CN115673876A - Vision-based two-dimensional measurement method for thermal deformation of motion system and use method - Google Patents
Vision-based two-dimensional measurement method for thermal deformation of motion system and use method Download PDFInfo
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Abstract
The invention discloses a vision-based two-dimensional measurement method for thermal deformation of a motion system and a use method thereof.A temperature sensor is arranged on a beam of a motion shaft, a standard workbench is arranged in the working range of the motion shaft, the set detection temperature range is divided into a plurality of temperature sections, the motion system simulates working condition running during measurement, when the temperature of the beam is increased to the corresponding temperature sections, a vision camera at the movable end of the motion system is utilized to sequentially photograph all calibration points on the standard workbench to obtain an X-axis and Y-axis thermal deformation two-dimensional graph corresponding to all the temperature sections, the two-dimensional graph is divided into a plurality of rectangular frames, and when the motion system is used, the rectangular frame and a quadrant region where a motion target point is located are found, so that the corresponding X-axis compensation value and Y-axis compensation value are found. The invention can simulate the thermal deformation state of the motion system according to various different working conditions, and realize the accurate measurement of the thermal deformation in a two-dimensional plane based on vision and a standard working table.
Description
Technical Field
The invention relates to the technical field of thermal deformation compensation of a motion system, in particular to a vision-based two-dimensional measurement method for thermal deformation of the motion system and a using method thereof.
Background
In recent years, with the vigorous development of the semiconductor chip industry, the demand of the industry for the chip mounting equipment is more and more increased, and the requirement for the chip mounting efficiency is higher and more. In order to meet the production requirement of high UPH, the direct-drive double-drive gantry is widely applied to equipment. However, as the requirement for mounting accuracy becomes higher and higher, the disadvantage of the temperature drift of the accuracy of the high-speed gantry becomes the bottleneck of the high-speed operation and mass production of mounting equipment. The faster the gantry runs, the more serious the motor generates heat, which causes the thermal deformation of the mounting part of the fixed mounting system due to the temperature rise, and further causes the mounting precision to deviate.
In the prior art, a patent publication No. CN11170833B discloses a five-axis small gantry numerical control machining center with thermal deformation error compensation, and a thermal deformation error compensation method is provided in the numerical control machining center, wherein a thermal sensitive area of the numerical control machining center is firstly determined, then a temperature sensor is arranged in the thermal sensitive area to acquire test data, then a thermal sensitive point is determined, the temperature of the thermal sensitive point is acquired, a real-time continuous temperature sensing model of a spindle in the whole thermal sensitive area is established, a geometric thermal error value corresponding to the temperature of the spindle thermal sensitive area is obtained through intermittent measurement, and a spindle thermal error continuous model is established; and then acquiring the temperature of the main shaft in the whole heat sensitive area in real time in actual processing, calculating according to the main shaft heat error continuous model to obtain a geometric heat error, and compensating the geometric heat error to a numerical control system of a numerical control processing center for temperature compensation control. Firstly, the method is complex and the processing process of the data is complicated; next, although the method described above describes how to obtain the geometric thermal error corresponding to the temperature of the thermally sensitive region of the spindle by intermittent measurement, the method is not described in detail, and therefore, it is necessary to study the method specifically for measuring the geometric thermal error.
In addition, the mounting device is different from the numerical control machining center, a heat source generated when a tool performs metal cutting does not exist in the mounting device, the heat source of the numerical control machining center mainly comes from a tool spindle, then is transmitted to the Z axis and then is transmitted to the X axis and the Y axis, and the heat source of the mounting device mainly comes from heat generated by high-speed movement of the X axis and the Y axis, so that a new vision-based two-dimensional measurement method for thermal deformation of the movement system and a use method thereof are needed to solve the technical problems.
Disclosure of Invention
The invention mainly aims to provide a vision-based two-dimensional measurement method for thermal deformation of a motion system, which can simulate the thermal deformation state of the motion system according to various different working conditions and realize accurate measurement of thermal deformation in a two-dimensional plane based on vision and a standard working table.
In order to achieve the purpose, the invention provides the following technical scheme: a vision-based two-dimensional measurement method for thermal deformation of a motion system is used for measuring the two-dimensional thermal deformation of the motion system, and the motion system comprises a Y-axis cross beam, an X-axis cross beam, a movable plate, a Y-axis driving module for driving the X-axis cross beam to move on the Y-axis cross beam, an X-axis driving module for driving the movable plate to move on the X-axis cross beam, and a control system for electrically connecting the Y-axis driving module and the X-axis driving module; the method is characterized in that: the measuring method comprises the following steps:
s1, working before preparation:
s101, arranging a visual camera on the movable plate, uniformly distributing a plurality of temperature sensors on a beam, and electrically connecting the visual camera and the temperature sensors with the control system;
s102, importing a motion control program simulating a working condition into the control system;
s103, arranging a standard workbench with the same size in a reference working range of the motion system, wherein a plurality of calibration points B arranged in the X-axis direction and the Y-axis direction according to a standard unit interval are arranged on the standard workbench; the calibration points B are arranged in M rows and N columns;
s104, parameter setting: setting a detection temperature range TA = [ T = [) 0 ,T 1 ]Dividing the detection temperature range TA into a plurality of temperature sections TA according to the temperature difference Delta T 1 、TA 2 、……、TA E ；E=( (T 1 -T 0 ) 1,/Δ T), setting an initial parameter k "=1;
s2, simulating a working condition to perform positioning: simulating working condition running according to the motion control program, continuously acquiring temperature data by the temperature sensor according to a set frequency, and averaging temperature values acquired by the temperature sensor to obtain T ";
s3, judging whether T' belongs to the temperature section TA k” If yes, executing step S5, otherwise, executing step S4;
s4, judging whether the running time reaches the set time, if not, returning to the step S2, and if so, ending the test;
s5, the visual camera executes the action of photographing the calibration points, photographs all the calibration points B to obtain a rectangular two-dimensional graph P with M rows and N columns, and each intersection point in the rectangular two-dimensional graph P corresponds to a data value P ij =（Δx ij , Δy ij ），i=1,2,……,M，i=1,2,……,N，Δx ij Indexing point B for visual camera on ith row and jth column ij In the above-acquired image, the center point of the image is relative to the index point B ij The difference in distance in the X-axis direction, i.e. the compensation value for thermal deformation in the X-axis direction, Δ y ij Is the center point of the image relative to the index point B ij A distance difference in the Y-axis direction, i.e., a thermal deformation compensation value in the Y-axis direction;
and S6, setting k "= k" +1, judging whether k "is smaller than or equal to E, if so, returning to the step S4, and if not, ending the test.
