CN115635216A - Ceramic connecting device - Google Patents
Ceramic connecting device Download PDFInfo
- Publication number
- CN115635216A CN115635216A CN202211099384.8A CN202211099384A CN115635216A CN 115635216 A CN115635216 A CN 115635216A CN 202211099384 A CN202211099384 A CN 202211099384A CN 115635216 A CN115635216 A CN 115635216A
- Authority
- CN
- China
- Prior art keywords
- furnace
- sample
- ceramic
- target
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 52
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 238000006243 chemical reaction Methods 0.000 claims abstract description 11
- 229920006395 saturated elastomer Polymers 0.000 claims abstract description 6
- 238000005304 joining Methods 0.000 claims abstract description 3
- 238000013459 approach Methods 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 28
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 27
- 239000013077 target material Substances 0.000 abstract description 16
- 239000000463 material Substances 0.000 abstract description 10
- 238000012545 processing Methods 0.000 abstract description 9
- 238000005253 cladding Methods 0.000 abstract description 7
- 238000003754 machining Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 12
- 238000003466 welding Methods 0.000 description 10
- 238000007789 sealing Methods 0.000 description 8
- 238000001816 cooling Methods 0.000 description 7
- 238000003825 pressing Methods 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005429 filling process Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910026551 ZrC Inorganic materials 0.000 description 1
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/008—Soldering within a furnace
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
Abstract
The invention relates to a ceramic connecting device which comprises a working furnace, a clamping mechanism, a vacuum interface and a heater. The work furnace is internally provided with a furnace chamber for accommodating the target material and the clamping mechanism, and the clamping mechanism is used for fixing the sample to be connected. The vacuum interface is used for connecting with a vacuum generator, so that the furnace chamber is in a vacuum environment. The heater is used for heating the target material in the furnace chamber. When the vacuum degree in the furnace cavity is lower than the saturated vapor pressure of the target, the target at the preset temperature can be gathered to the samples to be connected in a vapor form, so that a gas permeation reaction occurs in the gaps of the ceramic to form a connecting layer, the connection between the samples to be connected is realized, and a connecting material does not need to be filled in the connecting position in advance, so that the processing steps of connecting the ceramic such as silicon carbide are simplified, and the processing difficulty is reduced. The resulting tie layer facilitates the joining of the nuclear silicon carbide cladding and end plugs without the need for precision machining of the cladding and end plugs, thereby improving assembly efficiency.
Description
Technical Field
The invention relates to the technical field of ceramic welding, in particular to a ceramic connecting device.
Background
The silicon carbide (SiC) ceramic has high melting point, excellent mechanical, thermal and corrosion resistance properties, so that the silicon carbide ceramic has very wide application in the fields of vehicles, ocean engineering, nuclear energy, aerospace and the like, and particularly has very unique advantages in nuclear cladding.
However, because of the high melting point and low diffusion coefficient of silicon carbide, the fusion welding technique of metals cannot be directly applied to the welding of silicon carbide, and for the welding of silicon carbide, it is usually necessary to introduce an intermediate connecting material between the silicon carbide. Due to the high hardness and brittleness of the silicon carbide, the connection material filling process brings great difficulty to the welding of the silicon carbide, so that the problem of inconvenient processing exists.
Disclosure of Invention
In view of the above, it is necessary to provide a ceramic connecting device that solves the above-mentioned problems, in order to solve the problem of the inconvenience in processing in the conventional silicon carbide welding.
A ceramic connecting device comprising:
the working furnace is internally provided with a furnace chamber, and the furnace chamber is used for accommodating a target material;
the clamping mechanism is positioned in the furnace cavity and used for fixing a sample to be connected;
the vacuum interface is communicated with the furnace chamber and is used for connecting a vacuum generator;
the heater is connected with the working furnace and used for heating the target material in the furnace cavity to a preset temperature;
when the vacuum degree in the furnace cavity is lower than the saturated vapor pressure of the target material, the target material at the preset temperature is converged to the sample to be connected in a vapor form, so that a gas permeation reaction occurs in a gap between the samples to be connected, and a connecting layer is formed.
