CN115792381B - Device and method for precisely measuring load coefficient by adopting combined quantum Hall resistor - Google Patents
Device and method for precisely measuring load coefficient by adopting combined quantum Hall resistor Download PDFInfo
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- CN115792381B CN115792381B CN202211482898.1A CN202211482898A CN115792381B CN 115792381 B CN115792381 B CN 115792381B CN 202211482898 A CN202211482898 A CN 202211482898A CN 115792381 B CN115792381 B CN 115792381B
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Abstract
The invention discloses a device and a method for precisely measuring a load factor by adopting a combined quantum Hall resistor, wherein the device comprises the following components: a current comparator resistance bridge and a combined quantum hall resistance device; the two poles of the active current source are respectively connected with the head end of the main winding and one end of the combined type quantum Hall resistor device; the two poles of the driven current source are respectively connected with the head end of the auxiliary winding and one end of the tested resistor; two ends of the zero indicator are respectively connected to the combined type measuring Hall resistance device and the measured resistor; the unbalanced magnetic flux detector senses unbalanced magnetic flux of the main winding and the auxiliary winding when the resistances are compared through the detection coil, and the other end of the unbalanced magnetic flux detector is fed back to the driven current source; the reference standard selects the quantum Hall resistor without load effect, and adopts a combined quantum Hall resistor device to combine a plurality of quantum Hall resistors in a unique serial-parallel connection mode for completing the resistance comparison under more power. The invention can realize high-accuracy measurement of the resistance load coefficient under the wide load upper limit.
Description
Technical Field
The invention belongs to the field of metering test instruments, and particularly relates to a device and a method for precisely measuring a resistance load factor.
Background
Resistance is one of the most common electrical components, and high-accuracy resistance plays a vital role in the fields of precision measurement and the like. For this reason, the international metering world has started research to replace the traditional physical resistance standard with the quantum hall resistance standard after 1990, and so far, the natural standard of the Quantum Hall Resistance (QHR) has become the highest internationally recognized resistance metering standard. The basic structure of the quantum Hall resistor is in an 8-pin shape, which is called Hall bar, as shown in FIG. 1, wherein 1# -8# is a pin. Under normal operation, current flows through terminals 1 and 5, and voltages are measured at terminals 2 and 8, terminals 3 and 7, and terminals 4 and 6. In particular, in order to further expand the freedom of the quantum hall resistor in the resistance, a combined quantum hall resistor is proposed, and on the basis of a single quantum hall resistor, special forms of different reference resistance values are obtained through a serial-parallel combination mode of different quantum hall resistors, so that the quantum hall resistor with decimal resistance value is successfully realized internationally.
The resistive load effect is one of the important characteristics of the resistor, and is represented by the change of resistance value caused by heat generation when different currents flow, and is specifically characterized by a load factor. The relative change in resistance when the resistive power consumption is a unit power is generally regarded as a resistive load factor. When the resistor is used as a precision measurement standard, a reference resistor, a key component of an instrument and the like, the influence caused by a load effect cannot be ignored, so that the confirmation of the load factor of the resistor has important significance. However, for high-accuracy magnitude load factor measurement, how to find a resistive reference source that remains unchanged at different currents is always a key to be solved in this link.
Disclosure of Invention
The invention aims to provide a device and a method for precisely measuring a load factor by adopting a combined quantum Hall resistor, which realize high-accuracy measurement of the resistance load factor.
