CN115855321A - Pressure conversion unit and pressure sensor - Google Patents
Pressure conversion unit and pressure sensor Download PDFInfo
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- CN115855321A CN115855321A CN202211481956.9A CN202211481956A CN115855321A CN 115855321 A CN115855321 A CN 115855321A CN 202211481956 A CN202211481956 A CN 202211481956A CN 115855321 A CN115855321 A CN 115855321A
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Abstract
The application discloses pressure conversion unit and pressure sensor is applied to the semiconductor field. The pressure conversion unit can comprise a load expansion element and an elastic metal element; the elastic metal element is respectively connected with the load-measuring telescopic element and the quartz resonator. The pressure measuring telescopic element is a device which is subjected to telescopic change under pressure; the position of the rotation center of the elastic metal element is adjusted according to the range or sensitivity, and the elastic metal element is used for transmitting the pressure applied to the load-measuring telescopic element to the quartz resonator, so that the resonant frequency of the quartz resonator is changed. The present application enables the production of a pressure conversion unit with low cost and low processing difficulty.
Description
Technical Field
The present application relates to the field of semiconductor technology, and in particular, to a pressure conversion unit and a pressure sensor.
Background
Resonators are widely used in various electronic products for frequency control as electronic components capable of generating a resonance frequency. Quartz crystals, which are inherently piezoelectric, are often used to fabricate resonators. The double-end quartz tuning fork resonator can be manufactured in batch by using an MEMS (Micro-Electro-Mechanical System) process, and has the characteristics of simple structure, high resolution and good linearity. However, the quartz resonator itself cannot bear large stress and strain, is very easy to break, and is usually required to be matched with a pressure conversion unit when used as a sensitive element. The pressure conversion unit can convert a large external input pressure into a micro strain matched with the quartz resonator, the micro strain force acts on the quartz resonator, and the conversion of the input pressure and the vibration frequency is completed by changing the output frequency change of the quartz resonator.
In the related art, when the quartz resonator is applied to an application scene of ultrahigh pressure test such as hundreds of megapascals, the adaptive pressure conversion unit needs to have higher-precision pressure displacement conversion capability, and the processing difficulty and the production cost of the pressure conversion unit are greatly improved.
In view of this, how to prepare a pressure conversion unit with low cost and low processing difficulty is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
The application provides a pressure conversion unit and a pressure sensor, which can be prepared with low cost and low processing difficulty.
In order to solve the above technical problems, embodiments of the present invention provide the following technical solutions:
in one aspect, an embodiment of the present invention provides a pressure conversion unit, including a load cell and an elastic metal element;
two ends of the elastic metal element are respectively connected with the pressure measuring telescopic element and the quartz resonator;
the pressure measuring telescopic element is a device which is subjected to telescopic change under pressure;
the position of the rotation center of the elastic metal element is adjusted according to the range or sensitivity, and the elastic metal element is used for transmitting the pressure applied to the load-measuring telescopic element to the quartz resonator so as to change the resonant frequency of the quartz resonator.
Optionally, the elastic metal element is divided into an input end and an output end by taking a rotation center as a center;
the input end is one section connected with the pressure measuring telescopic element, and the output end is the other section connected with the quartz resonator;
the length ratio between the input end and the output end is adjusted according to the measuring range or the sensitivity.
Optionally, the load cell is a bellows.
Optionally, the load cell is a bourdon tube.
Optionally, the load cell is a hydraulic rod.
Optionally, the elastic metal element is a beryllium-copper alloy device.
Optionally, the resilient metal element is a flexible hinge.
Optionally, the elastic metal element includes a movable end and a fixed end;
the moving direction of the movable end is consistent with the axial direction of the quartz resonator.
Another aspect of the embodiments of the present invention provides a pressure sensor, including a metal casing and the pressure conversion unit as described in any one of the above;
one end of a pressure measuring telescopic element of the pressure conversion unit is fixedly connected to the metal shell;
and the fixed end of the elastic metal element of the pressure conversion unit is connected with the metal shell.
Optionally, the metal shell is made of metal meeting a preset rigidity condition.
