CN115341195A

CN115341195A - Film coating equipment

Info

Publication number: CN115341195A
Application number: CN202210959992.5A
Authority: CN
Inventors: 左敏; 严大; 黎微明; 李翔
Original assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2022-08-11
Filing date: 2022-08-11
Publication date: 2022-11-15

Abstract

The application relates to the technical field of mechanical equipment and provides coating equipment. The coating equipment comprises an inner shell and a spraying plate. One end of the inner shell is provided with an opening. The inner shell is internally provided with a first gas flow passage, and the gas outlet of the first gas flow passage is positioned on the side wall of the inner shell and used for outputting gas to the inner shell through the gas outlet of the first gas flow passage. The spraying holes of the spraying plate output gas into the inner shell. This application can be followed the lateral wall of interior casing and gone up inside output gas in the interior casing.

Description

Film coating equipment

Technical Field

The application relates to the technical field of mechanical equipment, in particular to coating equipment.

Background

In the current Atomic Layer Deposition (ALD) coating equipment, the spray plate is arranged on the closed door, and only the spray plate inputs gas into the inner shell.

Disclosure of Invention

In view of the above, the present application provides a coating apparatus capable of outputting gas from a sidewall of an inner housing to the inner housing.

In order to solve the technical problem, the application adopts a technical scheme that: a coating device is provided, which comprises an inner shell and a spraying plate. One end of the inner shell is provided with an opening. The inner shell is internally provided with a first gas flow passage, and the gas outlet of the first gas flow passage is positioned on the side wall of the inner shell and used for outputting gas to the inner shell through the gas outlet of the first gas flow passage. The spraying holes of the spraying plate output gas into the inner shell.

In some embodiments of the present application, the air outlet of the first air flow passage is disposed around the sidewall of the inner housing and adjacent to the open end surface of the inner housing.

In some embodiments of the present application, the gas curtain is formed by the gas input from the gas outlet of the first gas flow passage into the inner housing.

In some embodiments of the present application, the inner housing has a second gas flow passage therein. The gas inlet of the second gas flow channel is positioned on the side wall of the inner shell, and the gas outlet of the second gas flow channel is positioned on the opening end face of the inner shell.

In some embodiments of the present application, the coating apparatus comprises a first conduit and a second conduit. The first pipeline is used for inputting gas. The air outlet of the first pipeline is communicated with the air inlet of the first gas flow passage. The second pipeline is used for inputting gas. And the gas outlet of the second pipeline is communicated with the gas inlet of the second gas flow channel.

In some embodiments of the present application, a filming apparatus includes an outer case, a sealing door. One end of the outer shell is provided with an opening. The inner shell is arranged in the outer shell, and the opening of the inner shell and the opening of the outer shell are positioned on the same side. The closing door is used for selectively closing the opening of the outer casing. Wherein, the shower plate is arranged on the closed door. The shower plate has an air inlet. When the opening of the outer shell is closed by the closing door, the opening of the inner shell is closed by the spraying plate, and the air inlet of the spraying plate is communicated with the air outlet of the second gas flow passage.

In some embodiments of the present application, a coating apparatus includes a carrier. The carrier is located in the inner shell and used for bearing products, and a gap is formed between the carrier and the inner shell. The gas outlet of the first gas flow channel is used for inputting gas into the gap between the inner shell and the carrier so as to prevent the gas output by the spraying holes from flowing into the gap between the inner shell and the carrier.

In some embodiments of the present application, the second pipeline includes two branches, and the two branches are located on the same side of the carrier. The number of the second gas flow channels is two, and the gas inlets of the two second gas flow channels are positioned on the same side of the carrier and are communicated with the two branch circuits in a one-to-one correspondence manner.

In some embodiments of the present disclosure, the number of the second pipelines is two, and the two second pipelines are respectively located on two opposite sides of the carrier. The number of the second gas flow channels is four, and the second gas flow channels are communicated with the branches of the two first pipelines in a one-to-one correspondence mode. The two second pipelines are connected with different gas sources.

In some embodiments of the present application, the product is placed vertically on the carrier. The product is parallel to the flow direction of the gas output from the shower holes.

In some embodiments of the present application, the spraying range of the spraying holes is the same as the shape and size of the vertical projection of the carrier on the spraying plate.

In some embodiments of the present application, the coating apparatus includes a third pipe. And the gas outlet of the third pipeline is positioned on the outer shell and used for inputting gas into the gap between the inner shell and the outer shell.

