CN115732381A - Semiconductor device and base adjusting mechanism thereof - Google Patents
Semiconductor device and base adjusting mechanism thereof Download PDFInfo
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- CN115732381A CN115732381A CN202211471549.XA CN202211471549A CN115732381A CN 115732381 A CN115732381 A CN 115732381A CN 202211471549 A CN202211471549 A CN 202211471549A CN 115732381 A CN115732381 A CN 115732381A
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- 238000005516 engineering process Methods 0.000 description 2
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
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Abstract
The application discloses semiconductor equipment and a base adjusting mechanism thereof, and belongs to the technical field of semiconductor processes. The base adjusting mechanism of the semiconductor device comprises a mechanism base body, a first movable element, a second movable element, a switching base body, a first direction adjusting component, a second direction adjusting component and a locking component, wherein a first direction clamping structure which limits the first movable element to move only in a first direction relative to the second fixed element is arranged between the first movable element and a second fixed element of the mechanism base body; a second direction clamping structure which limits the second movable element to move only in a second direction relative to the first movable element is arranged between the second movable element and the first movable element. The utility model provides a base adjustment mechanism, it can be when carrying out centering operation to the base subassembly, separately carries out the adjustment of mutually perpendicular's first direction and second direction to the base subassembly for each other does not influence during two direction adjustments, and then its adjustment degree of difficulty of greatly reduced.
Description
Technical Field
The application belongs to the technical field of semiconductor processes, and particularly relates to a semiconductor device and a base adjusting mechanism thereof.
Background
In the process of carrying out corresponding semiconductor processes, sometimes the base is required to carry the wafer to lift the process position under the drive of the base lifting device, which requires that the wafer has good position precision and repeatability in each lifting process, so as to ensure the safety and accurate positioning of the wafer in the process of taking and placing the wafer by the manipulator. The susceptor lifting device has errors in the manufacturing and installation processes, and the positional accuracy of the wafer can meet the requirements only by adjusting, so that the susceptor lifting device is required to be capable of accurately positioning the susceptor during assembly. The existing base lifting device mainly adopts a cross-shaped connection adjusting mechanism to realize the centering operation of the base, namely, the centering positioning of the base is realized by adjusting the base in two mutually perpendicular directions, however, the cross-shaped connection adjusting mechanism is simultaneously performed when the base is adjusted in two mutually perpendicular directions, so that the adjustment effect of the base in any direction is affected, and the whole centering adjustment is greatly difficult.
Disclosure of Invention
The embodiment of the application provides a base adjustment mechanism and semiconductor equipment, and aims to solve the problem that when an existing base adjustment mechanism adjusts a base in two directions perpendicular to each other, the base adjustment mechanism can affect each other, and great difficulty is brought to whole centering adjustment.
In a first aspect, embodiments of the present application provide a susceptor adjustment mechanism for a semiconductor apparatus for transition between a susceptor assembly and a susceptor lift device, the susceptor adjustment mechanism comprising:
the mechanism base comprises a first fixing element and a second fixing element which are perpendicular to each other, and the first fixing element is in driving connection with the base lifting device;
the first movable element is arranged close to one side surface of the second fixed element away from the base component, and a first direction clamping structure which limits the first movable element to move only in a first direction relative to the second fixed element is arranged between the first movable element and the second fixed element;
the second movable element is arranged close to one side surface of the first movable element away from the second fixed element, a second direction clamping structure for limiting the second movable element to move only in a second direction relative to the first movable element is arranged between the second movable element and the first movable element, and the second direction is vertical to the first direction;
one end of the switching seat body is fixedly connected with the base component, and the other end of the switching seat body sequentially penetrates through the second fixed element, the first movable element and the second movable element and is fixedly connected with the second movable element;
the first direction adjusting assembly is arranged between the second movable element and the second fixed element so as to drive the second movable element and respectively drive the switching seat body and the first movable element to move in a first direction relative to the second fixed element;
the second direction adjusting assembly is arranged between the second movable element and the second fixed element so as to drive the second movable element and drive the switching seat body to move in a second direction relative to the first movable element together;
and the locking assembly is arranged between the second movable element and the second fixed element so as to lock the second movable element and the first movable element on the second fixed element after the first direction adjusting assembly and the second direction adjusting assembly are adjusted.
Optionally, in some embodiments, the first direction engaging structure includes a first groove extending along the first direction and a first protrusion engaged in the first groove and moving freely along the extending direction of the first groove, the first groove is concavely disposed on a side surface of the second fixing element away from the base assembly, and the first protrusion is convexly disposed on a side surface of the first movable element facing the second fixing element.
Optionally, in some embodiments, the second direction fastening structure includes a second groove extending along the second direction and a second protrusion fastened in the second groove and freely moving along the extending direction of the second groove, the second groove is concavely disposed on a side surface of the second movable element facing the first movable element, and the second protrusion is convexly disposed on a side surface of the first movable element away from the second fixed element.
