CN115598765A - Array waveguide grating with small hole array and communication device - Google Patents
Array waveguide grating with small hole array and communication device Download PDFInfo
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- CN115598765A CN115598765A CN202211135251.1A CN202211135251A CN115598765A CN 115598765 A CN115598765 A CN 115598765A CN 202211135251 A CN202211135251 A CN 202211135251A CN 115598765 A CN115598765 A CN 115598765A
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- arrayed waveguide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12016—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides
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Abstract
The invention discloses an array waveguide grating with small hole array and communication device in the waveguide technical field, the array waveguide grating with small hole array includes: the device comprises an input waveguide, an input free propagation area, an array waveguide, an output free propagation area and an output waveguide which are connected in sequence; the input waveguide is connected with the input free propagation region through an input tapered port; the output waveguide is connected with the output free propagation region through an output tapered port; the input free propagation area is provided with a first small hole array for light waves to enter the array waveguide from the input free propagation area; the output free propagation area is provided with a second small hole array for the light wave to enter the output free propagation area from the array waveguide. The invention can effectively reduce the loss of the array waveguide grating device.
Description
Technical Field
The invention belongs to the technical field of waveguides, and particularly relates to an array waveguide grating with an aperture array and a communication device.
Background
The arrayed waveguide grating provides more and more dense channels with a compact structure and lower cost, is considered to be an important wavelength division multiplexing device based on planar waveguide technology, and is widely applied to a plurality of fields such as communication, optical sensing and spectroscopy. Among them, how to reduce the insertion loss of the arrayed waveguide grating is a relatively concerned problem. Generally, after incident light propagates through an input free propagation region, an optical field of the incident light is expanded to the whole region before entering the arrayed waveguide, and when the incident light is coupled into the arrayed waveguide, a certain mismatch loss is generated at a port of the arrayed waveguide.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides the arrayed waveguide grating with the small hole array and the communication device, which can effectively reduce the loss of the arrayed waveguide grating device.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
in a first aspect, there is provided an arrayed waveguide grating with an array of apertures, comprising: the input waveguide, the input free propagation region, the array waveguide, the output free propagation region and the output waveguide are connected in sequence; the input waveguide is connected with the input free propagation region through an input tapered port; the output waveguide is connected with the output free propagation region through an output tapered port; the input free propagation region is provided with a first aperture array for light waves to enter the arrayed waveguide from the input free propagation region.
Further, the output free propagation region is provided with a second aperture array for the light waves to enter the output free propagation region from the array waveguide.
Further, each hole in the first small hole array and the second small hole array is one or more of a single-hole structure, a multi-hole combined structure or a long-strip hole structure, and the shape of each hole is a polygon.
Further, the topography of each hole in the first and second hole arrays may be the same or different.
Further, each of the cavities in the first and second arrays of pores is filled with at least one of a polymer, a compound, or silicon.
Furthermore, each hole in the first small hole array and the second small hole array is filled with at least one of silicon dioxide and silicon nitride.
Furthermore, the distance between each hole in the first small hole array and each hole in the second small hole array and each adjacent two arrayed waveguides is equal, and the vertical distance between each hole and the center of the connecting line of each adjacent arrayed waveguide is a certain value; or the distance between each hole and each adjacent two arrayed waveguides is unequal, and the vertical distance between all the holes and the center of the connecting line of each adjacent arrayed waveguide is a certain value; or the distance between each hole and each adjacent two arrayed waveguides is equal, and the vertical distance between each hole and the center of the connecting line of each adjacent arrayed waveguide is an indeterminate value; or the distance between each hole and each adjacent two arrayed waveguides is unequal, and the vertical distance between each hole and the center of the connecting line of the adjacent arrayed waveguides is an indeterminate value.
Furthermore, the arrayed waveguide grating is a single-input multi-output arrayed waveguide grating, a multi-input multi-output arrayed waveguide grating, a symmetric arrayed waveguide grating or a reflective arrayed waveguide grating.
Further, the arrayed waveguide is connected with the input free propagation region through a first arrayed waveguide tapered port, and is connected with the output free propagation region through a second arrayed waveguide tapered port.
In a second aspect, there is provided a communication device provided with the arrayed waveguide grating with the array of small holes of the first aspect.
Compared with the prior art, the invention has the following beneficial effects:
(1) The first small hole array for the light wave to enter the array waveguide from the input free propagation area is arranged in the input free propagation area; the second small hole array for allowing the light waves to enter the output free propagation area from the array waveguide is arranged in the output free propagation area, the small hole array is used for improving the light energy coupling efficiency of the array waveguide grating, and the loss of the array waveguide grating device can be effectively reduced;
(2) The method for improving the light energy coupling efficiency of the arrayed waveguide grating by using the small hole array has simple and easy design, and can improve the light energy utilization rate of the arrayed waveguide grating without additionally adding a new device so as to reduce the insertion loss of the device;
(3) The invention is compatible with the standard planar waveguide preparation process;
(4) The scheme provided by the invention can be applied to array waveguide gratings with various structures, such as a single-input multi-output (1 xN) array waveguide grating, a multi-input multi-output (M x N) array waveguide grating, a symmetrical array waveguide grating, a reflective array waveguide grating and the like.
Drawings
FIG. 1 is a schematic diagram of an array waveguide grating with an array of small holes according to an embodiment of the present invention;
FIG. 2 is a graph of output spectral intensity contrast for an arrayed waveguide grating without an array of apertures, with an array of apertures in the input free propagation region, and with an array of apertures in the input/output free propagation region in an embodiment of the present invention;
in the figure: 1. an input waveguide; 2. an input tapered port; 3. inputting a free propagation area; 4. a first array of pores; 5. a first array waveguide tapered port; 6. an array waveguide; 7. a second array of waveguide tapered ports; 8. a second array of apertures; 9. outputting a free propagation region; 10. an output tapered port; 11. and an output waveguide.
Detailed Description
The invention is further described below with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
The first embodiment is as follows:
as shown in fig. 1, an arrayed waveguide grating with an array of small holes includes: the waveguide array comprises an input waveguide 1, an input free propagation region 3, an array waveguide 6, an output free propagation region 9 and an output waveguide 11 which are connected in sequence; the input waveguide 1 is connected with an input free propagation region 3 through an input tapered port 2; the output waveguide 11 is connected to the output free propagation region 9 through an output tapered port 10; the array waveguide 6 is connected with the input free propagation region 3 through a first array waveguide tapered port 5, and is connected with the output free propagation region 9 through a second array waveguide tapered port 7, and the input tapered port 2, the first array waveguide tapered port 5, the second array waveguide tapered port 7 and the output tapered port 10 are of tapered structures with gradually linearly expanding widths. The input free propagation area 3 is provided with a first small hole array 4 for light waves to enter the array waveguide 6 from the input free propagation area 3; the output free propagation region 9 is provided with a second array of apertures 8 for light waves to enter the output free propagation region 9 from the arrayed waveguide 6.
In this embodiment, the arrayed waveguide grating is as shown in fig. 1 (a simple schematic diagram, where the number of arrayed waveguides and the number of output channels do not represent an actual number), and is a 1 × 7 arrayed waveguide grating, where the number of arrayed waveguides 6 is 7, and the incident ports are located at a central point of a rowland circle of the input free propagation region 3, and in practical application, the positions of the incident ports may also be distributed at other positions of the rowland circle, as shown by a dotted line in fig. 1.
In this embodiment, the waveguide material is silicon nitride, the upper and lower cladding layers are both silicon dioxide, the arrayed waveguide grating operates in the visible light band, the thickness of the arrayed waveguide grating is 180nm, and the input waveguide 1, the output waveguide 11 and the arrayed waveguide 6 are all strip waveguides.
