CN115307686A - Stress-strain bimodal identifiable flexible sensor and preparation method and application thereof - Google Patents
Stress-strain bimodal identifiable flexible sensor and preparation method and application thereof Download PDFInfo
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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Abstract
The invention discloses a stress-strain bimodal recognizable flexible sensor and a preparation method and application thereof. The sensor comprises a strain sensor, a pressure sensor and a lead, wherein the strain sensor comprises an elastic high-dielectric composite material film and a gear shaping electrode; the pressure sensor comprises an elastic composite material film and an elastic back electrode, the elastic composite material film comprises a pyramid array material and an elastic matrix, the elastic modulus of the elastic matrix is greater than that of the pyramid array material, the pyramid array material is arranged on the surface of the elastic matrix and is positioned below the elastic high-dielectric composite material film, and the elastic back electrode is arranged on the surface of one side, far away from the pyramid array material, of the elastic matrix; the leads are respectively connected with the two ends of the gear shaping electrode and the elastic back electrode. The sensor can respectively detect pressure and strain performance, simultaneously realize decoupling identification of two detection signals, and quantitatively calculate the magnitude of strain and pressure borne by the matrix in composite deformation.
Description
Technical Field
The invention belongs to the field of multi-modal flexible sensing devices, and particularly relates to a stress-strain bimodal identifiable flexible sensor and a preparation method and application thereof.
Background
Along with the development of human life towards the direction of portability and intellectualization, the flexible wearable electronic equipment brings great convenience to the life of people, and the flexible electronic equipment is a hotspot of research in recent years. The flexible sensing device is widely applied to various intelligent fields as an information acquisition assembly, such as intelligent sensing of robots and artificial limbs, human motion and health monitoring, mechanical structure deformation monitoring and the like. In the field of robot research, the interaction between the robot and human and the external environment is taken as the key point of the technical attack, so that the flexible distributed sensing system with good touch feeling becomes the best choice for the electronic skin of the robot. The application of the traditional industrial sensor in the aspect of distributed sensing of the robot is greatly limited due to the hard material and the non-deformability of the traditional industrial sensor, and the multi-mode flexible sensing device is the key for developing a distributed sensing system of the robot. The sensor can realize that the robot perceives dynamics and temperature when interacting with the environment to gas in the discernment environment, contact multiple signals such as object's chemical information. Meanwhile, the robot can monitor information such as human pulse signals, muscle deformation, vocal cord vibration and the like through the sensor, so that the health monitoring of the human body and the simulation learning of human body movement, speaking and the like are realized. The artificial limb achieves a part of sensing functions of the human body by means of sensing the electronic skin, achieves good coordination with the biological tissues of the human body, and even gives more sensing functions beyond the human body, such as identification of chemical, gas and micro-stimulation, and helps to make appropriate stress response. By constructing the multi-modal perception of the robot surface, the development of intelligent robots, human-computer interaction, virtual reality, health medical treatment and the like is remarkably promoted.
The research of the flexible multi-modal sensor mainly depends on the flexible functional materials and the structural design of the multifunctional device. The elastic conductive material and the dielectric material are key materials for preparing the flexible sensor, wherein the elastic dielectric material has remarkable advantages in the aspects of sensor performance and functional design due to the insulating property and the charge accumulation performance of the elastic dielectric material, and can remarkably improve the signal-to-noise ratio, the sensitivity and the like of the sensor. The mechanical property of the material directly determines the application performance of the flexible device, and the elongation and the elastic property of the elastic material have obvious influence on the deformation range and the response rate of the flexible electronic device. The high dielectricity of the elastic dielectric material is beneficial to obviously improving the signal-to-noise ratio and the sensitivity of the capacitive strain sensor, and the detection of micro stress and strain can be realized; meanwhile, the mechanical flexibility of the material directly determines the response time, the cycle performance and the adaptability to different matrixes and environments of the strain sensor. The traditional commercial polymer material has excellent deformability, but the dielectric constant is low, and the signal-to-noise ratio of the prepared sensor is low; the ceramic material has high dielectric constant and extremely high modulus, cannot deform freely, is difficult to match the deformation requirements of a plurality of devices, and restricts the application of the ceramic material in flexible electronic devices.
Disclosure of Invention
The present invention is directed to solving, at least in part, one of the technical problems in the related art. To this end, an object of the present invention is to propose a stress-strain bimodal identifiable flexible sensor, a method for its production and its use. The flexible sensor can respectively detect pressure and strain performance, simultaneously realize decoupling identification of two detection signals, and quantitatively calculate the magnitude of strain and pressure borne by the matrix in composite deformation, thereby laying a foundation for the application of the flexible sensor in the field of flexible electronic devices.