Optionally, in some embodiments, the first direction adjusting assembly includes a first direction adjusting knob, a first knob fixing member and a first knob adapter, the first knob adapter is fixedly disposed on a side surface of the second fixing member far away from the base assembly, the first knob fixing member is fixedly disposed on a side wall of the second moving member, the first direction adjusting knob includes a first knob portion, a first limiting member and a first driving shaft portion extending along the first direction, one end of the first driving shaft portion is fastened to the first knob portion, and the other end of the first driving shaft portion penetrates through the first knob fixing member, and is sequentially fixedly disposed with the first limiting member and is in threaded connection with the first knob adapter.
Optionally, in some embodiments, the second direction adjusting assembly includes a second direction adjusting knob, a second knob fixing member and a second knob adaptor, the second knob adaptor is fixedly disposed on a side surface of the second movable element away from the first movable element, the second knob fixing member is fixedly disposed on a side wall of the second fixing element, the second direction adjusting knob includes a second knob portion, a second limiting member and a first driving shaft portion extending along the second direction, one end of the second driving shaft portion is fastened on the second knob portion, and the other end of the second driving shaft portion penetrates through the second knob fixing member, and then is sequentially fixedly disposed with a second limiting member and is in threaded connection with the second knob adaptor.
Optionally, in some embodiments, a surface of the first direction adjustment knob and/or a surface of the second direction adjustment knob is provided with scale lines.
Optionally, in some embodiments, the other end of the adapter base is fastened to the second movable element through a third movable element, the third movable element is disposed to be close to a side surface of the second movable element, where the second movable element is located, and the other end of the adapter base is fastened to the third movable element through a first screw, the third movable element is fastened to the second movable element through a second screw, and a plurality of horizontal height adjusting members are further disposed between the third movable element and the second movable element.
Optionally, in some embodiments, the third movable element is triangular, and one horizontal height adjuster is disposed corresponding to each corner of the third movable element.
Optionally, in some embodiments, the horizontal height adjuster includes a screw portion and a knob portion for driving the screw portion to rotate, a scale mark is provided on a surface of the knob portion, one end of the screw portion is fixedly disposed on the knob portion, the other end of the screw portion penetrates through the third movable element and abuts against the surface of the second movable element, and the screw portion is connected with the third movable element in a threaded fit manner.
Optionally, in some embodiments, the adapter body is a hollow structure.
In a second aspect, an embodiment of the present application provides a semiconductor device, including semiconductor technology processing assembly, base subassembly, base hoisting device, cavity that has the enclosure and foretell base adjustment mechanism, the base subassembly and place in the semiconductor technology processing assembly respectively in the enclosure, the base hoisting device reaches the base adjustment mechanism is installed through the frame respectively in the below of cavity, the base subassembly includes base body and base connecting axle, the lower surface of base body passes through the base connecting axle runs through behind the diapire of cavity, with base adjustment mechanism the one end fastening connection of switching pedestal, so that the base hoisting device passes through base adjustment mechanism drive connection the base subassembly.
Optionally, in some embodiments, a corrugated pipe is further sleeved on a portion of the base connecting shaft located outside the chamber, a flange at one end of the corrugated pipe is fixedly arranged at one end of the adapter seat body, and a flange at the other end of the corrugated pipe is fixedly arranged on the bottom wall of the chamber or the rack.
In the present application, the base adjusting mechanism of the semiconductor device includes a mechanism base, a first movable element, a second movable element, a switching base, a first direction adjusting assembly, a second direction adjusting assembly, and a locking assembly, wherein a first direction clamping structure for limiting the first movable element to move only in a first direction relative to the second fixed element is disposed between the first movable element and the second fixed element of the mechanism base; a second direction clamping structure which limits the second movable element to move only in a second direction relative to the first movable element is arranged between the second movable element and the first movable element. Thus, when the base adjusting mechanism of the present application adjusts the base in the first direction through the first direction adjusting assembly, the base adjusting mechanism can only drive the second movable element and respectively drive the switching base body and the first movable element to move in the first direction relative to the second fixed element under the limit of the first direction clamping structure, so as to adjust the first direction of the base assembly fixedly arranged on the switching base body without any influence on the adjustment of the second direction of the base assembly. Similarly, when the base adjusting mechanism of the present application adjusts the second direction of the base assembly through the second direction adjusting assembly, it can only drive the second movable element and drive the switching base body to move in the second direction relative to the first movable element under the limit of the second direction clamping structure, so as to adjust the second direction of the base assembly fixedly arranged on the switching base body without any influence on the adjustment of the first direction of the base assembly. It is thus clear that the base adjustment mechanism of this application, it can be when carrying out centering operation to the base subassembly, separately carries out the adjustment of mutually perpendicular's first direction and second direction to the base subassembly for each other does not influence during the adjustment of two directions, and then its adjustment degree of difficulty of greatly reduced.
Drawings
The technical solutions and advantages of the present application will become apparent from the following detailed description of specific embodiments of the present application when taken in conjunction with the accompanying drawings.
Fig. 1 is a schematic partial structure diagram of a semiconductor device according to an embodiment of the present application.
Fig. 2 is a partial sectional structural view of the semiconductor apparatus shown in fig. 1.
Fig. 3 is a schematic structural view of a susceptor adjustment mechanism of the semiconductor apparatus shown in fig. 1.
