CN115639646A - Silicon optical chip end face coupler and output control method thereof - Google Patents
Silicon optical chip end face coupler and output control method thereof Download PDFInfo
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- CN115639646A CN115639646A CN202211326267.0A CN202211326267A CN115639646A CN 115639646 A CN115639646 A CN 115639646A CN 202211326267 A CN202211326267 A CN 202211326267A CN 115639646 A CN115639646 A CN 115639646A
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Abstract
The invention discloses a silicon optical chip end face coupler, comprising: the device comprises an input unit, a transmission waveguide, an output waveguide and a beam splitting module; the input unit includes: two inverted cone waveguides which are arranged in parallel and are mutually symmetrical. The invention also discloses an output control method of the silicon optical chip end face coupler, which is applied to the end face coupler. The structural design of the invention can effectively reduce the optical power density in the optical waveguide, not only improves the upper limit of the input optical power bearing of the end face coupler, but also increases the alignment tolerance of the integral loss of the device, simplifies the optical path, reduces the cost and improves the reliability of the system. Under the condition that the whole insertion loss of the device is not obviously degraded, the control of the power division ratio of the output port changing within a certain range is realized by controlling the distance delta x from the central line of the light source to the central line of the end face coupler in the horizontal direction, and meanwhile, under the condition that the delta x is changed, multichannel balanced output is realized.
Description
Technical Field
The invention relates to the technical field of silicon optical integrated chips, in particular to a silicon optical chip end face coupler and an output control method thereof.
Background
The performance of the end-face coupler directly affects the coupling efficiency between the silicon optical chip and the external light source. At present, a silicon waveguide used by an end face coupler has a strong second-order nonlinear optical effect in a communication waveband, and the nonlinear optical effects are enhanced along with the increase of the power of an incident light source, so that the loss of the silicon waveguide is increased, the insertion loss of the end face coupler is degraded, and if the input optical power is further increased, the silicon waveguide is even irreversibly damaged.
Disclosure of Invention
In view of this, the present invention provides an end-face coupler of a silicon optical chip and an output control method thereof, so as to solve the technical problem that the conventional end-face coupler has limited input optical power and is further limited in the application scenario of the silicon optical chip.
The following presents a simplified summary in order to provide a basic understanding of some aspects of the disclosed embodiments. This summary is not an extensive overview and is intended to neither identify key/critical elements nor delineate the scope of such embodiments. Its sole purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is presented later.
The invention adopts the following technical scheme:
the invention provides a silicon optical chip end face coupler, comprising: an input unit for light source spot conversion, and the input unit comprising: two inverted cone waveguides which are arranged in parallel and are symmetrical to each other.
In one embodiment, the input unit further includes: two parallel front end waveguides; the front end waveguide is arranged at one end of the inverted cone-shaped waveguide facing the light source.
In one embodiment, the input cell etches a substrate to form a deep trench.
In one embodiment, the width of the tip of each inverted cone waveguide is 60-180nm, and the distance between the tips of the two inverted cone waveguides is matched with the mode spot of the light source.
In an embodiment, the silicon optical chip end-face coupler further includes: a transmission waveguide and an output waveguide; the input unit is connected with the output waveguide through the transmission waveguide.
In one embodiment, the transmission waveguide is one or more of a straight waveguide, an S-bend waveguide, an euler curve waveguide, and an arc curve waveguide.
In an embodiment, the silicon optical chip end-face coupler further includes: and the beam splitting module divides the light output by the input unit into a plurality of beams and outputs the beams through the output waveguide.
In one embodiment, the beam splitting module is composed of a plurality of power beam splitting units which are connected in a multi-level manner; the multi-order connection means that the input end of the power beam splitting unit in the high order is connected with one of the output ends of the power beam splitting unit in the low order through the transmission waveguide.
The invention also provides an output control method of the silicon optical chip end face coupler, which is applied to the silicon optical chip end face coupler and comprises the following steps:
the light source carries out spot size conversion through an input unit of the end face coupler;
and adjusting the power ratio of the output port of the end-face coupler by adjusting the distance from the central line of the light source to the central line of the end-face coupler in the horizontal direction, wherein the central line of the end-face coupler is the symmetry axis of the two inverted cone waveguides in the input unit.
