CN115692299A - Air-flotation rotary adsorption structure and use method thereof - Google Patents
Air-flotation rotary adsorption structure and use method thereof Download PDFInfo
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- CN115692299A CN115692299A CN202211683611.1A CN202211683611A CN115692299A CN 115692299 A CN115692299 A CN 115692299A CN 202211683611 A CN202211683611 A CN 202211683611A CN 115692299 A CN115692299 A CN 115692299A
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Abstract
The invention discloses an air-flotation rotary adsorption structure and a using method thereof, and the air-flotation rotary adsorption structure comprises an air-flotation shaft sleeve, an air-flotation shaft and a suction nozzle, wherein a movable channel is arranged in the air-flotation shaft sleeve, the air-flotation shaft is movably arranged in the movable channel, the suction nozzle is arranged at the bottom of the air-flotation shaft, an air film gap is formed between the air-flotation shaft and the inner wall surface of the movable channel, an adsorption channel communicated with the suction nozzle is arranged in the air-flotation shaft, a material-taking vacuum air hole communicated with the adsorption channel is arranged on the air-flotation shaft sleeve, and a first vacuum air-flotation bearing and a second vacuum air-flotation bearing are respectively formed in the upper section and the lower section of the material-taking vacuum air hole in the air film gap. The invention can generate stable adsorption force at the suction nozzle end, ensure stable and effective adsorption of a micro workpiece, and can not generate acting force on the air floating shaft body in the axial direction, thereby ensuring accurate measurement of the axial pressure of the air floating shaft by an external sensor.
Description
Technical Field
The invention relates to the technical field of air-floatation rotating mechanisms, in particular to an air-floatation rotary adsorption structure and a using method thereof.
Background
In recent years, with the increase of communication speed requirements, chip components are increasingly miniaturized, products are integrated in high density, and the requirements of production processes and reliability are higher and higher. In the chip mounting process, the precision requirement on the mounting system is more and more strict, and the air floatation rotary mounting system is applied to chip mounting equipment in a large quantity by virtue of the unique advantages of high precision, high straightness, no friction and the like. Because the chip size is very little, and some is about 0.2mm, when the paster, to the stability requirement of the absorption atmospheric pressure of chip very strict, can not appear any negative pressure fluctuation or phenomenon such as lose heart, otherwise lead to the chip to adsorb the failure easily, and then lead to installing the failure.
In the prior art, patent publication No. CN113226006A discloses an air floating type suction nozzle module and a using method thereof, which includes a fixing base, an air floating shaft disposed in the fixing base in an up-and-down movable manner, and a suction nozzle, wherein the fixing base further includes an air distributing shaft base and an air distributing shaft disposed in the air distributing shaft base, and a movable passage for the air floating shaft to move up and down is disposed in the air distributing shaft. Two negative pressure air passages are arranged in the air floating shaft, the first negative pressure air passage is used for adsorbing and fixing or releasing the suction nozzle, and the second negative pressure air passage is communicated to the inside of the suction nozzle and used for adsorbing workpieces. The suction nozzle module has the following defects:
(1) Although the air distributing shaft is sealed and isolated in each air pressure area in the air distributing shaft seat through a sealing ring and does not interfere with each other, the air pressure areas in the air distributing shaft are communicated into a whole, the patent describes that the air distributing shaft is characterized in that the distance between a negative pressure part of the inner wall of the movable channel and the air floating shaft is limited to be 3 to 5um, so that the positive pressure air passage and the negative pressure air passage are prevented from interfering with each other, and the normal operation of the work is ensured, in practical application, because the positive pressure air passage for introducing positive pressure into the air distributing shaft in the structure is arranged at the upper part and the lower part and has two passages, and the second negative pressure air port for adsorbing the work is also arranged at two passages and is adjacent to the positive pressure air passage, therefore, the positive pressure blown in the positive pressure air passage is easy to be strung into the second negative pressure air passage to cause fluctuation of the negative pressure air flow for adsorbing the work, and for small-sized chips, the tiny air pressure fluctuation can directly cause adsorption failure; and the clearance of 3 to 5um is too small, so that friction is easily caused between the air bearing shaft and the inner wall of the movable channel when the air bearing shaft rotates, and if the clearance is adjusted to be large, the negative pressure channel for adsorbing the workpiece is more unstable;
