CN115692314A

CN115692314A - Sheet stripping device and method, display device and carrier substrate stripping equipment

Info

Publication number: CN115692314A
Application number: CN202111471080.5A
Authority: CN
Inventors: 陈新亮; 苑立阁
Original assignee: Guangdong Juhua Printing Display Technology Co Ltd
Current assignee: Guangdong Juhua Printing Display Technology Co Ltd
Priority date: 2021-12-03
Filing date: 2021-12-03
Publication date: 2023-02-03

Abstract

The invention relates to a sheet stripping device and method, a display device and carrier substrate stripping equipment. The sheet stripping device is provided with a first picking mechanism, a second picking mechanism and a third picking mechanism on the mounting seat respectively, and the third picking mechanism is arranged between the first picking mechanism and the second picking mechanism. During operation, first adsorption component and second adsorption component suck up the both ends region of carrier substrate respectively, and the rest of carrier substrate is sucked up again to the third adsorption component for the pulling force that receives when flexible device and carrier substrate separate is lower, reduces the impaired risk of display device and promotes the comprehensive yield of this processing procedure section, need not to use the cutter to insert the interface of display device and carrier substrate earlier and cut like traditional stripping off device simultaneously, adsorbs the peeling off again, reduces equipment complexity.

Description

Sheet stripping device and method, display device and carrier substrate stripping equipment

Technical Field

The invention relates to the technical field of display device production, in particular to a sheet stripping device and method, and a display device and carrier substrate stripping device.

Background

Flexible display devices are becoming the research focus of display technology due to their characteristics of being foldable, flexible, light and thin, convenient to carry, wide in viewing angle, etc. As shown in fig. 1, during the production of the flexible display device 100, a carrier substrate 200 is required to be used as a carrier, and various functional layers of the flexible display device 100, including a flexible substrate 110, a light-emitting functional layer 120, an encapsulation layer 130, a water blocking film 140, a polarizer 150, etc., are manufactured thereon, and a Chip On Film (COF) 160 and a Printed Circuit Board (PCB) 170 are bonded thereto. The flexible substrate 110 (e.g., a polyimide substrate, etc.) is cured and molded on the carrier substrate 200, and is bonded to the carrier substrate 200 by means of Si — O bonds and van der waals forces, and the interface condition is usually very complicated at a microscopic level. After the structure of the flexible display device 100 is manufactured, it needs to be separated from the carrier substrate 200.

When the separation work is carried out, the carrier substrate is firstly cleaned, then a laser lift-off process (LLO process) is carried out, and focused laser beams are used for irradiating the interface of the flexible display device and the glass carrier, so that Si-O bonds and Van der Waals force of the interface are broken and eliminated, and the substrate and the carrier substrate are initially separated. The LLO process is then transferred to a mechanical lift-off device (Delami device) to completely separate the flexible display device from the carrier substrate. And then carrying out the work of recovering the carrier substrate, attaching a support film on the flexible display device and the like.

As shown in fig. 2, the traditional Delami apparatus needs to first use a special cutter 180 to extend into the interface around the substrate for cutting, and at this time, a certain adhesion force is still maintained between the flexible display device and the carrier substrate, and then the Delami apparatus adsorbs and pulls up the carrier substrate through a suction cup 190, so that the carrier substrate is completely separated from the flexible display device. However, the cutting process of the cutter 180 may cause damage to the device, and there may be a risk of excessive local pulling during the pick-up process of the suction cup 190, resulting in damage to the device.

Disclosure of Invention

Based on this, it is necessary to provide a sheet peeling apparatus and method, a display device and a carrier substrate peeling device, so as to reduce the risk of damaging the device.

One of the objects of the present invention is to provide a sheet peeling apparatus, the scheme is as follows:

a sheet peeling apparatus comprising:

a mounting seat;

the first picking mechanism comprises a first telescopic component and a first adsorption component, the first telescopic component is arranged on the mounting seat, and the first adsorption component is arranged on the first telescopic component;

the second picking mechanism comprises a second telescopic part and a second adsorption part, the second telescopic part is arranged on the mounting seat, and the second adsorption part is arranged on the second telescopic part;

the third picking mechanism comprises a third telescopic part and a third adsorption part, the third telescopic part is arranged on the mounting seat, the third adsorption part is arranged on the third telescopic part, and the third picking mechanism is arranged between the first picking mechanism and the second picking mechanism; and

a control mechanism connected with the first picking mechanism, the second picking mechanism and the third picking mechanism; the control mechanism can control the first telescopic member and the second telescopic member to contract for a first set distance to enable the first adsorption member and the second adsorption member to suck opposite two ends of the sheet respectively, then control the third telescopic member to contract for the first set distance to enable the third adsorption member to suck the rest part of the sheet, and then control the first telescopic member, the second telescopic member and the third telescopic member to contract for a second set distance.