The technical scheme that this application provided's advantage lies in, when external pressure input, can arouse the flexible change of load cell, and then drive the motion of elastic metal component, and the displacement that elastic metal component transmitted load cell changes to the quartz resonator who fixes at elastic metal component to make the resonant frequency of quartz resonator change. Because the displacement of the tail end of the force arm generated by the elastic metal element in the rotating process is very small relative to the length of the force arm, the proportion of the displacement of the elastic metal element generated by stretching and contracting and the displacement of the quartz resonator generated under the action of the strain force is the same as the proportion of the length of the force arm on two sides of the rotating center. When the relation between the pressure of the load cell and the expansion displacement is fixed, the position of the rotation center of the elastic metal element is adjusted to enable the quartz resonator to bear strain force to be correspondingly changed, the sensitivity and the measuring range of the pressure sensor can be changed under the condition that the rigidity of the load cell is not changed, and therefore the pressure sensor is suitable for the scene of ultrahigh pressure test. The whole pressure conversion unit has few devices, simple structure, low production cost and strong practicability, and reduces the processing difficulty of the pressure conversion unit to a great extent.
In addition, the embodiment of the invention also provides a corresponding pressure sensor for the pressure conversion unit, so that the pressure conversion unit has higher practicability, and the pressure sensor has corresponding advantages.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the related art, the drawings required to be used in the description of the embodiments or the related art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a structural diagram of a specific implementation of a pressure conversion unit according to an embodiment of the present invention;
fig. 2 is a schematic diagram of an operating principle of a pressure conversion unit provided in an embodiment of the present invention;
fig. 3 is a structural diagram of an embodiment of a pressure sensor according to an embodiment of the present invention;
fig. 4 is a schematic diagram of a framework of a pressure conversion unit in an exemplary application scenario provided by an embodiment of the present invention;
FIG. 5 is a schematic diagram of a quartz resonator provided in an exemplary application scenario in accordance with an embodiment of the present invention;
FIG. 6 is a block diagram of a pressure sensor in an exemplary application scenario, according to an embodiment of the present invention;
the device comprises a pressure conversion unit 1, a metal shell 2, a load-measuring telescopic element 11, a corrugated pipe 110, a thread 111, an elastic metal element 12, a flexible hinge 120, a quartz vibrating beam 3 and a quartz vibrating beam 31.
Detailed Description
In order that those skilled in the art will better understand the disclosure, the invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The terms "first" and "second" in the description and claims of the present application and the above-described drawings are used for distinguishing between different objects and not for describing a particular order. Furthermore, "include" and "have" and any variation of the two, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements but may include other steps or elements not expressly listed. Various non-limiting embodiments of the present application are described in detail below.
Referring first to fig. 1, fig. 1 is a schematic structural diagram of a pressure conversion unit in an alternative implementation manner, where the embodiment of the present invention includes the following:
the pressure conversion unit 1 of the present embodiment may include a load cell 11 and an elastic metal member 12. The load cell 11 and the resilient metal element 12 are connected, and when the load cell is applied to a quartz resonator, the other end of the resilient metal element 12 is also connected to the quartz resonator, that is, the two ends of the resilient metal element 12 are connected to the load cell 11 and the quartz resonator, respectively. The quartz resonator may be any resonator that is capable of displacement changes under strain. The connection between the load cell 11 and the elastic metal element 12, and the connection between the elastic metal element 12 and the quartz resonator may be any electrical connection, and the present application does not limit the connections. For example, the load cell 11 and the elastic metal member 12 may be connected by a screw or may be connected by welding. The elastic metal element 12 and the quartz resonator can be connected by welding, such as fusion welding like arc welding, laser welding, pressure welding, brazing, etc.; crimping, wire wrapping, etc. may also be used.
In this embodiment, the load cells 11 are devices that undergo a change in expansion and contraction when subjected to a pressure, that is, the load cells 11 are compressed to generate a displacement when an external pressure is applied. The load cell 11 may be any structure capable of providing pressure and displacement conversion, and the present application is not limited thereto. The elastic metal element 12 is a movable structure and is made of metal with relatively good elasticity, and optionally, the elastic metal element 12 can be a metal device made of beryllium copper alloy. The elastic metal member 12 of the present application connects the load cell 11 and the quartz resonator, and alternatively, the elastic metal member 12 may employ a flexible hinge. The elastic metal element 12 is used for transmitting the displacement of the load cell 11 generated by the compression to the quartz resonator, that is, the pressure applied to the load cell 11 is adjusted and then transmitted to the quartz resonator, and the quartz resonator generates a strain force after receiving the pressure and changes the output frequency under the action of the strain force.
