CN115790955A - Fabry-Perot interference dynamic pressure sensing device and manufacturing method thereof - Google Patents
Fabry-Perot interference dynamic pressure sensing device and manufacturing method thereof Download PDFInfo
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- CN115790955A CN115790955A CN202310052772.9A CN202310052772A CN115790955A CN 115790955 A CN115790955 A CN 115790955A CN 202310052772 A CN202310052772 A CN 202310052772A CN 115790955 A CN115790955 A CN 115790955A
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Abstract
The invention relates to the technical field of Fabry-Perot interference optical fiber sensors, in particular to a Fabry-Perot interference dynamic pressure sensing device and a manufacturing method thereof, wherein the Fabry-Perot interference dynamic pressure sensing device comprises a third cylinder, a third collimating sleeve is arranged in the third cylinder, a sensing optical fiber is coaxially arranged in the third collimating sleeve, the top end of the sensing optical fiber penetrates out of the third cylinder, the bottom end of the third collimating sleeve is provided with a groove, the bottom end of the sensing optical fiber is provided with a reflecting mirror surface and extends into the groove, the bottom end of the groove is fixedly connected with a third deformable reflecting part, the third deformable reflecting part is opposite to the bottom end of the sensing optical fiber, and the groove and the third deformable reflecting part form an optical microcavity; and a stabilizing mechanism is arranged on one side of the third column body and is communicated with the optical microcavity. When the invention detects the pressure, when the static background pressure of the external environment changes, the pressure difference (pressure difference) between the inside and the outside of the optical microcavity is not changed, thereby ensuring the stability of the working point of the invention and not influencing the performance of the invention.
Description
Technical Field
The invention relates to the technical field of Fabry-Perot interference optical fiber sensors, in particular to a Fabry-Perot interference dynamic pressure sensing device and a manufacturing method thereof.
Background
Fabry-perot interferometric fiber sensors, both extrinsic and intrinsic, were proposed and studied extensively in 1988 and 1991, respectively. The extrinsic type sensor has a Fabry-Perot cavity formed by the end surface of the incident optical fiber and the end surface of the reflecting optical fiber or the inner surface of the pressure sensitive diaphragm, and the temperature sensitivity is lower than that of the intrinsic type sensor, so that the extrinsic type Fabry-Perot interference optical fiber pressure sensor is more favored than the intrinsic type Fabry-Perot interference optical fiber pressure sensor.
The ambient pressure can be sensed as either a static pressure or a dynamic pressure. When measuring the environmental pressure, the sensor achieves the purpose of measurement according to the change of the interference fringes due to environmental disturbance, but the external environment may cause the deformation of the sensor structure, resulting in the change of the interference fringes, such as: when the sensor is placed under water to measure dynamic pressure, the static pressure acting on the sensor changes along with the change of the depth of the water, the change of the static pressure causes the change of the cavity length of the sensor, and further causes the change of interference fringes, and at the moment, a working point deviates from an initial position and appears at any possible position on an interference spectrum curve, so that the deviation of a measuring result is caused. When the Fabry-Perot interference dynamic pressure sensing device is used for measuring the dynamic pressure of the environment, the working point of the sensor is easy to drift due to environmental interference, so that the performance of the sensor is reduced, and even the sensor fails, and therefore the Fabry-Perot interference dynamic pressure sensing device and the manufacturing method thereof are urgently needed to solve the problem.
Disclosure of Invention
The invention aims to provide a Fabry-Perot interference dynamic pressure sensing device to solve the problems.
In order to achieve the purpose, the invention provides the following scheme:
Fabry-Perot interference dynamic pressure sensing device, comprising: the optical fiber sensor comprises a third cylinder, wherein a third collimating sleeve is arranged in the third cylinder, a sensing optical fiber is coaxially arranged in the third collimating sleeve, ventilating assemblies are arranged on two sides of the sensing optical fiber, the top end of the sensing optical fiber penetrates out of the third cylinder, a groove is formed in the bottom end of the third collimating sleeve, the bottom end of the sensing optical fiber is provided with a reflecting mirror surface and extends into the groove, a third shape-changing reflecting piece is fixedly connected to the bottom end of the groove, the third shape-changing reflecting piece is opposite to the bottom end of the sensing optical fiber, and the groove and the third shape-changing reflecting piece form an optical microcavity;
and a stabilizing mechanism is arranged on one side of the third cylinder and is communicated with the optical microcavity through the ventilation assembly.