In order to achieve the above object, a first aspect of the present invention provides an apparatus for precisely measuring a load factor using a combined quantum hall resistor, comprising: the current comparator comprises a resistor bridge, a combined type quantum Hall resistor device and a measured resistor;
the current comparator resistance bridge comprises a driving current source, a driven current source, a zero indicator, an unbalanced magnetic flux detector, a main winding and an auxiliary winding;
the two poles of the active current source are respectively connected with the head end of the main winding and one end of the combined quantum Hall resistor device, and the tail end of the main winding is connected with the other end of the combined quantum Hall resistor device;
the two poles of the driven current source are respectively connected with the head end of the auxiliary winding and one end of the tested resistor, and the tail end of the auxiliary winding is connected with the other end of the tested resistor;
the two ends of the zero indicator are respectively connected to the combined type quantum Hall resistance device and the measured resistor, and the zero indicator is used for indicating a differential pressure signal between the combined type quantum Hall resistance device and the measured resistor;
the unbalanced magnetic flux detector detects unbalanced magnetic flux of the main winding and the auxiliary winding during current comparison through a detection coil, one end of the unbalanced magnetic flux detector is connected to a driven current source, and the unbalanced magnetic flux detector feeds the detected unbalanced magnetic flux back to the driven current source as feedback quantity so as to maintain stability of bridge comparison;
the combined quantum Hall resistor device is formed by connecting a plurality of quantum Hall resistors in series and parallel, and the resistance value of the combined quantum Hall resistor device is the same as that of a single quantum Hall resistor;
when the load coefficient of the measured resistor is measured, the combined type quantum Hall resistor device is used as a reference standard of the current comparator resistor bridge.
Preferably, the number of quantum hall resistances constituting the combined quantum hall resistance device is determined by the power range to be evaluated by the measured resistance;
the combined type quantum Hall resistor comprises n 2 The quantum Hall resistor has n more than or equal to 2 and n 2 The quantum Hall resistors are crossed and combined in a serial-parallel mode to form the combined quantum Hall resistor; the upper limit current of the combined quantum Hall resistor device is n times of the upper limit current of a single quantum Hall resistor, and the upper limit comparison power of the combined quantum Hall resistor device is n times of that of the single quantum Hall resistor 2 Multiple times.
Preferably, the quantum Hall resistor has no load effect in the upper current-limiting current.
Preferably, the current comparator resistance bridge is a low-temperature current comparator resistance bridge, a direct current comparator resistance bridge or a low-frequency current comparator resistance bridge.
Preferably, the turns ratio between the primary winding and the secondary winding is 2065:16, or 4001:31, or 6066:47, and the ratio accuracy is better than 2 x 10 -8 。
In a second aspect, the present invention provides a method for precisely measuring a load factor of a resistor, using the device for precisely measuring a load factor by using a combined quantum hall resistor according to the first aspect, the method comprising:
s1: the active current source is used for leading a main current I into the main winding, wherein the main current I is required to be smaller than or equal to the upper current-limiting current of the combined quantum Hall resistor device, the slave current source is used for leading a slave current into the slave winding, the ratio between the slave current and the main current is equal to the turns ratio of the main winding to the slave winding, and the combined quantum Hall resistor device is used as a reference standard to measure the ratio value of the measured resistor to the reference standard under the condition of doubling power P;
s2: step S1 is repeated under different main currents respectively according to the set current multiplying power increasing step, and the resistance ratio values of the measured resistor and the reference standard under a plurality of power comparison points are measured; the upper limit of the main current is the upper current-limiting current of the combined quantum Hall resistor device;
s3: and (3) obtaining the actual resistance value of the measured resistor at different power comparison points according to the steps (S1) and (S2), and obtaining a resistance value fluctuation curve and a load coefficient of the measured resistor in a data fitting mode based on the actual resistance value of the measured resistor at different power points.
Preferably, the data fitting mode is a least square method.
The invention has the beneficial effects that:
the invention relates to a resistor load factor precision measurement device, which comprises a current comparator resistor bridge, a combined quantum Hall resistor device and a measured resistor, wherein the combined quantum Hall resistor device is formed by combining a plurality of quantum Hall resistors in a serial-parallel unique mode, the influence of serial-parallel contact resistance is reduced to be extremely low, the upper current-limiting current is increased, the same resistance value as that of a single quantum Hall resistor is maintained, and when the measured resistor is used for measuring the load factor, the combined quantum Hall resistor device is used as a reference standard for comparison of the resistor bridge, so that the load upper limit of the measured resistor during the load factor measurement can be effectively improved, and meanwhile, the non-load effect of the quantum Hall resistor is utilized, and the measurement precision is improved.