(2) Because the suction nozzle is connected with the air floating shaft by means of negative pressure, a negative pressure air passage for fixing the suction nozzle needs to be always kept in a negative pressure state, the first negative pressure air port also needs to be always kept in the negative pressure state, the first negative pressure air port is positioned between the upper and the lower second negative pressure air ports, and negative pressure generated by the second negative pressure air ports is difficult to continuously and effectively form the same negative pressure effect on the second negative pressure air passage, so that the suction nozzle has a greater risk of workpiece adsorption failure;
(3) It sets up the air supporting end cover in the top of fixing base to have described in this patent, the air supporting end cover is discoid, when the gas in the malleation air flue blows off movable passage, high velocity air alright blow the air supporting end cover upwards and float, through setting up predetermined pressure alright offset the dead weight of air supporting axle and suction nozzle wholly or partly, be convenient for realize the pressure control of suction nozzle, therefore can know, air supporting axle and suction nozzle are whole can receive the malleation air flue to blow off gas and form ascending buoyancy to the air supporting end cover, constitute axial top force to the air supporting end cover, if the atmospheric pressure of malleation air flue takes place undulantly, then the axial pressure size of suction nozzle can be influenced, the overpressure phenomenon probably exists when leading to the chip to paste the dress, and lead to pressure sensor detection data inaccurate easily.
Therefore, it is necessary to provide a new air-float rotary adsorption structure and a method for using the same to solve the above technical problems.
Disclosure of Invention
One of the main objectives of the present invention is to provide an air-floating rotary adsorption structure, which can generate a stable adsorption force at a suction nozzle end, ensure stable and effective adsorption of a micro-workpiece, and ensure accurate measurement of axial pressure of an air-floating shaft by an external sensor without generating an acting force on an air-floating shaft body in an axial direction.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a rotatory adsorption structure of air supporting, its includes that inside air supporting axle sleeve, the activity that is provided with movable channel set up air supporting axle and the setting in the movable channel are in the suction nozzle of air supporting axle bottom, air supporting axle with be formed with the air film clearance between the inner wall surface of movable channel, the inside absorption channel that is provided with the intercommunication suction nozzle of air supporting axle, be provided with the intercommunication on the air supporting axle sleeve the material vacuum gas pocket is got to absorption channel, the air film clearance is in it is formed with first vacuum air bearing and second vacuum air bearing respectively to get between the upper and lower two sections intervals of material vacuum gas pocket.
Furthermore, a first positive pressure air hole, a first negative pressure air hole, a second negative pressure air hole and a second positive pressure air hole which are axially distributed in sequence and are communicated with the movable channel in the radial direction are arranged on the circumferential surface of the air floatation shaft sleeve; a positive pressure air flow is blown into the first positive pressure air hole, then enters the movable channel, downwards passes through the air film gap, and is output by the first negative pressure air hole, and the first vacuum air bearing is formed in an axial section of the air film gap, which is positioned in the first positive pressure air hole and the first negative pressure air hole; positive pressure airflow is blown into the second positive pressure air hole, then enters the movable channel, upwards passes through the air film gap, and is output by the second negative pressure air hole, and the second vacuum air bearing is formed in the axial section of the air film gap, which is positioned in the second negative pressure air hole and the second positive pressure air hole; the material taking vacuum air hole is positioned between the first negative pressure air hole and the second negative pressure air hole.
Further, the air film gap is 0.01 to 0.05mm.
Further, a first communication hole for communicating the material taking vacuum air hole with the adsorption channel is formed in the circumferential surface of the air floatation shaft; the material taking vacuum air hole, the air film gap, the first communication hole, the adsorption channel and the suction nozzle form a material taking vacuum air path for adsorbing materials.