In one embodiment, the clamping mechanism includes a fixed clamping portion and a movable clamping portion spaced apart from each other along a first direction, and the movable clamping portion is configured to operatively move linearly relative to the fixed clamping portion, so that the fixed clamping portion and the movable clamping portion respectively abut against two opposite ends of the sample to be connected.
The movable clamping part moves relative to the fixed clamping part, so that the size of a clamping space formed between the movable clamping part and the fixed clamping part is changed, and the movable clamping part is suitable for samples to be connected with different sizes. The movable clamping part and the fixed clamping part are matched to abut against and fix the two opposite ends of the sample to be connected, the possibility that the sample to be connected shakes or moves in the reaction process is reduced, the target material can be accurately gathered to the gap of the sample to be connected in a steam form, and a gas permeation reaction is carried out at the gap to form a connecting layer, so that the connection between the samples to be connected is realized.
In one embodiment, the ceramic connecting device further comprises an operating part and an elastic part, wherein the elastic part is connected between the operating part and the movable clamping part; at least part of the operating part is positioned outside the furnace cavity; the operation part is pressed to drive the movable clamping part to approach to the sample to be connected, and the movable clamping part is elastically abutted to the sample to be connected.
The movable clamping part is driven to approach the sample to be connected by pressing the operation part, so that the gap between the movable clamping part and the sample to be connected is adjusted, and the pressing force of the movable clamping part on the sample to be connected is adjusted.
In one embodiment, each of the fixed clamping portion and the movable clamping portion comprises a push rod and an abutting block, the push rod extends along a first direction, and the abutting block extends out along a second direction relative to the push rod; the push rod is used for supporting the sample to be connected, and the abutting block is used for abutting against the sample to be connected.
Through setting up the push rod to treat to connect the sample and play the supporting role. Through setting up the butt piece to it is spacing to carry out the butt to the sample of treating connecting that is located the push rod, guarantees the fixed effect of sample of treating connecting of activity clamping part and fixed clamping part.
In one embodiment, the abutting block is provided with a limiting groove towards one end of the sample to be connected, and the sample to be connected can abut against the groove wall of the limiting groove. Through setting up the spacing groove, it is spacing to further carry out the butt to the sample that is located on the push rod, guarantees its fixed effect, reduces the skew that the sample appears the position in the reaction process of waiting to connect, and then makes in the infiltration that the target can be better advances the clearance of waiting to connect the sample.
In one embodiment, a support body is arranged in the furnace chamber and used for mounting a target material; the clamping mechanism is connected to the supporting body.
The target is fixed by the support body, so that the target can be aligned with the gap of the sample to be connected, and the target can be conveniently and better gathered at the gap of the sample to be connected.
In one embodiment, the working furnace comprises a furnace body and a furnace cover detachably connected with the furnace body, and the furnace body and the furnace cover are matched to form the furnace cavity; the support body is detachably connected with the furnace body.
The furnace cover can be conveniently opened by adopting a detachable connection mode. When the components in the furnace chamber are in failure, the furnace cover is opened, so that the components in the furnace chamber can be conveniently taken out, and the subsequent disassembly, maintenance and replacement are convenient.
In one embodiment, a sealing element is connected between the furnace body and the furnace cover.
By arranging the sealing piece, the sealing effect in the furnace cavity is ensured, and the vacuum degree in the furnace cavity is further ensured
In one embodiment, the heater includes a heating coil disposed around the target.
Because the heating coil heat exchange target is arranged, the heating effect of the target is more uniform, and the target is conveniently and uniformly heated and rapidly heated.
In one embodiment, a temperature detector is further arranged in the furnace cavity; and/or a vacuum gauge is also arranged in the furnace cavity.
The temperature and the vacuum degree in the furnace cavity can be conveniently monitored by arranging the temperature detector and the vacuum gauge.