The method can be applied to the thermal deformation heat of one axial cross beam and can also be applied to the thermal deformation measurement of two axial cross beams, and when the method is applied to the thermal deformation measurement of two moving shaft cross beams, the method can be carried out in a mode that the single moving shaft cross beam sequentially measures.
Another objective of the present invention is to provide another two-dimensional thermal deformation measurement method for a vision-based motion system, which is used for measuring two-dimensional thermal deformation of the motion system, where the motion system includes a Y-axis beam, an X-axis beam, a movable plate, a Y-axis driving module for driving the X-axis beam to move on the Y-axis beam, an X-axis driving module for driving the movable plate to move on the X-axis beam, and a control system electrically connecting the Y-axis driving module and the X-axis driving module; the method is characterized in that: the measuring method comprises the following steps:
s1, working before preparation:
s101, arranging a vision camera on the movable plate, uniformly distributing a plurality of second temperature sensors and a plurality of first temperature sensors on the Y-axis beam and the X-axis beam respectively, and electrically connecting the vision camera, the second temperature sensors and the first temperature sensors with the control system;
s102, importing a motion control program simulating a working condition into the control system;
s103, arranging a standard workbench with the same size in a reference working range of the motion system, wherein a plurality of calibration points B arranged in the X-axis direction and the Y-axis direction according to a standard unit interval are arranged on the standard workbench; the calibration points B are arranged in M rows and N columns;
s104, parameter setting: setting a detection temperature range TA = [ T = [) 0 ,T 1 ]Dividing the detection temperature range TA into a plurality of temperature sections TA according to the temperature difference Delta T 1 、TA 2 、……、TA E ；E=( (T 1 -T 0 ) At) -1, setting initial parameters k1=1 and k2=1;
s2, simulating a working condition to perform positioning: simulating working condition running according to the motion control program, continuously acquiring temperature data by the second temperature sensor and the first temperature sensor according to a set frequency, averaging temperature values acquired by the second temperature sensor to obtain TY, and averaging temperature values acquired by the first temperature sensor to obtain TX;
s3, setting Tmax = max { TX, TY }, and Tmin = min { TX, TY };
s4, judging whether Tmax belongs to the temperature range TA k1 If yes, executing step S6, otherwise, executing step S5;
s5, judging whether the running time reaches the set time, if not, continuing simulating the working condition to run, meanwhile, continuously collecting temperature data according to the set frequency, correspondingly updating Tmax and Tmin, and returning to the step S4; if so, ending the test;
s6, the visual camera executes the action of photographing the calibration points, photographs all the calibration points B to obtain a rectangular two-dimensional graph P with M rows and N columns, and each intersection point in the rectangular two-dimensional graph P corresponds to a data value P ij =（Δx ij , Δy ij ），i=1,2,……,M，i=1,2,……,N，Δx ij Indexing point B for visual camera on ith row and jth column ij In the above-acquired image, the center point of the image is relative to the index point B ij The difference in distance in the X-axis direction, i.e. the compensation value for thermal deformation in the X-axis direction, Δ y ij Is the central point of the image relative to the index point B ij A distance difference in the Y-axis direction, i.e., a thermal deformation compensation value in the Y-axis direction;
s7, extracting distance differences of all Tmax in the corresponding motion axial direction in the rectangular two-dimensional graph to obtain the temperature section TA of the axial direction k1 Corresponding heat distortion two-dimensional map PX k1 Or PY k1 ；
S8, judging whether Tmin belongs to the temperature zone TA or not k2 If the Tmin does not belong to the temperature range TA, extracting the distance difference of the Tmin corresponding to the motion axial direction in the rectangular two-dimensional graph to obtain the temperature range TA of the axial direction k2 Corresponding heat distortion two-dimensional map PX k2 Or PY k2 Setting k2= k2+1, and then executing step S9, if not, directly executing step S9;
s9, setting k1= k1+1, judging whether k1 is less than or equal to E, if so, returning to the step S5, and if not, executing the step S10;
s10, judging whether k2 is smaller than or equal to E, if so, executing a step S11, and if not, finishing the measurement;
s11, continuously simulating working condition displacement, continuously acquiring temperature data of a motion axis corresponding to the Tmin according to a set frequency, and correspondingly updating the Tmin;
s12, judging whether Tmin belongs to the temperature zone TA k2 If the temperature difference is within the temperature range TA, a standard point photographing action is executed to obtain a rectangular two-dimensional graph P, and an error value of the motion axis corresponding to the Tmin is extracted from the rectangular two-dimensional graph P to obtain the temperature of the motion axis in the temperature range TA k2 Corresponding heat distortion two-dimensional map PX k2 Or PY k2 Are combined withDetermining k2= k2+1, executing step S13 again, if not, judging whether the running time reaches the set time, if not, returning to step S11, and if so, ending the test;
and S13, judging whether k2 is less than or equal to E, if so, returning to the step S11, and if not, ending the measurement.
The measuring method is mainly applied to the situation that thermal deformation measurement needs to be carried out on two moving axes.