The sheet stripping device is provided with a first picking mechanism, a second picking mechanism and a third picking mechanism on the mounting seat respectively, and the third picking mechanism is arranged between the first picking mechanism and the second picking mechanism. When the glass carrier plate is stripped, the control mechanism controls the first telescopic component, the second telescopic component and the third telescopic component to extend out, so that the first adsorption component, the second adsorption component and the third adsorption component are close to and adsorb the glass carrier plate. The first adsorption part and the second adsorption part are used for respectively adsorbing two end areas of the glass carrier plate, and the third adsorption part is used for adsorbing a middle area of the glass carrier plate. And then controlling the first telescopic component and the second telescopic component to contract for a first set distance so that the first adsorption component and the second adsorption component respectively adsorb the two end areas of the glass carrier plate, and separating the flexible display device from the two end areas of the glass carrier plate firstly to enable air to enter the interface, thereby being beneficial to subsequent separation. And then the third telescopic part is controlled to contract for a first set distance so that the third adsorption part can suck the rest part of the glass carrier plate, and the glass carrier plate is completely separated from the flexible display device. And finally, controlling the first telescopic component, the second telescopic component and the third telescopic component to contract for a second set distance, namely finishing the stripping work.

According to the sheet stripping device, through the plurality of adsorption mechanisms controlled respectively, asynchronous echelon separation is carried out on the two side areas and the central area of the glass carrier plate according to the time sequence, so that the pulling force borne by the flexible device is lower when the flexible device is separated from the glass carrier plate, the damage risk of the flexible display device is reduced, the comprehensive yield of the process section is improved, meanwhile, the traditional stripping device does not need to cut by inserting a cutter into the interface of the display device and the carrier substrate firstly, then adsorption stripping is carried out, and the complexity of equipment is reduced.

In one embodiment, the first set distance is 3mm to 5mm.

In one embodiment, the first adsorption part comprises a first ventilation seat and a plurality of first suction nozzles arranged on the first ventilation seat, and the first suction nozzles are distributed in an array;

the second adsorption part comprises a second ventilation seat and a plurality of second suction nozzles arranged on the second ventilation seat, and the second suction nozzles are distributed in an array;

the third adsorption component comprises a third air vent seat and a plurality of third suction nozzles arranged on the third air vent seat, and the third suction nozzles are distributed in an array.

In one embodiment, the aperture of the first suction nozzle, the aperture of the second suction nozzle and the aperture of the third suction nozzle are respectively and independently 40-80 μm.

Another object of the present invention is to provide a display device and carrier substrate peeling apparatus, which comprises the following solutions:

a display device and carrier substrate peeling apparatus comprising:

the laser stripping device is provided with a laser emitter, and the laser emitter is used for carrying out laser treatment on an interface between a display device and a carrier substrate in a device to be stripped to obtain a pre-stripped product; and

the sheet peeling apparatus according to any of the above embodiments, configured to completely peel the display device from the carrier substrate in the pre-peeled product.

In one embodiment, the apparatus for peeling the display device from the carrier substrate further includes:

the first conveying device comprises a first conveying guide rail and a first placing platform, the first placing platform is arranged on the first conveying guide rail and can move along the first conveying guide rail, and a first vacuum adsorption hole is formed in the first placing platform and used for adsorbing and fixing the to-be-stripped device;

when the first placing platform is positioned at a first station, the laser stripping device can carry out laser treatment on the device to be stripped to obtain the pre-stripped product; when the first placing platform is located at the second station, the sheet stripping device can completely strip the pre-stripped product.

In one embodiment, the display device and carrier substrate peeling apparatus further includes:

a second conveyance device including a second conveyance rail, the mount being provided on the second conveyance rail and being movable along the second conveyance rail;

after the sheet stripping device finishes stripping work on the second station, the sheet stripping device can convey the carrier substrate to a second placing platform on a third station along the second conveying guide rail, and then convey the display device to a third placing platform on a fourth station along the second conveying guide rail, and a second vacuum adsorption hole is formed in the third placing platform.

the turnover device is connected to the third placing platform and used for turning over the third placing platform so that the display device faces downwards; and

and the film sticking device is used for sticking a support film on the display device facing downwards.

the film material feeding box is used for placing the support film;

the film material alignment device is used for aligning the support film; and

and the third conveying device is used for conveying the support film from the film material loading box to the film material aligning device for aligning, and then conveying the support film subjected to aligning to the film sticking device.

the cleaning device is used for cleaning the device to be stripped to obtain the device to be stripped; and

and the fourth conveying device is used for conveying the device to be stripped to pass through the cleaning device and conveying the device to be stripped to the first placing platform.