Preferably, stabilizing mean includes first cylinder, coaxial first collimation sleeve pipe that is provided with in the first cylinder, first collimation sheathed tube one end rigid coupling has first deformation piece, first deformation piece with first collimation sleeve pipe forms stabilizes the chamber, stabilize the chamber and pass through ventilate the subassembly with optics microcavity intercommunication.
Preferably, a first installation cavity is formed in the first cylinder, the bottom end of the first installation cavity is penetrated through the first cylinder, the first collimating sleeve is fixedly installed in the first installation cavity, a first communicating cavity is formed in the first cylinder, the first communicating cavity is located at the top end of the first installation cavity, the first communicating cavity is communicated with the first installation cavity, and the stabilizing cavity is communicated with the optical microcavity through the first communicating cavity and the ventilation assembly.
Preferably, a third installation cavity is formed in the third cylinder, the bottom end of the third installation cavity penetrates through the third cylinder, the third collimating sleeve is fixedly connected into the third installation cavity, a third communicating cavity is formed in the third cylinder, the third communicating cavity is located at the top end of the third installation cavity and communicated with the third installation cavity, and the optical micro-cavity is communicated with the stabilization cavity through the third communicating cavity and the ventilation assembly.
Preferably, a through hole is coaxially formed in the third collimating sleeve, the sensing optical fiber is arranged in the through hole in a penetrating manner, the ventilation assembly comprises two photonic crystal optical fibers arranged on two opposite sides of the sensing optical fiber, the two photonic crystal optical fibers are arranged in the through hole in a penetrating manner, the two photonic crystal optical fibers are both arranged in parallel with the sensing optical fiber, the bottom end of each photonic crystal optical fiber extends into the optical microcavity, and the top end of each photonic crystal optical fiber penetrates into the third communicating cavity.
Preferably, the first cylinder with be connected through the second cylinder between the third cylinder, middle intercommunication chamber has been seted up in the second cylinder, middle intercommunication chamber runs through the second cylinder, the one end in middle intercommunication chamber with first intercommunication chamber intercommunication, the other end in middle intercommunication chamber with third intercommunication chamber intercommunication.
Preferably, the third deformable reflecting element includes a third diaphragm, the third diaphragm is fixedly connected to the bottom end of the groove, the third diaphragm is perpendicular to the axis of the third column, one side of the groove on which the third diaphragm is located is a reflecting surface, and the reflecting surface is opposite to the reflecting mirror surface.
Preferably, the first deformation piece comprises a first diaphragm, the first diaphragm is fixedly connected to the bottom end of the first collimation sleeve, the first diaphragm is perpendicular to the axis of the first collimation sleeve, the first diaphragm is identical to the third diaphragm, and the first diaphragm and the third diaphragm are located on the same horizontal plane.
A method of making the fabry-perot interference dynamic pressure sensing device, comprising the steps of:
s1: fixedly connecting a third deformation reflecting piece at the groove at the bottom end of the third collimating sleeve to form an optical microcavity;
s2: the sensing optical fiber is arranged in the third collimating sleeve in a penetrating mode, and the reflecting mirror surface of the sensing optical fiber is arranged opposite to the reflecting surface of the third deformation reflecting piece;
s3: fixedly connecting a third collimating sleeve with a sensing optical fiber in a third column;
s4: and a stabilizing mechanism is arranged on one side of the third column body and is communicated with the optical microcavity.
The invention has the following technical effects:
in the invention, a stabilizing mechanism is arranged at one side of the third cylinder and is communicated with the optical microcavity, so that when the device detects dynamic pressure, when the static background pressure of the external environment changes, the internal and external pressure difference (pressure difference) of the optical microcavity is not changed, interference fringes are not changed, and the dynamic pressure acts on the first diaphragm.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic cross-sectional view of a third collimating sleeve of the present invention;
FIG. 3 is a schematic cross-sectional view of a photonic crystal fiber of the present invention;
FIG. 4 is a schematic cross-sectional view of a first collimating sleeve of the present invention;
wherein, 1, a first column body; 11. a first mounting cavity; 12. a first communicating chamber; 2. a first collimating sleeve; 3. a first diaphragm; 4. a second cylinder; 41. a middle communicating cavity; 5. a third column; 51. a third mounting cavity; 52. a third communicating chamber; 6. a third collimating sleeve; 61. a groove; 7. a photonic crystal fiber; 8. a sensing optical fiber; 9. a third diaphragm.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description thereof.
