CN115452002A - Rate type vibration gyro scale factor compensation method, system, terminal and medium - Google Patents

Rate type vibration gyro scale factor compensation method, system, terminal and medium Download PDF

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CN115452002A
CN115452002A CN202211071576.8A CN202211071576A CN115452002A CN 115452002 A CN115452002 A CN 115452002A CN 202211071576 A CN202211071576 A CN 202211071576A CN 115452002 A CN115452002 A CN 115452002A
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王鹏
李青松
肖定邦
吴学忠
吴宇列
张勇猛
席翔
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National University of Defense Technology
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Abstract

The application relates to a method, a system, a terminal and a medium for compensating a scale factor of a rate type vibration gyro. The method comprises the following steps: taking the gyro working frequency signal and a plurality of high-order frequency signals of the working frequency as reference signals to demodulate, drive and output to obtain harmonic demodulation amplitude values of each order; selecting any two-order harmonic demodulation amplitude in each order of harmonic demodulation amplitude to obtain a first demodulation amplitude and a second demodulation amplitude, and respectively compensating nonlinear amplitudes in the first demodulation amplitude and the second demodulation amplitude by using the demodulation amplitude of the higher order than the first demodulation amplitude and the demodulation amplitude of the higher order than the second demodulation amplitude to obtain a first compensation amplitude and a second compensation amplitude; and obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, so as to regulate and control the actual vibration amplitude of the gyroscope and perform closed-loop self-compensation of the scale factor. By adopting the method, the variation of the vibration amplitude value of the gyroscope in the working process can be effectively inhibited, and the drift of the scale factor of the gyroscope is reduced.

Description

Rate type vibration gyro scale factor compensation method, system, terminal and medium
Technical Field
The present application relates to the field of vibration gyro technology, and in particular, to a method, a system, a terminal, and a medium for compensating a scale factor of a rate type vibration gyro.
Background
The gyroscope is a sensor for measuring the rotation motion of a carrier relative to an inertial space, is a core device in the fields of motion measurement, inertial navigation, guidance control and the like, and has very important application value in high-end industrial equipment and accurate percussion weapons such as aerospace, intelligent robots, guidance ammunition and the like. The traditional gyroscope comprises a mechanical rotor gyroscope, an electrostatic gyroscope, a hemispherical resonator gyroscope, a laser gyroscope, a fiber optic gyroscope, a dynamic tuning gyroscope and the like, and although the traditional gyroscope has high precision, the traditional gyroscope is difficult to meet the requirements in the aspects of volume, power consumption, price and the like. The Micro-Electro-Mechanical System (MEMS) gyroscope based on the MEMS technology has the characteristics of small volume, low power consumption, long service life, mass production, low price, and the like, and has inherent advantages in industrial and weaponry applications with large and small volumes, but compared with the conventional gyroscope, the precision of the current MEMS gyroscope is not high enough, so how to improve the precision of the MEMS gyroscope is an important problem to be overcome.
Drift in the scale factor is a significant source of rate MEMS vibratory gyroscope output error. The scale factor of the rate mode MEMS vibration gyro is directly related to the vibration frequency and the actual vibration amplitude, wherein the change of the vibration frequency can be acquired and eliminated in real time in a digital circuit, but the actual vibration amplitude can change along with the change of the circuit gain, and the change is difficult to observe in the constant amplitude control of the vibration, so that the improvement of the performance of the scale factor is limited. There is therefore a need to find an effective way to identify and compensate for scale factor drift caused by vibration amplitude variations in real time.
Disclosure of Invention
In view of the above, it is necessary to provide a method, a system, a terminal and a medium for compensating a scale factor of a rate type vibration gyro in view of the above technical problems.
A method of rate type vibratory gyroscope scale factor compensation, the method comprising:
respectively taking a vibration gyro working frequency signal and a plurality of high-order frequency signals of the working frequency as reference signals to demodulate the driving output of a driving mode to obtain each order of harmonic demodulation amplitude;
selecting any two-order harmonic demodulation amplitude in each order of harmonic demodulation amplitude to obtain a first demodulation amplitude and a second demodulation amplitude, and respectively compensating nonlinear amplitudes in the first demodulation amplitude and the second demodulation amplitude by using a demodulation amplitude of a higher order than the first demodulation amplitude and a demodulation amplitude of a higher order than the second demodulation amplitude to obtain a first compensation amplitude and a second compensation amplitude;
and obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, regulating and controlling the actual vibration amplitude of the vibration gyro according to the new driving amplitude control strategy, and carrying out closed-loop self-compensation on the scale factor.
In one embodiment, the method further comprises the following steps: obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the demodulation amplitude of the higher order than the first demodulation amplitude and the first demodulation amplitude, and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the demodulation amplitude of the higher order than the second demodulation amplitude and the second demodulation amplitude; and respectively compensating the nonlinear amplitude in the first demodulation amplitude and the second demodulation amplitude according to the first compensation coefficient and the second compensation coefficient to obtain a first compensation amplitude and a second compensation amplitude.
In one embodiment, the method further comprises the following steps: expressing the demodulation amplitude of any order of harmonic as a linear combination of demodulation amplitudes of higher orders than the demodulation amplitude of any order of harmonic, and obtaining the demodulation amplitude of any order of harmonic by the following expression:
Figure BDA0003830557460000021
wherein A is (2k+1)ω Amplitude of order 2k +1 demodulation, x 0 For the actual vibration amplitude, d is the electrode gap, A (2k+1+2i)ω The order of 2k +1+2i demodulation amplitude, α k,i To compensate for the coefficient, K D In order to be the gain of the circuit,
Figure BDA0003830557460000022
ε is the dielectric constant, S is the capacitance area; obtaining a compensation coefficient expression corresponding to the harmonic demodulation amplitude of any order according to the expression of the harmonic demodulation amplitude of any order, wherein the compensation coefficient expression is as follows:
Figure BDA0003830557460000023
wherein alpha is k,i Representing a compensation coefficient corresponding to the order of 2k +1 demodulation amplitude; obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of the order higher than the first demodulation amplitude and the first demodulation amplitude; and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of the higher order than the second demodulation amplitude and the second demodulation amplitude.
