CN115469389A - Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device - Google Patents

Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device Download PDF

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CN115469389A
CN115469389A CN202211410461.7A CN202211410461A CN115469389A CN 115469389 A CN115469389 A CN 115469389A CN 202211410461 A CN202211410461 A CN 202211410461A CN 115469389 A CN115469389 A CN 115469389A
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CN115469389B (en
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王萌光
李勇
吴斐
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Beijing LLvision Technology Co ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/017Head mounted
    • G02B27/0172Head mounted characterised by optical features
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1814Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1866Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033Means for improving the coupling-out of light from the light guide
    • G02B6/005Means for improving the coupling-out of light from the light guide provided by one optical element, or plurality thereof, placed on the light output side of the light guide

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and near-eye display equipment, which relate to the technical field of diffraction optics, wherein the two-dimensional coupling-out grating comprises a plurality of first elements and a plurality of second elements which are arranged at intervals and in an array manner, and the second elements are determined after the first elements are subjected to integral scaling; the first element is a parallelogram structure; any element comprises a plurality of sub-units in the shape of a quadrangular pyramid, and the sub-units are formed by two one-dimensional blazed gratings which are crossed at a preset angle. The two-dimensional coupling grating is composed of elements with parallelogram structures with different sizes, and each element comprises a four-corner cone-shaped subunit formed by crossing two one-dimensional blazed gratings; due to the structure of the quadrangular pyramid shape, the side light leakage in the light source transmission process can be reduced, and the energy utilization rate is improved; and the coupling efficiency can be adjusted through the size ratio of the two elements, the energy utilization rate is further improved, and efficient two-dimensional pupil expanding diffraction is realized.

Description

Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device
Technical Field
The invention relates to the technical field of diffraction optics, in particular to a two-dimensional coupling-out grating, a super-surface optical waveguide and near-to-eye display equipment.
Background
In recent years, with the rapid development of computer science, human-computer interaction technologies such as Virtual Reality (VR) and Augmented Reality (AR) based on near-eye display devices are becoming application hotspots. According to different interaction modes, the VR near-eye display equipment generates a virtual environment through a computer, and an observer can observe, touch and interact with objects in the virtual environment; and the virtual environment generated by the AR near-eye display equipment is superposed in the real world, and an observer can interact with the real world while seeing the virtual environment, so that the purpose of augmented reality is realized, therefore, the AR has stronger interaction capacity relative to the VR, and shows a development trend with more potential in the aspects of education, medical treatment, military affairs and the like.
The display system adopted by the AR glasses in the market at present is the combination of various miniature display screens and optical elements such as prisms, free-form surfaces, birdBanh, optical waveguides and the like, wherein the difference of optical combiners is a key part for distinguishing the AR display system. In summary, the optical waveguide scheme has the best development potential in terms of optical effect, appearance and mass production, and may be a better choice for enabling the AR glasses to reach the consumer level.
The mainstream of optical waveguide, namely the nature of diffractive optical waveguide, is a technology for realizing near-to-eye image display by using a diffraction grating lens, and the generation and the popularization of the technology benefit from the technical progress trend that an optical element changes from millimeter level to micro-nanometer level and changes from 'solid' to 'plane'. However, the conventional surface relief grating has problems of low diffraction efficiency, narrow field angle, large volume and the like.
In addition, the diffraction optical waveguide technology is divided into one-dimensional expansion and two-dimensional expansion. For example, several versions of microsoft HoloLens first and second generation, magicLeap One, etc., all use One-dimensional diffractive optical waveguides. The two-dimensional diffraction light waveguide can realize two-dimensional expansion of an exit pupil through a reasonable design grating structure, the two-dimensional grating is adopted in the two-dimensional diffraction light waveguide for bidirectional pupil expansion, the effective area of the light waveguide can be fully utilized, but the bottleneck needs to be broken through in the aspect of materials in the development of the prior common two-dimensional diffraction light waveguide related technology so as to improve optical parameters, and the light leakage problem exists because the coupling efficiency of the front and back surfaces of the common two-dimensional grating on the market is basically consistent.