Fig. 4 is another angular structure diagram of the base adjustment mechanism shown in fig. 3.
Fig. 5 is a schematic top view of the base adjustment mechanism of fig. 3.
Fig. 6 isbase:Sub>A cross-sectional structural view of the base adjustment mechanism of fig. 5 taken along linebase:Sub>A-base:Sub>A.
Fig. 7 is a cross-sectional structural view of the base adjustment mechanism of fig. 5 taken along section line B-B.
Fig. 8 is a schematic structural diagram of a mechanism housing of the base adjustment mechanism shown in fig. 3.
Fig. 9 is a schematic view of the first movable element of the base adjustment mechanism of fig. 3.
Fig. 10 is a schematic view of the second movable element of the base adjustment mechanism of fig. 3.
Fig. 11 is a schematic view of a first direction adjustment assembly of the base adjustment mechanism of fig. 3.
Fig. 12 is a schematic view of a second direction adjustment assembly of the base adjustment mechanism of fig. 3.
Fig. 13 is a schematic illustration of the locking mechanism of the locking assembly of the base adjustment mechanism of fig. 3.
Fig. 14 is a schematic view of the adjustment principle of the second direction adjustment assembly of the base adjustment mechanism shown in fig. 3.
Detailed Description
The technical solutions in the embodiments of the present application are clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application. The following embodiments and their technical features may be combined with each other without conflict.
In the process of carrying out corresponding semiconductor processes, sometimes the base is required to carry the wafer to lift the process position under the drive of the base lifting device, which requires that the wafer has good position precision and repeatability in each lifting process, so as to ensure the safety and accurate positioning of the wafer in the process of taking and placing the wafer by the manipulator. The susceptor lifting device has errors in the manufacturing and installation processes, and the positional accuracy of the wafer can meet the requirements only by adjusting, so that the susceptor lifting device is required to be capable of accurately positioning the susceptor during assembly. The existing base lifting device mainly adopts a cross-shaped connection adjusting mechanism to realize the centering operation of the base, namely, the centering positioning of the base is realized by adjusting the base in two mutually perpendicular directions, however, the cross-shaped connection adjusting mechanism is simultaneously performed when the base is adjusted in two mutually perpendicular directions, so that the adjustment effect of the base in any direction is affected, and the whole centering adjustment is greatly difficult.
Therefore, a new solution for the base adjusting mechanism is needed to be provided to solve the problem that the existing base adjusting mechanism affects the base in two directions perpendicular to each other and brings great difficulty to the whole centering adjustment.
As shown in fig. 1 to 7, in one embodiment, the present application provides a semiconductor apparatus including a semiconductor process module, a susceptor assembly 100, a susceptor lift device 200, a chamber (not shown) having an enclosed space in which the susceptor assembly 100 and the semiconductor process module are respectively built, and a susceptor adjusting mechanism 300, wherein the susceptor lift device 200 and the susceptor adjusting mechanism 300 are respectively installed below the chamber through a frame 400. The susceptor assembly 100 may specifically include a susceptor body 110 and a susceptor connecting shaft 120, and after the lower surface of the susceptor body 110 penetrates through the bottom wall of the chamber through the susceptor connecting shaft 120, the lower surface is fastened and connected to one end of the adapting seat 340 of the susceptor adjusting mechanism 300, so that the susceptor lifting device 200 drives the susceptor assembly 100 through the susceptor adjusting mechanism 300, that is, the susceptor adjusting mechanism 300 is used for being transitionally connected between the susceptor assembly 100 and the susceptor lifting device 200.
The base adjustment mechanism 300 may specifically include a mechanism base 310, a first movable element 320, a second movable element 330, a switching base 340, a first direction adjustment assembly 350, a second direction adjustment assembly 360, and a locking assembly 370. The mechanism base 310 may specifically include a first fixing element 311 and a second fixing element 312, which are perpendicular to each other, and the first fixing element 311 is drivingly connected to the base lifting device 200. The first movable element 320 may be disposed closely to a side surface of the second fixed element 312 away from the base assembly 100, and a first direction locking structure for limiting the first movable element 320 to move only in a first direction relative to the second fixed element 312 is disposed between the first movable element 320 and the second fixed element 312. The second movable element 330 is disposed close to a side surface of the first movable element 320 away from the second fixed element 312, and a second direction locking structure is disposed between the second movable element 330 and the first movable element 320 for limiting the second movable element 330 to move only in a second direction relative to the first movable element 320, where the second direction is perpendicular to the first direction. One end of the adapter 340 is fastened to the base assembly 100, and the other end of the adapter 340 passes through the second fixing element 312, the first moving element 320 and the second moving element 330 in sequence, and is fastened to the second moving element 330. The first direction adjustment assembly 350 may be disposed between the second movable element 330 and the second fixed element 312, so as to drive the second movable element 330 and respectively drive the adapter seat 340 and the first movable element 320 to move together in a first direction relative to the second fixed element 312. The second direction adjusting assembly 360 can be disposed between the second movable element 330 and the second fixed element 312, so as to drive the second movable element 330 and the adapter base 340 to move together in a second direction relative to the first movable element 320. The locking assembly 370 may be disposed between the second movable member 330 and the second fixed member 312, so as to lock the second movable member 330 and the first movable member 320 to the second fixed member 312 after the adjustment of the first direction adjustment assembly 350 and the second direction adjustment assembly 360 is completed.