In one aspect of the invention, the invention provides a stress-strain bimodal identifiable flexible sensor. According to an embodiment of the invention, the sensor comprises:
the strain sensor comprises an elastic high-dielectric composite material film and a gear shaping electrode, wherein the gear shaping electrode is arranged on the surface of the elastic high-dielectric composite material film;
the pressure sensor comprises an elastic composite material film and an elastic back electrode, the elastic composite material film comprises a pyramid array material and an elastic matrix, the elastic modulus of the elastic matrix is greater than that of the pyramid array material, the pyramid array material is arranged on the surface of the elastic matrix and is positioned below the elastic high-dielectric composite material film, and the elastic back electrode is arranged on the surface of one side, far away from the pyramid array material, of the elastic matrix;
the lead wire, the lead wire includes first lead wire, second lead wire and third lead wire, first lead wire with the second lead wire respectively with the both ends of gear shaping electrode link to each other, the third lead wire with the elasticity back of the body electrode links to each other.
According to the stress-strain bimodal identifiable flexible sensor provided by the embodiment of the invention, the gear shaping electrode is arranged on the surface of the elastic high-dielectric composite material film to form the strain sensor, the gear shaping electrode and the elastic high-dielectric composite material film enable the strain sensor to have high initial capacitance, and high signal-to-noise ratio and excellent sensitivity of the strain sensor are realized; the elastic composite material film and the elastic back electrode form the pressure sensor, wherein the elastic composite material film comprises an elastic base body and a pyramid array material arranged on the surface of the elastic base body, specifically, the pyramid array material deforms under the action of pressure and conforms to Hooke's law, and the deformation amount of the pyramid array material is in direct proportion to the pressure, so that the applied pressure can be calculated through the change of capacitance signals caused by the deformation of the pyramid array material, meanwhile, the elastic modulus of the elastic base body is larger than that of the pyramid array material, so that the elastic composite material film has a gradient modulus structure, the transverse deformation of the elastic composite material film with the gradient modulus structure is smaller under tensile strain, the compression amount of the pyramid array material caused by the tensile action is smaller, the response of the pressure sensor to the tensile strain is smaller, and can be ignored compared with the pressure response, so that the pressure sensor is insensitive to the tensile force and has a good decoupling and recognition function on the pressure signals. Therefore, the flexible sensor composed of the strain sensor, the pressure sensor and the lead can respectively detect pressure and strain performance, realize decoupling identification of two detection signals, and quantitatively calculate the magnitude of strain and pressure borne by the matrix in composite deformation, thereby laying a foundation for the application of the flexible sensor in the field of flexible electronic devices.
In addition, the stress-strain bimodal identifiable flexible sensor according to the above embodiment of the invention may further have the following technical features:
in some embodiments of the present invention, the elastic high dielectric composite film comprises a nano ceramic-based elastic composite film and a nano conductive-based elastic composite film which are arranged in a lamination manner, and the uppermost layer of the elastic high dielectric composite film is the nano ceramic-based elastic composite film, wherein the nano ceramic-based elastic composite film comprises a nano ceramic material and an elastic polymer material, and the nano ceramic material is distributed in a three-dimensional network structure in the elastic polymer material; the nano conductive-based elastic composite film comprises a nano conductive material and an elastic polymer material, wherein the nano conductive material is distributed in the elastic polymer material in a three-dimensional network structure. This can improve the function of identifying the strain signal by the strain sensor.
In some embodiments of the invention, the gear shaping electrode comprises an elastic polymeric material and a nano-conductive material. Thereby, an elastic conductive gear shaping electrode can be obtained.
In some embodiments of the invention, the material of the elastic back electrode comprises an elastic polymer material and a nano-conductive material.
In some embodiments of the invention, the elastomeric polymeric material comprises at least one of polyurethane and styrene-ethylene-butylene-styrene block copolymer.
In some embodiments of the present invention, the nano-ceramic material comprises at least one of barium titanate nanoparticles, barium titanate nanorods, barium zirconate titanate nanoparticles, barium zirconate titanate nanorods, lead zirconate titanate nanoparticles, and lead zirconate titanate nanorods.
In some embodiments of the present invention, the nano-conductive material comprises at least one of silver nanoparticles, silver nanowires, carbon nanotubes, and graphene.