In one embodiment, the method further comprises the following steps: obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, wherein the new driving amplitude control strategy is as follows:
Figure BDA0003830557460000031
wherein,
Figure BDA0003830557460000032
for 2n after compensation 2 The +1 th order harmonic demodulation amplitude,
Figure BDA0003830557460000033
for 2n after compensation 1 +1 order harmonic solutionAmplitude of modulation, n 1 ,n 2 N, and N =0,1,2,3 1 ≠n 2 And κ is an amplitude setting coefficient.
In one embodiment, the method further comprises the following steps: regulating and controlling the actual vibration amplitude according to an amplitude setting coefficient in the new driving amplitude control strategy; the actual vibration amplitude is:
Figure BDA0003830557460000034
wherein x is 0 D is the electrode gap for the actual vibration amplitude; and when the amplitude setting coefficient is constant, realizing the self-correction of the actual vibration amplitude and the closed-loop self-compensation of the scale factor.
In one embodiment, the method further comprises the following steps: obtaining the actual vibration amplitude and the circuit gain of the vibration gyro according to the first compensation amplitude and the second compensation amplitude; and calculating the correction coefficient of the scale factor in real time according to the change proportion of the identified actual vibration amplitude value or the change proportion of the circuit gain, and compensating the output of the vibration gyro in real time by utilizing the correction coefficient so as to realize the open-loop real-time compensation of the scale factor of the vibration gyro system.
In one embodiment, the method further comprises the following steps: according to the first compensation amplitude and the second compensation amplitude, respectively obtaining the actual vibration amplitude of the vibration gyro as follows:
Figure BDA0003830557460000035
wherein x is 0 For the actual vibration amplitude, d is the capacitance initial gap,
Figure BDA0003830557460000036
is 2k 1 The compensation coefficient corresponding to the +1 order demodulation amplitude,
Figure BDA0003830557460000037
is composed of 2k1+1 The amplitude of the demodulation of the order harmonics,
Figure BDA0003830557460000038
to be compensated 2k1+1 Amplitude, k, of order harmonic demodulation 1 ,k 2 =1,2,3 1 ≠k 2 (ii) a According to the first-order compensation amplitude and the high-order harmonic amplitude after the random-order compensation, the circuit gain is obtained as follows:
Figure BDA0003830557460000041
wherein, K D In order to gain the gain of the circuit,
Figure BDA0003830557460000042
ε represents a dielectric constant, and S represents a capacitance area.
A rate type vibratory gyroscope scale factor compensation system, the system comprising:
the resonance submodule comprises a driving mode, a detection mode, an axis modulation electrode for inhibiting orthogonal errors and a frequency modulation electrode for frequency difference trimming;
the phase frequency and phase discrimination module is used for carrying out phase frequency and phase discrimination on the driving output of the driving mode, calculating to obtain an observation amplitude and a phase difference, wherein the observation amplitude is used for amplitude control, and the phase difference is used for frequency control of a phase-locked loop;
the demodulation module is used for demodulating the detection output of the detection mode and calculating to obtain an in-phase signal and an orthogonal signal, wherein the in-phase signal and the orthogonal signal are used for feedback control;
the detection control module is used for respectively processing the in-phase signal and the orthogonal signal to obtain a feedback force signal and an axis adjusting voltage, wherein the feedback force signal is used for balancing the Coriolis force of the detection mode, and the axis adjusting voltage is used for inhibiting an orthogonal error;
the harmonic demodulation module is used for demodulating and settling the drive output of the drive mode to obtain harmonic demodulation amplitudes of each order, and the harmonic demodulation amplitudes of each order are used for compensating scale factors;
and the demodulation amplitude compensation module is used for compensating the first demodulation amplitude and the second demodulation amplitude and outputting the first compensation amplitude and the second compensation amplitude.
A terminal device comprising a memory storing a computer program and a processor implementing the following steps when executing the computer program:
respectively taking a vibration gyro working frequency signal and a plurality of high-order frequency signals of the working frequency as reference signals to demodulate the driving output of a driving mode to obtain each order of harmonic demodulation amplitude;
selecting any two-order harmonic demodulation amplitude in the harmonic demodulation amplitudes of each order to obtain a first demodulation amplitude and a second demodulation amplitude, and respectively compensating nonlinear amplitudes in the first demodulation amplitude and the second demodulation amplitude by using a demodulation amplitude of a higher order than the first demodulation amplitude and a demodulation amplitude of a higher order than the second demodulation amplitude to obtain a first compensation amplitude and a second compensation amplitude;
and obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, regulating and controlling the actual vibration amplitude of the vibration gyro according to the new driving amplitude control strategy, and carrying out closed-loop self-compensation on the scale factor.
A terminal readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of:
respectively taking a vibration gyro working frequency signal and a plurality of high-order frequency signals of the working frequency as reference signals to demodulate the driving output of a driving mode to obtain each order of harmonic demodulation amplitude;
selecting any two-order harmonic demodulation amplitude in the harmonic demodulation amplitudes of each order to obtain a first demodulation amplitude and a second demodulation amplitude, and respectively compensating nonlinear amplitudes in the first demodulation amplitude and the second demodulation amplitude by using a demodulation amplitude of a higher order than the first demodulation amplitude and a demodulation amplitude of a higher order than the second demodulation amplitude to obtain a first compensation amplitude and a second compensation amplitude;
and obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, regulating and controlling the actual vibration amplitude of the vibration gyroscope according to the new driving amplitude control strategy, and performing closed-loop self-compensation of a scale factor.
According to the method, the system, the terminal and the medium for compensating the scale factor of the rate type vibration gyroscope, the change of the vibration amplitude of the gyroscope is tracked in real time by the harmonic amplitude of each order obtained through harmonic separation, the correction of the vibration amplitude is realized, specifically, the nonlinear amplitude in the first demodulation amplitude and the nonlinear amplitude in the second demodulation amplitude are respectively compensated by the demodulation amplitude of the higher order of the harmonic amplitude of each order than the first demodulation amplitude and the demodulation amplitude of the higher order than the second demodulation amplitude to obtain the first compensation amplitude and the second compensation amplitude, then, a new driving amplitude control strategy is obtained according to the first compensation amplitude and the second compensation amplitude, the actual vibration amplitude of the vibration gyroscope is regulated and controlled according to the new driving amplitude control strategy, and the closed-loop self-compensation of the scale factor is carried out. The embodiment of the invention effectively inhibits the change of the vibration amplitude value of the vibrating gyroscope in the working process and reduces the drift of the scale factor of the gyroscope.