In the precision measuring method of the resistance load coefficient, because the reference standard selects the combined quantum Hall resistor device without the load effect, the upper current-limiting current is high, the resistance bridge of the current comparator can be used for completing the repeated comparison measurement of the measured resistor under different powers, and finally the resistance change curve and the load coefficient of the measured resistor are obtained by fitting the measured data, so that the high-accuracy measurement of the resistance load coefficient can be realized.
The system of the present invention has other features and advantages which will be apparent from or are set forth in detail in the accompanying drawings and the following detailed description, which are incorporated herein, and which together serve to explain certain principles of the invention.
Drawings
The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular descriptions of exemplary embodiments of the invention as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the invention.
Fig. 1 shows a basic structural schematic of a quantum hall resistor.
Fig. 2 shows a schematic diagram of a device for precisely measuring a load factor by using a combined quantum hall resistor according to the present invention.
Fig. 3 shows a schematic structural diagram of a combined quantum hall resistor including 4 quantum hall resistors in an embodiment of the present invention.
Fig. 4 shows a schematic structural diagram of a combined quantum hall resistor including 9 quantum hall resistors in an embodiment of the present invention.
Detailed Description
The invention will be described in more detail below with reference to the accompanying drawings. While the preferred embodiments of the present invention are illustrated in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.
Example 1
As shown in fig. 2, the present embodiment provides a precision measurement device for a resistive load factor, including: the current comparator resistor bridge 9, the combined type quantum Hall resistor device 7 and the measured resistor 8;
the current comparator resistor bridge 9 comprises a driving current source 1, a driven current source 3, a zero indicator 6, an unbalanced magnetic flux detector 2, a main winding 4 and a secondary winding 5;
the two poles of the active current source 1 are respectively connected with the head end of the main winding 4 and one end of the combined type quantum Hall resistor device 7, and the tail end of the main winding 4 is connected with the other end of the combined type quantum Hall resistor device 7;
the two poles of the driven current source 3 are respectively connected with the head end of the auxiliary winding 5 and one end of the tested resistor 8, and the tail end of the auxiliary winding 5 is connected with the other end of the tested resistor 8;
the two ends of the zero indicator 6 are respectively connected to the combined type measuring Hall resistor device 7 and the measured resistor 8, and the zero indicator 6 is used for indicating differential pressure signals between the combined type measuring Hall resistor device 7 and the measured resistor 8;
one end of the unbalanced magnetic flux detector 2 detects unbalanced magnetic flux of the main winding 4 and the auxiliary winding 5 when current comparison is performed through a detection coil, the other end of the unbalanced magnetic flux detector 2 is connected to the driven current source 3, and the unbalanced magnetic flux detector 2 feeds back the detected unbalanced magnetic flux to the driven current source 3 as feedback quantity, so that stability of bridge comparison is maintained.
The number of quantum Hall resistors constituting the combined quantum Hall resistor device is determined by the power range of the measured resistor to be evaluated; the combined quantum Hall resistor device may include n 2 A quantum Hall resistor, n is more than or equal to 2, n 2 The quantum Hall resistors are crossed and combined in a serial-parallel mode to form a combined quantum Hall resistor; the upper current-limiting current-passing of the combined quantum Hall resistor device is that of a single quantum Hall resistorn times, the upper limit measurement power of the combined quantum Hall resistor device is n times of that of a single quantum Hall resistor 2 Multiple times. When the load factor of the measured resistor 8 is measured, the combined type quantum Hall resistor device 7 is used as a reference standard for comparison of the resistor bridge 9 of the current comparator.
As shown in fig. 1, a single quantum Hall resistor is generally represented by 8 pins in the shape of a Hall bar, wherein one current pin and 3 voltage pins on one side form the head end of the resistor, and the rest form the tail end of the resistor. The combined quantum Hall resistor device is formed by connecting a plurality of quantum Hall resistor devices in series and parallel, the serial connection of 2 quantum Hall resistor devices is characterized in that a head end current pin of one device is connected with a tail end current pin of the other device, and two voltage pins of the head end are connected with two voltage pins of the tail end of the other device; the 2 quantum Hall resistor devices are connected in parallel, so that the head current pins of the two devices are required to be connected, and the two voltage pins of the head ends of the two devices are required to be connected.
