CN1153851C - Device and method for controlling electric power line distribution - Google Patents
Device and method for controlling electric power line distribution Download PDFInfo
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- CN1153851C CN1153851C CNB011083735A CN01108373A CN1153851C CN 1153851 C CN1153851 C CN 1153851C CN B011083735 A CNB011083735 A CN B011083735A CN 01108373 A CN01108373 A CN 01108373A CN 1153851 C CN1153851 C CN 1153851C
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- force lines
- electric force
- control electric
- lines distribution
- negative electrode
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Abstract
The present invention relates to a device and a method for controlling the distribution of electric power lines, which is used for an electroforming technology. The device for controlling the distribution of electric power lines comprises an anode piece, a cathode piece, an electroforming medium and a shading device, wherein the anode piece corresponding to the application of electric power decomposes an ion of a specified material; the cathode piece is arranged on a corresponding position of the anode piece so as to receive the ion, and therefore, a specified material accumulation layer can be formed on the cathode piece; the electroforming medium exists between the anode piece and the cathode piece so as to transfer the ion to form the electric power lines; the shading device is arranged between an anode plate and a cathode plate and is provided with a plurality of openings, and the electric power lines can penetrate through the openings to be uniformly emitted on the cathode plate.
Description
The present invention relates to a kind of device and method that is applied to the control electric force lines distribution on the electroforming process.
Generally on ink cartridges nozzle piece technology, in the control of the aperture of nozzle bore, major part is to utilize masking shield and metallic conduction characteristic to improve, and makes the approaching ± 3cm of hole tolerance energy, can be uniform and stable to guarantee the ink spray volume.
As shown in Figure 1, after utilizing galvanic current to make anode metal on the positive plate 11 produce oxidizing reaction in the electrotyping bath to become metal ion, because of being subjected to the field of electric force effect between this positive plate 11 and a negative plate 12, to form power line 13, again this power line 13 be subjected to electric current distribution and conduction time length influence, the intensive more then formed power line of electric current distribution is also many more, causes metal ion to be reduced into atoms metal and forms and arrange the situation of piling up and the zone that this power line 13 is concentrated is easy more.The emission of these several power lines 13 and none fixed position again, thereby if there is not the masking shield of this power line 13 of control, then have the situation of these power line 13 skewness to take place, and its metal accumulation can be subjected to the field of electric force distribution influence, the phenomenon that causes the accumulation degree to have thickness to differ.And because of being subjected to the effect of fringing effect on this negative plate 12, potential difference is bigger, and electric field is stronger, and therefore, if the control of no masking shield, then the formed metallic diaphragm in edge can be than thick middle.
At above shortcoming, prior art for example hillside plot week we people's Japanese application for a patent for invention publication number spy is opened flat 10-130896, worked out the another kind of method that solves, as shown in Figure 2, between a positive plate 21 and a negative plate 22, add a single hole masking shield 24, power line 23 can be concentrated earlier by this single hole masking shield 24 to be emitted on this negative plate 22 again, can be increased in this negative plate 22 intermediary projection probability whereby, can be at this formed metal level in negative plate 22 edges with improvement than the problem of thick middle because of fringing effect cause, and through test, its result shows in the middle of it and edge ratio ± 10 μ m mutually, with ideal value ± 3 μ m still have gap, so its qualification rate is not good.
As shown in the above description, also there is following shortcoming in prior art:
1. the metallic diaphragm uneven thickness on this negative plate.
2. utilize this single hole masking shield, cause the big multidirectional intermediate distribution of this metallic diaphragm on the contrary, cause this metallic diaphragm distribution range too small.
Another prior art, we people's Japanese patent of invention publication number spy opens flat 10-130896 application case as hillside plot week, wherein provide a positive plate, a negative plate and a masking shield, and this masking shield have several holes, is emitted on the negative electrode regularly by these a plurality of holes in order to electric current.Owing to only utilize a plurality of holes that are provided with on the masking shield to come the distribution of control current density, so also can't overcome the shortcoming of current unevenness.
Main purpose of the present invention provides a kind of apparatus and method of avoiding the control electric force lines distribution of the edge metal layer problem thick and heavy than the centre.
For achieving the above object, the device that is applied to the control electric force lines distribution of electroforming process of the present invention, it comprises: an anode member, it applies corresponding to an electric power and decomposites the ion of a predetermined substance; One negative electrode spare is located on the relative position of this anode member, to receive this ion to form a predetermined substance accumulation horizon thereon; One electroforming medium is present between this anode member and this negative electrode spare, forms a power line to transmit this ion; And a shading unit, be located between this positive plate and this negative plate, and have several perforates on this device, so that passing these several perforates, this power line evenly is emitted on this negative plate.
According to above-mentioned conception, this anode member is a positive plate in the device of control electric force lines distribution, and its material is a nickel.