In an embodiment, the output control method of a silicon optical chip end-face coupler further includes: when the distance from the central line of the light source to the central line of the end-face coupler in the horizontal direction is not 0, enabling the accumulated phase difference transmitted on the two front-end waveguides arranged at the front ends of the two inverted conical waveguides to meet integral multiples of pi/2, so that the optical power output by each channel of the end-face coupler is equal; the front ends of the two inverted cone-shaped waveguides are the ends of the inverted cone-shaped waveguides facing the light source.
The invention has the following beneficial effects:
1. the two inverted cone-shaped waveguides which are arranged in parallel and are symmetrical to each other in the input unit are used for splitting light, so that the optical power density in the optical waveguides is effectively reduced, the upper limit of the input optical power bearing of the end face coupler is improved, and the alignment tolerance of the whole loss of the device is increased;
2. the beam splitting module is combined with the structural design of the input unit, and multi-port output is realized on the premise of reducing the number of input light sources, so that the light path on a chip is simplified, the cost is reduced, and the reliability of the system is improved;
3. the structure design and the device arrangement of the invention obviously improve the performance of the end face coupler, and the structure is simple, and large-scale mass production can be realized without introducing additional process steps based on the existing silicon optical process platform;
4. under the condition that the integral insertion loss of the device is not obviously degraded, the control of the power division ratio of the output port changing within a certain range is realized by controlling the distance delta x from the central line of the light source to the central line of the end face coupler in the horizontal direction;
5. the multichannel balanced output can be realized by designing the input unit under the condition that the delta x is changed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the prior art descriptions will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a block diagram of a multi-output-port silicon optical chip end-face coupler according to the present invention;
FIG. 2 is a block diagram of a two-output-port silicon optical chip end-face coupler according to the present invention;
FIG. 3 is a schematic diagram of simulation of optical transmission mode field distribution of a two-output-port silicon optical chip end-face coupler according to the present invention;
FIG. 4 is a block diagram of a four-output port silicon optical chip end-face coupler according to the present invention;
FIG. 5 is a side view of the input unit of the present invention;
FIG. 6 is a side view of the power splitting unit of the present invention;
FIG. 7 is a schematic diagram of a simulation of the mode field distribution of the power splitting unit of the present invention;
FIG. 8 shows the variation of insertion loss with incident light power for silicon photonic chip end-face couplers of different structures
FIG. 9 is a schematic diagram of the source-to-end-coupler centerline distance Δ x in the horizontal direction when the light source is coupled to the input unit;
FIG. 10 is a graph of the insertion loss of each of two output ports and the total insertion loss of the device as a function of Δ x in a two-output-port silicon photonic chip end-face coupler
FIG. 11 is a schematic diagram of the positions of a front end waveguide and an inverted tapered waveguide.
Detailed Description
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the described embodiments are only some embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In some demonstrative embodiments, the invention provides a silicon photonics chip end-face coupler, as shown in fig. 1, 2 and 4, including: input unit 10, transmission waveguide 30, output waveguide 40, splitting module.
The light source 50 performs the spot size conversion through the input unit 10, and couples the light source to the end-face coupler efficiently, wherein the external light source can be directly output by a laser or output by an optical fiber connected to the laser. The input unit 10 includes: two inverted cone waveguides 101 which are arranged in parallel and are symmetrical to each other.
The inverted cone waveguide 101 is specifically a slowly-varying adiabatic inverted cone waveguide with an extremely narrow tip, the width of the waveguide at the tip of the inverted cone waveguide is determined by the size of a light source mode spot and process conditions, and is specifically 60-180nm, and the distance between the tips of the two inverted cone waveguides is matched with the light source mode spot, so that the coupling efficiency is ensured. When the input light spot is large, such as single mode fiber input (the light spot diameter is 10.4 um), as shown in fig. 5, the substrate of the input unit 10 needs to be etched to form a deep trench 103, so as to prevent the optical power from leaking to the substrate and increase the insertion loss of the end-face coupler.
The strength of the nonlinear absorption of the silicon waveguide is determined by the nonlinear coefficient of the material and the optical power density. In this embodiment, the input unit 10 employs two inverted cone waveguides 101 that are arranged in parallel and are symmetrical to each other, and along with the transmission of light, the light source is divided into two parts, which are coupled to the two waveguides, respectively, so as to reduce the optical power density in each waveguide, thereby reducing the nonlinear absorption intensity of the silicon waveguide. As shown in fig. 8, the solid line represents the variation of the insertion loss IL of the conventional end-face coupler with the incident light power, and the dotted line represents the variation of the insertion loss IL of the end-face coupler with the incident light power, according to fig. 8, the structural design of the present invention can keep the insertion loss unchanged when the incident light power is increased to a larger value, and compared with the conventional end-face coupler, the present invention has a higher optical power tolerance.
