CN115815358A - Liquid metal microwire neural electrode and preparation method and application thereof - Google Patents

Liquid metal microwire neural electrode and preparation method and application thereof Download PDF

Info

Publication number
CN115815358A
CN115815358A CN202211349858.XA CN202211349858A CN115815358A CN 115815358 A CN115815358 A CN 115815358A CN 202211349858 A CN202211349858 A CN 202211349858A CN 115815358 A CN115815358 A CN 115815358A
Authority
CN
China
Prior art keywords
liquid metal
gallium
microwire
neural electrode
polymer material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202211349858.XA
Other languages
Chinese (zh)
Inventor
蒋兴宇
董瑞华
文天昀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Southwest University of Science and Technology
Original Assignee
Southwest University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Southwest University of Science and Technology filed Critical Southwest University of Science and Technology
Priority to CN202211349858.XA priority Critical patent/CN115815358A/en
Publication of CN115815358A publication Critical patent/CN115815358A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Micromachines (AREA)

Abstract

The invention provides a liquid metal microwire neural electrode and a preparation method and application thereof, wherein the method comprises the following steps: preparing a first mould with a micro-fluidic pipeline, placing gallium-based liquid metal in the micro-fluidic pipeline of the first mould, and condensing at low temperature to solidify the gallium-based liquid metal to form liquid metal microfilaments; separating the liquid metal microwires from the first mold; and immersing the liquid metal microwire separated from the mould into the first high polymer material solution, and encapsulating a layer of high polymer film on the surface of the liquid metal microwire after the solvent in the first high polymer material solution is volatilized to obtain the liquid metal microwire neural electrode. The microfilament neural electrode prepared by the preparation method of the liquid metal microfilament neural electrode provided by the invention can be adjusted in hardness, has the advantages of a rigid neural electrode and a flexible neural electrode, and provides a new idea for the expansion application of the neural electrode and the brain-computer interface field.

