CN115536005A - Carbon nano tube purification method - Google Patents

Carbon nano tube purification method Download PDF

Info

Publication number
CN115536005A
CN115536005A CN202211347132.2A CN202211347132A CN115536005A CN 115536005 A CN115536005 A CN 115536005A CN 202211347132 A CN202211347132 A CN 202211347132A CN 115536005 A CN115536005 A CN 115536005A
Authority
CN
China
Prior art keywords
nano tube
carbon nano
carbon
container
fluidizing gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202211347132.2A
Other languages
Chinese (zh)
Other versions
CN115536005B (en
Inventor
王莲莲
李岩
耿磊
车林静
李然
槐晓涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ganhai Semiconductor Materials Shanghai Co ltd
Shandong Dazhan Nano Materials Co ltd
Original Assignee
Ganhai Semiconductor Materials Shanghai Co ltd
Shandong Dazhan Nano Materials Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ganhai Semiconductor Materials Shanghai Co ltd, Shandong Dazhan Nano Materials Co ltd filed Critical Ganhai Semiconductor Materials Shanghai Co ltd
Priority to CN202211347132.2A priority Critical patent/CN115536005B/en
Priority claimed from CN202211347132.2A external-priority patent/CN115536005B/en
Publication of CN115536005A publication Critical patent/CN115536005A/en
Application granted granted Critical
Publication of CN115536005B publication Critical patent/CN115536005B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/159Carbon nanotubes single-walled
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/168After-treatment
    • C01B32/17Purification

Abstract

The invention relates to the technical field of carbon nanotubes, in particular to a carbon nanotube purification method. The method comprises the following steps: (1) Mixing the carbon nano tube with ammonium chloride solid powder in a first container, and reacting at 350-400 ℃; (2) The carbon nano tube treated in the step (1) is in contact with fluidizing gas, oxygen and carbon dioxide in a second container, and the reaction temperature is 640 to 690 ℃; (3) And (3) mixing the carbon nano tubes treated in the step (2) with fluidizing gas in a third container for cooling. The purification method of the invention has no procedures of acid washing, water treatment and high energy consumption drying, avoids the problems of high energy consumption and serious damage to the conductivity of the carbon nano tube caused by high-temperature purification, has simple and convenient process and low operation energy consumption, can realize continuous large-scale purification of the carbon nano tube, and can ensure that the purity of the carbon nano tube can reach more than 99.9 percent.