Disclosure of Invention
The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and a near-eye display device, which are used for improving the coupling-out efficiency of the grating and reducing light leakage at the outer side.
The invention provides a two-dimensional coupling-out grating, which comprises a plurality of first primitives and a plurality of second primitives which are arranged at intervals and in an array mode, wherein the second primitives are determined after the first primitives are subjected to integral scaling; the first element is a parallelogram structure; any element comprises a plurality of sub-units in the shape of a quadrangular pyramid, and the sub-units are formed by two one-dimensional blazed gratings which are crossed at a preset angle.
According to the two-dimensional coupling-out grating provided by the invention, the sub-units are of a convex structure or a groove structure.
According to the two-dimensional coupling-out grating provided by the invention, the two one-dimensional blazed gratings comprise a first blazed grating and a second blazed grating, the included angle between the first blazed grating and the vertical axis is a first included angle, the included angle between the second blazed grating and the vertical axis is a second included angle, and the sum of the first included angle and the second included angle is zero.
According to the two-dimensional coupling-out grating provided by the invention, any subunit comprises a vertex and four bottom points, wherein the four bottom points are positioned in the same plane, and the vertex is not positioned in the plane formed by the four bottom points.
According to the two-dimensional coupling-out grating provided by the invention, the four bottom points comprise a first bottom point, a second bottom point, a third bottom point and a fourth bottom point, wherein the distance between the top point and each bottom point is equal;
the distance between the first bottom point and the second bottom point is equal to the distance between the third bottom point and the fourth bottom point; the distance between the second bottom point and the third bottom point and the distance between the fourth bottom point and the first bottom point are equal.
According to the two-dimensional coupling-out grating provided by the invention, the distance between the first bottom point and the second bottom point is equal to the distance between the second bottom point and the third bottom point.
According to the two-dimensional coupling-out grating provided by the invention, a first element comprises a first edge, a second edge, a third edge and a fourth edge which are sequentially connected, wherein the first edge, the third edge and a first blazed grating are parallel; the second edge, the fourth edge and the second blazed grating are parallel.
According to the two-dimensional outcoupling grating provided by the invention, the material of the two-dimensional outcoupling grating comprises one of silicon oxide, silicon nitride, gallium nitride or titanium dioxide.
The invention also provides a super-surface optical waveguide, which comprises a waveguide substrate, a one-dimensional coupling-in grating and the two-dimensional coupling-out grating, wherein the one-dimensional coupling-in grating and the two-dimensional coupling-out grating are arranged on the surface of the waveguide substrate; the one-dimensional coupling grating is used for coupling incident light carrying image information into the waveguide substrate; the two-dimensional coupling-out grating is used for diffracting and expanding diffracted light which comes from the one-dimensional coupling-in grating and is transmitted in a total reflection mode in the waveguide substrate along two directions so as to be coupled out to a human eye for imaging.
The invention also provides near-eye display equipment, which comprises a micro display and the super-surface optical waveguide; the microdisplay outputs incident light carrying image information.