Furthermore, the inner wall surface of the movable passage is provided with a first annular groove corresponding to the material taking vacuum hole, and the material taking vacuum hole extends inwards into the first annular groove.
Furthermore, a suction nozzle installation cylinder is arranged in the air floating shaft, an installation groove formed by upwards sinking and extending from the bottom end is formed in the bottom of the air floating shaft, and the suction nozzle installation cylinder is installed in the installation groove in a fastening and matching mode.
Further, a first annular air cavity, a second annular air cavity and a plurality of air passages which axially penetrate to the bottom are formed between the outer peripheral surface of the suction nozzle mounting cylinder and the inner wall surface of the mounting groove in sequence; the interior of the suction nozzle mounting cylinder is of a hollow structure and forms the adsorption channel; a plurality of third communication holes which are distributed annularly and are used for communicating the first annular air cavity with the adsorption channel are formed in the suction nozzle mounting cylinder; the first annular air cavity is communicated with the first communication hole.
Further, an annular bulge is arranged on the suction nozzle mounting cylinder and used for sealing and isolating the first annular air cavity and the second annular air cavity, and the second annular air cavity is communicated with all the air passages; the air floating shaft is provided with a second communication hole for communicating the second annular air cavity with the second negative pressure air hole; the air passages are annularly distributed on the periphery of the suction nozzle mounting cylinder.
Furthermore, the bottom of the suction nozzle mounting cylinder is provided with an assembly hole, the suction nozzle is assembled in the assembly hole, and the suction nozzle is provided with a blocking plane extending to the position below the air passage.
Furthermore, a magnetic absorption layer for absorbing the suction nozzle is arranged on the surface of the inner wall of the assembly hole.
Furthermore, a second annular groove is formed in the surface of the inner wall of the movable channel, corresponding to the second negative pressure air hole, and the second negative pressure air hole extends into the second annular groove.
Another objective of the present invention is to provide a method for using an air-floating rotary adsorption structure, which includes an adsorption operation mode, in which positive air pressures with set sizes are input to the first positive pressure air hole and the second positive pressure air hole, negative air pressures with set sizes are generated at the first negative pressure air hole and the second negative pressure air hole, and the first vacuum air-floating bearing and the second vacuum air-floating bearing are established; the material taking vacuum air hole generates negative air pressure with a set size according to adsorption requirements to absorb materials, and then the materials are released through pressure relief at the material taking vacuum air hole.
The vacuum nozzle is characterized by further comprising a suction nozzle replacement working mode, wherein in the suction nozzle replacement working mode, the first positive-pressure air hole, the first negative-pressure air hole, the material taking vacuum air hole and the second positive-pressure air hole are all in an air-off state, and positive air pressure with a set pressure value is input to the second negative-pressure air hole to blow out the suction nozzle; the air-flotation rotary adsorption structure integrally moves to the position above the new suction nozzle and then moves downwards, and the new suction nozzle is adsorbed and fixed in the assembly hole under the action of magnetic adsorption on the surface of the inner wall of the assembly hole, so that the replacement of the suction nozzle is completed.
