CN115657202B - Silicon-based wavelength demultiplexing device based on grating auxiliary reverse coupling - Google Patents
Silicon-based wavelength demultiplexing device based on grating auxiliary reverse coupling Download PDFInfo
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- CN115657202B CN115657202B CN202211294923.3A CN202211294923A CN115657202B CN 115657202 B CN115657202 B CN 115657202B CN 202211294923 A CN202211294923 A CN 202211294923A CN 115657202 B CN115657202 B CN 115657202B
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Abstract
A silicon-based wavelength demultiplexing device based on grating auxiliary reverse coupling comprises N sequentially connected wave-dividing assemblies, wherein adjacent wave-dividing assemblies are connected through strip-shaped silicon waveguides with the same waveguide width and height; each of the front N-1 wave-dividing assemblies consists of a Bragg grating waveguide and a reverse coupling waveguide which are compounded by silicon-silicon dioxide, and the last 1 wave-dividing assembly is a straight strip-shaped silicon waveguide; the front N-1 wave-dividing components can realize the separation of single wavelength and other wavelengths and output from the reverse coupling waveguide, and the front N-1 wave-dividing components have different wavelengths; the multiplexing device is entirely encased in a silica cladding. The invention has strong expansibility, and the number of the channels can be continuously overlapped according to the use requirement, so the invention has the characteristics of easy expansion, compact structure, easy integration and the like.
Description
Technical Field
The invention relates to the field of silicon-based photoelectron chips, in particular to a silicon-based wavelength demultiplexing device based on grating auxiliary reverse coupling.
Background
The optical wavelength division multiplexing technology has the basic principle that optical signals with different wavelengths are combined at a transmitting end and coupled to the same optical fiber on an optical cable for transmission, and the combined signals with different wavelengths are separated at a receiving end and further processed to recover the original signals and then sent to different terminals. The wavelength division multiplexing technology has very important significance for expanding and upgrading the network, developing broadband service, excavating the optical fiber bandwidth capacity, realizing ultra-high-speed communication and the like.
At the receiving end of the optical interconnection system, the demultiplexer which decomposes the multi-wavelength signal sent by the same transmission optical fiber into individual wavelengths for output is a key component, and the performance of the demultiplexer has a decisive effect on the transmission quality of the system. The common on-chip integrated demultiplexer mainly comprises an array waveguide grating, a cascade MZI, a micro-ring demultiplexer and the like, wherein the array waveguide grating has the advantages of convenient design, low manufacturing cost, excellent performance and very high integration level, but has higher environmental sensitivity, temperature, humidity and the like in the working environment can influence the refractive index of the material, and the number of usable channels is limited; compared with an array waveguide grating and an echelle grating, the cascade MZI has very flat spectrum and smaller insertion loss, but occupies larger chip area; the micro-ring demultiplexer is very small in volume but is very sensitive to ambient temperature and therefore it is often necessary to adjust the center wavelength by thermal tuning.
Disclosure of Invention
In order to overcome the challenges of the traditional on-chip integrated demultiplexer, the invention provides a silicon-based wavelength demultiplexing device based on grating-assisted reverse coupling.
The technical scheme adopted by the invention is as follows: a silicon-based wavelength demultiplexing device based on grating auxiliary reverse coupling comprises N sequentially connected wave-dividing assemblies, wherein adjacent wave-dividing assemblies are connected through strip-shaped silicon waveguides with the same waveguide width and height; each of the front N-1 wave-dividing assemblies consists of a Bragg grating waveguide and a reverse coupling waveguide which are compounded by silicon-silicon dioxide, and the last 1 wave-dividing assembly is a straight strip-shaped silicon waveguide; the front N-1 wave-dividing components can realize the separation of single wavelength and other wavelengths and output from the reverse coupling waveguide, and the front N-1 wave-dividing components have different wavelengths; the multiplexing device is entirely encased in a silica cladding.