The traditional end-face coupler usually has only one output port for one input port, and one mode is to add a beam splitter structure for beam splitting in the subsequent process aiming at the scene needing multi-path output, so that not only is the complexity of an optical path increased, but also the area of a chip is increased; the second way is to use a multi-channel end-face coupler to realize N-port input and N-port output, but this way needs to match multiple light sources, which increases the complexity of the optical chip system, increases the cost of the whole optical module, reduces the reliability, and cannot ensure the stability of the performance.
In order to solve the technical problem, the invention realizes multi-port output through structural design and does not increase the number of light sources. In this embodiment, the input unit 10 employs two inverted cone waveguides 101 that are arranged in parallel and are symmetrical to each other, so that the input unit 10 itself can implement a splitting function. In this case, as shown in fig. 2, the input unit 10 is directly connected to the output waveguide 40 via the transmission waveguide 30 to form an end-face coupler having two output ports, and a schematic diagram of mode field distribution simulation of the end-face coupler having two output ports is shown in fig. 3.
As shown in fig. 9, when the implementation is an end-face coupler with two output ports, by controlling the distance Δ x from the center line of the light source to the center line of the end-face coupler in the horizontal direction, the control that the power ratio of the two output ports changes within a certain range is realized without significant degradation of the overall insertion loss of the device; the center line of the end-face coupler is the symmetry axis of the two inverted cone waveguides 101 in the input unit 10.
When the light source 50 is butted with the end-face coupler, when Δ x changes, the insertion loss of each of the two output ports changes, but the overall loss of the device does not change greatly within a certain range, as shown in fig. 10, when Δ x changes within the range of-1.5 um to +1.5um, the overall insertion loss change of the device is less than 0.5dB. In the conventional end-face coupler structure with one tip, the change of delta x in the range of-1.5 um to +1.5um can cause the change of the total insertion loss of the device by more than 1 dB. Therefore, the input unit of the invention not only improves the upper limit of the input optical power bearing of the end face coupler, but also increases the alignment tolerance of the integral loss of the device through the structural design of two inverted cone waveguides which are arranged in parallel and are mutually symmetrical.
In fig. 10, two dotted lines are respectively a variation curve of the insertion loss IL of the two output ends of the two output-end-face coupler with Δ x, and a solid line is a variation curve of the total insertion loss IL of the device with Δ x.
For a two-output-port end-face coupler with defined structural parameters, there is a specific Δ x 0 So that the insertion loss of the two output ports are consistent, and the output port of the device reaches a power division ratio of 50. Ideally,. DELTA.x 0 Is 0, namely when the light source central line is aligned with the end face central line of the end face coupler, 3dB light splitting is realized, but the actual process has manufacturing errors, delta x 0 Possibly deviating from 0. When Δ x is not equal to Δ x 0 And the insertion losses of the two output ports are not equal any more, the structural design of the invention can realize that the power ratio of the two output ports of the device is changed within a certain range by controlling the size of delta x.
When multi-channel output is required, the light output by the input unit 10 is divided into a plurality of beams by the beam splitting module and then output through the output waveguide 40. The beam splitting module consists of a plurality of power beam splitting units 20 which are connected in a multistage manner; here, the multi-order connection means that an input end of the power splitting unit 20 at a high order is connected to one of output ends of the power splitting unit 20 at a low order through the transmission waveguide 30. Specifically, the power beam splitting unit 20 may be divided into a plurality of levels, and the higher level power beam splitting unit 20 is used to split the light beam output by the lower level power beam splitting unit 20 again, so as to finally form a multi-channel output.
Wherein, the power splitting unit 20 located at the lowest order is connected to the input unit 10 through the transmission waveguide 30; the power splitting unit 20 located at the highest order is connected to the output waveguide 40 through the transmission waveguide 30. As shown in fig. 4, when the input unit 10 is connected to the transmission waveguide 30, and two power splitting units 20 are respectively connected behind the transmission waveguide 30, and each power splitting unit 20 is further correspondingly connected to two output waveguides 40, an end-face coupler with four output ports can be formed. By analogy, as shown in fig. 1, by increasing the cascade number N (N is 0 or a positive integer) of the power splitting units 20, the end-face coupler can have 2 (N + 1) output ports.
