CN115900590A - High-signal-to-noise-ratio spectrum confocal three-dimensional detection system and method - Google Patents
High-signal-to-noise-ratio spectrum confocal three-dimensional detection system and method Download PDFInfo
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Abstract
The application relates to a spectral confocal three-dimensional detection system and method with a high signal-to-noise ratio, and belongs to the technical field of three-dimensional detection. The method comprises the following steps: a multi-color light source unit including a plurality of optical channels arranged in an array, a multi-color light source inputting multi-color light beams to the plurality of optical channels, and a spatial light modulator controlling simultaneous or partial input of the multi-color light beams to the respective optical channels; the polychromatic light source unit and the measured object are coaxial and are sequentially provided with a first lens group, a spectroscope and a second lens group, and a third lens group, a slit, an imaging spectrometer and a camera are sequentially placed on the right side of the spectroscope. The utility model provides a each light channel of spatial light modulator control is sent out the beam of mixing colours simultaneously or partly, and then fuses point scan mode and line scan mode, can promote the SNR of system to accessible different working modes satisfy the application demand different to SNR and detection time.
Description
Technical Field
The application relates to the technical field of three-dimensional detection, in particular to a high signal-to-noise ratio spectrum confocal three-dimensional detection system and method.
Background
The three-dimensional detection technology based on spectrum confocal is a common technical means in the field of optical detection of three-dimensional microstructures such as wafers, LED panels and PCBs, and has the advantages of high detection precision, high detection speed and the like. The schematic diagram of a three-dimensional microstructure detection system based on spectral confocal is shown in fig. 1, and the basic principle of detection is as follows:
the polychromatic light beam emitted from the polychromatic light source 1 passes through the first lens group 2 and the second lens group 4 and then is dispersed along the z-axis, that is, the light beams with different wavelengths are focused at different positions of the z-axis, and as shown in fig. 1, the focal planes with wavelengths λ 1, λ 2 and λ 3 are sequentially arranged from top to bottom along the z-axis direction.
It is assumed that the surface of a certain region of the object 5 to be measured is located on the focal plane of the light beam with the wavelength λ 2, i.e. the light beam with the wavelength λ 2 converges to a focal spot on the surface of the region of the object to be measured, while the light beams with the wavelengths λ 1 and λ 3 form a dispersed light spot in the region.
The third lens group 7 is the same as the first lens group 2, and the position of the slit 8 is conjugate with the position of the polychromatic light source 1, so that after the light beam reflected by the object to be measured 5 passes through the second lens group 4, the beam splitter 3 and the third lens group 7, part of the light beam with the wavelength of lambda 2 still converges into a focal spot on the slit plane, and part of the light beam with the wavelengths of lambda 1 and lambda 3 also forms a dispersed light spot on the slit 8 plane.
After spatial filtering by the slit 8, the imaging spectrometer 9 will obtain a spectral line with a wavelength λ 2. When the stage 6 is moved so that the beam is focused on another region of the object to be measured, the imaging spectrometer 9 will also acquire a spectral line corresponding to the region. Thus, the object 5 to be detected can be detected in three dimensions in a scanning mode.
In the related art, the conventional spectrum confocal detection system can be classified into a point scanning type and a line scanning type according to two types of light sources, namely a point light source and a line light source. In the point-scanning spectrum confocal detection system shown in fig. 1, light beams of each wavelength part of the polychromatic light beams emitted by the point polychromatic light source are converged into a point on a corresponding focal plane, and the single exposure of the camera 10 acquires spectral information corresponding to the height of the region of the object 5 to be measured illuminated by the point. Therefore, the object stage 6 needs to move and scan in two dimensions, namely the x direction and the y direction, so as to perform three-dimensional measurement on the measured object.
In the line scanning type spectrum confocal detection system shown in fig. 1, the line polychromatic light source is disposed along the x-axis direction, and the light beams of each wavelength portion of the polychromatic light beams emitted by the line polychromatic light source converge into a line along the x-axis direction on the corresponding focal plane. Thus, a single exposure of the camera 10 can obtain all the spectral information corresponding to different heights in the whole linear region of the object 5 illuminated by the line. Therefore, the object to be measured can be measured in three dimensions only by moving and scanning the object stage 6 along the y-axis direction.
