silicon wafers, the processed silicon wafers are transferred to a finished product area through the flower basket circulation assembly II and the discharging flower basket conveying mechanism.

3. The semi-automatic loading and unloading device according to claim 2, wherein the silicon wafer loading and unloading conveying assembly further comprises: and the defective product detection module is connected with the main frame, is arranged on a transmission path of the silicon wafer feeding and conveying mechanism, and is used for monitoring the processed silicon wafers, screening defective products in the processed silicon wafers, enabling the screened defective product silicon wafers to enter corresponding empty baskets, and transferring the defective product silicon wafers to a defective product area through the basket circulation component II and the defective product basket conveying mechanism when the empty baskets are fully loaded with the defective product silicon wafers.

4. The semi-automatic loading and unloading device according to claim 3, further comprising a scrap box disposed at the bottom of the defective product detecting module, wherein the defective product detecting module detects a damaged silicon wafer and transfers the damaged silicon wafer into the scrap box.

5. The semi-automatic loading and unloading device according to claim 4, further comprising a plurality of silicon wafer caching mechanisms respectively connected to the transportation paths of the silicon wafer unloading and conveying mechanism and the silicon wafer loading and conveying mechanism, and capable of storing a certain amount of silicon wafers through a storage component.

6. The semi-automatic loading and unloading device as claimed in claim 5, further comprising a plurality of silicon wafer regulating assemblies respectively connected to the transportation paths of the silicon wafer unloading and conveying mechanism and the silicon wafer loading and conveying mechanism, and capable of adjusting the positions of passing silicon wafers.

7. The semi-automatic loading and unloading device as claimed in claim 6, further comprising a plurality of silicon wafer overturning assemblies respectively arranged at the unloading end of the silicon wafer unloading and conveying mechanism and the loading end of the silicon wafer unloading and conveying mechanism, wherein the storage part of the silicon wafer overturning assemblies can be adjusted in angle and is used for storing the silicon wafers to be processed conveyed by the silicon wafer unloading and conveying mechanism and the processed silicon wafers conveyed by the manipulator.

8. The semi-automatic feeding and discharging device as claimed in claim 7, wherein the basket adjusting assemblies are provided with at least two groups which are arranged side by side and each comprise:

the flower basket bracket lifting mechanism is arranged in the middle of the main rack, and a lifting component of the flower basket bracket lifting mechanism can move to the top along the bottom of the main rack;

the outer side of the flower basket bracket is connected with the lifting component of the flower basket bracket lifting mechanism;

the flower basket moving mechanism is connected to the bottom of the flower basket bracket, and a moving part of the flower basket moving mechanism can enter the inner side of the flower basket bracket and move in a direction vertical to the feeding and discharging of the flower basket;

the flower basket conveying mechanism is arranged on a moving part of the flower basket moving mechanism, and the conveying direction of the flower basket conveying mechanism is consistent with the feeding direction and the discharging direction of the flower basket.

9. The semi-automatic loading and unloading device according to claim 8, wherein the basket adjusting assembly further comprises: the flower basket limiting mechanism is arranged at the top of the flower basket bracket, and a limiting part of the flower basket limiting mechanism can enter the inner side of the flower basket bracket to limit the flower basket.

10. The semi-automatic loading and unloading apparatus of claim 9, wherein the basket adjusting assembly further comprises: and the detection component is arranged at the top of the flower basket bracket and used for detecting the position of the silicon wafer in the flower basket.

11. The semi-automatic feeding and discharging device as claimed in claim 10, wherein the basket feeding and discharging conveying assembly comprises:

the first basket circulation assembly is connected with the main frame, a circulation component of the first basket circulation assembly can correspond to the basket bracket, conveys the basket loaded with the silicon wafers to be processed to the basket bracket, and receives the empty basket in the basket bracket and the basket loaded with the processed silicon wafers;

the feeding basket conveying mechanism is connected with the main frame, corresponds to the basket circulation assembly I, and is used for conveying the basket loaded with the silicon wafers to be processed to the basket circulation assembly I;

the empty flower basket recycling mechanism is connected with the main rack, corresponds to the first flower basket circulating assembly and is used for recycling the empty flower basket received by the first flower basket circulating assembly;

the blanking basket conveying mechanism is connected with the main frame, corresponds to the basket circulation assembly and is used for recovering a basket loaded with processed silicon wafers and received by the basket circulation assembly;

the defective product basket conveying mechanism is connected with the main frame, corresponds to the basket circulation assembly and is used for recovering the baskets loaded with the defective product silicon wafers and received by the basket circulation assembly;

the flower basket circulation assembly II is connected with the main frame, and a circulation component of the flower basket circulation assembly II can correspond to the flower basket bracket and is used for receiving the empty flower basket and conveying the empty flower basket to the flower basket bracket;

and the hollow flower basket conveying mechanism is connected with the main frame, corresponds to the flower basket circulation assembly II, and is used for conveying the hollow flower basket to the flower basket circulation assembly II.

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