CN115249194A

CN115249194A - Data management system and method

Info

Publication number: CN115249194A
Application number: CN202110465884.8A
Authority: CN
Inventors: 范光瑛; 田育帅; 王贺
Original assignee: Semiconductor Manufacturing International Shanghai Corp; Semiconductor Manufacturing International Beijing Corp
Current assignee: Semiconductor Manufacturing International Shanghai Corp; Semiconductor Manufacturing International Beijing Corp
Priority date: 2021-04-28
Filing date: 2021-04-28
Publication date: 2022-10-28

Abstract

The application provides a data management system and a method, wherein the method comprises the following steps: before the material reaches the production equipment, sending material arrival information to a plurality of equipment automatic control programs through an arrival system; the automatic control programs of the devices confirm whether the corresponding production devices have production conditions or not and feed results back to the pre-arrival system, and meanwhile, corresponding process parameter files are downloaded from the server to the production devices with the production conditions according to the account information; the pre-arrival system selects one production equipment from production equipment with production conditions and sends materials to the production equipment through a carrying system; after the material reaches the production equipment, an equipment automatic control program corresponding to the production equipment sends a production instruction to the production equipment according to the account information and the process parameter file; and after the production is finished, the automatic control program of the equipment corresponding to the production equipment instructs the production equipment to remove the downloaded process parameter file.

Description

Data management system and method

Technical Field

The present application relates to the field of semiconductor technologies, and in particular, to a data management system and method.

Background

The process parameter file is an indispensable file in the production and processing of the integrated circuit manufacturing industry, and the process parameter file is the core intellectual property right of the integrated circuit manufacturing industry, is usually stored at a production equipment end, and is very weak in management of access rights. If the file is stored in the remote server offline, unauthorized access can be effectively prevented, and the method is the most efficient secret protection method. The widespread adoption of this approach is a necessary trend in today's industry background where technology nodes are highly competitive.

However, in the current off-line storage and management method for the process parameter file, after the material reaches the production equipment, the automatic control program of the equipment downloads the process parameter file, which requires additional operation time, reduces the production time of the production equipment to a certain extent, increases the production cost, and thus a systematic solution is needed.

Disclosure of Invention

The application provides a data management system and a method, which can save production time and reduce production cost.

One aspect of the present application provides a data management system, comprising: a plurality of equipment automatic control programs; the server is used for remotely storing data and indicating the equipment to automatically control the program to work; the system comprises a pre-arrival system, a system control system and a system control system, wherein the pre-arrival system is used for sending material pre-arrival information to an automatic equipment control program and selecting production equipment; when the automatic control programs of the plurality of devices run: acquiring material arrival information from an arrival system, wherein the arrival information comprises account information; confirming whether the corresponding production equipment has the production conditions or not, feeding the results back to the pre-arrival system, and downloading the corresponding process parameter files from the server to the production equipment with the production conditions according to the account information; after the materials arrive, issuing a production instruction to production equipment selected by a pre-arrival system according to the account information and the process parameter file; and after the production is finished, instructing the production equipment selected by the pre-arrival system to remove the downloaded process parameter file.

In some embodiments of the present application, the billing information includes data relating to materials required for the processing of the materials.

In some embodiments of the present application, the step of downloading the corresponding process parameter file from the server to the production equipment with the production condition according to the account information includes: and judging the process parameter file required to be downloaded.

In some embodiments of the present application, the device automation programs further include, when executed: and after the material is removed, instructing the production equipment selected by the pre-arrival system to remove the downloaded process parameter file.

In some embodiments of the present application, the device automation programs further include, when executed: after the production equipment without the arrival of the material downloads the process parameter file for a specific time, the server instructs an equipment automatic control program corresponding to the production equipment without the arrival of the material to remove the downloaded process parameter file; and after receiving the instruction of the server, the automatic control program of the equipment corresponding to the production equipment without the arrival of the material instructs the production equipment without the arrival of the material to remove the downloaded process parameter file.