In some embodiments of the present application, the first gas flow channel has two gas outlets respectively located on the outer side wall and the inner side wall of the inner housing for inputting gas into the inner housing and the gap of the outer housing.

In some embodiments of the present application, the filming device includes an extrusion. The pressing member is used for fixing the relative positions of the inner housing and the outer housing.

In some embodiments of the present application, the plating device includes a connecting shaft and a spring. At least one of the spraying plate and the closing door is provided with a sliding hole/groove, and at least one end of the connecting shaft can slide in the sliding hole/groove. The spring sleeve is arranged on the connecting shaft and is positioned between the spraying plate and the closed door. The spraying plate and the closed door are elastically connected through a connecting shaft and a spring, and the distance between the spraying plate and the closed door can be changed.

In some embodiments of the present application, the coating apparatus includes a valve. The first pipeline, the second pipeline and the third pipeline are respectively provided with a valve for respectively controlling the opening and closing of the first pipeline, the second pipeline and the third pipeline.

The beneficial effect of this application is: the coating equipment comprises an inner shell and a spraying plate. One end of the inner shell is provided with an opening. The inner shell is internally provided with a first gas flow passage, and the gas outlet of the first gas flow passage is positioned on the side wall of the inner shell and used for outputting gas to the inner shell through the gas outlet of the first gas flow passage. The spraying holes of the spraying plate output gas into the inner shell. This application not only can follow the spray plate and go into interior export gas in the casing, can follow the lateral wall of interior casing moreover and go up export gas in to the interior casing.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts. Wherein:

FIG. 1 is a front view of an embodiment of a coating apparatus of the present application;

FIG. 2 is a right side view of an embodiment of the coating apparatus of the present application (with the enclosure door and shower plate omitted);

FIG. 3 is a schematic view of a closing door (including a shower plate) according to an embodiment of the coating apparatus of the present application.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be further noted that, for the convenience of description, only some of the structures related to the present application are shown in the drawings, not all of the structures. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Please refer to fig. 1 to 3. Fig. 1 is a front view of an embodiment of the plating apparatus of the present application, fig. 2 is a right side view of the embodiment of the plating apparatus of the present application (the closing door 40 and the shower plate 50 are omitted), and fig. 3 is a schematic view of the closing door 40 (including the shower plate 50) of the embodiment of the plating apparatus of the present application.

In some embodiments, the coating apparatus includes an inner housing 20, a shower plate 50. One end of the inner case 20 has an opening. The inner housing 20 has a first gas flow passage (not shown) therein, and a gas outlet of the first gas flow passage is located on a side wall of the inner housing 20 for outputting gas into the inner housing 20 through the gas outlet of the first gas flow passage.

In some embodiments, the inner housing 20 is cylindrical. The shape and size of the inner housing 20 may be set according to actual circumstances. The closed end of the inner shell 20 is provided with an air pumping port 22, and the air pumping port 22 is communicated with a vacuum pump. The vacuum pump can completely evacuate the gas inside the inner case 20. As shown in fig. 2, the inner housing 20 has a second gas flow passage 21 therein. The inlet of the second gas flow channel 21 is located on the side wall of the inner housing 20, and the outlet of the second gas flow channel 21 is located on the open end face of the inner housing 20. The positions of the gas outlet and the gas inlet of the second gas flow channel 21 may be set according to actual requirements. In some embodiments, the gas inlet and the gas outlet of the second gas flow passage 21 are located on the side wall of the inner housing 20 at the same time. In some embodiments, the gas inlet and the gas outlet of the second gas flow channel 21 may be located on the open end surface of the inner housing 20 at the same time. The second line 30 is used for feeding gas. In some embodiments, the gas input by the second pipeline 30 is an inert gas. The second line 30 can also be fed with several different gases simultaneously.

In some embodiments, the coating apparatus includes a first conduit 35 and a second conduit 30. The first line 35 and the second line 30 may be supplied with the same gas or different gases, depending on the actual situation. The outlet of the first conduit 35 communicates with the inlet of the first gas flow passage of the inner housing 20. The outlet of the second pipe 30 communicates with the inlet of the second gas flow passage 21 of the inner case 20. The gas outlet of the first gas flow channel is located on the side wall of the inner shell 20, and is used for outputting gas into the inner shell 20, and the flowing direction of the gas output from the spraying hole 51 is changed by blocking. In some embodiments, after the vacuum pump evacuates the gas in the inner housing 20, in order to prevent the gas output from the shower plate 50 from reacting with the gas input from the first pipeline 35, the gas input from the first pipeline 35 into the inner housing 20 is an inert gas.