The elastic metal element 12 of this embodiment is disposed between the load cell 11 and the quartz resonator, and in the process of the load cell 11 undergoing a compressive stretching movement, the elastic metal element 12 is driven to rotate, and in the process of the rotation of the elastic metal element 12, a force is formed between the elastic metal element and the load cell 11 and the quartz resonator, and accordingly, a force arm is generated. For convenience of description, the moment arm between the elastic metal element 12 and the load-measuring expansion element 11 is referred to as a first moment arm L1, and the moment arm between the elastic metal element 12 and the quartz resonator is referred to as a second moment arm L2, as shown in fig. 2, since the displacement of the end of the moment arm generated by the elastic metal element 12 in the rotation process is very small relative to the length of the moment arm, the ratio of the displacement of the elastic metal element 12 generated by expansion and contraction to the displacement of the quartz resonator generated under the action of the strain force is the same as the ratio of the lengths of the moment arms at both sides of the rotation center. That is, the ratio of the displacement of the load cell 11 to the displacement of the quartz resonator is the same as the ratio of the first force arm L1 to the second force arm L2. Based on this, the ratio of the first force arm L1 to the second force arm L2 can be changed by adjusting the position of the rotation center of the elastic metal element 12, and further the ratio of the displacement of the load cell 11 to the displacement of the quartz resonator can be changed, so that the range or sensitivity of the pressure conversion unit 1 can be adjusted. Because the strain force of the quartz resonator and the output resonant frequency have a linear relationship, when the external pressure and displacement relationship born by the load-measuring telescopic element 11 are fixed, when the proportion of the force arm is changed, the same pressure can be output corresponding to different quartz resonator frequencies, and the output frequency of the quartz resonator can be adjusted. For example, in the effective range, if the ratio of the first moment arm L1 to the second moment arm L2 is 1:1, if the input external pressure of 5MPa corresponds to 5 μm compression of the quartz resonator, the input frequency is changed by 1KHz. When the proportion of the first force arm L1 to the second force arm L2 is adjusted to be 1:2, at this time, the input 5MPa pressure corresponds to the quartz resonator which can be compressed approximately by 10 μm, and the output frequency is changed by 2KHz accordingly, so that the characteristic relationship between the input pressure and the output frequency is changed, and the sensitivity of the pressure conversion unit 1 is improved. When the proportion of the moment arm is reduced, the displacement of the same quartz resonator can correspond to different input pressures, and the pressure measurement range of the pressure resonator is changed. In other words, the present embodiment may determine the position of the rotation center of the elastic metal element 12 in advance based on the range or sensitivity required by the actual application scenario, so as to properly adjust the pressure applied to the load cell 11 and then transmit the adjusted pressure to the quartz resonator, so that the quartz resonator can bear the extra-high pressure, and change the output resonant frequency of the quartz resonator in the extra-high pressure environment, thereby completing the conversion between the input pressure and the vibration frequency.
In the technical scheme provided by the embodiment of the invention, when external pressure is input, the elastic metal element is driven to move due to the expansion and contraction change of the load-measuring expansion element, and the elastic metal element transmits the displacement change of the load-measuring expansion element to the quartz resonator fixed on the elastic metal element, so that the resonance frequency of the quartz resonator is changed. Because the displacement of the tail end of the force arm generated by the elastic metal element in the rotating process is very small relative to the length of the force arm, the proportion of the displacement of the elastic metal element generated by stretching and contracting and the displacement of the quartz resonator generated under the action of the strain force is the same as the proportion of the length of the force arm on two sides of the rotating center. When the relation between the pressure of the load cell and the expansion displacement is fixed, the position of the rotation center of the elastic metal element is adjusted to enable the quartz resonator to bear strain force to be correspondingly changed, the sensitivity and the measuring range of the pressure sensor can be changed under the condition that the rigidity of the load cell is not changed, and therefore the pressure sensor is suitable for the scene of ultrahigh pressure test. The whole pressure conversion unit has few devices, simple structure, low production cost and strong practicability, and reduces the processing difficulty of the pressure conversion unit to a great extent.