In the embodiment, the combined type quantum Hall resistor device 7 comprises 4 quantum Hall resistors, and the 4 quantum Hall resistors are combined in a serial-parallel mode to form the combined type quantum Hall resistor 7; the upper current-limiting current flowing through the combined quantum Hall resistor 7 is 2 times of that of the single quantum Hall resistor. Preferably, the quantum Hall resistor material is gallium arsenide, the current-limiting and current-passing current of a single quantum Hall resistor is 38.75uA, and the quantum Hall resistor has no load effect in the current-limiting and current-passing current.
Specifically, as shown in fig. 3, the combined quantum hall resistance device 7 is composed of 4 quantum hall resistances: QHR-1, QHR-2, QHR-3 and QHR-4, wherein QHR-1 and QHR-3, QHR-2 and QHR-4 are connected in parallel, QHR-1 and QHR-2, QHR-3 and QHR-4 are connected in series and then are connected in a cross combination mode to form a serial-parallel connection mode between every two, the unique connection mode reduces the influence of the contact resistance of the serial-parallel lead wires to be extremely low, the upper limit current of a sample is doubled, the same resistance value as that of a single quantum Hall resistor is maintained, and the upper limit power when the resistors are compared is improved.
In other embodiments, whenWhen the power range of the measured resistor to be evaluated is larger, the combined quantum Hall resistor device can also adopt 9, 16, 25 and other n 2 The quantum Hall resistors are crossed and combined in a serial-parallel mode to form a combined quantum Hall resistor device. As shown in fig. 4, taking 9 quantum hall resistors QHR-1 to QHR-9 as an example, the upper current-limiting current of the combined quantum hall resistor device is 3 times that of a single quantum hall resistor, and the upper limit measurement power of the combined quantum hall resistor device is 9 times that of the single quantum hall resistor.
In this embodiment, the current comparator resistor bridge 9 is a low-temperature current comparator resistor bridge, and in other embodiments, the current comparator resistor bridge 9 may also be a direct current comparator resistor bridge or a low-frequency current comparator resistor bridge.
In this embodiment, the number of turns W of the main winding 4 in the current comparator resistance bridge 9 1 Turns W of the secondary winding 5 2 Turns ratio W between 1 /W 2 Is selected to be 4001:31, and the proportion accuracy is better than 2 multiplied by 10 -8 . In other embodiments, the turns ratio between the primary winding 4 and the secondary winding 5 may also be 2065:16, or 6066:47, with a ratio accuracy better than 2×10 -8 。
In this embodiment, two ends of the zero indicator 6 are respectively connected to the combined type measuring hall resistor device 7 and the measured resistor 8, and indicate the differential voltage formed between the two, and in this embodiment, the zero indicator 6 is a nanovoltmeter.
In this embodiment, the unbalanced magnetic flux detector 2 selects a superconducting quantum interference device (SQUID), and the unbalanced magnetic flux detector 2 detects unbalanced magnetic flux between the main winding 4 and the auxiliary winding 5 in the resistive bridge 9 of the current comparator through the detection coil, and then feeds back to the driven current source 3, so as to realize stable balance of current proportion when the two windings of the resistive bridge 9 of the current comparator are compared in resistance.
Example 2
The present embodiment provides a precise measurement method for a resistive load factor, using the precise measurement device for a resistive load factor of embodiment 1, the measurement method comprising the steps of:
s1: the active current source 1 is used for leading a main current I into a main winding 4 in a resistance bridge, wherein the main current I is required to be smaller than or equal to the upper current-limiting current of a combined quantum Hall resistor device, the driven current source 3 is used for leading a secondary current into a secondary winding 5 in the resistance bridge, the ratio between the secondary current and the main current is equal to the turns ratio of the main winding to the secondary winding, the combined quantum Hall resistor device 7 is used as a reference standard, and the ratio value of a measured resistor 8 and the reference standard under the condition of doubling power P is measured;
specifically, this step is performed by comparison measurement with one power, i.e., the circulating current I (38.74 uA).