It will be appreciated that the base lifting apparatus 200 described above is embodied as an apparatus that provides the lifting power for the base assembly 100, and that it may be embodied as a rack 400 that may be mounted below the chamber. Frame 400 specifically can include upper plate 410 and curb plate 420, at this moment, upper plate 410 can set firmly in the diapire outside of cavity, curb plate 420 sets firmly in one side below of upper plate 410, the bottom that base connecting axle 120 kept away from base body 110 runs through the diapire of cavity and the one end fastening connection of switching pedestal 340 with base adjustment mechanism 300 behind the upper plate 410 in proper order, and simultaneously, the part that base connecting axle 120 is located the outside of cavity still overlaps and is equipped with bellows 500, bellows 500's one end flange 510 sets firmly in one of switching pedestal 340, bellows 500's the other end flange 520 sets firmly on the upper plate 410 of frame 400, alright realize the dynamic seal of relevant position through bellows 500 like this, and then ensure the sealing performance of cavity. For those skilled in the art, the frame 400 may specifically include only the side plate 420, in which case, the side plate 420 may be directly fixed on the outer side of the bottom wall of the chamber, and the flange 520 at the other end of the bellows 500 is directly fixed on the bottom wall of the chamber, so that the bellows 500 may also be used to achieve dynamic sealing at a corresponding position, thereby ensuring the sealing performance of the chamber.
The base lifting device 200 may specifically include a guide rail 210 fixed on the side plate 420, a slider 220 slidably connected to the guide rail 210, a lead screw 230 for driving the slider 220 to move up and down along the guide rail 210, and a lead screw motor 250 for driving the lead screw 230 through a coupling 240. At this time, the first fixing element 311 of the mechanism housing 310 may be fastened to the sliding block 220 by some structure such as a screw, so as to realize the driving connection between the first fixing element 311 and the base lifting device 200. The end of the base connecting shaft 120 away from the base body 110 can be fastened to one end of the adapting base body 340 by some structure such as screws, so as to realize the fastening connection between one end of the adapting base body 340 and the base assembly 100, and simultaneously, the base lifting device 200 can be driven to connect to the base assembly 100 through the base adjusting mechanism 300. In addition, in order to realize that the other end of the adaptor base 340 sequentially passes through the second fixing element 312, the first movable element 320 and the second movable element 330, corresponding through holes are respectively formed in the middle of the second fixing element 312, the middle of the first movable element 320 and the middle of the second movable element 330, and the diameters of the through holes are slightly larger than the diameters of the corresponding portions of the adaptor base 340, so as to leave an adjustment margin of the adaptor base 340 along the first direction and the second direction. In addition, in order to facilitate the adjustment of the base adjustment mechanism 300 along the first direction and the second direction, the fixed element and the movable element in all the examples of the present application preferably adopt a plate structure, and meanwhile, in order to better implement the connection of the water path or the circuit in the base assembly 100, the adapting base body 340 may be a hollow structure, and meanwhile, a plurality of water passing holes or water passing holes are reserved at corresponding positions in the fixed element and the movable element.
Thus, when the base adjustment mechanism 300 of the present application adjusts the base assembly 100 in the first direction through the first direction adjustment assembly 350, it can only drive the second movable element 330 and respectively drive the adapter seat 340 and the first movable element 320 to move in the first direction relative to the second fixed element 312 under the limitation of the first direction fastening structure, so as to adjust the base assembly 100 fixed on the adapter seat 340 in the first direction without any influence on the adjustment of the base assembly 100 in the second direction. Similarly, when the base adjusting mechanism 300 of the present application adjusts the base in the second direction through the second direction adjusting assembly 360, it can only drive the second movable element 330 and drive the switching base 340 to move in the second direction relative to the first movable element 320 under the limitation of the second direction fastening structure, so as to adjust the second direction of the base assembly 100 fixed on the switching base 340 without any influence on the adjustment of the first direction of the base assembly 100. It can be seen that the base adjusting mechanism 300 of the present application can separately adjust the base assembly 100 in the first direction and the second direction perpendicular to each other when centering the base, so that the two directions are not affected by each other when adjusting, and the adjusting difficulty is greatly reduced.
In some examples, to better achieve the above-mentioned limitation that the first movable element 320 can only move in the first direction relative to the second fixed element 312, as shown in fig. 7, fig. 8 and fig. 9, the first direction engaging structure may specifically include a first groove 31 extending along the first direction and a first protrusion 32 engaged in the first groove 31 and moving freely along the extending direction of the first groove 31, the first groove 31 is recessed on a side surface of the second fixed element 312 away from the base, and the first protrusion 32 is protruded on a side surface of the first movable element 320 facing the second fixed element 312. Specifically, the length of the first groove 31 should be greater than the length of the first protrusion 32 so that the first protrusion 32 can freely move in the extending direction of the first groove 31, and at the same time, the width of the first groove 31 should be equal to the width of the first protrusion 32 to restrict the first protrusion 32 from moving in other directions than the extending direction of the first groove 31.
