CN115346890A - Calibration apparatus and calibration method - Google Patents

Calibration apparatus and calibration method Download PDF

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Publication number
CN115346890A
CN115346890A CN202110526930.0A CN202110526930A CN115346890A CN 115346890 A CN115346890 A CN 115346890A CN 202110526930 A CN202110526930 A CN 202110526930A CN 115346890 A CN115346890 A CN 115346890A
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CN
China
Prior art keywords
positioning
calibrated
piece
calibration
space
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Pending
Application number
CN202110526930.0A
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Chinese (zh)
Inventor
陈鲁
金建高
张鹏斌
张嵩
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Shenzhen Zhongke Feice Technology Co Ltd
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Shenzhen Zhongke Feice Technology Co Ltd
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Priority to CN202110526930.0A priority Critical patent/CN115346890A/en
Publication of CN115346890A publication Critical patent/CN115346890A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/147—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Manipulator (AREA)

Abstract

The calibration equipment of this application is used for the calibration to treat the calibration piece, and calibration equipment includes and bears carrier and a plurality of setting element. The part to be calibrated is borne on the bearing part; the positioning piece can move in a preset stroke, the preset stroke comprises a target position, when the positioning pieces are located at the corresponding target positions, the positioning pieces surround a preset positioning space, and the to-be-calibrated piece is located in the positioning space and is abutted against the positioning pieces. According to the calibration equipment and the calibration method, the piece to be calibrated is borne by the bearing piece, the positioning pieces capable of moving in the preset stroke move to the corresponding target positions, so that the piece to be calibrated is accurately positioned in the preset positioning space, the position calibration of the piece to be calibrated is rapidly completed, the position of the piece to be calibrated is always kept unchanged when the piece to be calibrated is grabbed by the manipulator, the manipulator grabs the piece to be calibrated and moves to the detection equipment, the piece to be calibrated is always positioned at the same preset position on the detection equipment, and the detection effect and the detection efficiency of the piece to be calibrated are guaranteed.

Description

Calibration apparatus and calibration method
Technical Field
The present disclosure relates to the field of detection technologies, and in particular, to a calibration apparatus and a calibration method.
Background
In the field of semiconductor detection, a to-be-detected piece needs to be placed on a preset position of a bearing device, however, due to the fact that different initial placement positions of the to-be-detected piece may have differences, when a manipulator grabs the to-be-detected piece to move to detection equipment, the to-be-detected piece cannot be accurately located on the preset position. In addition, in order to meet the requirement of accurate detection, the workpiece to be detected needs to be repeatedly positioned before detection, so that the detection efficiency is affected.
Disclosure of Invention
In view of this, the embodiments of the present application provide a calibration apparatus and a calibration method.
The calibration equipment of the embodiment of the application is used for calibrating a to-be-calibrated member, and comprises a bearing member and a plurality of positioning members. The part to be calibrated is borne on the bearing part; the positioning pieces can move in a preset stroke, the preset stroke comprises target positions, when the positioning pieces are located at the corresponding target positions, the positioning pieces surround a preset positioning space, and the to-be-calibrated piece is located in the positioning space and abuts against the positioning pieces.
The calibration method is used for calibrating the to-be-calibrated piece. The calibration method comprises the steps that the piece to be calibrated is moved to a bearing piece through a mechanical arm, so that the bearing piece bears the piece to be calibrated; and controlling the positioning pieces to move to corresponding target positions in a preset stroke, so that the to-be-calibrated piece is positioned in a preset positioning space and abutted against the positioning pieces.