The technical scheme has the following beneficial effects: the ceramic connecting device comprises a working furnace, a clamping mechanism, a vacuum interface and a heater. The work furnace is internally provided with a furnace chamber for accommodating the target material and the clamping mechanism, and the clamping mechanism is used for fixing the sample to be connected. The vacuum interface is used for connecting with a vacuum generator, so that the furnace chamber is in a vacuum environment. The heater is used for heating the target material in the furnace chamber. When the vacuum degree in the furnace cavity is lower than the saturated vapor pressure of the target, the target at the preset temperature can be gathered towards the samples to be connected in a vapor form, so that a vapor permeation reaction occurs in the gap of the ceramic to form a connecting layer, the connection between the two samples to be connected is realized, and a connecting material does not need to be filled in the connecting position in advance, so that the processing steps of welding the samples to be connected, such as silicon carbide ceramic, are simplified, and the processing difficulty is reduced. The resulting tie layer facilitates the joining of the nuclear silicon carbide cladding and end plugs without the need for precision machining of the cladding and end plugs, thereby improving assembly efficiency.
Drawings
FIG. 1 is a schematic structural diagram of a ceramic connecting device according to an embodiment of the present invention;
fig. 2 is a partially enlarged view of a portion a of the ceramic connecting device shown in fig. 1.
Reference numerals: 10-a ceramic connection means; 100-a working furnace; 110-a furnace body; 111-furnace chamber; 120-furnace cover; 130-a clamping mechanism; 131-a fixed clamp; 132-a movable grip; 1321-a pushrod; 1322-abutment blocks; 140-a vacuum interface; 150-a heater; 151-heating coil; 160-an elastic member; 170-an operating part; 180-a support; 181-a base; 182-a connecting seat; 190-temperature detector; 210-a vacuum gauge; 220-a fastener; 300-a target material; 400-sample to be ligated; 410-a gap; 500-connecting layer.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "above," and "over" a second feature may be directly on or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
As described in the background section, it is often necessary to incorporate an intermediate bonding material between silicon carbide ceramics when welding the silicon carbide ceramics. Due to the high hardness and brittleness of the silicon carbide, the filling process of the connecting material brings great difficulty to the welding of the silicon carbide, so that the problem of inconvenient processing exists. Based on this, the present invention provides a ceramic connecting device that solves the above-mentioned problems. Some embodiments of the invention are described in detail below with reference to the accompanying drawings.
FIG. 1 is a schematic structural diagram of a ceramic connecting device 10 according to an embodiment of the present invention; fig. 2 is a partially enlarged view of a point a in the ceramic connecting device 10 shown in fig. 1. As shown in fig. 1 and 2, a ceramic connecting device 10 according to an embodiment of the present invention includes a work furnace 100, a clamping mechanism 130, a vacuum interface 140, and a heater 150. A furnace chamber 111 is formed inside the work furnace 100, and the furnace chamber 111 is used for accommodating the target material 300; a clamping mechanism 130 is located within the oven cavity 111, the clamping mechanism 130 being used to secure the sample 400 to be attached. The vacuum port 140 is in communication with the chamber 111, and the vacuum port 140 is used to connect a vacuum generator such that the chamber 111 is in a vacuum environment. The heater 150 is connected to the work furnace 100, and the heater 150 is used for heating the target 300 in the furnace chamber 111 to a predetermined temperature.
When the degree of vacuum in the furnace chamber 111 is lower than the saturated vapor pressure of the target 300, the target 300 at the preset temperature converges toward the to-be-connected sample 400 in a vapor form, so that a vapor permeation reaction occurs in the gap 410 between the to-be-connected samples 400 and a connection layer 500 is formed, thereby realizing the connection between the to-be-connected samples 400. The connecting material does not need to be filled in the connecting position of the sample 400 to be connected in advance, so that the processing steps of welding the sample 400 to be connected, such as silicon carbide ceramic, are simplified, and the processing difficulty is reduced. The bond coat 500 formed in the gap 410 enables the core silicon carbide cladding and end plugs to be bonded without the need for precision machining of the cladding and end plugs, thereby improving assembly efficiency.