In some examples, to better achieve the above-mentioned limitation that the second movable element 330 can only move in the second direction relative to the first movable element 320, as shown in fig. 6, 9 and 10, the second direction engaging structure includes a second groove 33 extending along the second direction and a second protrusion 34 engaged in the second groove 33 and freely moving along the extending direction of the second groove 33, the second groove 33 is concavely disposed on a side surface of the second movable element 330 facing the first movable element 320, and the second protrusion 34 is convexly disposed on a side surface of the first movable element 320 away from the second fixed element 312. Specifically, the length of the second groove 33 should be greater than the length of the second protrusion 34 so that the second protrusion 34 can freely move in the extending direction of the second groove 33, and at the same time, the width of the second groove 33 should be equal to the width of the second protrusion 34 to restrict the second protrusion 34 from moving in other directions than the extending direction of the second groove 33.
In some examples, to better achieve the above-mentioned driving of the second movable element 330 and the driving of the adaptor base 340 and the first movable element 320 to move together in the first direction relative to the second fixed element 312, as shown in fig. 3, 4, 6 and 11, the first direction adjusting assembly 350 may specifically include a first direction adjusting knob 351, a first knob fixing member 352 and a first knob adaptor 353, the first knob adaptor 353 is fixedly disposed on a side surface of the second fixed element 312 away from the base assembly 100, the first knob fixing member 352 is fixedly disposed on a side wall of the second movable element 330, the first direction adjusting knob 351 includes a first knob portion 3511, a first stopper 3512 and a first driving shaft portion 3513 extending along the first direction, one end of the first driving shaft portion 3513 is fixedly disposed on the first knob portion 3511, and the other end of the first driving shaft 3513 is fixedly disposed on the first stopper 3512 and is in threaded connection with the first adaptor 35353. Specifically, the fastening connection between the first knob adaptor 353 and the second fixing element 312, and the fastening connection between the first knob fixing 352 and the second moving element 330 can be achieved by some structures such as screws. Meanwhile, since the first knob adapter 353 is fixed to the second fixed element 312 and then is in threaded connection with the first driving shaft 3513 located in the second movable element 330, one end of the first knob adapter 353, which is far away from the second fixed element 312, needs to penetrate through the first movable element 320 and extend into the second movable element 330, and thus, corresponding through holes need to be formed in the first movable element 320 and the second movable element 330, and adjustment allowance for allowing the first movable element 320 and the second movable element 330 to move along the first direction needs to be reserved in the through holes. Thus, when the first direction adjustment assembly 350 performs the first direction adjustment, the first knob portion 3511 of the first direction adjustment knob 351 is rotated clockwise or counterclockwise to drive the first driving shaft portion 3513 to rotate clockwise or counterclockwise, so that the first driving shaft portion 3513 and the first knob adapter 353 connected by the screw thread are relatively displaced along the first direction, meanwhile, because the first knob adapter 353 is fixed on the second fixing element 312, the first knob adapter is kept in a stationary state, so that the first driving shaft portion 3513 moves away from or close to the first knob adapter 353 along the first direction, and further, under the limit coordination of the first limit member 3512 and the first knob portion 3511 on the first knob fixing element 352, the second movable element 330 is driven and the adapter 340 and the first movable element 320 are respectively driven to move together along the first direction relative to the second fixing element 312, thereby achieving the first direction adjustment of the base body 100 fixed on the adapter 340.
In some examples, to better achieve the above-mentioned driving of the second movable element 330 and the driving of the adaptor base 340 to move together in the second direction relative to the first movable element 320, as shown in fig. 3, fig. 4, fig. 7 and fig. 12, the second direction adjustment assembly 360 may specifically include a second direction adjustment knob 361, a second knob fixing element 362 and a second knob adaptor 363, the second knob adaptor 363 is fixedly disposed on a side surface of the second movable element 330 away from the first movable element 320, the second knob fixing element 363 is fixedly disposed on a side wall of the second fixed element 312, the second direction adjustment knob 361 includes a second knob portion 3611, a second position limiter 3612 and a second driving shaft portion 3613 extending along the second direction, one end of the second driving shaft portion 3613 is fastened on the second knob portion 3611, and the other end of the second driving shaft portion 3613 penetrates through the second knob 362, and is sequentially fixedly disposed with the second position limiter 3612 and is in threaded connection with the second knob adaptor 363. Specifically, the fastening connection between the second knob adapter 363 and the second movable element 330, and the fastening connection between the second knob holder 362 and the second fixed element 312 can be achieved by some structures such as screws. The first knob adapter 363 may have a T-shaped structure, so that its horizontal portion is fixed on a side surface of the second movable element 330 away from the first movable element 320, and its vertical portion is screwed to the other end of the second driving shaft 3613. Meanwhile, since the second driving shaft 3613 is located in the second fixing element 312, the vertical portion of the first knob adapter 353 needs to sequentially penetrate through the second movable element 330 and the first movable element 320 and extend into the second fixing element 312, and therefore, corresponding through holes need to be formed in the second movable element 330, the first movable element 320 and the second fixing element 312, and adjustment allowance for allowing the second movable element 330 to move along the second direction needs to be reserved in the through holes. Thus, when the second direction adjustment assembly 360 performs the second direction adjustment, the second knob portion 3611 of the second direction adjustment knob 361 can be rotated clockwise or counterclockwise to drive the second driving shaft portion 3613 to rotate clockwise or counterclockwise, so that the second driving shaft portion 3613 and the second knob adapter 363 in threaded connection are relatively displaced along the second direction, meanwhile, since the second knob fixing member 362 is fixed on the second fixing element 312, the second limiting member 3612 and the second knob portion 3611 jointly perform a limiting fit on the first knob fixing member 352, so that the second driving shaft portion 3613 is only rotated and the position of the second driving shaft portion is kept unchanged, and the second knob adapter 363 moves away from or close to the second driving shaft portion 3613 along the second direction, thereby driving the second movable element 330 and the driving adapter 340 to move together along the second direction relative to the second fixing element 312, and further achieving the second direction adjustment of the base 100 fixed on the adapter 340.