Drawings
FIG. 1 is a schematic flow chart of a method for compensating a scale factor of a rate type vibratory gyroscope according to one embodiment;
FIG. 2 is a diagram illustrating the variation of normalized capacitance variation under the nonlinear effect in one embodiment;
FIG. 3 is a graphical illustration of a comparison of a normalized observed amplitude and a normalized third harmonic demodulated amplitude in one embodiment;
FIG. 4 is a block diagram of an embodiment of an architecture for implementing open loop real time compensation of a vibratory gyroscope system scale factor;
FIG. 5 is a block diagram of a demodulation amplitude compensation module in one embodiment;
FIG. 6 is a block diagram of a closed loop self-compensation for implementing a vibratory gyroscope system scale factor in another embodiment;
fig. 7 is an internal configuration diagram of a terminal device in one embodiment.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The invention utilizes the nonlinear effect of capacitance detection, tracks the change of the circuit gain in real time through the demodulation result of the high-order harmonic wave, realizes the identification of the change of the circuit gain, and can realize the correction of the scale factor according to the identification result. In addition, the high-order harmonic demodulation result is used for replacing the traditional fixed amplitude set value, so that the influence of circuit gain change on the actual vibration amplitude can be eliminated, and the self-correction of the scale factor is realized.
The rate MEMS vibration gyro usually works in a force balance mode, a driving mode in the mode is excited in a resonance state, the vibration amplitude of the rate MEMS vibration gyro is controlled by constant amplitude, a detection shaft generates orthogonal and in-phase signals, the orthogonal signals can be inhibited by shaft adjusting voltage or orthogonal force, the in-phase signals are related to Cogowski force, the rate MEMS vibration gyro is balanced by feedback force signals, the amplitude of the feedback force signals is output by the gyro, the value of the feedback force signals is in direct proportion to angular velocity, and the proportionality coefficient is a system scale factor.
The scaling factor formula for the force balance mode is:
SF=2A g x 0 ω 0
where SF is the scale factor, A g Is an angular gain coefficient, which is a constant value, x, related to the structure 0 For the actual vibration amplitude, ω 0 Is the operating angular frequency of the gyroscope. It is clear that the drift of the scale factor is directly related to the actual vibration amplitude and the variation of the operating frequency. For digital circuits, the gyro vibration frequency can be obtained in real time, so that the reference frequency omega is taken ref Then the scaling factor to eliminate the frequency effect can be expressed as:
Figure BDA0003830557460000071
where SF' is a scale factor that eliminates the frequency effects, where the drift of the scale factor is primarily affected by the actual vibration amplitude. Although the vibration of the driving shaft of the gyroscope is in a constant amplitude control mode, the actual vibration amplitude changes due to the fact that the gain of a circuit can be influenced by the environment, and finally the error of a scale factor is caused.
In one embodiment, as shown in FIG. 1, there is provided a method for rate type vibratory gyroscope scale factor compensation comprising the steps of:
and 102, respectively taking the working frequency signal of the vibration gyro and a plurality of high-order frequency signals of the working frequency as reference signals to demodulate the driving output of the driving mode to obtain the harmonic demodulation amplitude of each order.
Harmonics generally refer to components of orders greater than an integral multiple of the frequency of a fundamental wave obtained by fourier series decomposition of a periodic non-sinusoidal alternating current component, and are generally referred to as higher harmonics, while the fundamental wave refers to components having the same frequency as the operating frequency. The root cause of harmonic generation in power systems is due to nonlinear loads. When current flows through a load, the current is not in a linear relation with the applied voltage, and non-sinusoidal current is formed, namely, harmonic waves are generated in the circuit.
In order to improve the detection sensitivity and eliminate asymmetric errors, a capacitive MEMS vibration gyro usually adopts a differential capacitor for detection, and due to vibration of the gyro structure, a capacitance gap dynamically changes along with the vibration, and the change finally causes the detection capacitor to generate nonlinearity. Fig. 2 is a schematic diagram of a variation rule of the normalized capacitance variation under the nonlinear effect, which shows a relationship between the normalized capacitance variation and the vibration amplitude, and as can be seen from fig. 2, under the condition that the capacitance gap is not changed, the larger the vibration amplitude is, the more the nonlinearity is, the more the signal distortion is, and under the differential capacitance detection, the capacitance variation Δ C can be expressed as:
Figure BDA0003830557460000072
wherein epsilon is the dielectric constant, S is the capacitance area, d is the initial clearance of the capacitance, x is the actual vibration displacement of the gyro, the gyro works under the resonance state, therefore the vibration displacement is the periodic variation of the sine form, the actual vibration displacement signal is:
x=x 0 sinω 0 t
wherein x is 0 T is the time for the actual vibration amplitude. After the vibration of the gyroscope is converted into the capacitance variation, the capacitance variation is finally demodulated through a charge amplifier, a filter and other circuit modules to obtain an observation amplitude, wherein the observation amplitude is a first-order harmonic demodulation amplitude, and the amplitude is used for constant amplitude control. Thus, the demodulated signal V x Can be expressed as:
V x =ΔC·K D
wherein, K D The equivalent gain of the circuit is expressed, and the observation amplitude A can be obtained according to the formula ω Comprises the following steps:
Figure BDA0003830557460000081
Figure BDA0003830557460000082
Figure BDA0003830557460000083
then
A ω =K xc K D x 0
Wherein δ is a nonlinear amplitude, and in the conventional drive loop control, the control strategy is to control the observed amplitude in the above formula to a set value, that is:
A ω -A ref =0
wherein, A ref For the amplitude setting, the expression from which the actual vibration amplitude can be derived is:
Figure BDA0003830557460000084
considering only the effect of the circuit gain on the vibration amplitude in the circuit, the drift of the scale factor is:
Figure BDA0003830557460000085
as can be seen from the above equation, eliminating the drift in the actual vibration amplitude requires compensating for variations in the circuit gain and nonlinear amplitude.
And 104, selecting any two-order harmonic demodulation amplitude in each order of harmonic demodulation amplitude to obtain a first demodulation amplitude and a second demodulation amplitude, and compensating nonlinear amplitudes in the first demodulation amplitude and the second demodulation amplitude by using the demodulation amplitude of the order higher than the first demodulation amplitude and the demodulation amplitude of the order higher than the second demodulation amplitude respectively to obtain a first compensation amplitude and a second compensation amplitude.