Further, the silicon-silicon dioxide composite Bragg grating waveguide provides a reverse coupling perturbation propagation constant, the silicon-silicon dioxide composite Bragg grating waveguide comprises a strip-shaped straight silicon waveguide I, a convex strip-shaped straight silicon waveguide II is embedded into the side surface of the strip-shaped straight silicon waveguide I, and two ends of the strip-shaped straight silicon waveguide I grow out of the strip-shaped straight silicon waveguide II; the side surface of the strip-shaped straight silicon waveguide II is embedded with a strip-shaped silicon dioxide structure which is periodically arranged along the length direction of the strip-shaped straight silicon waveguide II, and the outer surface of the strip-shaped straight silicon waveguide II is flush with the outer surface of the strip-shaped silicon dioxide structure;
the height of the whole silicon-silicon dioxide composite Bragg grating waveguide is H and is equal everywhere, and the waveguide width of the whole silicon-silicon dioxide composite Bragg grating waveguide is equal everywhere;
the two ends of the strip-shaped straight silicon waveguide I, which are longer than the strip-shaped straight silicon waveguide II, are respectively called an input end and an output end of the silicon-silicon dioxide composite Bragg grating waveguide, and the widths of the input end and the output end of the silicon-silicon dioxide composite Bragg grating waveguide are W1;
the whole area of the strip-shaped straight silicon waveguide I embedded with the straight silicon waveguide II and the strip-shaped silicon dioxide structure is called a Bragg grating area of the silicon-silicon dioxide composite Bragg grating waveguide, wherein the Bragg grating area is provided with a silicon-silicon dioxide composite part, namely a part embedded with the strip-shaped silicon dioxide structure, the width of the silicon part is W2, the width of the silicon dioxide part is W3, and W2 is smaller than W1, and the sum of W2 and W3 is larger than W1; the Bragg grating region is provided with a part which is not provided with a silicon-silicon dioxide composite structure, namely a part which is not embedded with a strip-shaped silicon dioxide structure, the width of the silicon part is W4, and W4 is equal to the sum of W2 and W3; the Bragg grating areas are in different wavelength branching components, grating periods are different, and widths W1, W2, W3 and W4 are the same.
Further, the reverse coupling waveguide performs reverse coupling output of a single wavelength, the width of the reverse coupling waveguide is W0, and the maximum distance between the reverse coupling waveguide and the Bragg grating waveguide compounded by silicon-silicon dioxide is W5; the Bragg grating area is in different wave-dividing assemblies, W0 and W5 are unchanged, the height of the Bragg grating area is H, and the Bragg grating area is equal to the height of the Bragg grating waveguide compounded by silicon-silicon dioxide.
The working principle of the invention is as follows: the grating auxiliary reverse coupling refers to a structure which enables a positive waveguide mode and a negative waveguide mode which cannot generate coupling originally due to phase mismatch to meet a phase matching condition again by means of grating perturbation, so that coupling between the two waveguide modes is realized. By changing the period length of the Bragg grating and further changing the grating vector, the designed wave band can meet the wave vector matching condition to obtain reverse coupling output.
The beneficial effects of the invention are as follows: (1) a greater number of channels may be deployed. The principle of the traditional array waveguide grating is that light delayed by waveguides with different lengths interfere in a Roland circle which can be regarded as a slab waveguide to realize demultiplexing with different wavelengths, the length difference of adjacent delayed waveguides needs to strictly meet the requirement of a grating equation, but due to processing errors of the width of the delayed waveguides and non-uniformity of actual processing of the thickness of the waveguides, the delayed waveguides lead to drift of the center wavelength of a channel, so that the larger center wavelength errors can be introduced by excessive number of channels. The invention carries out reverse coupling and output aiming at the design wavelength based on the phase matching condition by means of the perturbation transmission constant generated by the grating, thereby realizing multichannel demultiplexing. The invention can continuously add new wave-dividing components at the downstream of the device without the help of interference effect of different phase delays, thereby realizing the demultiplexing of more channels.
(2) The method can be flexibly deployed in the layout and has the characteristics of compact structure and easy integration. The conventional cascaded MZI array demultiplexer is composed of a plurality of directional couplers with different splitting ratios and delay lines with different lengths, and because the paths of the two arms in each stage in the device are required to follow strict phase difference distribution based on the interference effect of light in the directional couplers, and the relative positions of the two arms and the front stage and the rear stage are fixed, the layout has smaller flexibility, and the layout occupies a larger area when the layout area is limited. The order of the wave division of each stage and the front and back stages can be changed, and under the condition that the silicon-silicon dioxide composite Bragg grating waveguide is guaranteed to be connected, the part with the grating inside can be flexibly distributed at all parts of the layout, so that the invention has the characteristics of flexible deployment in the layout, compact structure and easy integration.