In the on-line scanning spectrum confocal detection system, fig. 2 (a) is a cross section of a measured object, and fig. 2 (b) is a spectrum schematic image of the surface structure of the measured object 5 acquired by the system through single exposure; calculating the width Δ p of the protruding spectral line in the graph 2 (b) and the wavelength difference λ between the protruding spectral line and the base spectral line, the width Δ d and the height Δ h of the rectangular protruding surface of the measured object 5 shown in the graph 2 (a) can be respectively obtained. The convex spectral line and the base spectral line have corresponding intensity distributions along the spectral wavelength, and the algorithm first determines the wavelength λ 2 corresponding to the peak intensity of the convex spectral line and the wavelength λ 1 corresponding to the peak intensity of the base spectral line, and then subtracts the peak intensity from the base spectral line to obtain the wavelength difference Δ λ, i.e., Δ λ = λ 2- λ 1.
However, when the surface of the measured object 5 is rough or has low reflectivity, and the intensity peak values of the convex line and the base line are slightly different from the surrounding background, the errors of the wavelengths λ 1 and λ 2 corresponding to the found peak values may be large, and the error of the calculated wavelength difference λ is correspondingly large. Therefore, the error of the convex surface height h of the finally obtained measured object 5 is large, and the measurement accuracy of the system is affected. Therefore, it is necessary to improve the ratio of the intensity peak to the background noise, i.e. the signal-to-noise ratio (SNR), to improve the detection accuracy of the system for such an object 5 to be detected.
The existing spectrum confocal system only comprises a point-type spectrum confocal system or a line-scanning spectrum confocal system, the point-type spectrum confocal system has higher detection precision but slow detection speed, and the line-scanning spectrum confocal system has higher signal-to-noise ratio although the scanning speed is fast, so that the prior art does not comprise a spectrum confocal system, can provide multiple working modes and further meets the requirements of different occasions.
Disclosure of Invention
The embodiment of the application provides a spectral confocal three-dimensional detection system and method with a high signal-to-noise ratio, and aims to solve the problem that no spectral confocal system exists in the related art, and multiple working modes can be provided, so that the requirements of different occasions are met.
The embodiment of the present application provides, in a first aspect, a spectral confocal three-dimensional detection system with a high signal-to-noise ratio, including:
the light source unit of the compound color, the said compound color light source unit includes several light channels arranged in array, the compound color light source to let in the compound color light beam to several light channels, and control to input the spatial light modulator of the compound color light beam to every light channel at the same time or some;
a first lens group, a spectroscope and a second lens group are sequentially arranged between the compound color light source unit and the object to be measured, the compound color light source unit, the first lens group and the second lens group are coaxial, and the first lens group, the spectroscope and the second lens group jointly enable light with different wavelengths modulated by the spatial light modulator to be focused at different heights of the object to be measured;
the third lens group, the slit, the imaging spectrometer and the camera are sequentially arranged on the right side of the spectroscope, and the third lens group focuses light reflected by the measured object after being reflected by the spectroscope and then is incident to the slit for spatial filtering.
In some embodiments: the plurality of optical channels are composed of a plurality of arrayed optical fibers which are arrayed in sequence, each optical fiber of the arrayed optical fibers forms an optical channel for transmitting the polychromatic light beams, and the spatial light modulator controls the plurality of optical fibers to emit the polychromatic light beams simultaneously or partially;
or, the plurality of optical channels are array optical waveguides, the array optical waveguides are provided with a plurality of optical channels for transmitting the polychromatic light beams, and the spatial light modulator controls the plurality of optical channels of the array optical waveguides to emit the polychromatic light beams simultaneously or partially.
In some embodiments: the spatial light modulator controls the light channels to sequentially emit polychromatic light beams one by one, and the measured object is detected in a point-by-point scanning mode.
In some embodiments: the spatial light modulator controls each optical channel to emit polychromatic light beams at intervals of one or more optical channels, and the polychromatic light beams are detected in a multipoint scanning mode.
In some embodiments: the spatial light modulator divides all the light channels into a plurality of areas, so that some areas detect the object to be detected in a multi-point scanning mode, and other areas detect the object to be detected in a line scanning mode.
In some embodiments: the slit at the entrance of the imaging spectrometer is an array fiber or an array optical waveguide, and each optical channel of the array fiber or the array optical waveguide is conjugated with each light-emitting channel of the light polychromatic light source one by one.