Description

Carbon nano tube purification method
Technical Field
The invention relates to the technical field of carbon nanotubes, in particular to a carbon nanotube purification method.
Background
Preparation of C from vacuum arc evaporation of graphite electrode by Lijima since 1991 60 The experimental products of (a) unexpectedly found that since the multi-walled carbon nanotube, the carbon nanotube, as a one-dimensional nanomaterial, has been widely developed and applied due to its high mechanical strength, excellent electrical conductivity, and high specific surface area. The carbon nanotube is mainly a single-layer or multi-layer coaxial circular tube formed by hexagonally arranged carbon atoms. It has a very large aspect ratio, typically between 1-100nm in diameter and several microns to hundreds of microns in length. Due to the large length-diameter ratio, the carbon nano tube has excellent mechanical, electrical, electric conduction and heat conduction performances. The carbon nano tube has wide potential application prospect in the fields of lithium ion batteries, coatings, catalyst carriers, rubber plastic composite materials, electrochemical materials, photoelectric sensing and the like.
The preparation method of the carbon nano tube comprises the following steps: graphite arc process, chemical vapor deposition process, laser evaporation graphite process, template process, condensed phase electrolysis process, organic plasma jet process, etc. Among them, the graphite arc method and the chemical vapor deposition method are the most widely used preparation methods at present. The carbon nanotubes prepared by these methods are accompanied by considerable amounts of impurities such as carbon nanoparticles, amorphous carbon, catalysts, and the like. The existence of these impurities has greatly hindered the application of carbon nanotubes in various fields, and therefore, research on the purification technology of carbon nanotubes is urgent. The existing industrialized batch purification method of the carbon nano tube mainly comprises the following steps: chemical oxidation, gas phase oxidation, liquid phase acid washing, high temperature purification, etc. However, these methods have various problems, and the purity of purification by chemical oxidation and gas phase oxidation is limited; the acid washing method needs to be repeatedly washed by purified water until the pH value is close to neutral, so that more waste water is generated, the using amount of water resources is large, and the waste water needs to be dried again after being washed, so that a large amount of electric energy or natural gas energy is consumed, and the energy conservation and emission reduction are not facilitated; the purification of carbon nanotubes by the high-temperature purification method requires high temperature of 1800-2500 ℃, has extremely high energy consumption and extremely high damage to the conductivity of the carbon nanotubes, so the invention of the method for continuously purifying the carbon nanotubes in batches with low energy consumption is urgently needed.
Disclosure of Invention
Aiming at the technical problems of non-ideal purification effect, large resource and energy consumption and loss of carbon nano tube performance of the existing industrialized mass purification method of the carbon nano tube, the invention provides the purification method of the carbon nano tube, which has no procedures of acid washing, water treatment and high energy consumption drying, avoids the problems of high energy consumption and serious damage of carbon nano tube conductivity caused by high-temperature purification, has simple and convenient process and low operation energy consumption, can realize continuous mass purification of the carbon nano tube, and can achieve the purity of the carbon nano tube of more than 99.9 percent.
The technical scheme of the invention is as follows:
a carbon nano tube purification method comprises the following steps:
(1) Mixing the carbon nano tube with ammonium chloride solid powder in a first container, and reacting at 350-400 ℃;
(2) The carbon nano tube treated in the step (1) is contacted with fluidizing gas, oxygen and carbon dioxide in a second container, and the reaction temperature is 640-690 ℃;
(3) And (3) mixing the carbon nano tubes treated in the step (2) with fluidizing gas in a third container for cooling.
Furthermore, the purification method is suitable for single-wall carbon nanotubes, double-wall carbon nanotubes or multi-wall carbon nanotubes; the carbon nano tube can be in the form of powder, granules, blocks or the mixture of the powder, the granules, the blocks and the mixture of the three; the carbon nanotubes may be prepared by a graphite arc method, a chemical vapor deposition method, a laser evaporation graphite method, a template method, a condensed phase electrolysis method, an organic plasma spray method, with or without a metal catalyst, such as iron, cobalt, nickel, magnesium, aluminum, manganese, molybdenum, vanadium, etc.
Further, in the step (1), the reaction is carried out in a fluidizing gas atmosphere, ammonium chloride accounts for 0.5-2% of the weight of the carbon nano tube, and the reaction time is 20-40min.
Further, in the step (1), preferably, the carbon nanotubes are placed in a fluidizing gas atmosphere in a first container, and ammonium chloride solid powder is added, wherein the ammonium chloride accounts for 1% of the weight of the carbon nanotubes, the reaction temperature is 370 ℃, and the reaction time is 30min.
Further, the carbon nanotubes are processed in the step (1) and then enter the second container under the action of the thrust force of the fluidizing gas flow.
Further, in the step (2), continuously introducing fluidizing gas, oxygen and carbon dioxide into the second container, wherein the flow speed of the fluidizing gas is 500 to 600m 3 The flow rate of oxygen is 200 to 300m 3 The flow rate of the carbon dioxide is 300 to 350m 3 The reaction time is 10 to 30min.
Further, the reaction temperature in the step (2) is preferably 670 ℃, and the reaction time is preferably 20min.
Further, the carbon nanotubes are processed in the step (2) and then enter a third container under the action of the pushing force of the fluidizing gas flow.
Further, in the step (3), continuously introducing fluidizing gas into the third container, wherein the flow speed of the fluidizing gas is 300-350m 3 And h, cooling for about 30min until the temperature of the carbon nano tube is reduced to room temperature.
Further, the fluidizing gas flow rate in the step (3) is preferably 320m 3 /h。
Further, the fluidizing gas is nitrogen or argon.
The invention has the beneficial effects that:
according to the invention, ammonium chloride powder is used as a reaction reagent, and metal impurities of the carbon nano tube are effectively removed at the temperature of 350-400 ℃; nitrogen or argon is used as fluidizing gas, carbon dioxide is used as reducing gas, and oxygen is used as oxidizing gas, so that the impure carbon substances are effectively removed;
according to the invention, impurities can be removed on the premise of not damaging the carbon tube, a pickling method is avoided, a large amount of water washing purification is avoided, the waste of water resources is effectively reduced, the subsequent sewage treatment process is also avoided, and the cost is saved; high energy consumption of the high-temperature purification method is avoided. The method has the advantages of simple process, convenient and quick operation, low cost and the like, has good product purity uniformity and good batch stability, is suitable for continuous batch purification of the carbon nanotubes, and ensures that the purity of the obtained carbon nanotubes reaches over 99.9 percent.
Drawings