According to the calibration equipment and the calibration method, the to-be-calibrated piece is carried by the bearing piece and then moved to the corresponding target position through the positioning pieces which can move in the preset stroke, so that the to-be-calibrated piece is accurately positioned in the preset positioning space, and the position calibration of the to-be-calibrated piece is quickly completed. The position of the to-be-calibrated part is always kept unchanged when the to-be-calibrated part is grabbed by the manipulator, so that when the to-be-calibrated part is grabbed by the manipulator and moved to the detection equipment, the to-be-calibrated part is always located at the same preset position on the detection equipment, the to-be-calibrated part is not required to be repeatedly positioned, and the detection effect and the detection efficiency of the to-be-calibrated part are guaranteed.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic perspective view of a calibration apparatus according to certain embodiments of the present application;
FIG. 2 is a schematic perspective view of a calibration apparatus according to certain embodiments of the present application;
FIG. 3 is a perspective view of a carrier according to certain embodiments of the present application;
FIG. 4 is a perspective view of a positioning member according to certain embodiments of the present disclosure;
FIG. 5 is a perspective view of another perspective of a positioning member according to certain embodiments of the present disclosure;
FIG. 6 is a perspective view of a part to be calibrated according to certain embodiments of the present application;
FIG. 7 is a perspective view of a base, positioning members and mounting member according to certain embodiments of the present application; and
FIG. 8 is a schematic flow chart diagram of a calibration method according to some embodiments of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating the scope of the invention, are given by way of illustration only.
Referring to fig. 1, a calibration apparatus 100 according to an embodiment of the present disclosure is used for calibrating a member to be calibrated 200, and the calibration apparatus 100 includes a supporting member 10 and a plurality of positioning members 20. The member to be calibrated 200 is carried on the carrier 10; the positioning members 20 are movable within a predetermined stroke, the predetermined stroke includes a target position, when the positioning members 20 are located at the corresponding target positions, the positioning members 20 enclose a predetermined positioning space 21, and the to-be-calibrated device 200 is located in the positioning space 21 and abuts against the positioning members 20.
The calibration apparatus 100 according to the embodiment of the present application carries the to-be-calibrated member 200 by the carrier 10, and then moves by the plurality of positioning members 20 movable in a predetermined stroke, so that the positioning members 20 move to corresponding target positions, and thus the to-be-calibrated member 200 is accurately positioned in the predetermined positioning space 21, and the position calibration of the to-be-calibrated member 200 is rapidly completed. The position of the to-be-calibrated piece 200 is always kept unchanged when being grabbed by the manipulator 300, so that when the manipulator 300 grabs the to-be-calibrated piece 200 and moves to the detection equipment (not shown), the to-be-calibrated piece 200 is always located at the same preset position on the detection equipment, the to-be-calibrated piece 200 does not need to be repeatedly positioned, and the detection effect and the detection efficiency of the to-be-calibrated piece 200 are ensured.
Referring to fig. 2, the calibration apparatus 100 according to the embodiment of the present disclosure includes a base 30, a carrier 10, a positioning member 20, a connecting member 40, and a mounting member 50.
The calibration apparatus 100 is used to calibrate the to-be-calibrated object 200 such that the to-be-calibrated object 200 (e.g., the center of the to-be-calibrated object 200) moves to a predetermined position (e.g., the predetermined position is a position where the center of the robot 300 is located when the robot 300 grasps the to-be-calibrated object 200). The manipulator 300 grabs the to-be-calibrated piece 200 at a predetermined position (the to-be-calibrated piece 200 may also be a to-be-detected piece detected by the detection device) each time, and places the to-be-calibrated piece 200 on the plummer of the detection device along a predetermined track, so that the to-be-calibrated piece 200 is located at the predetermined position of the plummer (for example, the center of the to-be-calibrated piece 200 is just located at the center of the plummer), and the detection effect of the detection device on the to-be-calibrated piece 200 is ensured.
The susceptor 30 includes a base plate 31 and a side plate 32. The substrate 31 includes a carrying surface 311. The side plates 32 are disposed on the bearing surface 311.