In some examples, to better enable quantitative adjustment of the centering of the base assembly 100. As shown in fig. 3 and 4, in the first direction adjusting assembly 350 and the second direction adjusting assembly 360 for centering the base assembly 100, the other end of the first driving shaft portion 3513 is connected with the first knob adapter 353 through a screw thread, and the other end of the second driving shaft portion 3613 is connected with the second knob adapter 363 through a fine thread or a special screw thread, and the first direction adjusting knob 351 and the second direction adjusting knob 361 are provided with corresponding scales, specifically, the surface of the first direction adjusting knob 351 (specifically, the first knob portion 3511) and/or the surface of the second direction adjusting knob 361 (specifically, the second knob portion 3611) are provided with scale marks, so that a worker can adjust the centering of the first direction and the second direction according to the scales marked on the scale marks. As shown in fig. 14, the centering adjustment in the second direction is taken as an example to further explain: the initial position mark 30 is provided on the second fixing member 312, the scale line 3614 is provided on the surface of the second direction adjustment knob 361, centering adjustment in the second direction is performed by clockwise or counterclockwise rotation of the second direction adjustment knob 361 by a certain angle α with reference to the initial position mark 30, and the formula X is converted 0 K = K α, the angle of rotation α can be converted into the adjustment amount X of the current centering adjustment in the second direction 0 And K is a scaling factor, and different scaling factors of K can be realized by different thread designs in the first direction adjusting assembly 350, so that centering adjustment in the second direction with different adjusting accuracy can be realized.
In some examples, in order to better lock the second movable element 330 and the first movable element 320 to the second fixed element 312 after the adjustment of the first direction adjustment assembly 350 and the second direction adjustment assembly 360 is completed, as shown in fig. 4 and 13, the number of the locking assemblies 370 may be multiple, specifically, 4 locking assemblies may be distributed in four corners as shown in fig. 4, each locking assembly 370 may specifically include a screw 371 and a spacer 372, and a screw portion of the screw 371 needs to pass through the spacer 372, the second movable element 330 and the first movable element 320 in sequence and then be tightly connected to a threaded hole of the second fixed element 312. Thus, the second movable element 330 and the first movable element 320 are provided with corresponding through holes, and the diameter of the through holes is slightly larger than the screw portion of the screw 371, so as to leave an adjustment margin for allowing the first movable element 320 and the second movable element 330 to move in the first direction and for allowing the second movable element to move in the second direction.
In some examples, the susceptor adjustment mechanism 300 of the present application also provides a leveling operation for the susceptor assembly 100, since the susceptor assembly 100 is operated in a state where its bearing surface is parallel to the horizontal plane in addition to maintaining a precise positioning. At this time, as shown in fig. 4 and fig. 7, the other end of the adapting base 340 can be fixedly connected to the second movable element 330 through a third movable element 380, the third movable element 380 is disposed closely to a side surface of the second movable element 330 away from the first movable element 320, the other end of the adapting base 340 is fixedly connected to the third movable element 380 through a first screw 381, the third movable element 380 is fixedly connected to the second movable element 330 through a second screw 382, and a plurality of horizontal height adjusting members 390 are further disposed between the third movable element 380 and the second movable element 330. Thus, the horizontal degree of the base assembly 100 on the adapter 340 can be adjusted by adjusting the gaps between the orientations of the third movable element 380 and the second movable element 330 through the horizontal height adjusters 390.