Compared with the prior art, the air floatation rotary adsorption structure and the using method thereof have the beneficial effects that: can produce stable adsorption affinity at the suction nozzle end, ensure the stable effective absorption of microminiature work piece, and can not produce the effort to the air supporting shaft body in the axial, ensure that external sensor is to the accurate measurement of air supporting shaft axial pressure. In particular, the method comprises the following steps of,
(1) In an air film gap formed between the air floating shaft and the air floating shaft sleeve, two vacuum air floating bearings are arranged at the upper section and the lower section of a material taking vacuum air hole for adsorbing materials, so that the sections, correspondingly communicated with the material taking vacuum air hole, in the air film gap are in an absolute vacuum environment, the flow of gas entering from the outer parts of the upper end and the lower end of the air floating shaft sleeve and gas entering the air floating gap from a positive pressure air hole to the material taking vacuum air hole are blocked, the stability of the air flow environment and the stability of the adsorption pressure of a material taking vacuum air circuit are ensured, and the adsorption stability of the materials is further improved;
(2) A positive pressure air hole and a negative pressure air hole are utilized to form a high-speed airflow channel, a vacuum environment is further formed in the air film gap, negative pressure of the negative pressure air hole is utilized to actively conduct drainage on airflow blown in from the positive pressure air hole, the negative pressure air hole is arranged below the positive pressure air hole at the upper part of the air floatation shaft seat, most or even all positive pressure air blown into the air film gap from the positive pressure air hole is downward and is output from the negative pressure air hole below, and very little or even no airflow can upwards escape from the top end of the air floatation shaft sleeve, so that an axial acting force cannot be formed on the air floatation shaft, and accurate test of the axial displacement of the air floatation shaft by an external pressure sensor is guaranteed;
(3) The air floating shaft is arranged into two component assembly structures, one is an air floating shaft body, and the other is a suction nozzle mounting cylinder for mounting a suction nozzle, so that the requirements of each air path are met, the manufacturing process difficulty is reduced, and the processing is convenient;
(4) The suction nozzle adopts the mode of magnetism to inhale, need not the second negative pressure gas pocket of lower part and keeps the adsorption that the suction nozzle was maintained to the negative pressure state in real time, consequently, has liberated the second negative pressure gas pocket, makes it can use in the vacuum air supporting bearing, when changing the suction nozzle, can also satisfy the malleation demand of blowing of changing the suction nozzle, realizes multi-functional structure.
Drawings
FIG. 1 is a schematic cross-sectional structural view of an embodiment of the present invention;
FIG. 2 is a schematic illustration of an explosive structure according to an embodiment of the present invention;
the reference signs are:
100-air-floating rotary adsorption structure;
1-an air flotation shaft sleeve, 11-a movable channel, 12-an air film gap, 13-a first positive pressure air hole, 14-a first negative pressure air hole, 15-a second negative pressure air hole, 16-a second positive pressure air hole, 17-a material taking vacuum air hole, 18-a first annular groove and 19-a second annular groove;
2-an air floating shaft, 21-an adsorption channel, 22-a first communicating hole, 23-a mounting groove, 24-a first annular air cavity, 25-a second annular air cavity, 26-an air passage and 27-a second communicating hole;
3-suction nozzle, 31-blocking plane;
4-nozzle mounting cylinder, 41-annular bulge, 42-third communication hole, 43-assembly hole.
Detailed Description
Referring to fig. 1-2, the present embodiment is an air-floating rotary adsorption structure 100, which includes an air-floating shaft sleeve 1, an air-floating shaft 2 rotatably disposed in the air-floating shaft sleeve 1, and a suction nozzle 3 disposed at the bottom of the air-floating shaft 2.
An axially through movable channel 11 is formed inside the air flotation shaft sleeve 1, the air flotation shaft 2 is rotatably and movably arranged in the movable channel 11, and the air flotation shaft 2 is driven by a driving module to rotate.
An air film gap 12 is formed between the outer circumferential surface of the air bearing shaft 2 and the inner wall surface of the movable passage 11, and the air film gap 12 provides a condition for the rotational movement of the air bearing shaft 2 on the one hand and provides a space for forming a vacuum air bearing on the other hand. In this embodiment, the air film gap 12 is 0.01 to 0.05mm, such as 0.01mm, 0.02 mm, 0.03 mm, or 0.04 mm.