By analyzing the relationship between the actual vibration amplitude and the circuit gain, the method obtains that the drift of the scale factor is eliminated and the circuit gain and the nonlinear amplitude are required to be compensated. In the embodiment of the present invention, the first demodulation amplitude and the second demodulation amplitude are the observation amplitude and the harmonic demodulation amplitude of any order except the observation amplitude, respectively, and correspondingly, the first compensation amplitude and the second compensation amplitude are the first order compensation amplitude and the K (K =3,5,7,.. Multidot.,. 2n. + 1) order compensation amplitude, respectively.
And 106, obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, regulating and controlling the actual vibration amplitude of the vibration gyroscope according to the new driving amplitude control strategy, and performing closed-loop self-compensation of the scale factor.
In the method for compensating the scale factor of the rate type vibration gyroscope, each order of harmonic amplitude obtained by harmonic separation tracks the change of the vibration amplitude of the gyroscope in real time to realize the correction of the vibration amplitude, specifically, nonlinear amplitudes in a first demodulation amplitude and a second demodulation amplitude are respectively compensated by using a demodulation amplitude of a higher order than the first demodulation amplitude and a demodulation amplitude of a higher order than the second demodulation amplitude in each order of harmonic amplitude to obtain a first compensation amplitude and a second compensation amplitude, then, a new driving amplitude control strategy is obtained according to the first compensation amplitude and the second compensation amplitude, the actual vibration amplitude of the vibration gyroscope is regulated and controlled according to the new driving amplitude control strategy, and the closed-loop self-compensation of the scale factor is carried out. The embodiment of the invention effectively inhibits the change of the vibration amplitude value of the vibrating gyroscope in the working process and reduces the drift of the scale factor of the gyroscope.
For higher sensitivity and better signal-to-noise ratio, it is generally desirable that the gyro vibration be as large in amplitude as possible, but as the amplitude increases, the nonlinear effects increase significantly. From the demodulated signal V x The expression (c) indicates that the actual demodulated signal contains higher harmonic components of the operating frequency, and the higher the order, the smaller the component size. Using frequency of (2k + 1) omega 0 Sine demodulation of V x Then, the harmonic demodulation result of order 2k +1 can be obtained:
Figure BDA0003830557460000091
wherein k =0,1,2,3. In practical tests, the higher harmonic components that can be detected are generally limited due to hardware limitations. Therefore, when the highest harmonic order considered is 2N +1, ignoring the higher order components, the expression for the harmonic demodulation result of order 2k +1 becomes:
Figure BDA0003830557460000092
as can be seen from the above formula, the demodulation result for any order harmonic can be expressed as a linear combination of the demodulation results for higher order harmonics, that is, the demodulation result can be expressed as a linear combination
Figure BDA0003830557460000101
Wherein alpha is k,i Represents the ith linear combination coefficient of the demodulation result of order 2k + 1. Obviously, there are N-k linear combination coefficients to be identified for the demodulation result of order 2k + 1.
In one embodiment, the compensating the nonlinear amplitude in the first demodulation amplitude and the second demodulation amplitude by using a demodulation amplitude of a higher order than the first demodulation amplitude and a demodulation amplitude of a higher order than the second demodulation amplitude respectively to obtain a first compensated amplitude and a second compensated amplitude, includes: obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the demodulation amplitude of the higher order than the first demodulation amplitude and the first demodulation amplitude, and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the demodulation amplitude of the higher order than the second demodulation amplitude and the second demodulation amplitude; and respectively compensating the nonlinear amplitude in the first demodulation amplitude and the second demodulation amplitude according to the first compensation coefficient and the second compensation coefficient to obtain a first compensation amplitude and a second compensation amplitude. In this embodiment, the compensation coefficient, i.e. the linear combination coefficient, is compared with the expressions of the two 2k +1 order harmonic demodulation results to obtain the calculation expression of the linear combination coefficient, and the nonlinear amplitude in each order of harmonic demodulation amplitude can be compensated by calculating the compensation coefficient.
In one embodiment, the step of obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the demodulation amplitude of the higher order than the first demodulation amplitude and the first demodulation amplitude, and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the demodulation amplitude of the higher order than the second demodulation amplitude and the second demodulation amplitude includes: expressing the demodulation amplitude of any order of harmonic as a linear combination of demodulation amplitudes of higher orders than the demodulation amplitude of any order of harmonic, and obtaining the demodulation amplitude of any order of harmonic by the expression:
Figure BDA0003830557460000102
wherein A is (2k+1)ω Amplitude of order 2k +1 demodulation, x 0 Is a reality ofAmplitude of vibration, d is the electrode gap, A (2k+1+2i)ω The order of 2k +1+2i demodulation amplitude, α k,i To compensate for the coefficient, K D In order to be the gain of the circuit,
Figure BDA0003830557460000103
ε is the dielectric constant, S is the capacitance area; obtaining a compensation coefficient expression corresponding to the harmonic demodulation amplitude of any order according to the expression of the harmonic demodulation amplitude of any order, wherein the compensation coefficient expression is as follows:
Figure BDA0003830557460000111
wherein alpha is k,i Representing a compensation coefficient corresponding to the order of 2k +1 demodulation amplitude; obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of the higher order than the first demodulation amplitude and the first demodulation amplitude; and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of the order higher than the second demodulation amplitude and the second demodulation amplitude.
In this embodiment, when k is 0, the compensation coefficient corresponding to the first-order harmonic demodulation amplitude is α 0,i = - (2i + 1), i =1,2,3.. N, the compensation expression for the nonlinear amplitude in the observed amplitude can be obtained by compensating the nonlinear amplitude in the observed amplitude according to the compensation coefficient corresponding to the first-order harmonic demodulation amplitude:
Figure BDA0003830557460000112
where δ is the nonlinear amplitude in the observed amplitudes, A (2i+1)ω Amplitude of harmonic demodulation of order 2i + 1; according to the compensation expression of the nonlinear amplitude in the observation amplitude, the observation amplitude is compensated, and the first-order compensation amplitude is obtained as follows:
Figure BDA0003830557460000113
wherein A is ω_comp To compensate amplitude to first order, A ω To observe the amplitude, A ω =K xc K D x 0 +δ,K D Delta is the nonlinear amplitude for the circuit equivalent gain,
Figure BDA0003830557460000114
ε is the dielectric constant, S is the capacitance area,
Figure BDA0003830557460000115
similarly, the nonlinear amplitude in any order harmonic demodulation result can be compensated by the compensation coefficient, and the compensated harmonic demodulation result of each order can be expressed as:
Figure BDA0003830557460000116
since for any 2n 1 +1 order and 2n 2 The +1 order harmonic demodulation results, there are:
Figure BDA0003830557460000117
or as:
Figure BDA0003830557460000121
wherein n is 1 ,n 2 =0,1,2,3 … … N, and N 1 ≠n 2 Taking the amplitude setting coefficient k such that
Figure BDA0003830557460000122
A new drive amplitude control strategy can be derived.