It can be understood that the sample to be connected fixed by the clamping mechanism is two samples to be connected together, and the two samples can be connected between dissimilar materials or can be connected between the same materials. The sample 400 to be connected may be at least one of silicon carbide ceramic, zirconium carbide ceramic, silicon nitride ceramic, alumina ceramic, and zirconia ceramic. The shape of the sample to be connected may be a plate-like, cylindrical or hollow structure. The target 300 may be at least one material of iron, cobalt, nickel, chromium, manganese, tungsten, titanium, zirconium, hafnium, vanadium, tantalum, molybdenum, niobium, and yttrium. The shape of the target 300 may be circular, square, hexagonal, or the like.
The vacuum generator may be a vacuum pump, the vacuum port 140 and the vacuum pump are connected by a connecting pipe such as a bellows, and the vacuum generator is used for evacuating the furnace chamber 111 or filling nitrogen gas into the furnace chamber 111 to make the furnace chamber 111 in a vacuum state, wherein the vacuum degree of the furnace chamber 111 is 10 -1 -10 -6 Pa. An angle valve is provided at the vacuum port 140, and a certain degree of vacuum can be maintained also when the angle valve is closed in a vacuum state.
In a practical application scenario, the ceramic connecting device 10 is arranged as shown in fig. 1, wherein the first direction is an X direction in the figure, and the second direction is a Y direction in the figure. In the view of fig. 1, the first direction is a horizontal direction parallel to the horizontal plane and the second direction is a direction of gravity perpendicular to the horizontal plane. In other embodiments, the arrangement orientation of the first direction and the second direction may be interchanged, i.e. the first direction is the direction of gravity perpendicular to the horizontal plane and the second direction is the horizontal direction parallel to the horizontal plane. For convenience of text comparison and description, the first direction is denoted by X direction and the second direction is denoted by Y direction.
As shown in fig. 1 and 2, in one embodiment, the clamping mechanism 130 includes a fixed clamping portion 131 and a movable clamping portion 132 disposed at an interval along the X direction, and the movable clamping portion 132 is configured to move linearly relative to the fixed clamping portion 131, so that the fixed clamping portion 131 and the movable clamping portion 132 respectively abut against two opposite ends of the sample 400 to be connected.
Specifically, the movable clamping portion 132 is moved relative to the fixed clamping portion 131 by an external force applied to the movable clamping portion 132, so as to change the size of the clamping space formed therebetween, thereby adapting to samples 400 to be connected with different sizes. The movable clamping part 132 and the fixed clamping part 131 are matched with each other to abut against and fix two opposite ends of the sample 400 to be connected, so that the possibility of shaking or moving of the sample 400 to be connected in the reaction process is reduced, the target material 300 can be accurately converged to the gap 410 of the sample 400 to be connected in a steam form, and a gas permeation reaction is carried out at the gap 410 to form the connecting layer 500, so that the connection between the samples 400 to be connected is realized.
As shown in fig. 1 and 2, in one embodiment, the ceramic connecting device 10 further includes an operating portion 170 and an elastic member 160, the elastic member 160 being connected between the operating portion 170 and the movable clamping portion 132; at least a portion of the operating portion 170 is located outside the cavity 111. By pressing the operation portion 170, the movable clamping portion 132 is driven to approach the sample 400 to be connected, and the movable clamping portion 132 is elastically abutted against the sample 400 to be connected.
When the compression amount of the elastic member 160 reaches a certain degree, the operation portion 170 is continuously pressed to drive the movable clamping portion 132 to approach the sample 400 to be connected, so as to adjust the gap 410 between the movable clamping portion 132 and the sample 400 to be connected, and further adjust the pressing force of the movable clamping portion 132 on the sample 400 to be connected. Operation portion 170 specifically is pressure regulator, and pressure regulator is equipped with the digital display screen, through pressing pressure regulator, can show the pressure size of appllying in real time, and the application of force operation is more convenient.