According to above-mentioned conception, this negative electrode spare is a negative plate in the device of control electric force lines distribution, and its material is titanium or chromium.
According to above-mentioned conception, the spacing of this anode member and this negative electrode spare is 15～30cm in the device of control electric force lines distribution.
According to above-mentioned conception, this electroforming medium is made up of nickel sulfamic acid, nickelous chloride and boric acid in the device of control electric force lines distribution.
According to above-mentioned conception, this shading unit and this negative plate spacing are 1～5cm in the device of control electric force lines distribution.
According to above-mentioned conception, control electric force lines distribution device in this shading unit be a porous masking shield, and these several perforated areas are diminished from the both sides in regular turn by the centre and in twos the symmetry, its perforate spacing is all identical again.
According to above-mentioned conception, the perforated area size of this porous masking shield is between π (1.5cm) in the device of control electric force lines distribution
2～π (0.5cm)
2Between.
For achieving the above object, the method that is applied to the control electric force lines distribution of electroforming process of the present invention, this method comprises the following steps:
(a) provide an electrotyping bath, this electrotyping bath comprises an anode member and a negative electrode spare, and this anode member applies corresponding to an electric power and decomposites the ion of a predetermined substance, has an electroforming medium again, be present between this anode member and this negative electrode spare, form a power line to transmit this ion;
(b) provide a shading unit, be located between this positive plate and this negative plate, and have several perforates on this device;
(c) a logical electric current is between this positive plate and this negative plate, to produce this power line corresponding to its current density; And
(d) strengthen this electric current to improve this current density.
According to above-mentioned conception, shown in step (a), wherein this anode member is to be a positive plate, and its material is a nickel in the method for control electric force lines distribution.
According to above-mentioned conception, shown in step (a), wherein this negative electrode spare is to be a negative plate, is located on the relative position of this anode member in the method for control electric force lines distribution, receiving this ion forming a predetermined substance accumulation horizon thereon, and its material is titanium or chromium.
According to above-mentioned conception, shown in step (a), wherein the spacing of this anode member and this negative electrode spare is 15～30cm in the method for control electric force lines distribution.
According to above-mentioned conception, shown in step (a), wherein this electroforming medium is made up of nickel sulfamic acid, nickelous chloride and boric acid in the method for control electric force lines distribution.
According to above-mentioned conception, shown in step (b), wherein this shading unit and this negative plate spacing are 1～5cm in the method for control electric force lines distribution.
According to above-mentioned conception, as step (b) shown in, wherein this shading unit is a porous masking shield in the method for control electric force lines distribution, and these several perforated areas are diminished from the both sides in regular turn by the centre and symmetrical in twos, and its perforate spacing is all identical again.
According to above-mentioned conception, control electric force lines distribution method in wherein the perforated area size of this porous masking shield be between π (1.5cm)
2～π (0.5cm)
2Between.
According to above-mentioned conception, shown in step (c), wherein this current density is 2.5～5A/dm in the method for control electric force lines distribution
2
According to above-mentioned conception, shown in step (c), wherein this power line is by passing several perforates in this shading unit evenly being emitted on this negative plate, and deposits this predetermined substance accumulation horizon on this negative plate in the method for control electric force lines distribution.
According to above-mentioned conception, the method for control electric force lines distribution comprises that also step (d) takes off this shading unit one step (d before
0), to increase the sedimentary thickness of this negative plate periphery.
According to above-mentioned conception, shown in step (d), when this predetermined substance accumulation horizon of uniform deposition on this negative plate, can strengthen this strength of current in the method for control electric force lines distribution.
According to above-mentioned conception, shown in step (d), improve this current density to 5～10A/dm in the method for control electric force lines distribution
2, to increase subsequent deposition speed.
Adopt such scheme of the present invention, the apparatus and method of control electric force lines distribution provided by the present invention only can be improved in the prior art with the problems of single hole masking shield as many past these negative plate intermediary areal distribution of power line that mode is caused of control electric force lines distribution, and then can make the average and distribution range of this metallic diaphragm thickness more meet required.
For clearer understanding purpose of the present invention, characteristics and advantage, preferred embodiment of the present invention is elaborated below in conjunction with accompanying drawing.
Fig. 1 is existing electroforming apparatus synoptic diagram;
Fig. 2 is the synoptic diagram that adds a single hole masking shield in the existing electroforming apparatus in addition;
Fig. 3 (a) is the electroforming apparatus synoptic diagram of preferred embodiment of the present invention;
Fig. 3 (b) is the synoptic diagram of the porous masking shield in the electroforming apparatus of preferred embodiment of the present invention;
Fig. 4 is the synoptic diagram that removes a porous masking shield in the electroforming apparatus of preferred embodiment of the present invention.