Referring to fig. 1-4, the present invention provides a fabry-perot interference dynamic pressure sensing device comprising: a third cylinder 5, wherein a third collimating sleeve 6 is arranged in the third cylinder 5, a sensing optical fiber 8 is coaxially arranged in the third collimating sleeve 6, ventilation components are arranged on two sides of the sensing optical fiber 8, the top end of the sensing optical fiber 8 penetrates out of the third cylinder 5, a groove 61 is formed in the bottom end of the third collimating sleeve 6, the bottom end of the sensing optical fiber 8 is arranged as a reflecting mirror surface and extends into the groove 61, a third deformation reflecting part is fixedly connected to the bottom end of the groove 61, the third deformation reflecting part is arranged opposite to the bottom end of the sensing optical fiber 8, and the groove 61 and the third deformation reflecting part form an optical microcavity;
one side of the third column 5 is provided with a stabilizing mechanism which is communicated with the optical microcavity through the ventilation component.
The optical microcavity is used for forming interference spectrum signals, the stabilizing mechanism is communicated with the optical microcavity, and when the device is placed in different static pressure environments for use, the pressure difference between the inside of the optical microcavity and the outside environment is unchanged, so that interference fringes cannot move no matter how the background static pressure of the environment changes, and the working point of the device is stabilized at an initial position.
When the environmental dynamic pressure acts on the third cylinder 5 and the stabilizing mechanism, the pressure in the optical micro-cavity is adjusted by the stabilizing mechanism, so that the dynamic pressure acting on the stabilizing mechanism cannot be effectively transmitted to the third deformation reflecting piece, and the interference fringes of the optical micro-cavity can effectively reflect the change information of the external dynamic pressure.
Further optimize the scheme, stabilizing mean includes first cylinder 1, and the coaxial first collimation sleeve pipe 2 that is provided with in the first cylinder 1, the one end rigid coupling of first collimation sleeve pipe 2 have first deformation piece, and first deformation piece forms with first collimation sleeve pipe 2 and stabilizes the chamber, stabilizes the chamber and communicates with the optics microcavity through ventilating the subassembly.
The bottom end of the first collimating sleeve 2 is fixedly connected with a first deformation piece, a stable cavity is formed between the first collimating sleeve 2 and the first deformation piece, and the stable cavity is communicated with the optical microcavity, so that the effect of adjusting the pressure in the optical microcavity can be achieved. The first column 1 and the third column 5 are arranged in parallel.
Further optimize the scheme, seted up first installation cavity 11 in the first cylinder 1, first cylinder 1 is run through to the bottom of first installation cavity 11, and first collimation sleeve pipe 2 fixed mounting has been seted up 12 in the first installation cavity 11 in the first cylinder 1, and first communicating chamber 12 is located the top of first installation cavity 11, first communicating chamber 12 and first installation cavity 11 intercommunication, and the stability chamber is through first communicating chamber 12 and subassembly and the optics microcavity intercommunication of ventilating.
Further optimize the scheme, seted up third installation cavity 51 in the third cylinder 5, the bottom of third installation cavity 51 runs through third cylinder 5, third collimation sleeve 6 rigid coupling is in third installation cavity 51, seted up third intercommunication chamber 52 in the third cylinder 5, third intercommunication chamber 52 is located third installation cavity 51 top and communicates with third installation cavity 51, the optics microcavity passes through third intercommunication chamber 52 and ventilates the subassembly and stabilizes the chamber intercommunication. The top end of the third collimating sleeve 6 is fixedly connected to the top wall of the third mounting cavity 51 through a bolt, and a sealing gasket is arranged between the third collimating sleeve 6 and the top wall of the third mounting cavity 51.