Based on the above embodiment, in order to facilitate implementation and further reduce the processing difficulty, as an optional implementation manner, the elastic metal element 12 may be divided into an input end and an output end by taking a rotation center as a center; the input end is the section of the elastic metal element 12 connected with the load-measuring telescopic element 11, and the output end is the other section of the elastic metal element 12 connected with the quartz resonator. The length ratio of the input end to the output end can be used for reflecting the ratio of the first force arm L1 to the second force arm L2, so that the present embodiment can be applied to different application scenarios by directly adjusting the respective lengths of the input end and the output end, in other words, the length ratio between the input end and the output end of the present embodiment can be adjusted according to the range or the sensitivity.
In order to further improve the frequency control accuracy of the quartz resonator, based on the above embodiment, the present application provides another embodiment, which may include the following:
for convenience of description, the elastic metal member 12 of the above embodiment may include a movable end and a fixed end, i.e., the connection end of the elastic metal member 12 is divided into the movable end and the fixed end. In this embodiment, the moving direction of the movable end of the elastic metal element 12 is consistent with the axial direction of the quartz resonator, so that the deformation of the quartz resonator in other directions can be reduced, and the precise control of the output resonant frequency of the quartz resonator is facilitated.
The above embodiment does not limit the structure of the load cell 11, and based on this, the present embodiment also provides various structures that can be used as the load cell 11, and the embodiment may include the following:
as an alternative embodiment, the bellows may be used as the load expansion/contraction element 11 of the present embodiment in consideration of the cost, sensitivity, and measurement range of the pressure conversion unit, in which the bellows as the load elastic element has a thin wall and a high sensitivity, and the measurement range is several tens of pascals to several tens of megapascals. Corrugated tubing has a plurality of transversely corrugated cylindrical thin-walled corrugated shells which are capable of displacement under pressure, axial force, transverse force or bending moment, i.e., pressure can be converted into displacement or force. The corrugated pipe of the embodiment can be a metal corrugated pipe or a non-metal corrugated pipe which is made of any one of materials such as bronze, brass, stainless steel, monel alloy and inconel alloy, the corrugated pipe can be of a single-layer structure or a multi-layer structure, and compared with the single-layer structure, the multi-layer corrugated pipe is high in strength, good in durability and small in stress. In order to be more suitable for the ultra-high pressure test scenario, the bellows of the present embodiment may be a multi-layer bellows made of stainless steel.
As another alternative, for an application scenario where the ultra-high pressure is not too high in pressure sensitivity requirement, the load cell 11 may also be a copper-based or iron-based alloy bourdon tube, or a so-called spring tube, of any type, such as C-type, spiral-type, C-type combination, hemp-type, etc. Bourdon tubes are elastic sensitive elements that measure pressure using bending changes or torsional deformations of the tube. One end of the bourdon tube is fixed, the other end is movable, and the cross section of the bourdon tube is oval or flat. The pipe with non-circular section is gradually expanded into a circular shape under the action of internal pressure, at the moment, the movable end can generate displacement which has a certain relation with the pressure, and the movable end drives the pointer to indicate the current input pressure. Of course, due to the low sensitivity of the bourdon tube, it is also possible to use the bourdon tube in combination with other elastic elements as the load cell 11 for some applications at ultra-high pressures where sensitivity is required to be high.
As another alternative, the hydraulic rod has an approximately linear elastic curve, so that linear motion and automation of the machine are easily realized, and when the electro-hydraulic combined control is adopted, not only can a higher degree of automatic control process be realized, but also remote control can be realized. The load cells 11 may also be hydraulic rams, for accuracy and automation. The hydraulic rod is an elastic element using gas and liquid as working media, and is composed of pressure tube, piston rod and several connecting pieces, and its interior is filled with high-pressure nitrogen gas.
In order to make the technical solutions of the present application more clear to those skilled in the art, the present application also provides an illustrative example. In this embodiment, the bellows 110 may be used as the load cell 11, the flexible hinge 120 made of beryllium copper may be used as the elastic metal element 12, and the quartz resonator may be the quartz vibrating beam 3. Fig. 3 is a schematic structural diagram of a pressure conversion unit in an exemplary application scenario, and fig. 4 is a schematic structural diagram of a quartz vibrating beam in an exemplary application scenario, where the embodiments may include the following contents:
the pressure conversion unit 1 of the present embodiment may include a corrugated pipe 110 and a flexible hinge 120, where the flexible hinge 120 includes a first movable end and a second movable end, the first movable end is connected to the corrugated pipe 110 through a thread 111, as shown in fig. 3, and the second movable end is fixed at the double ends 31 of the quartz vibrating beam 3 through a welding manner, as shown in fig. 4. The moving direction of the movable end of the flexible hinge 120 is consistent with the axial direction of the quartz vibrating beam 3. The double end 31 of the quartz vibrating beam 3 is fixed.