The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and near-eye display equipment, and relates to the technical field of light source transmission, wherein the two-dimensional coupling-out grating comprises a plurality of first elements and a plurality of second elements which are arranged at intervals and in an array manner, and the second elements are determined after the first elements are integrally zoomed; the first element is a parallelogram structure; any element comprises a plurality of sub-units in the shape of a quadrangular pyramid, and the sub-units are formed by two one-dimensional blazed gratings which are crossed at a preset angle. The two-dimensional coupling grating is composed of elements with parallelogram structures with different sizes, and each element comprises a subunit which is formed by crossing two one-dimensional blazed gratings and has a quadrangular cone shape; due to the structure of the quadrangular pyramid shape, the side light leakage in the light source transmission can be reduced, and the energy utilization rate is improved; and the coupling efficiency can be adjusted through the size ratio of the two elements, the energy utilization rate is further improved, and efficient two-dimensional pupil expansion diffraction is realized.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of a two-dimensional outcoupling grating of the present invention;
FIG. 2 is a schematic diagram of one embodiment of two blazed gratings in a two-dimensional out-coupling grating of the present invention;
FIG. 3 is a schematic cross-sectional view of an embodiment of a blazed grating of the present invention;
FIG. 4 is a schematic structural diagram of a two-dimensional coupled grating subunit according to an embodiment of the present invention;
FIG. 5 is a schematic top view of an embodiment of a super-surface optical waveguide of the present invention;
FIG. 6 is a schematic diagram of a side view of an embodiment of a super-surface optical waveguide of the present invention;
FIG. 7 is a graph showing the coupling-out efficiency versus visible wavelength for an embodiment of the simulation of a super-surface optical waveguide of the present invention;
FIG. 8 is a graph showing the coupling-out efficiency versus incident angle for one embodiment of the simulation of a super-surface optical waveguide according to the present invention;
FIG. 9 is a schematic diagram showing the relationship between the field angle and the refractive index of an exemplary simulated super-surface optical waveguide.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a two-dimensional outcoupling grating according to an embodiment of the invention. In this embodiment, the two-dimensional outcoupling grating may include the first cells 10 and the second cells 20 which are spaced and arranged in an array.
Wherein the second primitive 20 is determined after global scaling of the first primitive 10; the first element 10 is a parallelogram structure; any element comprises a plurality of sub-units in the shape of a quadrangular pyramid, and the sub-units are formed by two one-dimensional blazed gratings which are crossed at a preset angle.
The element structure of the parallelogram has the advantage of simple manufacturing process, the shape of the element structure of the parallelogram is simple, the manufacturing robustness is also improved, the performance reduction cannot be greatly influenced by the small size deviation in the manufacturing process, the selectivity of the manufacturing process is increased, and the modes of photoetching, masking and the like can be adopted, so that the repeated description is omitted.
The second element 20 and the first element 10 are of the same shape and different sizes. In the same direction, the distances between the adjacent second cells 20 are equal, the distances between the adjacent first cells 10 are equal, and the distances between the adjacent first cells 10 and the second cells 20 are also equal.
Alternatively, the centers of the patterns of the plurality of second elements 20 and the plurality of first elements 10 may be connected in a straight line in the same direction, and it should be noted that the directions in this embodiment may include a horizontal direction, a vertical direction, a direction along the first blazed grating, and a direction along the second blazed grating.
The two one-dimensional blazed gratings forming the sub-unit comprise a first blazed grating B1 and a second blazed grating B2, an included angle between the first blazed grating B1 and the vertical axis is a first included angle a, an included angle between the second blazed grating and the vertical axis is a second included angle B, and the sum of the first included angle a and the second included angle B is zero.
It should be noted that the angle value in the present embodiment has a negative number, where a positive angle refers to an angle obtained clockwise from the vertical axis to the horizontal axis, and a negative angle refers to an angle obtained counterclockwise from the vertical axis to the horizontal axis. Therefore, it can be understood that the first included angle a is a negative angle, and the second included angle b is a positive angle; the first included angle a and the second included angle b have the same value and different signs, so that the sum of the first included angle a and the second included angle b is zero.
Optionally, the first included angle a ranges from-10 ° to-75 °, and the second included angle b ranges from 10 ° to 75 °. Preferably, the first angle a ranges from-30 ° to-60 °; the second included angle b ranges from 30 ° to 60 °.
When the grating is scribed into sawtooth-shaped groove sections, the light energy of the grating is concentrated in a predetermined direction, i.e. a certain spectral order. When detecting from this direction, the intensity of the spectrum is at its maximum, a phenomenon known as blaze (blaze), and such a grating is known as blazed grating (blazed grating).
In such blazed gratings, the diffracting groove surface is a smooth plane that is at an angle to the surface of the grating, called the blaze angle (blaze angle). The wavelength corresponding to the maximum light intensity is called blaze wavelength (blaze wavelength). The grating can be suitable for a certain first-order spectrum of a certain specific wave band through the design of the blaze angle.