In the case of a multi-output-port silicon optical chip end-face coupler, the power ratio of one part of the output ports and the other part of the output ports of the device can be changed within a certain range by controlling the magnitude of Δ x.
Through the structural design, the multi-port output is realized on the premise of reducing the number of input light sources, so that the light path on a chip is simplified, the cost is reduced, and the reliability of a chip system is improved. Moreover, the structural design and the device arrangement of the embodiment can obviously improve the performance of the end-face coupler, and meanwhile, the structure is simple, and large-scale mass production can be realized without introducing additional process steps based on the existing silicon optical process platform.
The power beam splitting unit 20 realizes a two-in-one beam splitting function based on a mode coupling principle, as shown in fig. 6 and 7, the power beam splitting unit 20 adopts a completely symmetrical structure, is easy to manufacture, does not need to consider a phase matching problem in comparison with a common multimode interferometer for beam splitting, and has a higher process tolerance.
The transmission waveguide 30 is one or more of a straight waveguide, an S-bend waveguide, an euler curve waveguide, and an arc curve waveguide, that is, the transmission waveguide 30 is not limited to the shape shown in fig. 2, and may be a straight waveguide, an S-bend waveguide, an euler curve waveguide, an arc curve waveguide, and various combinations thereof, and only needs to satisfy single-mode transmission conditions and device arrangement requirements.
In which, by designing the input unit 10, multi-channel equalization output can be realized under the condition that Δ x is changed. As shown in fig. 11, the input unit 10 further includes: two parallel front end waveguides 102; the front end waveguide 102 is disposed at an end of the inversely tapered waveguide 101 facing the light source 50. Compared with the input unit 10 mentioned above, by adding two front-end waveguides 102 which are parallel to each other and have extremely narrow width at the front end of the inverted-cone waveguide 101, the structure can realize balanced output of multiple channels under Δ x change. When Δ x =0, the device can realize multichannel balanced output due to structural symmetry; when Δ x ≠ 0, the light source 50 excites two main modes, namely a symmetric mode and an anti-symmetric mode, at the end surface of the front-end waveguide 102, and when the accumulated phase difference of the two modes transmitted on the front-end waveguide 102 satisfies integer times of pi/2, the output light power of the output port is equal. I.e. the two mode effective refractive indices neff sys And neff asys And the length L of the front end waveguide 102 satisfy the following equation:
the multi-output-port end-face coupler of the embodiment can reduce the number of light sources, and is significant for application scenes needing to reduce the number of light sources and realizing multi-output. For example, in a high-speed short-distance data center communication scenario, a 400G or even 800G intensity modulation/direct detection scheme is adopted, and a laser array or a hybrid integration of multiple light sources and a silicon optical chip is usually adopted to meet the requirement of the scheme for multi-channel parallel. However, if the end-face coupler of the embodiment is adopted, one light source can be directly output in multiple paths, so that the requirement of multi-channel parallel is met, on one hand, the light path is simplified, the reliability of a chip system is improved, on the other hand, the number of the light sources is reduced, the cost is reduced, and the packaging of the whole module is also simplified. For most current application scenarios, the two-output port and four-output port end-face couplers can meet most application scenarios.
In this embodiment, the waveguides of all the unit modules may be SOI waveguides, or silicon nitride waveguides or waveguides made of other CMOS platform compatible materials. Compared with a silicon waveguide, the silicon nitride waveguide has smaller transmission loss, thermo-optic coefficient and nonlinear coefficient, and the end face coupler based on the silicon nitride waveguide can realize smaller transmission loss, higher temperature insensitivity and higher light-resistant power. If the silicon nitride waveguide is used, signals can be coupled to the subsequent silicon waveguide only by additionally adding an interlayer coupling structure, and the whole silicon optical scheme chip is not affected.
In some illustrative embodiments, the present invention further provides an output control method for a silicon optical chip end-face coupler, which is applied to the silicon optical chip end-face coupler and has the same inventive concept, so that the control method of this embodiment can be understood with reference to the above implementation of the end-face coupler, and the control method includes:
the light source 50 performs spot-size conversion through the input unit 10 of the end-face coupler;
the power ratio of the output port of the end-face coupler is adjusted by adjusting the distance Δ x from the center line of the light source to the center line of the end-face coupler in the horizontal direction, wherein the center line of the end-face coupler is the symmetry axis of the two inverted cone waveguides 101 in the input unit 10.