When external pressure is input, the corrugated pipe 110 is deformed by pressure to change in a telescopic manner, the flexible hinge 120 is driven to move, the center of the flexible hinge 120 is a rotation center, one side of the flexible hinge 120 is pushed, one side of the fixed quartz vibrating beam 3 is pressed, and the flexible hinge 120 transmits displacement, so that the resonance frequency of the quartz vibrating beam 3 fixed on the flexible hinge 120 is changed. Under the condition that the rigidity of the corrugated pipe 110 is not changed, the flexible hinge 120 can change the proportion of the force arms L1 and L2 at the two sides and adjust the displacement ratio of the corrugated pipe 110 and the quartz vibrating beam 3 at the two sides so as to change the sensitivity and the measuring range of the pressure conversion unit 1, thereby greatly reducing the processing difficulty of the corrugated pipe 110 and reducing the processing difficulty of the pressure conversion unit 1.
The embodiment of the invention also provides the pressure sensor aiming at the pressure conversion unit, so that the pressure conversion unit has higher practicability. In the following, a pressure sensor provided by an embodiment of the present invention is described, and the pressure sensor described below and the pressure conversion unit described above may be referred to correspondingly.
As shown in fig. 5, the pressure sensor of the present embodiment may include a metal housing 2 and a pressure conversion unit 1, the metal housing 2 is disposed outside the pressure conversion unit 1 to protect the pressure conversion unit 1, and the pressure conversion unit 1 may be the pressure conversion unit 1 described in any one of the above embodiments.
The pressure conversion unit 1 of the present embodiment may include a load cell 11 and an elastic metal element 12, and accordingly, the connection relationship between the pressure conversion unit 1 and the metal housing 2 is: one end of the load cell 11 is fixedly connected to the metal shell 2; the fixed end of the elastic metal element 12 is connected to the metal housing 2, i.e., the load cell 11 and the elastic metal element 12 are fixed to the metal housing 2, respectively.
In order to adapt to an ultrahigh pressure test scene, the metal shell 2 of the embodiment needs to be made of metal meeting a preset rigidity condition, for example, metal capable of bearing a megapascal level, the preset rigidity condition is that the rigidity is relatively high, and the minimum limit of the rigidity can be flexibly limited according to an actual application scene. Considering the requirements of cost and rigidity, the metal shell 2 of the present embodiment may be made of stainless steel 316.
As can be seen from the above, the pressure sensor of the present embodiment is a quartz resonance type sensor with adjustable range and sensitivity, and has the characteristics of high precision, high stability, and low processing difficulty.
In order to make the technical solution of the present application more clear to those skilled in the art, the present application also provides an exemplary quartz resonant pressure sensor, in this embodiment, the load cell 11 may be a bellows 110, the resilient metal element 12 may be a flexible hinge 120 made of beryllium copper, the metal housing 2 may be a 316 stainless steel housing, and the quartz resonator may be a quartz vibrating beam 3. Fig. 6 is a schematic structural diagram of an exemplary application scenario of a pressure sensor, where the embodiment may include the following:
the pressure sensor of this embodiment may include metal casing 2, bellows 110 and flexible hinge 120, and flexible hinge 120 includes first expansion end, second expansion end and stiff end, and the stiff end links to each other with metal casing 2, and first expansion end passes through screw 111 with bellows 110 and links to each other, and the second expansion end passes through the welding mode to be fixed at the bi-polar 31 of quartzy roof beam 3 that shakes. The moving direction of the movable end of the flexible hinge 120 is consistent with the axial direction of the quartz vibrating beam 3. The double end 31 of the quartz vibrating beam 3 is fixed, and the other end of the corrugated pipe 110 is fixedly connected with the metal shell 2.