See also Fig. 3 (a), it is the device synoptic diagram of preferred embodiment of the present invention, it comprises: a positive plate 31, a negative plate 32 and a porous masking shield 34, wherein this positive plate 31 is to be positioned on the relative position with this negative plate 32, its spacing is 15～30cm, and this porous shield board 34 is located between this positive plate 31 and this negative plate 32, and with this negative plate distance be 1～5cm, the material of this positive plate 31 is a nickel again, 32,321 of this negative plates are titanizing on the sheet glass, this porous masking shield 34 is a non-conductive material, for example: acrylic plate.
Owing in electrolyzer, include nickel sulfamic acid, electroforming such as nickelous chloride and boric acid medium, when a logical electric current promptly can dissociate metal ion in this positive plate, and the metal ion that is dissociateed is because be subjected to the field of electric force effect, can between this positive plate 31 and this negative plate 32, form power line 33, can on this negative plate, make metal ion be reduced into atoms metal by this power line 33, if the atoms metal of its packing arrangement of zone that these several power lines 33 are concentrated is also many more, these power line 33 distributions are influenced by fringing effect again, therefore be easy to the negative plate edge and form metallic diaphragm, so the present invention adds this porous shield board 34 between this positive plate 31 and this negative plate 32, shown in Fig. 3 (b), the characteristics of this porous shield board 34 are that several perforates 35 according to linear arrangement are arranged thereon, and these several perforate 35 apertures are diminished from the both sides in regular turn by the centre and in twos the symmetry, its aperture spacing size is all identical again, and wherein the perforated area size of this porous masking shield is between π (1.5cm)
2～π (0.5cm)
2Between, can increase the probability that this power line 33 is emitted to central authorities again more because of perforate 35 apertures are big more, can stop that partly this power line 33 is emitted on this negative plate 32 and two side hole, 35 apertures are less, can improve the situation that causes the metal film layer skewness because of fringing effect.
(this current density is 2.5～5A/dm to another solution of the present invention in order to pass to little electric current earlier in preceding half period of electroforming process
2) and cooperate the utilization of porous masking shield 34, can make this power line 33 more on average concentrate on this negative plate intermediary zone, to form metal accumulation, as shown in Figure 4, when this predetermined substance accumulation horizon of uniform deposition on this negative plate, can take off this porous masking shield, and (this moment, current density was 5～10A/dm to add strong current
2), make the no longer controlled and dropping fire of this power line 43 on negative plate 42, thereby the edge thickness of growing up at this moment is middle fast, can also tend to balance, make metallic diaphragm thickness on this negative plate 42 can be comparatively average and distribution range can meet ideal value (± 3 μ m approximately).
In sum, the device of the control electric force lines distribution that the present invention is provided in above-mentioned preferred embodiment, only can improve in the prior art with the problems of single hole masking shield, and then can make the average and distribution range of this metallic diaphragm thickness more meet required as many past these negative plate intermediary areal distribution of power line that mode is caused of control electric force lines distribution.
Claims (21)
1. device of controlling electric force lines distribution, it is applied on the electroforming one ink cartridges nozzle piece technology, and it comprises:
One anode member, it applies corresponding to an electric power and decomposites the ion of a predetermined substance;
One negative electrode spare is located on the relative position of this anode member, to receive this ion to form a predetermined substance accumulation horizon thereon;
One electroforming medium is present between this anode member and this negative electrode spare, forms a power line to transmit this ion; And
One shading unit, it is to make and be located between this anode member and this negative electrode spare by insulating material, and have several perforates on this device, can make this power line pass these several perforates and evenly be emitted on this negative electrode spare, and the aperture of wherein said several perforates is diminished from the both sides in regular turn by the centre and in twos the symmetry.
2. the device of control electric force lines distribution as claimed in claim 1 is characterized in that, described anode member is a positive plate, and its material is a nickel.
3. the device of control electric force lines distribution as claimed in claim 1 is characterized in that, described negative electrode spare is a negative plate, and its material is titanium or chromium.
4. the device of control electric force lines distribution as claimed in claim 1 is characterized in that, the spacing of described anode member and described negative electrode spare is 15～30cm.
5. the device of control electric force lines distribution as claimed in claim 1 is characterized in that, described electroforming medium is made up of nickel sulfamic acid, nickelous chloride and boric acid.
6. the device of control electric force lines distribution as claimed in claim 1 is characterized in that, described shading unit and described negative electrode spare distance are 1～5cm.
7. the device of control electric force lines distribution as claimed in claim 1 is characterized in that, described shading unit is a porous masking shield, and the spacing of described several perforates is all identical.
8. the device of control electric force lines distribution as claimed in claim 7 is characterized in that, the perforated area size of described porous masking shield is between π (1.5cm)
2～π (0.5cm)
2Between.