The invention also aims to provide a use method of the thermal deformation two-dimensional measurement method, which comprises the following steps:
s21, measuring to obtain TA (temperature tracking index) of the X axis and the Y axis in each set temperature section by adopting the two-dimensional measuring method for the thermal deformation of the motion system k The internal thermal deformation two-dimensional graph is PX respectively k 、PY k ，k=1,2,……,E；
S22, configuring the thermal deformation two-dimensional graph in the control system in an equal proportion mode with the standard workbench, dividing the thermal deformation two-dimensional graph into a plurality of small rectangular frames through an X axis and a Y axis of a standard unit interval, and correspondingly corresponding four thermal deformation compensation values p1, p2, p3 and p4 at four vertexes of each small rectangular frame; dividing each small rectangular frame into four quadrant areas C1, C2, C3 and C4 by using two vertical center lines in the X-axis direction and the Y-axis direction; the quadrant region C1 corresponds to a thermal deformation compensation value p1, the quadrant region C2 corresponds to a thermal deformation compensation value p2, the quadrant region C3 corresponds to a thermal deformation compensation value p3, and the quadrant region C4 corresponds to a thermal deformation compensation value p4;
s23, the motion system executes a set operation program, and in the process, the temperature sensor monitors the average temperature of the Y axis in real time to be TY and monitors the average temperature of the X axis in real time to be TX;
s24, when TY is more than or equal to T 0 While calling the temperature range TA corresponding to TY k The coordinates of the motion target point correspondingly fall into the thermal deformation two-dimensional graph, the position of a small rectangular frame where the motion target point is located is determined, then a quadrant area where the motion target point is located in the small rectangular frame is further judged, a thermal deformation compensation value of the quadrant area is correspondingly obtained, and then the thermal deformation compensation value is obtainedCompensating the value to the Y coordinate of the motion target point to complete thermal deformation compensation of the Y coordinate;
when TX is greater than or equal to T 0 Then, calling the temperature section TA corresponding to TX k The coordinates of the motion target point correspondingly fall into the thermal deformation two-dimensional graph, the position of a small rectangular frame where the motion target point is located is determined, then a quadrant area of the small rectangular frame where the motion target point is located is further judged, a thermal deformation compensation value of the quadrant area is correspondingly obtained, then the thermal deformation compensation value is compensated into the X coordinate of the motion target point, and thermal deformation compensation of the X coordinate is completed.
Compared with the prior art, the vision-based two-dimensional measurement method for the thermal deformation of the motion system and the use method have the beneficial effects that: the thermal deformation state of the motion system can be simulated according to various different working conditions, and the thermal deformation in a two-dimensional plane can be accurately measured based on vision and a standard working table. In particular, the method comprises the following steps of,
1) Firstly, temperature sensors are uniformly distributed on a beam of a moving shaft, the temperature change of the beam is monitored in real time, a standard workbench is arranged in the working range of a moving system, a plurality of calibration points are arranged on the standard workbench according to a standard unit interval array, and the moving system is enabled to simulate the working condition to perform off-position during measurement, so that the temperature change condition and the temperature change range of the moving shaft can be more accurately reflected, and the subsequent thermal deformation measurement is more accurate and applicable;
2) Secondly, when the thermal deformation is measured, a set detection temperature range is divided into a plurality of continuous temperature sections, when the temperature of the beam rises to a set compensation range, a visual camera arranged at the movable end of the motion system is utilized to sequentially photograph all the calibration points on the standard workbench, so that the deviation of each calibration point in the X-axis direction and the Y-axis direction is obtained, and further an X-axis thermal deformation two-dimensional graph and a Y-axis thermal deformation two-dimensional graph corresponding to each temperature section are formed, so that at any motion target point in the working range of the motion system, corresponding X-axis compensation values and Y-axis compensation values can be found corresponding to different temperature sections, a target object of thermal deformation compensation is more accurate, and the thermal deformation compensation accuracy is higher;
3) Dividing the thermal deformation two-dimensional graph into a plurality of small rectangular frames, wherein each small rectangular frame corresponds to four thermal deformation compensation values, then dividing each small rectangular frame into four quadrant areas, each quadrant area corresponds to a thermal deformation compensation value at a vertex, when the thermal deformation compensation of a moving target point is carried out, the small rectangular frame is located in the thermal deformation two-dimensional graph, the small rectangular frame where the moving target point is located is correspondingly found, the quadrant interval where the moving target point is located is determined, and the corresponding thermal deformation compensation value is determined according to the quadrant areas; the method realizes a comprehensive compensation data graph in a two-dimensional plane, can realize accurate thermal deformation compensation of any moving target point, greatly improves the thermal deformation compensation precision, is simple in testing method, can realize automatic testing, is directly led into a processing program subsequently, and is convenient to apply.
Drawings
FIG. 1 is a schematic diagram of a motion system according to an embodiment of the present invention;
FIG. 2 is a schematic flow chart of a two-dimensional thermal deformation measurement method according to a first embodiment of the present invention;
FIG. 3 is a schematic flow chart of a two-dimensional thermal deformation measurement method according to a second embodiment of the present invention;
FIG. 4 is a schematic flow chart illustrating a method for compensating for thermal deformation according to a second embodiment of the present invention;
FIG. 5 is a schematic structural diagram of quadrant region division in a small rectangular frame in a thermal deformation compensation using method according to an embodiment of the present invention;
the reference signs are:
1-Y axis beam; 2-X axis beam; 3-a movable plate; a 4-Y axis drive module; 5-X axis driving module; 6-a first slide rail; 7-a second slide rail; 8-a visual camera; 9-a first temperature sensor; 10-standard workbench.