The side plates 32 are multiple, for example, the side plates 32 are 4, 4 side plates 32 enclose a rectangular receiving space, and the carrier 10 is disposed in the receiving space. For another example, the number of the side plates 32 is 3, and the side plates include a first side plate 321, a second side plate 322, and a third side plate 323, where the first side plate 321 and the second side plate 322 are perpendicular to each other, the second side plate 322 and the third side plate 323 are perpendicular to each other, a gap 324 is formed between the first side plate 321 and the third side plate 323, the gap 324 may facilitate the robot 300 to carry the to-be-calibrated object 200 in and out, and a width of the gap 324 may be greater than a maximum width of the to-be-calibrated object 200 (e.g., a maximum distance between any two points of an edge of the to-be-calibrated object 200), so as to ensure that the to-be-calibrated object 200 can enter and exit from the gap 324. In the present embodiment, the side panels 32 include a first side panel 321, a second side panel 322, and a third side panel 323.
Referring to fig. 3, the supporting member 10 is disposed on the supporting surface 311. The carrier 10 comprises a carrier plate 11 and support posts 12. The support columns 12 are arranged on the carrier plate 11.
The carrier plate 11 includes an upper surface 111 and a lower surface 112 opposite to each other, and the lower surface 112 contacts the carrier surface 311.
The support posts 12 extend from the upper surface 111 in a direction away from the upper surface 111. The support column 12 comprises a support body 121 and a support table 122, the support table 122 comprising a support face 123, a side face 124 and a connection face 125. The side surface 124 is perpendicular to the upper surface 111, the supporting surface 123 is parallel to the upper surface 111, and the connecting surface 125 connects the supporting surface 123 and the side surface 124 obliquely. When the member to be calibrated 200 is placed on the supporting surface 123, the edge of the supporting surface 123 is not too sharp due to the inclined connecting surface 125, and the member to be calibrated 200 is not easily damaged when contacting the supporting column 12.
The number of the supporting columns 12 is plural, for example, the number of the supporting columns 12 is 3, 4, 5, etc., and the supporting surfaces 123 of the plural supporting columns 12 are located on the same plane to cooperatively carry the member to be calibrated 200. It can be understood that when there are 3 support columns 12, three support columns 12 need to form a triangular stable structure, so as to ensure the bearing stability of the member to be calibrated 200. In the embodiment of the present application, the number of the support columns 12 supporting each member to be calibrated 200 is 4, and a rectangular shape is formed, thereby improving a stable support for the member to be calibrated 200.
The bearing plate 11 includes a first bearing portion 113 and a second bearing portion 114, the first bearing portion 113 surrounds the second bearing portion 114, the support columns 12 include a first support column 126 and a second support column 127, the first support column 126 is disposed on the first bearing portion 113, the second support column 127 is disposed on the second bearing portion 114, the number of the first support column 126 and the number of the second support column 127 may be 4, the support surface 123 of the first support column 126 is higher than the support surface 123 of the second support column 127, the first support column 126 and the second support column 127 are respectively used for bearing pieces to be calibrated 200 with different sizes, the size of the pieces to be calibrated 200 borne by the first support column 126 is larger than the size of the pieces to be calibrated 200 borne by the second support column 127, for example, the size of the pieces to be calibrated 200 borne by the first support column 126 is 8 inches, and the size of the pieces to be calibrated 200 borne by the second support column 127 is 6 inches. In this way, one calibration apparatus 100 can perform calibration of different sizes of pieces 200 to be calibrated.
It is understood that in other embodiments, the carrying board 11 may further include more carrying portions (e.g., a third carrying portion, a fourth carrying portion, etc.), and support columns (e.g., a third support column, a fourth support column, etc.) are correspondingly disposed, so as to cooperate to achieve the calibration of the to-be-calibrated member 200 with more sizes (e.g., 4 inches, 12 inches, etc.), which is not limited herein.