In some embodiments, the filming apparatus includes an outer case 10, a closing door 40. Illustratively, the outer housing 10 is horizontally disposed with the inner housing 20. One end of the outer case 10 and the inner case 20 has an opening and the other end is closed. The inner housing 20 is disposed inside the outer housing 10, and the opening of the inner housing 20 and the opening of the outer housing 10 are located on the same side. In some embodiments, the inner housing 20 and the outer housing 10 are both cylindrical. The shape and size of the inner housing 20 and the outer housing 10 may be set according to actual circumstances. The closed end of the inner shell 20 is provided with an air pumping port 22, and the air pumping port 22 is communicated with a vacuum pump. There is a gap between the outer wall of the inner housing 20 and the inner wall of the outer housing 10, and the vacuum pump can completely pump out the gas in the inner housing 20 and the outer housing 10.

In some embodiments, the second pipeline 30 passes through the wall surface of the outer shell 10, enters the gap between the outer shell 10 and the inner shell 20, and communicates the air outlet of the second pipeline 30 with the air inlet of the second air flow passage 21 of the inner shell 20.

The closing door 40 serves to selectively close the opening of the outer case 10. The shower plate 50 is provided on the closing door 40. The shower plate 50 has an air inlet and shower holes 51. When the closing door 40 closes the opening of the outer housing 10, the spray plate 50 closes the opening of the inner housing 20 and the air inlet of the spray plate 50 is communicated with the air outlet of the second air flow passage 21. In some embodiments, when the closing door 40 is opened, the inner housing 20 and the outer housing 10 communicate with the outside, and a user can repair devices inside the inner housing 20 and the outer housing 10 or place a product inside the inner housing 20 or the outer housing 10 through the openings of the outer housing 10 and the inner housing 20. When the closing door 40 is closed, the outer case 10 is simultaneously sealed from the outside with the inner case 20. The structure and shape of the shower plate 50 may be set according to actual circumstances. In this embodiment, the shower plate 50 has the same size and shape as the open end surface of the inner housing 20. The size of the gas inlet of the shower plate 50 is the same as that of the gas outlet of the second gas flow path 21. When the closing door 40 is closed, the shower plate 50 is attached to the open end surface of the inner case 20. The gas inlet of the spray plate 50 is directly butted with the gas outlet of the second gas channel 21, so that the spray plate 50 is communicated with the second pipeline 30, and the gas in the second pipeline 30 enters the inner shell 20 through the spray holes 51. When the closing door 40 is opened, the gas inlet of the shower plate 50 is separated from the gas outlet of the second gas flow passage 21, and the shower plate 50 is disconnected from the second pipeline 30.

In some embodiments, the filming apparatus includes a connecting shaft and a spring. Wherein at least one of the shower plate 50 and the closing door 40 is provided with a sliding hole/groove in which at least one end of the connecting shaft can slide. The spring is sleeved on the connecting shaft and is positioned between the spraying plate 50 and the closing door 40. The shower plate 50 is elastically connected to the closing door 40 by a connecting shaft and a spring and the interval can be changed.

In some embodiments, the connecting shaft and the spring are made of a high temperature resistant material. The closing door 40 is provided with a sliding groove. One end of the connecting shaft slides in the sliding groove, and the other end is connected with the spray plate 50. The connecting shaft adjusts the distance between the shower plate 50 and the closing door 40 by sliding. After the closing door 40 is closed, the interval between the spraying plate 50 and the closing door 40 becomes small, and the spring between the spraying plate 50 and the closing door 40 extrudes the spraying plate 50, so that the spraying plate 50 is attached to the opening end face of the inner shell 20 more tightly, and the sealing effect is guaranteed. In some embodiments, both the closure door 40 and the shower plate 50 are provided with sliding holes. The connecting shaft can slide within the sliding hole to enable the spacing between the closure door 40 and the shower plate 50 to be varied.

In some embodiments, the coating apparatus includes a carrier 60. Carrier 60 is located inside inner housing 20 for carrying products, and there is a gap between carrier 60 and inner housing 20. The gas outlet of the first gas flow channel is used for inputting gas into the gap between the inner housing 20 and the carrier 60 to prevent the gas output from the spraying holes 51 from flowing into the gap between the inner housing 20 and the carrier 60.