In order to more clearly illustrate the embodiments or technical solutions in the prior art of the present invention, the drawings used in the description of the embodiments or prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
Fig. 1 is a TEM image of a low purity carbon nanotube in the prior art.
Fig. 2 is a TEM image of the high purity carbon nanotube purified in example 1.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
The method for purifying the low-purity carbon nano tube by using the fluidized bed comprises the following steps:
(1) Placing the carbon nano tube in a first storage tank of a fluidized bed, and adding ammonium chloride solid powder in the nitrogen atmosphere, wherein the weight of the ammonium chloride is 1 percent of that of the carbon nano tube, the reaction temperature is 370 ℃, and the reaction time is 20min.
(2) After the carbon nano tube is treated in the step (1), the carbon nano tube enters a second storage tank of the fluidized bed under the action of the thrust force of nitrogen airflow, and nitrogen, oxygen and carbon dioxide are continuously introduced into the second storage tank, wherein the flow velocity of the nitrogen is 550m 3 Flow rate of oxygen gas of 250m 3 Flow rate of carbon dioxide at 330 m/h 3 The reaction temperature is 680 ℃ and the reaction time is 20min.
(3) After the carbon nano tube is treated in the step (2), the carbon nano tube enters a third storage tank of the fluidized bed under the action of the thrust force of nitrogen airflow, and nitrogen is continuously introduced into the third storage tank to ensure that the carbon nano tube is kept at the flow velocity of 330m 3 And in the nitrogen atmosphere, cooling for about 30min until the temperature of the carbon nano tube is reduced to room temperature, and obtaining the carbon nano tube with the purity of more than 99.9 percent.
Example 2
The method for purifying the low-purity carbon nano tube by using the fluidized bed comprises the following steps:
(1) Placing the carbon nano tube in a first storage tank of a fluidized bed, and adding ammonium chloride solid powder in the nitrogen atmosphere, wherein the weight of the ammonium chloride is 1 percent of that of the carbon nano tube, the reaction temperature is 370 ℃, and the reaction time is 20min.
(2) After the carbon nano tube is treated in the step (1), the carbon nano tube enters a second storage tank under the action of the pushing force of argon gas flow, argon gas, oxygen and carbon dioxide are continuously introduced into the second storage tank, and the flow velocity of the argon gas is 500m 3 The flow rate of oxygen is 250m 3 Flow rate of carbon dioxide at 330 m/h 3 The reaction temperature is 680 ℃ and the reaction time is 20min.
(3) After the carbon nano tube is treated in the step (2), the carbon nano tube enters a third storage tank under the action of the pushing force of argon gas flow, and argon gas is continuously introduced into the third storage tank, so that the carbon nano tube is kept at the flow velocity of 330m 3 And in the argon atmosphere, cooling for about 30min until the temperature of the carbon nano tube is reduced to room temperature to obtain the carbon nano tube with the purity of more than 99.9 percent.
Example 3
The method for purifying the low-purity carbon nano tube by using the fluidized bed comprises the following steps:
(1) Placing the carbon nano tube in a first storage tank of a fluidized bed, and adding ammonium chloride solid powder in a nitrogen atmosphere, wherein the weight of the ammonium chloride is 0.5 percent of that of the carbon nano tube, the reaction temperature is 370 ℃, and the reaction time is 20min.
(2)After the carbon nano tube is treated in the step (1), the carbon nano tube enters a second storage tank under the action of the thrust force of nitrogen airflow, and nitrogen, oxygen and carbon dioxide are continuously introduced into the second storage tank, wherein the flow rate of the nitrogen is 550m 3 H, flow rate of oxygen 250m 3 Flow rate of carbon dioxide at 330 m/h 3 The reaction temperature is 690 ℃ and the reaction time is 20min.
(3) After the carbon nano tube is treated in the step (2), the carbon nano tube enters a third storage tank under the action of the pushing force of the nitrogen airflow, and the nitrogen is continuously introduced into the third storage tank, so that the carbon nano tube is kept at the flow velocity of 320m 3 And in the nitrogen atmosphere, cooling for about 30min until the temperature of the carbon nano tube is reduced to room temperature, and obtaining the carbon nano tube with the purity of more than 99.9 percent.
Example 4
Purifying the low-purity carbon nano tube by using a fluidized bed, wherein the purification method comprises the following steps:
(1) Placing the carbon nano tube in a first storage tank of a fluidized bed, and adding ammonium chloride solid powder in the nitrogen atmosphere, wherein the weight of the ammonium chloride is 2 percent of that of the carbon nano tube, the reaction temperature is 350 ℃, and the reaction time is 40min.
(2) After the carbon nano tube is treated in the step (1), the carbon nano tube enters a second storage tank under the action of the pushing force of the nitrogen airflow, and nitrogen, oxygen and carbon dioxide are continuously introduced into the second storage tank, wherein the flow velocity of the nitrogen is 600m 3 H, flow rate of oxygen gas 200m 3 Flow rate of carbon dioxide is 350m 3 The reaction temperature is 645 ℃ and the reaction time is 30min.
(3) After the carbon nano tube is treated in the step (2), the carbon nano tube enters a third storage tank under the action of the pushing force of the nitrogen airflow, and the nitrogen is continuously introduced into the third storage tank, so that the carbon nano tube is kept at the flow velocity of 300m 3 And in the nitrogen atmosphere, cooling for about 30min until the temperature of the carbon nano tube is reduced to room temperature, and obtaining the carbon nano tube with the purity of more than 99.9 percent.
Example 5
Purifying the low-purity carbon nano tube by using a fluidized bed, wherein the purification method comprises the following steps:
(1) Placing the carbon nano tube in a first storage tank of a fluidized bed, and adding ammonium chloride solid powder in a nitrogen atmosphere, wherein the weight of the ammonium chloride is 1 percent of that of the carbon nano tube, the reaction temperature is 370 ℃, and the reaction time is 30min.
(2) After the carbon nano tube is treated in the step (1), the carbon nano tube enters a second storage tank under the action of the pushing force of the nitrogen airflow, nitrogen, oxygen and carbon dioxide are continuously introduced into the second storage tank, and the flow rate of the nitrogen is 530m 3 H, flow rate of oxygen 270m 3 Flow rate of carbon dioxide at 340 m/h 3 H, the reaction temperature is 670 ℃, and the reaction time is 20min.
(3) After the carbon nano tube is treated in the step (2), the carbon nano tube enters a third storage tank under the action of the pushing force of the nitrogen airflow, and the nitrogen is continuously introduced into the third storage tank, so that the carbon nano tube is kept at the flow velocity of 320m 3 In nitrogen atmosphere, cooling for about 30min until the temperature of the carbon nano tube is reduced to room temperature, and obtaining the carbon nano tube with the purity of more than 99.9 percent.
Although the present invention has been described in detail by referring to the drawings in connection with the preferred embodiments, the present invention is not limited thereto. Various equivalent modifications or substitutions can be made on the embodiments of the present invention by those skilled in the art without departing from the spirit and scope of the present invention, and these modifications or substitutions are within the scope of the present invention/any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention.