In some embodiments of the present invention, the elastic high dielectric composite film has a thickness of 10 to 100 μm. Therefore, the function of identifying the strain signal by the flexible sensor can be improved.
In some embodiments of the invention, the thickness of the gear shaping electrode is 10-40 μm. Therefore, the function of identifying the strain signal by the flexible sensor can be improved.
In some embodiments of the invention, the height of the pyramid array material is 10-50 μm and the thickness of the elastomeric matrix is 10-50 μm. Therefore, the function of the flexible sensor for identifying the pressure signal can be improved.
In some embodiments of the invention, the thickness of the elastic back electrode is 10-40 μm. Therefore, the function of the flexible sensor for identifying the pressure signal can be improved.
In some embodiments of the invention, the pyramid array material has a modulus of elasticity of 0.1 to 0.8MPa and the elastic matrix has a modulus of elasticity of 2.0 to 4.5MPa. Therefore, the function of the flexible sensor for identifying the pressure signal can be improved.
In some embodiments of the present invention, the pyramid array material comprises at least one of polydimethylsiloxane and an aliphatic aromatic copolyester.
In some embodiments of the invention, the elastomeric matrix comprises polyurethane, nanomaterial, and carbon fiber, wherein the nanomaterial comprises at least one of barium carbonate and barium zirconate titanate.
In some embodiments of the invention, the poisson's ratio of the elastomeric matrix is less than the poisson's ratio of the pyramidal array material. Therefore, the function of the flexible sensor for identifying the pressure signal can be improved.
In some embodiments of the invention, the elastic matrix has a poisson's ratio of 0.15 to 0.3. Therefore, the function of the flexible sensor for identifying the pressure signal can be improved.
In some embodiments of the invention, the poisson's ratio of the pyramidal array material is 0.4-0.5. Therefore, the function of the flexible sensor for identifying the pressure signal can be improved.
In some embodiments of the invention, the density of pyramids in the pyramid array material is 400-2500 pyramids/mm 2 . Therefore, the function of the flexible sensor for identifying the pressure signal can be improved.
In yet another aspect of the invention, the invention provides a method of making the above-described stress-strain bimodal identifiable flexible sensor. According to an embodiment of the invention, the method comprises:
(1) Arranging a gear shaping electrode on the upper surface of the elastic high-dielectric composite material film so as to obtain a strain sensor;
(2) Combining an elastic back electrode on the back of an elastic composite material film so as to obtain a pressure sensor, wherein the elastic composite material film comprises a pyramid array material and an elastic matrix, the elastic modulus of the elastic matrix is greater than that of the pyramid array material, and the pyramid array material is arranged on the surface of the elastic matrix;
(3) And adhering the strain sensor on the upper surface of the pressure sensor, wherein the pyramid array material of the pressure sensor is in contact with the elastic high dielectric composite material film of the strain sensor, and leads are respectively connected to the gear shaping electrode and the elastic back electrode so as to obtain the flexible sensor.
Therefore, the flexible sensor capable of respectively detecting pressure and strain performance, decoupling and identifying two detection signals and quantitatively calculating the strain and pressure borne by the matrix in the composite deformation can be prepared by adopting the method.
In a third aspect of the invention, a robot is provided. According to an embodiment of the invention, the robot comprises the above-mentioned flexible sensor or the flexible sensor obtained by the above-mentioned method. Therefore, the robot has remarkable advantages in the aspects of movement, deformation modes and recognition of the grabbed objects.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a block diagram of a stress-strain bimodal identifiable flexible sensor of an embodiment of the present invention;
FIG. 2 is a microstructure view of an elastic high dielectric composite film according to an embodiment of the present invention;
FIG. 3 is a microstructure view of an elastic composite film according to an embodiment of the present invention;
FIG. 4 is a response sensitivity curve for a stress-strain bimodal identifiable flexible sensor to tensile strain for example 1 of the present invention;
FIG. 5 is a response sensitivity curve of the stress-strain bimodal identifiable flexible sensor of example 1 of the present invention to pressure.
Detailed Description
The following detailed description of the embodiments of the present invention is intended to be illustrative, and not to be construed as limiting the invention.
In one aspect of the invention, a stress-strain bimodal identifiable flexible sensor is presented. According to an embodiment of the present invention, referring to fig. 1, the sensor includes a strain sensor 100, a pressure sensor 200, and a lead (not shown).