9. method of controlling electric force lines distribution, it is to be applied to it is characterized in that described method comprises the following steps: on the electroforming one ink cartridges nozzle piece technology
(a) provide an electrotyping bath, described electrotyping bath comprises an anode member and a negative electrode spare, described anode member, apply corresponding to an electric power and decomposite the ion of a predetermined substance, have an electroforming medium again, be present between described anode member and described negative electrode spare, form a power line to transmit described ion;
(b) provide a shading unit, it is made by insulating material, and is located between described anode member and the described negative electrode spare, and has several perforates on the described device, and described several perforated areas are diminished from the both sides in regular turn by the centre and in twos the symmetry; And
(c) a logical electric current is between described anode member and described negative electrode spare, to produce described power line corresponding to its current density.
10. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, described anode member is a positive plate, and its material is a nickel.
11. the method for control electric force lines distribution as claimed in claim 9, it is characterized in that described negative electrode spare is a negative plate, be located on the relative position of described anode member, receiving described ion forming a predetermined substance accumulation horizon thereon, and its material is titanium or chromium.
12. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, the spacing of described anode member and described negative electrode spare is 15～30cm.
13. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, described electroforming medium is made up of nickel sulfamic acid, nickelous chloride and boric acid.
14. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, described shading unit and described negative electrode spare spacing are 1～5cm.
15. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, described shading unit is a porous masking shield, and described several perforate spacings are all identical.
16. the method for control electric force lines distribution as claimed in claim 15 is characterized in that, the perforated area size of described porous masking shield is between π (1.5cm)
2～π (0.5cm)
2Between.
17. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, described current density is 2.5～5A/dm
2
18. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, comprises that also the described electric current of step (d) reinforcement is to improve described current density.
19. the method for control electric force lines distribution as claimed in claim 18 is characterized in that, also is included in step (d) step (d that takes off described shading unit before
0), to increase the sedimentary thickness of described negative electrode spare periphery.
20. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, can strengthen described strength of current when the described predetermined substance accumulation horizon of uniform deposition on the described negative electrode spare.
21. the method for control electric force lines distribution as claimed in claim 9 is characterized in that, also comprises improving described current density to 5～10A/dm
2, to improve post precipitation speed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011083735A CN1153851C (en) | 2001-02-28 | 2001-02-28 | Device and method for controlling electric power line distribution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011083735A CN1153851C (en) | 2001-02-28 | 2001-02-28 | Device and method for controlling electric power line distribution |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1372018A CN1372018A (en) | 2002-10-02 |
| CN1153851C true CN1153851C (en) | 2004-06-16 |
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ID=4657205
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB011083735A Expired - Fee Related CN1153851C (en) | 2001-02-28 | 2001-02-28 | Device and method for controlling electric power line distribution |
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| CN (1) | CN1153851C (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100439571C (en) * | 2002-07-18 | 2008-12-03 | 株式会社荏原制作所 | Plating device |
| CN101275267B (en) * | 2007-03-26 | 2011-05-25 | 旭明光电股份有限公司 | Thickness evenness-improved electroplating apparatus and electroplating method |
| JP5184308B2 (en) * | 2007-12-04 | 2013-04-17 | 株式会社荏原製作所 | Plating apparatus and plating method |
| CN102534733B (en) * | 2010-12-24 | 2016-01-06 | 北大方正集团有限公司 | Electroplanting device and electro-plating method |
| CN102747400A (en) * | 2012-07-06 | 2012-10-24 | 新疆西部宏远电子有限公司 | Uniform-current-density electrode foil formation method and uneven mesh type insulation board |
| CN107012491B (en) * | 2017-04-01 | 2020-04-07 | 河北民族师范学院 | Co nano layer/Co nano wire/porous alumina composite film and preparation method thereof |
| US11330718B2 (en) | 2017-07-26 | 2022-05-10 | Sumitomo Electric Industries, Ltd. | Printed wiring board production method and printed wiring board production apparatus |
| CN108149289B (en) * | 2018-03-16 | 2024-05-07 | 湖南文理学院 | Electroplating shielding jig |
| CN109338418A (en) * | 2018-11-08 | 2019-02-15 | 阿德文泰克全球有限公司 | Shield, the manufacturing method of shield and electroforming metal mask equipment |
| JP7227875B2 (en) * | 2019-08-22 | 2023-02-22 | 株式会社荏原製作所 | Substrate holder and plating equipment |
| CN111155162A (en) * | 2020-02-26 | 2020-05-15 | 广东兴达鸿业电子有限公司 | Method for improving uniformity of PCB (printed circuit board) electro-coppering |
| CN115142104B (en) * | 2022-07-28 | 2024-04-26 | 福州一策仪器有限公司 | Electroplating device, multichannel electroplating device group and electroplating reaction system |
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- 2001-02-28 CN CNB011083735A patent/CN1153851C/en not_active Expired - Fee Related
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|---|---|
| CN1372018A (en) | 2002-10-02 |
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