In some embodiments: the plurality of optical channels are array micro-lenses, the array micro-lenses are provided with a plurality of optical channels for transmitting the polychromatic light beams, and the spatial light modulator controls the plurality of optical channels of the array micro-lenses to emit the polychromatic light beams simultaneously or partially.
In a second aspect, an embodiment of the present invention provides a high snr spectral confocal three-dimensional detection method, which uses a high snr spectral confocal three-dimensional detection system described in any one of the above embodiments, and the method includes:
the light source emits complex color light beam, and the spatial light modulator controls to input complex color light beam to each light channel simultaneously or partially to form line scanning light beam or point scanning light beam;
the polychromatic light beam forms a parallel light beam after passing through the first lens group, the sub-light beam after passing through the spectroscope enters the second lens group, and the light waves with different wavelengths after passing through the second lens group are converged at different positions on the optical axis to generate axial dispersion;
the light beam reflected by the measured object is reflected by the second lens group, the spectroscope and the third lens group, is focused by the third lens group, finally enters the imaging spectrometer after the slit and is recorded by the camera, and the height difference value of the measured object detection area can be obtained by resolving the difference value of the wavelength corresponding to the recorded spectrum intensity peak value.
In some embodiments: the spatial light modulator controls the light channels to sequentially emit polychromatic light beams one by one, and the measured object is detected in a point-by-point scanning mode.
In some embodiments: the spatial light modulator controls each optical channel to emit polychromatic light beams at one or more intervals at the same time, and the polychromatic light beams are detected in a multipoint scanning mode;
or the spatial light modulator controls each optical channel to simultaneously emit polychromatic light beams, and the polychromatic light beams are detected in a line scanning mode;
or, the spatial light modulator divides all the light channels into a plurality of areas, so that some areas detect the object to be detected in a multi-point scanning mode, and other areas detect the object to be detected in a line scanning mode.
The technical scheme who provides this application brings beneficial effect includes:
compared with the traditional coaxial spectrum confocal system, the spectrum confocal three-dimensional detection system is provided with the compound color light source unit which comprises a plurality of optical channels arranged in an array manner, a compound color light source for inputting compound color light beams to the optical channels and a spatial light modulator for controlling the optical channels to simultaneously or partially feed the compound color light beams. The spatial light modulator can control the simultaneous or partial input of the polychromatic light beams to each optical channel, so that a plurality of working modes are provided, and the application requirements of users on different SNR and detection time can be met.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a three-dimensional microstructure detection system based on spectral confocal in the prior art;
FIG. 2 is a schematic diagram of a surface structure and a spectral representation of a measured object in the background art;
FIG. 3 is a schematic diagram of a high SNR spectroscopic confocal three-dimensional detection system according to an embodiment of the present application;
fig. 4 is a schematic structural diagram of a plurality of optical channels according to an embodiment of the present application.
Reference numerals:
1. a polychromatic light source; 2. a first lens group; 3. a beam splitter; 4. a second lens group; 5. a measured object; 6. an object stage; 7. a third lens group; 8. a slit; 9. an imaging spectrometer; 10. a camera; 11. a spatial light modulator; 12. and (3) a light channel.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The embodiment of the application provides a spectral confocal three-dimensional detection system and method with a high signal-to-noise ratio, and the system and method can solve the problem that no spectral confocal system exists in the related technology, and multiple working modes can be provided, so that the requirements of different occasions are met.
Referring to fig. 3 and 4, in a first aspect, an embodiment of the present application provides a high signal-to-noise ratio spectroscopic confocal three-dimensional detection system, including:
a multi-color light source unit including a plurality of light channels 12 arranged in an array, a multi-color light source inputting a multi-color light beam to the plurality of light channels 12, and a spatial light modulator 11 controlling simultaneous or partial input of the multi-color light beam to each of the light channels 12. The polychromatic light source unit and the measured object 5 are coaxial and are sequentially provided with a first lens group 2, a spectroscope 3 and a second lens group 4, and a third lens group 7, a slit 8, an imaging spectrometer 9 and a camera 10 are sequentially arranged on the right side of the spectroscope 3. Be equipped with the objective table 6 that supports and fix a position the measured object 5 in the bottom of measured object 5, objective table 6 is equipped with the X axle straight line module or the Y axle straight line module of adjusting measured object 5 along X axle direction or the motion of Y axle direction.