A first positive pressure air hole 13, a first negative pressure air hole 14, a second negative pressure air hole 15 and a second positive pressure air hole 16 which are axially distributed in sequence and are communicated with the movable channel 11 in the radial direction are arranged on the circumferential surface of the air floatation shaft sleeve 1; a positive pressure air flow is blown into the first positive pressure air hole 13, then enters the movable channel 11, downwards passes through the air film gap 12, and is output by the first negative pressure air hole 14, and an annular first vacuum air bearing is formed in the axial section of the air film gap 12, which is positioned in the first positive pressure air hole 13 and the first negative pressure air hole 14; the second positive pressure air hole 16 blows in positive pressure air flow, then enters the movable channel 11, upwards passes through the air film gap 12, is output by the second negative pressure air hole 15, and forms an annular second vacuum air bearing in the axial section of the air film gap 12, which is positioned in the second negative pressure air hole 15 and the second positive pressure air hole 16.
An adsorption channel 21 communicated with the suction nozzle 3 is arranged in the air floating shaft 2, a material taking vacuum air hole 17 positioned between the first vacuum air floating bearing section and the second vacuum air floating bearing section is arranged on the circumferential surface of the air floating shaft sleeve 1, and a first communication hole 22 communicated with the material taking vacuum air hole 17 and the adsorption channel 21 is arranged on the circumferential surface of the air floating shaft 2. The material taking vacuum air hole 17, the air film gap 12, the first communicating hole 22, the adsorption channel 21 and the suction nozzle 3 form a stable material taking vacuum air path for adsorbing materials.
Through the design of the first vacuum air bearing and the second vacuum air bearing, on one hand, the air floating shaft 2 is rotatably arranged in the air floating shaft sleeve 1; on the other hand, two vacuum environments are formed at the peripheries of two axial sections of the air floating shaft 2, the two vacuum environments not only block gas entering from the outsides of the upper end and the lower end of the air floating shaft sleeve 1, but also prevent the influence of the external gas on the material taking vacuum air hole 17 and the whole material taking vacuum air path; on the other hand, positive pressure air flow blown out by the first positive pressure air hole 13 and the second positive pressure air hole 16 is isolated, so that the air film gap 12 forms absolute vacuum around the section where the material taking vacuum air hole 17 is communicated with the first connecting hole 22, and the influence of the positive pressure air flow on the material taking vacuum air hole 17 and the whole material taking vacuum air path is effectively avoided. Therefore, under the condition that the air floating shaft 2 rotates by 360 degrees, the material taking vacuum gas circuit is not interfered by the positive pressure gas circuit, stable material taking is realized, the stability of the air flow environment and the negative adsorption pressure of the material taking vacuum gas circuit are ensured, and the adsorption stability is improved.
In addition, due to the formation of the first vacuum air bearing, the positive pressure blown into the air film gap 12 by the first positive pressure air hole 13 will normally flow out upwards and downwards, but due to the existence of the first negative pressure air hole 14, a larger pressure difference is formed at the lower side of the first positive pressure air hole 13, therefore, most or even all of the positive pressure blown into the air film gap 12 by the first positive pressure air hole 13 will flow downwards and be output from the first negative pressure air hole 14, and very little or even no air flow will flow out upwards from the top end of the air floating shaft sleeve 1, so that an axial acting force will not be formed on the air floating shaft 2, and further, the accurate test of the axial displacement of the air floating shaft 2 by an external pressure sensor will not be affected.
A first annular groove 18 is formed in the inner wall surface of the movable passage 11 corresponding to the material taking vacuum hole 17, and the material taking vacuum hole 17 extends into the first annular groove 18. Through the setting of first annular groove 18, the guarantee is when the air supporting shaft 2 carries out axial for air supporting axle sleeve 1 and floats, gets material vacuum hole 17 and still can keep the stable intercommunication with first through-hole 22. In addition, the negative pressure pumped out by the material taking vacuum air hole 17 can form an annular negative pressure cavity in the first annular groove 18, so that the periphery of the first communication hole 22 is positioned in the annular negative pressure cavity when the air floating shaft 2 rotates, and the air floating shaft is always in a negative pressure environment to keep a negative pressure state.