Further, the movable clamping portion 132 and the operation portion 170 are provided with a slot at an end facing the elastic member 160 for the elastic member 160 to extend into, so as to improve the connection effect between the elastic member 160 and the movable clamping portion 132 or the operation portion 170.
Referring to fig. 1 and 2, in one embodiment, the fixed clamping portion 131 and the movable clamping portion 132 each include a push rod 1321 and an abutment block 1322, the push rod 1321 extends along the X direction, and the abutment block 1322 extends along the Y direction relative to the push rod 1321. The push rod 1321 is used to support the sample 400 to be connected, and the abutment block 1322 is used to abut the sample 400 to be connected.
The push rod 1321 is provided to support the sample 400 to be connected. By arranging the abutting block 1322, the sample 400 to be connected on the push rod 1321 is abutted and limited, and the fixing effect of the movable clamping part 132 and the fixed clamping part 131 on the sample 400 to be connected is ensured.
In another embodiment, the end of the abutment block 1322 facing the sample 400 to be connected is provided with a limiting groove, and the sample 400 to be connected can abut against the groove wall of the limiting groove. Through setting up the spacing groove, it is spacing to further carry out the butt to the sample that is located on push rod 1321, guarantees its fixed effect, reduces the skew that sample 400 to be connected appears the position in the reaction process, and then makes target 300 can be better in the infiltration advances the clearance 410 of sample 400 to be connected.
As shown in fig. 1, in one embodiment, a support 180 is disposed in the chamber 111, and the support 180 is used for mounting the target 300; the clamping mechanism 130 is connected to the support body 180. The target 300 is fixed by arranging the supporting body 180, so that the target 300 can be aligned with the gap 410 of the sample 400 to be connected, thereby facilitating the target 300 to better converge at the gap 410 of the sample 400 to be connected.
The fixing clamping portion 131 includes a base 181 and a connecting seat 182, the base 181 is connected to the inner wall of the furnace body 110, the connecting seat 182 extends out along the X direction relative to the base 181, the target 300 is disposed on the outer wall of the supporting body 180, for example, the target 300 is cylindrical, and the inner portion of the target is hollow, so that the target can be sleeved on the connecting seat 182, and the fixing clamping portion 131 is connected to the supporting body 180. Further, the connecting seat 182 is provided with a locking groove for the push rod 1321 of the fixing clamp 131 to extend into.
With continued reference to fig. 1, in one embodiment, the work furnace 100 includes a furnace body 110 and a furnace cover 120 removably attached to the furnace body 110 and cooperating to form a furnace chamber 111.
The furnace cover 120 can be conveniently opened by adopting a detachable connection mode. When the components inside the cavity 111 fail, the components inside are easily taken out by opening the cover 120, thereby facilitating subsequent disassembly, maintenance and replacement. More specifically, the furnace body 110 and the furnace cover 120 are tightly sealed by fasteners 220 such as bolts. The furnace body 110 and the furnace cover 120 may be made of stainless steel, and have good high temperature resistance. Further, the supporting body 180 is detachably connected to the furnace body 110, for example, the two are connected by a bolt or a snap.
In one embodiment, a sealing member is connected between the furnace body 110 and the furnace cover 120. By arranging the sealing member, the sealing effect in the furnace chamber 111 is ensured, and the vacuum degree in the furnace chamber 111 is further ensured. The seal may in particular be a copper washer.
In one embodiment, the oven body 110 is provided with an oven door. The sample 400 to be attached is placed on the fixture 130 inside the cavity 111 by opening the door. After the furnace door is put in the furnace, the furnace door is closed. Further, a sealing member is arranged between the oven door and the cavity wall of the oven cavity 111, so that the sealing effect in the oven cavity 111 is ensured. The oven door (not shown) may be designed on the upper, bottom, or side of the oven body 110, etc.