In one embodiment, the cleaning device comprises: it is right in proper order treat that the device that peels off carries out the grinding wiper mechanism, brush wiper mechanism, two fluids spray mechanism and dry mechanism of handling, grind the wiper mechanism brush wiper mechanism two fluids spray the mechanism with dry mechanism is used for being right in proper order the device that peels off is handled.

In one embodiment, the fourth conveyance device includes:

and a transfer robot having a first adsorption mechanism for adsorbing the carrier substrate and a second adsorption mechanism for adsorbing the COF and the PCB.

Still another object of the present invention is to provide a sheet peeling method, the scheme is as follows:

a sheet peeling method, characterized by using the sheet peeling apparatus according to any one of the above embodiments or the display device and carrier substrate peeling apparatus according to any one of the above embodiments, the sheet peeling method comprising the steps of:

controlling the first telescopic member, the second telescopic member and the third telescopic member to extend so as to enable the first adsorption member, the second adsorption member and the third adsorption member to approach and adsorb the sheet;

controlling the first and second stretching members to contract a first set distance so that the first and second suction members respectively suck opposite ends of the sheet;

controlling the third telescopic member to contract the first set distance so that the third adsorption member sucks up the rest part of the sheet;

and controlling the first telescopic component, the second telescopic component and the third telescopic component to contract for a second set distance.

Drawings

Fig. 1 is a schematic view of a flexible display device fabricated on a carrier substrate;

FIG. 2 is a schematic diagram of a mechanical peeling apparatus peeling a carrier substrate from a display device;

FIG. 3 is a schematic structural view of a sheet peeling apparatus according to an embodiment;

FIG. 4 is a schematic view showing a peeling operation of the sheet peeling apparatus;

FIG. 5 is another schematic view of the sheet peeling apparatus shown in FIG. 3;

FIG. 6 is a schematic structural diagram of a display device and carrier substrate peeling apparatus according to an embodiment;

fig. 7 is a schematic diagram showing the distribution of COFs and PCBs on the device.

Description of the reference numerals:

100. a flexible display device; 110. a flexible substrate; 120. a light-emitting functional layer; 130. a packaging layer; 140. a water-blocking film; 150. a polarizer; 160. a chip on film; 170. a printed circuit board; 180. a cutter; 190. a suction cup; 101. a source COF; 102. a gate COF; 103. a PCB; 300. a sheet peeling device; 20. a sheet material; 310. a mounting seat; 320. a first pick-up mechanism; 322. a first telescopic member; 324. a first adsorption member; 3241. a first vent seat; 3242. a first suction nozzle; 330. a second pick-up mechanism; 332. a second telescoping member; 334. a second adsorption member; 3341. a second vent seat; 3342. a second suction nozzle; 340. a third pick-up mechanism; 342. a third telescopic member; 344. a third adsorption member; 3441. a third vent seat; 3442. a third suction nozzle; 350. a moving guide rail; 352. a first side rail; 354. a second side rail; 3521. moving the chute; 10. a display device and carrier substrate peeling apparatus; 400. a laser lift-off device; 410. a laser transmitter; 420. a laser shaper; 500. a first conveyance device; 510. a first conveyance rail; 520. a first placement platform; 530. a first station; 540. a second station; 600. a second conveyance device; 610. a fourth station; 700. a first dust removing device; 800. a turning device; 900. a film pasting device; 1000. feeding a material box on the film material; 1100. a membrane material alignment device; 1200. a third conveyance device; 1300. a cleaning device; 1310. a grinding and cleaning mechanism; 1320. a brush cleaning mechanism; 1330. a second fluid spraying mechanism; 1340. a drying mechanism; 1400. a fourth conveyance device; 1410. a transfer robot; 1500. a device alignment device; 1600. a second dust removing device; 1700. and a third dust removal device.

Detailed Description

To facilitate an understanding of the invention, the invention will now be described more fully hereinafter with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.

In the description of the present invention, it is to be understood that the terms "first", "second" and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first," "second," or "third" may explicitly or implicitly include at least one of the feature.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The invention provides a sheet peeling apparatus 300. The sheet peeling apparatus 300 can be applied to peeling work of a display device from a carrier substrate. The present invention will be further described with reference to the application of the sheet peeling apparatus 300 to peeling work of a display device and a carrier substrate, for example, the carrier substrate is glass, and the display device is a flexible display device, however, the sheet peeling apparatus 300 is not limited to this specific application.