Description

Liquid metal microwire neural electrode and preparation method and application thereof
Technical Field
The invention relates to the technical field of nerve electrodes, in particular to a liquid metal microwire nerve electrode and a preparation method and application thereof.
Background
As a core component of the brain-computer interface, the neural electrode is a key interface for connecting an external device and a neural tissue, is a crucial research point of the brain-computer interface system, and is also a research direction in which the brain-computer interface system is to be broken through in recent years. The method has the advantages that the electrophysiological signals of the human body are detected and analyzed through the neural electrodes, so that the method is not only beneficial to understanding the transmission mechanism of the electrophysiological information of the nervous system, but also has extremely important development significance for brain science and brain disease diagnosis. The microwire neural electrode is the most widely used invasive neural electrode in the field of electrophysiological signal recording at present, and is generally made of metal microwires with diameters less than 100 micrometers, such as gold, platinum, iridium and the like, a layer of packaging insulating layer is coated on the surface of the microwire neural electrode, and the exposed electrode tail end is contacted with neural cells or tissues to record action potentials or local field potentials of neurons.
However, the microwire neural electrode made of rigid materials such as gold or platinum is very easy to generate mechanical damage in the long-term implantation process, and the great difference of young modulus exists between the rigid electrode and the flexible neural tissue, which seriously affects the inspection quality and sensitivity of neural signals. In recent years, flexible electrodes have gained wide attention, but the flexible electrodes are relatively complex to operate when implanted, and the rigid electrodes cannot be accurately, deeply and conveniently implanted into a target neurobrain area, so that certain implantation damage is easily caused.
Disclosure of Invention
The invention solves the problem of how to provide a liquid metal microwire neural electrode which is not easy to generate implantation injury and has good neural signal inspection quality and sensitivity.
In order to solve at least one aspect of the above problems, the present invention provides a method for preparing a liquid metal microwire neural electrode, comprising the steps of:
s1, preparing a first mould with a micro-fluidic pipeline, placing gallium-based liquid metal in the micro-fluidic pipeline of the first mould, and placing the first mould at a low temperature for condensation to solidify the gallium-based liquid metal to form a liquid metal microfilament, wherein the melting point of the gallium-based liquid metal is more than 25 ℃ and less than 37 ℃;
s2, separating the liquid metal microwire from the first mold;
and S3, immersing the liquid metal microwire separated from the first mould into a first polymer material solution, and encapsulating a layer of polymer film on the surface of the liquid metal microwire after a solvent in the first polymer material solution is volatilized to obtain the liquid metal microwire neural electrode.
Preferably, in step S1, the method for preparing the first mold includes:
s11, designing an electrode pattern, and preparing a silicon wafer with the electrode pattern on the surface by a photoetching method;
step S12, pouring a second high polymer material on the silicon wafer, and after the second high polymer material is solidified, removing the second high polymer material from the silicon wafer to obtain a second mold with a groove;
and S13, attaching the second mold to a substrate, and forming a microfluidic pipeline between the groove and the substrate to obtain the first mold with the microfluidic pipeline.
Preferably, the second polymer material includes at least one of polydimethylsiloxane and polymethyl methacrylate.
Preferably, the substrate comprises one of a glass slide, glass, and a cell culture dish.
Preferably, in step S1, the gallium-based liquid metal includes one of gallium, gallium-indium alloy, and gallium-indium-tin alloy.
Preferably, in step S1, the condensing at low temperature to solidify the gallium-based liquid metal includes:
setting the condensation temperature below 0 ℃ to solidify the gallium-based liquid metal.
Preferably, in step S3, the first polymer material solution includes a first polymer material and a solvent, wherein the first polymer material includes at least one of polyvinyl alcohol Ding Quanzhi, polyurethane, polycaprolactone, polylactic acid copolymer, polyvinylpyrrolidone, polydimethylsiloxane, gelatin, and silk fibroin; the solvent includes at least one of ethanol, tetrahydrofuran, N-dimethylformamide, acetone, hexafluoroisopropanol, and water.
Preferably, in the step S3, after encapsulating a layer of polymer film on the surface of the liquid metal microwire, the method further includes:
and winding the plurality of liquid metal microwires packaged with the polymer film together to form a liquid metal microwire bundle.
According to the invention, gallium-based liquid metal enters a micro-fluidic pipeline and is condensed to form a microfilament neural electrode, and then the microfilament neural electrode is separated from a mould and is immersed in a polymer material solution, so that a polymer film is packaged on the surface of the microfilament neural electrode, and the melt point of the gallium-based liquid metal is more than 25 ℃ and less than 37 ℃, so that the prepared microfilament neural electrode is in a rigid state at room temperature, the implantation depth and accuracy in a specific biological tissue are ensured, and after the microfilament neural electrode is implanted into a human body, the body temperature of the human body is higher than the melt point of the gallium-based liquid metal, so that the microfilament neural electrode is molten, has excellent flexibility, reduces the damage to the biological tissue, has good biocompatibility and tensile property, and realizes long-term stable neural signal monitoring; the microfilament neural electrode prepared by the preparation method of the liquid metal microfilament neural electrode provided by the invention can be adjusted in hardness, has the advantages of a rigid neural electrode and a flexible neural electrode, and provides a new idea for the expansion application of the neural electrode and the brain-computer interface field.