Drawings
Fig. 1 is a top view of the present invention.
Fig. 2 is a schematic cross-sectional view of a section of a silicon-silicon dioxide composite bragg grating waveguide in accordance with the present invention.
Fig. 3 is a schematic of the workflow of the present invention.
Fig. 4 is a graph of simulation results of the present invention.
Reference numerals illustrate: 1. a first wavelength division component; 2. a second wavelength demultiplexing component; 3. a third wavelength division component; 4. a fourth wavelength division component; 5. a fifth wavelength division component; 6. and a sixth wavelength demultiplexing component.
Detailed Description
The following description of the embodiments of the present invention will be made more apparent and fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that, as the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," and the like are used for convenience in describing the present invention and simplifying the description based on the azimuth or positional relationship shown in the drawings, it should not be construed as limiting the present invention, but rather should indicate or imply that the devices or elements referred to must have a specific azimuth, be constructed and operated in a specific azimuth. Furthermore, the terms "first," "second," "third," and the like, as used herein, are used for descriptive purposes only and are not to be construed as indicating or implying any relative importance.
In the description of the present invention, it should be noted that unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Referring to the schematic illustration of fig. 1, a silicon-based wavelength demultiplexing device based on grating-assisted reverse coupling is formed by six wavelength branching units, namely a first wavelength branching unit 1, a second wavelength branching unit 2, a third wavelength branching unit 3, a fourth wavelength branching unit 4, a fifth wavelength branching unit 5 and a sixth wavelength branching unit 6, each of which is connected by a strip-shaped silicon waveguide with the same waveguide width and height, so as to separate a single wavelength from other wavelengths, and output from the reverse coupling waveguide, and among all the wavelength branching units, the first wavelength branching unit 1, the second wavelength branching unit 2, the third wavelength branching unit 3, the fourth wavelength branching unit 4 and the fifth wavelength branching unit 5 are formed by a bragg grating waveguide and a reverse coupling waveguide of silicon-silicon dioxide composite, and the sixth wavelength branching unit 6 is a straight strip-shaped silicon waveguide, and the whole structure of the demultiplexing device is wrapped in a silicon dioxide cladding.
Referring to the schematic illustration of fig. 2, the silicon-silicon dioxide composite bragg grating waveguide is used to provide a perturbation propagation constant of reverse coupling, and is formed by embedding a protruding stripe-shaped straight silicon waveguide in the stripe-shaped straight silicon waveguide and embedding a stripe-shaped periodic silicon dioxide structure, and as a whole, the height of the silicon-silicon dioxide composite bragg grating waveguide is H and is equal everywhere, the waveguide width of the silicon-silicon dioxide composite bragg grating waveguide is equal everywhere, as seen in section 1, the bragg grating waveguide is a stripe-shaped straight silicon waveguide with a width of W1 at the input and output ends, as seen in section 2, the bragg grating waveguide is a silicon portion with a width of W2, a silicon portion with a width of W3, and the sum of W2 and W3 is greater than W1, as seen in section 3, the bragg grating is not provided with a silicon-silicon dioxide composite portion in the bragg grating region, and is a silicon portion width of W4, and is equal to W2 and W3, and the bragg grating is different in the W1, W4 and W3, and the bragg grating is different in the W1 and W4, and the W1 component is different in the period. As can be seen from section 1, section 2 and section 3, the back coupling waveguide in the branching component is used for back coupling output of a single wavelength, the width of the back coupling waveguide is W0, the maximum distance between the back coupling waveguide and the bragg grating waveguide compounded by silicon-silicon dioxide is W5, in the same grating waveguide, the bragg gratings in different branching components are unchanged from W0 to W5, and the height of the back coupling waveguide is H, which is equal to that of the bragg grating waveguide compounded by silicon-silicon dioxide.