In some embodiments, carrier 60 is fixedly disposed within inner housing 20. A plurality of products may be placed on a single carrier 60. When the closure door 40 is opened, products enter through the opening of the inner housing 20 and are placed on the carrier 60. In some embodiments, carrier 60 is removably disposed within inner housing 20. Different carriers 60 may be replaced according to different products.

In some embodiments, the shower plate 50 outputs gas toward the carrier 60, and the gas output from the shower plate 50 is diffused into the gap between the inner housing 20 and the carrier 60, which results in waste of resources. The gas input from the gas outlet of the first gas flow channel blocks the gas output from the spray holes 51 from flowing into the gap between the inner shell 20 and the carrier 60, so that the gas output from the spray holes 51 acts on the product on the carrier 60, and the resource is saved.

In some embodiments, the gas outlet of the first gas flow passage is disposed around the sidewall of the inner housing 20 and adjacent to the open end surface of the inner housing 20. For example, there is a gap between the periphery of the carrier 60 and the inner housing 20, and the gas outlet of the first gas flow channel surrounds the carrier 60 and is disposed on the sidewall of the inner housing 20, so that the gas blown out from the gas outlet of the first gas flow channel can completely cover the periphery of the carrier 60.

In some embodiments, the gas output from the first gas flow path forms a gas curtain towards the gas input into the inner housing 20. In some embodiments, the vacuum pump operates at all times to draw gas from within the inner housing 20. Meanwhile, the gas is continuously blown out from the gas outlet of the first gas flow passage, and the flow rate of the gas is high, so that a gas curtain is formed. The air curtain is equivalent to an air flow barrier, surrounds around the carrier 60, plugs the gap between the carrier 60 and the inner shell 20, so that the gas output by the spraying holes 51 can not flow into the gap between the carrier 60 and the inner shell 20 and only can flow into the carrier 60, and resource waste caused by the gas flowing into the gap between the carrier 60 and the inner shell 20 is avoided.

In some embodiments, the second conduit 30 includes two branches, which are located on the same side of the carrier 60. Two second gas channels 21 are provided, and the gas inlets of the two second gas channels are located on the same side of the carrier 60 and are in one-to-one correspondence with the two branches. Illustratively, the gas outlets of the two second gas channels 21 are located on the same side of the carrier 60, and are symmetrically arranged with respect to the carrier 60. The gas outlets of the two branches are in butt joint with the gas inlet of the second gas flow passage 21. The two branches are also located on the same side of the carrier 60 and are symmetrically disposed with respect to the carrier 60, so that the gas in the second pipeline 30 can flow out of the two second gas channels 21 simultaneously.

In some embodiments, there are two second conduits 30, each located on opposite sides of carrier 60. The number of the second gas flow channels 21 is four, and the second gas flow channels are communicated with the branches of the two second pipelines 30 in a one-to-one correspondence manner. The two second lines 30 are connected to different gas sources. In some embodiments, the coating apparatus coats the product using Atomic Layer Deposition (ALD) techniques. Atomic layer deposition techniques introduce two or more chemical gas precursors separately into a reaction chamber such that each precursor undergoes a substantially saturated surface chemical reaction on the substrate surface. The atomic layer deposition technology can plate substances on the surface of a substrate in a monoatomic film mode, and accurately control the thickness and uniformity of a deposited film within the thickness range of an atomic layer. In order to allow two different gases to be conducted separately, there are therefore two second lines 30. Of course, in other embodiments, a plurality of second gas channels 21 may be provided according to actual conditions, and a plurality of second pipelines 30 are correspondingly provided to separately conduct a plurality of different gases.

As shown in fig. 3, in some embodiments, the shower plate 50 has two air inlet pipes (not shown) inside, and one air inlet pipe has two air inlets. The four air inlets are respectively positioned at four corners of the shower plate 50. The air inlet pipeline is communicated with the two second air flow channels 21 in a one-to-one correspondence manner through an air inlet. The shower plate 50 also has an outlet duct (not shown) communicating with the inlet duct, and the shower holes 51 are provided in the outlet duct. The flow direction of the gas in the gas outlet pipeline is vertical to the direction of the gas output from the spraying holes 51. The gas of the gas inlet pipe is introduced into the inner case 20 through the shower holes 51. In some embodiments, the number of the spraying holes 51 is multiple, and the aperture size and the distance between the spraying holes 51 can be adjusted, so that the flow rate of the gas ejected from each spraying hole 51 is the same, and the gas is distributed and distributed uniformly in the inner cavity.