In some embodiments of the present application, the step of the server instructing the corresponding device automatic control program of the production device where no material arrives to remove the downloaded process parameter file includes: and judging the process parameter file needing to be removed.

In some embodiments of the present application, the step of instructing the production equipment without material arrival to remove the downloaded process parameter file by the equipment automatic control program corresponding to the production equipment without material arrival includes: and confirming whether the corresponding production equipment can remove the process parameter file needing to be removed.

Another aspect of the present application also provides a data management method, including: before the materials arrive at the production equipment, sending material arrival information to a plurality of equipment automatic control programs through an arrival system, wherein the arrival information comprises account information; after the material arrival information is received, the automatic control programs of the devices confirm whether the corresponding production devices have production conditions or not, feed results back to the arrival system, and download corresponding process parameter files from the server to the production devices with the production conditions according to the account information; the pre-arrival system selects one production equipment from production equipment with production conditions and sends materials to the production equipment through a carrying system; after the material reaches the production equipment, an equipment automatic control program corresponding to the production equipment sends a production instruction to the production equipment according to the account information and the process parameter file; and after the production is finished, the automatic control program of the equipment corresponding to the production equipment instructs the production equipment to remove the downloaded process parameter file.

In some embodiments of the present application, the data management method further comprises: and after the material is removed, instructing the production equipment to remove the downloaded process parameter file by an equipment automatic control program corresponding to the production equipment.

In some embodiments of the present application, the data management method further comprises: after the production equipment without the arrival of the materials downloads the process parameter file for a specific time, the server instructs an equipment automatic control program corresponding to the production equipment without the arrival of the materials to remove the downloaded process parameter file; and after receiving the instruction of the server, the automatic control program of the equipment corresponding to the production equipment without the arrival of the material instructs the production equipment without the arrival of the material to remove the downloaded process parameter file.

According to the data management system and method, the process parameter file is downloaded in advance before the material reaches the production equipment, so that the production time can be saved, and the production cost is reduced.

Drawings

The following drawings describe in detail exemplary embodiments disclosed in the present application. Wherein like reference numerals represent similar structures throughout the several views of the drawings. Those of ordinary skill in the art will understand that the present embodiments are non-limiting, exemplary embodiments and that the accompanying drawings are for illustrative and descriptive purposes only and are not intended to limit the scope of the present application, as other embodiments may equally fulfill the inventive intent of the present application. It should be understood that the drawings are not to scale.

Wherein:

FIG. 1 is a schematic diagram of a data management system according to an embodiment of the present application;

FIG. 2 is a flowchart of a data management method according to an embodiment of the present application;

FIG. 3 is a flowchart of downloading a process parameter file according to an embodiment of the present application;

FIG. 4 is a flowchart of a process parameter file removal process for a manufacturing facility with material arrival in an embodiment of the present application;

FIG. 5 is a flowchart of removing process parameter files of a manufacturing apparatus without material arrival in the embodiment of the present application.

Detailed Description

The following description is presented to enable any person skilled in the art to make and use the present disclosure, and is provided in the context of a particular application and its requirements. Various modifications to the disclosed embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Thus, the present application is not limited to the embodiments shown, but is to be accorded the widest scope consistent with the claims.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. For example, as used herein, the singular forms "a", "an", "the" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," and/or "including," when used in this specification, mean that the associated integers, steps, operations, elements, and/or components are present, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. The term "A on B" as used in this specification means that A is either directly adjacent (above or below) B or indirectly adjacent (i.e., separated by some material) to B; the term "A within B" means that A is either entirely within B or partially within B.

These and other features of the present application, as well as the operation and function of the related elements of structure and the combination of parts and economies of manufacture, may be significantly improved upon consideration of the following description. All of which form a part of this application, with reference to the accompanying drawings. It is to be expressly understood, however, that the drawings are for the purpose of illustration and description only and are not intended as a definition of the limits of the application.