Detailed Description
The first embodiment is as follows:
referring to fig. 1-2, the present embodiment is a two-dimensional measurement method for thermal deformation of a motion system based on vision, which is used for measuring a two-dimensional thermal deformation of the motion system, where the motion system includes a pair of Y-axis beams 1 arranged in parallel, an X-axis beam 2 movably arranged on the pair of Y-axis beams 1, a movable plate 3 movably arranged on the X-axis beam 2, a Y-axis driving module 4 driving the X-axis beam 2 to move along a Y-axis, and an X-axis driving module 5 driving the movable plate 3 to move along an X-axis; a first slide rail 6 is arranged on the Y-axis beam 1, a second slide rail 7 is arranged on the X-axis beam 2, and the measuring method comprises the following steps:
s1, working before preparation:
s101, arranging a visual camera 8 on the movable plate 3, and arranging a plurality of first temperature sensors 9 on the X-axis beam 2 along the second slide rail 7; the vision camera 8 is electrically connected with a control system, and the control system is electrically connected with the X-axis driving module 5 and the Y-axis driving module 4;
s102, importing a motion control program simulating a working condition into the control system;
s103, arranging a standard workbench 10 with the same size in a reference working range below the motion system, wherein a plurality of calibration points B arranged in the X-axis direction and the Y-axis direction at standard unit intervals are arranged on the standard workbench 10; in this embodiment, the calibration points B on the standard worktable 10 are arranged in M rows and N columns;
s104, parameter setting: setting a detection temperature range TA = [ T ] 0 ,T 1 ]The detection temperature range TA can be set correspondingly according to the temperature change range of the cross beam in actual work; in addition, the detected temperature range TA is divided into a plurality of temperature sections TA according to the temperature difference Delta T 1 、TA 2 、……、TA E ；E=( (T 1 -T 0 ) ,/Δ T) -1, e.g. TA 1 =[T 0 , T 0 +ΔT），TA 2 =[T 0 +ΔT, T 0 +2ΔT），TA 3 =[T 0 +2ΔT, T 0 +3 Δ T), and so on; then, taking the temperature section as a unit to carry out thermal deformation error compensation measurement in the corresponding section; initial parameter k1=1 is set. The thermal deformation error compensation precision required by the value of the delta T is reasonably set, such as 0.1 to 5 ℃; if the thermal deformation error compensation precision is required to be higher, the delta T can be smaller, such as 0.2 to 2 ℃; if the high precision is not needed, the value can be 2 to 5 ℃;
s2, simulating a working condition to perform positioning: the X-axis driving module 5 and the Y-axis driving module 4 simulate a mounting two-dimensional transfer motion according to the motion control program, meanwhile, the first temperature sensor 9 continuously collects temperature data according to a set frequency, and the temperature values collected by the first temperature sensor 9 are averaged to obtain TX;
s3, judging whether TX belongs to temperature zone TA k1 ；
If yes, executing the step S5 of shooting the calibration point;
if not, executing step S4;
s4, judging whether the running time reaches the set time;
if not, returning to the step S2;
if so, ending the test;
s5, the vision camera 8 executes the action of photographing the calibration points, photographs all the calibration points B to obtain a rectangular two-dimensional graph P with M rows and N columns, and each intersection point in the rectangular two-dimensional graph P corresponds to a data value P ij =（Δx ij , Δy ij ），i=1,2,……,M，i=1,2,……,N，Δx ij Indexing a point B for a vision camera 8 at the ith row and jth column ij In the above-acquired image, the center point of the image is relative to the index point B ij The difference in distance in the X-axis direction, i.e. the compensation value for thermal deformation in the X-axis direction, Δ y ij Is the center point of the image relative to the index point B ij A distance difference in the Y-axis direction, i.e., a thermal deformation compensation value in the Y-axis direction;
s6, extracting distance differences delta X in all X axial directions in the rectangular two-dimensional graph ij Obtaining the temperature TA in the X-axis direction k1 Corresponding thermal deformation two-dimensional map PX k1 。
And S7, setting k1= k1+1, judging whether k1 is less than or equal to E, if so, returning to the step S4, and if not, ending the test.
Example two:
referring to fig. 1 and 3, the present embodiment is a two-dimensional thermal deformation measurement method for a vision-based motion system, which is used for measuring a two-dimensional thermal deformation of the motion system, where the motion system includes a pair of Y-axis beams 1 arranged in parallel, an X-axis beam 2 movably arranged on the pair of Y-axis beams 1, a movable plate 3 movably arranged on the X-axis beam 2, a Y-axis driving module 4 for driving the X-axis beam 2 to move along a Y-axis, and an X-axis driving module 5 for driving the movable plate 3 to move along an X-axis; the Y-axis beam 1 is provided with a first slide rail 6, the X-axis beam 2 is provided with a second slide rail 7, and the measuring method comprises the following steps:
s1, working before preparation:
s101, arranging a vision camera 8 on a movable plate 3, arranging second temperature sensors (not marked in the figure) on a Y-axis beam 1 along a first slide rail 6, and arranging a plurality of first temperature sensors 9 on an X-axis beam 2 along a second slide rail 7; the vision camera 8 is electrically connected with a control system, and the control system is electrically connected with the X-axis driving module 5 and the Y-axis driving module 4;
s102, importing a motion control program simulating a working condition into the control system;
s103, arranging a standard workbench 10 in equal proportion in a reference working range below the motion system, wherein a plurality of calibration points B arranged in the X-axis direction and the Y-axis direction at a standard unit interval are arranged on the standard workbench 10; in this embodiment, the calibration points B on the standard worktable 10 are arranged in M rows and N columns;
s104, parameter setting: setting a detection temperature range TA = [ T = [) 0 ,T 1 ]The detection temperature range TA can be correspondingly set according to the temperature change range of the beam in actual work; in addition, the detected temperature range TA is divided into a plurality of temperature sections TA according to the temperature difference Delta T 1 、TA 2 、……、TA E ；E=( (T 1 -T 0 ) ,/Δ T) -1, e.g. TA 1 =[T 0 , T 0 +ΔT），TA 2 =[T 0 +ΔT, T 0 +2ΔT），TA 3 =[T 0 +2ΔT, T 0 +3 Δ T), and so on; subsequently, the thermal deformation error compensation measurement in the corresponding section is carried out by taking the temperature section as a unit; initial parameters k1=1 and k2=1 are set. The thermal deformation error compensation precision required by the value of the delta T is reasonably set, such as 0.1 to 5 ℃; if the thermal deformation error compensation precision is higher, the value of delta T can be smaller by oneSome, such as 0.2 to 2 ℃; if such high precision is not required, the temperature can be set to 2 to 5 ℃.
S2, simulating a working condition to perform positioning: the X-axis driving module 5 and the Y-axis driving module 4 simulate a two-dimensional transfer motion of mounting according to the motion control program, meanwhile, the first temperature sensor 9 and the second temperature sensor continuously collect temperature data according to a set frequency, the temperature values collected by the second temperature sensor are averaged to obtain TY, and the temperature values collected by the first temperature sensor 9 are averaged to obtain TX.