The invention also provides a liquid metal microwire neural electrode which is prepared by the preparation method of the liquid metal microwire neural electrode.
Compared with the prior art, the liquid metal microwire neural electrode provided by the invention has the beneficial effects that the preparation method is the same as that of the liquid metal microwire neural electrode, and the details are not repeated.
In addition, the invention provides the application of the liquid metal microwire neural electrode in the aspect of neural signal detection.
Compared with the prior art, the application of the liquid metal microwire neural electrode provided by the invention has the beneficial effects, and the preparation method of the liquid metal microwire neural electrode is the same as that of the liquid metal microwire neural electrode, so that the application is not repeated.
Drawings
FIG. 1 is a flow chart of a method for making a liquid metal microwire neural electrode in accordance with an embodiment of the present invention;
FIG. 2 is a flow chart of a method of making a first mold in an embodiment of the invention;
FIG. 3 is a graph showing the result of filling the microfluidic channel with liquid metal gallium in example 1 of the present invention;
FIG. 4 is a schematic representation of a liquid metal microwire removed from a first mold in accordance with example 1 of the present invention;
FIG. 5 is a drawing showing the liquid metal micro-wire bundle of example 1;
fig. 6 is an enlarged view of a tip portion of a bundle of liquid metal microwires in example 1 of the present invention.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, specific embodiments thereof are described in detail below.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict. The terms "comprising", "including", "containing" and "having" are intended to be non-limiting, i.e., that other steps and other ingredients can be added which do not affect the result. The above terms encompass the terms "consisting of … …" and "consisting essentially of … …". Materials, equipment and reagents are commercially available unless otherwise specified.
The embodiment of the invention provides a preparation method of a liquid metal microwire neural electrode, which comprises the following steps as shown in figure 1:
step S1, preparing a first mould with a micro-fluidic pipeline, placing gallium-based liquid metal in the micro-fluidic pipeline of the first mould, and placing the first mould at a low temperature for condensation to solidify the gallium-based liquid metal to form a liquid metal microfilament, wherein the melting point of the gallium-based liquid metal is more than 25 ℃ and less than 37 ℃;
s2, separating the liquid metal microwire from the first mold;
and S3, immersing the liquid metal microwire into a first polymer material solution, and encapsulating a layer of polymer film on the surface of the liquid metal microwire after a solvent in the first polymer material solution is volatilized to obtain the liquid metal microwire neural electrode.
Further, as shown in fig. 2, in step S1, the method for preparing the first mold includes:
s11, designing an electrode pattern, and preparing a silicon wafer with the electrode pattern on the surface by a photoetching method;
step S12, pouring a second high polymer material on the silicon wafer, and after the second high polymer material is solidified, removing the second high polymer material from the silicon wafer to obtain a second mold with a groove; that is, the silicon wafer with the electrode pattern prepared in step S11 is a protrusion structure, and after the second polymer material is cured on the silicon wafer, a groove corresponding to the protrusion structure of the electrode pattern is formed, so as to obtain a second mold with a groove;
and S13, attaching the second mold to a substrate, and forming a microfluidic pipeline between the groove and the substrate to obtain the first mold with the microfluidic pipeline.
The electrode pattern prepared by the photoetching method can control the line width of the electrode pattern to be below 30 mu m, so that the width of the microfluidic pipeline of the mold with the microfluidic pipeline prepared by the electrode pattern can be controlled to be below 30 mu m, and further the width of the prepared liquid metal microwire is also controlled to be below 30 mu m, and the minimum width of the liquid metal microwire obtained by printing by using a mask template or a screen printing plate in the prior art is 50 mu m, so that the liquid metal microwire prepared by the microfluidic pipeline has better conductivity compared with the printing method, the preparation precision is higher, and the conductivity of different liquid metal microwires is basically the same.
Wherein the second polymer material comprises at least one of Polydimethylsiloxane (PDMS) and polymethyl methacrylate (PMMA); the substrate comprises one of a glass slide, glass, and a cell culture dish.
The gallium-based liquid metal includes one of gallium, gallium-indium alloy, and gallium-indium-tin alloy. The melting point of gallium is 29 ℃, the melting points of the gallium-indium alloy and the gallium-indium-tin alloy are related to the proportion of different metals in the alloy, the melting point of the alloy is enabled to be more than 25 ℃ and less than 37 ℃ by controlling the proportion of the metals in the gallium-indium alloy and the gallium-indium-tin alloy, the liquid metal is guaranteed to be rigid at room temperature, and flexible after being implanted into a human body, and the hardness adjustment is realized.
After the gallium-based liquid metal enters the microfluidic pipeline, the gallium-based liquid metal is placed at low temperature for condensation, so that the gallium-based liquid metal is solidified to form the liquid metal microwire. Preferably, the condensation temperature is set to be below 0 ℃, and the first mold is subjected to low-temperature condensation to solidify the gallium-based liquid metal. Further preferably, the first mold is placed in an environment of-80 ℃ for condensation for 15-20min to solidify the gallium-based liquid metal, thereby forming the liquid metal microwire.
It will be appreciated that the first mould is placed at a low temperature for condensation in order to solidify the gallium-based liquid metal in the first mould into a solid state, forming liquid metal microwires, the lower the temperature the faster the condensation rate, the better the condensation.
The liquid metal has unique performances of low melting point, low toxicity, high conductivity, high stability and the like, and shows great application potential in the fields of biomedical treatment, medical imaging, wearable electronic technology and the like.