In accordance with an embodiment of the present invention, referring to FIG. 1, a strain sensor 100 includes an elastic high dielectric composite film 20 and a gear shaping electrode 10, the gear shaping electrode 10 being disposed on a surface of the elastic high dielectric composite film 20. The gear shaping electrode 10 and the elastic high dielectric composite material film 20 enable the strain sensor 100 to have high initial capacitance, and high signal-to-noise ratio and excellent sensitivity of the strain sensor 100 are achieved, meanwhile, based on the compact film structure of the gear shaping electrode 10 and the elastic high dielectric composite material, the strain sensor 100 is enabled to be extremely low in detection sensitivity of pressure signals and far smaller than the strain detection sensitivity, and therefore the strain sensor 100 can achieve real-time detection of tensile strain, influence of the pressure signals is avoided, and therefore the function of identifying the strain signals is achieved.
According to an embodiment of the present invention, the elastic high dielectric composite film 20 includes a nano ceramic-based elastic composite film and a nano conductive-based elastic composite film which are stacked, and the uppermost layer of the elastic high dielectric composite film is the nano ceramic-based elastic composite film, wherein the nano ceramic-based elastic composite film includes a nano ceramic material and an elastic polymer material, and the nano ceramic material is distributed in a three-dimensional network structure in the elastic polymer material; the nano conductive elastic composite film comprises a nano conductive material and an elastic polymer material, wherein the nano conductive material is distributed in the elastic polymer material in a three-dimensional network structure. The nano ceramic material and the nano conductive material respectively form a three-dimensional network structure in the elastic polymer material, and the nano ceramic-based elastic composite film and the nano conductive material-based elastic composite film with different conductivities are laminated and assembled to construct a composite dielectric material model with a multilevel interface and an internal electric field regulation effect, so that the interface polarization effect and the internal electric field regulation effect of the composite material are enhanced. As can be seen from fig. 2, the elastic high-dielectric composite material film 20 is composed of five layers of films, a compact structure is formed between each layer of film, and no layering occurs, so that an integrated structure of the elastic high-dielectric composite material film is ensured, and excellent mechanical properties are favorably realized. Therefore, the elastic high-dielectric composite material film with the structure can improve the identification function of the strain sensor on the strain signal.
It should be noted that, for the method for preparing the elastic high dielectric composite material film, the conventional electrostatic spinning method and electrostatic spraying method in the art are adopted, for example, a double-pushing injection electrostatic spinning apparatus is adopted, one end of the apparatus spins the elastic polymer matrix material solution, the other end of the apparatus synchronously electrostatically sprays the nano ceramic material dispersion liquid, a receiving roller synchronously receives the electrostatic spun elastic fiber and the electrostatically sprayed nano ceramic material, the solvent is rapidly volatilized in the process, so as to obtain the nano ceramic-based elastic fiber film, or the double-pushing injection electrostatic spinning apparatus is adopted, one end of the apparatus spins the elastic polymer matrix material solution, the other end of the apparatus synchronously electrostatically sprays the nano conductive material dispersion liquid, the receiving roller synchronously receives the electrostatic spun elastic fiber and the electrostatically sprayed nano conductive material, and the solvent is rapidly volatilized in the process, so as to obtain the nano conductive material based elastic fiber film.
According to the embodiment of the invention, the thickness of the elastic high-dielectric composite material film is 10-100 μm. The inventors have found that if the elastic high dielectric composite material film is too thick, the tensile strength of the film increases, the free deformation of the film substrate is limited, and the strain sensor is easily affected by pressure; if the elastic high dielectric composite material film is too thin, the mechanical resistance of the film is deteriorated, and the film is easily damaged in the deformation process. Therefore, the elastic high-dielectric composite material film with the thickness of 10-100 mu m can improve the identification function of the flexible sensor on the strain signal.
In accordance with an embodiment of the present invention, referring to fig. 1, the gear shaping electrode 10 includes an elastic polymer material and a nano-conductive material. Thereby, an elastic conductive gear shaping electrode can be obtained. The method for manufacturing the gear-shaping electrode 10 is a conventional method, for example, an elastic conductive film is first manufactured from an elastic polymer material and a nano conductive material, and the conductivity of the elastic conductive film is 1000s × cm -1 And cutting the elastic conductive film into the electrode with the gear shaping structure by adopting a laser cutting method, wherein the cutting power of the laser cutting machine is adjusted to be about 0.5W.