Referring to fig. 3 to 5, a sheet peeling apparatus 300 according to an embodiment of the present invention includes a mounting base 310 (the mounting base 310 is omitted in fig. 3), a first picking mechanism 320, a second picking mechanism 330, a third picking mechanism 340, and a control mechanism (not shown).

The first picking mechanism 320 includes a first telescopic member 322 and a first suction member 324, the first telescopic member 322 is disposed on the mounting base 310, and the first suction member 324 is disposed on the first telescopic member 322.

The second picking mechanism 330 includes a second telescopic member 332 and a second suction member 334, the second telescopic member 332 is disposed on the mount 310, and the second suction member 334 is disposed on the second telescopic member 332.

The third picking mechanism 340 includes a third telescopic member 342 and a third suction member 344, the third telescopic member 342 being provided on the mount 310, and the third suction member 344 being provided on the third telescopic member 342. And, the third picking mechanism 340 is disposed between the first picking mechanism 320 and the second picking mechanism 330.

The control mechanism is connected to the first picking mechanism 320, the second picking mechanism 330, and the third picking mechanism 340. The control mechanism can control the first telescopic member 322 and the second telescopic member 332 to contract a first set distance to enable the first adsorption member 324 and the second adsorption member 334 to respectively suck up the two opposite ends of the sheet material 20, control the third telescopic member 342 to contract the first set distance to enable the third adsorption member 344 to suck up the rest part of the sheet material 20, and control the first telescopic member 322, the second telescopic member 332 and the third telescopic member 342 to contract the second set distance.

As shown in fig. 4, when the peeling operation is performed, the control mechanism controls the first stretching member 322, the second stretching member 332, and the third stretching member 342 to extend so that the first suction member 324, the second suction member 334, and the third suction member 344 are brought close to and suck the carrier substrate. The first and

second adsorption parts

324 and 334 are for adsorbing both end regions of the carrier substrate, respectively, and the third adsorption part 344 is for adsorbing a middle region of the carrier substrate. And then the first telescopic member 322 and the second telescopic member 332 are controlled to contract for a first set distance, so that the first adsorption member 324 and the second adsorption member 334 respectively adsorb the two end regions of the carrier substrate, the two end regions of the display device and the carrier substrate are separated firstly, and air enters the interface, which is beneficial to subsequent separation. And then the third telescopic member 342 is controlled to contract by the first set distance so that the third absorption member 344 absorbs the rest of the carrier substrate to completely separate the carrier substrate from the display device. And finally, controlling the first telescopic member 322, the second telescopic member 332 and the third telescopic member 342 to contract for a second set distance, thereby completing the stripping work.

According to the sheet stripping device 300, through a plurality of adsorption mechanisms controlled respectively, asynchronous echelon separation is carried out on the two side areas and the central area of the carrier substrate according to the time sequence, so that the pulling force applied when the flexible device is separated from the carrier substrate is lower, the damage risk of the display device is reduced, the comprehensive yield of the process section is improved, meanwhile, the traditional stripping device is not required to cut by inserting a cutter into the interface between the display device and the carrier substrate firstly, then adsorption stripping is carried out, and the complexity of equipment is reduced.

Since the carrier substrate is a rigid material and the deformability is low, the first set distance is preferably a slight distance, for example, in one example, the first set distance is set to 3mm to 5mm. The first set distance is not limited to the above range, and may be set according to actual requirements so that opposite ends of the sheet 20 are separated from the base.

In the illustrated specific example, the first telescopic member 322, the second telescopic member 332 and the third telescopic member 342 are driving cylinders. It is understood that in other examples, the first telescopic member 322, the second telescopic member 332 and the third telescopic member 342 are not limited to the use of a driving cylinder, and other driving structures, such as a linear motor, may be used.

As shown in fig. 3, in one example, the first absorbent component 324 includes a first vent seat 3241 and a plurality of first nozzles 3242 disposed on the first vent seat 3241. The first vent seat 3241 has a vent cavity therein, which can communicate with an air-extracting device. Suction is applied by a suction device to create a negative pressure at the first suction nozzle 3242 to attract the sheet 20.

The first suction member 324 is provided with a plurality of first suction nozzles 3242 to respectively suck a plurality of positions on the display device. For example, in the particular example illustrated, the plurality of first nozzles 3242 are distributed in an array. Under the condition that the overall adsorption force meets the requirement, the adsorption force of each first suction nozzle 3242 can be set to be smaller, for example, a micropore suction nozzle is adopted, and the caliber is 40-80 mu m; meanwhile, the bearing force on the carrier substrate is dispersed, so that the carrier substrate can be prevented from being damaged in the stripping process to cause stripping failure.