The carrier plate 11 further defines a plurality of mounting holes 115. The connection member 40 is formed through the mounting hole 115 to connect the carrier plate 11 and the base plate 31. The connector 40 may include a set screw 41 and a jack screw 42 (shown in fig. 7). The fixing screws 41 are used for fixing the bearing plate 11 and the substrate 31, and the jackscrews 42 can move perpendicular to the bearing surface 311 to adjust the levelness of the bearing plate 11, so as to ensure that the plane where the supporting surface 123 of the supporting column 12 is located is kept horizontal, and improve the bearing stability. When the levelness of the bearing plate 11 is adjusted, whether the levelness is reached or not can be judged by using devices such as a level meter, so that the levelness of the bearing plate 11 can be accurately adjusted.
The number of the jackscrews 42 can be multiple, for example, when the bearing plate 11 is rectangular, 4 jackscrews 42 are respectively arranged at four corners of the bearing plate 11 and located on diagonal lines, so that the levelness of the jackscrews 42 can be conveniently adjusted; the jackscrew 42 can also be 8, and every 2 is a set of, divides into four groups and sets up respectively on four angles of loading board 11, and the mid point of the line of 2 jackscrews 42 of every group is located the diagonal, so, when making things convenient for jackscrew 42 to the regulation of levelness, can promote the fixed strength of loading board 11 and base plate 31 after the regulation.
Referring to fig. 2, 4 and 5, the positioning member 20 is disposed on the side plate 32. The positioner 20 includes a driving portion 22 and a moving portion 23. The driving part 22 is connected with the moving part 23, and the driving part 22 is used for driving the moving part 23 to move in a predetermined stroke so as to change the shape and size of the positioning space 21.
The positioning member 20 is plural. For example, the positioning element 20 includes a first positioning element 24, a second positioning element 25 and a third positioning element 26, and the first positioning element 24, the second positioning element 25 and the third positioning element 26 enclose an acute triangle, so that after the first positioning element 24, the second positioning element 25 and the third positioning element 26 move to the target positions within the corresponding predetermined strokes, the to-be-calibrated part 200 is just located in the predetermined positioning space 21 and cannot move continuously, thereby ensuring the positioning accuracy. The first positioning member 24, the second positioning member 25, and the third positioning member 26 may be disposed at the first side plate 321, the second side plate 322, and the third side plate 323, respectively. For another example, the positioning element 20 may be more, such as 4, 5, 6, 7, 8, 9, etc., and it is only necessary to stably limit the to-be-calibrated object 200 within the predetermined positioning space 21.
In the embodiment of the present application, there are 8 positioning elements 20, wherein 3 positioning elements 20 are located on the first side plate 321, 2 positioning elements 20 are located on the second side plate 322, and 3 positioning elements 20 are located on the third side plate 323, and the positioning elements 20 do not block the notch 324, so as to ensure that the robot 300 can enter and exit from the notch 324 without hindrance. The angle between the positioning element 20 located on the first side plate 322, one positioning element 20 located on the second side plate 321, and one positioning element 20 located on the third side plate 323 may be 110 degrees, 120 degrees, and the like, for example, the extending direction of the predetermined stroke of the positioning element 20 located on the second side plate 322 is perpendicular to the second side plate 322, and the extending direction of the predetermined stroke of the positioning element 20 located on the first side plate 321 and the third side plate 323 and the predetermined stroke of the positioning element 20 located on the third side plate 323 may be 110 degrees, 120 degrees, and the like.
Referring to fig. 6, the to-be-calibrated device 200 of the present application is a wafer, the wafer includes a wafer body 201 and an annular mounting portion 202 for supporting the wafer body 201, the annular mounting portion 202 has a predetermined shape, and 8 positioning elements 20 are disposed according to the predetermined shape, so as to further improve the positioning effect of the wafer.