It will be understood by those skilled in the art that the above-described elastic polymer material, nanoceramic material and nanoconducting material are conventional in the art and may be selected by those skilled in the art according to the practice, for example, the elastic polymer material includes but is not limited to at least one of polyurethane and styrene-ethylene-butylene-styrene block copolymer; the nano ceramic material includes, but is not limited to, at least one of barium titanate nanoparticles, barium titanate nanorods, barium zirconate titanate nanoparticles, barium zirconate titanate nanorods, lead zirconate titanate nanoparticles, and lead zirconate titanate nanorods; the nano conductive material includes, but is not limited to, at least one of silver nanoparticles, silver nanowires, carbon nanotubes, and graphene.
According to an embodiment of the invention, the thickness of the gear shaping electrode is 10-40 μm. The inventor finds that if the gear shaping electrode is too thick, the deformation synergy of the gear shaping electrode and the elastic high-dielectric composite material film is poor, so that different components are mutually restricted when the sensor deforms; if the gear shaping electrode is too thin, the deformation stability of the gear shaping electrode is poor. Therefore, by adopting the gear shaping electrode with the thickness of 10-40 mu m, the identification function of the flexible sensor on the strain signal can be improved. It should be noted that, those skilled in the art can select the distance between the teeth of the gear shaping electrode, the tooth shaping length, and the number of teeth according to actual conditions, for example, the width between the teeth of the gear shaping electrode used in the present application is 0.2 to 5mm, the tooth shaping length is 10 to 30mm, and the number of teeth is 6 to 30.
According to an embodiment of the present invention, referring to fig. 1 and 3, the pressure sensor 200 includes an elastic composite film 30 and an elastic back electrode 40, the elastic composite film 30 includes a pyramid array material 32 and an elastic matrix 31, an elastic modulus of the elastic matrix 31 is greater than an elastic modulus of the pyramid array material 32, the pyramid array material 32 is disposed on a surface of the elastic matrix 31 and below the elastic high dielectric composite film 20, and the elastic back electrode 40 is disposed on a side surface of the elastic matrix 31 away from the pyramid array material 32. The elastic composite material film 30 and the elastic back electrode 40 form the pressure sensor 200, wherein the elastic composite material film 30 includes an elastic base 31 and a pyramid array material 32 arranged on the surface of the elastic base, specifically, the pyramid array material 32 deforms under the action of pressure and complies with hooke's law, and the deformation amount of the pyramid array material 32 is in direct proportion to the pressure, so that the applied pressure can be calculated through the change of a capacitance signal caused by the deformation of the pyramid array material 32, meanwhile, because the elastic modulus of the elastic base 31 is greater than that of the pyramid array material 32, the elastic composite material film 30 has a gradient modulus structure, while the elastic composite material film 30 with the gradient modulus structure transversely deforms less under tensile strain, and the compression amount of the pyramid array material 32 caused by the tensile action is smaller, so that the pressure sensor 200 has a smaller response to the tensile strain and can be ignored compared with the pressure response, and therefore, the pressure sensor 200 is not sensitive to the tensile strain and has a good decoupling and recognition function to the pressure signal.
According to the embodiment of the invention, the height of the pyramid array material is 10-50 μm, and the thickness of the elastic matrix is 10-50 μm. The inventor finds that if the height of the pyramid array material is less than 10 μm, the pyramid array is difficult to exert the effect in the sensor, and the sensitivity of the sensor is difficult to improve; if the height of the pyramid array material is greater than 50 μm, the number of pyramids in a unit area is obviously reduced, and the sensor cannot detect a tiny pressure signal; if the thickness of the elastic matrix is less than 10 μm, the deformation stability of the elastic matrix is significantly reduced, and the deformation amount is significant under a small tensile strain; if the thickness of the elastic base exceeds 50 μm, the tensile strength of the elastic base increases, and the deformation of the elastic base is restricted. Therefore, the pyramid array material with the height of 10-50 mu m and the elastic matrix with the thickness of 10-50 mu m are adopted, so that the function of the flexible sensor for identifying the pressure signal can be improved.
According to the embodiment of the invention, the elastic modulus of the pyramid array material is 0.1-0.8MPa, and the elastic modulus of the elastic matrix is 2.0-4.5MPa. Further, the poisson ratio of the elastic matrix is smaller than that of the pyramid array material, specifically, the poisson ratio of the pyramid array material is 0.4-0.5, and the poisson ratio of the elastic matrix is 0.15-0.3. Therefore, the function of the flexible sensor for identifying the pressure signal can be improved. It will be understood by those skilled in the art that within the above ranges of values of the elastic modulus and poisson's ratio, the selection of the pyramid array material and the specific type of the elastic matrix can be made by those skilled in the art according to practical application, for example, the pyramid array material comprises at least one of polydimethylsiloxane and aliphatic aromatic copolyester; the elastomeric matrix includes polyurethane, a nanomaterial, and carbon fibers, wherein the nanomaterial includes at least one of barium carbonate and barium zirconate titanate.