Referring to the schematic diagram of fig. 3, in the bragg grating, W0 and W5 are unchanged in different branching components, and the height of the bragg grating is H, which is equal to that of the bragg grating waveguide of the silicon-silicon dioxide composite. And when the first-stage wavelength branching component passes through, the corresponding design wave band is reversely coupled to the corresponding output port from the reverse coupling wave guide corresponding to the Bragg grating wave guide compounded by the silicon-silicon dioxide, and the wave band which is not reversely coupled is transmitted to the next-stage wavelength branching component along the strip wave guide connected between the first-stage branching component and the next-stage branching component, so that the circulation is performed until only one wave band exists in the strip wave guide. For example, six wavelengths of light are simultaneously input at the entrance of the demultiplexer, and the first, second, third, fourth, fifth and sixth wavelengths correspond to λ1, λ2, λ3, λ4, λ5 and λ6 in the figure, respectively. In the first wavelength division component 1, the designed coupled first wavelength is output from the reverse coupling waveguide, the second wavelength, the third wavelength, the fourth wavelength, the fifth wavelength and the sixth wavelength are transmitted to the second wavelength division component 2 along the strip waveguide connected between the first wavelength division component 1 and the second wavelength division component 2, and the second wavelength is coupled and output, so that the cycle is performed until only the sixth wavelength is in the strip waveguide. The relative order among the wave-dividing components can be changed, and the arrangement mode of the relative positions of the wave-dividing components is various and can be serpentine arrangement in the figure, linear arrangement and the like.
In order to verify the effect of the invention in practical application, the following simulation experiment is used for illustration:
the experiment adopts a time domain finite difference method to carry out calculation and analysis, and key parameters used in simulation experiments comprise: the input light is TE mode of C wave band, W0 of each designed wave division component is 600nm, W1 is 400nm, W2 is 350nm, W3 is 100nm, W4 is 450, W5 is 200nm, H is 250nm, and the length of silicon dioxide is 157.25nm. The grating period of the first wavelength division component 1 is 307nm, the period length of the latter division component is gradually increased by 1.5nm, the grating period of the second wavelength division component 2 is 308.5nm, the grating period of the third wavelength division component 3 is 310nm, and so on. Fig. 4 is a diagram of simulation results of a silicon-based wavelength demultiplexing device based on grating-assisted reverse coupling. It can be seen from the figure that light in different wavebands is reversely coupled, so that the wavelength demultiplexing function of six channels is realized, and the loss and crosstalk are lower.
In summary, the silicon-based wavelength demultiplexing device based on grating auxiliary reverse coupling provided by the invention performs reverse coupling and output on design wavelength based on phase matching conditions by means of perturbation transmission constants generated by gratings, so as to realize multichannel demultiplexing. Compared with an array waveguide grating, the invention has strong expansibility, and the number of the channels can be continuously overlapped according to the use requirement, so the invention has the characteristics of easy expansion, compact structure, easy integration and the like.
The embodiments described in the present specification are merely examples of implementation forms of the inventive concept, and the scope of protection of the present invention should not be construed as being limited to the specific forms set forth in the embodiments, and the scope of protection of the present invention and equivalent technical means that can be conceived by those skilled in the art based on the inventive concept.
Claims (3)
1. A silicon-based wavelength demultiplexing device based on grating-assisted reverse coupling is characterized in that: the device comprises N sequentially serially connected wave-dividing assemblies, wherein adjacent wave-dividing assemblies are connected through strip-shaped silicon waveguides with the same width and height as each other; each of the front N-1 wave-dividing assemblies consists of a Bragg grating waveguide and a reverse coupling waveguide which are compounded by silicon-silicon dioxide, and the last 1 wave-dividing assembly is a straight strip-shaped silicon waveguide; the front N-1 wave-dividing components can realize the separation of single wavelength and other wavelengths and output from the reverse coupling waveguide, and the front N-1 wave-dividing components have different wavelengths; the whole silicon-based wavelength demultiplexing device based on grating auxiliary reverse coupling is wrapped in a silicon dioxide cladding;
the silicon-silicon dioxide composite Bragg grating waveguide comprises a strip-shaped straight silicon waveguide I, wherein a convex strip-shaped straight silicon waveguide II is embedded into the side surface of the strip-shaped straight silicon waveguide I, and the strip-shaped straight silicon waveguide II is grown out of two ends of the strip-shaped straight silicon waveguide I; the side surface of the strip-shaped straight silicon waveguide II is embedded with the strip-shaped silicon dioxide structures which are periodically arranged along the length direction of the strip-shaped straight silicon waveguide II, and the outer surface of the strip-shaped straight silicon waveguide II is flush with the outer surface of the strip-shaped silicon dioxide structures.