In step S2, separating the liquid metal microwires from the first die; and separating the liquid metal microwire in the microfluidic pipeline from the first die, so as to facilitate the subsequent film sealing treatment of the liquid metal microwire.
Preferably, a portion of the liquid metal microwire may be released from the first mold, and another portion of the liquid metal microwire may remain in the first mold. The liquid metal microwire separated from the first mould can be used as one end implanted into a human body after the film is sealed, so that the damage to the human body is reduced, and the liquid metal microwire left in the first mould can be used as a connecting end head with other devices.
In step S3, the first polymer material solution includes a first polymer material and a solvent, where the first polymer material includes at least one of polyvinyl alcohol Ding Quanzhi (PVB), polyurethane (TPU), polycaprolactone (PCL), polylactic acid copolymer (PLGA), polyvinylpyrrolidone (PVP), polydimethylsiloxane (PDMS), gelatin, and silk fibroin; the solvent includes at least one of ethanol, tetrahydrofuran, N-dimethylformamide, acetone, hexafluoroisopropanol, and water.
Illustratively, when the first polymer material solution is a PVB solution, the mass fraction of the PVB solution is 7%, and the solvent is ethanol; when the first polymer material solution is a TPU solution, the mass fraction of the TPU solution is 5%, and the solvent is N, N-Dimethylformamide (DMF).
And immersing the liquid metal microwire separated from the first mould into a first polymer material solution, and after a solvent in the first polymer material solution is volatilized, solidifying a first polymer material on the surface of the liquid metal microwire to form a layer of polymer film, so that the liquid metal microwire separated from the first mould is packaged.
In the prior art, when a liquid metal wire is prepared by a printing method, liquid metal and a solvent need to be ultrasonically mixed, although the solvent can volatilize, gallium exists in gallium-based liquid metal, the gallium-based liquid metal is easily oxidized to form a gallium oxide film, the liquid metal can form microspheres in the ultrasonic mixing process of the liquid metal and the solvent, the conductivity of the liquid metal is seriously influenced, and the conductivity difference between different prepared electrodes is large; however, in the prior art, the liquid metal and the polymer material are mixed, but the existence of the polymer material also destroys the conductivity of the liquid metal.
Compared with the prior art, the embodiment of the invention can prepare the conductive material formed by pure liquid metal through a microfluidic pipeline method, so that the conductive performance of the conductive material is better, and the prepared electrodes have basically the same conductivity due to the uniform size of the microfluidic pipeline.
The liquid metal microwires are put into the first polymer material solution, so that a polymer film is formed on the surfaces of the liquid metal microwires, and the thickness of the film can be controlled to be below 10 mu m, so that the minimally invasive requirement of the electrode during implantation can be better met.
In addition, in some embodiments, in step S3, after a layer of polymer film is encapsulated on the surface of the liquid metal microwire, the liquid metal microwire packaged with the polymer film may be wound together to form a liquid metal microwire bundle.
The liquid metal microwire electrodes are wound together by winding a plurality of liquid metal microwires after the polymer films are packaged to form a liquid metal microwire cluster, the rigidity state of the liquid metal microwire electrodes at a normal temperature state can be further improved, the implantation depth and accuracy are guaranteed, and more two-dimensional electrode arrays can be realized in a circuit by using a smaller contact area through the liquid metal microwire cluster.
Another embodiment of the present invention provides a liquid metal microwire neural electrode prepared by the above method.
Still another embodiment of the present invention provides the use of the liquid metal microwire neural electrode as described above for neural signal detection. The liquid metal microfilament nerve electrode is implanted into a brain area, so that a nerve signal is detected, and a new material and a new technology are provided for long-term electroencephalogram information acquisition and brain-computer interface technology.
Compared with the prior art, the liquid metal microwire neural electrode and the application thereof provided by the embodiment of the invention have the beneficial effects, and the preparation method of the liquid metal microwire neural electrode is the same as that of the liquid metal microwire neural electrode, and the details are not repeated herein.
The present invention will be further illustrated by the following specific examples, which, however, are merely for the purpose of facilitating understanding of the present invention and should not be construed as limiting the present invention in any way.
Example 1
1.1, designing a liquid metal wire pattern by using AutoCAD software, and preparing a silicon wafer with 30-channel electrode patterns by orthogonal photoetching, wherein the line width of a channel is 10 microns;
1.2, pouring 2mL of liquid PDMS on a silicon wafer, and homogenizing the PDMS at a speed of 600r/min for 30s;
1.3, placing the silicon wafer with the PDMS into an oven, placing for 15min at 80 ℃ to solidify the PDMS, and removing the PDMS from the silicon wafer to obtain a second mold with a groove;
1.4, pressing the side with the groove in the second mould downwards on the glass plate, cutting the second mould, exposing one end of the 30-channel groove in the air, simultaneously punching holes at the other end of the groove, and punching 30 holes in total to obtain the first mould with the micro-channel pipeline;
1.5, heating gallium in an oven at 80 ℃ for 3min to melt the gallium into liquid, weighing 1mL of liquid gallium, dropping the liquid gallium on one end of 30 grooves exposed in the air, sucking the liquid gallium one by one from 30 punched positions at the other end of the grooves through an injector, and enabling the liquid gallium to enter 30 microfluidic channels of a first mold as shown in figure 3;
1.6, placing the first mould injected with the liquid gallium and the glass plate in a refrigerator at the temperature of-80 ℃, standing for 20min to completely solidify the liquid gallium and form liquid metal microwires;