S3, comparing TY with TX to determine a main guide shaft, if TX is large, taking an X shaft as a main guide to carry out thermal deformation measurement, setting Tmax = TX and Tmin = TY, otherwise, taking a Y shaft as a main guide to carry out thermal deformation measurement, and setting Tmax = TY and Tmin = TX; that is, tmax = max { TX, TY } and Tmin = min { TX, TY } are set.
S4, judging whether Tmax belongs to the temperature range TA k1 ；
If yes, executing the step S6 of shooting the calibration point;
if not, go to step S5.
S5, judging whether the running time reaches the set time;
if not, continuing simulating the working condition to perform position running, continuously acquiring temperature data according to a set frequency, correspondingly updating Tmax and Tmin, and then returning to the step S4;
if so, the test is ended.
The design of step S5 mainly considers that the temperature change of the beam may only reach a certain value at the highest, and the value is smaller than the lower limit temperature value of the next temperature zone, so that the temperature change of the beam cannot enter the next temperature zone all the time no matter how long the running is performed, and therefore, in order to avoid performing excessive invalid running, the measurement is ended.
If Tmax = TX, updating Tmax to be the average value of the temperature data measured continuously by the first temperature sensor 9 on the X-axis beam 2;
if Tmax = TY, tmax is updated to the average value of the temperature data continuously measured by the second temperature sensor on the Y-axis beam 1.
S6, visionThe vision camera 8 executes the action of taking pictures of the calibration points, and takes pictures of all the calibration points B to obtain a rectangular two-dimensional graph P with M rows and N columns, wherein each intersection point in the rectangular two-dimensional graph P corresponds to a data value P ij =（Δx ij , Δy ij ），i=1,2,……,M，i=1,2,……,N，Δx ij Index point B for vision camera 8 at ith row and jth column ij In the above-acquired image, the center point of the image is relative to the index point B ij The difference in distance in the X-axis direction, i.e. the compensation value for thermal deformation in the X-axis direction, Δ y ij Is the central point of the image relative to the index point B ij And the distance difference in the Y-axis direction is the thermal deformation compensation value in the Y-axis direction.
Specifically, the calibration point photographing action has a first mode and a second mode;
the first mode is as follows: the vision camera 8 starts from the original point position of the standard workbench 11, mainly takes the X axis, starts from the first X axis, the Y axis driving module 4 drives the X axis beam 2 to move to the first X axis position, then the X axis driving module 5 drives the movable plate 3 to sequentially move to the position above the calibration point B on the X axis, and the calibration point B is sequentially photographed through the vision camera 8; then the Y-axis driving module 4 drives the X-axis beam 2 to move to the next X-axis position, and in the same way, the vision camera 8 takes pictures of the calibration points B on the next X-axis in sequence under the driving of the X-axis driving module 5, and by analogy, the pictures of all the calibration points B are taken in sequence; when Tmax = TX, executing a calibration point photographing action by adopting the mode I;
the second mode is as follows: the vision camera 8 starts from the original point position of the standard workbench 11, mainly takes the Y axis, starts from the first Y axis, the X-axis driving module 5 drives the movable plate 3 to move to the first Y axis position, then the Y-axis driving module 4 drives the X-axis beam 2 to sequentially move to the position above the calibration point B on the Y axis, and the calibration point B is sequentially photographed through the vision camera 8; then the X-axis driving module 5 drives the movable plate 3 to move to the next Y-axis position, and similarly, the vision camera 8 takes pictures of the calibration points B on the next Y-axis in sequence under the driving of the Y-axis driving module 4, and by parity of reasoning, the pictures of all the calibration points B are taken in sequence; and when the Tmax = TY, executing the calibration point photographing action by adopting the second mode.
S7, extracting distance differences of all Tmax corresponding to the motion axial direction in the rectangular two-dimensional graph to obtain the temperature section TA of the axial direction k1 Corresponding heat distortion two-dimensional map PX k1 Or PY k1 ；
If Tmax = TX, extracting the distance difference Δ X in all X axes in the rectangular two-dimensional map to obtain the temperature section TA of the X axis k1 Corresponding heat distortion two-dimensional map PX k1 ；
If Tmax = TY, extracting the distance difference delta Y of all Y axes in the rectangular two-dimensional graph to obtain the temperature section TA of the Y axis k1 Corresponding heat distortion two-dimensional graph PY k1 。
S8, judging whether Tmin belongs to the temperature zone TA or not k2 ；
If the Tmin does not belong to the temperature range TA, extracting the distance difference of the Tmin corresponding to the motion axial direction in the rectangular two-dimensional graph to obtain the temperature range TA of the axial direction k2 Corresponding heat distortion two-dimensional map PX k2 Or PY k2 Setting k2= k2+1, and executing step S9;
if Tmin = TX, extracting the distance differences of all X-axis directions in the rectangular two-dimensional graph to obtain the TA of the temperature section of the X-axis k2 Corresponding heat distortion two-dimensional map PX k2 ；
If Tmin = TY, extracting the distance differences of all Y axes in the rectangular two-dimensional graph to obtain the TA of the temperature section of the Y axis k2 Corresponding heat distortion two-dimensional graph PY k2 ；
If not, step S9 is executed directly.
And S9, setting k1= k1+1, judging whether k1 is less than or equal to E, if so, returning to the step S5, and if not, executing the step S10.
And S10, judging whether k2 is less than or equal to E, if so, executing a step S11, and if not, finishing the measurement.
The design of the steps S9 and S10 is to consider that if the thermal deformation measurement in all temperature zones is not completed by the motion axis corresponding to Tmax, the run needs to be continued, and after the temperature of the motion axis is increased to the next temperature zone, the thermal deformation measurement of the next temperature zone is performed; if the moving shaft has already finished measuring the thermal deformation in all the temperature zones, it needs to further judge whether the moving shaft corresponding to Tmin has already finished measuring the thermal deformation in all the temperature zones, if not, it needs to run, and after the temperature of the moving shaft corresponding to Tmin rises to the next temperature zone, it will measure the thermal deformation of the next temperature zone.