In one embodiment, obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, regulating and controlling the actual vibration amplitude of the vibratory gyroscope according to the new driving amplitude control strategy, and performing closed-loop self-compensation of the scale factor includes: obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude as follows:
Figure BDA0003830557460000123
wherein,
Figure BDA0003830557460000124
for 2n after compensation 2 The +1 th order harmonic demodulation amplitude,
Figure BDA0003830557460000125
for 2n after compensation 1 +1 harmonic demodulation amplitude, n 1 ,n 2 N, and N =0,1,2,3 1 ≠n 2 Kappa is an amplitude setting coefficient; regulating and controlling the actual vibration amplitude according to an amplitude setting coefficient in a new driving amplitude control strategy; the actual vibration amplitude is:
Figure BDA0003830557460000126
wherein x is 0 D is the electrode gap for the actual vibration amplitude; when the amplitude setting coefficient is constant, the self-correction of the actual vibration amplitude and the closed-loop self-compensation of the scale factor are realized.
In this embodiment, the self-compensation is realized by changing the original amplitude control strategy, using the first compensation amplitude and the second compensation amplitude to replace the observed amplitude and the fixed amplitude set value, respectively, and setting the ratio of the two compensation amplitudes. Comparing the new driving amplitude control strategy with the traditional control strategy, the new driving amplitude control strategy realizes the regulation and control of the actual vibration amplitude by adjusting the proportional relation between the two compensated harmonic demodulation amplitudes. In this way, the compensated scale factors are:
Figure BDA0003830557460000127
obviously, under a new control strategy, the actual vibration amplitude and the scale factor are no longer related to the circuit gain and the nonlinear amplitude, and are only determined by the gyro electrode gap and the amplitude setting coefficient, so that the factors influencing the actual vibration amplitude are greatly reduced, and the stability of the vibration amplitude and the scale factor is improved.
Besides realizing closed-loop self-compensation of the scale factor, the method can further realize open-loop real-time correction of the scale factor.
In one embodiment, the method further comprises: obtaining the actual vibration amplitude and the circuit gain of the vibration gyro according to the first compensation amplitude and the second compensation amplitude; and calculating the correction coefficient of the scale factor in real time according to the change proportion of the identified actual vibration amplitude or the change proportion of the circuit gain, and compensating the output of the vibration gyro in real time by using the correction coefficient so as to realize the open-loop real-time compensation of the scale factor of the vibration gyro system.
In this embodiment, the vibration amplitude is calculated using the two demodulated amplitudes after compensation, and the scale factor is compensated by the proportion of the amplitude change.
In one embodiment, the obtaining the actual vibration amplitude and the circuit gain of the vibration gyro according to the first compensation amplitude and the second compensation amplitude respectively comprises: according to the first compensation amplitude and the second compensation amplitude, respectively obtaining the actual vibration amplitude of the vibration gyro as follows:
Figure BDA0003830557460000131
wherein x is 0 For the actual vibration amplitude, d is the capacitance initial gap,
Figure BDA0003830557460000132
is 2k 1 The compensation coefficient corresponding to the +1 order demodulation amplitude,
Figure BDA0003830557460000133
is composed of 2k1+1 The amplitude of the demodulation of the order harmonics,
Figure BDA0003830557460000134
to be compensated 2k1+1 Amplitude, k, of order harmonic demodulation 1 ,k 2 =1,2,3 1 ≠k 2 (ii) a According to the first-order compensation amplitude and the high-order harmonic amplitude after any-order compensation, the circuit gain is obtained as follows:
Figure BDA0003830557460000135
wherein, K D In order to be the gain of the circuit,
Figure BDA0003830557460000136
ε represents a dielectric constant, and S represents a capacitance area.
In the embodiment, two expressions of the actual vibration amplitude are compared to know that the actual vibration amplitude which is difficult to observe originally drifts can be identified in real time through the observed amplitude and the higher harmonic demodulation amplitude, and the circuit gain which is difficult to observe changes can be monitored in real time. The beneficial effects of the invention are specifically explained by taking the observation amplitude and the third-order harmonic demodulation amplitude as examples, when k is 1, the third-order compensation amplitude can be obtained:
Figure BDA0003830557460000141
as shown in fig. 3, the comparison diagram of the normalized observed amplitude and the normalized third-order harmonic demodulation amplitude shows that there is a better proportional relationship between the nonlinear change of the observed amplitude and the third-order harmonic demodulation amplitude, and comparing the first-order compensation amplitude and the third-order compensation amplitude, it can be seen that the circuit gain can be eliminated by comparing the first-order compensation amplitude and the third-order compensation amplitude, that is:
Figure BDA0003830557460000142
in a specific embodiment, as shown in fig. 4, a structural block diagram for implementing open-loop real-time compensation of a scale factor of a vibration gyro system is provided, in fig. 4, DRG (Disk Resonator Gyroscope) represents a gyro, an amplitude and phase discrimination module 6 processes an output of a driving mode 2 of the gyro 1 by using a reference signal 8 from a phase-locked loop 11 to obtain an observed amplitude 9 and a phase 10, where the phase 10 is used for frequency-locked control of the phase-locked loop 11 to ensure that the driving mode 2 operates at a resonant frequency, and the observed amplitude 9 is compared with an amplitude set value 12 to obtain a required driving force signal through a controller 26, and is modulated by a multiplier 14 to generate a driving excitation signal and applied to a driving shaft. The detection mode 3 obtains an in-phase signal and an orthogonal signal through the demodulation module 15, the two signals are processed by the detection control unit 17 to obtain a force feedback signal 18 and a tuning axis voltage 19, the force feedback signal is applied to the detection axis for balancing the coriolis force, and the tuning axis voltage is applied to the tuning axis electrode 4 for suppressing the orthogonal error. The driving output 7 can obtain each order of harmonic demodulation amplitude 23 through the harmonic demodulation module, the amplitude is used as the input of the harmonic amplitude compensation module, and the first order compensation amplitudes 27 and K (K =3,5,7,.. 2n.. 1) order compensation amplitude 28 can be output through the calculation of the harmonic amplitude compensation module. The two compensation amplitudes are used to obtain a correction coefficient after being subjected to division, squaring operation and normalization processing, and the gyroscope output with the scale factor error eliminated is finally calculated in the output correction module 25 through the correction coefficient and the amplitude of the force balance signal 18. As shown in the structural block diagram of the demodulation amplitude compensation module shown in fig. 5, the compensation of the first-order harmonic amplitude utilizes the demodulation results of the 3 rd order and the 5 th order up to 2n +1 th order harmonics, and the compensation of the same K (K =3,5,7,.. 2n + 1) order harmonic amplitude utilizes the demodulation result of the higher-order harmonics. The demodulation amplitude compensation module can output the compensation result of any order of harmonic amplitude.