In this embodiment, be provided with suction nozzle installation section of thick bamboo 4 in the air supporting shaft 2, the bottom of air supporting shaft 2 is provided with from the bottom mounting groove 23 that upwards sunken extension formed, and suction nozzle installation section of thick bamboo 4 fastening fit is installed in mounting groove 23, and the top supports the groove top inner wall of mounting groove 23. Be formed with first annular air cavity 24, second annular air cavity 25 and a plurality of air flues 26 that axially link up to the bottom between the inner wall surface of the peripheral surface of suction nozzle installing cylinder 4 and mounting groove 23, be provided with annular bulge 41 on the suction nozzle installing cylinder 4 for sealed first annular air cavity 24 and second annular air cavity 25 of keeping apart, second annular air cavity 25 and all air flues 26 intercommunication, be arranged in with the even water conservancy diversion of air current to air flue 26. The air floating shaft 2 is provided with a second communication hole 27 for communicating the second annular air cavity 25 with the second negative pressure air hole 15. The first annular air cavity 24 is communicated with the first communication hole 22, the inside of the suction nozzle installation cylinder 4 is of a hollow structure and forms the adsorption channel 21, and a plurality of third communication holes 42 which are distributed annularly and communicate the first annular air cavity 24 with the adsorption channel 21 are arranged on the suction nozzle installation cylinder 4. The air passages 26 are annularly distributed on the periphery of the nozzle mounting barrel 4.
The bottom of the suction nozzle mounting cylinder 4 is provided with a fitting hole 43 for mounting the suction nozzle 3, the suction nozzle 3 is fitted in the fitting hole 43, and the suction nozzle 3 has a blocking plane 31 extending below the air path 26. In this embodiment, the inner wall surface of the assembly hole 43 is provided with a magnetic absorption layer, and the magnetic absorption layer is fixed to the suction nozzle 3. When the suction nozzle 3 needs to be replaced, positive pressure air is blown into the second negative pressure air hole 15 and enters the second annular air cavity 25 through the second communicating hole 27, then the positive pressure air is uniformly distributed into the air passage 26, the positive pressure air entering the air passage 26 blows and hits the blocking plane 31, and then the suction nozzle 3 is blown down, so that the suction nozzle 3 is detached; when a new suction nozzle needs to be replaced, the suction nozzle mounting cylinder 4 is inserted into the upper part of the suction nozzle 3, suction of the suction nozzle is realized under the action of the magnetic absorption layer, and the mounting of the new suction nozzle is completed.
A second annular groove 19 is formed on the inner wall surface of the movable passage 11 corresponding to the second negative pressure air hole 15, and the second negative pressure air hole 15 extends into the second annular groove 19. By the arrangement of the second annular groove 19, even if the air bearing shaft 2 floats in the axial direction with respect to the air bearing sleeve 1 when the suction nozzle 3 is replaced, the second negative pressure air hole 15 can still be stably communicated with the second communication hole 27, and the suction nozzle 3 can be smoothly blown down.
The embodiment further provides a using method of the air-floating rotary adsorption structure, which includes an adsorption working mode, in the adsorption working mode, positive air pressure with a set size is input at the first positive pressure air hole 13 and the second positive pressure air hole 16, negative air pressure with a set size is generated at the first negative pressure air hole 14 and the second negative pressure air hole 15, and the first vacuum air-floating bearing and the second vacuum air-floating bearing are established; negative air pressure with a set size is generated at the material taking vacuum air hole 17 according to the adsorption requirement to absorb the material, and then the material is released through pressure relief at the material taking vacuum air hole 17.
The using method of the air-floating rotary adsorption structure further comprises a suction nozzle replacing working mode, in the suction nozzle replacing working mode, the first positive-pressure air hole 13, the first negative-pressure air hole 14, the material taking vacuum air hole 17 and the second positive-pressure air hole 16 are all in an air-off state, and positive air pressure with a set pressure value is input to the second negative-pressure air hole 15 to blow out the suction nozzle 3; the air-floating rotary adsorption structure 100 integrally moves to the upper side of the new suction nozzle, the assembly hole 43 is aligned to the upper side of the new suction nozzle, and then moves downwards, and the new suction nozzle is adsorbed and fixed in the assembly hole 43 under the adsorption action of the magnetic adsorption layer arranged on the inner wall surface of the assembly hole 43, so that the suction nozzle replacement is completed.