According to the embodiment of the invention, the pyramid density in the pyramid array material is 400-2500 pieces/mm 2 . The inventor finds that if the density of the pyramids in the pyramid array material is too small, the sensor cannot detect a tiny pressure signal; if the pyramid density in the pyramid array material is too high, the sensor can detect the pyramidSensitivity is difficult to improve. Thus, the density of the alloy is 400-2500/mm 2 The pyramid array material can improve the identification function of the flexible sensor on pressure signals.
According to an embodiment of the invention the thickness of the flexible back electrode 40 is 10-40 μm. The inventors found that if the thickness of the elastic back electrode is less than 10 μm, the deformation stability of the elastic back electrode is weakened and it is difficult to accommodate a large deformation; if the thickness of the elastic back electrode is greater than 40 μm, the elastic back electrode does not cooperate with the deformation of other materials of the sensor, and the mutual influence is generated. Therefore, the elastic back electrode with the thickness of 10-40 mu m can improve the function of the flexible sensor for identifying the pressure signal. Further, the material of the elastic back electrode 40 includes an elastic polymer material and a nano conductive material. It should be noted that the elastic polymer material and the nano conductive material constituting the elastic back electrode 40 are the same as those of the gear shaping electrode 10, and are not described herein again.
According to the embodiment of the invention, the leads comprise a first lead, a second lead and a third lead, the first lead and the second lead are respectively connected with two ends of the gear shaping electrode, and the third lead is connected with the elastic back electrode. It should be noted that, a person skilled in the art may select a specific material of the lead according to actual needs, and details are not described herein.
Therefore, the flexible sensor composed of the strain sensor, the pressure sensor and the lead can respectively detect pressure and strain performance, realize decoupling identification of two detection signals, and quantitatively calculate the magnitude of strain and pressure borne by the matrix in composite deformation, thereby laying a foundation for the application of the flexible sensor in the field of flexible electronic devices.
In yet another aspect of the invention, the invention provides a method of making the above-described stress-strain bimodal identifiable flexible sensor. According to an embodiment of the invention, the method comprises:
s100: the upper surface of the elastic high-dielectric composite material film is provided with a gear shaping electrode
In the step, the gear shaping electrode is transferred to the elastic high-dielectric composite material film by adopting elastic silica gel, and the elastic high-dielectric composite material film is heated and cured in a constant-temperature oven to prepare the integrated tensile strain sensor.
S200: combining an elastic back electrode on the back of an elastic composite material film
In the step, the elastic composite material film comprises a pyramid array material and an elastic matrix, the elastic modulus of the elastic matrix is larger than that of the pyramid array material, the pyramid array material is arranged on the surface of the elastic matrix, specifically, a silicon template with an inverted pyramid array is prepared by adopting a micro-nano processing technology, then a low-modulus elastic material solution (comprising at least one of polydimethylsiloxane and aliphatic aromatic copolyester) is blade-coated on the silicon template, then a high-modulus elastic matrix (comprising at least one of polyurethane, a nano material and carbon fiber, wherein the nano material comprises at least one of barium carbonate and barium zirconate titanate) is attached to the back of the template, heating, curing and forming are carried out to form the elastic composite material film with the gradient modulus, and finally an elastic back electrode is combined to the back of the elastic composite material film to prepare the pressure sensor.
S300: adhering a strain sensor on the upper surface of the pressure sensor, and connecting leads on the gear shaping electrode and the elastic back electrode respectively
In the step, semi-cured silica gel is adopted to adhere the strain sensor to the upper surface of the pressure sensor, so that the pyramid array material of the pressure sensor is in contact with the elastic high-dielectric composite material film of the strain sensor, and leads are respectively connected to the gear shaping electrode and the elastic back electrode.
Therefore, the flexible sensor capable of respectively detecting pressure and strain performance, simultaneously realizing decoupling identification of two detection signals and quantitatively calculating the strain and pressure borne by the base body in the composite deformation can be prepared by adopting the method. It should be noted that the features and advantages described above for the stress-strain bimodal identifiable flexible sensor are also applicable to this method, and are not described here in detail.