As shown in fig. 1, in an embodiment, the target 300 has a hollow structure, so that the sample 400 to be connected can be placed in a cavity inside the target 300, which facilitates better diffusion of the target 300 to the sample 400 to be connected, and improves the forming effect of the connection layer 500.
As shown in fig. 1, in one embodiment, the heater 150 includes a heating coil 151, and the heating coil 151 is disposed around the target 300. Specifically, the heating coil 151 is disposed inside the furnace chamber 111, and the heating coil 151 exchanges heat with the target 300, so that the heating effect of the target 300 is uniform, and uniform heating and rapid temperature rise of the target 300 are facilitated. The heating coil 151 is specifically an induction heating coil 151. The heating temperature of the heating coil 151 is 1000 ℃ to 2000 ℃.
It is understood that the ceramic connecting device 10 further comprises an external power source, and the heater 150 is powered by the external power source, so as to heat the target 300 in the chamber 111.
As shown in fig. 1, in one embodiment, a temperature detector 190 is further disposed in the cavity 111. By providing the temperature detector 190, the temperature inside the cavity 111 can be monitored conveniently. The temperature detector 190 is specifically a thermometer, and more specifically, the thermometer is an infrared thermometer.
As shown in fig. 1, in one embodiment, a vacuum gauge 210 is further disposed in the cavity 111. By providing the vacuum gauge 210, the degree of vacuum inside the cavity 111 can be monitored. Wherein, the vacuum gauge 210 can be resistance silicon tube vacuum gauge 210 or ionization silicon tube vacuum gauge 210, and resistance silicon tube vacuum gauge 210 and ionization silicon tube vacuum gauge 210 are the compound sum in electron vacuum, are equipped with the digital display screen, can show the vacuum measurement result in the furnace chamber 111 in real time, and the control operation is more convenient.
In another embodiment, the ceramic connecting device 10 further includes a cooling system connected to the work furnace 100, and the cooling system can cool the outer wall of the work furnace 100, so as to prevent the work furnace 100 from damaging the cables outside the work furnace 100 when the temperature is too high, or accidentally burning the workers, etc., thereby prolonging the service life of the cables and increasing the safety factor of the workers.
Specifically, the cooling system is a plurality of cooling channels, the plurality of cooling channels are disposed at intervals on the outer wall of the work furnace 100, and the cooling channels are used for passing a coolant with a low temperature, so as to cool the outer wall of the work furnace 100. Further, the plurality of cooling channels are serpentine-shaped as a whole.
The connection sample is silicon carbide ceramic as an example, and the target material is formed by mixing iron, cobalt and nickel. Before the ceramic connecting device 10 is used, silicon carbide ceramic is firstly put between the fixed clamping portion 131 and the movable clamping portion 132 in the work furnace 100 through the furnace door, and the position of the movable clamping portion 132 is adjusted, so that the fixed clamping portion 131 and the movable clamping portion 132 are elastically abutted against the two opposite ends of the silicon carbide ceramic, and the silicon carbide ceramic is fixed.
After the furnace door is closed, the vacuum generator is started, and the working furnace 100 is vacuumized through the vacuum interface 140, so that the vacuum degree in the working furnace 100 reaches 10 -1 Pa. And the degree of vacuum in the cavity 111 is monitored by the vacuum gauge 210.
The pressure regulator is used to load the silicon carbide ceramic, thereby controlling the pressure of the movable clamping portion 132 on the silicon carbide ceramic.
The power is powered on, the heater 150 is started to heat the target material 300 to 1500 ℃, and the temperature of the target material 300 is monitored through the temperature detector.
When the temperature of the target 300 is raised to 1500 ℃ and the vacuum degree inside the furnace chamber 111 is lower than the saturated vapor pressure of the target 300, the target 300 converges toward the gap 410 of the silicon carbide ceramic in a vapor form, so that an intermediate connection layer 500 is formed at the gap 410, and the connection of the silicon carbide ceramic is realized.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent should be subject to the appended claims.