In another embodiment, as shown in fig. 6, a structural block diagram for realizing closed-loop self-compensation of scale factor of a vibration gyro system is provided, and under a new control strategy, the main body frame in fig. 6 is similar to that in fig. 4 and is not described in detail herein, except for the control mode of driving amplitude. In the new control system, the original amplitude set value 12 and the observation amplitude 9 are compensated to be 2n 1 +1 order and 2n 2 The +1 order harmonic demodulation result is replaced, when the gain of the system circuit changes, two harmonicsThe wave demodulation results are changed along with the change of the wave demodulation results, but the ratio of the wave demodulation results is unchanged, so that the actual vibration amplitude is fixed and unchanged, and finally the self-compensation of the scale factor is realized.
It should be understood that, although the steps in the flowchart of fig. 1 are shown in order as indicated by the arrows, the steps are not necessarily performed in order as indicated by the arrows. The steps are not performed in the exact order shown and described, and may be performed in other orders, unless explicitly stated otherwise. Moreover, at least a portion of the steps in fig. 1 may include multiple sub-steps or multiple stages that are not necessarily performed at the same time, but may be performed at different times, and the order of performance of the sub-steps or stages is not necessarily sequential, but may be performed in turn or alternately with other steps or at least a portion of the sub-steps or stages of other steps.
In one embodiment, as shown in FIG. 4, there is provided a block diagram of a rate type vibratory gyroscope scale factor compensation system applied to an open loop real-time compensation rate type vibratory gyroscope scale factor compensation system, comprising: resonance submodule piece, amplitude and phase discrimination module, demodulation module, detection control module, harmonic demodulation module and demodulation amplitude compensation module, wherein:
the resonance submodule comprises a driving mode, a detection mode, an axis modulation electrode for inhibiting orthogonal errors and a frequency modulation electrode for frequency difference trimming;
the phase frequency and phase discrimination module is used for carrying out phase frequency and phase discrimination on the driving output of the driving mode, calculating to obtain an observation amplitude and a phase difference, wherein the observation amplitude is used for amplitude control, and the phase difference is used for frequency control of the phase-locked loop;
the demodulation module is used for carrying out signal demodulation processing on the detection output of the detection mode and calculating to obtain an in-phase signal and an orthogonal signal, and the in-phase signal and the orthogonal signal are used for feedback control;
the detection control module is used for respectively processing the in-phase signal and the quadrature signal to obtain a feedback force signal and an axis adjusting voltage, the feedback force signal is used for balancing the Coriolis force of a detection mode, and the axis adjusting voltage is used for inhibiting a quadrature error;
the harmonic demodulation module is used for demodulating and settling the drive output of the drive mode to obtain harmonic demodulation amplitudes of each order, and the harmonic demodulation amplitudes of each order are used for compensating the scale factors;
and the demodulation amplitude compensation module is used for compensating the first demodulation amplitude and the second demodulation amplitude and outputting a first compensation amplitude and a second compensation amplitude.
In one embodiment, the system further comprises an output correction module for performing open loop real time compensation of the scaling factor based on the first compensated amplitude and the second compensated amplitude.
In one embodiment, the apparatus is further configured to obtain a first compensation coefficient corresponding to the first demodulation amplitude according to the first demodulation amplitude and the demodulation amplitude of the higher order than the first demodulation amplitude, and obtain a second compensation coefficient corresponding to the second demodulation amplitude according to the second demodulation amplitude and the demodulation amplitude of the higher order than the second demodulation amplitude; and respectively compensating the nonlinear amplitude in the first demodulation amplitude and the second demodulation amplitude according to the first compensation coefficient and the second compensation coefficient to obtain a first compensation amplitude and a second compensation amplitude.
In one embodiment, the method is further configured to express the demodulation amplitude of the arbitrary order harmonic as a linear combination of demodulation amplitudes of higher orders than the demodulation amplitude of the arbitrary order harmonic, and the expression of the demodulation amplitude of the arbitrary order harmonic is obtained as follows:
Figure BDA0003830557460000161
wherein, A (2k+1)ω Amplitude of order 2k +1 demodulation, x 0 For the actual vibration amplitude, d is the electrode gap, A (2k+1+2i)ω The order of 2k +1+2i demodulation amplitude, α k,i To compensate for the coefficient, K D In order to be the gain of the circuit,
Figure BDA0003830557460000162
ε is the dielectric constant, S is the capacitance area; obtaining any harmonic demodulation amplitude expression according to any orderThe compensation coefficient expression corresponding to the order harmonic demodulation amplitude is as follows:
Figure BDA0003830557460000163
wherein alpha is k,i Representing a compensation coefficient corresponding to the order of 2k +1 demodulation amplitude; obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of the higher order than the first demodulation amplitude and the first demodulation amplitude; and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of the order higher than the second demodulation amplitude and the second demodulation amplitude.
In one embodiment, the method further comprises obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude as follows:
Figure BDA0003830557460000164
wherein,
Figure BDA0003830557460000165
for 2n after compensation 2 The +1 th order harmonic demodulation amplitude,
Figure BDA0003830557460000166
for 2n after compensation 1 +1 harmonic demodulation amplitude, n 1 ,n 2 N, and N =0,1,2,3 1 ≠n 2 And κ is an amplitude setting coefficient.