1.7, as shown in fig. 4, the first mold and the liquid metal microwire are taken off from the glass plate, and then a part of the liquid metal microwire is taken off from the end of the first mold which is not perforated;
1.8, immersing the uncovered liquid metal microfilament into a PDMS solution, and standing at room temperature until PDMS is completely cured, so that a layer of polymer film is packaged on the surface of the liquid metal microfilament;
and 1.9, winding the liquid metal microwires together to form a liquid metal microwire bundle, cutting off the tip of the polymer film, and exposing the electrode sites to obtain the liquid metal microwire neural electrode as shown in figure 5.
Wherein, fig. 3 is a picture of a micro-fluidic channel filled with liquid metal gallium, and fig. 4 is a picture of a gallium microfilament removed from a mold; FIG. 5 is a drawing of a liquid metal microwire bundle; fig. 6 is an enlarged view of a liquid metal microwire bundle tip portion.
As shown in fig. 3, the microfluidic channels have uniform sizes, and when the liquid metal gallium fills each microfluidic channel, a liquid metal lead with uniform size is formed.
As shown in fig. 4, the right drawing in fig. 4 is an enlarged view of the dotted line portion in the left drawing, after the liquid metal microwire at one end is removed, the liquid metal microwire is exposed for further film sealing treatment, and the liquid metal microwire remaining in the mold remains in the microfluidic channel for being used as an end head to be connected with other devices.
As shown in fig. 5, the liquid metal microwire packaged with the polymer film is wound together to form a liquid metal microwire bundle, which can further improve the rigidity of the neural electrode, and as shown in fig. 5, the coin is used as a reference object, it can be seen that the size of the liquid metal microwire neural electrode is small, and the damage during implantation can be reduced.
Fig. 6 is an enlarged view of a tip portion of the bundle of liquid metal microwires of fig. 5. As can be seen from fig. 6, the size of the tip can be further reduced by winding the liquid metal microwires together to form the bundle of liquid metal microwires.
Example 2
2.1, designing a liquid metal wire pattern by using AutoCAD software, and preparing a silicon wafer with a 16-channel electrode pattern by orthogonal photoetching, wherein the line width of a channel is 10 microns;
2.2, pouring 2mL of liquid PDMS on a silicon wafer, and homogenizing the PDMS at a speed of 600r/min for 30s;
2.3, placing the silicon wafer with the PDMS into an oven, placing for 15min at 80 ℃ to solidify the PDMS, and removing the PDMS from the silicon wafer to obtain a second mold with a groove;
2.4, pressing the side with the groove in the second mold downwards on the glass plate, cutting the second mold, exposing one end of the 16-channel groove in the air, simultaneously punching the other end of the groove, and punching 16 holes in total to obtain the first mold with the micro-channel pipeline;
2.5, heating gallium in an oven at 80 ℃ for 3min to melt the gallium into liquid, weighing 1mL of liquid gallium, and injecting the liquid gallium from 16 punching positions by using an injector to enable the liquid gallium to enter 16 microfluidic channels of the first mold;
2.6, placing the first mould injected with the liquid gallium and the glass plate in a refrigerator at minus 80 ℃, standing for 20min to completely solidify the liquid gallium to form liquid metal microwires;
2.7, removing the first mould and the liquid metal microwires from the glass plate, and removing part of the liquid metal microwires from the end, which is not perforated, of the first mould;
2.8, immersing the uncovered liquid metal microfilament into a PVB solution with the mass fraction of 7%, wherein the solvent of the PVB solution is ethanol, and standing at room temperature for 10min until the ethanol volatilizes, so that a layer of polymer film is packaged on the surface of the liquid metal microfilament;
and 2.9, winding the liquid metal microwires together to form a liquid metal microwire bundle, cutting off the tip of the polymer film, and exposing the electrode sites to obtain the liquid metal microwire neural electrode.
Example 3
3.1, designing a liquid metal wire pattern by using AutoCAD software, and preparing a silicon wafer with an 8-channel electrode pattern by orthogonal photoetching, wherein the line width of a channel is 10 microns;
3.2, pouring 2mL of liquid PDMS on a silicon chip, and homogenizing the PDMS at a speed of 600r/min for 30s;
3.3, placing the silicon wafer with the PDMS into an oven, placing for 15min at 80 ℃ to solidify the PDMS, and removing the PDMS from the silicon wafer to obtain a second mold with a groove;
3.4, pressing the surface with the groove in the second mould downwards on the glass plate, cutting the second mould to expose one end of the 8-channel groove in the air, and simultaneously punching holes at the other end of the groove for 8 holes to obtain the first mould with the micro-channel pipeline;
3.5, heating gallium in an oven at 80 ℃ for 3min to melt the gallium into liquid, weighing 1mL of liquid gallium, and injecting the liquid gallium from 8 punching positions by using an injector to enable the liquid gallium to enter 8 microfluidic channels of the first mold;
3.6, placing the first mould injected with the liquid gallium and the glass plate in a refrigerator at the temperature of-80 ℃, standing for 20min to completely solidify the liquid gallium and form liquid metal microwires;
3.7, removing the first mould and the liquid metal microwires from the glass plate, and removing part of the liquid metal microwires from the end, which is not perforated, of the first mould;
3.8, immersing the uncovered liquid metal microfilament into a TPU solution with the mass fraction of 5%, wherein the solvent of the TPU solution is N, N-Dimethylformamide (DMF), and standing at room temperature for 30min until the DMF volatilizes, so that a layer of polymer film is encapsulated on the surface of the liquid metal microfilament;
and 3.9, winding the liquid metal microwires together to form a liquid metal microwire bundle, cutting off the tip of the polymer film, and exposing the electrode sites to obtain the liquid metal microwire neural electrode.
Although the present disclosure has been described above, the scope of the present disclosure is not limited thereto. Various changes and modifications may be effected therein by one of ordinary skill in the pertinent art without departing from the spirit and scope of the present disclosure, and these changes and modifications are intended to be within the scope of the present disclosure.