In a third aspect of the invention, a robot is provided. According to an embodiment of the invention, the robot comprises the above-mentioned flexible sensor or the flexible sensor obtained by the above-mentioned method. Thereby, the machineThe robot shows remarkable advantages in the aspects of movement, deformation modes and recognition of the grabbed objects. It should be noted that, the robot uses a plurality of the above-mentioned flexible sensor integrated sensing arrays to decouple the distribution, magnitude and type of the analysis stress, for example, the sensor array point density of the array integrated sensor is 4-25/cm 2 Specifically, the sensor is loaded on a robot manipulator, the type of the object to be grabbed is analyzed and judged through decoupling test of pressure and strain model borne by the manipulator, or the sensor is loaded with a robot joint and fingers, the motion state of the robot can be analyzed through test signals, and the dynamic form change process during grabbing the object can be analyzed. It should be noted that the features and advantages described above for the stress-strain bimodal identifiable flexible sensor and the method of making the sensor are equally applicable to the robot and will not be described in detail here.
The invention will now be described with reference to specific examples, which are intended to be illustrative only and not to be limiting in any way.
Example 1
The stress-strain bimodal recognizable flexible sensor is prepared by the following specific steps:
(1) The gear shaping electrode is transferred to the elastic high-dielectric composite material film by adopting elastic silica gel, and the elastic high-dielectric composite material film is heated and cured in a constant-temperature oven at the curing temperature of 70 ℃ for 40 minutes to prepare the integrated tensile strain sensor. The gear shaping electrode is prepared by a method combining in-situ compounding and laser cutting, firstly, polyurethane and silver nanowires are prepared by the in-situ compounding method to obtain an elastic composite material film, the elastic composite material film is processed into the required gear shaping electrode by the laser cutting method, and the thickness of the prepared gear shaping electrode is 25 micrometers; secondly, respectively preparing a composite film (TPU-BTO) of a polyurethane material and barium titanate nanoparticles and a composite film (TPU-AgNW) of the polyurethane material and silver nanowires by adopting an in-situ compounding method, laminating and combining the prepared two films, and preparing a compact elastic high-dielectric composite material film by adopting hot pressing at the temperature of 140 ℃, wherein the thickness of the prepared elastic high-dielectric composite material film is 45 microns.
(2) Preparing a silicon template with an inverted pyramid array by adopting a micro-nano processing technology, then coating an elastic material solution with low modulus on the silicon template in a scraping way, attaching a high-modulus elastic matrix on the back surface of the template, heating, curing and forming at the heating temperature of 90 ℃ for 60 minutes to form an elastic composite material film with gradient modulus, and finally combining an elastic back electrode on the back surface of the elastic composite material film to prepare the pressure sensor. When the inverted pyramid silicon template is prepared, the size of the pyramid is regulated and controlled by controlling the size of the array points in the mask plate in the photoetching process, so that the height of the pyramid prepared by a wet method is limited, and the pyramid height is 37 mu m. In the process of transferring and copying the film, an elastic composite material with different modulus and Poisson ratio with the pyramid material is adopted as an elastic base material, the thickness of the elastic base is 30 micrometers, wherein the elastic modulus of the pyramid array material is 0.44MPa, and the Poisson ratio is 0.47; the elastic modulus of the elastic base material is 2.56MPa, and the Poisson ratio is 0.21; the pyramid density in the pyramid array material is 400 pieces/mm 2 . The elastic back electrode is prepared from polyurethane and silver nanowires by an in-situ compounding method, and the thickness of the elastic back electrode is 20 micrometers.
(3) And adhering the strain sensor to the upper surface of the pressure sensor by using semi-cured silica gel, so that the pyramid array material of the pressure sensor is in contact with the elastic high-dielectric composite material film of the strain sensor, and connecting leads on the gear shaping electrode and the elastic back electrode respectively.
The performance of the flexible sensor obtained in example 1 was measured, the detection sensitivity of the strain sensor and the pressure sensor was measured using an impedance analyzer, the pressure and the strain sensor were measured separately during the gradual stretching of the sensor using a step electrode, and the strain response sensitivity curve obtained was shown in fig. 4.
Similarly, the pressure sensing sensitivity curve obtained when the sensor is continuously applied with a positive stress, the capacitance change of the response of the pressure and strain sensors to different pressures is tested, and is shown in fig. 5.
As can be seen from fig. 4, the strain sensor has a higher sensitivity to tensile strain than the pressure sensor to strain.
As can be seen from fig. 5, the response sensitivity of the pressure sensor to pressure is much greater than the response of the strain sensor to pressure.