A blazed grating is a particular reflecting or projecting diffraction grating structure designed to produce maximum diffraction efficiency at a particular diffraction order. The optical power is dominated at the designed diffraction order, while the loss of optical power at other orders (especially the zero order) is minimized. In this embodiment two one-dimensional blazed gratings are used to form the sub-unit crossing at a preset angle. The predetermined angle is understood to be the sum of the absolute value of the first angle a and the absolute value of the second angle b.
In addition, the blazed grating in this embodiment may be a super-surface grating, please refer to fig. 2, and fig. 2 is a schematic diagram of an embodiment of two blazed gratings in the two-dimensional coupling-out grating of the present invention.
Each blazed grating comprises two strip-shaped units with different widths, each strip-shaped unit can be a micro-nano structure with a triangular cross section, and the two strip-shaped units with different widths can have the same height.
Referring to fig. 3, fig. 3 is a schematic cross-sectional structure diagram of a blazed grating according to an embodiment of the present invention.
Optionally, the width d2 of the small sawtooth structures in the blazed grating is between 10nm and 500nm, and the width d1 of the large sawtooth structures in the blazed grating is between 80nm and 1000 nm. The height h of the small sawtooth structures is approximately the same as the height h of the large sawtooth structures, and the height h is between 10nm and 500 nm. With continued reference to fig. 2, the coupling between two strip-shaped elements of smaller width may form the second cell 20, and the coupling between two strip-shaped elements of larger width may form the first cell 10, with negligible coupling between two strip-shaped elements of different widths.
Each cell includes a plurality of sub-units in the shape of a quadrangular pyramid, and in some embodiments, each sub-unit may include a vertex and four vertices, as shown in fig. 4, where fig. 4 is a schematic structural view of an embodiment of a sub-unit of a two-dimensional coupling grating according to the present invention.
Since the one-dimensional blazed grating has a sawtooth structure, a subunit formed by two one-dimensional blazed gratings crossing each other is in a quadrangular pyramid shape.
Optionally, the sub-unit is a protrusion structure or a groove structure. The two-dimensional coupling grating can be arranged on the surface of the substrate, wherein when the subunits are of a convex structure, four bottom points are arranged on the surface of the substrate; when the sub-unit is a groove structure, the vertex is disposed on the surface of the substrate.
Wherein, the convex structure can be a tiny ridge or a microscopic protrusion; the groove structure may be a minute groove or a microscopic depression.
Specifically, the quadrangular pyramid structure of the sub-unit may include a vertex P, a first base point a, a second base point B, a third base point C, and a fourth base point D. Wherein the four bottom points are located in the same plane ABCD, and the top point P is not located in the plane ABCD formed by the four bottom points.
Optionally, where the vertex P is equidistant from each base point, i.e. AP = BP = CP = DP.
Optionally, the distance between the first bottom point and the second bottom point and the distance between the third bottom point and the fourth bottom point are equal; the distance between the second bottom point and the third bottom point and the distance between the fourth bottom point and the first bottom point are equal, namely AB = CD, BC = AD, and the four bottom points form a parallelogram.
Optionally, the distance between the first bottom point and the second bottom point is equal to the distance between the second bottom point and the third bottom point, that is, AB = BC, and then the four bottom points form a diamond.
Optionally, the first cell comprises a first edge, a second edge, a third edge and a fourth edge connected in sequence, wherein the first edge, the third edge and the first blazed grating are parallel; the second edge, the fourth edge and the second blazed grating are parallel. The two-dimensional outcoupling grating may use a material having high transmittance in the visible light band, for example, silicon oxide, silicon nitride, gallium nitride, titanium dioxide, or the like having a refractive index of more than 1.5.