The first lens group 2, the beam splitter 3 and the second lens group 4 together enable the light with different wavelengths modulated by the spatial light modulator 11 to be focused on different heights of the object 5 to be measured. The first lens group 2 and the second lens group 4 are used for axially dispersing the polychromatic light beam and focusing the dispersed light beams with different wavelengths onto different heights of the surface of the object to be measured 5. The spectroscope 3 is used for transmitting part of light rays of the polychromatic light beam and outputting a transmitted light beam; the spectroscope 3 is arranged in front of the polychromatic light source and used for receiving polychromatic light beams emitted by the polychromatic light source and transmitting part of light rays in the polychromatic light beams.
The third lens group 7 focuses light reflected by the object to be measured 5 after being reflected by the beam splitter and then enters the slit 8 for spatial filtering. The slit 8 is positioned at the entrance of the imaging spectrometer 9, the position of the slit 8 is conjugated with the position of the polychromatic light source, and the slit 8 is used for receiving the reflected light beam transmitted by the third lens group 7 and filtering out the reflected light beam with a specific wavelength range; wherein the specific wavelength range is the wavelength range of light focused on the surface of the object to be measured 5. The light emitted from the third lens group 7 is filtered by a slit 8, so that the reflected light focused on the surface wavelength of the object 5 to be measured can pass through the slit 8, and the reflected light focused on the surface wavelength of the object 5 to be measured can be filtered by the slit 8.
The multi-color light source unit of the embodiment of the application is provided with a plurality of light channels 12 arranged in an array, multi-color light beams transmitted in each light channel 12 are not interfered with each other, a multi-color light source for inputting the multi-color light beams to the plurality of light channels 12, and a spatial light modulator 11 for controlling the multi-color light beams to be input to each light channel 12 simultaneously or partially. The spatial light modulator 11 can control simultaneous or partial input of the polychromatic light beams to each light channel 12, so that the point scanning mode and the line scanning mode are organically integrated, the SNR of the system can be improved, and application requirements of different SNRs and detection times can be met through different working modes.
In some alternative embodiments: referring to fig. 3 and 4, an optical channel 12 of the spectral confocal three-dimensional detection system with a high signal-to-noise ratio is formed by a plurality of array optical fibers arranged in an array in sequence, each optical fiber of the array optical fibers forms an optical channel 12 for transmitting a polychromatic light beam, and a spatial light modulator 11 controls the plurality of optical fibers to emit the polychromatic light beam simultaneously or partially.
Or, the plurality of optical channels 12 are arrayed optical waveguides, the arrayed optical waveguides are provided with the plurality of optical channels 12 for transmitting the polychromatic light beams, and the spatial light modulator 11 controls the plurality of optical channels 12 of the arrayed optical waveguides to emit the polychromatic light beams simultaneously or partially. The light emitting surface of each optical channel 12 of the array optical waveguide is of a rectangular structure, so that two adjacent tested areas can be spliced conveniently by the tested object 5. The slit 8 at the entrance of the imaging spectrometer 9 is an array fiber or an array optical waveguide, and each optical channel 12 of the array fiber or the array optical waveguide is conjugated with each light-emitting channel of the light polychromatic light source one by one.
In fig. 2 (b), the scan width direction is defined as the transverse direction with m columns of pixels, the spectrum shown in fig. 2 is divided into n longitudinal regions in the scan direction (where n = m/bin, bin being a positive integer), and each of the longitudinal regions is considered as one channel, and each channel has an intensity distribution similar to that shown in fig. 2 (c). The ratio of the peak of the spectral line intensity in each channel to the background noise is the signal-to-noise ratio.
In some alternative embodiments: referring to fig. 3 and 4, in the present embodiment, a spectral confocal three-dimensional detection system with a high signal-to-noise ratio is provided, where a spatial light modulator 11 of the spectral confocal three-dimensional detection system controls optical channels 12 to sequentially emit polychromatic light beams one by one, so as to detect an object 5 to be detected in a point-by-point scanning manner. This mode can avoid crosstalk of stray light between adjacent optical channels 12, effectively improving SNR in the corresponding channel. The working mode has longer detection time, but meets the application scene with higher requirement on detection SNR.