Claims (10)

1. A carbon nanotube purification method is characterized by comprising the following steps:
(1) Mixing the carbon nano tube with ammonium chloride solid powder in a first container, and reacting at 350-400 ℃;
(2) The carbon nano tube treated in the step (1) is in contact with fluidizing gas, oxygen and carbon dioxide in a second container, and the reaction temperature is 640 to 690 ℃;
(3) And (3) mixing the carbon nano tubes treated in the step (2) with fluidizing gas in a third container for cooling.
2. The method for purifying carbon nanotubes in claim 1, wherein in the step (1), the reaction is performed in a fluidized gas atmosphere, the weight of ammonium chloride is 0.5-2% of the weight of the carbon nanotubes, and the reaction time is 20-40min.
3. The method of claim 1, wherein the step (1) comprises placing the carbon nanotubes in a fluidized gas atmosphere in a first container, adding ammonium chloride solid powder, wherein the ammonium chloride is 1% of the weight of the carbon nanotubes, the reaction temperature is 370 ℃, and the reaction time is 30min.
4. The method for purifying carbon nanotubes recited in claim 1, wherein the carbon nanotubes are introduced into the second container by the driving force of the fluidizing gas stream after being treated in the step (1).
5. The carbon nanotube purification method of claim 1, wherein in the step (2), the fluidizing gas, the oxygen and the carbon dioxide are continuously introduced into the second container, and the flow rate of the fluidizing gas is 500 to 600m 3 The flow rate of oxygen is 200 to 300m 3 The flow rate of the carbon dioxide is 300 to 350m 3 The reaction time is 10 to 30min.
6. The method for purifying carbon nanotubes in claim 5, wherein the reaction temperature in step (2) is 670 ℃ and the reaction time is 20min.
7. The method for purifying carbon nanotubes as claimed in claim 1, wherein the carbon nanotubes are introduced into the third container by the thrust of the fluidizing gas stream after being treated in step (2).
8. The method for purifying carbon nanotubes as claimed in claim 1, wherein in the step (3), the fluidization is continuously introduced into the third containerThe flow rate of the fluidizing gas is 300 to 350m 3 And/h, until the temperature of the carbon nano tube is reduced to the room temperature.
9. The carbon nanotube purification method of claim 8, wherein the fluidizing gas flow rate of step (3) is 320m 3 /h。
10. The method for purifying carbon nanotubes as claimed in claim 1, wherein the fluidizing gas is nitrogen or argon.
CN202211347132.2A 2022-10-31 Carbon nano tube purification method Active CN115536005B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202211347132.2A CN115536005B (en) 2022-10-31 Carbon nano tube purification method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202211347132.2A CN115536005B (en) 2022-10-31 Carbon nano tube purification method

Publications (2)

Publication Number Publication Date
CN115536005A true CN115536005A (en) 2022-12-30
CN115536005B CN115536005B (en) 2024-04-19

Family

ID=

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101041427A (en) * 2006-03-22 2007-09-26 索尼株式会社 Manufacturing method of carbon material, carbon material and manufacturing method of electronic components
CN101941691A (en) * 2010-09-21 2011-01-12 上海大学 Preparation method of single-walled carbon nanotube
CN106315560A (en) * 2016-08-22 2017-01-11 赖世权 Carbon nanotube purification method
CN112978717A (en) * 2019-12-14 2021-06-18 中国科学院大连化学物理研究所 Method for shortening carbon nano tube

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101041427A (en) * 2006-03-22 2007-09-26 索尼株式会社 Manufacturing method of carbon material, carbon material and manufacturing method of electronic components
CN101941691A (en) * 2010-09-21 2011-01-12 上海大学 Preparation method of single-walled carbon nanotube
CN106315560A (en) * 2016-08-22 2017-01-11 赖世权 Carbon nanotube purification method
CN112978717A (en) * 2019-12-14 2021-06-18 中国科学院大连化学物理研究所 Method for shortening carbon nano tube

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
YUN CHEN等: "Purification of double-walled carbon nanotube macro-films", 《NEWJ.CHEM》, pages 542 *

Similar Documents

Publication Publication Date Title
CN101164874B (en) Method for purifying multi-wall carbon nano pipe
CN1751989A (en) Method of preparing carbon nanocages
CN108557799B (en) High-purity high-conductivity graphene-like hierarchical porous carbon and preparation method thereof
CN104383910B (en) A kind of preparation method of the controllable pucherite/graphene composite photocatalyst of granular size
CN106744894B (en) A kind of preparation method of graphene powder
Huang et al. Preparation of novel carbon-based nanomaterial of graphene and its applications electrochemistry
CN109650379A (en) A kind of single-walled carbon nanotube graded oxidation purification process
CN105060271A (en) Carbon nano-tube purification method
Wu et al. One-step synthesis of hierarchical metal oxide nanosheet/carbon nanotube composites by chemical vapor deposition
CN110104631A (en) The purification process of carbon nanotube and high-purity carbon nanotube
CN113247883A (en) Method for purifying carbon nano tube
CN102658153B (en) Preparation method of copper substrate surface growth fullerene doped porous carbon nanofibers
CN115414937A (en) Catalyst for preparing carbon nanotube by microwave catalytic pyrolysis of waste plastics and preparation method and application thereof
CN105293468A (en) Method for efficiently preparing sulphur-doped hollow carbon spheres
CN113336221B (en) Preparation method of porous graphene dispersion liquid attached with oxygen-containing group
CN115536005A (en) Carbon nano tube purification method
CN115536005B (en) Carbon nano tube purification method
CN101544365B (en) Method for preparing hollow carbon nano-cage through iodized thermal treatment
CN115304055A (en) Method for recovering polyethylene waste plastics and carbon nano tube prepared by method
CN101704519B (en) Ammonium halide heat treatment based method for preparing hollow carbon nanocages
JP3874269B2 (en) Carbon nanotube purification method
CN1485271A (en) Method for removing cobalt,nickel or (and) iron in nm-class carbon tubes
CN112441579B (en) Method for intercalation of graphite, graphite intercalation material prepared by the method and oxidation method of hydrocarbon
CN210104135U (en) Gas-phase spinning device for continuously preparing silicon nanofibers
CN113200532A (en) Method for preparing porous carbon material by using non-nano zinc oxide or zinc hydroxide and porous carbon material

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information

Country or region after: China

Address after: Lin Chi Zhen Xiao Lin Chi Cun, Zouping City, Binzhou City, Shandong Province, 256200

Applicant after: Shandong Dazhan Nano Materials Co.,Ltd.

Applicant after: Shanghai Dazhang Era Nanotechnology Co.,Ltd.

Address before: Lin Chi Zhen Xiao Lin Chi Cun, Zouping City, Binzhou City, Shandong Province, 256200

Applicant before: Shandong Dazhan Nano Materials Co.,Ltd.

Country or region before: China

Applicant before: Ganhai semiconductor materials (Shanghai) Co.,Ltd.

CB02 Change of applicant information
GR01 Patent grant