In another embodiment, the carrier 10 and the positioning member 20 are disposed on the carrying surface 311. The carrier 10 may include a carrier 11, the carrier 11 includes an upper surface 111 and a lower surface 112 opposite to each other, and the lower surface 112 is in contact with a carrying surface 311. The carrier 11 has an opening (not shown) formed by recessing from the upper surface 111 to the lower surface 112. After the manipulator 300 moves the to-be-calibrated object 200 to the upper side of the carrier 10, the to-be-calibrated object 200 is carried on the upper surface 111 by moving towards the upper surface 111, and the manipulator 300 moves into the opening without contacting the carrier 10, so that damage caused by collision between the manipulator 300 and the carrier 10 is prevented.
Then, the positioning members 20 disposed on the bearing surface 311 are cooperatively moved to move the member to be calibrated 200 to the predetermined positioning space 21 (i.e., to be located at the predetermined position), thereby completing the calibration of the member to be calibrated 200. At this time, the robot 300 moves again in a direction away from the lower surface 112 to lift the to-be-calibrated object 200, so as to move the to-be-calibrated object 200 to the carrier for inspection.
In yet another embodiment, the positioning member 20 can be directly disposed on the upper surface 111 of the loading plate 11, so that the positioning and detection of the member to be calibrated 200 can be realized without providing the base 30.
The driving portion 22 may be a cylinder or a stepping motor, etc., and has high positioning accuracy.
The moving portion 23 includes a positioning surface 231, after the moving portions 23 move to the corresponding target positions, the positioning surfaces 231 can enclose a positioning space 21, and the positioning surface 231 is a surface that abuts against the to-be-calibrated piece 200 after being positioned. The part of the member to be calibrated 200 abutting against the positioning surface 231 has the same radian as the positioning surface 231. For example, if the part of the calibration member 200 to be abutted against is a plane, the positioning surface 231 is also a plane; the part of the calibration member 200 to be abutted against is an arc surface, and the positioning surface 231 is also an arc surface with the same arc degree. Therefore, the positioning effect can be improved, and the contact area of the positioning surface 231 and the part of the abutting part of the to-be-calibrated part 200 is prevented from being too small, so that the to-be-calibrated part 200 or the positioning part 20 is prevented from being damaged.
In other embodiments, the portion of the member to be calibrated 200 abutting against the positioning surface 231 is not the same as the curvature of the positioning surface 231. For example, the positioning surface 231 is a plane, the portion of the to-be-calibrated member 200 abutting against the positioning surface 231 is an arc surface, and the extending direction of the predetermined stroke is perpendicular to the tangential direction of the portion of the to-be-calibrated member 200 abutting against the positioning surface 231, that is, when the positioning surface 231 abuts against the to-be-calibrated member 200, the portion of the to-be-calibrated member 200 abutting against the positioning surface 231 is exactly tangent to the positioning surface 231. Thus, the positioning surface 231 can be ensured to stably resist the alignment part 200, thereby improving the positioning effect.
The positioning surfaces 231 may be multiple, for example, corresponding to the first bearing portion 113 and the second bearing portion 114, respectively, the positioning surfaces 231 include a first positioning surface 232 and a second positioning surface 233, the first positioning surfaces 232 surround a first positioning space 211 (shown in fig. 1), the second positioning surfaces 233 surround a second positioning space 212 (shown in fig. 1), the first positioning space 211 is larger than the second positioning space 212, for example, the first positioning space 211 may position an 8-inch to-be-calibrated object 200, and the second positioning space 212 may position a 6-inch to-be-calibrated object 200. The distance between the first positioning surface 232 and the second positioning surface 233 can be determined according to the size of the first positioning space 211 and the second positioning space 212, so that the moving portion 23 can simultaneously enclose the first positioning space 211 and the second positioning space 212 by moving once without moving to different target positions.
It is understood that the positioning surface 231 may also include a third positioning surface, a fourth positioning surface, etc., which may match the number of the supporting portions of the supporting member 10, so as to achieve positioning of more sizes of the members 200 to be calibrated, which is not limited herein.