Further optimize the scheme, the coaxial through-hole of having seted up in the third collimation sleeve pipe 6, sensing fiber 8 wears to establish in the through-hole, and the subassembly of ventilating is including setting up two photonic crystal fiber 7 in the relative both sides of sensing fiber 8, and two photonic crystal fiber 7 wear to establish in the through-hole, and two photonic crystal fiber 7 all with sensing fiber 8 parallel arrangement, and the bottom of photonic crystal fiber 7 stretches into in the optics microcavity, and the top of photonic crystal fiber 7 penetrates in the third intercommunication chamber 52. The sensing optical fiber 8 and the two photonic crystal optical fibers 7 are fixedly connected in a through hole in the third collimating sleeve 6 in a laser welding mode, the two photonic crystal optical fibers 7 are respectively positioned at two opposite sides of the sensing optical fiber 8, the photonic crystal optical fibers 7 are in the prior art, and the third communicating cavity 52 is communicated with the optical microcavity through the photonic crystal optical fibers 7, the sensing optical fibers 8 and gaps among the communicating cavities.
Further optimize the scheme, be connected through second cylinder 4 between first cylinder 1 and the third cylinder 5, seted up middle intercommunication chamber 41 in the second cylinder 4, middle intercommunication chamber 41 runs through second cylinder 4, and the one end and the first intercommunication chamber 12 intercommunication of middle intercommunication chamber 41, the other end and the third intercommunication chamber 52 intercommunication of middle intercommunication chamber 41. The two ends of the middle communicating chamber 41 are respectively communicated with the third communicating chamber 52 and the first communicating chamber 12, so that the gas in the stabilizing chamber and the optical micro-chamber can flow, and the function of adjusting the pressure is achieved.
Further optimize the scheme, the third shape-changing reflection member includes a third diaphragm 9, the third diaphragm 9 is fixedly connected to the bottom end of the groove 61, the third diaphragm 9 is perpendicular to the axis of the third column 5, one side of the third diaphragm 9 located in the groove 61 is set as a reflection surface, and the reflection surface is opposite to the reflection mirror surface.
Further optimize the scheme, first deformation piece includes first diaphragm 3, and first diaphragm 3 rigid coupling is in the bottom of first collimation sleeve pipe 2, and first diaphragm 3 sets up with the axis of first collimation sleeve pipe 2 is perpendicular, and first diaphragm 3 is the same with third diaphragm 9 completely, and first diaphragm 3 is located same horizontal plane with third diaphragm 9.
The first diaphragm 3 and the third diaphragm 9 have the same material and parameters, and when the first column 1 and the third column 5 are both arranged straight, the first diaphragm 3 and the third diaphragm 9 are located on the same horizontal plane, so that the first diaphragm 3 and the third diaphragm 9 are ensured to respond to the same background static pressure of the environment.
A method of making a fabry-perot interference dynamic pressure sensing device, comprising the steps of:
s1: fixedly connecting a third deformation reflecting piece at the groove at the bottom end of the third collimating sleeve 6 to form an optical microcavity;
s2: the sensing optical fiber 8 is arranged in the third collimating sleeve 6 in a penetrating way, and the reflecting mirror surface of the sensing optical fiber 8 is arranged opposite to the reflecting surface of the third deformation reflecting piece;
s3: fixedly connecting a third collimating sleeve 6 with a sensing optical fiber 8 in a third column 5;
s4: and a stabilizing mechanism is arranged on one side of the third column 5 and is communicated with the optical microcavity.
The third collimating sleeve 6 is 10mm long and 2.5mm in diameter, a through hole with an oval cross section is arranged in the middle, the inner diameter of the through hole in the minor axis direction is 126-128 micrometers, and the inner diameter of the through hole in the major axis direction is 378-382 micrometers; processing a groove 61 at one end of the third collimating sleeve 6 by femtosecond laser, wherein the groove 61 is preferably in a hemispherical shape or a semi-ellipsoidal shape, the inner diameter is 1-1.5mm, the depth is 1.5mm, then grinding and polishing the end part processed with the groove 61 to ensure that the end part is perpendicular to the axis of the third collimating sleeve 6, the verticality error does not exceed 0.5 ℃, cleaning 3 times by ultrasonic after processing, 3-5 minutes each time, and drying after cleaning;
the diameter of the third membrane 9 is preferably 3mm, the thickness is 15 mu m to 0.5mm, one surface of the first membrane 3 is ground and polished, only one surface is ground, the ground and polished surface faces the third collimating sleeve 6 and is welded along the edge, after the welding is finished, laser parameters are adjusted immediately to reduce the energy of the laser reaching the membrane, and the laser annealing is carried out on the membrane, so that the internal residual stress caused by the welding is released;
and fixedly connecting the installed first collimation sleeve 2 in the first column body 1, fixedly connecting the installed third collimation sleeve 6 in the third column body 5, and fixedly connecting the first column body 1 and the third column body 5 through the second column body 4 together to complete the manufacturing.