In one embodiment, the method is further used for regulating and controlling the actual vibration amplitude according to an amplitude setting coefficient in the new driving amplitude control strategy; the actual vibration amplitude is:
Figure BDA0003830557460000171
wherein x is 0 D is the electrode gap for the actual vibration amplitude; when the amplitude setting coefficient is constantAnd realizing the self-correction of the actual vibration amplitude and the closed-loop self-compensation of the scale factor.
In one embodiment, the method is further used for obtaining the actual vibration amplitude and the circuit gain of the vibration gyro according to the first compensation amplitude and the second compensation amplitude; and calculating the correction coefficient of the scale factor in real time according to the change proportion of the identified actual vibration amplitude or the change proportion of the circuit gain, and compensating the gyroscope output in real time by using the correction coefficient so as to realize the open-loop real-time compensation of the gyroscope system scale factor.
In one embodiment, the method is further configured to obtain the actual vibration amplitude of the vibration gyro according to the first compensation amplitude and the second compensation amplitude, respectively, as follows:
Figure BDA0003830557460000172
wherein x is 0 For the actual vibration amplitude, d is the initial gap of the capacitor, α k1,i Is 2k 1 The compensation coefficient corresponding to the +1 order demodulation amplitude,
Figure BDA0003830557460000173
is composed of 2k1+1 The amplitude of the demodulation of the order harmonics,
Figure BDA0003830557460000174
to be compensated 2k1+1 Amplitude, k, of order harmonic demodulation 1 ,k 2 =1,2,3 1 ≠k 2 (ii) a According to the first-order compensation amplitude and the high-order harmonic amplitude after any-order compensation, the circuit gain is obtained as follows:
Figure BDA0003830557460000175
wherein, K D In order to be the gain of the circuit,
Figure BDA0003830557460000176
ε represents a dielectric constant, and S represents a capacitance area.
For specific limitations of the rate type vibration gyro scale factor compensation system, reference may be made to the above limitations of the rate type vibration gyro scale factor compensation method, which are not described herein again. The various modules in the rate type vibratory gyroscope scale factor compensation system described above may be implemented in whole or in part by software, hardware, and combinations thereof. The modules can be embedded in a hardware form or independent of a processor in the terminal device, and can also be stored in a memory in the terminal device in a software form, so that the processor can call and execute operations corresponding to the modules.
In one embodiment, a terminal device is provided, which may be a terminal, and the internal structure thereof may be as shown in fig. 7. The terminal equipment comprises a processor, a memory, a network interface, a display screen and an input system which are connected through a system bus. Wherein the processor of the terminal device is configured to provide computing and control capabilities. The memory of the terminal equipment comprises a nonvolatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of an operating system and computer programs in the non-volatile storage medium. The network interface of the terminal device is used for connecting and communicating with an external terminal through a network. The computer program is executed by a processor to implement a rate type vibratory gyroscope scale factor compensation method. The display screen of the terminal equipment can be a liquid crystal display screen or an electronic ink display screen, and the input system of the terminal equipment can be a touch layer covered on the display screen, a key, a track ball or a touch pad arranged on a shell of the terminal equipment, an external keyboard, a touch pad or a mouse and the like.
Those skilled in the art will appreciate that the structure shown in fig. 7 is a block diagram of only a portion of the structure relevant to the present disclosure, and does not constitute a limitation on the terminal device to which the present disclosure applies, and that a particular terminal device may include more or less components than those shown in the drawings, or combine certain components, or have a different arrangement of components.
In an embodiment, a terminal device is provided, comprising a memory storing a computer program and a processor implementing the steps of the method in the above embodiments when the processor executes the computer program.
In an embodiment, a terminal-readable storage medium is provided, on which a computer program is stored, which computer program, when being executed by a processor, carries out the steps of the method in the above-mentioned embodiments.
It will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by hardware instructions of a computer program, which can be stored in a non-volatile computer-readable storage medium, and when executed, can include the processes of the embodiments of the methods described above. Any reference to memory, storage, database or other medium used in the embodiments provided herein can include non-volatile and/or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically Programmable ROM (EPROM), electrically Erasable Programmable ROM (EEPROM), or flash memory. Volatile memory can include Random Access Memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in a variety of forms such as Static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double Data Rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous Link DRAM (SLDRAM), rambus (Rambus) direct RAM (RDRAM), direct Rambus Dynamic RAM (DRDRAM), and Rambus Dynamic RAM (RDRAM), among others.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is specific and detailed, but not to be understood as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent application shall be subject to the appended claims.

Claims (10)

1. A method of rate type vibratory gyroscope scale factor compensation, the method comprising:
respectively taking a vibration gyro working frequency signal and a plurality of high-order frequency signals of the working frequency as reference signals to demodulate the driving output of a driving mode to obtain each order of harmonic demodulation amplitude;
selecting any two-order harmonic demodulation amplitude in the harmonic demodulation amplitudes of each order to obtain a first demodulation amplitude and a second demodulation amplitude, and respectively compensating nonlinear amplitudes in the first demodulation amplitude and the second demodulation amplitude by using a demodulation amplitude of a higher order than the first demodulation amplitude and a demodulation amplitude of a higher order than the second demodulation amplitude to obtain a first compensation amplitude and a second compensation amplitude;
and obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, regulating and controlling the actual vibration amplitude of the vibration gyro according to the new driving amplitude control strategy, and carrying out closed-loop self-compensation on the scale factor.
2. The method of claim 1, wherein the compensating for the non-linear amplitude of the first demodulation amplitude and the second demodulation amplitude with the demodulation amplitude of the higher order than the first demodulation amplitude and the demodulation amplitude of the higher order than the second demodulation amplitude, respectively, to obtain a first compensated amplitude and a second compensated amplitude comprises:
obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the demodulation amplitude of the higher order than the first demodulation amplitude and the first demodulation amplitude, and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the demodulation amplitude of the higher order than the second demodulation amplitude and the second demodulation amplitude;
and respectively compensating the nonlinear amplitude in the first demodulation amplitude and the second demodulation amplitude according to the first compensation coefficient and the second compensation coefficient to obtain a first compensation amplitude and a second compensation amplitude.