Referring to fig. 5-6, fig. 5 is a schematic top view structure diagram of an embodiment of the super-surface optical waveguide of the present invention, and fig. 6 is a schematic side view structure diagram of an embodiment of the super-surface optical waveguide of the present invention. In an embodiment, the super surface optical waveguide comprises a waveguide substrate 30 and a one-dimensional incoupling grating 40 and the above-mentioned two-dimensional outcoupling grating 50 arranged on the surface of the waveguide substrate.
The one-dimensional incoupling grating 40 is used for incoupling incident light carrying image information into the waveguide substrate 30, and the two-dimensional outcoupling grating 50 is used for diffracting and expanding diffracted light which comes from the one-dimensional incoupling grating 40 and is guided in the waveguide substrate 30 in a total reflection manner in two directions so as to be outcoupled to a human eye for imaging.
Where the one-dimensional incoupling grating 40 may be any high efficiency grating, the waveguide substrate 30 is a light transmissive substrate, e.g. of glass. The glass material has a high refractive index, which is advantageous for realizing total reflection of internal light, thereby facilitating transportation of light entering from the one-dimensional coupling-in grating 40 to the two-dimensional coupling-out grating 50.
Alternatively, the one-dimensional incoupling grating 40 and the two-dimensional outcoupling grating 50 can be regarded as photo-lithographic patterning of thin films of high refractive index material deposited on the waveguide substrate 30.
The two-dimensional coupling-out grating 50 includes a plurality of first elements and a plurality of second elements which are arranged at intervals and in an array, wherein the second elements are determined by integrally scaling the first elements, so that the coupling-out efficiency of the two-dimensional coupling-out grating can be adjusted by changing the sizes and proportions of the first elements and the second elements; in addition, any element comprises a plurality of sub-units in the shape of a quadrangular pyramid, and the sub-units can be regarded as formed by two one-dimensional blazed gratings which are crossed at a preset angle; due to the characteristic of the blazed grating, the light energy of the grating can be concentrated in the preset direction, so that the side leakage light in the light source transmission process can be reduced by adjusting the structure of the subunit, the energy utilization rate is improved, and the privacy is also improved.
In some embodiments, the wavelength of the incident light coupled into the super-surface optical waveguide ranges from 450nm to 650nm.
In some embodiments, the incident angle of the incident light rays coupled into the super-surface optical waveguide is between 40 DEG and 70 deg.
As shown in fig. 6, T1 is the image source light coupled out into the human eye, R1 is the leakage light on the outside, and R is the light continuing total reflection and is relatively uniform.
Please refer to fig. 7 to 9, fig. 7 is a schematic diagram illustrating a relationship between coupling-out efficiency and visible light wavelength of an exemplary simulated super-surface optical waveguide of the present invention, fig. 8 is a schematic diagram illustrating a relationship between coupling-out efficiency and an incident angle of an exemplary simulated super-surface optical waveguide of the present invention, and fig. 9 is a schematic diagram illustrating a relationship between a viewing angle and a refractive index of an exemplary simulated super-surface optical waveguide of the present invention.
As shown in FIG. 7, between 450nm and 650nm of visible light, T1 is much larger than R1, and even leakage light is an order of magnitude smaller than the image source light in the red and blue bands.
As shown in fig. 8, in the range of the angle of the incoupled light of 40 ° to 70 °, it is clearly seen that R1 is smaller and leakage light is reduced.
As shown in fig. 9, the super-surface optical waveguide of the present embodiment gradually increases the angle of view as the refractive index increases.
The invention also provides near-eye display equipment, which comprises a micro display and the super-surface optical waveguide; the microdisplay outputs incident light carrying image information. For details, reference may be made to the above embodiments.
The near-eye display device may include a head-mounted device, such as one of augmented reality glasses and an augmented reality helmet.