S11, continuously simulating working condition displacement, continuously acquiring temperature data of a movement axis corresponding to the Tmin according to a set frequency, and correspondingly updating the Tmin;
s12, judging whether Tmin belongs to the temperature section TA or not k2 ；
If the temperature of the moving axis in the temperature zone TA is within the preset temperature range, executing a calibration point photographing action to obtain a rectangular two-dimensional graph P, extracting an error value of the Tmin corresponding to the moving axis in the rectangular two-dimensional graph P, and obtaining the temperature of the moving axis in the temperature zone TA k2 Corresponding heat distortion two-dimensional map PX k2 Or PY k2 And setting k2= k2+1, and then executing step S13;
if not, judging whether the running time reaches the set time, if not, returning to the step S11, and if so, ending the test.
And S13, judging whether k2 is less than or equal to E, if so, returning to the step S11, and if not, ending the measurement.
After the motion system simulates the working condition to run for a period of time, because the executed motions are repeated, if TX is detected to be greater than TY, the TX is always greater than TY after the average value of temperature data continuously collected by the first temperature sensor 9 and the second temperature sensor is obtained; therefore, after the thermal deformation of the X-axis in each temperature zone is measured, the thermal deformation of the Y-axis in each temperature zone may not be measured yet, and the temperature of the Y-axis does not reach the same temperature zone preferentially than the X-axis, and is at most in one temperature zone simultaneously with the X-axis; therefore, after the thermal deformation of the X-axis in each temperature zone is measured, it is necessary to determine whether the thermal deformation of the Y-axis in each temperature zone is measured, and if not, the simulation of the working condition displacement is continued.
Referring to fig. 4 to 5, the present embodiment further provides a method for using the two-dimensional measurement method for thermal deformation of a motion system, including:
s21, measuring to obtain TA (temperature advance) of the X axis and the Y axis in each set temperature section by adopting the thermal deformation two-dimensional measurement method of the motion system k The internal thermal deformation two-dimensional map is PX k 、PY k ，k=1,2,……,E；
S22, configuring the thermal deformation two-dimensional graph in the control system in a form of equal proportion to the standard workbench 10, dividing the thermal deformation two-dimensional graph into a plurality of small rectangular frames through an X axis and a Y axis of a standard unit interval, wherein four thermal deformation compensation values p1, p2, p3 and p4 correspond to four vertexes of each small rectangular frame; dividing each small rectangular frame into four quadrant areas C1, C2, C3 and C4 by using two vertical center lines in the X-axis direction and the Y-axis direction; the quadrant region C1 corresponds to a thermal deformation compensation value p1, the quadrant region C2 corresponds to a thermal deformation compensation value p2, the quadrant region C3 corresponds to a thermal deformation compensation value p3, and the quadrant region C4 corresponds to a thermal deformation compensation value p4;
s23, the motion system executes a set operation program, in the process, the first sensor group 9 monitors the average temperature TY of the Y axis in real time, and the second sensor group monitors the average temperature TX of the X axis in real time;
s24, when TY is more than or equal to T 0 Calling the temperature range TA corresponding to TY k Determining the position of a small rectangular frame where the moving target point is located, further judging a quadrant area in the small rectangular frame where the moving target point is located, correspondingly acquiring a thermal deformation compensation value of the quadrant area, and compensating the thermal deformation compensation value into a Y coordinate of the moving target point to finish thermal deformation compensation of the Y coordinate;
similarly, when TX is greater than or equal to T 0 Then, the temperature zone TA corresponding to TX is called k The coordinates of the motion target point are correspondingly fallen into the thermal deformation two-dimensional graph, the position of a small rectangular frame where the motion target point is located is determined, and then the quadrant area of the small rectangular frame where the motion target point is located is further judgedAnd correspondingly acquiring a thermal deformation compensation value of the quadrant region, and then compensating the thermal deformation compensation value to the X coordinate of the motion target point to finish the thermal deformation compensation of the X coordinate.
In the present embodiment, in step S21, each of the first set temperature sections TA may be set k Internal thermal deformation two-dimensional graph PX k And a thermally deformed two-dimensional map PY k Combining to obtain each set temperature zone TA k Internally biaxial thermally deformable two-dimensional pattern PXY k . When used in step S24, the two-dimensional pattern PXY of the biaxial thermal deformation in the temperature section is directly called correspondingly k And acquiring a corresponding X-axis compensation value or a corresponding Y-axis compensation value.
What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention.
Claims (8)
1. A vision-based two-dimensional measurement method for thermal deformation of a motion system is used for measuring the two-dimensional thermal deformation of the motion system, and the motion system comprises a Y-axis beam, an X-axis beam, a movable plate, a Y-axis driving module for driving the X-axis beam to move on the Y-axis beam, an X-axis driving module for driving the movable plate to move on the X-axis beam, and a control system for electrically connecting the Y-axis driving module and the X-axis driving module; the method is characterized in that: the measuring method comprises the following steps:
s1, working before preparation:
s101, arranging a visual camera on the movable plate, uniformly distributing a plurality of temperature sensors on a beam, and electrically connecting the visual camera and the temperature sensors with the control system;
s102, importing a motion control program simulating a working condition into the control system;
s103, arranging a standard workbench with the same size in a reference working range of the motion system, wherein a plurality of calibration points B arranged in the X-axis direction and the Y-axis direction according to a standard unit interval are arranged on the standard workbench; the calibration points B are arranged in M rows and N columns;
s104, parameter setting: setting a detection temperature range TA = [ T = [) 0 ,T 1 ]Dividing the detection temperature range TA into a plurality of temperature sections TA according to the temperature difference Delta T 1 、TA 2 、……、TA E ；E=( (T 1 -T 0 ) 1,/Δ T), setting an initial parameter k "=1;
s2, simulating a working condition to perform positioning: simulating working condition running according to the motion control program, continuously acquiring temperature data by the temperature sensor according to a set frequency, and averaging temperature values acquired by the temperature sensor to obtain T ";
s3, judging whether T' belongs to the temperature section TA k” If yes, executing step S5, otherwise, executing step S4;
s4, judging whether the running time reaches the set time, if not, returning to the step S2, and if so, ending the test;
s5, the visual camera executes the action of photographing the calibration points, photographs all the calibration points B to obtain a rectangular two-dimensional graph P with M rows and N columns, and each intersection point in the rectangular two-dimensional graph P corresponds to a data value P ij =（Δx ij , Δy ij ），i=1,2,……,M，i=1,2,……,N，Δx ij Index point B for visual camera on ith row and jth column ij In the above-acquired image, the center point of the image is relative to the index point B ij The difference in distance in the X-axis direction, i.e. the compensation value for thermal deformation in the X-axis direction, Δ y ij Is the central point of the image relative to the index point B ij A distance difference in the Y-axis direction, i.e., a thermal deformation compensation value in the Y-axis direction;
and S6, setting k "= k" +1, judging whether k "is smaller than or equal to E, if so, returning to the step S4, and if not, ending the test.