In one example, the first vent seat 3241 includes a horizontal support and a plurality of vertical air tubes. The horizontal bracket is disposed in a horizontal direction and is connected to the first telescopic member 322. The vertical air pipes extend in the vertical direction, and one ends of the plurality of vertical air pipes are connected to the horizontal support respectively. The plurality of vertical air tubes correspond to the plurality of first suction nozzles 3242 one to one, and the first suction nozzles 3242 are disposed on one end of the vertical air tubes far from the horizontal bracket. The horizontal bracket and the vertical air pipe can be made of metal materials, such as aluminum alloy.

In one example, the end of the first nozzle 3242 contacting the sheet 20 is made of a flexible material, such as resin, and has a certain elastic expansion amount, so that the first nozzle 3242 and the carrier substrate form a soft contact, and a buffer protection effect is achieved.

In one example thereof, the second suction part 334 includes a second vent seat 3341 and a plurality of second suction nozzles 3342 disposed on the second vent seat 3341. The plurality of second suction nozzles 3342 are distributed in an array. The third adsorption part 344 includes a third vent seat 3441 and a plurality of third suction nozzles 3442 provided on the third vent seat 3441. The plurality of third suction nozzles 3442 are distributed in an array. The structural design of the second adsorption element 334 and the third adsorption element 344 may be the same as the first adsorption element 324 and will not be described in detail.

In one example, the number of the first and second suction nozzles 3242 and 3342 is 5 to 20, respectively. The number of the third suction nozzles 3442 is 10 to 40. In the illustrated specific example, the number of the first nozzles 3242 and the second nozzles 3342 is 12, respectively, and the number of the third nozzles 3442 is 24.

When picking up the carrier substrate, the first telescopic member 322 and the second telescopic member 332 are contracted by a first set distance, at this time, the first nozzle 3242 and the second nozzle 3342 are positioned higher than the third nozzle 3442 by the first set distance, the edges of both ends of the carrier substrate are sucked up and peeled off first, then the third telescopic member 342 is contracted by the first set distance, the first nozzle 3242, the second nozzle 3342 and the third nozzle 3442 are positioned at the same height, the carrier substrate is completely peeled off, and the first telescopic member 322, the second telescopic member 332 and the third telescopic member 342 are synchronously contracted by a second set distance to pick up the carrier substrate.

As shown in fig. 3 and 5, in one example, the sheet peeling apparatus 300 further includes a moving rail 350, and the mount 310 is provided on the moving rail 350 and is movable along the moving rail 350. In this manner, the sheet peeling apparatus 300 has both functions of sheet peeling and sheet conveyance. After the first picking mechanism 320, the second picking mechanism 330 and the third picking mechanism 340 cooperate to suck the carrier substrate to separate from the display device, the mounting base 310 moves along the moving guide rail 350, and the carrier substrate can be transported to the carrier plate recycling stage.

In one example, the moving guide 350 includes a first side rail 352 and a second side rail 354 (only one side rail is shown in fig. 3) which are oppositely disposed, and moving sliding grooves 3521 are respectively disposed on the first side rail 352 and the second side rail 354. The mounting seat 310 is disposed between the first side rail 352 and the second side rail 354, and both ends of the mounting seat are respectively mounted in the moving chutes 3521 at both sides. The first picking mechanism 320, the second picking mechanism 330 and the third picking mechanism 340 are suspended from the mount 310.

As shown in fig. 4, further, the present invention also provides a sheet peeling method using the sheet peeling apparatus 300 of any of the above examples, the sheet peeling method including the steps of:

controlling the first, second and third

extensible members

322, 332 and 342 to extend so that the first, second and

third suction members

324, 334 and 344 are adjacent to and suck the sheet 20;

controlling the first and second stretching

members

322 and 332 to be contracted by a first set distance so that the first and

second suction members

324 and 334 respectively suck opposite ends of the sheet 20;

controlling the third stretching and retracting member 342 to contract a first set distance so that the third suction member 344 sucks up the rest of the sheet 20;

the first, second and third

extendable members

322, 332, 342 are controlled to extend a second set distance.

Further, referring to fig. 6, the present invention also provides a display device and carrier substrate peeling apparatus 10, which includes a laser peeling device 400 and a sheet peeling device 300 of any of the above examples.

The laser lift-off device 400 has a laser emitter 410, and the laser emitter 410 is used for performing laser processing on an interface between a display device and a carrier substrate in a device to be lifted off to obtain a pre-lift-off product.

The sheet peeling apparatus 300 is used to completely peel the display device from the carrier substrate in the pre-peeled product.

The above-described display device and carrier substrate peeling apparatus 10 has the sheet peeling device 300 of any of the above-described examples, and thus can obtain corresponding technical effects.