The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and near-eye display equipment, which relate to the technical field of light source transmission, wherein the two-dimensional coupling-out grating comprises a first element and a second element which are arranged at intervals and in an array manner, and the second element is determined after the first element is subjected to integral scaling; the first element is a parallelogram structure; any element comprises a plurality of sub-units in the shape of a quadrangular pyramid, and the sub-units are formed by two one-dimensional blazed gratings which are crossed at a preset angle. The two-dimensional coupling grating is composed of elements with parallelogram structures with different sizes, and each element comprises a subunit which is formed by crossing two one-dimensional blazed gratings and has a quadrangular cone shape; due to the structure of the quadrangular pyramid shape, the side light leakage in the light source transmission can be reduced, and the energy utilization rate is improved; the coupling efficiency can be adjusted through the size ratio of the two elements, the energy utilization rate is further improved, light leakage at the outer side can be reduced, the problem of image leakage is solved, and privacy and safety are protected; the bidirectional pupil expansion is realized, and the blank area of the lens is fully utilized; compared with the traditional diffraction light waveguide, the two-dimensional coupling grating has more parameters, is easier to regulate and control and improves the consistency; in addition, the two-dimensional diffraction grating, the super-surface optical waveguide and the near-eye display device are compatible with a semiconductor manufacturing process, and can realize batch production.
The above-described embodiments of the apparatus are merely illustrative, and the units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.

Claims (10)

1. A two-dimensional coupling-out grating is characterized by comprising a plurality of first elements and a plurality of second elements which are arranged at intervals and in an array manner, wherein the second elements are determined after the first elements are subjected to integral scaling; the first element is a parallelogram structure;
any element comprises a plurality of sub-units in the shape of quadrangular cones, and the sub-units are formed by two one-dimensional blazed gratings which are crossed at a preset angle.
2. A two-dimensional outcoupling grating according to claim 1, wherein said sub-units are protrusion structures or groove structures.
3. A two-dimensional outcoupling grating according to claim 1, wherein said two one-dimensional blazed gratings comprise a first blazed grating and a second blazed grating, wherein an angle between said first blazed grating and a vertical axis is a first angle, and an angle between said second blazed grating and said vertical axis is a second angle, and wherein the sum of the first angle and the second angle is zero.
4. A two-dimensional outcoupling grating according to claim 1,
any subunit comprises a vertex and four bottom points, wherein the four bottom points are positioned in the same plane, and the vertex is not positioned in the plane formed by the four bottom points.
5. A two-dimensional outcoupling grating according to claim 4,
the four bottom points comprise a first bottom point, a second bottom point, a third bottom point and a fourth bottom point, wherein the distance between the top point and each bottom point is equal;
the distance between the first bottom point and the second bottom point is equal to the distance between the third bottom point and the fourth bottom point; the distance between the second bottom point and the third bottom point and the distance between the fourth bottom point and the first bottom point are equal.
6. A two-dimensional outcoupling grating according to claim 5,
the distance between the first bottom point and the second bottom point and the distance between the second bottom point and the third bottom point are equal.
7. A two-dimensional outcoupling grating according to claim 3,
the first primitive comprises a first edge, a second edge, a third edge and a fourth edge which are sequentially connected, wherein the first edge, the third edge and the first blazed grating are parallel; the second edge, the fourth edge and the second blazed grating are parallel.
8. A two-dimensional outcoupling grating according to claim 1,
the material of the two-dimensional outcoupling grating comprises one of silicon oxide, silicon nitride, gallium nitride and titanium dioxide.
9. A super-surface optical waveguide, comprising: a waveguide substrate and a one-dimensional incoupling grating and a two-dimensional outcoupling grating as claimed in any of claims 1-8 arranged on a surface of said waveguide substrate;
the one-dimensional coupling grating is used for coupling incident light carrying image information into the waveguide substrate; the two-dimensional coupling grating is used for diffracting and expanding diffracted light which comes from the one-dimensional coupling grating and is conducted in the waveguide substrate in a total reflection mode along two directions so as to be coupled out to a human eye for imaging.
10. A near-eye display device comprising a microdisplay and the super-surface optical waveguide of claim 9; the microdisplay outputs an incident light carrying image information.
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CN116299815A (en) * 2023-05-22 2023-06-23 北京亮亮视野科技有限公司 Two-dimensional diamond grating, optical waveguide and near-eye display device for inhibiting high-order light

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