Claims (10)

1. A preparation method of a liquid metal microfilament nerve electrode is characterized by comprising the following steps:
s1, preparing a first mould with a micro-fluidic pipeline, placing gallium-based liquid metal in the micro-fluidic pipeline of the first mould, and placing the first mould at a low temperature for condensation to solidify the gallium-based liquid metal to form a liquid metal microfilament, wherein the melting point of the gallium-based liquid metal is more than 25 ℃ and less than 37 ℃;
s2, separating the liquid metal microwire from the first mold;
and S3, immersing the liquid metal microwire separated from the first mould into a first polymer material solution, and encapsulating a layer of polymer film on the surface of the liquid metal microwire after a solvent in the first polymer material solution is volatilized to obtain the liquid metal microwire neural electrode.
2. The method for preparing a liquid metal microwire neural electrode as claimed in claim 1, wherein in the step S1, the method for preparing the first mold comprises:
s11, designing an electrode pattern, and preparing a silicon wafer with the electrode pattern on the surface by a photoetching method;
step S12, pouring a second high polymer material on the silicon wafer, and after the second high polymer material is solidified, removing the second high polymer material from the silicon wafer to obtain a second mold with a groove;
and S13, attaching the second mold to a substrate, and forming a microfluidic pipeline between the groove and the substrate to obtain the first mold with the microfluidic pipeline.
3. The method of claim 2, wherein the second polymer material comprises at least one of polydimethylsiloxane and polymethylmethacrylate.
4. The method of claim 2, wherein the substrate comprises one of a glass slide, glass, and a cell culture dish.
5. The method for preparing a liquid metal microwire neural electrode according to claim 1, wherein in the step S1, the gallium-based liquid metal includes one of gallium, gallium-indium alloy and gallium-indium-tin alloy.
6. The method for preparing a liquid metal microwire neural electrode as claimed in claim 1, wherein in the step S1, the gallium-based liquid metal is solidified by condensing at a low temperature, comprising:
setting the condensation temperature below 0 ℃ to solidify the gallium-based liquid metal.
7. The method for preparing a liquid metal microwire neural electrode as claimed in claim 1, wherein in the step S3, the first polymer material solution comprises a first polymer material and a solvent, wherein the first polymer material comprises at least one of polyvinyl alcohol Ding Quanzhi, polyurethane, polycaprolactone, polylactic acid copolymer, polyvinylpyrrolidone, polydimethylsiloxane, gelatin and silk fibroin; the solvent includes at least one of ethanol, tetrahydrofuran, N-dimethylformamide, acetone, hexafluoroisopropanol, and water.
8. The method for preparing a liquid metal microwire neural electrode as claimed in claim 1, wherein in the step S3, after encapsulating a polymer film on the surface of the liquid metal microwire, the method further comprises:
and winding the plurality of liquid metal microwires packaged with the polymer film together to form a liquid metal microwire bundle.
9. A liquid metal microwire neural electrode prepared by the method of any one of claims 1-8.
10. Use of the liquid metal microwire neural electrode of claim 9 for neural signal detection.
CN202211349858.XA 2022-10-31 2022-10-31 Liquid metal microwire neural electrode and preparation method and application thereof Pending CN115815358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211349858.XA CN115815358A (en) 2022-10-31 2022-10-31 Liquid metal microwire neural electrode and preparation method and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211349858.XA CN115815358A (en) 2022-10-31 2022-10-31 Liquid metal microwire neural electrode and preparation method and application thereof