The second cylinder 4, the third cylinder 5 and the first cylinder 1 are preferably made of 316 stainless steel, and the third collimating sleeve 6 and the first collimating sleeve 2 are preferably made of glass.
As shown in fig. 2, the sensing fiber 8 is placed in the middle of the through hole, the other two photonic crystal fibers 7 are placed on two sides, the purpose of placing the photonic crystal fibers 7 on the two sides is that the sensing fiber 8 is aligned with the center of the third membrane 9, then the photonic crystal fibers 7 and the sensing fiber 8 are connected in the through hole by single-point welding with laser, and the gap left by the single-point welding with laser is used for forming a vent hole of the optical microcavity; the other purpose of placing the photonic crystal fiber 7 is to form more tiny vent holes of the optical microcavity by using the small holes of the photonic crystal fiber 7, so that the optical microcavity is communicated with the stable cavity, and when the sensor is placed in different static pressure environments for use, the pressure difference between the optical microcavity and the stable cavity and the environment is not changed, so that no interference fringe can move no matter how the background static pressure of the environment changes, and the working point of the sensor is ensured to be stabilized at the initial position; when the environmental dynamic pressure acts on the first diaphragm 3 and the third diaphragm 9, the outer surface of the third diaphragm 9 is acted by the dynamic pressure, and the interference fringes change accordingly, so that dynamic pressure information is reflected, but the dynamic pressure acts on the first diaphragm 3, because the small holes of the photonic crystal fiber 7 and the holes left by laser welding are very small, the dynamic pressure cannot be quickly transmitted to the optical microcavity part, therefore, the dynamic pressure acting on the outer surface of the first diaphragm 3 cannot be effectively acted on the inner surface of the third diaphragm 9, so that the interference fringes of the optical microcavity can effectively reflect the change information of the external dynamic pressure.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solutions of the present invention can be made by those skilled in the art without departing from the spirit of the present invention, and the technical solutions of the present invention are within the scope of the present invention defined by the claims.
Claims (9)
1. Fabry-Perot interference dynamic pressure sensing device, characterized by includes: the optical fiber sensor comprises a third cylinder (5), wherein a third collimating sleeve (6) is arranged in the third cylinder (5), a sensing optical fiber (8) is coaxially arranged in the third collimating sleeve (6), ventilating assemblies are arranged on two sides of the sensing optical fiber (8), the top end of the sensing optical fiber (8) penetrates out of the third cylinder (5), a groove (61) is formed in the bottom end of the third collimating sleeve (6), the bottom end of the sensing optical fiber (8) is provided with a reflecting mirror surface and extends into the groove (61), a third deformable reflecting part is fixedly connected to the bottom end of the groove (61), the third deformable reflecting part is arranged opposite to the bottom end of the sensing optical fiber (8), and the groove (61) and the third deformable reflecting part form an optical microcavity;
and a stabilizing mechanism is arranged on one side of the third cylinder (5), and the stabilizing mechanism is communicated with the optical microcavity through the ventilation component.
2. The fabry-perot interferometric dynamic pressure sensing device of claim 1, wherein: stabilizing mean includes first cylinder (1), coaxial first collimation sleeve pipe (2) of being provided with in first cylinder (1), the one end rigid coupling of first collimation sleeve pipe (2) has first deformation piece, first deformation piece with first collimation sleeve pipe (2) form and stabilize the chamber, it passes through to stabilize the chamber ventilate the subassembly with optics microcavity intercommunication.
