CN115629107A - Hazardous gas detection method based on MEMS sensor - Google Patents

Hazardous gas detection method based on MEMS sensor Download PDF

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Publication number
CN115629107A
CN115629107A CN202211152434.4A CN202211152434A CN115629107A CN 115629107 A CN115629107 A CN 115629107A CN 202211152434 A CN202211152434 A CN 202211152434A CN 115629107 A CN115629107 A CN 115629107A
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gas
data
controller
sensor
hazardous gas
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胡增
江大白
汪刚
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China Applied Technology Co Ltd
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China Applied Technology Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B7/00—Signalling systems according to more than one of groups G08B3/00 - G08B6/00; Personal calling systems according to more than one of groups G08B3/00 - G08B6/00
    • G08B7/06—Signalling systems according to more than one of groups G08B3/00 - G08B6/00; Personal calling systems according to more than one of groups G08B3/00 - G08B6/00 using electric transmission, e.g. involving audible and visible signalling through the use of sound and light sources
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
    • H04L67/00—Network arrangements or protocols for supporting network services or applications
    • H04L67/01—Protocols
    • H04L67/12—Protocols specially adapted for proprietary or special-purpose networking environments, e.g. medical networks, sensor networks, networks in vehicles or remote metering networks

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  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
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  • Emergency Management (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
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  • Business, Economics & Management (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
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  • Computer Networks & Wireless Communication (AREA)
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  • Emergency Alarm Devices (AREA)

Abstract

The invention discloses a hazardous gas detection method based on an MEMS sensor. Comprises a detection system; the detection system comprises a sensor matrix and a controller; the sensor matrix detects gas data and transmits the gas data to the controller, the controller receives the data of the sensor matrix and uploads the data to the cloud server in real time, and the cloud server compares the data, returns a processing result to the controller and transmits the processing result to the mobile terminal in real time. The method comprises the steps of detecting the hazardous gas by arranging a sensor matrix formed by MEMS (micro-electromechanical systems), and constructing a hazardous gas data feature library; the leakage of hazardous gas can be detected in real time, articles with different danger degrees can be distinguished, the grading early warning accuracy is realized to the maximum extent, and false alarm, wrong alarm and missing alarm are avoided; and the staff is convenient to go to in time for maintenance.

Description

Hazardous gas detection method based on MEMS sensor
Technical Field
The invention belongs to the technical field of gas detection, and particularly relates to a hazardous gas detection method based on an MEMS sensor.
Background
In industrial parks, a variety of hazardous chemical gases are used, which can pose serious hazards in the event of a leak. The traditional detection method adopts a common sensor to detect hazardous gas, but the detection precision is common and accurate judgment is difficult.
With the development of the technology, MEMS gas sensors are increasingly applied to the field of hazardous gas detection. The MEMS gas sensor is a micro-hotplate manufactured on an SI (silicon-on-insulator) substrate by utilizing an MEMS process, and the gas-sensitive material is a metal oxide semiconductor material with lower conductivity in clean air. The MEMS sensor can sense the measured parameters and convert the measured parameters into signals convenient to measure; and the obtained signals can be analyzed, processed, identified and judged.
Disclosure of Invention
The invention aims to provide a hazardous gas detection method based on an MEMS sensor, which is characterized in that a sensor matrix formed by MEMS is arranged to detect hazardous gas, and a hazardous gas data feature library is constructed; the leakage of hazardous gas can be detected in real time, articles with different danger degrees can be distinguished, the grading early warning accuracy is realized to the maximum extent, and false alarm, wrong alarm and missing alarm are avoided; and the staff is convenient to go to in time for maintenance.
In order to solve the technical problems, the invention is realized by the following technical scheme:
the invention relates to a hazardous gas detection method based on an MEMS sensor, which comprises a detection system; the detection system comprises a sensor matrix and a controller;
the sensor matrix detects gas data and transmits the gas data to the controller, the controller receives the data of the sensor matrix and uploads the data to the cloud server in real time, and the cloud server compares the data, returns a processing result to the controller and transmits the processing result to the mobile terminal in real time;
the detection system operates according to the following steps:
stp1, constructing a dangerous gas detection network of the MEMS gas sensor through a sensor matrix;
the controller encodes the MEMS sensors in the sensor matrix and acquires the node address of the MEMS gas sensor at each detection point;
stp3, the controller constructs a communication link with the node according to the node address, and whether the link is normally communicated is detected;
stp4, transmitting gas data acquired by a sensor matrix to a controller, and preprocessing detection data detected by the MEMS gas sensor in a target environment by the controller;
the Stp5 and the controller upload the processed data to a cloud server, and the cloud server performs gas type modeling according to a processing result and calculates gas data of a target environment;
stp6, comparing the obtained gas type model with a standard data model in a database, and determining the component type and the concentration of the gas according to the processing result.
Preferably, the sensor matrix transmits the sensed signal to the data acquisition module, and the data acquisition module filters and amplifies the acquired signal and transmits the signal to the controller.
Preferably, the controller performs information interaction with the cloud server through the communication module.
Preferably, the controller still carries out electric connection with an alarm unit, the controller controls alarm unit and sends out the police dispatch newspaper when detecting that the dangerization gas exceedes the threshold value, alarm unit adopts audible-visual annunciator.
Preferably, the controller is further connected with a power module, and the power module supplies power to the detection system.
Preferably, the controller in step Stp4 packages and fits the gas data transmitted by the sensor matrix, and uploads the packaged and fitted gas data to the cloud server.
Preferably, the standard data model establishing process in the cloud server operates according to the following steps:
stp11, sampling known hazardous gas substances by using a sensor matrix, putting the sensor matrix into a gas-sensitive detection closed box, and gradually injecting volatile gas of the hazardous gas substances into the gas-sensitive detection closed box to ensure that the concentration of the volatile gas of the hazardous gas substances in the gas-sensitive detection closed box gradually rises;
stp12: at the time ti in the process of gradually increasing the concentration of the volatile gas of the hazardous gas substance in the step Stp11, obtaining a conductivity change vector formed by combining m sensors, and repeating the steps to obtain a conductivity change vector set at n times;
stp13: standardizing the conductivity change vector set to obtain a standardized conductivity change vector set, performing principal component analysis on the standardized conductivity change vector set to obtain a principal component vector of the hazardous gas substances as data of sampling of single hazardous gas substances, and collecting the hazardous gas substances for x times to obtain the principal component vector set of the hazardous gas substances;
stp14: and repeating the steps to obtain N data models of the dangerous gas substances.
Preferably, x is in the range of 1 to 10 times.
The invention has the following beneficial effects:
the method comprises the steps of detecting hazardous gas by arranging a sensor matrix formed by MEMS (micro-electromechanical systems), and constructing a hazardous gas data characteristic library; the leakage of hazardous gas can be detected in real time, articles with different danger degrees can be distinguished, the grading early warning accuracy is realized to the maximum extent, and false alarm, wrong alarm and missing alarm are avoided; and the staff is convenient to go to in time for maintenance.
Of course, it is not necessary for any product in which the invention is practiced to achieve all of the above-described advantages at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a system block diagram of a hazardous gas detection system based on MEMS sensors;
fig. 2 is a working flow chart of a hazardous gas detection method based on a MEMS sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, the present invention is a hazardous gas detection method based on MEMS sensor, including a detection system; the detection system comprises a sensor matrix and a controller;
the sensor matrix comprises a plurality of MEMS sensors, the sensor matrix detects gas data and transmits the gas data to the controller, the controller receives the data of the sensor matrix and uploads the data to the cloud server in real time, the cloud server compares the data, a processing result is returned to the controller, and the data are transmitted to the mobile terminal in real time;
the sensor matrix transmits the sensed signals to the data acquisition module, the data acquisition module filters and amplifies the acquired signals and transmits the signals to the controller, the controller performs information interaction with the cloud server through the communication module, the controller is electrically connected with an alarm unit, the controller controls the alarm unit to give an alarm when detecting that hazardous gases exceed a threshold value, the alarm unit adopts an audible and visual alarm, the controller is further connected with a power module, and the power module supplies power for the detection system;
as shown in fig. 2, a hazardous gas detection method based on a MEMS sensor operates according to the following steps:
stp1, constructing a dangerous gas detection network of the MEMS gas sensor through a sensor matrix;
stp2, the controller encodes the MEMS sensors in the sensor matrix and acquires the node address of the MEMS gas sensor at each detection point;
stp3, the controller constructs a communication link with the node according to the node address, and whether the link is normally communicated is detected;
stp4, transmitting gas data collected by the sensor matrix to a controller, and preprocessing detection data detected by the MEMS gas sensor in a target environment by the controller; the pretreatment process is as follows: the controller packages and fits the gas data transmitted by the sensor matrix and uploads the gas data to the cloud server;
the Stp5 and the controller upload the processed data to a cloud server, and the cloud server performs gas type modeling according to a processing result and calculates gas data of a target environment;
stp6, comparing the obtained gas type model with a standard data model in a database, and determining the component type and the concentration of the gas according to the processing result.
When dangerous gas leakage is detected, the cloud server transmits data to the mobile terminal, a worker carries out maintenance according to the address of the sensor node, and the mobile terminal adopts a mobile phone;
the standard data model establishing process in the cloud server operates according to the following steps:
stp11, sampling known hazardous gas substances by using a sensor matrix, putting the sensor matrix into a gas-sensitive detection closed box, and gradually injecting volatile gas of the hazardous gas substances into the gas-sensitive detection closed box to ensure that the concentration of the volatile gas of the hazardous gas substances in the gas-sensitive detection closed box gradually rises;
stp12: at the time ti in the process of gradually increasing the concentration of the volatile gas of the hazardous gas substance in the step Stp11, obtaining a conductivity change vector formed by combining m sensors, and repeating the steps to obtain a conductivity change vector set at n times;
stp13: standardizing the conductivity change vector set to obtain a standardized conductivity change vector set, performing principal component analysis on the standardized conductivity change vector set to obtain a principal component vector of the hazardous gas substances as data of sampling of the single hazardous gas substances, and collecting the hazardous gas substances for x times to obtain the principal component vector set of the hazardous gas substances; x ranges from 1 to 10 times;
stp14: and repeating the steps to obtain N data models of the dangerous gas substances.
It should be noted that, in the above system embodiment, each included unit is only divided according to functional logic, but is not limited to the above division as long as the corresponding function can be implemented; in addition, the specific names of the functional units are only for the convenience of distinguishing from each other, and are not used for limiting the protection scope of the present invention.
In addition, it can be understood by those skilled in the art that all or part of the steps in the method for implementing the embodiments described above can be implemented by instructing the relevant hardware through a program, and the corresponding program can be stored in a computer-readable storage medium, such as a ROM/RAM, a magnetic disk, an optical disk, or the like.
The preferred embodiments of the invention disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims (8)