Specifically, the moving portion 23 may be designed to be in a shape of steps, each step includes a step surface 234 and a corresponding positioning surface 231, and the number of steps may be designed according to the number included in the positioning surfaces 231, for example, when the positioning surfaces 231 include a first positioning surface 232 and a second positioning surface 233, the number of steps is 2; for another example, when the positioning surface 231 includes the first positioning surface 232, the second positioning surface 233, and the third positioning surface, the number of steps is 3.
With continued reference to fig. 4 and 5, the positioning member 20 further includes a position sensor 24 for detecting the position of the moving part 23 at a predetermined stroke.
The driving part 22 may further include a driving shaft 221, the driving shaft 221 is connected to the moving part 23, and the driving shaft 221 moves to move the moving part 23 within a predetermined stroke.
The position sensor 24 may be disposed on the driving portion 22, the driving portion 22 is provided with a sliding slot 222, an extending direction of the sliding slot 222 is the same as an extending direction of the predetermined stroke (i.e., a moving direction of the driving shaft 221), the position sensor 24 may be disposed in the sliding slot 222, and the position sensor 24 may be a hall sensor, and when the driving shaft 221 (e.g., a magnetic member capable of being detected by the hall sensor is disposed at a specific position of the driving shaft 221 (e.g., an end of the driving shaft 221 located at the driving portion 22)) moves to a position where the position sensor 24 is located, the hall sensor may generate a corresponding in-position signal, thereby determining a current position of the driving shaft 221. For example, the position of the position sensor 24 in the sliding groove 222 may be determined according to a target position, and the position sensor 24 may be disposed at a position corresponding to the sliding groove 222, so that when the hall sensor generates an on-position signal, it may be determined that the moving portion 23 has moved to the target position, and at this time, the moving portion 23 does not move any more, so as to prevent the moving portion 23 from continuously moving and pressing the member to be calibrated 200, thereby damaging the moving portion 23 or the member to be calibrated 200.
The position of the target position corresponding to the sliding chute 222 is: when the moving part 23 is located at the target position, the magnetic member of the driving shaft 221 is located at a position corresponding to the sliding groove 222, and a connecting line between the position of the magnetic member of the driving shaft 221 and the corresponding position on the sliding groove 222 is perpendicular to the axis of the driving shaft 221.
In the embodiment of the present application, the number of the position sensors 24 is two, and the first position sensor 241 and the second position sensor 242 are provided, respectively, the first position sensor 241 may be provided at a position corresponding to the initial position of the moving portion 23 on the chute 222 (in this case, the distance between the moving portion 23 and the driving portion 22 is the closest), and the second position sensor 242 may be provided at a position corresponding to the target position on the chute 222.
When the to-be-calibrated member 200 is placed, the moving portion 23 needs to be moved so that the first position sensor 241 generates a first in-place signal, and at this time, it can be determined that the moving portion 23 is at an initial position, so that the space surrounded by the positioning surface 231 is the largest, and it is ensured that the to-be-calibrated member 200 is placed on the carrier 10 without colliding with any moving portion 23.
When positioning, the moving part 23 needs to be moved to move the moving part 23 to the target position, and at this time, when the second position sensor 242 generates the second in-place signal, it can be determined that the moving part 23 has moved to the target position, so as to complete the positioning of the to-be-calibrated member 200.
In other embodiments, the position sensor 24 may be a distance sensor, the position sensor 24 is disposed at the driving portion 22, the position sensor 24 may emit laser light toward one end of the driving shaft 221 at the driving portion 22 along the axial direction of the driving shaft, and the distance between the position sensor 24 and the one end of the driving shaft 221 at the driving portion 22 is determined by detecting the intensity of the reflected laser light, so as to determine the position of the moving portion 23 within the predetermined stroke.
Referring to fig. 2 and 7, the mounting member 50 is disposed on the side plate 32. The mounting member 50 includes a mounting surface 51, and the mounting surface 51 is used for mounting the positioning member 20.