2. The vision-based two-dimensional measurement method of thermal deformation of a kinematic system of claim 1, characterized in that: the calibration point photographing action has a first mode and a second mode;
the first mode is as follows: the vision camera starts from the original point position of the standard workbench, mainly takes an X axis, starts from a first X axis, the Y-axis driving module drives the X-axis beam to move to the first X axis position, then the X-axis driving module drives the movable plates to sequentially move to positions above a calibration point B on the X axis, and the calibration point B is sequentially photographed through the vision camera; then the Y-axis driving module drives the X-axis beam to move to the next X-axis position, and in the same way, the visual camera sequentially takes pictures of the calibration points B on the next X-axis under the driving of the X-axis driving module, and by analogy, the pictures of all the calibration points B are sequentially taken;
the second mode is as follows: the vision camera starts from the original point position of the standard workbench, mainly takes a Y axis as a main point, and starts from a first Y axis, the X-axis driving module drives the movable plate to move to the first Y axis position, then the Y-axis driving module drives the X-axis cross beam to sequentially move to the position above a calibration point B on the Y axis, and the calibration point B is sequentially photographed through the vision camera; and then the X-axis driving module drives the movable plate to move to the next Y-axis position, and similarly, the vision camera sequentially takes pictures of the calibration points B on the next Y-axis under the driving of the Y-axis driving module, and by parity of reasoning, the pictures of all the calibration points B are sequentially taken.
3. The vision-based two-dimensional measurement method of thermal deformation of a kinematic system of claim 1, characterized in that: in the step S5, all Δ x of the rectangular two-dimensional map P are extracted ij Then constitute a temperature section TA in the X-axis direction k” Thermal deformation two-dimensional map PX k” (ii) a Extracting all delta y of the rectangular two-dimensional graph P ij Then constitute a temperature section TA in the Y-axis direction k” Thermal deformation two-dimensional graph PY of k” 。
4. A vision-based two-dimensional measurement method for thermal deformation of a motion system is used for measuring the two-dimensional thermal deformation of the motion system, and the motion system comprises a Y-axis beam, an X-axis beam, a movable plate, a Y-axis driving module for driving the X-axis beam to move on the Y-axis beam, an X-axis driving module for driving the movable plate to move on the X-axis beam, and a control system for electrically connecting the Y-axis driving module and the X-axis driving module; the method is characterized in that: the measuring method comprises the following steps:
s1, working before preparation:
s101, arranging a vision camera on the movable plate, uniformly distributing a plurality of second temperature sensors and first temperature sensors on the Y-axis beam and the X-axis beam respectively, and electrically connecting the vision camera, the second temperature sensors and the first temperature sensors with the control system;
s102, importing a motion control program simulating a working condition into the control system;
s103, arranging a standard workbench with the same size in a reference working range of the motion system, wherein a plurality of calibration points B arranged in the X-axis direction and the Y-axis direction according to a standard unit interval are arranged on the standard workbench; the calibration points B are arranged in M rows and N columns;
s104, parameter setting: setting a detection temperature range TA = [ T ] 0 ,T 1 ]Dividing the detection temperature range TA into a plurality of temperature sections TA according to the temperature difference Delta T 1 、TA 2 、……、TA E ；E=( (T 1 -T 0 ) At) -1, setting initial parameters k1=1 and k2=1;
s2, simulating a working condition to perform positioning: simulating working condition running according to the motion control program, continuously acquiring temperature data by the second temperature sensor and the first temperature sensor according to a set frequency, averaging temperature values acquired by the second temperature sensor to obtain TY, and averaging temperature values acquired by the first temperature sensor to obtain TX;
s3, setting Tmax = max { TX, TY }, and Tmin = min { TX, TY };
s4, judging whether Tmax belongs to the temperature range TA k1 If yes, executing step S6, otherwise, executing step S5;
s5, judging whether the running time reaches the set time, if not, continuing simulating the working condition to run, continuously acquiring temperature data according to the set frequency, correspondingly updating Tmax and Tmin, and returning to the step S4; if so, ending the test;
s6, the visual camera executes the action of photographing the calibration points, photographs all the calibration points B to obtain a rectangular two-dimensional graph P with M rows and N columns, and each intersection point in the rectangular two-dimensional graph P corresponds to a data value P ij =（Δx ij , Δy ij ），i=1,2,……,M，i=1,2,……,N，Δx ij Index point B for visual camera on ith row and jth column ij In the above-acquired image, the center point of the image is relative to the index point B ij The difference in distance in the X-axis direction, i.e. the compensation value for thermal deformation in the X-axis direction, Δ y ij Is the center point of the image relative to the index point B ij A distance difference in the Y-axis direction, i.e., a thermal deformation compensation value in the Y-axis direction;
s7, extracting distance differences of all Tmax corresponding to the motion axial direction in the rectangular two-dimensional graph to obtain the temperature section TA of the axial direction k1 Corresponding heat distortion two-dimensional map PX k1 Or PY k1 ；
S8, judging whether Tmin belongs to the temperature zone TA or not k2 If the Tmin is the temperature range TA, extracting the distance difference of the corresponding motion axial direction of all Tmin in the rectangular two-dimensional graph to obtain the temperature range TA of the axial direction k2 Corresponding heat distortion two-dimensional map PX k2 Or PY k2 Setting k2= k2+1, and then executing step S9, if not, directly executing step S9;
s9, setting k1= k1+1, judging whether k1 is less than or equal to E, if so, returning to the step S5, and if not, executing the step S10;
s10, judging whether k2 is smaller than or equal to E, if so, executing a step S11, and if not, finishing the measurement;
s11, continuously simulating working condition displacement, continuously acquiring temperature data of a motion axis corresponding to the Tmin according to a set frequency, and correspondingly updating the Tmin;
s12, judging whether Tmin belongs to the temperature zone TA k2 If it belongs, then execute the calibration point photographing motionObtaining a rectangular two-dimensional graph P, extracting an error value of the Tmin corresponding to the motion axis in the rectangular two-dimensional graph P to obtain a temperature section TA of the motion axis k2 Corresponding thermal deformation two-dimensional map PX k2 Or PY k2 Setting k2= k2+1, executing step S13, if not, determining whether the running time reaches the set time, if not, returning to step S11, and if so, ending the test;
and S13, judging whether k2 is less than or equal to E, if so, returning to the step S11, and if not, ending the measurement.
5. The vision-based two-dimensional measurement method of thermal deformation of a kinematic system of claim 4, characterized in that: the calibration point photographing action has a first mode and a second mode;
the first mode is as follows: the vision camera starts from the original point position of the standard workbench, mainly takes an X axis, starts from a first X axis, the Y-axis driving module drives the X-axis beam to move to the first X axis position, then the X-axis driving module drives the movable plates to sequentially move to positions above a calibration point B on the X axis, and the calibration point B is sequentially photographed through the vision camera; then the Y-axis driving module drives the X-axis beam to move to the next X-axis position, and similarly, the vision camera sequentially takes pictures of the calibration points B on the next X-axis under the driving of the X-axis driving module, and the like, so that the pictures of all the calibration points B are sequentially taken;
the second mode is as follows: the vision camera starts from the original point position of the standard workbench, mainly takes the Y axis, starts from the first Y axis, the X-axis driving module drives the movable plate to move to the first Y axis position, then the Y-axis driving module drives the X-axis cross beam to sequentially move to the position above the calibration point B on the Y axis, and the calibration point B is sequentially photographed through the vision camera; and then the X-axis driving module drives the movable plate to move to the next Y-axis position, and similarly, the visual camera sequentially takes pictures of the calibration points B on the next Y-axis under the driving of the Y-axis driving module, and by analogy, the pictures of all the calibration points B are sequentially taken.
6. The vision-based two-dimensional measurement method of thermal deformation of a kinematic system of claim 5, characterized in that: when Tmax = TX, executing a calibration point photographing action by adopting the mode I; and when the Tmax = TY, executing the calibration point photographing action by adopting the second mode.
7. The use method of the two-dimensional measurement method for the thermal deformation is characterized by comprising the following steps: it includes:
s21, measuring the X axis and the Y axis in each set temperature section TA by adopting the two-dimensional measuring method for the thermal deformation of the motion system as claimed in claim 1 or 4 k The internal thermal deformation two-dimensional map is PX k 、PY k ，k=1,2,……,E；
S22, configuring the thermal deformation two-dimensional graph in the control system in an equal proportion mode with the standard workbench, dividing the thermal deformation two-dimensional graph into a plurality of small rectangular frames through an X axis and a Y axis of a standard unit interval, and correspondingly corresponding four thermal deformation compensation values p1, p2, p3 and p4 at four vertexes of each small rectangular frame; dividing each small rectangular frame into four quadrant areas C1, C2, C3 and C4 by using two vertical central lines in the X-axis direction and the Y-axis direction; the quadrant region C1 corresponds to a thermal deformation compensation value p1, the quadrant region C2 corresponds to a thermal deformation compensation value p2, the quadrant region C3 corresponds to a thermal deformation compensation value p3, and the quadrant region C4 corresponds to a thermal deformation compensation value p4;
s23, the motion system executes a set operation program, and in the process, the temperature sensor monitors the average temperature of the Y axis in real time to be TY and monitors the average temperature of the X axis in real time to be TX;
s24, when TY is greater than or equal to T 0 Calling the temperature range TA corresponding to TY k The coordinates of the motion target point are correspondingly dropped into the thermal deformation two-dimensional graph, the position of a small rectangular frame where the motion target point is located is determined, then a quadrant area where the motion target point is located in the small rectangular frame is further judged, a thermal deformation compensation value of the quadrant area is correspondingly obtained, and then the thermal deformation is carried outCompensating the shape compensation value into the Y coordinate of the motion target point to complete thermal deformation compensation of the Y coordinate;
when TX is greater than or equal to T 0 Then, the temperature zone TA corresponding to TX is called k The coordinates of the motion target point correspondingly fall into the thermal deformation two-dimensional graph, the position of a small rectangular frame where the motion target point is located is determined, then a quadrant area of the small rectangular frame where the motion target point is located is further judged, a thermal deformation compensation value of the quadrant area is correspondingly obtained, then the thermal deformation compensation value is compensated into the X coordinate of the motion target point, and thermal deformation compensation of the X coordinate is completed.
8. Use of the two-dimensional measurement method of thermal deformation according to claim 7, characterized in that: in said S21, every one set temperature section TA k Internal thermal deformation two-dimensional graph PX k And a thermally deformed two-dimensional map PY k Combining to obtain each set temperature zone TA k Internally biaxial thermally deformable two-dimensional pattern PXY k (ii) a When the S24 is called, the two-axis thermal deformation two-dimensional graph PXY in the temperature section is directly called correspondingly k And acquiring a corresponding X-axis compensation value or a corresponding Y-axis compensation value for compensation.
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