2. A grating-assisted reverse-coupled silicon-based wavelength demultiplexing device according to claim 1, wherein: the silicon-silicon dioxide composite Bragg grating waveguide provides a reverse coupling perturbation propagation constant, the overall height of the silicon-silicon dioxide composite Bragg grating waveguide is H and is equal everywhere, and the waveguide widths of the overall silicon-silicon dioxide composite Bragg grating waveguide are equal everywhere;
the two ends of the strip-shaped straight silicon waveguide I, which are longer than the strip-shaped straight silicon waveguide II, are respectively called an input end and an output end of the silicon-silicon dioxide composite Bragg grating waveguide, and the widths of the input end and the output end of the silicon-silicon dioxide composite Bragg grating waveguide are W1;
the whole area of the strip-shaped straight silicon waveguide I embedded with the straight silicon waveguide II and the strip-shaped silicon dioxide structure is called a Bragg grating area of the silicon-silicon dioxide composite Bragg grating waveguide, wherein the Bragg grating area is provided with a silicon-silicon dioxide composite part, namely a part embedded with the strip-shaped silicon dioxide structure, the width of the silicon part is W2, the width of the silicon dioxide part is W3, and W2 is smaller than W1, and the sum of W2 and W3 is larger than W1; the Bragg grating region is provided with a part which is not provided with a silicon-silicon dioxide composite structure, namely a part which is not embedded with a strip-shaped silicon dioxide structure, the width of the silicon part is W4, and W4 is equal to the sum of W2 and W3; the Bragg grating areas are in different wavelength branching components, grating periods are different, and widths W1, W2, W3 and W4 are the same.
3. A grating-assisted reverse-coupled silicon-based wavelength demultiplexing device according to claim 2, wherein: the reverse coupling waveguide carries out reverse coupling output of a single wavelength, the width of the reverse coupling waveguide is W0, and the maximum distance between the reverse coupling waveguide and the Bragg grating waveguide compounded by silicon-silicon dioxide is W5; the Bragg grating area is in different wave-dividing assemblies, W0 and W5 are unchanged, the height of the Bragg grating area is H, and the Bragg grating area is equal to the height of the Bragg grating waveguide compounded by silicon-silicon dioxide.
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CN101018098A (en) * | 2007-01-26 | 2007-08-15 | 西北工业大学 | Wave division multiplexer/demultiplexer and its making method |
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CN103217738A (en) * | 2013-03-27 | 2013-07-24 | 浙江大学 | Mode add-drop multiplexing and demultiplexing device based on grating-assisting type coupler |
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US20040228574A1 (en) * | 2003-05-14 | 2004-11-18 | Yu Chen | Switchable optical dispersion compensator using Bragg-grating |
US20050018964A1 (en) * | 2003-07-24 | 2005-01-27 | Yu Chen | Compensation of Bragg wavelength shift in a grating assisted direct coupler |
CN115032740B (en) * | 2022-06-22 | 2024-05-24 | 东南大学 | Grating auxiliary reverse coupler type coarse wavelength division multiplexer based on SOI material |
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US7539418B1 (en) * | 2005-09-16 | 2009-05-26 | Sun Microsystems, Inc. | Integrated ring modulator array WDM transceiver |
CN101018098A (en) * | 2007-01-26 | 2007-08-15 | 西北工业大学 | Wave division multiplexer/demultiplexer and its making method |
CN103217738A (en) * | 2013-03-27 | 2013-07-24 | 浙江大学 | Mode add-drop multiplexing and demultiplexing device based on grating-assisting type coupler |
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