Claims (10)
1. A ceramic joining device, comprising:
the device comprises a work furnace (100), wherein a furnace cavity (111) is formed inside the work furnace (100), and the furnace cavity (111) is used for accommodating a target (300);
a clamping mechanism (130) located within the oven cavity (111) for holding a sample (400) to be connected;
a vacuum port (140) in communication with the furnace chamber (111) for connection to a vacuum generator;
the heater (150) is connected to the working furnace (100) and is used for heating the target (300) in the furnace chamber (111) to a preset temperature;
when the vacuum degree in the furnace chamber (111) is lower than the saturated vapor pressure of the target (300), the target (300) at the preset temperature is converged to the sample (400) to be connected in a vapor form, so that a gas permeation reaction occurs in a gap (410) of the sample (400) to be connected and a connection layer (500) is formed.
2. The ceramic connection device according to claim 1, wherein the clamping mechanism (130) comprises a fixed clamping portion (131) and a movable clamping portion (132) spaced apart along a first direction, and the movable clamping portion (132) is configured to move linearly relative to the fixed clamping portion (131) in an operable manner, so that the fixed clamping portion (131) and the movable clamping portion (132) are respectively abutted against two opposite ends of the sample (400) to be connected.
3. The ceramic connecting device according to claim 2, further comprising an operating portion (170) and an elastic member (160), the elastic member (160) being connected between the operating portion (170) and the movable clamp portion (132); at least a portion of the operating portion (170) is located outside the oven cavity (111);
the operation part (170) is pressed to drive the movable clamping part (132) to approach to the sample (400) to be connected, and the movable clamping part (132) is elastically abutted to the sample (400) to be connected.
4. Ceramic connecting device according to claim 3, characterized in that the fixed clamping portion (131) and the movable clamping portion (132) each comprise a push rod (1321) and an abutment block (1322), the push rod (1321) extending in a first direction, the abutment block (1322) projecting in a second direction with respect to the push rod (1321);
the push rod (1321) is used for supporting the sample (400) to be connected, and the abutting block (1322) is used for abutting against the sample (400) to be connected.
5. Ceramic connecting device according to claim 4, characterized in that the abutment block (1322) is configured with a limiting groove towards one end of the sample to be connected (400), against the groove wall of which limiting groove the sample to be connected (400) can abut.
6. The ceramic connection device according to claim 1, wherein a support body (180) is arranged in the furnace chamber (111), the support body (180) being used for mounting a target (300); the clamping mechanism (130) is connected to the support body (180).
7. The ceramic connecting device according to claim 6, wherein the work furnace (100) comprises a furnace body (110) and a furnace cover (120) detachably connected to the furnace body (110), which cooperate to form the furnace chamber (111);
the support body (180) is detachably connected to the furnace body (110).
8. The ceramic connection device according to claim 7, wherein a seal is connected between the furnace body (110) and the furnace cover (120).
9. The ceramic connection device according to claim 1, wherein the heater (150) comprises a heating coil (151), the heating coil (151) being arranged around the target (300).
10. The ceramic connection device according to claim 1, wherein a temperature detector (190) is further disposed in the furnace chamber (111); and/or
A vacuum gauge (210) is further arranged in the furnace cavity (111).