In some examples, to better achieve the leveling operation, as shown in fig. 4 and 7, the third movable element 380 is triangular, and a horizontal height adjuster 390 is disposed corresponding to each corner of the third movable element 380, so as to better adjust the levelness of the base assembly 100 on the adapter 340 by using the principle of triangular positioning. Further, to achieve the above-described gap adjustment between the respective orientations of the third movable element 380 and the second movable element 330. The horizontal height adjuster 390 comprises a screw portion 391 and a knob portion 392 for driving the screw portion 391 to rotate, the surface of the knob portion 392 is provided with scale marks, one end of the screw portion 391 is fixed on the knob portion 392, the other end of the screw portion 391 penetrates through the third movable element 380 and abuts against the surface of the second movable element 330, and the screw portion 391 and the third movable element 380 are connected in a screw-thread fit manner. Meanwhile, in order to provide a certain buffer protection for the surface of the third movable element 380, the other end of the screw portion 391 may pass through the gasket 393 and then pass through the third movable element 380, that is, the gasket 393 is buffered between the knob portion 392 and the third movable element 380. During adjustment, the second screw 382 tightly connected between the third movable element 380 and the second movable element 330 is loosened, and then the knob portion 392 of each horizontal height adjusting member 390 is precisely adjusted according to the scale of the scale mark, so as to precisely change the length of the corresponding screw portion 391 between the third movable element 380 and the second movable element 330, thereby achieving the gap adjustment between the third movable element 380 and the second movable element 330 in the corresponding direction, and further achieving the leveling operation.
In an embodiment, an embodiment of the present application further provides a base adjustment mechanism of a semiconductor device, and the structure and function of the base adjustment mechanism may specifically refer to the base adjustment mechanism of the foregoing embodiment, which is not described herein again.
Although the application has been shown and described with respect to one or more implementations, equivalent alterations and modifications will occur to others skilled in the art based upon a reading and understanding of this specification and the annexed drawings. This application is intended to embrace all such modifications and variations and is limited only by the scope of the appended claims. In particular regard to the various functions performed by the above described components, the terms used to describe such components are intended to correspond, unless otherwise indicated, to any component which performs the specified function of the described component (e.g., that is functionally equivalent), even though not structurally equivalent to the disclosed structure which performs the function in the herein illustrated exemplary implementations of the specification.
That is, the above description is only an embodiment of the present application, and not intended to limit the scope of the present application, and all equivalent structures or equivalent flow transformations made by using the contents of the specification and the drawings, such as mutual combination of technical features between various embodiments, or direct or indirect application to other related technical fields, are included in the scope of the present application.
In addition, in the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be considered as limiting the present application. In addition, structural elements having the same or similar characteristics may be identified by the same or different reference numerals. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In this application, the word "exemplary" is used to mean "serving as an example, instance, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments. The previous description is provided to enable any person skilled in the art to make or use the present application. In the foregoing description, various details have been set forth for the purpose of explanation. It will be apparent to one of ordinary skill in the art that the present application may be practiced without these specific details. In other instances, well-known structures and processes are not shown in detail to avoid obscuring the description of the present application with unnecessary detail. Thus, the present application is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.
Claims (12)
1. A susceptor adjustment mechanism for a semiconductor device for transition connection between a susceptor assembly and a susceptor lift apparatus, the susceptor adjustment mechanism comprising:
the mechanism base comprises a first fixing element and a second fixing element which are vertically arranged, and the first fixing element is in driving connection with the base lifting device;
the first movable element is arranged close to one side surface of the second fixed element away from the base component, and a first direction clamping structure which limits the first movable element to move only in a first direction relative to the second fixed element is arranged between the first movable element and the second fixed element;
the second movable element is arranged close to one side surface of the first movable element away from the second fixed element, a second direction clamping structure for limiting the second movable element to move only in a second direction relative to the first movable element is arranged between the second movable element and the first movable element, and the second direction is vertical to the first direction;
one end of the switching seat body is fixedly connected with the base component, and the other end of the switching seat body sequentially penetrates through the second fixed element, the first movable element and the second movable element and is fixedly connected with the second movable element;
the first direction adjusting assembly is arranged between the second movable element and the second fixed element so as to drive the second movable element and respectively drive the switching seat body and the first movable element to move in a first direction relative to the second fixed element together;
the second direction adjusting assembly is arranged between the second movable element and the second fixed element so as to drive the second movable element and drive the switching seat body to move in a second direction relative to the first movable element together;
and the locking assembly is arranged between the second movable element and the second fixed element so as to lock the second movable element and the first movable element on the second fixed element after the first direction adjusting assembly and the second direction adjusting assembly are adjusted.
2. The base adjustment mechanism of claim 1, wherein the first direction engaging structure comprises a first groove extending along the first direction and a first protrusion engaging in the first groove and freely moving along the extending direction of the first groove, the first groove is concavely disposed on a side surface of the second fixed element away from the base assembly, and the first protrusion is convexly disposed on a side surface of the first movable element facing the second fixed element.
3. The base adjustment mechanism of claim 1, wherein the second direction engaging structure comprises a second groove extending along the second direction and a second protrusion engaging in the second groove and freely moving along the extending direction of the second groove, the second groove is concavely disposed on a side surface of the second movable element facing the first movable element, and the second protrusion is convexly disposed on a side surface of the first movable element away from the second fixed element.
4. The base adjustment mechanism according to claim 1, wherein the first direction adjustment assembly includes a first direction adjustment knob, a first knob fixing member and a first knob adapter, the first knob adapter is fixedly disposed on a side surface of the second fixing member away from the base assembly, the first knob fixing member is fixedly disposed on a side wall of the second movable member, the first direction adjustment knob includes a first knob portion, a first limiting member and a first driving shaft portion extending in the first direction, one end of the first driving shaft portion is fastened to the first knob portion, and the other end of the first driving shaft portion penetrates through the first knob fixing member, and then is fixedly disposed with the first limiting member and is in threaded connection with the first knob adapter in sequence.