Alternatively, the spatial light modulator 11 controls the optical channels to emit polychromatic light beams at intervals of one or more optical channels, so as to detect the object 5 in a multi-point scanning manner. The working mode can shorten the detection time, avoid the stray light crosstalk of the adjacent optical channels 12 to a certain extent, improve the SNR in the corresponding channel to a certain extent, but sacrifice the resolution in the scanning width direction. The working mode compromises the detection time and the detection SNR, and meets the application scene with requirements on the detection time and the detection SNR at the same time.
When the spatial light modulator 11 controls each optical channel to emit the polychromatic light beam at every interval of one or more optical channels, whether each point on the scanning width needs to be detected can be selected according to needs. If each point on the scanning width does not need to be detected, the next line can be scanned in the same or different scanning modes after each light channel emits the polychromatic light beams at the same time at intervals of one or more light channels.
If each point on the scanning width needs to be detected, time-sharing detection can be performed, for example, n optical channels are total, and for each scanning line, the odd optical channels are controlled to emit the polychromatic light beams at the time t1, and the even optical channels are controlled to emit the polychromatic light beams at the time t2, so that each point on each scanning line can be detected, and the next scanning line can be scanned in the same scanning mode.
Of course, different scanning lines can be scanned by using different optical channels, for example, a first scanning line emits a polychromatic light beam by using an odd-numbered optical channel, and a second scanning line emits a polychromatic light beam by using an even-numbered optical channel, so that not only is the scanning time saved, but also the omission of information of some points to be detected on the object to be detected can be avoided.
Alternatively, the spatial light modulator 11 may also divide all the optical channels 12 into several regions, so that some of the regions detect the object 5 in a multi-point scanning manner, and other regions detect the object 5 in a line scanning manner. The point scanning mode and the line scanning mode are organically integrated, and different requirements of users are met.
In some alternative embodiments: referring to fig. 3 and 4, the embodiments of the present application provide a spectral confocal three-dimensional detection system with a high signal-to-noise ratio, where a plurality of optical channels 12 of the spectral confocal three-dimensional detection system are array microlenses, the array microlenses are provided with a plurality of optical channels 12 for transmitting polychromatic light beams, and a spatial light modulator 11 controls the plurality of optical channels 12 of the array microlenses to emit polychromatic light beams simultaneously or partially. When the light emitting surface of each optical channel 12 of the array microlens is a rectangular structure, the splicing of two adjacent measured areas of the measured object 5 can be facilitated.
By the spectrum confocal three-dimensional detection system, the spatial light modulator 11 can flexibly control the time of inputting the polychromatic light beams into each light channel 12, so that various working modes can be provided, and the corresponding working modes can be flexibly selected according to the requirements on the signal-to-noise ratio and the detection time.
Referring to fig. 3 and 4, a second aspect of the embodiments of the present application provides a high signal-to-noise ratio spectral confocal three-dimensional detection method, which uses a high signal-to-noise ratio spectral confocal three-dimensional detection system described in any of the above embodiments, and the method includes:
step 1, a polychromatic light source emits polychromatic light beams, and a spatial light modulator 11 controls to input polychromatic light beams to all light channels 12 simultaneously or partially so as to form line scanning light beams or point scanning light beams on an object 5 to be measured.
And 2, forming parallel light beams by the polychromatic light beams after passing through the first lens group 2, enabling the polychromatic light beams to pass through the spectroscope 3 and then enter the second lens group 4, and converging light waves with different wavelengths at different positions on an optical axis after passing through the second lens group 4 to generate axial dispersion.
And 3, collecting the light beam reflected by the measured object 5 by the second lens group 4, reflecting the light beam by the spectroscope 3, focusing the light beam by the third lens group 7, finally entering the slit 8 for spatial filtering and light splitting by the imaging spectrometer 9, imaging and recording on the photosensitive surface of the camera 10, and calculating the difference value of the wavelength corresponding to the recorded spectral intensity peak value to obtain the height difference value of the detection area of the measured object 5.
In some alternative embodiments: referring to fig. 3 and 4, the present embodiment provides a spectral confocal three-dimensional detection method with high snr, in which a multi-color light source unit is composed of a plurality of optical channels 12 arranged in an array, a multi-color light source for inputting multi-color light beams to the plurality of optical channels 12, and a spatial light modulator 11 for controlling the simultaneous or partial input of the multi-color light beams to each optical channel 12. The multi-color light source unit has several operation modes under the control of the spatial light modulator 11:
the first working mode is as follows: the spatial light modulator 11 controls the light channels 12 to sequentially emit polychromatic light beams one by one, and detects the object 5 to be measured in a point-by-point scanning manner. This mode can avoid crosstalk of stray light between adjacent optical channels 12, effectively improving SNR in the corresponding channel. The working mode has longer detection time, but meets the application scene with higher requirement on detection SNR.