The active current source 1 introduces a current I to the main winding 4 (i.e. the side of the combined type quantum Hall resistor device 7), the current is selected to be 38.74uA in the embodiment, and the driven current source 3 (3) is used according to the turns ratio W of the main winding 5 and the auxiliary winding 5 1 :W 2 A proportional current IW is led into the secondary winding 5 (namely the side of the measured resistor 8) 1 /W 2 Finish 1 (1) 2 ) And comparing the resistances under the condition of double power, and measuring the resistance ratio of the measured resistance 8 to the reference at the point of double power comparison.
S2: step S1 is repeated under different main currents respectively according to the set current multiplying power increasing step, and the resistance ratio value of the measured resistor 8 to the reference standard under a plurality of power comparison points is measured; wherein, the upper limit of the main current is the upper current-limiting current of the combined type quantum Hall resistor device 7;
specifically, this step is first performed by comparison measurement at 2.25 times the power, i.e., the current flowing at 1.5I.
The active current source 1 introduces a current of 1.5I to the main winding 4 (i.e. the side of the combined type quantum Hall resistor device 7), the current is selected to be 58.11uA in the embodiment, and the driven current source 3 is used according to the turns ratio W of the main winding 5 and the auxiliary winding 5 1 :W 2 A proportional current 1.5IW is led into the secondary winding 5 (namely the side of the measured resistor 8) 1 /W 2 Finish 2.25 (1.5 2 ) Comparing the resistances under the condition of power doubling; the resistance ratio of the measured resistor 8 to the reference at the 2.25 times power comparison point was measured.
Then, a comparison measurement was performed at 4 times of the power, i.e., the current 2I.
The driving current source 1 introduces a current 2I to the main winding 4 (i.e. the side of the combined type quantum Hall resistor device 7), the current is 77.48uA in the embodiment, and the driven current source 3 is used according to the winding ratio W 1 :W 2 A proportional current 2IW is led into the secondary winding 5 (namely the side of the measured resistor 8) 1 /W 2 Finish 4 (2 2 ) Comparing the resistances under the condition of power doubling; the resistance ratio of the measured resistor 8 to the reference at the 4-power comparison point is measured.
S3: according to the multiple resistance ratios measured in the steps S1 and S2, the actual resistance of the measured resistor 8 at different comparison power points is obtained, and then the resistance fluctuation curve and the load factor curve of the measured resistor 8 are obtained in a data fitting mode.
Specifically, this step performs data fitting processing on the measurement data obtained in steps S1 and S2 using a least square method.
According to the resistance ratio between the measured resistor 8 and the combined measuring Hall resistor 7 measured by the three comparison measurements of the steps S1 and S2, calculating to obtain the actual resistance { R of the measured resistor 8 under the power of 1 time, the power of 2.25 times and the power of 4 times 1P ,R 2.25P ,R 4P And is denoted as { x } 1 ,x 2 ,x 3 -a }; the power point { P,2.25P,4P } used for the test is denoted as { P } 1 ,p 2 ,p 3 Then adopts the mode of least square method to make x k And p is as follows k Data fitting was performed. The data fitting and analysis steps are as follows:
let the fitting function be
f(p)＝x 1 (1+η(p i -p 1 )) (1)
To make the function at p i The value f (p i ) And trajectory data x i Near, function (1) at each power point p i The sum of squares of residuals at:
when the equation (2) is that the sum of squares of the residuals is minimum, namely the best fit curve, η in this case is the load factor; at the same time according to the measured resistance 8 value { R 1P ，R 2.25P ，R 4P -and corresponding power { P } 1 ，P 2.25 ，P 4 The power-resistance curve can be drawn.
The foregoing description of embodiments of the invention has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described.