5. The base adjustment mechanism according to claim 4, wherein the second direction adjustment assembly includes a second direction adjustment knob, a second knob fixing member, and a second knob adapter, the second knob adapter is fixed to a side surface of the second movable member away from the first movable member, the second knob fixing member is fixed to a side wall of the second fixed member, the second direction adjustment knob includes a second knob portion, a second limiting member, and a first driving shaft portion extending in the second direction, one end of the second driving shaft portion is fastened to the second knob portion, and the other end of the second driving shaft portion penetrates through the second knob fixing member, and then is sequentially fixed with the second limiting member and is in threaded connection with the second knob adapter.
6. The base adjustment mechanism of claim 5, wherein a surface of the first direction adjustment knob and/or a surface of the second direction adjustment knob is provided with graduation marks.
7. The base adjustment mechanism according to any one of claims 1 to 6, wherein the other end of the adapter body is fastened to the second movable element through a third movable element, the third movable element is disposed close to a side surface of the second movable element away from the first movable element, the other end of the adapter body is fastened to the third movable element through a first screw, the third movable element is fastened to the second movable element through a second screw, and a plurality of horizontal height adjustment members are further disposed between the third movable element and the second movable element.
8. The base adjustment mechanism as recited in claim 7, wherein the third movable element is triangular shaped, one of the level adjusters being provided for each corner of the third movable element.
9. The base adjustment mechanism according to claim 7, wherein the level adjustment member comprises a screw portion and a knob portion for driving the screw portion to rotate, a scale mark is provided on a surface of the knob portion, one end of the screw portion is fixed on the knob portion, the other end of the screw portion penetrates through the third movable element and abuts against a surface of the second movable element, and the screw portion is in threaded fit connection with the third movable element.
10. The base adjustment mechanism of any of claims 1-9, wherein the adapter body is a hollow structure.
11. A semiconductor device, comprising a semiconductor processing assembly, a pedestal lifting device, a chamber having a closed space, and the pedestal adjusting mechanism according to any one of claims 1 to 10, wherein the pedestal assembly and the semiconductor processing assembly are respectively disposed in the closed space, the pedestal lifting device and the pedestal adjusting mechanism are respectively disposed below the chamber through a frame, the pedestal assembly comprises a pedestal body and a pedestal connecting shaft, and a lower surface of the pedestal body penetrates through a bottom wall of the chamber through the pedestal connecting shaft and is then tightly connected with one end of the adapter body of the pedestal adjusting mechanism, so that the pedestal lifting device is drivingly connected with the pedestal assembly through the pedestal adjusting mechanism.
12. The semiconductor device according to claim 11, wherein a portion of the base connecting shaft located outside the chamber is further sleeved with a corrugated tube, one end of the corrugated tube is fixed to one end of the adapter body by a flange, and the other end of the corrugated tube is fixed to a bottom wall of the chamber or the rack by a flange.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211471549.XA CN115732381A (en) | 2022-11-22 | 2022-11-22 | Semiconductor device and base adjusting mechanism thereof |
| PCT/CN2023/132196 WO2024109634A1 (en) | 2022-11-22 | 2023-11-17 | Semiconductor device and base adjusting mechanism therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211471549.XA CN115732381A (en) | 2022-11-22 | 2022-11-22 | Semiconductor device and base adjusting mechanism thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115732381A true CN115732381A (en) | 2023-03-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211471549.XA Pending CN115732381A (en) | 2022-11-22 | 2022-11-22 | Semiconductor device and base adjusting mechanism thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN115732381A (en) |
| WO (1) | WO2024109634A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024109634A1 (en) * | 2022-11-22 | 2024-05-30 | 北京北方华创微电子装备有限公司 | Semiconductor device and base adjusting mechanism therefor |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111235550B (en) * | 2018-11-29 | 2022-06-17 | 北京北方华创微电子装备有限公司 | Base adjusting device and chamber |
| CN212737217U (en) * | 2020-07-09 | 2021-03-19 | 东信和平科技股份有限公司 | Level adjusting device |
| CN113252717B (en) * | 2021-06-15 | 2021-09-10 | 中国科学院地质与地球物理研究所 | Intelligent preparation system and method for frozen electron microscope sample and electronic equipment |
| CN217556072U (en) * | 2022-06-21 | 2022-10-11 | 大族激光科技产业集团股份有限公司 | Adjusting mechanism, laser processing equipment and clamping jaw device thereof |
| CN115732381A (en) * | 2022-11-22 | 2023-03-03 | 北京北方华创微电子装备有限公司 | Semiconductor device and base adjusting mechanism thereof |
-
2022
- 2022-11-22 CN CN202211471549.XA patent/CN115732381A/en active Pending
-
2023
- 2023-11-17 WO PCT/CN2023/132196 patent/WO2024109634A1/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024109634A1 (en) * | 2022-11-22 | 2024-05-30 | 北京北方华创微电子装备有限公司 | Semiconductor device and base adjusting mechanism therefor |
Also Published As
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| WO2024109634A1 (en) | 2024-05-30 |
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