CN115605765A - 加速度传感装置 - Google Patents

加速度传感装置 Download PDF

Info

Publication number
CN115605765A
CN115605765A CN202280002184.8A CN202280002184A CN115605765A CN 115605765 A CN115605765 A CN 115605765A CN 202280002184 A CN202280002184 A CN 202280002184A CN 115605765 A CN115605765 A CN 115605765A
Authority
CN
China
Prior art keywords
electrodes
electrode
fixed
moving
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280002184.8A
Other languages
English (en)
Inventor
周文兵
邓文俊
袁永帅
黄雨佳
齐心
廖风云
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Voxtech Co Ltd
Original Assignee
Shenzhen Voxtech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Voxtech Co Ltd filed Critical Shenzhen Voxtech Co Ltd
Priority claimed from PCT/CN2022/071932 external-priority patent/WO2022222557A1/zh
Publication of CN115605765A publication Critical patent/CN115605765A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

一种传感装置(200，250，900，1000)，包括加速度传感器(100)，具有第一谐振频率，加速度传感器(100)包括壳体(110，610)和传感元件(120，400，500，600，800，910，1010)，传感元件(120，400，500，600，800，910，1010)位于由壳体(110，610)形成的腔体(610)内；和至少一个谐振***(210，260)，耦合于传感元件(120，400，500，600，800，910，1010)，其中至少一个谐振***(210，260)为传感装置(200，250，900，1000)提供至少一个第二谐振频率，至少一个第二谐振频率与第一谐振频率相同或不同。

Description

PCT国内申请，说明书已公开。

Claims (36)

  1. PCT国内申请，权利要求书已公开。
CN202280002184.8A 2021-04-23 2022-01-14 加速度传感装置 Pending CN115605765A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN2021104457393 2021-04-23
CN202110445739 2021-04-23
PCT/CN2022/071932 WO2022222557A1 (zh) 2021-04-23 2022-01-14 加速度传感装置

Publications (1)

Publication Number Publication Date
CN115605765A true CN115605765A (zh) 2023-01-13

Family

ID=83695174

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280002184.8A Pending CN115605765A (zh) 2021-04-23 2022-01-14 加速度传感装置

Country Status (3)

Country Link
US (1) US20220341964A1 (zh)
CN (1) CN115605765A (zh)
TW (1) TW202242418A (zh)

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4333342A (en) * 1980-11-03 1982-06-08 United Technologies Corporation Fluid damped saw accelerometer
US4676104A (en) * 1985-08-06 1987-06-30 United Technologies Corporation Surface skimming bulk acoustic wave accelerometer
JPH0623780B2 (ja) * 1989-09-21 1994-03-30 日本電装株式会社 半導体加速度センサの製造方法
KR0139506B1 (ko) * 1994-10-07 1998-07-15 전성원 자체진단 기능을 구비한 대칭질량형 가속도계 및 그 제조방법
DE102006002350A1 (de) * 2006-01-18 2007-07-19 Robert Bosch Gmbh Inertialsensoranordnung
JP4851555B2 (ja) * 2008-05-13 2012-01-11 株式会社デンソー 力学量センサおよびその製造方法
IT1392741B1 (it) * 2008-12-23 2012-03-16 St Microelectronics Rousset Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione
CN101871951B (zh) * 2010-06-07 2011-11-30 瑞声声学科技(深圳)有限公司 微加速度传感器
CN101871952B (zh) * 2010-06-11 2012-07-11 瑞声声学科技(深圳)有限公司 Mems加速度传感器
EP2399676A1 (en) * 2010-06-25 2011-12-28 Stichting IMEC Nederland Method and device for vibration harvesting via gasflow
US8878528B2 (en) * 2011-06-30 2014-11-04 Silicon Laboratories Inc. MEMS-based magnetic sensor with a Lorentz force actuator used as force feedback
US8875578B2 (en) * 2011-10-26 2014-11-04 Silicon Laboratories Inc. Electronic damper circuit for MEMS sensors and resonators
FI124624B (en) * 2012-06-29 2014-11-14 Murata Manufacturing Co Improved vibration gyroscope
JP6373786B2 (ja) * 2015-03-30 2018-08-15 日立オートモティブシステムズ株式会社 容量検出型センサの信号検出方法、容量検出型センサ、およびシステム
US20160370403A1 (en) * 2015-06-22 2016-12-22 Adel Merdassi Capacitive accelerometer devices and wafer level vacuum encapsulation methods
US20180209791A1 (en) * 2015-07-07 2018-07-26 Agency For Science, Technology And Research Motion measurement devices and methods for measuring motion
US10495663B2 (en) * 2016-02-19 2019-12-03 The Regents Of The University Of Michigan High aspect-ratio low noise multi-axis accelerometers
TR201614871A2 (tr) * 2016-10-20 2019-01-21 Haluk Kuelah Elektrostati̇k mems rezonatörlerde kali̇te faktörünü yükselten ve kaçak akimini düşüren i̇ki̇nci̇ harmoni̇k okumaya dayali bi̇r karakteri̇zasyon/sürüş yöntemi̇

Also Published As

Publication number Publication date
US20220341964A1 (en) 2022-10-27
TW202242418A (zh) 2022-11-01

Similar Documents

Publication Publication Date Title
WO2022222557A1 (zh) 加速度传感装置
CN101014879B (zh) 用于地震仪或其它装置中的微机械悬浮板
JP6216775B2 (ja) センサハウジング用制振ダンパ
KR102221976B1 (ko) 가속도 센서용 마이크로기계 구조
TW200302350A (en) Micro-machined accelerometer
JPH09119943A (ja) 加速度センサ
US10804818B2 (en) Triboelectric generator and network for mechanical energy harvesting
US10802042B2 (en) Measurement of acceleration
CN101825426B (zh) 电容式位移变送器
CN115605765A (zh) 加速度传感装置
US10563982B2 (en) Hybrid MEMS microfluidic gyroscope
KR101354158B1 (ko) 진동형 전자기식 에너지 하베스터
EP0693824A1 (en) Piezoelectric vibrator with an improved supporting structure
CN213749942U (zh) 加速度传感器及电子设备
RU137619U1 (ru) Частотный микромеханический акселерометр
RU2426134C1 (ru) Чувствительный элемент микросистемного акселерометра
Unnikrishnan et al. Design of 3-axis Piezoelectric Accelerometer for Body Activity Measurements
US11207892B2 (en) Replaceable print apparatus components comprising memory
KR100252696B1 (ko) 마이크로가속도계
Yixiang et al. Design and Fabrication of a Bio-inspired Acceleration Sensor Using Liquid Mass Blocks.
KR20170105448A (ko) 센서
KR20160066487A (ko) 센서

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 40082407

Country of ref document: HK