3. The method according to claim 2, wherein the step of obtaining a first compensation factor corresponding to the first demodulation amplitude according to the demodulation amplitude of the higher order than the first demodulation amplitude and the first demodulation amplitude, and obtaining a second compensation factor corresponding to the second demodulation amplitude according to the demodulation amplitude of the higher order than the second demodulation amplitude and the second demodulation amplitude comprises:
expressing the demodulation amplitude of any order of harmonic as a linear combination of demodulation amplitudes of higher orders than the demodulation amplitude of any order of harmonic, and obtaining the demodulation amplitude of any order of harmonic by the following expression:
Figure FDA0003830557450000011
wherein A is (2k+1)ω Amplitude of order 2k +1 demodulation, x 0 For the actual vibration amplitude, d is the electrode gap, A (2k+1+2i)ω The order of 2k +1+2i demodulation amplitude, α k,i To compensate for the coefficient, K D In order to be the gain of the circuit,
Figure FDA0003830557450000021
ε is the dielectric constant, S is the capacitance area;
obtaining a compensation coefficient expression corresponding to the harmonic demodulation amplitude of any order according to the expression of the harmonic demodulation amplitude of any order, wherein the compensation coefficient expression is as follows:
Figure FDA0003830557450000022
wherein alpha is k,i Representing a compensation coefficient corresponding to the order of 2k +1 demodulation amplitude;
obtaining a first compensation coefficient corresponding to the first demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of a higher order than the first demodulation amplitude and the first demodulation amplitude;
and obtaining a second compensation coefficient corresponding to the second demodulation amplitude according to the compensation coefficient expression, the demodulation amplitude of the order higher than the second demodulation amplitude and the second demodulation amplitude.
4. The method of claim 1, wherein deriving a new drive amplitude control strategy based on the first compensated amplitude and the second compensated amplitude comprises:
obtaining a new driving amplitude control strategy according to the first compensation amplitude and the second compensation amplitude, wherein the new driving amplitude control strategy is as follows:
Figure FDA0003830557450000023
wherein,
Figure FDA0003830557450000024
for 2n after compensation 2 The +1 th order harmonic demodulation amplitude,
Figure FDA0003830557450000025
for 2n after compensation 1 +1 harmonic demodulation amplitude, n 1 ,n 2 N, and N =0,1,2,3 1 ≠n 2 And κ is an amplitude setting coefficient.
5. The method according to any one of claims 1 or 4, wherein the regulating and controlling the actual vibration amplitude of the vibratory gyroscope according to the new drive amplitude control strategy and performing closed-loop self-compensation of the scaling factor comprises:
regulating and controlling the actual vibration amplitude according to an amplitude setting coefficient in the new driving amplitude control strategy; the actual vibration amplitude is:
Figure FDA0003830557450000026
wherein x is 0 D is the electrode gap for the actual vibration amplitude;
and when the amplitude setting coefficient is constant, realizing the self-correction of the actual vibration amplitude and the closed-loop self-compensation of the scale factor.
6. The method of claim 1, further comprising:
obtaining the actual vibration amplitude and the circuit gain of the vibration gyro according to the first compensation amplitude and the second compensation amplitude;
and calculating a correction coefficient of a scale factor in real time according to the change proportion of the identified actual vibration amplitude value or the change proportion of the circuit gain, and compensating the output of the vibration gyroscope in real time by using the correction coefficient to realize open-loop real-time compensation of the scale factor of the vibration gyroscope system.
7. The method of claim 6, wherein the deriving the actual vibration amplitude and the circuit gain of the vibratory gyroscope from the first compensated amplitude and the second compensated amplitude, respectively, comprises:
according to the first compensation amplitude and the second compensation amplitude, respectively obtaining the actual vibration amplitude of the vibration gyro as follows:
Figure FDA0003830557450000031
wherein x is 0 For the actual vibration amplitude, d is the capacitance initial gap,
Figure FDA0003830557450000032
is 2k 1 The compensation coefficient corresponding to the +1 order demodulation amplitude,
Figure FDA0003830557450000033
is 2k 1 The +1 th order harmonic demodulation amplitude,
Figure FDA0003830557450000034
for 2k after compensation 1 +1 order harmonic demodulation amplitude, k 1 ,k 2 =1,2,3 1 ≠k 2
According to the first-order compensation amplitude and the high-order harmonic amplitude after the random-order compensation, the circuit gain is obtained as follows:
Figure FDA0003830557450000035
wherein, K D In order to be the gain of the circuit,
Figure FDA0003830557450000036
ε represents a dielectric constant, and S represents a capacitance area.
8. A system for application to a method for rate type vibratory gyroscope scale factor compensation as claimed in any one of claims 1 to 7, the system comprising:
the resonance submodule comprises a driving mode, a detection mode, an axis modulation electrode for inhibiting orthogonal errors and a frequency modulation electrode for frequency difference trimming;
the phase frequency and phase discrimination module is used for carrying out phase frequency and phase discrimination on the driving output of the driving mode, calculating to obtain an observation amplitude and a phase difference, wherein the observation amplitude is used for amplitude control, and the phase difference is used for frequency control of a phase-locked loop;
the demodulation module is used for carrying out signal demodulation processing on the detection output of the detection mode and calculating to obtain an in-phase signal and an orthogonal signal, wherein the in-phase signal and the orthogonal signal are used for feedback control;
the detection control module is used for respectively processing the in-phase signal and the orthogonal signal to obtain a feedback force signal and an axis adjusting voltage, wherein the feedback force signal is used for balancing the Coriolis force of the detection mode, and the axis adjusting voltage is used for inhibiting an orthogonal error;
the harmonic demodulation module is used for demodulating and settling the drive output of the drive mode to obtain each order of harmonic demodulation amplitude, and the each order of harmonic demodulation amplitude is used for compensating a scale factor;
and the demodulation amplitude compensation module is used for compensating the first demodulation amplitude and the second demodulation amplitude and outputting the first compensation amplitude and the second compensation amplitude.
9. A terminal device comprising a memory and a processor, the memory storing a computer program, characterized in that the processor, when executing the computer program, implements the steps of the method according to any of claims 1 to 7.
10. A terminal readable storage medium, having stored thereon a computer program, characterized in that the computer program, when being executed by a processor, realizes the method of any one of claims 1 to 7.
CN202211071576.8A 2022-09-02 2022-09-02 Rate type vibration gyro scale factor compensation method, system, terminal and medium Pending CN115452002A (en)

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