It will be appreciated that since the extending directions of the first side plate 321, the second side plate 322 and the third side plate 323 are fixed, in order to make the extending direction of the predetermined stroke of the positioning member 20 meet the positioning requirement, the mounting member 50 capable of mounting the positioning member 20 at any angle may be provided.
Specifically, the mounting member 50 may be cut so that the mounting surface 51 is parallel to the extending direction according to the extending direction of the predetermined stroke of the mounted spacer 20, and the moving portion 23 may be moved in the direction parallel to the mounting surface 51 after the spacer 20 is mounted on the mounting surface 51.
Referring to fig. 2 and fig. 8, the calibration method of the present application is used for calibrating a member to be calibrated 200, and includes the following steps:
011: moving the member to be calibrated 200 to the carrier 10 by the robot 300 so that the carrier 10 carries the member to be calibrated 200;
012: and controlling the plurality of positioning members 20 to move to the corresponding target positions within the predetermined stroke, so that the member to be calibrated 200 is located in the predetermined positioning space 21 and interferes with the plurality of positioning members 20.
Specifically, during calibration, the to-be-calibrated object 200 is firstly moved above the supporting column 12 by the robot 300, then the robot 300 descends to enable the to-be-calibrated object 200 to be carried on the supporting column 12, and due to the difference of the initial placement positions, the to-be-calibrated object 200 is also placed on the supporting column 12 in a deviation manner, and therefore, the calibration apparatus 100 controls the moving parts 23 of the plurality of positioning members 20 to move to the corresponding target positions, so that the to-be-calibrated object 200 is positioned in the predetermined positioning space 21 and interferes with the plurality of positioning surfaces 231.
The predetermined positioning space 21 can be determined by calibration in advance, for example, by an employee first placing the to-be-calibrated object 200 on the supporting column 12, then manually adjusting the position of the to-be-calibrated object 200, so that the to-be-calibrated object 200 is located at a predetermined position, and then detecting whether the position is accurate by a detection instrument. After the position is accurately placed, the positioning element 20 is controlled to move the moving part 23, so that the positioning surface 231 just abuts against the member to be calibrated 200, and then the position of the driving shaft 221 at this time is recorded, so that the target position corresponding to each moving part 23 can be determined, and the calibration of the target position is completed.
After the positioning is completed, the robot 300 may be lifted up again (in a direction away from the carrying surface 311) to carry the to-be-calibrated object 200, and move the to-be-calibrated object 200 to a preset position of the carrying table of the inspection apparatus, so as to perform an accurate inspection.
According to the calibration method, the to-be-calibrated member 200 is carried by the carrier 10, and then the positioning members 20 capable of moving in a predetermined stroke are moved, so that the positioning members 20 move to corresponding target positions, the to-be-calibrated member 200 is accurately positioned in the predetermined positioning space 21, and the position calibration of the to-be-calibrated member 200 is rapidly completed. The position of the to-be-calibrated piece 200 is always kept unchanged when the to-be-calibrated piece is grabbed by the manipulator 300, so that when the manipulator 300 grabs the to-be-calibrated piece 200 and moves to the detection equipment (not shown), the to-be-calibrated piece 200 is always located at the same preset position on the detection equipment, the to-be-calibrated piece does not need to be repeatedly positioned, and the detection effect and the detection efficiency of the to-be-calibrated piece 200 are ensured.
In the description herein, references to the description of the terms "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example" or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the various embodiments or examples and features of the various embodiments or examples described in this specification can be combined and combined by those skilled in the art without being mutually inconsistent.
Any process or method descriptions in flow charts or otherwise described herein may be understood as representing modules, segments, or portions of code which include one or more program modules for implementing specific logical functions or steps of the process, and the scope of the preferred embodiments of the present application includes additional implementations in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present application.
Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application and that variations, modifications, substitutions and alterations in the above embodiments may be made by those of ordinary skill in the art within the scope of the present application.