And a second working mode: the spatial light modulator 11 controls each optical channel to emit a polychromatic light beam at every other one or more optical channels, and detects the object 5 to be measured in a multi-point scanning manner. The working mode can shorten the detection time, avoid the stray light crosstalk of the adjacent optical channels 12 to a certain extent, improve the SNR in the corresponding channel to a certain extent, but sacrifice the resolution in the scanning width direction. The working mode compromises the detection time and the detection SNR, and meets the application scene with requirements on the detection time and the detection SNR at the same time.
And a third working mode: the spatial light modulator 11 controls each optical channel 12 to emit a polychromatic light beam simultaneously, and detects the object 5 to be measured in a line scanning manner. The working mode is that each optical channel 12 of the array optical fiber, the array optical waveguide or the array micro lens simultaneously emits the polychromatic light beam. The working mode can meet the application scene with higher requirement on detection time.
And a fourth working mode: the spatial light modulator 11 divides all the light channels 12 into several regions, so that some of them detect the object 5 in the form of multi-point scanning, while other regions detect the object 5 in the form of line scanning. The working mode meets the application scenario that has higher SNR requirement on some areas of the sample.
Principle of operation
The embodiment of the application provides a spectrum confocal three-dimensional detection system and a method with high signal-to-noise ratio, because the spectrum confocal three-dimensional detection system is provided with a compound color light source unit, the compound color light source unit comprises a plurality of optical channels 12 which are arranged in an array, a compound color light source which inputs compound color light beams to the plurality of optical channels 12, and a spatial light modulator 11 which controls the compound color light beams to be input to all the optical channels 12 simultaneously or partially; the polychromatic light source unit and the measured object 5 are coaxial and are sequentially provided with a first lens group 2, a spectroscope 3 and a second lens group 4, and a third lens group 7, a slit 8, an imaging spectrometer 9 and a camera 10 are sequentially arranged on the right side of the spectroscope 3.
Therefore, the multi-color light source unit of the present application is provided with a plurality of light channels 12 arranged in an array, a multi-color light source that inputs a multi-color light beam to the plurality of light channels 12, and a spatial light modulator 11 that controls the simultaneous or partial input of the multi-color light beam to each of the light channels 12. The spatial light modulator 11 can control simultaneous or partial input of the polychromatic light beams to each light channel 12, so that the point scanning mode and the line scanning mode are organically integrated, the SNR of the system can be improved, and application requirements of different SNRs and detection times can be met through different working modes.
In the description of the present application, it should be noted that the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience in describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and operate, and thus, should not be construed as limiting the present application. Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly and encompass, for example, both fixed and removable coupling as well as integral coupling; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.
It is noted that, in the present application, relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a," "8230," "8230," or "comprising" does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.
The previous description is only an example of the present application, and is provided to enable any person skilled in the art to understand or implement the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A spectral confocal three-dimensional detection system with high signal-to-noise ratio, comprising:
the light source unit of the compound color, the said compound color light source unit includes several light channels (12) arranged in array, the compound color light source to the light channel (12) input compound color light beam of several light channels, and control every light channel (12) to send out the spatial light modulator (11) of the compound color light beam at the same time or partly;
a first lens group (2), a spectroscope (3) and a second lens group (4) are sequentially arranged between the compound color light source unit and an object to be measured (5), the compound color light source unit, the first lens group (2) and the second lens group (4) are coaxial, and the first lens group (2), the spectroscope (3) and the second lens group (4) jointly enable light with different wavelengths modulated by the spatial light modulator (11) to be focused at different heights of the object to be measured (5);
third lens group (7), slit (8), imaging spectrometer (9) and camera (10) have been placed in proper order on spectroscope (3) right side, third lens group (7) are focused and are incidenting to slit (8) and carry out spatial filtering after passing through spectroscope (3) reflection to the light that is passed through measured object (5) reflection.