Publications (1)

Publication Number Publication Date
CN115815358A true CN115815358A (en) 2023-03-21

Family

ID=85525967

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202211349858.XA Pending CN115815358A (en) 2022-10-31 2022-10-31 Liquid metal microwire neural electrode and preparation method and application thereof

Country Status (1)

Country Link
CN (1) CN115815358A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116504461A (en) * 2023-06-30 2023-07-28 南京航空航天大学 Preparation method of gallium-based liquid metal flexible electronic device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116504461A (en) * 2023-06-30 2023-07-28 南京航空航天大学 Preparation method of gallium-based liquid metal flexible electronic device
CN116504461B (en) * 2023-06-30 2023-09-22 南京航空航天大学 Preparation method of gallium-based liquid metal flexible electronic device

Similar Documents

Publication Publication Date Title
Zhuang et al. Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility
CN115815358A (en) Liquid metal microwire neural electrode and preparation method and application thereof
CN106959176A (en) A kind of pliable pressure sensor and preparation method thereof
CN112244839B (en) Flexible electrode probe for long-term implantation and preparation method and equipment thereof
CN110251125A (en) A kind of flexible extensible nerve electrode and its preparation method and application
Cointe et al. Scalable batch fabrication of ultrathin flexible neural probes using a bioresorbable silk layer
CN109287073B (en) Surface modification method of flexible stretchable circuit and application thereof
CN110118624A (en) A kind of pressure sensor and preparation method thereof
Ren et al. Fabrication of high-resolution flexible circuits and sensors based on liquid metal inks by spraying and wiping processing
Graudejus et al. Characterization of an elastically stretchable microelectrode array and its application to neural field potential recordings
DE112012004348B4 (en) METHOD FOR PRODUCING A MULTIELECTRODE ARRAY AND A MULTIELECTRODENARRAY SYSTEM OF HIGH DENSITY
Patel et al. Drawn‐on‐Skin Sensors from Fully Biocompatible Inks toward High‐Quality Electrophysiology
Brown et al. Direct laser writing of 3D electrodes on flexible substrates
CN111990993A (en) Flexible integrated cortical brain electrode and manufacturing method thereof
Zhou et al. A mosquito mouthpart-like bionic neural probe
JP2019042109A (en) Biomedical electrode and manufacturing method of the same
CN110713167A (en) Microfluidic device, microfluidic system
CN114748208B (en) Tissue engineering scaffold capable of in-situ detecting multiple chemical and biological components
DE112019002492B4 (en) ELECTRICALLY FUNCTIONAL POLYMER MICRONEEDLE ARRANGEMENT
JP3979574B2 (en) Array electrode for biological sample and production method thereof
CN107157640A (en) Intelligent sheath
CN114831645A (en) Multi-channel high-density ultra-narrow stretchable microelectrode and preparation method and application thereof
CN112971789B (en) Extensible flexible electrode transfer method based on elastic seal containing fluid channel
US20050136639A1 (en) Pin-deposition of conductive inks for microelectrodes and contact via filling
US20200365296A1 (en) Multiscale all-soft electronic devices and circuits based on liquid metal

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination