CN115567859A - Push-pull type electrostatic film ultrasonic transducer and directional sound production device - Google Patents
Push-pull type electrostatic film ultrasonic transducer and directional sound production device Download PDFInfo
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- CN115567859A CN115567859A CN202211470344.XA CN202211470344A CN115567859A CN 115567859 A CN115567859 A CN 115567859A CN 202211470344 A CN202211470344 A CN 202211470344A CN 115567859 A CN115567859 A CN 115567859A
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Abstract
The invention discloses a push-pull type electrostatic film ultrasonic transducer and a directional sound production device, wherein the push-pull type electrostatic film ultrasonic transducer comprises a first electrode assembly, a second electrode assembly and a vibration structure; the vibrating structure is arranged between the first electrode assembly and the second electrode assembly, a first potential difference is formed between the first electrode assembly and the vibrating structure, a second potential difference is formed between the second electrode assembly and the vibrating structure, the first potential difference is the sum of a first direct current bias voltage and a first alternating current voltage, and the second potential difference is the difference between a second direct current bias voltage and a second alternating current voltage; the first direct current bias voltage and the second direct current bias voltage have the same polarity, the first alternating current voltage and the second alternating current voltage have opposite polarities, and the vibration structure performs push-pull vibration under the combined action of the first potential difference and the second potential difference, generates ultrasonic waves and radiates the ultrasonic waves to the outside through the arranged through hole; the push-pull type electrostatic film ultrasonic transducer can effectively improve the electroacoustic conversion efficiency and improve the sound pressure level of the generated ultrasonic waves.
Description
Technical Field
The invention relates to the technical field of directional sound production, in particular to a push-pull type electrostatic film ultrasonic transducer and a directional sound production device.
Background
The electrostatic film ultrasonic transducer is also called as a capacitive film ultrasonic transducer, and utilizes electrostatic force generated by an upper electrode and a lower electrode to drive a film to vibrate so as to radiate ultrasonic waves.
A structure of a common electrostatic thin film ultrasonic transducer 500 is shown in fig. 1, where the electrostatic thin film ultrasonic transducer 500 includes a thin film 01, a top electrode 02, a supporting pillar 03, an insulating layer 04, a bottom electrode 05, a fixed base plate 06, and the like, which are sequentially disposed from top to bottom, and an air gap 07 is formed between the top electrode 02 and the insulating layer 04. Through tests, the electro-acoustic conversion efficiency of the electrostatic film ultrasonic transducer 500 under the structure is not high enough, and the ultrasonic sound pressure level needs to be further improved.
Therefore, there is a need to find an electrostatic thin film ultrasonic transducer which can effectively improve the electroacoustic conversion rate.
Disclosure of Invention
The invention aims to provide a push-pull type electrostatic film ultrasonic transducer and a directional sound production device, which can effectively improve the electroacoustic conversion efficiency and improve the sound pressure level of generated ultrasonic waves.
In order to achieve the purpose, the invention provides the following technical scheme:
in a first aspect, a push-pull electrostatic thin film ultrasound transducer is provided, comprising:
the first electrode assembly and the second electrode assembly are oppositely arranged;
a vibrating structure, the vibrating structure being disposed between the first electrode assembly and the second electrode assembly, a first air gap being formed between the vibrating structure and the first electrode assembly, a second air gap being formed between the vibrating structure and the second electrode assembly, the first electrode assembly being electrically connected to the vibrating structure, the first electrode assembly and the vibrating structure having a first potential difference therebetween, the second electrode assembly being electrically connected to the vibrating structure, the second electrode assembly and the vibrating structure having a second potential difference therebetween, the first potential difference being a sum of a first dc bias voltage and a first ac voltage, the second potential difference being a difference between a second dc bias voltage and a second ac voltage; at any moment, the first direct current bias voltage and the second direct current bias voltage have the same polarity, the first alternating current voltage and the second alternating current voltage have opposite polarities, and the vibration structure performs push-pull vibration and generates ultrasonic waves between the first air gap and the second air gap under the combined action of the first potential difference and the second potential difference;
and the through hole is used for radiating the ultrasonic waves to the outside, is arranged on the push-pull type electrostatic film ultrasonic transducer and is communicated with the outside.
In a preferred embodiment, the first electrode assembly includes a first electrode layer, the second electrode assembly includes a second electrode layer, the vibrating structure includes a thin film layer and a third electrode layer, the thin film layer and the third electrode layer are disposed in close contact, the first electrode layer and the third electrode layer are electrically connected to form the first potential difference, and the second electrode layer and the third electrode layer are electrically connected to form the second potential difference.
In a preferred embodiment, the voltage value of the first dc bias voltage is not less than the amplitude of the first ac voltage, and the voltage value of the second dc bias voltage is not less than the amplitude of the second ac voltage.
In a preferred embodiment, the amplitudes of the first ac voltage and the second ac voltage are both 10v to 1000v, and the amplitudes of the first dc bias voltage and the second dc bias voltage are both 10v to 1000v.
In a preferred embodiment, the third electrode layer is grounded.
In a preferred embodiment, the push-pull electrostatic thin film ultrasonic transducer further comprises a first support and a second support;
the first support piece is arranged between the first electrode assembly and the vibration structure, and the first support piece, the first electrode assembly and the vibration structure are enclosed to form the first air gap;
the second support member is arranged between the second electrode assembly and the vibration structure, and the second support member, the second electrode assembly and the vibration structure are enclosed to form the second air gap.
In a preferred embodiment, the through hole is provided at least in any one structure or any two or more structures of the first electrode assembly, the second electrode assembly, the first support member and the second support member, and the vibration structure is communicated with the outside through the through hole.
In a preferred embodiment, the sum of the cross-sectional areas of the through-holes provided in the first electrode assembly is no more than half of the cross-sectional area of the first electrode assembly, and the sum of the cross-sectional areas of the through-holes provided in the second electrode assembly is no more than half of the cross-sectional area of the second electrode assembly.
In a preferred embodiment, the first electrode assembly further includes a first insulating layer disposed on a side of the first electrode layer close to the vibrating structure, and a first fixed base plate disposed on a side of the first electrode layer away from the vibrating structure;
the second electrode assembly further comprises a second insulating layer and a second fixed bottom plate, the second insulating layer is arranged on one side, close to the vibrating structure, of the second electrode layer, and the second fixed bottom plate is arranged on one side, far away from the vibrating structure, of the second electrode layer.
In a second aspect, there is provided a directional sound emitting device comprising the push-pull electrostatic thin film ultrasound transducer according to any one of the first aspect.
Compared with the prior art, the invention has the following beneficial effects:
the invention provides a push-pull type electrostatic film ultrasonic transducer and a directional sound production device, wherein the push-pull type electrostatic film ultrasonic transducer comprises a first electrode assembly, a second electrode assembly, a vibration structure and a through hole, wherein the first electrode assembly, the second electrode assembly, the vibration structure and the through hole are oppositely arranged, and the through hole is used for radiating ultrasonic waves to the outside; the vibration structure is arranged between the first electrode assembly and the second electrode assembly, a first air gap is formed between the vibration structure and the first electrode assembly, a second air gap is formed between the vibration structure and the second electrode assembly, the first electrode assembly is electrically connected with the vibration structure, a first potential difference is formed between the first electrode assembly and the vibration structure, the second electrode assembly is electrically connected with the vibration structure, a second potential difference is formed between the second electrode assembly and the vibration structure, the first potential difference is the sum of a first direct current bias voltage and a first alternating current voltage, and the second potential difference is the difference between a second direct current bias voltage and a second alternating current voltage; at any moment, the first direct current bias voltage and the second direct current bias voltage have the same polarity, the first alternating current voltage and the second alternating current voltage have opposite polarities, the vibration structure performs push-pull type vibration between the first air gap and the second air gap under the combined action of the first potential difference and the second potential difference to generate ultrasonic waves, and the through hole is arranged on the push-pull type electrostatic thin film ultrasonic transducer and communicated with the outside; the push-pull type electrostatic film ultrasonic transducer enables the vibration structure to be always in a tensioning state and can effectively increase the amplitude of the vibration structure during vibration by arranging a mode that two electric fields are superposed and act on the vibration structure together, so that the electroacoustic conversion efficiency is effectively improved, the sound pressure level of generated ultrasonic waves is improved, and the push-pull type electrostatic film ultrasonic transducer can effectively radiate the generated ultrasonic waves to the outside by arranging the through hole;
further, the voltage value of the first direct current bias voltage is not less than the amplitude of the first alternating current voltage, and the voltage value of the second direct current bias voltage is not less than the amplitude of the second alternating current voltage, so that the first potential difference and the second potential difference are always positive values, and the vibrating structure is always in a tensioning state while vibrating up and down under the action of the first alternating current and the second alternating current;
of course, the present invention only needs to achieve at least one of the above technical effects.
Drawings
FIG. 1 is a schematic structural diagram of an electrostatic thin-film ultrasonic transducer in the background art;
fig. 2 is a schematic structural view of a push-pull type electrostatic thin film ultrasonic transducer in embodiment 1;
fig. 3 is a graph comparing frequency response curves of the push-pull electrostatic thin-film ultrasonic transducer in example 1 with those of a conventional electrostatic thin-film ultrasonic transducer;
the labels in the figure are: 500-electrostatic thin film ultrasonic transducer, 01-thin film, 02-top electrode, 03-support post, 04-insulating layer, 05-bottom electrode, 06-stationary base plate, 07-air gap, 100-push-pull electrostatic thin film ultrasonic transducer, 10-first electrode assembly, 11-first stationary base plate, 12-first electrode layer, 13-first insulating layer, 20-second electrode assembly, 21-second stationary base plate, 22-second electrode layer, 23-second insulating layer, 30-vibrating structure, 31-thin film layer, 32-third electrode layer, 40-first air gap, 50-second air gap, 60-first support, 70-second support, 81-first power supply, 82-second power supply, 90-through hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "side", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
Example one
As shown in fig. 2, the present embodiment provides a push-pull electrostatic thin film ultrasonic transducer 100, where the push-pull electrostatic thin film ultrasonic transducer 100 includes a first electrode assembly 10, a second electrode assembly 20, a vibration structure 30, and at least one through hole 90, where the first electrode assembly 10 is disposed opposite to the second electrode assembly 20, and the vibration structure 30 is disposed between the first electrode assembly 10 and the second electrode assembly 20. A first air gap 40 is formed between the first electrode assembly 10 and the vibration structure 30, and a second air gap 50 is formed between the second electrode assembly 20 and the vibration structure 30. The first electrode assembly 10 is electrically connected to the vibration structure 30, a first potential difference exists between the first electrode assembly 10 and the vibration structure 30, the second electrode assembly 20 is electrically connected to the vibration structure 30, a second potential difference exists between the second electrode assembly 20 and the vibration structure 30, and the vibration structure 30 performs push-pull vibration between the first air gap 40 and the second air gap 50 under the combined action of the first potential difference and the second potential difference to generate ultrasonic waves. At least one through hole 90 is disposed on the push-pull electrostatic thin film ultrasonic transducer and is communicated with the outside for radiating ultrasonic waves to the outside.
Specifically, the vibrating structure 30 includes a thin film layer 31 and a third electrode layer 32 that are attached to each other. The first electrode assembly 10 and the third electrode layer 32 have a first potential difference therebetween, so that an electrostatic force is generated between the first electrode assembly 10 and the third electrode layer 32 to drive the thin film layer 31 to vibrate to generate an ultrasonic wave. The second electrode assembly 20 and the third electrode layer 32 have a second potential difference therebetween, so that an electrostatic force is generated between the second electrode assembly 20 and the third electrode layer 32 to drive the membrane layer 31 to vibrate to generate an ultrasonic wave. Therefore, the thin film layer 31 in this embodiment vibrates under the combined action of the two electrostatic forces to generate ultrasonic waves, the directions of the two electrostatic forces are consistent, and the amplitudes of the thin film layer 31 are superposed to increase, so that the sound pressure level of the generated ultrasonic waves is effectively improved.
Further, the push-pull electrostatic membrane ultrasonic transducer 100 further includes a first support 60 and a second support 70. The first supporting member 60 is supported between the first electrode assembly 10 and the vibration structure 30, one end of the first supporting member 60 is connected to the first electrode assembly 10, and the other end is connected to the vibration structure 30, and the first supporting member 60, the first electrode assembly 10 and the vibration structure 30 surround to form the first air gap 40. Similarly, the second supporting member 70 is supported and disposed between the second electrode assembly 20 and the vibrating structure 30, and the second supporting member 70, the second electrode assembly 20 and the vibrating structure 30 enclose to form the second air gap 50.
And, the first electrode assembly 10 includes a first fixed base plate 11, a first electrode layer 12 and a first insulating layer 13, the first insulating layer 13 is attached to one side of the first electrode layer 12 close to the vibrating structure 30, the first fixed base plate 11 is disposed on one side of the first electrode layer 12 away from the vibrating structure 30, and the first insulating layer 13 is connected to the first supporting member 60. Similarly, the second electrode assembly 20 includes a second fixed base plate 21, a second electrode layer 22 and a second insulating layer 23, wherein the second insulating layer 23 is disposed on a side of the second electrode layer 22 close to the vibrating structure 30, and the second fixed base plate 21 is disposed on a side of the second electrode layer 22 away from the vibrating structure 30. The second insulating layer 23 is connected with the second support 70.
At any one moment, the first potential difference is a first direct current bias voltage V dc1 With a first alternating voltage V ac1 A second potential difference of a second DC bias voltage V dc2 And a second alternating voltage V ac2 The difference between them. And, at any one time, the first DC bias voltage V dc1 And a second DC bias voltage V dc2 The same polarity, the same or different voltage values, the first AC voltage V ac1 And a second alternating voltage V ac2 Opposite in polarity and the same or different in amplitude. It should be noted that, under the fixing action of the first fixing plate 11, the first electrode layer 12 does not deform mechanically under the action of the first potential difference, and similarly, the second electrode layer 22 does not deform under the action of the second potential difference, that is, under the action of the first potential difference and the second potential difference, the whole push-pull type electrostatic thin film is ultra-thinThe deformations of the acoustic transducer 100 are all represented by the membrane layer 31, i.e. the vibrating structure 30.
Specifically, as shown in FIG. 2, the first DC bias voltage V dc1 And a second DC bias voltage V dc2 Has the same polarity, and the first direct current bias voltage V dc1 And a second DC bias voltage V dc2 Acting simultaneously on the membrane 31. In one state, the film 31 is subjected to a first DC bias voltage V dc1 While the membrane 31 is subjected to a second dc bias voltage V, the generated electrostatic force acts to deform the first electrode assembly 10 dc2 The generated electrostatic force acts to deform the second electrode assembly 20 and the membrane 31 is in a tensioned state. In another state, the film 31 is subjected to a first DC bias voltage V dc1 While the generated electrostatic force acts to deform the first electrode assembly 10, the thin film 31 is subjected to a second dc bias voltage V dc2 The resulting electrostatic force acts to deform the second electrode assembly 20 and the membrane 31 is likewise under tension. Therefore, the film 31 is always in a tensioned state by always receiving the two electrostatic forces in opposite directions.
On the basis, the first alternating voltage V at any moment ac1 And a second alternating voltage V ac2 With opposite polarity, coact with the membrane 31 to generate ultrasound. In one state, when the film 31 is subjected to a first alternating voltage V ac1 The first electrode assembly 10 is subjected to a second alternating voltage V while being deformed by the attraction of the generated electrostatic force ac2 The repulsion of the generated electrostatic force also deforms toward the first electrode assembly 10, and the amplitudes respectively formed by these two mechanical deformations of the membrane 31 are added to increase the sound pressure level of the generated ultrasonic wave. In another state, when the film 31 is subjected to a first alternating voltage V ac1 While being deformed toward the second electrode assembly 20 by repulsion of the generated electrostatic force, it is subjected to a second alternating voltage V ac2 The attraction of the generated electrostatic force also deforms toward the second electrode assembly 20, and the amplitudes of the two mechanical deformations generated by the membrane 31 are superimposed and increased, which also increases the sound pressure level of the generated ultrasonic waves.
On the basis of the voltage, the first direct current bias voltage V dc1 Voltage ofA value not less than the first AC voltage V ac1 Of the second DC bias voltage V dc2 Is not less than the second AC voltage V ac2 The amplitude of (c). In this setting, the first potential difference and the second potential difference are positive values all the time, so as to further realize that the vibration structure 30 is under the first ac voltage V ac1 And a second alternating voltage V ac1 When vibrating up and down under the combined action, the vibrating structure 30 is further ensured to be always in a tensioning state, so as to improve the sound pressure level.
On the premise that the above conditions are satisfied, the first ac voltage V in the present embodiment ac1 And a second alternating voltage V ac2 The amplitude of the first DC bias voltage is 10V to 1000V, and the first DC bias voltage is V dc1 And a second DC bias voltage V dc2 The voltage values of the voltage ranges from 10V to 1000V.
As described above, by providing the first insulating layer 13 and the second insulating layer 23, the first electrode layer 12 and the third electrode layer 32, and the second electrode layer 22 and the third electrode layer 32 can be insulated from each other, so as to prevent the two opposite electrodes from breaking through the air gap therebetween to cause a short circuit.
Further, the third electrode layer 32 is grounded. The first electrode layer 12 and the third electrode layer 32 are electrically connected, and a first power supply 81 is connected therebetween, so that the first electrode layer 12 and the third electrode layer 32 form the first potential difference. The second electrode layer 22 is electrically connected to the third electrode layer 32, and a second power supply 82 is connected therebetween, so that the second potential difference is formed between the second electrode layer 22 and the third electrode layer 32.
Of course, the positional relationship between the thin film layer 31 and the third electrode layer 32 is not limited in this embodiment, and the thin film layer 31 may be disposed close to or far from the first electrode assembly 10.
And, the present embodiment does not limit the location of the at least one through hole 90, the through hole 90 is at least disposed on any one structure or any two or more structures of the first electrode assembly 10, the second electrode assembly 20, the first support 60, and the second support 70, and the vibration structure 30 communicates with the outside through the through hole 90.
Illustratively, the first electrode assembly 10 is provided with at least one through hole 90, and the first air gap 40 is communicated with the outside through the at least one through hole 90; and/or, the second electrode assembly 20 is provided with at least one through hole 90, and the second air gap 50 is communicated with the outside through the at least one through hole 90; and/or, the first supporting member 60 is provided with at least one through hole 90, and/or, the second supporting member 70 is provided with at least one through hole 90. Of course, the present embodiment is not limited thereto.
Through setting up at least one through-hole 90, can not only radiate the ultrasonic wave that produces to the external world effectively, can also effectively improve the acoustic impedance matching to promote the sound pressure level of output.
Preferably, the sum of the cross-sectional areas of the through-holes 90 provided on the first electrode assembly 10 is not more than half of the cross-sectional area of the first electrode assembly 10; and/or, the sum of the cross-sectional areas of the through holes 90 arranged on the second electrode assembly 20 is not more than half of the cross-sectional area of the second electrode assembly 20, so as to protect the push-pull type electrostatic thin film ultrasonic transducer 100 while achieving communication with the outside.
Of course, when the thin film layer 31 is disposed on the side of the third electrode layer 32 adjacent to the first electrode assembly 10, it is preferable to provide the through hole 90 on the first electrode assembly 20, and when the thin film layer 31 is disposed on the side of the third electrode layer 32 adjacent to the second electrode assembly 20, it is preferable to provide the through hole 90 on the second electrode assembly 20.
The frequency response simulation test is performed on the push-pull electrostatic thin film ultrasonic transducer in this embodiment, and the simulation test result is shown in fig. 3. It can be seen that, compared with the conventional electrostatic film ultrasonic transducer, the push-pull electrostatic film ultrasonic transducer in the embodiment has a larger total sound pressure level in any frequency band.
In summary, the push-pull electrostatic thin-film ultrasonic transducer provided in this embodiment always ensures that the vibrating structure is in a tensioned state and effectively increases the amplitude of the vibrating structure when vibrating through the manner of arranging two electric fields to be superposed and commonly acting on the vibrating structure, thereby effectively improving the electroacoustic conversion efficiency and the sound pressure level of the generated ultrasonic wave, and the push-pull electrostatic thin-film ultrasonic transducer can effectively radiate the generated ultrasonic wave to the outside through the arrangement of the through hole;
furthermore, the voltage value of the first direct current bias voltage is not less than the amplitude of the first alternating current voltage, and the voltage value of the second direct current bias voltage is not less than the amplitude of the second alternating current voltage, so that the first potential difference and the second potential difference are always positive values, and the vibrating structure is always in a tensioning state while vibrating up and down under the action of the first alternating current and the second alternating current.
Example 2
On the basis of embodiment 1, this embodiment further provides a directional sound-generating device, where the directional sound-generating device is one of a single-sided directional sound-generating speaker, a double-sided directional sound-generating speaker, a single-sided directional sound-generating screen, and a double-sided directional sound-generating screen.
Illustratively, when the directional sound generating device is a double-sided directional sound generating screen, the directional sound generating device comprises a double-sided display screen, and two push-pull electrostatic thin-film ultrasonic transducers respectively integrated on two opposite display surfaces of the double-sided display screen, and the specific structure of the push-pull electrostatic thin-film ultrasonic transducer refers to the description in embodiment 1.
The directional sound production device provided by the embodiment realizes directional sound production by integrating the push-pull type electrostatic thin film ultrasonic transducer in the existing device, even realizes double-sided directional sound production and display, and the thin type of the push-pull type electrostatic thin film ultrasonic transducer can effectively improve the electroacoustic conversion efficiency and the sound pressure level of the generated ultrasonic wave.
All the above optional technical solutions may be combined arbitrarily to form optional embodiments of the present invention, that is, any multiple embodiments may be combined to meet the requirements of different application scenarios, which are within the protection scope of the present application and are not described herein again.
It should be understood that the above-mentioned embodiments are merely preferred embodiments of the present invention, and not intended to limit the present invention, and any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A push-pull electrostatic membrane ultrasound transducer, comprising:
the first electrode assembly and the second electrode assembly are oppositely arranged;
a vibrating structure, the vibrating structure being disposed between the first electrode assembly and the second electrode assembly, a first air gap being formed between the vibrating structure and the first electrode assembly, a second air gap being formed between the vibrating structure and the second electrode assembly, the first electrode assembly being electrically connected to the vibrating structure, the first electrode assembly and the vibrating structure having a first potential difference therebetween, the second electrode assembly being electrically connected to the vibrating structure, the second electrode assembly and the vibrating structure having a second potential difference therebetween, the first potential difference being a sum of a first dc bias voltage and a first ac voltage, the second potential difference being a difference between a second dc bias voltage and a second ac voltage; at any moment, the first direct current bias voltage and the second direct current bias voltage have the same polarity, the first alternating current voltage and the second alternating current voltage have opposite polarities, and the vibration structure performs push-pull vibration and generates ultrasonic waves between the first air gap and the second air gap under the combined action of the first potential difference and the second potential difference;
and the through hole is used for radiating the ultrasonic waves to the outside, is arranged on the push-pull type electrostatic film ultrasonic transducer and is communicated with the outside.
2. The push-pull electrostatic thin film ultrasonic transducer according to claim 1, wherein the first electrode assembly comprises a first electrode layer, the second electrode assembly comprises a second electrode layer, the vibrating structure comprises a thin film layer and a third electrode layer, the thin film layer and the third electrode layer are arranged in a fitting manner, the first electrode layer and the third electrode layer are electrically connected to form the first potential difference, and the second electrode layer and the third electrode layer are electrically connected to form the second potential difference.
3. The push-pull electrostatic thin film ultrasonic transducer according to claim 1, wherein a voltage value of the first dc bias voltage is not less than an amplitude of the first ac voltage, and a voltage value of the second dc bias voltage is not less than an amplitude of the second ac voltage.
4. The push-pull electrostatic membrane ultrasonic transducer according to claim 3, wherein the first AC voltage and the second AC voltage have amplitudes of 10V to 1000V, and the first DC bias voltage and the second DC bias voltage have amplitudes of 10V to 1000V.
5. The push-pull electrostatic thin film ultrasound transducer according to claim 2, wherein the third electrode layer is arranged to be grounded.
6. The push-pull electrostatic thin film ultrasound transducer according to claim 1, further comprising a first support and a second support;
the first supporting piece is arranged between the first electrode assembly and the vibration structure, and the first supporting piece, the first electrode assembly and the vibration structure are enclosed to form the first air gap;
the second supporting piece is arranged between the second electrode assembly and the vibration structure, and the second supporting piece, the second electrode assembly and the vibration structure are enclosed to form the second air gap.
7. The push-pull electrostatic membrane ultrasonic transducer according to claim 6, wherein the through hole is provided at least in any one structure or any two or more structures of the first electrode assembly, the second electrode assembly, the first support member and the second support member, and the vibration structure communicates with the outside through the through hole.
8. The push-pull electrostatic membrane ultrasonic transducer according to claim 7, wherein a sum of cross-sectional areas of the through holes provided on the first electrode assembly is not more than half of a cross-sectional area of the first electrode assembly; and/or the sum of the cross-sectional areas of the through holes provided on the second electrode assembly is not more than half of the cross-sectional area of the second electrode assembly.
9. The push-pull electrostatic thin film ultrasonic transducer of any one of claims 2~8 wherein the first electrode assembly further comprises a first insulating layer disposed on a side of the first electrode layer adjacent to the vibrating structure and a first fixed base plate disposed on a side of the first electrode layer away from the vibrating structure;
the second electrode assembly further comprises a second insulating layer and a second fixed bottom plate, the second insulating layer is arranged on one side, close to the vibrating structure, of the second electrode layer, and the second fixed bottom plate is arranged on one side, far away from the vibrating structure, of the second electrode layer.
10. A directional sound production device, wherein the directional sound production device comprises a push-pull electrostatic thin film ultrasound transducer as claimed in any one of claims 1~9.
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| CN116208896A (en) * | 2023-05-04 | 2023-06-02 | 苏州清听声学科技有限公司 | Vehicle-mounted sound effect compensation method and system based on directional loudspeaker |
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| CN1709587A (en) * | 2004-06-18 | 2005-12-21 | 精工爱普生株式会社 | Ultrasonic transducer, ultrasonic speaker, and method of controlling the driving of ultrasonic transducer |
| CN1753576A (en) * | 2004-09-22 | 2006-03-29 | 精工爱普生株式会社 | Electrostatic ultrasonic transducer and ultrasonic speaker |
| CN1909747A (en) * | 2005-08-03 | 2007-02-07 | 精工爱普生株式会社 | Electrostatic ultrasonic transducer, ultrasonic speaker, and electrode manufacturing method for use in ultrasonic transducer |
| CN1942020A (en) * | 2005-09-27 | 2007-04-04 | 精工爱普生株式会社 | Electrostatic ultrasonic transducer and design method thereof, and ultrasonic speaker |
| CN1946248A (en) * | 2005-10-05 | 2007-04-11 | 精工爱普生株式会社 | Electrostatic ultrasonic energy exchanger and ultrasonic loudhailer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116208896A (en) * | 2023-05-04 | 2023-06-02 | 苏州清听声学科技有限公司 | Vehicle-mounted sound effect compensation method and system based on directional loudspeaker |
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| CN115567859B (en) | 2023-08-25 |
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