In some embodiments, the products are placed vertically on carriers 60. The product is parallel to the flow direction of the gas output from the shower holes 51. In some embodiments, the product is a substrate. Carrier 60 is disposed radially of inner housing 20. The products are vertically placed on the carriers 60 such that the products are parallel to the axial direction of the inner housing 20. The shower holes 51 output the gas in the axial direction of the inner housing 20 such that the products are parallel to the flow direction of the gas output from the shower holes 51.

In some embodiments, the spray holes 51 have a spray range that is the same size as the shape of the vertical projection of the carrier 60 on the spray plate 50. For example, to avoid the spray range of the spray holes 51 from being too large, the gas flows through the area outside the carrier 60, which results in waste of resources. The range of the spray holes 51 is the same as the shape of the carrier 60 so that the gas sprayed from the spray holes 51 flows only through the carrier 60.

In some embodiments, the coating apparatus includes a third conduit 36. The outlet of the third pipeline 36 is located on the outer shell 10, and is used for inputting gas into the gap between the inner shell 20 and the outer shell 10. In some embodiments, after the closing door 40 is closed, the vacuum pump completely pumps the air in the inner housing 20 and the outer housing 10, so that the inner housing 20 and the outer housing 10 are in a vacuum state. The third pipeline 36 inputs air into the gap between the inner shell 20 and the outer shell 10, so that the air pressure in the gap between the inner shell 20 and the outer shell 10 is greater than the air pressure in the inner shell 20. The gas input to the third line 36 may be nitrogen. When the air pressure in the gap between the shell and the outer shell 10 is greater than the air pressure in the inner shell 20, the air sprayed from the spraying plate 50 flows into the inner shell 20 with lower air pressure, so that the air is effectively prevented from diffusing into the gap between the inner shell 20 and the outer shell 10, and the utilization rate of resources is improved. The number and position of the air outlets of the third pipeline 36 can be set according to actual conditions.

In some embodiments, the first conduit 35 inputs the same gas as the third conduit 36, but adjusts the concentration of the gas such that the gas pressure in the gap between the inner housing 20 and the outer housing 10 is greater than the gas pressure inside the inner housing 20.

In some embodiments of the present application, the first gas flow channel has two gas outlets, which are respectively located on the outer side wall and the inner side wall of the inner housing 20, and are used for inputting gas into the gap between the inner housing 20 and the outer housing 10 and inputting gas into the inner housing 20. Specifically, a control valve may be installed on the first gas flow passage, and the flow rates of the gas output from the two gas outlets are respectively adjusted, so that the gas pressure in the gap between the outer shell 10 and the inner shell 20 is greater than the gas pressure in the inner shell 20. In this way, the structure of the coating equipment can be simplified, and the third pipeline 36 is not additionally arranged.

As shown in FIG. 2, in some embodiments, the coating apparatus includes an extrusion 80. The pressing member 80 serves to fix the relative positions of the inner case 20 and the outer case 10. In some embodiments, the number of the pressing members 80 is three, and they respectively act on the upper side and both sides of the inner housing 20, so that the inner housing 20 is stably placed in the outer housing 10. The pressing member 80 is a screw rod with adjustable length, and the size of the pressing force of the pressing member 80 on the inner housing 20 is controlled by adjusting the length of the pressing member 80, so that the inner housing 20 and the outer housing 10 can be separated from each other or kept fixed.

In some embodiments, the coating apparatus includes a valve 70. The first, second and

third pipelines

35, 30 and 36 are respectively provided with a valve 70 for controlling the opening and closing of the first, second and

third pipelines

35, 30 and 36. The valves 70 in the first line 35, the second line 30, and the third line 36 may be the same or different. The valve 70 may also adjust the flow rate of the gas output from the pipe, thereby controlling the thickness of the film deposited on the product or the number of atomic layers. When the product is coated, the valve 70 controls the second pipeline 30 to open and close, so that the spraying plate 50 alternately outputs the gas in the two second pipelines 30 and acts on the product on the carrier 60.