What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.
Claims (13)
1. The utility model provides a rotatory absorption structure of air supporting, its air supporting axle sleeve, the activity setting that is provided with the activity passageway including inside is in air supporting axle and the setting in the activity passageway are in the suction nozzle of air supporting axle bottom, the air supporting axle with be formed with the air film clearance between the inner wall surface of activity passageway, the inside absorption passageway that is provided with the intercommunication suction nozzle of air supporting axle, be provided with the intercommunication on the air supporting axle sleeve the material vacuum gas pocket of getting of absorption passageway, its characterized in that: and a first vacuum air bearing and a second vacuum air bearing are respectively formed in the air film gap between the upper section and the lower section of the material taking vacuum air hole.
2. The air-bearing rotary adsorption structure of claim 1, wherein: a first positive pressure air hole, a first negative pressure air hole, a second negative pressure air hole and a second positive pressure air hole which are axially distributed in sequence and are communicated with the movable channel in the radial direction are formed in the circumferential surface of the air floatation shaft sleeve; a positive pressure air flow is blown into the first positive pressure air hole, then enters the movable channel, downwards passes through the air film gap, and is output by the first negative pressure air hole, and the first vacuum air bearing is formed in an axial section of the air film gap, which is positioned in the first positive pressure air hole and the first negative pressure air hole; positive pressure airflow is blown into the second positive pressure air hole, then enters the movable channel, upwards passes through the air film gap, and is output by the second negative pressure air hole, and the second vacuum air bearing is formed in the axial section of the air film gap, which is positioned in the second negative pressure air hole and the second positive pressure air hole; the material taking vacuum air hole is positioned between the first negative pressure air hole and the second negative pressure air hole.
3. The air-bearing rotary adsorption structure of claim 1, wherein: the air film gap is 0.01 to 0.05mm.
4. The air-bearing rotary adsorption structure of claim 2, wherein: a first communication hole for communicating the material taking vacuum air hole with the adsorption channel is formed in the circumferential surface of the air floating shaft; the material taking vacuum air hole, the air film gap, the first communication hole, the adsorption channel and the suction nozzle form a material taking vacuum air path for adsorbing materials.
5. The air-bearing rotary adsorption structure of claim 1 or 2, wherein: the inner wall surface of the movable channel is provided with a first annular groove corresponding to the material taking vacuum hole, and the material taking vacuum hole extends inwards into the first annular groove.
6. The air-bearing rotary adsorption structure of claim 4, wherein: the air supporting device is characterized in that a suction nozzle installation cylinder is arranged in the air supporting shaft, the bottom of the air supporting shaft is provided with an installation groove formed by upwards sinking and extending from the bottom end, and the suction nozzle installation cylinder is installed in the installation groove in a fastening and matching mode.
7. The air-bearing rotary adsorption structure of claim 6, wherein: a first annular air cavity, a second annular air cavity and a plurality of air passages which axially penetrate to the bottom are formed between the outer peripheral surface of the suction nozzle mounting cylinder and the inner wall surface of the mounting groove in sequence; the interior of the suction nozzle mounting cylinder is of a hollow structure and forms the adsorption channel; a plurality of third communication holes which are distributed annularly and are communicated with the first annular air cavity and the adsorption channel are formed in the suction nozzle mounting cylinder; the first annular air cavity is communicated with the first communication hole.
8. The air-bearing rotary adsorption structure of claim 7, wherein: the suction nozzle mounting cylinder is provided with an annular bulge part for sealing and isolating the first annular air cavity and the second annular air cavity, and the second annular air cavity is communicated with all the air passages; the air floating shaft is provided with a second communication hole for communicating the second annular air cavity with the second negative pressure air hole; the air passages are annularly distributed on the periphery of the suction nozzle mounting barrel.