In the description of the specification, reference to the description of "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Moreover, various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (10)
1. A stress-strain bimodal discernable flexible sensor, comprising:
the strain sensor comprises an elastic high-dielectric composite material film and a gear shaping electrode, wherein the gear shaping electrode is arranged on the surface of the elastic high-dielectric composite material film;
the pressure sensor comprises an elastic composite material film and an elastic back electrode, the elastic composite material film comprises a pyramid array material and an elastic matrix, the elastic modulus of the elastic matrix is greater than that of the pyramid array material, the pyramid array material is arranged on the surface of the elastic matrix and is positioned below the elastic high dielectric composite material film, and the elastic back electrode is arranged on the surface of one side, far away from the pyramid array material, of the elastic matrix;
the lead wire, the lead wire includes first lead wire, second lead wire and third lead wire, first lead wire with the second lead wire respectively with the both ends of gear shaping electrode link to each other, the third lead wire with the elasticity back electrode links to each other.
2. The sensor of claim 1, wherein the elastic high dielectric composite film comprises a nano ceramic-based elastic composite film and a nano conductive-based elastic composite film arranged in a stack, and an uppermost layer of the elastic high dielectric composite film is the nano ceramic-based elastic composite film,
the nano ceramic-based elastic composite film comprises a nano ceramic material and an elastic polymer material, wherein the nano ceramic material is distributed in the elastic polymer material in a three-dimensional network structure;
the nano conductive-based elastic composite film comprises a nano conductive material and an elastic polymer material, wherein the nano conductive material is distributed in the elastic polymer material in a three-dimensional network structure.
3. The sensor of claim 2, wherein the gear shaping electrode comprises an elastic polymer material and a nano-conductive material;
optionally, the material of the elastic back electrode comprises an elastic polymer material and a nano-conductive material.
4. A sensor according to claim 2 or 3, wherein the elastomeric polymer material comprises at least one of polyurethane and styrene-ethylene-butylene-styrene block copolymer;
optionally, the nanoceramic material comprises at least one of barium titanate nanoparticles, barium titanate nanorods, barium zirconate titanate nanoparticles, barium zirconate titanate nanorods, lead zirconate titanate nanoparticles, and lead zirconate titanate nanorods;
optionally, the nano-conductive material includes at least one of silver nanoparticles, silver nanowires, carbon nanotubes, and graphene.
5. The sensor of claim 1, wherein the elastic high dielectric composite film has a thickness of 10-100 μ ι η;
optionally, the thickness of the gear shaping electrode is 10-40 μm;
optionally, the pyramid array material has a height of 10-50 μm, and the elastomeric matrix has a thickness of 10-50 μm;
optionally, the thickness of the elastic back electrode is 10-40 μm.
6. The sensor of claim 1, wherein the pyramid array material has a modulus of elasticity of 0.1-0.8MPa, and the elastic matrix has a modulus of elasticity of 2.0-4.5MPa;
optionally, the pyramid array material comprises at least one of polydimethylsiloxane and aliphatic aromatic copolyester;
optionally, the elastomeric matrix comprises polyurethane, nanomaterial, and carbon fiber, wherein the nanomaterial comprises at least one of barium carbonate and barium zirconate titanate.
7. The sensor of claim 1, wherein the elastic matrix has a poisson's ratio less than that of the pyramidal array material;
optionally, the elastic matrix has a poisson's ratio of 0.15 to 0.3;
optionally, the poisson's ratio of the pyramid array material is 0.4-0.5.
8. The sensor of claim 1, 5, 6 or 7, wherein the density of pyramids in the pyramid array material is 400-2500/mm 2 。
9. A method of making the stress-strain bimodal identifiable flexible sensor of any one of claims 1-8, comprising:
(1) Arranging a gear shaping electrode on the upper surface of the elastic high-dielectric composite material film so as to obtain a strain sensor;
(2) Combining an elastic back electrode on the back of an elastic composite material film so as to obtain a pressure sensor, wherein the elastic composite material film comprises a pyramid array material and an elastic matrix, the elastic modulus of the elastic matrix is greater than that of the pyramid array material, and the pyramid array material is arranged on the surface of the elastic matrix;
(3) And adhering the strain sensor on the upper surface of the pressure sensor, wherein the pyramid array material of the pressure sensor is in contact with the elastic high dielectric composite material film of the strain sensor, and leads are respectively connected to the gear shaping electrode and the elastic back electrode so as to obtain the flexible sensor.
10. A robot, characterized in that it comprises a flexible sensor according to any one of claims 1-8 or a flexible sensor obtained by the method according to claim 9.
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