2. A high signal-to-noise ratio spectroscopic confocal three-dimensional detection system as claimed in claim 1 wherein:
the plurality of optical channels (12) are composed of a plurality of array optical fibers which are sequentially arrayed, each optical fiber of the array optical fibers forms an optical channel (12) for transmitting the polychromatic light beam, and the spatial light modulator (11) controls the plurality of optical fibers to emit the polychromatic light beam simultaneously or partially;
or, the plurality of optical channels (12) are arrayed optical waveguides, the arrayed optical waveguides are provided with a plurality of optical channels (12) for transmitting the polychromatic light beams, and the spatial light modulator (11) controls the plurality of optical channels (12) of the arrayed optical waveguides to emit the polychromatic light beams simultaneously or partially.
3. A high signal-to-noise ratio spectroscopic confocal three-dimensional detection system as claimed in claim 1 wherein:
the spatial light modulator (11) controls the light channels (12) to sequentially emit polychromatic light beams one by one, and the measured object (5) is detected in a point-by-point scanning mode.
4. A high signal-to-noise ratio spectroscopic confocal three-dimensional detection system as claimed in claim 1, wherein:
the spatial light modulator (11) controls each optical channel (12) to emit the polychromatic light beam at one or more intervals of the optical channels (12) simultaneously, and the object to be detected (5) is detected in a multi-point scanning mode.
5. A high signal-to-noise ratio spectroscopic confocal three-dimensional detection system as claimed in claim 1, wherein:
the spatial light modulator (11) divides all the light channels (12) into a plurality of areas, so that some areas detect the object to be measured (5) in a multi-point scanning mode, and other areas detect the object to be measured (5) in a line scanning mode.
6. A high signal-to-noise ratio spectroscopic confocal three-dimensional detection system as claimed in claim 1 or 2, wherein:
the slit (8) at the entrance of the imaging spectrometer (9) is an array optical fiber or an array optical waveguide, and each optical channel (12) of the array optical fiber or the array optical waveguide is conjugated with each light-emitting channel in the light polychromatic light source one by one.
7. A high signal-to-noise ratio spectroscopic confocal three-dimensional detection system as claimed in claim 1 wherein:
the light channels (12) are array micro-lenses, the array micro-lenses are provided with the light channels (12) for transmitting the polychromatic light beams, and the spatial light modulator (11) controls the light channels (12) of the array micro-lenses to emit the polychromatic light beams simultaneously or partially.
8. A high signal-to-noise ratio spectroscopic confocal three-dimensional detection method, wherein the method uses a high signal-to-noise ratio spectroscopic confocal three-dimensional detection system of any one of claims 1 to 7, the method comprising:
a polychromatic light source emits polychromatic light beams, and a spatial light modulator (11) controls all light channels (12) to emit the polychromatic light beams simultaneously or partially so as to form line scanning light beams or point scanning light beams;
the polychromatic light beams form parallel light beams after passing through the first lens group (2), the sub-light beams enter the second lens group (4) after passing through the rear part of the spectroscope (3), and the light beams with different wavelengths are converged at different positions on an optical axis after passing through the second lens group (4) to generate axial dispersion;
the light beam reflected by the object to be measured (5) is collected by the second lens group (4), reflected by the spectroscope (3) and focused by the third lens group (7), finally is subjected to spatial filtering and light splitting by the imaging spectrometer (9) through the slit (8), then is imaged and recorded on the photosensitive surface of the camera (10), and the height difference of the detection area of the object to be measured (5) is obtained by resolving and recording the wavelength difference corresponding to each spectral intensity peak value.
9. The spectroscopic confocal three-dimensional detection method with high signal-to-noise ratio according to claim 8, wherein:
the spatial light modulator (11) controls the light channels (12) to sequentially emit polychromatic light beams one by one, and the measured object (5) is detected in a point-by-point scanning mode.
10. The spectroscopic confocal three-dimensional detection method with high signal-to-noise ratio according to claim 8, wherein:
the spatial light modulator (11) controls each optical channel (12) to emit polychromatic light beams at one or more intervals of the optical channels (12) simultaneously, and detects the object to be detected (5) in a multipoint scanning mode;
or the spatial light modulator (11) controls each optical channel (12) to emit a polychromatic light beam simultaneously, and the measured object (5) is detected in a line scanning mode;
or the spatial light modulator (11) divides all the light channels (12) into a plurality of areas, so that some areas detect the object to be detected (5) in a multi-point scanning mode, and other areas detect the object to be detected (5) in a line scanning mode.
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