In one example, the display device is a flexible display device.

In one example, the carrier substrate is a glass carrier plate.

In one example, the laser lift-off apparatus 400 further comprises a laser shaper 420, and the laser shaper 420 is disposed at the light outlet of the laser emitter 410 to shape the emitted laser light to obtain a desired shape and size. For example, the laser emitter 410 can generate a spot size of 4.5mm by 2.5mm, and after passing through the laser shaper 420, the size of the laser beam becomes 750mm by 0.25mm, which is suitable for laser lift-off.

In one example, the display device and carrier substrate peeling apparatus further includes a first conveyance device 500.

The first conveyance device 500 includes a first conveyance rail 510 and a first placing stage 520. The first placing stage 520 is disposed on the first conveying rail 510 and can move along the first conveying rail 510. The first placing platform 520 is provided with a first vacuum absorption hole, and the first vacuum absorption hole can absorb and fix the to-be-peeled device through pumping star negative pressure.

The first placement platform 520 is moved back and forth between the first station 530 and the second station 540. When the first placing platform 520 is located at the first station 530, the laser peeling apparatus 400 can perform laser processing on the device to be peeled, so as to obtain a pre-peeled product. When the first placing platform 520 is located at the second station 540, the sheet peeling apparatus 300 can completely peel the pre-peeled product.

The display device is fragile and soft, the positioning precision is reduced and the device is damaged due to picking, placing and transporting, the device does not need to be picked, placed and transported between the laser stripping process and the mechanical stripping process due to the arrangement, the transporting times of the device are reduced, and the problems are solved.

The laser irradiates and scans the interface of the substrate and the carrier substrate of the display device, so that the property of the flexible substrate material at the interface is changed, the bonding force between the flexible substrate and the carrier substrate is reduced on the basis of not damaging the display device, and the display device is easily and smoothly separated from the carrier substrate.

And preferably, low-energy-density laser beams are used for scanning, so that the display device is prevented from being damaged, and the periphery of the display device is still adhered to the stripping substrate after laser treatment. In one example, the process parameters of the laser treatment are set as follows: the Energy Density (ED) is set to be 130-160 mj/cm2, the laser frequency is set to be 50-300 Hz, the energy overlapping rate (Overlap) is set to be 50-85 percent, the scanning speed is set to be 11.25-37.5 mm/s, and the z value of a laser focal plane is set to be 10.0-10.8 mm.

In one example, the display device and carrier substrate peeling apparatus further includes a first dust removing device 700 disposed between the first station 530 and the second station 540. In the process that the pre-peeled product after laser processing is transferred from the first station 530 to the second station 540, the first dust removing device 700 performs dust removal cleaning processing on the pre-peeled product to remove dust generated in the laser processing.

The first dust removing device 700 may be selected from, but not limited to, a dry ultrasonic cleaning device 1300 (USC).

As shown in fig. 6, in one example, the display device and carrier substrate peeling apparatus further includes a second conveyor 600. The second conveyance device 600 includes a second conveyance rail on which the mount 310 is disposed and movable along the second conveyance rail.

After the sheet peeling apparatus 300 finishes the peeling operation at the second station 540, the carrier substrate can be conveyed to the second placing platform (not shown) at the third station along the second conveying rail, and the display device can be sent to the third placing platform at the fourth station 610 along the second conveying rail. And a second vacuum adsorption hole is formed in the third placing platform and used for adsorbing and fixing the display device.

In this example, the first placement stage 520 serves as both a support stage for the substrate during laser processing and a support stage for the substrate during mechanical stripping.

After the carrier substrate is picked up by the sheet peeling device 300, the carrier substrate moves along the second conveying guide rail, and the carrier substrate is conveyed to the second placing platform on the third station for recycling. Subsequently, the sheet peeling apparatus 300 returns to the second station 540, the vacuum suction holes of the first placing platform 520 stop sucking air, the display device is released, and the sheet peeling apparatus 300 picks up the display device, moves along the second conveying rail, and sends the display device to the third placing platform on the fourth station 610 to wait for the next processing step.

In the specific example shown in fig. 6, the first conveying rail 510 extends in a first direction, and the second conveying rail extends in a second direction, the first direction and the second direction being perpendicular to each other.

In one example, the display device and carrier substrate peeling apparatus further includes a second dust removing device 1600 disposed between the second station 540 and the fourth station 610. In the process of transferring the peeled display device from the second station 540 to the fourth station 610, the second dust removing device 1600 performs dust removal cleaning processing on the display device to remove dust generated in the peeling process.

The second dust removing device 1600 can be selected from, but not limited to, a dry ultrasonic cleaning device 1300 (USC).