In some embodiments, carrier 60 is an aluminum boat, which is hexahedral in shape. The face of carrier 60 facing the interior cavity opening and the top face of carrier 60 are open. To prevent gases from being introduced by shower plate 50 from escaping from the top surface of carrier 60, a cover plate is placed on the top surface of carrier 60.

The above description is only an embodiment of the present application, and is not intended to limit the scope of the present application, and all equivalent structures or equivalent processes performed by the present application and the contents of the attached drawings, which are directly or indirectly applied to other related technical fields, are also included in the scope of the present application.

Claims

1. A plating apparatus, characterized by comprising:

the gas outlet of the first gas flow channel is positioned on the side wall of the inner shell and used for outputting gas into the inner shell through the gas outlet of the first gas flow channel;

and the spraying holes of the spraying plate output gas into the inner shell.

2. The plating apparatus according to claim 1,

the air outlet of the first air flow passage is arranged on the side wall of the inner shell in a surrounding mode and is close to the opening end face of the inner shell.

3. The plating device according to claim 2,

and the gas output from the gas outlet of the first gas flow channel to the inner shell forms a gas curtain.

4. The plating device according to claim 1,

the inner shell is internally provided with a second gas flow passage, the gas inlet of the second gas flow passage is positioned on the side wall of the inner shell, and the gas outlet of the second gas flow passage is positioned on the opening end face of the inner shell.

5. The plating apparatus according to claim 1, comprising:

the gas outlet of the first pipeline is communicated with the gas inlet of the first gas flow passage;

and the gas outlet of the second pipeline is communicated with the gas inlet of the second gas flow channel.

6. The plating apparatus according to claim 4, comprising:

an outer housing having an opening at one end;

the inner shell is arranged inside the outer shell, and the opening of the inner shell and the opening of the outer shell are positioned on the same side;

a closing door for selectively closing the opening of the outer case;

wherein, the shower plate set up in on the closed door, the shower plate has the air inlet, the closed door closure during the opening of shell body, the shower plate closure the opening of interior casing just the air inlet of shower plate with the gas outlet intercommunication of second gas channel.

7. The plating apparatus according to claim 6, comprising:

the carrier is positioned in the inner shell and used for carrying products, and a gap is formed between the carrier and the inner shell;

the gas outlet of the first gas flow passage is used for inputting gas into the gap between the inner shell and the carrier so as to prevent the gas output by the spraying hole from flowing into the gap between the inner shell and the carrier.

8. The plating device according to claim 7,

the second pipeline comprises two branches, and the two branches are positioned on the same side of the carrier;

the number of the second gas flow channels is two, and the gas inlets of the two second gas flow channels are located on the same side of the carrier and are communicated with the two branch circuits in a one-to-one correspondence mode.

9. The plating device according to claim 8,

the two second pipelines are respectively positioned at two opposite sides of the carrier;

the number of the second gas flow channels is four, and the second gas flow channels are communicated with the branches of the two first pipelines in a one-to-one correspondence manner;

the two second pipelines are connected with different gas sources.

10. The plating apparatus according to claim 9,

the product is vertically placed on the carrier, and the product is parallel to the flowing direction of the gas output from the spraying holes.

11. The plating device according to claim 10,

the spraying range of the spraying holes is the same as the shape and size of the vertical projection of the carrier on the spraying plate.

12. The plating apparatus according to claim 6, comprising:

and the gas outlet of the third pipeline is positioned on the outer shell and used for inputting gas into the gap between the inner shell and the outer shell.

13. The plating device according to claim 6,

the first gas flow channel is provided with two gas outlets which are respectively positioned on the outer side wall and the inner side wall of the inner shell and used for inputting gas into the gap between the inner shell and the outer shell and inputting gas into the inner shell.

14. The plating apparatus according to claim 6, comprising:

a pressing member for fixing a relative position of the inner case and the outer case.

15. The plating apparatus according to claim 11, comprising:

a connecting shaft and a spring;

at least one of the spraying plate and the closed door is provided with a sliding hole/groove, at least one end of the connecting shaft can slide in the sliding hole/groove, the spring is sleeved on the connecting shaft and is positioned between the spraying plate and the closed door, and the spraying plate and the closed door are elastically connected through the connecting shaft and the spring, and the distance between the spraying plate and the closed door can be changed.

16. The plating apparatus according to claim 12, comprising:

a valve;

the first pipeline, the second pipeline and the third pipeline are respectively provided with the valve for respectively controlling the opening and closing of the first pipeline, the second pipeline and the third pipeline.