3. The fabry-perot interferometric dynamic pressure sensing device of claim 2, wherein: offer first installation cavity (11) in first cylinder (1), the bottom of first installation cavity (11) runs through first cylinder (1), first collimation sleeve pipe (2) fixed mounting be in first installation cavity (11), first intercommunication chamber (12) have been offered in first cylinder (1), first intercommunication chamber (12) are located the top of first installation cavity (11), first intercommunication chamber (12) with first installation cavity (11) intercommunication, stabilize the chamber and pass through first intercommunication chamber (12) and the subassembly of ventilating with the optics microcavity intercommunication.
4. The fabry-perot interferometric dynamic pressure sensing device of claim 3, wherein: seted up third installation cavity (51) in third cylinder (5), the bottom of third installation cavity (51) is run through third cylinder (5), third collimation sleeve pipe (6) rigid coupling is in third installation cavity (51), set up third intercommunication chamber (52) in third cylinder (5), third intercommunication chamber (52) are located third installation cavity (51) top and with third installation cavity (51) intercommunication, the optics microcavity passes through third intercommunication chamber (52) and ventilate the subassembly with stabilize the chamber intercommunication.
5. The fabry-perot interferometric dynamic pressure sensing device of claim 4, wherein: the optical fiber ventilation device is characterized in that a through hole is coaxially formed in the third collimating sleeve (6), the sensing optical fiber (8) penetrates through the through hole, the ventilation assembly comprises two photonic crystal fibers (7) which are arranged on two opposite sides of the sensing optical fiber (8), the two photonic crystal fibers (7) penetrate through the through hole, the two photonic crystal fibers (7) are arranged in parallel with the sensing optical fiber (8), the bottom end of each photonic crystal fiber (7) extends into the optical micro-cavity, and the top end of each photonic crystal fiber (7) penetrates into the third communicating cavity (52).
6. The fabry-perot interferometric dynamic pressure sensing device of claim 5, wherein: the first cylinder (1) is connected with the third cylinder (5) through the second cylinder (4), a middle communicating cavity (41) is formed in the second cylinder (4), the middle communicating cavity (41) penetrates through the second cylinder (4), one end of the middle communicating cavity (41) is communicated with the first communicating cavity (12), and the other end of the middle communicating cavity (41) is communicated with the third communicating cavity (52).
7. The fabry-perot interferometric dynamic pressure sensing device of claim 2, wherein: the third deformation reflection part comprises a third diaphragm (9), the third diaphragm (9) is fixedly connected with the bottom end of the groove (61), the third diaphragm (9) is perpendicular to the axis of the third cylinder (5), the third diaphragm (9) is located on one side of the groove (61) and is set to be a reflection surface, and the reflection surface is opposite to the reflection mirror surface.
8. The fabry-perot interferometric dynamic pressure sensing device of claim 7, wherein: the first deformation piece comprises a first membrane (3), the first membrane (3) is fixedly connected with the bottom end of the first collimation sleeve (2), the first membrane (3) is perpendicular to the axis of the first collimation sleeve (2), the first membrane (3) is identical to the third membrane (9), and the first membrane (3) and the third membrane (9) are located on the same horizontal plane.
9. A method of making the fabry perot interference dynamic pressure sensing device of any of claims 1-8, comprising the steps of:
s1: fixedly connecting a third deformation reflecting piece at the groove at the bottom end of the third collimating sleeve (6) to form an optical microcavity;
s2: the sensing optical fiber (8) is arranged in the third collimating sleeve (6) in a penetrating mode, and the reflecting mirror surface of the sensing optical fiber (8) is arranged opposite to the reflecting surface of the third deformation reflecting piece;
s3: fixedly connecting a third collimating sleeve (6) provided with a sensing optical fiber (8) in the third column (5);
s4: and a stabilizing mechanism is arranged on one side of the third cylinder (5) and is communicated with the optical microcavity.
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| US20070041019A1 (en) * | 2003-10-03 | 2007-02-22 | Siegmar Schmidt | Rugged fabry-perot pressure sensor |
| CN101832832A (en) * | 2010-05-28 | 2010-09-15 | 天津大学 | Optical fiber Fabry-Perot pressure sensor and production method thereof |
| US9677949B1 (en) * | 2013-10-29 | 2017-06-13 | Nutech Ventures | Fiber-optic sensor for strain-insensitive temperature measurements |
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