1. A hazardous gas detection method based on an MEMS sensor is characterized by comprising a detection system; the detection system comprises a sensor matrix and a controller;
the sensor matrix detects gas data and transmits the gas data to the controller, the controller receives the data of the sensor matrix and uploads the data to the cloud server in real time, and the cloud server compares the data, returns a processing result to the controller and transmits the processing result to the mobile terminal in real time;
the detection system operates according to the following steps:
stp1, constructing a dangerous gas detection network of the MEMS gas sensor through a sensor matrix;
stp2, the controller encodes the MEMS sensors in the sensor matrix and acquires the node address of the MEMS gas sensor at each detection point;
stp3, the controller constructs a communication link with the node according to the node address, and whether the link is normally communicated is detected;
stp4, transmitting gas data collected by a sensor matrix to a controller, and preprocessing detection data detected by the MEMS gas sensor in a target environment by the controller;
the Stp5 and the controller upload the processed data to a cloud server, and the cloud server performs gas type modeling according to a processing result and calculates gas data of a target environment;
stp6, comparing the obtained gas type model with a standard data model in a database, and determining the component type and the concentration of the gas according to the processing result.
2. The method for detecting hazardous gas based on the MEMS sensor according to claim 1, wherein the sensor matrix transmits the sensed signals to a data acquisition module, and the data acquisition module filters and amplifies the acquired signals and transmits the signals to a controller.
3. The hazardous gas detection method based on the MEMS sensor, characterized in that the controller performs information interaction with a cloud server through a communication module.
4. The method for detecting hazardous gas based on MEMS sensor according to claim 1, wherein the controller is further electrically connected with an alarm unit, the controller controls the alarm unit to give an alarm when detecting that the hazardous gas exceeds a threshold value, and the alarm unit is an audible and visual alarm.
5. The hazardous gas detection method based on the MEMS sensor according to claim 1, wherein the controller is further connected with a power module, and the power module supplies power to the detection system.
6. The hazardous gas detection method based on the MEMS sensor according to claim 1, wherein the controller in step Stp4 packages and fits the gas data transmitted by the sensor matrix and uploads the packaged and fitted gas data to a cloud server.
7. The hazardous gas detection method based on the MEMS sensor according to claim 1, wherein a standard data modeling process in the cloud server is performed according to the following steps:
stp11, sampling known hazardous gas substances by using a sensor matrix, putting the sensor matrix into a gas-sensitive detection closed box, and gradually injecting volatile gas of the hazardous gas substances into the gas-sensitive detection closed box to ensure that the concentration of the volatile gas of the hazardous gas substances in the gas-sensitive detection closed box gradually rises;
stp12: obtaining a conductivity change vector formed by combining m sensors at the time ti in the process of gradually increasing the concentration of the volatile gas of the dangerous gas substance in the step Stp11, and repeating the steps to obtain a conductivity change vector set at n times;
stp13: standardizing the conductivity change vector set to obtain a standardized conductivity change vector set, performing principal component analysis on the standardized conductivity change vector set to obtain a principal component vector of the hazardous gas substances as data of sampling of single hazardous gas substances, and collecting the hazardous gas substances for x times to obtain the principal component vector set of the hazardous gas substances;
stp14: and repeating the steps to obtain N data models of the dangerous gas substances.
8. The hazardous gas detection method based on the MEMS sensor according to claim 7, wherein x is in the range of 1-10 times.
CN202211152434.4A 2022-09-21 2022-09-21 Hazardous gas detection method based on MEMS sensor Pending CN115629107A (en)

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Application Number Priority Date Filing Date Title
CN202211152434.4A CN115629107A (en) 2022-09-21 2022-09-21 Hazardous gas detection method based on MEMS sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211152434.4A CN115629107A (en) 2022-09-21 2022-09-21 Hazardous gas detection method based on MEMS sensor

Publications (1)

Publication Number Publication Date
CN115629107A true CN115629107A (en) 2023-01-20

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