In one example, the display device and carrier substrate peeling apparatus further includes a flipping device 800 and a film attaching device 900.

The turnover device 800 is connected to the third placement platform, and the turnover mechanism is used for turning over the third placement platform to make the display device face down and prepare for the work of attaching the support film.

A film attaching apparatus 900 is disposed downstream of the sheet peeling apparatus 300, and the film attaching apparatus 900 is used to attach a support film on the display device facing downward. The film sticking apparatus 900 may stick a film by a rolling sticking method or the like.

In one example, the display device and carrier substrate peeling apparatus further includes a film material loading cassette 1000, a film material aligning device 1100, and a third conveying device 1200. The film material feeding box 1000 is used for placing a support film. The film material alignment device 1100 is used for aligning the support film. The third conveying device 1200 is used for conveying the support film from the film material loading box 1000 to the film material aligning device 1100 for alignment, and then conveying the aligned support film to the film attaching device 900.

More specifically, the third conveying device 1200 picks up the support film at the film material feeding box 1000, places the support film on the pre-alignment platform of the film material alignment device 1100 for initial alignment, after the initial alignment is completed, the rubber roll film tearing assembly tears off the release film of the film material, then the initial alignment platform moves to the attachment platform along the guide rails, the CCD cameras with two high resolutions (such as 500 ten thousand pixels) above start to perform visual accurate alignment, and the pre-alignment platform performs UVW motion compensation alignment by collecting coordinate information of the four corner marks of the display device. In consideration of film tolerance, visual accurate alignment requires that the lamination accuracy be no greater than 100 μm. And after alignment, the alignment is finished by adopting a rolling attaching mode for attaching.

In one example, the display device and carrier substrate peeling apparatus further includes a third dust removing device 1700, and the third dust removing device 1700 is disposed between the film material loading box 1000 and the film material aligning device 1100.

As shown in fig. 6, in one example, the display device and carrier substrate peeling apparatus further includes a cleaning device 1300 and a fourth conveyance device 1400. The cleaning device 1300 is disposed upstream of the laser peeling device 400, and is configured to perform a cleaning process on the peeled device to obtain a device to be peeled. The fourth transportation device 1400 is used to transport the peeled device through the cleaning device 1300 and transport the device to be peeled to the first placing stage 520.

The cleaning apparatus 1300 includes a polishing cleaning mechanism 1310, a brush cleaning mechanism 1320, a two-fluid spraying mechanism 1330, and a drying mechanism 1340. The polish cleaning mechanism 1310, the brush cleaning mechanism 1320, the two-fluid spray mechanism 1330, and the drying mechanism 1340 are used to sequentially process the peeling device. The drying mechanism 1340 may employ an air knife. The substrate is sequentially cleaned by a grinding disc, a brush and two fluid sprays, dried by a drying mechanism 1340, and then conveyed to the first placing platform 520 by the fourth conveying device 1400 to perform subsequent laser stripping, mechanical stripping and other processes.

After laser cutting and Chip On Film (COF) and bonding of a printed circuit board (PCB 103), 1 to 4 COF and PCB boards are arranged on the periphery of the substrate of the display device. Fig. 7 shows a 31-inch display device, which has a main area with dimensions 697.32 × 405.78mm and several COFs and PCBs 103 disposed at peripheral locations. Wherein the number of the Source COFs (Source COFs) 101 is 16, the adjacent spacing is 25.3mm, the number of the Gate COFs (Gate COFs) 102 is 12, and the adjacent spacing is 21.8mm. Two PCBs 103 are designed on two sides of the long side of the device respectively and serve as electric connection carriers of electronic components of the display device. Because the conventional roller way conveying type cleaning machine cannot avoid friction with COF and PCB103, the device is easily damaged or even scrapped, and therefore, the cleaning machine is not suitable for cleaning flexible devices with COF and PCB103.

For this, in one example, the fourth conveyance device 1400 is conveyed by a conveying robot (not shown). The transport arm has and is used for adsorbing the first adsorption apparatus who adsorbs the mechanism and be used for adsorbing the second adsorption apparatus who adsorbs COF and PCB103 at the carrier base plate, can improve the stationarity of device handling in-process, avoids COF and PCB103 friction to lead to the device impaired.

The fourth transporting device 1400 may further include a moving stage (not shown), through which the devices are transported in the local area, so as to facilitate the cleaning process. The handling robot can place the device on the mobile stage smoothly.

The fourth transfer device 1400 may further include a transfer robot 1410, wherein the transfer robot 1410 is configured to pick up and transfer the cleaned device onto the first placing stage 520 for a next process, i.e., a laser lift-off process.