9. The air-bearing rotary adsorption structure of claim 7, wherein: the bottom of the suction nozzle mounting cylinder is provided with a mounting hole, the suction nozzle is mounted in the mounting hole, and the suction nozzle is provided with a blocking plane extending to the lower part of the air passage.
10. The air-bearing rotary adsorbent structure as set forth in claim 9, wherein: and a magnetic absorption layer for absorbing the suction nozzle is arranged on the surface of the inner wall of the assembly hole.
11. The air-bearing rotary adsorption structure of claim 2, wherein: and a second annular groove is formed in the surface of the inner wall of the movable channel corresponding to the second negative pressure air hole, and the second negative pressure air hole extends into the second annular groove.
12. The method for using the air-bearing rotary adsorption structure as claimed in claim 2, wherein: the vacuum air-bearing device comprises an adsorption working mode, wherein in the adsorption working mode, positive air pressure with a set size is input at a first positive pressure air hole and a second positive pressure air hole, negative air pressure with a set size is generated at a first negative pressure air hole and a second negative pressure air hole, and the first vacuum air-bearing and the second vacuum air-bearing are established; get material vacuum hole department and produce the negative pressure of setting for the size according to the absorption demand and realize the absorption of material, then through get the release that the material was realized to the pressure release in material vacuum hole department.
13. Use according to claim 12, characterized in that: the vacuum material taking device further comprises a suction nozzle replacing working mode, wherein in the suction nozzle replacing working mode, the first positive pressure air hole, the first negative pressure air hole, the material taking vacuum air hole and the second positive pressure air hole are all in an air-off state, and positive air pressure with a set pressure value is input to the second negative pressure air hole to blow out the suction nozzle; the air-flotation rotary adsorption structure integrally moves to the position above the new suction nozzle and then moves downwards, and the new suction nozzle is adsorbed and fixed in the assembly hole under the action of magnetic adsorption on the surface of the inner wall of the assembly hole, so that the replacement of the suction nozzle is completed.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019062911A1 (en) * | 2017-09-30 | 2019-04-04 | 上海微电子装备（集团）股份有限公司 | Vacuum suction manipulator, substrate transfer device, and photoetching machine |
| CN110778823A (en) * | 2019-12-03 | 2020-02-11 | 中国工程物理研究院总体工程研究所 | Bidirectional air-float rotary joint |
| CN210950311U (en) * | 2019-12-03 | 2020-07-07 | 中国工程物理研究院总体工程研究所 | Bidirectional air-float rotary joint |
| CN113226006A (en) * | 2021-05-07 | 2021-08-06 | 深圳市锐博自动化设备有限公司 | Air-floating suction nozzle module and using method thereof |
| CN215073739U (en) * | 2021-05-07 | 2021-12-07 | 深圳市锐博自动化设备有限公司 | Air-floating suction nozzle module |
-
2022
- 2022-12-27 CN CN202211683611.1A patent/CN115692299B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019062911A1 (en) * | 2017-09-30 | 2019-04-04 | 上海微电子装备（集团）股份有限公司 | Vacuum suction manipulator, substrate transfer device, and photoetching machine |
| CN110778823A (en) * | 2019-12-03 | 2020-02-11 | 中国工程物理研究院总体工程研究所 | Bidirectional air-float rotary joint |
| CN210950311U (en) * | 2019-12-03 | 2020-07-07 | 中国工程物理研究院总体工程研究所 | Bidirectional air-float rotary joint |
| CN113226006A (en) * | 2021-05-07 | 2021-08-06 | 深圳市锐博自动化设备有限公司 | Air-floating suction nozzle module and using method thereof |
| CN215073739U (en) * | 2021-05-07 | 2021-12-07 | 深圳市锐博自动化设备有限公司 | Air-floating suction nozzle module |
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| CN115692299B (en) | 2023-04-18 |
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