Claims (14)

1. Calibration apparatus for calibrating a member to be calibrated, the apparatus comprising:
the bearing part is used for bearing the part to be calibrated;
the positioning pieces can move in a preset stroke, the preset stroke comprises a target position, when the positioning pieces are all located at the corresponding target positions, a preset positioning space is defined by the positioning pieces, and the to-be-calibrated piece is located in the positioning space and is abutted against the positioning pieces.
2. The calibration device of claim 1 wherein the carrier comprises a carrier plate and a plurality of support posts disposed on the carrier plate, the support posts comprising support surfaces, the support surfaces of the plurality of support posts lying in a common plane.
3. The calibration device of claim 2, wherein the loading plate comprises a first loading portion and a second loading portion, the first loading portion surrounds the second loading portion, the support columns comprise a first support column and a second support column, the first support column is disposed on the first loading portion, the second support column is disposed on the second loading portion, and the support surface of the first support column is higher than the support surface of the second support column.
4. The calibration apparatus of claim 2, wherein the support column further comprises a side surface and a connection surface, the connection surface connecting the side surface and the support surface at an angle.
5. The calibration apparatus of claim 1, further comprising a base, the base comprising a base plate and a side plate, the side plate disposed on the base plate, the carrier disposed on the base plate, and the positioning member disposed on the side plate.
6. The calibration apparatus of claim 1, wherein the positioning members comprise a first positioning member, a second positioning member, and a third positioning member, the first positioning member, the second positioning member, and the third positioning member enclosing an acute triangle.
7. Calibration device according to claim 1, wherein the predetermined stroke extends in a direction perpendicular to the tangential direction of the part of the member to be calibrated in abutment against the positioning element.
8. The calibration apparatus as claimed in any one of claims 1 to 7, wherein the positioning member includes a positioning surface, the positioning space is defined by a plurality of positioning surfaces, the positioning surface abuts against the member to be calibrated, and the part of the member to be calibrated abutting against the positioning surface has the same radian as the positioning surface.
9. The calibration apparatus according to claim 8, wherein the positioning member includes a driving portion and a moving portion, the moving portion includes the positioning surface, and the driving portion drives the moving portion to move within the predetermined stroke to change the shape and size of the positioning space.
10. The calibration device of claim 9, wherein the positioning surface comprises a first positioning surface and a second positioning surface, the positioning space comprises a first positioning space and a second positioning space, the first positioning surface encloses the first positioning space, the second surface encloses the second positioning space, and the first positioning space is larger than the second positioning space.
11. The calibration apparatus of claim 9 wherein said positioning member further comprises a position sensor for detecting the position of said moving part within said predetermined stroke.
12. The calibration device according to claim 11, wherein the position sensor includes a first position sensor that generates a first on-position signal when the moving portion is at an initial position and a second position sensor that generates a second on-position signal when the moving portion is at the target position.
13. The calibration apparatus according to claim 11, wherein the driving portion defines a slide slot extending in the same direction as the predetermined stroke, the position sensor is movably disposed in the slide slot, and the position of the position sensor in the slide slot is determined according to the target position.
14. A calibration method for calibrating an object to be calibrated, comprising:
moving the piece to be calibrated to a bearing part through a manipulator, so that the bearing part bears the piece to be calibrated;
and controlling the plurality of positioning parts to move to corresponding target positions in a preset stroke, so that the to-be-calibrated part is positioned in a preset positioning space and is abutted against the plurality of positioning parts.
CN202110526930.0A 2021-05-14 2021-05-14 Calibration apparatus and calibration method Pending CN115346890A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110526930.0A CN115346890A (en) 2021-05-14 2021-05-14 Calibration apparatus and calibration method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110526930.0A CN115346890A (en) 2021-05-14 2021-05-14 Calibration apparatus and calibration method

Publications (1)

Publication Number Publication Date
CN115346890A true CN115346890A (en) 2022-11-15

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