For end-couplers of determined constructional parameters, there is a specific Δ x 0 Therefore, the insertion loss of each output port is consistent, and the balanced power division ratio of the output ports of the device is further realized. Ideally,. DELTA.x 0 Is 0, namely when the light source center line is aligned with the end face center line of the end face coupler, 3dB light splitting is realized, but due to the manufacturing error of the actual process, delta x 0 Possibly deviating from 0. When Δ x is not equal to Δ x 0 The insertion loss of the output ports is not equal any more, the invention controlsThe magnitude of deltax is such that the power ratio at the output port of the device varies within a certain range.
The control method further comprises the following steps: when deltax is not 0, the accumulated phase difference transmitted on the two front end waveguides 102 arranged at the front ends of the two inverted cone-shaped waveguides 101 is made to meet integral multiple of pi/2, so that the optical power output by each channel of the end-face coupler is equal; the front ends of the two inverted tapered waveguides 101 refer to the ends of the inverted tapered waveguides 101 facing the light source 50.
By adding two parallel front-end waveguides 102 with extremely narrow width at the front end of the inverted conical waveguide 101, multi-channel balanced output under the change of deltax is realized. When Δ x =0, the device can realize multichannel balanced output due to the symmetry of the structure; when Δ x ≠ 0, the light source 50 excites two main modes, namely a symmetric mode and an anti-symmetric mode, at the end surface of the front-end waveguide 102, and when the accumulated phase difference of the two modes transmitted on the front-end waveguide 102 satisfies integer times of pi/2, the output light power of the output port is equal.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are also within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A silicon optical chip end-face coupler, comprising: an input unit for light source spot-size conversion, and the input unit comprises: two inverted cone waveguides which are arranged in parallel and are mutually symmetrical.
2. The silicon photonic chip end-face coupler of claim 1, wherein the input unit further comprises: two parallel front end waveguides; the front end waveguide is arranged at one end of the inverted cone-shaped waveguide facing the light source.
3. A silicon photochip end-face coupler according to claim 1 or 2, wherein the input cell etches the substrate to form a deep trench.
4. A silicon optical chip end-face coupler as claimed in claim 3, wherein the width of the tip of said inverted tapered waveguide is 60-180nm, and the distance between the tips of two said inverted tapered waveguides matches the light source mode spot.
5. A silicon photonic chip end-face coupler according to claim 1 or 2, further comprising: a transmission waveguide and an output waveguide; the input unit is connected with the output waveguide through the transmission waveguide.
6. The silicon optical chip end face coupler according to claim 5, wherein the transmission waveguide is one or more of a straight waveguide, an S-bend waveguide, an Euler curve waveguide and an arc curve waveguide.
7. The silicon photonic chip end-face coupler of claim 5, further comprising: and the beam splitting module divides the light output by the input unit into a plurality of beams and outputs the beams through the output waveguide.
8. The silicon optical chip end-face coupler according to claim 7, wherein the beam splitting module is composed of a plurality of power beam splitting units connected in multiple stages;
the multi-order connection means that the input end of the power beam splitting unit at the high order is connected with one of the output ends of the power beam splitting unit at the low order through the transmission waveguide.
9. An output control method of a silicon optical chip end face coupler, which is applied to the silicon optical chip end face coupler of claims 1 to 8, and is characterized by comprising the following steps:
the light source carries out spot size conversion through an input unit of the end face coupler;
and adjusting the power ratio of the output port of the end-face coupler by adjusting the distance from the central line of the light source to the central line of the end-face coupler in the horizontal direction, wherein the central line of the end-face coupler is the symmetry axis of the two inverted cone waveguides in the input unit.
10. The output control method of a silicon optical chip end-face coupler according to claim 9, further comprising: when the distance from the central line of the light source to the central line of the end-face coupler in the horizontal direction is not 0, enabling the accumulated phase difference transmitted on the two front-end waveguides arranged at the front ends of the two inverted conical waveguides to meet integral multiple of pi/2, and enabling the optical power output by each channel of the end-face coupler to be equal;
the front ends of the two inverted cone-shaped waveguides are the ends, facing the light source, of the inverted cone-shaped waveguides.
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| CN116755189B (en) * | 2023-08-16 | 2024-04-26 | 深圳市速腾聚创科技有限公司 | Silicon optical chip, laser radar and movable equipment |
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