When external pressure is input, the corrugated pipe 110 is deformed by the pressure to change in a telescopic manner, the flexible hinge 120 is driven to move, the center of the flexible hinge 120 is a rotation center, one side of the flexible hinge 120 is pushed, one side of the quartz vibrating beam 3 is fixed by the pressure, and the flexible hinge 120 transmits displacement, so that the resonant frequency of the quartz vibrating beam 3 fixed on the flexible hinge 120 is changed. The flexible hinge 120 can change the proportion of the moment arms L1 and L2 on the two sides without changing the rigidity of the corrugated pipe 110, and adjust the displacement ratio on the two sides of the corrugated pipe 110 and the quartz resonance beam 3 to change the sensitivity and the measuring range of the pressure sensor.
Therefore, the metal corrugated pipe and the metal flexible hinge are used as the pressure conversion unit in the embodiment, the displacement transmission coefficient of the pressure conversion unit can be changed by adjusting the length proportion of the force arms on the two sides of the hinge, the displacement control difficulty of the corrugated pipe is reduced, and the pressure conversion device has the advantages of being high in precision, high in stability and low in processing difficulty. Furthermore, the precision of the resonance frequency output by the quartz vibration beam can be effectively improved by controlling the position relation between the flexible hinge and the quartz vibration beam.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts among the embodiments are referred to each other. Those of skill would further appreciate that the elements and steps of the various examples described in connection with the embodiments disclosed herein may be implemented as electronic hardware, computer software, or combinations of both, and that the components and steps of the various examples have been described above generally in terms of their functionality in order to clearly illustrate this interchangeability of hardware and software. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the implementation. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
The pressure conversion unit and the pressure sensor provided by the present application are described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, without departing from the principle of the present invention, it can make several improvements and modifications to the present application, and those improvements and modifications also fall into the protection scope of the claims of the present application.
Claims (10)
1. A pressure conversion unit is characterized by comprising a load-measuring telescopic element and an elastic metal element;
two ends of the elastic metal element are respectively connected with the pressure measuring telescopic element and the quartz resonator;
the pressure measuring telescopic element is a device which is subjected to telescopic change under the action of pressure;
the position of the rotation center of the elastic metal element is adjusted according to the range or sensitivity, and the elastic metal element is used for transmitting the pressure applied to the load-measuring telescopic element to the quartz resonator so as to change the resonant frequency of the quartz resonator.
2. The pressure conversion unit of claim 1, wherein the elastic metal member is divided into an input end and an output end centered on a rotation center;
the input end is one section connected with the pressure measuring telescopic element, and the output end is the other section connected with the quartz resonator;
the length ratio between the input end and the output end is adjusted according to the measuring range or the sensitivity.
3. A pressure conversion unit as claimed in claim 1 wherein the load cell is a bellows.
4. The pressure conversion unit of claim 1, wherein the load cell is a Bourdon tube.
5. The pressure conversion unit of claim 1, wherein the load cell is a hydraulic ram.
6. The pressure conversion unit of claim 1, wherein the resilient metal element is a beryllium copper alloy device.
7. The pressure conversion unit of claim 1, wherein the resilient metal element is a flexible hinge.
8. Pressure conversion unit according to any of claims 1 to 7, wherein the resilient metal element comprises a movable end and a fixed end;
the moving direction of the movable end is consistent with the axial direction of the quartz resonator.
9. A pressure sensor comprising a metal housing and a pressure conversion cell according to any one of claims 1 to 8;
one end of a pressure measuring telescopic element of the pressure conversion unit is fixedly connected to the metal shell;
and the fixed end of the elastic metal element of the pressure conversion unit is connected with the metal shell.
10. The pressure sensor of claim 9, wherein the metal housing is made of a metal satisfying a predetermined rigidity condition.
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| CN202211481956.9A CN115855321A (en) | 2022-11-24 | 2022-11-24 | Pressure conversion unit and pressure sensor |
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| CN202211481956.9A CN115855321A (en) | 2022-11-24 | 2022-11-24 | Pressure conversion unit and pressure sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117949155A (en) * | 2024-03-26 | 2024-04-30 | 中国科学院苏州生物医学工程技术研究所 | Flexible hinge rigidity detection method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117949155A (en) * | 2024-03-26 | 2024-04-30 | 中国科学院苏州生物医学工程技术研究所 | Flexible hinge rigidity detection method |
| CN117949155B (en) * | 2024-03-26 | 2024-06-07 | 中国科学院苏州生物医学工程技术研究所 | Flexible hinge rigidity detection method |
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