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211099384.8A CN115635216A (en) | 2022-09-08 | 2022-09-08 | Ceramic connecting device |
PCT/CN2023/074131 WO2024051076A1 (en) | 2022-09-08 | 2023-02-01 | Ceramic joining device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211099384.8A CN115635216A (en) | 2022-09-08 | 2022-09-08 | Ceramic connecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN115635216A true CN115635216A (en) | 2023-01-24 |
Family
ID=84941012
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202211099384.8A Pending CN115635216A (en) | 2022-09-08 | 2022-09-08 | Ceramic connecting device |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN115635216A (en) |
WO (1) | WO2024051076A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024051076A1 (en) * | 2022-09-08 | 2024-03-14 | 岭东核电有限公司 | Ceramic joining device |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE389958B (en) * | 1975-04-25 | 1976-11-22 | Asea Ab | CYLINDER-SHAPED ELEGANT OVEN FOR HANDLING MATERIAL AT HIGH TEMPERATURE IN A GAS AUTHOSPER UNDER HIGH PRESSURE |
US8487220B2 (en) * | 2009-11-18 | 2013-07-16 | Daniel F. Serrago | Vacuum oven |
CN102260802B (en) * | 2011-07-20 | 2013-06-12 | 佛山市钜仕泰粉末冶金有限公司 | Target preparation device and target processing method thereof |
CN106735670A (en) * | 2017-01-04 | 2017-05-31 | 青岛蓝光晶科新材料有限公司 | A kind of modified target furnace apparatus and target bonding method |
CN209246652U (en) * | 2018-09-19 | 2019-08-13 | 福建省创飞新材料科技有限公司 | Sintering equipment is used in a kind of processing of ceramic target |
CN110986586B (en) * | 2019-12-19 | 2020-11-10 | 上海大学 | Sintering device and preparation method of oxide ceramic target |
CN113714583B (en) * | 2021-08-16 | 2022-09-16 | 江苏新智达新能源设备有限公司 | Vacuum welding furnace |
CN115635216A (en) * | 2022-09-08 | 2023-01-24 | 岭东核电有限公司 | Ceramic connecting device |
-
2022
- 2022-09-08 CN CN202211099384.8A patent/CN115635216A/en active Pending
-
2023
- 2023-02-01 WO PCT/CN2023/074131 patent/WO2024051076A1/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024051076A1 (en) * | 2022-09-08 | 2024-03-14 | 岭东核电有限公司 | Ceramic joining device |
Also Published As
Publication number | Publication date |
---|---|
WO2024051076A1 (en) | 2024-03-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10991616B2 (en) | High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same | |
US11331738B2 (en) | High temperature resistant silicon joint for the joining of ceramics | |
JP4889385B2 (en) | Heater unit and shaft | |
CN115635216A (en) | Ceramic connecting device | |
US6878211B2 (en) | Supporting structure for a ceramic susceptor | |
RU2004102206A (en) | HIGH TEMPERATURE ELECTROSTATIC HOLDER | |
US6583980B1 (en) | Substrate support tolerant to thermal expansion stresses | |
US20230381859A1 (en) | Compound Furnace | |
KR20150094712A (en) | Thermal radiation barrier for substrate processing chamber components | |
JP4530896B2 (en) | Plate type far infrared heater for vacuum heating furnace | |
JP2005133653A (en) | Stirling engine | |
US5224857A (en) | Radiant tube arrangement for high temperature, industrial heat treat furnace | |
US20080314320A1 (en) | Chamber Mount for High Temperature Application of AIN Heaters | |
US6414277B1 (en) | Ultra-high-temperature heat treatment apparatus | |
US5163416A (en) | Radiant tube arrangement for high temperature, industrial heat treat furnace | |
EP3183522B1 (en) | Support and compression assemblies for curvilinear molten metal transfer device | |
CN112242206B (en) | Support connecting device and tubular connecting furnace | |
KR102287257B1 (en) | Device for Brazing using Electron Beam and Induction coil and Method for Controlling the Same | |
US20210023680A1 (en) | Workpiece pallet and machining system | |
JP2014086726A (en) | Member for semiconductor manufacturing device and manufacturing method thereof | |
KR20170017787A (en) | Methods for directly bonding silicon to silicon or silicon carbide to silicon carbide | |
CN113218178A (en) | Ultrasonic amplitude transformer for vacuum high-temperature sintering furnace | |
CN112582330A (en) | Semiconductor processing equipment and electrostatic chuck assembly thereof | |
CN111218672A (en) | MOCVD heater | |
WO2022209292A1 (en) | Placement panel and placement structure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |