CN115630599A

CN115630599A - Method, apparatus, and medium for layout processing

Info

Publication number: CN115630599A
Application number: CN202211638018.5A
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Advanced Manufacturing EDA Co Ltd
Current assignee: Advanced Manufacturing EDA Co Ltd
Priority date: 2022-12-20
Filing date: 2022-12-20
Publication date: 2023-01-20
Anticipated expiration: 2042-12-20
Also published as: CN115630599B

Abstract

A method, apparatus, and medium for layout processing are provided according to example embodiments of the present disclosure. In the method, a layout to be processed is obtained. The layout comprises auxiliary patterns for auxiliary imaging. The method also includes determining cost gradient information associated with the auxiliary graph. The cost gradient information indicates imaging cost changes that would result from changing the assist pattern along one or more directions. The method also includes determining a target direction based on the cost gradient information. The method also includes moving the assist feature in the layout based on the target direction. In this way, the quality of the layout can be improved by moving the assist pattern in the target direction.

Description

Method, apparatus, and medium for layout processing

Technical Field

Embodiments of the present disclosure relate generally to the field of integrated circuits, and more particularly, to methods, apparatuses, and media for layout processing.

Background

The circuit layout (also simply referred to as layout) is a series of geometric figures converted from a designed and simulated optimized circuit, and comprises physical information data related to devices such as the size of the integrated circuit, the topology definition of each layer and the like. The integrated circuit manufacturer manufactures the mask according to the data. The layout pattern on the mask determines the size of the devices or physical layer of connections on the chip.

As technology nodes of an integrated circuit manufacturing process decrease, distances between target patterns in an integrated circuit decrease, and the density of layout patterns on a mask corresponding to the target patterns increases. Since the light wave is diffracted at the layout pattern of the mask, the actually formed pattern is distorted compared to the layout pattern. For this reason, optical Proximity Correction (OPC) has been proposed to adjust the layout pattern of a mask in order to form a desired target pattern. In advanced semiconductor process fabrication, sub-resolution assist feature (SRAF) techniques are applied in OPC. However, how to determine the position of the assist feature on the layout is a matter of concern. The auxiliary pattern placement methods used at present have difficulty in obtaining satisfactory results.

Disclosure of Invention

In a first aspect of the disclosure, a method for layout processing is provided. In the method, a layout to be processed is obtained. The layout comprises auxiliary patterns for auxiliary imaging. The method also includes determining cost gradient information associated with the auxiliary graph. The cost gradient information indicates imaging cost changes that would be caused by changing the assist pattern along one or more directions. The method also includes determining a target direction based on the cost gradient information. The method also includes moving the assist feature in the layout based on the target direction. In this way, the quality of the layout can be improved by moving the assist pattern.

In a second aspect of the present disclosure, an electronic device is provided. The electronic device includes a processor, and a memory coupled to the processor. The memory has instructions stored therein, which when executed by the processor, cause the electronic device to perform a method for layout processing according to the first aspect of the present disclosure.

In a third aspect of the disclosure, a computer-readable storage medium is provided. The computer readable storage medium has stored thereon a computer program. The computer program, when executed by a processor, implements a method for layout processing according to the first aspect of the present disclosure.

According to an embodiment of the present disclosure, a target direction is determined according to cost gradient information associated with an auxiliary pattern in the layout for auxiliary imaging. The cost gradient information indicates imaging cost changes that would result from changing the assist pattern along one or more directions. Further, the assist feature is moved in the layout based on the target direction. In this way, the assist pattern can be moved in the target direction to reduce the imaging cost of the layout. Accordingly, embodiments of the present disclosure can form a satisfactory pattern on a wafer by determining a target direction and moving an auxiliary pattern in the target direction.

It should be understood that the statements herein set forth in this summary are not intended to limit the essential or critical features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become apparent from the following description.

Drawings

The above and other features, advantages and aspects of various embodiments of the present disclosure will become more apparent by referring to the following detailed description when taken in conjunction with the accompanying drawings. In the drawings, like or similar reference characters designate like or similar elements, and wherein:

FIG. 1 illustrates a schematic diagram of an example environment in which embodiments of the present disclosure can be implemented;

FIG. 2 illustrates a flow diagram of a method for layout processing according to some embodiments of the present disclosure;

FIG. 3 illustrates a schematic diagram of moving an auxiliary graphic according to a target direction, according to some embodiments of the present disclosure;

FIG. 4 illustrates another schematic diagram of moving an auxiliary graphic according to a target direction, according to some embodiments of the present disclosure;

FIG. 5 illustrates yet another schematic diagram of moving an auxiliary graphic according to a target direction, according to some embodiments of the present disclosure;

FIG. 6 illustrates a schematic diagram of the results of processing a layout in accordance with some embodiments of the present disclosure; and

FIG. 7 shows a block diagram of an electronic device/server in which one or more embodiments of the present disclosure may be implemented.

Detailed Description

Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While certain embodiments of the present disclosure are shown in the drawings, it is to be understood that the present disclosure may be embodied in various forms and should not be construed as limited to the embodiments set forth herein, but rather are provided for a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the disclosure are for illustration purposes only and are not intended to limit the scope of the disclosure.

In describing embodiments of the present disclosure, the terms "include" and "comprise," and similar language, are to be construed as open-ended, i.e., "including but not limited to. The term "based on" should be understood as "based at least in part on". The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first," "second," and the like may refer to different or the same objects. Other explicit and implicit definitions are also possible below.

As described above, as technology nodes of an integrated circuit manufacturing process decrease, it has been proposed to apply an assist pattern technology such as SRAF to OPC. However, how to determine the optimal position of such an auxiliary pattern is a matter of concern. Some methods based on rule or model determination have been proposed to determine the placement of the auxiliary graphics. However, these methods are still unsatisfactory.

To this end, an embodiment of the present disclosure proposes a method for layout processing. According to an embodiment of the present disclosure, a target direction is determined according to cost gradient information associated with an auxiliary pattern in the layout for auxiliary imaging. The cost gradient information indicates imaging cost changes that would result from changing the assist pattern along one or more directions. Further, the assist feature is moved in the layout based on the target direction. In this way, the auxiliary graphic can be moved in the target direction to reduce the imaging cost. Accordingly, embodiments of the present disclosure can form a satisfactory pattern on a wafer by determining a target direction and moving an auxiliary pattern in the target direction.

Various example implementations of this approach will be described in detail below with reference to the figures.

Referring initially to FIG. 1, a schematic diagram of an example environment 100 is shown in which embodiments of the present disclosure can be implemented. The example environment 100 may generally include an electronic device 110. In some embodiments, the electronic device 110 may be a computing-enabled device such as a personal computer, workstation, server, or the like. The scope of the present disclosure is not limited in this respect.

The electronic device 110 takes as input the layout 120 to be processed. The layout 120 to be processed includes a first target pattern 122 and a first auxiliary pattern 124. The first auxiliary pattern 124 is used to assist in imaging the first target pattern 122 in the layout. As an example, the first auxiliary graphic 124 may have a sub-resolution. In other words, the first auxiliary graphic 124 may include a sub-resolution auxiliary graphic. It is generally desirable that such sub-resolution assist patterns do not form corresponding patterns on the wafer during exposure. It should be understood that the shapes and sizes of the respective layouts, masks, and assist patterns shown in fig. 1 are merely exemplary, and not restrictive. The scope of the present disclosure is not limited in this respect.

The electronic device 110 processes the to-be-processed layout 120 to obtain a processed layout 130. The processed layout 130 includes the first target feature 122 and the second auxiliary feature 134. The second auxiliary pattern 134 in the processed layout 130 is shifted compared to the first auxiliary pattern 124 in the pending layout 120. The above-described displacement of the second auxiliary graphic 134 from the first auxiliary graphic 124 may be determined by the electronic device 110. This will be described in further detail below in conjunction with fig. 2-5.

FIG. 2 illustrates a flow diagram of a method 200 for layout processing according to some embodiments of the present disclosure. In some embodiments, the method 200 may be performed by the electronic device 110 as shown in fig. 1. It should be understood that method 200 may also include additional blocks not shown and/or may omit certain block(s) shown, as the scope of the present disclosure is not limited in this respect.

At block 210, the electronic device 110 obtains a layout to be processed, such as the layout to be processed 120. As previously mentioned, the layout 120 to be processed includes the first auxiliary pattern 124 for auxiliary imaging.

At block 220, the electronic device 110 determines cost gradient information associated with the auxiliary graphic. The cost gradient information indicates imaging cost changes that would result from changing the assist pattern along one or more directions. The imaging cost may be used to represent the cost of the lithographic process. For example, the imaging cost may represent the difference between a pattern formed on a wafer using a mask and a pattern desired to be formed on the wafer under the conditions of the photolithography process parameters. The electronic device 110 can employ any suitable cost function, cost model, or the like to determine the imaging cost and determine cost gradient information based on changes in the imaging cost caused by changing the assist pattern. The scope of the present disclosure is not limited in this respect.

In some embodiments, the auxiliary graph as a whole may be used to determine cost gradient information associated therewith. Fig. 3 illustrates an example of determining cost gradient information with the third auxiliary graph 310 as a whole, according to some embodiments of the present disclosure. The third auxiliary graphic 310 is an example of the first auxiliary graphic 124 in fig. 1. In the example of fig. 3, the electronic device 110 determines a plurality of edges of the third auxiliary graphic 310. For example, the plurality of sides includes at least two sides opposite to each other. In the example of fig. 3, the plurality of edges may be four edges (also referred to as a first edge, a second edge, a third edge, and a fourth edge) of the third auxiliary graphic 310, which are left, right, upper, and lower. It is understood that the plurality of edges may also include only the upper and lower edges of the third auxiliary graphic 310, or only the left and right edges of the third auxiliary graphic 310 in some embodiments.

Next, the electronic device 110 determines an edge cost gradient corresponding to each of the plurality of edges. The edge cost gradient indicates a change in imaging cost that would be caused by moving the edge along a preset direction. The preset direction may be perpendicular to the side and toward the outside of the auxiliary graphic. The first, second, third, and

fourth arrows

311, 313, 315, and 317 in fig. 3 show preset directions perpendicular to right, left, upper, and lower sides of the third auxiliary graphic 310 and toward the outside of the third auxiliary graphic 310, respectively.

As an example, the imaging cost may be any function related to the light signal. Equation (1) shows an example cost function:

Cost(x, y) = I(x, y) ² （1）

wherein, the first and the second end of the pipe are connected with each other, (ii) (x, y) To refer to a coordinate position on the layout,Cost(x, y) Referring to the cost of imaging at that coordinate location,I(x, y) Refers to the optical signal at that location. As an example, the optical signal may be the light intensity itself. Alternatively, the light signal may be other forms of light intensity, such as the square of the light intensity, the logarithm of the light intensity, or other parameters related to the light intensity. It should be appreciated that equation (1) is merely exemplary and that the imaging cost may be determined using other suitable functions.

In some embodiments, the optical signalI(x, y)Can be determined using the following formula (2):

（2）

wherein

A kernel function representing an OPC model;

representing a graph on the layout; such as auxiliary graphics;N _a representing the number of kernel functions;

represents a light intensity distribution;

representing a convolution operation. It should be understood that equation (2) is merely exemplary and that the optical signal may be determined using other suitable functions.

In an example where the optical signal is determined using equation (2) and the imaging cost is determined using equation (1), the edge cost gradient may be determined by taking the derivative of equation (1) on the edge of the assist pattern. That is, the edge cost gradient can be determined using equation (3):

dCost/dEdge = dCost(x, y) /dEdge = dI(x, y) ² /dEdge （3）

wherein the content of the first and second substances,dCost/dEdgethe edge cost gradient is referred to as the edge cost gradient,dEdgerefers to the derivation of the edge,Edgerefers to an edge of the auxiliary graphic, which may have coordinate information.

By using the above equations (1) to (3), the electronic device 110 may determine an edge cost gradient corresponding to each of the plurality of edges.

In some embodiments, the electronic device 110 may use an edge cost gradient corresponding to each of the plurality of edges as the cost gradient information of the third auxiliary graphic 310. As an example, the electronic device 110 may determine a first edge cost gradient 312 corresponding to the right edge, a second edge cost gradient 314 corresponding to the left edge, a third edge cost gradient 316 corresponding to the upper edge, and a fourth edge cost gradient 318 corresponding to the lower edge as the cost gradient information of the third auxiliary graph 310.

It should be understood that although the third auxiliary graphic 310 is illustrated as a rectangle in the example of fig. 3, this is merely exemplary and the auxiliary graphic may be a graphic of any shape, such as any polygon. Although the first direction and the second direction are perpendicular to each other in the example of fig. 3, this is merely exemplary. In some embodiments, the first direction and the second direction may have an included angle of any size depending on the shape of the auxiliary pattern. As an example, in an example in which the auxiliary figure is a parallelogram, the first direction and the second direction may be directions respectively perpendicular to two sets of parallel sides of the parallelogram.

By determining the cost gradient information of the third auxiliary pattern 310 according to the cost gradients of the plurality of sides of the third auxiliary pattern 310, the cost gradients of the respective sides of the auxiliary pattern can be sufficiently considered, thereby providing more accurate cost gradient information in the subsequent determination of the target direction.

Several examples of determining the cost gradient information for the third auxiliary graph 310 as a whole are described above in connection with FIG. 3. In some other embodiments, the electronic device 110 may divide the third auxiliary graphic 310 into a plurality of sub-graphics. The electronic device 110 may determine the cost gradient information of the third auxiliary graph 310 according to the local cost gradient information of the plurality of sub-graphs.

FIG. 4 illustrates an example of determining cost gradient information for a third auxiliary graph 310 from local cost gradient information for sub-graphs of the third auxiliary graph 310, according to some embodiments of the present disclosure. In the example of fig. 4, the electronic device 110 divides the third auxiliary graphic 310 into a plurality of sub-graphics, i.e., a first sub-graphic 401, a second sub-graphic 402, a third sub-graphic 403, a fourth sub-graphic 404, a fifth sub-graphic 405, a sixth sub-graphic 406, a seventh sub-graphic 407, an eighth sub-graphic 408, and a ninth sub-graphic 409, according to the shape of the third auxiliary graphic 310. It should be understood that the division of the third auxiliary graphic 310 illustrated in fig. 4 is merely exemplary, and not restrictive. The third auxiliary graphic 310 may be divided into any number of sub-graphics. Each sub-pattern may be rectangular or may have any other suitable shape. The shapes and sizes of the sub-patterns may be the same or different. The scope of the disclosure is not limited in this respect. The following description will be given taking the example of fig. 4 as an example.

In some embodiments, the electronic device 110 determines, for a given sprite of the plurality of sprites, local cost gradient information for the given sprite. The local cost gradient information indicates imaging cost variations that would be caused by moving a plurality of edges of a given sprite, respectively. Taking the first sub-pattern 401 as an example of a given sub-pattern, the electronic device 110 determines a fifth side 411 and a sixth side 413 opposite to each other in the first sub-pattern 401.

Next, electronic device 110 determines a fifth edge cost gradient 412 corresponding to fifth edge 411 and a sixth edge cost gradient 414 corresponding to sixth edge 413. The fifth edge cost gradient 412 indicates the imaging cost variation that would be caused by moving the fifth edge 411 in the third direction. The third direction may be the direction shown in fig. 4, up the arrow. The sixth edge cost gradient 414 indicates the imaging cost variation that would result from moving the sixth edge 413 along the fourth direction. The fourth direction is opposite to the third direction. For example, the fourth direction may be a direction shown in fig. 4 downward along the arrow. The electronic device 110 may determine a fifth side cost gradient 412 and a sixth side cost gradient 414 as the cost gradient information associated with the third auxiliary graphic 310.

In some embodiments, the electronic device 110 selects one or more sub-graphics or all sub-graphics from a plurality of sub-graphics. The electronic device 110, in turn, determines, for each of the selected sub-graphs, a cost gradient in the third direction and the fourth direction, respectively. For example, the electronic device 110 may also determine a seventh edge cost gradient 416 and an eighth edge cost gradient 418 for the ninth sub-graph 409.

In such an embodiment, the handling of the cost gradient is refined. The layout environment may be different at different positions of the auxiliary pattern, which results in different costs at different positions. By dividing the third auxiliary pattern 310 into a plurality of sub-patterns and determining the cost gradient of each sub-pattern, different cost gradients at different positions of the third auxiliary pattern 310 can be fully considered, so that the target direction determined later is more precise.

Several examples of determining the cost gradient information in both ways of the third auxiliary graphic 310 as a whole and of dividing the third auxiliary graphic 310 into a plurality of sub-graphics have been described above. With continued reference to FIG. 2, at block 230, the electronic device 110 determines a target direction based on the cost gradient information.

In the example described above with reference to fig. 3 in which the third auxiliary graph 310 as a whole determines the cost gradient information, the electronic device 110 may determine the first composite text gradient 322 along the first direction based on the first edge cost gradient 312 corresponding to the right edge and the second edge cost gradient 314 corresponding to the left edge. The first direction is perpendicular to the left and right sides. In other words, the first direction is a horizontal direction. For example, a vector sum or a weighted vector sum of the first edge cost gradient 312 and the second edge cost gradient 314 may be determined as the first composite cost gradient 322. As an example, equation (4) may be employed to determine the first composite version gradient 322:

gcx = （g1x-g3x）/2 （4）

where g1x represents a first edge cost gradient 312, g3x represents a second edge cost gradient 314, and gcx represents a first composite cost gradient 322.

It should be understood that the above-listed manner of calculating the combined cost gradient is merely exemplary and not limiting. The combined cost gradient of the plurality of cost gradients may be determined in any suitable manner. The scope of the present disclosure is not limited in this respect. As another example, equation (5) may be employed to determine the first composite text gradient 322:

gcx = （w1*g1x-w2*g3x）/2 （5）

where g1x represents the first edge cost gradient 312, g3x represents the second edge cost gradient 314, w1 represents the weight of the first edge, w2 represents the weight of the second edge, and gcx represents the first composite cost gradient 322.

The g1x, g3x involved in the above calculation may be derived by the edge cost gradient algorithm of the above-described equations (1) to (3). In some embodiments, other edge cost gradient calculation methods may be employed to determine the individual edge cost gradients.

Similarly, the electronic device 110 determines a second composite cost gradient 324 along the second direction based on the third edge cost gradient 316 corresponding to the upper edge and the fourth edge cost gradient 318 corresponding to the lower edge. The second direction is perpendicular to the upper and lower sides. In other words, the second direction is a vertical direction. The second composite version gradient 324 may be determined in a similar computational manner as the first composite version gradient 322.

Next, the electronic device 110 may determine an overall target direction for the third auxiliary graph 310 based on at least the first composite text gradient 322, the second composite text gradient 324, and the angle between the first direction and the second direction. In the example of fig. 3, the electronic device 110 may determine an overall first target direction 330 based on the first composite text gradient 322, the second composite text gradient 324, and the 90 degree angle between the first direction and the second direction, as indicated by the dashed arrow. It is understood that in some other embodiments, the first direction and the second direction may have other angles therebetween. It should be understood that the various directions shown in fig. 3 and other figures herein are merely exemplary and are not intended to limit the present disclosure in any way.

By determining the first target direction 330 according to the cost gradient information of the plurality of edges of the third auxiliary graph 310, the overall cost gradient information of each edge of the third auxiliary graph 310 may be fully considered, so as to determine the more accurate first target direction 330.

In some embodiments, in the example of dividing the third auxiliary graphic 310 into sub-graphics to determine cost gradient information described above with reference to fig. 4, the electronic device 110 may determine a local target direction for a given sub-graphic without determining an overall target direction for the entire third auxiliary graphic 310.

Taking the example in fig. 4 as an example, the electronic device 110 may determine a third set of composite cost gradients 422 based on the fifth edge cost gradient 412 and the sixth edge cost gradient 414. As an example, a vector sum or a weighted vector sum of the fifth edge cost gradient 412 and the sixth edge cost gradient 414 may be determined as the third set of composite cost gradients 422. For example, gcy1 = (g 1y-g2 y)/2 may be employed to determine the third set of composite template gradients 422, where g1y represents the fifth edge cost gradient 412, g2y represents the sixth edge cost gradient 414, and gcy1 represents the third set of composite template gradients 422. In other embodiments, gcy1 and g2y may be weighted separately and subtracted from each other. The electronic device 110 may determine the direction of the third set of composite text gradients 422 as the local target direction for the first sub-graphic 401.

Similarly, the electronic device 110 may determine a combination cost gradient for more sub-graphs, and thereby determine corresponding local target directions for more sub-graphs. For example, for the ninth sub-pattern 409, a fourth set of composite cost gradients 424 may be determined based on the seventh cost gradient 416 and the eighth cost gradient 418. A local target direction for the ninth sub-pattern 409 may be determined based on the fourth set of composite pattern gradients 424.

Several examples of determining the overall target direction and the local target direction are described above by taking the rectangular third auxiliary graph 310 as an example. In some embodiments, the auxiliary graphics may also be of arbitrary shape. Fig. 5 shows an example fifth auxiliary graphic 510 of an arbitrary shape. The fifth auxiliary graphic 510 is an example of the first auxiliary graphic 124 in fig. 1. In some embodiments, an overall target direction may be determined for the fifth auxiliary graphic 510.

As an example, the electronic device 110 may determine the fifth combined cost gradient 512 in the horizontal direction based on a plurality of cost gradients corresponding to a plurality of vertically oriented edges to the left of the fifth auxiliary graphic 510 and a plurality of cost gradients corresponding to a plurality of vertically oriented edges to the right of the fifth auxiliary graphic 510. Similarly, the electronic device 110 may determine the sixth combined cost gradient 514 along the vertical direction based on a plurality of cost gradients corresponding to a plurality of horizontally-oriented edges on an upper side of the fifth auxiliary graphic 510 and a plurality of cost gradients corresponding to a plurality of horizontally-oriented edges on a lower side of the fifth auxiliary graphic 510. The electronic device 110 in turn determines a second target direction 520 for the entirety of the fifth auxiliary graphic 510 based on the fifth combined cost gradient 512 and the sixth combined cost gradient 514, as indicated by the dashed arrow in fig. 5.

It should be understood that, in some embodiments, the electronic device 110 may also determine the target direction of the fifth auxiliary graph 510 in a manner of dividing the fifth auxiliary graph 510 and respectively determining the local target directions (similar to that described with reference to fig. 4). The fifth auxiliary graphic 510 may be divided into sub-graphics of various shapes, sizes, and numbers in any division manner. For each sub-graph, a method similar to that described with reference to fig. 4 may be adopted to determine the local target direction separately, and the description is not repeated here.

With continued reference to FIG. 2, at block 240, the electronic device 110 moves the first assist feature 124 in the layout 120 to be processed based on the target orientation. In an example of determining an overall target direction for the first auxiliary graphic 124, the electronic device 110 may move the first auxiliary graphic 124 overall based on the overall target direction. For example, in the example of fig. 3, the third auxiliary graphic 310 may be moved along the first target direction 330. As another example, in the example of fig. 5, the fifth auxiliary graphic 510 may be moved along the second target direction 520 to obtain a moved sixth auxiliary graphic 530. Additionally or alternatively, in some embodiments, the electronic device 110 may move at least a portion of the first auxiliary graphic 124 based on the overall target direction. For example, the electronic device 110 may move a predetermined portion, such as a left portion or a preselected portion, of the first auxiliary graphic 124 based on the overall target direction.

As described above, the electronic device 110 may drive the moving direction of the first auxiliary graphic 124 according to the cost gradient. That is, the cost gradient may determine the direction in which the first auxiliary pattern 124 moves. The size of the movement of the first auxiliary graph 124 can be determined in a predetermined manner, a heuristic manner, or any other suitable manner.

In particular, in some embodiments, at least a portion of the first auxiliary graphic 124 may be moved with a predetermined movement magnitude based on the determined target direction. Additionally or alternatively, in some embodiments, a heuristic approach may be employed to determine the size of the final movement of the first assist feature 124 in the layout 120 to be processed. As an example, the electronic device 110 may move at least a portion of the first assist feature 124 a first distance along the target direction to obtain an updated layout. The electronics 110 further determine whether the first imaging cost of the updated layout is less than the second imaging cost of the layout before the at least a portion of the first assist feature 124 is moved. If the electronic device 110 determines that the first imaging cost is less than the second imaging cost, the electronic device 110 moves at least a portion of the first auxiliary graphic 124 a second distance along the target direction.

In other words, if the electronic device 110 determines that the imaging cost of the moved layout is reduced, the first auxiliary graphic 124 may be moved continuously. The electronics 110 can determine the imaging cost of the layout that continues to move, and if the imaging cost continues to decrease, can continue to move the assist feature in the target direction until the imaging cost no longer decreases.

Conversely, if the electronic device 110 determines that the first imaging cost is not less than the second imaging cost, the electronic device 110 moves at least a portion of the first auxiliary graphic 124 a third distance less than the first distance in a direction opposite the target direction. In other words, if the electronic device 110 determines that the imaging cost of the shifted layout is increased or unchanged, the first auxiliary pattern 124 may be retracted by a third distance. After retracting the first auxiliary graphic 124 by the third distance, the electronic device 110 may continue to determine whether to continue to move the first auxiliary graphic 124 according to the change of the imaging cost.

By determining the movement size of the auxiliary graph in the heuristic mode, the imaging cost can be reduced as much as possible, and the quality of the layout is further improved.

In an example of dividing the first auxiliary graphic 124 and determining the local target direction, the electronic device 110 may move one or more of the plurality of sub-graphics along the local target direction determined for the sub-graphics. Additionally or alternatively, in some embodiments, the electronic device 110 may, for each sub-graphic of the plurality of sub-graphics, move the sub-graphic along the local target direction determined for the sub-graphic.

In the example of fig. 4, the electronic device 110 may determine the local target direction for each of the first sub-graph 401 through the ninth sub-graph 409, respectively. The electronic device 110 may in turn move each sub-graphic according to its local target direction.

In some embodiments, for each sub-pattern, a respective local target direction may be determined. In this case, the respective sub-graphics may be moved in the corresponding local target direction in a heuristic manner, in a similar manner to the overall movement of the auxiliary graphics. In this way, the moved fourth auxiliary graphic 430 may be obtained, as shown in fig. 4.

It should be understood that the moving direction and size of each sub-graphic in the fourth auxiliary graphic 430 are exemplary, and not restrictive. Although the moving direction of each sub pattern in the fourth auxiliary pattern 430 exhibits a certain regularity, this is merely exemplary, and in practice, the movement of each sub pattern depends on the determined cost gradient.

It should be understood that although in the examples herein, only one example of moving in a target direction for an assist feature in a layout is shown, in some embodiments, multiple assist features may be included in a layout. These auxiliary patterns may have different shapes. These auxiliary patterns may be rectangular or irregular. In an example where the layout includes a plurality of auxiliary patterns, the method of determining the target direction as a whole or dividing the sub-patterns to determine the target direction according to the present disclosure may be adopted to move each auxiliary pattern separately. The target direction may be determined in the same or different ways for different auxiliary graphics. The scope of the disclosure is not limited thereto. Further, in some embodiments, the auxiliary graphic may be moved multiple times, and the manner of each movement may be different. For example, the auxiliary graphic may be moved a distance in its entirety, and then the moved auxiliary graphic may be divided into a plurality of sub-graphics to be moved, respectively.

By adopting the scheme of the disclosure, the target direction can be determined and the auxiliary graph can be moved along the target direction according to the cost gradient information associated with the auxiliary graph in the layout. In this way, the imaging cost of the layout can be reduced as much as possible, thereby improving the quality of the layout.

FIG. 6 illustrates a schematic diagram of the results of processing a layout according to some embodiments of the present disclosure. In the layout in fig. 6, a second target graphic 610 is included. The second target feature 610 has a plurality of Process Variation (PV) evaluation points 612, 614, 616, and 618 thereon. As shown in fig. 6, the input second target graphic 610 remains unchanged from the output third target graphic 620.

In the layout of fig. 6, a plurality of input auxiliary patterns, i.e., a seventh auxiliary pattern 625, an eighth auxiliary pattern 635, a ninth auxiliary pattern 645, and a tenth auxiliary pattern 655, are also included. After moving according to an embodiment of the present disclosure, the auxiliary graphics are moved to the output eleventh, twelfth, thirteenth and fourteenth

auxiliary graphics

620, 630, 640 and 650. The imaging cost is respectively determined according to the input layout and the output layout of the plurality of PV evaluation points in FIG. 6, and the imaging cost of the output layout is reduced. In other words, after the auxiliary patterns are moved according to the embodiment of the disclosure, the quality of the layout can be improved.

Fig. 7 illustrates a block diagram of an electronic device/server 700 in which one or more embodiments of the present disclosure may be implemented. The electronic device/server 700 may be used, for example, to implement the electronic device 110 shown in fig. 1. It should be understood that the electronic device/server 700 illustrated in fig. 7 is merely exemplary and should not constitute any limitation as to the functionality or scope of the embodiments described herein.

As shown in fig. 7, the electronic device/server 700 is in the form of a general-purpose electronic device. The components of electronic device/server 700 may include, but are not limited to, one or more processors 710 or processing units, memory 720, storage 730, one or more communication units 740, one or more input devices 750, and one or more output devices 760. The processor 710 may be a real or virtual processor and may be capable of performing various processes according to programs stored in the memory 720. In a multi-processor system, multiple processing units execute computer-executable instructions in parallel to improve the parallel processing capability of the electronic device/server 700.

Electronic device/server 700 typically includes a number of computer storage media. Such media may be any available media that is accessible by electronic device/server 700 and includes, but is not limited to, volatile and non-volatile media, removable and non-removable media. Memory 720 may be volatile memory (e.g., registers, cache, random Access Memory (RAM)), non-volatile memory (e.g., read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory), or some combination thereof. Storage 730 may be a removable or non-removable medium and may include a machine-readable medium, such as a flash drive, a magnetic disk, or any other medium, which may be capable of being used to store information and/or data (e.g., training data for training) and which may be accessed within electronic device/server 700.

The electronic device/server 700 may further include additional removable/non-removable, volatile/nonvolatile storage media. Although not shown in FIG. 7, a magnetic disk drive for reading from and writing to a removable, non-volatile magnetic disk (e.g., a "floppy disk") and an optical disk drive for reading from or writing to a removable, non-volatile optical disk may be provided. In these cases, each drive may be connected to a bus (not shown) by one or more data media interfaces. Memory 720 may include a computer program product 725 having one or more program modules configured to perform the various methods or acts of the various embodiments of the disclosure.

The communication unit 740 enables communication with other electronic devices through a communication medium. Additionally, the functionality of the components of the electronic device/server 700 may be implemented in a single computing cluster or multiple computing machines, which are capable of communicating over a communications connection. Thus, electronic device/server 700 may operate in a networked environment using logical connections to one or more other servers, network Personal Computers (PCs), or another network node.

Input device 750 may be one or more input devices such as a mouse, keyboard, trackball, or the like. Output device 760 may be one or more output devices such as a display, speakers, printer, or the like. Electronic device/server 700 may also communicate with one or more external devices (not shown), such as storage devices, display devices, etc., as desired through communication unit 740, with one or more devices that enable a user to interact with electronic device/server 700, or with any device (e.g., network card, modem, etc.) that enables electronic device/server 700 to communicate with one or more other electronic devices. Such communication may be performed via input/output (I/O) interfaces (not shown).

According to an exemplary implementation of the present disclosure, a computer-readable storage medium is provided, on which one or more computer instructions are stored, wherein the one or more computer instructions are executed by a processor to implement the above-described method.

Various aspects of the present disclosure are described herein with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products implemented in accordance with the disclosure. It will be understood that each block of the flowchart illustrations and/or block diagrams, and combinations of blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer readable program instructions.

These computer-readable program instructions may be provided to a processing unit of a general purpose computer, special purpose computer, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processing unit of the computer or other programmable data processing apparatus, create means for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks. These computer-readable program instructions may also be stored in a computer-readable storage medium that can direct a computer, programmable data processing apparatus, and/or other devices to function in a particular manner, such that the computer-readable medium storing the instructions comprises an article of manufacture including instructions which implement the function/act specified in the flowchart and/or block diagram block or blocks.

The computer readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other devices to cause a series of operational steps to be performed on the computer, other programmable apparatus or other devices to produce a computer implemented process such that the instructions which execute on the computer, other programmable apparatus or other devices implement the functions/acts specified in the flowchart and/or block diagram block or blocks.

The flowchart and block diagrams in the figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various implementations of the present disclosure. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of instructions, which comprises one or more executable instructions for implementing the specified logical function(s). In some alternative implementations, the functions noted in the block may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems which perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.

The foregoing has described implementations of the present disclosure, and the above description is illustrative, not exhaustive, and not limited to the implementations disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described implementations. The terminology used herein was chosen in order to best explain the principles of implementations, the practical application, or improvements to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the implementations disclosed herein.

Claims

1. A layout processing method is characterized by comprising the following steps:

obtaining a layout to be processed, wherein the layout comprises an auxiliary graph for auxiliary imaging;

determining cost gradient information associated with the assist feature, the cost gradient information indicating imaging cost changes that would result from changing the assist feature along one or more directions;

determining a target direction based on the cost gradient information; and

moving the auxiliary graph in the layout based on the target direction.

2. The layout processing method according to claim 1, wherein determining cost gradient information associated with the assist feature comprises:

determining a plurality of edges of the auxiliary graph, wherein the plurality of edges at least comprise two edges opposite to each other; and

determining an edge cost gradient corresponding to each edge of the plurality of edges, wherein the edge cost gradient indicates imaging cost variation caused by moving the edge along a preset direction, and the preset direction is perpendicular to the edge and faces to the outside of the auxiliary graph.

3. The layout processing method according to claim 2, wherein the plurality of edges include first and second edges opposite to each other and third and fourth edges opposite to each other, and wherein determining the target direction based on the cost gradient information includes:

determining a first composite cost gradient along a first direction based on a first edge cost gradient corresponding to the first edge and a second edge cost gradient corresponding to the second edge, the first direction being perpendicular to the first edge and the second edge;

determining a second composite cost gradient along a second direction based on a third edge cost gradient corresponding to the third edge and a fourth edge cost gradient corresponding to the fourth edge, the second direction being perpendicular to the third edge and the fourth edge; and

determining an overall target direction for the auxiliary graph based on at least the first composition gradient, the second composition gradient, and an angle between the first direction and the second direction.

4. The layout processing method according to claim 1, wherein determining cost gradient information associated with the assist feature comprises:

dividing the auxiliary graph into a plurality of sub-graphs according to the shape of the auxiliary graph; and

for a given sprite of the plurality of sprites, determining local cost gradient information for the given sprite, the local cost gradient information indicating imaging cost changes that would be caused by moving a plurality of edges of the given sprite, respectively.

5. The layout processing method according to claim 4, wherein determining the local cost gradient information of a given sprite of the plurality of sprites comprises:

in the given sprite, determining a fifth side and a sixth side opposite to each other; and

determining a fifth edge cost gradient corresponding to the fifth edge and a sixth edge cost gradient corresponding to the sixth edge,

wherein the fifth edge cost gradient indicates a change in imaging cost that would result from moving the fifth edge in a third direction, the sixth edge cost gradient indicates a change in imaging cost that would result from moving the sixth edge in a fourth direction, and the third direction is opposite the fourth direction.

6. The layout processing method according to claim 5, wherein the target direction comprises a local target direction for the given sprite, and determining the target direction based on the cost gradient information comprises:

determining a third set of composite cost gradients based on the fifth edge cost gradient and the sixth edge cost gradient; and

determining a direction of the third set of composite text gradients as the local target direction for the given sprite.

7. The layout processing method according to claim 6, wherein the given sprite includes each of the plurality of sprites, and moving the assist pattern in the layout based on the target direction includes:

for each sub-pattern of the plurality of sub-patterns, moving the sub-pattern along the local target direction determined for the sub-pattern.

8. The layout processing method according to claim 4, wherein the auxiliary pattern and each of the plurality of sub-patterns is a rectangle.

9. The layout processing method according to claim 1, wherein moving the assist feature in the layout based on the target direction comprises:

moving at least a portion of the assist feature a first distance along the target direction to obtain an updated layout;

determining whether a first imaging cost of the updated layout is less than a second imaging cost, the second imaging cost being an imaging cost of the layout before at least a portion is moved; and

in response to determining that the first imaging cost is less than the second imaging cost, moving the at least a portion a second distance along the target direction.

10. The layout processing method according to claim 9, characterized in that the layout processing method further comprises:

in response to determining that the first imaging cost is not less than the second imaging cost, moving the at least a portion a third distance in a direction opposite the target direction, the third distance being less than the first distance.

11. The layout processing method according to claim 1, wherein the auxiliary patterns have a sub-resolution.

12. An electronic device, comprising:

at least one processing unit; and

at least one memory coupled to the at least one processing unit and storing instructions for execution by the at least one processing unit, the instructions when executed by the at least one processing unit causing the electronic device to perform the method of any of claims 1-11.

13. A computer-readable storage medium, on which a computer program is stored, the computer program being executable by a processor for implementing the method according to any one of claims 1 to 11.