In one example, the display device and carrier substrate peeling apparatus further includes a device alignment device 1500. The device aligning apparatus 1500 is disposed upstream of the cleaning apparatus 1300, and is configured to align the stripping devices, so that the fourth conveying apparatus 1400 can accurately pick up the stripping devices.

In the current large-size display device module process, laser stripping equipment, mechanical stripping equipment and film material laminating equipment are independent from each other, and a substrate is conveyed between the two pieces of equipment by a mechanical arm. The long-line configuration causes large space occupation area of equipment, mutual independence and dispersion among a plurality of pieces of equipment, long Tact time and high maintenance and management cost and human resources.

The display device and carrier substrate peeling apparatus 10 shown in fig. 6 is applicable to large-sized display devices, and the apparatus integrates a cleaning device 1300, a laser peeling device 400, a sheet peeling device 300 and a film sticking device 900, and realizes efficient and smooth connection between each process device through each conveying device, so that the integration level of the whole system is remarkably improved, the problems of flexible device transfer and device damage in the conventional module process path can be greatly reduced, the risk factors of the laser glass and the mechanical peeling process section are controlled, and the effective improvement of the comprehensive yield of products is realized. The production beat time of the product can be shortened to 8-15 min.

It is understood that the actions of the devices in the carrier substrate peeling apparatus 10 and the display device can be controlled by a control system commonly used in the art, such as but not limited to a Programmable Logic Control (PLC) or an automatic mechanical control (ACS), to achieve efficient and smooth signal interconnection.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent should be subject to the appended claims.

Claims

1. A sheet peeling apparatus, comprising:

a mounting base;

the control mechanism is connected with the first picking mechanism, the second picking mechanism and the third picking mechanism; the control mechanism can control the first telescopic member and the second telescopic member to contract for a first set distance so that the first adsorption member and the second adsorption member respectively suck opposite ends of a sheet, then control the third telescopic member to contract for the first set distance so that the third adsorption member sucks the rest part of the sheet, and then control the first telescopic member, the second telescopic member and the third telescopic member to contract for a second set distance.

2. The sheet peeling apparatus as claimed in claim 1, wherein said first set distance is 3mm to 5mm.

3. The sheet peeling apparatus as claimed in claim 1 or 2, wherein the first suction member includes a first vent base and a plurality of first suction nozzles provided on the first vent base, the plurality of first suction nozzles being arranged in an array;

the third adsorption component comprises a third air through seat and a plurality of third suction nozzles arranged on the third air through seat, and the third suction nozzles are distributed in an array mode.

4. The sheet peeling apparatus as claimed in claim 3, wherein the caliber of said first suction nozzle, the caliber of said second suction nozzle and the caliber of said third suction nozzle are each independently 40 μm to 80 μm.

5. A display device and carrier substrate peeling apparatus, comprising:

the laser peeling device is provided with a laser emitter, and the laser emitter is used for carrying out laser treatment on an interface between a display device and a carrier substrate in a device to be peeled to obtain a pre-peeled product; and

the sheet peeling apparatus as defined in any one of claims 1 to 4, for completely peeling the display device in the pre-peeled product from the carrier substrate.

6. The display device and carrier substrate peeling apparatus of claim 5, further comprising:

7. The display device and carrier substrate peeling apparatus of claim 6, further comprising:

after the sheet stripping device finishes stripping work on the second station, the sheet stripping device can convey the carrier substrate to a second placing platform on a third station along the second conveying guide rail, and convey the display device to a third placing platform on a fourth station along the second conveying guide rail, wherein a second vacuum adsorption hole is formed in the third placing platform.

8. The display device and carrier substrate peeling apparatus of claim 7, further comprising:

9. The display device and carrier substrate peeling apparatus of claim 8, further comprising:

the film material feeding box is used for placing the support film;

the membrane material contraposition device is used for contrapositioning the support membrane; and

10. The display device and carrier substrate peeling apparatus of any one of claims 5 to 9, further comprising:

and the fourth conveying device is used for conveying the to-be-stripped device to the first placing platform through the cleaning device.

11. The display device and carrier substrate peeling apparatus of claim 10, wherein the cleaning device comprises: and the grinding and cleaning mechanism, the brush cleaning mechanism, the two-fluid spraying mechanism and the drying mechanism are used for sequentially processing the device to be stripped.

12. The display device and carrier substrate peeling apparatus of claim 10, wherein the fourth carrying device comprises:

13. A sheet peeling method characterized by employing the sheet peeling apparatus of any one of claims 1 to 4 or the display device and carrier substrate peeling apparatus of any one of claims 5 to 12, the sheet peeling method comprising the steps of:

controlling the first, second and third extensible members to extend so that the first, second and third suction members approach and suck a sheet;