Claims (6)
1. The utility model provides an adopt device of combination formula quantum hall resistance precision measurement load factor which characterized in that includes: the current comparator comprises a resistor bridge, a combined type quantum Hall resistor device and a measured resistor;
the current comparator resistance bridge comprises a driving current source, a driven current source, a zero indicator, an unbalanced magnetic flux detector, a main winding and an auxiliary winding;
the two poles of the active current source are respectively connected with the head end of the main winding and one end of the combined quantum Hall resistor device, and the tail end of the main winding is connected with the other end of the combined quantum Hall resistor device;
the two poles of the driven current source are respectively connected with the head end of the auxiliary winding and one end of the tested resistor, and the tail end of the auxiliary winding is connected with the other end of the tested resistor;
the two ends of the zero indicator are respectively connected to the combined type quantum Hall resistance device and the measured resistor, and the zero indicator is used for indicating a differential pressure signal between the combined type quantum Hall resistance device and the measured resistor;
the unbalanced magnetic flux detector detects unbalanced magnetic flux of the main winding and the auxiliary winding during current comparison through a detection coil, one end of the unbalanced magnetic flux detector is connected to a driven current source, and the unbalanced magnetic flux detector feeds the detected unbalanced magnetic flux back to the driven current source as feedback quantity so as to maintain stability of bridge comparison;
the combined quantum Hall resistor device is formed by connecting a plurality of quantum Hall resistors in series and parallel, and the resistance value of the combined quantum Hall resistor device is the same as that of a single quantum Hall resistor;
when the load coefficient of the measured resistor is measured, the combined type quantum Hall resistor device is used as a reference standard of the resistance bridge of the current comparator;
the number of quantum Hall resistors forming the combined quantum Hall resistor device is determined by the power range of the measured resistor to be evaluated;
the combined type quantum Hall resistor comprises n 2 The quantum Hall resistor has n more than or equal to 2 and n 2 The quantum Hall resistors are crossed and combined in a serial-parallel mode to form the combined quantum Hall resistor; the upper limit current of the combined quantum Hall resistor device is n times of the upper limit current of a single quantum Hall resistor, and the upper limit comparison power of the combined quantum Hall resistor device is n times of that of the single quantum Hall resistor 2 Multiple times.
2. The apparatus of claim 1, wherein the quantum hall resistor is free of loading effects within an upper current limit.
3. The apparatus of claim 1, wherein the current comparator resistive bridge is a low temperature current comparator resistive bridge, a direct current comparator resistive bridge, or a low frequency current comparator resistive bridge.
4. The device of claim 1, wherein the turns ratio between the primary winding and the secondary winding is 2065:16, or 4001:31, or 6066:47, and the ratio accuracy is better than 2 x 10 -8 。
5. A method for precisely measuring a load factor of a resistor, using the device for precisely measuring a load factor using a combined quantum hall resistor according to any one of claims 1 to 4, the method comprising:
s1: the active current source is used for leading in main current to the main winding, wherein the main current is required to be smaller than or equal to the upper current-limiting current of the combined quantum Hall resistor device, the slave current source is used for leading in auxiliary current to the auxiliary winding, the ratio between the auxiliary current and the main current is equal to the turns ratio of the main winding to the auxiliary winding, the combined quantum Hall resistor device is used as a reference standard, and the ratio value of the measured resistor to the reference standard under the condition of doubling power P is measured;
s2: step S1 is repeated under different main currents respectively according to the set current multiplying power increasing step, and the resistance ratio values of the measured resistor and the reference standard under a plurality of power comparison points are measured; the upper limit of the main current is the upper current-limiting current of the combined quantum Hall resistor device;
s3: and (3) obtaining the actual resistance value of the measured resistor at different power comparison points according to the steps (S1) and (S2), and obtaining a resistance value fluctuation curve and a load coefficient of the measured resistor in a data fitting mode based on the actual resistance value of the measured resistor at different power points.
6. The precise measurement method of the resistance load factor according to claim 5, wherein the data fitting mode is a least square method.
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