In this embodiment, a first small hole array 4 and a second small hole array 8 are respectively arranged in an input free propagation region 3 and an output free propagation region 9 which are formed by slab waveguides, wherein a hole is formed between every two array waveguides 6, the hole structure for arranging the first small hole array 4 and the second small hole array 8 is a circular structure, the diameter of the hole structure is 200nm, and a silicon dioxide material is filled inside the hole structure; the holes in the first small hole array 4 and the second small hole array 8 are arranged on two sides of the first array waveguide tapered port 5 and the second array waveguide tapered port 7 at equal intervals, the distances between the holes in the input free propagation region 3 and the output free propagation region 9 are equal, and the distance from each hole to the edge of the input free propagation region 3 and the output free propagation region 9 close to the array waveguide direction is 2 micrometers.
The light source enters through the input waveguide 1, is pre-broadened by the input tapered port 2, is diffracted and continues to be broadened in the input free propagation region 3, and the wavefront is diffracted after reaching the first array of apertures 4. Due to the effect of the first array of apertures 4, most of the light source is collected at the center of each port of the first array waveguide tapered port and coupled into the array waveguide 6, reducing the energy of the light impinging between the ports of the array waveguide 6, i.e. increasing the intensity of the light coupled into the array waveguide 6. After light is transmitted and output through the array waveguide 6, the second small hole array 8 further has an effect of converging light energy, the utilization rate of the array waveguide grating on emergent light field energy is improved, the insertion loss of the array waveguide grating is further reduced, then the light with different wavelengths and a certain phase difference is coherently enhanced in different output conical ports 10 and is output through different channels, and the light splitting effect is achieved.
As shown in fig. 2, a comparison is given of three cases, in which the short dashed line is the spectral response of a conventional arrayed waveguide grating without any aperture array, the long dashed line is the spectral response of an arrayed waveguide grating in which only the first aperture array 4 is present in the input free propagation region 3 and the aperture array is absent in the output free propagation region 9, and the solid line is the spectral response of an arrayed waveguide grating in which the first aperture array 4 is present in the input free propagation region 3 and the second aperture array 8 is present in the output free propagation region 9. By contrast, the spectral response of the arrayed waveguide grating with the first and second arrays of apertures, represented by the solid line, is significantly improved in transmittance across each channel compared to the spectral response of the conventional arrayed waveguide grating without any array of apertures, represented by the short dashed line.
In this embodiment, the optical phase difference is provided by an arrayed waveguide grating connected to the free propagation region. The position of a single hole in the small hole array is generally located between adjacent arrayed waveguides, and two holes located at two ends are respectively located at the outer sides of the extreme edge arrayed waveguide, such as the right side of the extreme right arrayed waveguide and the left side of the extreme left arrayed waveguide; if there are N arrayed waveguides, the number of holes is N + 1.
In this embodiment, the hole geometry is generally circular, and may be designed as one or more of a single-hole structure, a multi-hole combined structure, or a long-strip hole structure, or the hole shape is any polygon, as required. The topographical features of the holes may be the same or different. The distances between the holes and the two adjacent array waveguides are equal, and the vertical distance between all the holes and the center of the connecting line of the adjacent array waveguides (namely the edge of the Rowland circle) is a certain value; or the distance between each hole and each adjacent two arrayed waveguides is unequal, and the vertical distance between each hole and the center of the connecting line of each adjacent arrayed waveguide (namely to the edge of the Rowland circle) is a certain value; or the distance between each hole and each adjacent two arrayed waveguides is equal, and the vertical distance between each hole and the center of the connecting line of each adjacent arrayed waveguide (namely to the edge of the Rowland circle) is an indeterminate value; or the distances from the holes to the two respective adjacent arrayed waveguides are unequal, and the vertical distance from all the holes to the center of the connecting line of the respective adjacent arrayed waveguides (namely to the edge of the Rowland circle) is an indeterminate value. The hole filling material can be selected from a material with a refractive index higher than that of the grating device, or a material with a refractive index lower than that of the grating device, or a non-filling material; each hole is filled with at least one of a polymer, a compound or silicon. The compound comprises at least one of silicon dioxide and silicon nitride.
The invention can adopt simulation software to carry out simulation calculation and optimization on the influence of the structure, the position, the distribution, the filling material and the like of the holes in the small hole array on the light efficiency coupled to the array waveguide so as to obtain the proper hole shape, size, position and the like.
Example two:
the present embodiment is different from the first embodiment in that, in the present embodiment, the first aperture array 4 for light waves to enter the array waveguide 6 from the input free propagation region 3 is provided only in the input free propagation region 3; the output free propagation region 9 is not provided with an array of apertures.
Example three:
based on the arrayed waveguide grating with the array of small holes described in the first embodiment and the second embodiment, the present embodiment provides a communication device, and the communication device is configured with the arrayed waveguide grating with the array of small holes described in the first embodiment or the second embodiment.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, it is possible to make various improvements and modifications without departing from the technical principle of the present invention, and those improvements and modifications should be considered as the protection scope of the present invention.
Claims (10)
1. An arrayed waveguide grating with an array of apertures, comprising:
the waveguide array comprises an input waveguide (1), an input free propagation region (3), an array waveguide (6), an output free propagation region (9) and an output waveguide (11) which are connected in sequence;
the input waveguide (1) is connected with an input free propagation region (3) through an input tapered port (2); the output waveguide (11) is connected with the output free propagation region (9) through an output tapered port (10);
the input free propagation region (3) is provided with a first array of apertures (4) for light waves to enter the arrayed waveguide (6) from the input free propagation region (3).
2. An arrayed waveguide grating with an array of apertures as claimed in claim 1, wherein the output free propagation region (9) is provided with a second array of apertures (8) for light waves to enter the output free propagation region (9) from the arrayed waveguide (6).
3. The arrayed waveguide grating with the array of small holes of claim 2, wherein each of the holes in the first small hole array (4) and the second small hole array (8) is one or more of a single-hole structure, a multi-hole combined structure or an elongated hole structure, and the shape of the hole is circular or polygonal.
4. An arrayed waveguide grating with an array of apertures as claimed in claim 3, wherein the topographical features of the apertures in the first (4) and second (8) arrays of apertures are the same or different.
5. The arrayed waveguide grating of claim 2, wherein each of the holes in the first (4) and second (8) arrays of holes is filled with at least one of a polymer, a compound, or silicon.
6. The arrayed waveguide grating of claim 2, wherein each of the holes in the first (4) and second (8) arrays of holes is filled with at least one of silicon dioxide and silicon nitride.
7. The arrayed waveguide grating with the array of the small holes according to claim 2, wherein the distance between each hole in the first small hole array (4) and the second small hole array (8) and each adjacent two arrayed waveguides (6) is equal, and the vertical distance between all the holes and the center of the connecting line of each adjacent arrayed waveguide (6) is a certain value;
or the distance between each hole and each adjacent two arrayed waveguides (6) is unequal, and the vertical distance between each hole and the center of the connecting line of each adjacent arrayed waveguide (6) is a certain value;
or the distance between each hole and each adjacent two arrayed waveguides (6) is equal, and the vertical distance between each hole and the center of the connecting line of each adjacent arrayed waveguide (6) is an indeterminate value;
or the distance between each hole and each two adjacent arrayed waveguides (6) is unequal, and the vertical distance between each hole and the center of the connecting line of each adjacent arrayed waveguide (6) is an indeterminate value.
8. The arrayed waveguide grating with the array of apertures of claim 1, wherein the arrayed waveguide grating is a single-input multi-output arrayed waveguide grating, a multi-input multi-output arrayed waveguide grating, a symmetric arrayed waveguide grating, or a reflective arrayed waveguide grating.
9. An arrayed waveguide grating with an array of apertures as claimed in claim 1, wherein the arrayed waveguide (6) is connected to the input free propagation region (3) via a first arrayed waveguide tapered port (5) and to the output free propagation region (9) via a second arrayed waveguide tapered port (7).
10. A communication device provided with the arrayed waveguide grating with an array of small holes according to any one of claims 1 to 9.
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CN202211135251.1A CN115598765A (en) | 2022-09-19 | 2022-09-19 | Array waveguide grating with small hole array and communication device |
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