Furthermore, certain terminology has been used in this application to describe embodiments of the application. For example, "one embodiment," "an embodiment," and/or "some embodiments" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. Therefore, it is emphasized and should be appreciated that two or more references to "an embodiment" or "one embodiment" or "an alternative embodiment" in various portions of this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined as suitable in one or more embodiments of the application.

In some embodiments, numbers expressing quantities or properties useful for describing and claiming certain embodiments of the present application are to be understood as being modified in certain instances by the terms "about", "approximately" or "substantially". For example, unless otherwise specified, "about", "approximately" or "substantially" may mean the ordinary skill in the art in general understanding of the techniques involved in this application, such as may be labeled as ± 10% variation of the value it describes. Accordingly, in some embodiments, the numerical parameters set forth in the written description and attached claims are approximations that may vary depending upon the desired properties sought to be obtained by a particular embodiment. In some embodiments, numerical parameters should be construed in light of the number of reported significant digits and by applying ordinary rounding techniques. Notwithstanding that the numerical ranges and parameters setting forth the broad scope of the embodiments of the application are approximations, the numerical values set forth in the specific examples are reported as precisely as possible.

The technical solution of the present invention will be described in detail below with reference to the embodiments and the accompanying drawings.

In order to further protect the core intellectual property, the off-line storage of the process parameter file is a necessary trend. However, in the current off-line storage and management method for the process parameter files, after the materials reach the production equipment, the process parameter files are downloaded by the automatic equipment control program, which requires extra operation time, thus reducing the production time of the production equipment to a certain extent and increasing the production cost.

In order to solve the above problems, the present application provides a data management system and method, which can download the process parameter file in advance before the material arrives at the production equipment (ideally, the process parameter file is just downloaded when the material arrives at the production equipment), thereby saving the production time and reducing the production cost.

Fig. 1 is a schematic diagram of a data management system according to an embodiment of the present application. The data management system according to the embodiment of the present application is described in detail below with reference to the drawings.

Referring to fig. 1, an embodiment of the present application provides a data management system 100, where the data management system 100 includes: a number of device automation control programs 130; a server 110 for remotely storing data and indicating the operation of the automatic control program of the equipment; a reservation system 120 for sending material reservation information to the plant automation control program 130 and selecting production plants; the number of device automatic control programs 130 run: acquiring material arrival information from the arrival system 120, wherein the arrival information comprises account information; confirming whether the corresponding production equipment 140 has the production conditions or not, feeding back the results to the anticipation system 120, and downloading the corresponding process parameter files from the server to the production equipment having the production conditions according to the account information; after the materials arrive, sending a production instruction to production equipment selected by a pre-arrival system according to the account information and the process parameter file; and after the production is finished, instructing the production equipment selected by the pre-arrival system to remove the downloaded process parameter file.

With continued reference to FIG. 1, the data management system 100 includes a server 110 for remotely storing data and instructing the device automation program to operate. The server 110 has an information interaction relationship with the plurality of plant automation control systems 120, and may respond to the request of the plurality of plant automation control systems 120. The server 110 may carry a database and a background application, which runs on the server 110 and has access to the database, and may interact with the device automation control program according to information in the database.

With continued reference to FIG. 1, the data management system 100 includes a forecast system 120 for sending material forecast information to an equipment automation program 130 and selecting production equipment.

In the current off-line storage and management mode of the process parameter files, the process parameter files are downloaded by an automatic control program of the equipment after the materials reach the production equipment, so that extra operation time is needed, the production time of the production equipment is reduced to a certain extent, and the production cost is increased. Therefore, in the technical solution of the present application, before the material reaches the production equipment, the material arrival information is sent to the automatic equipment control program 130 through the arrival system 120, so that the automatic equipment control program 130 can start downloading the process parameter file in advance, thereby saving the production time and reducing the production cost.

Generally, each process will not have only one production facility to process, but a plurality of production facilities will be available for selection to improve efficiency. Therefore, the approach system 120 can also select a most suitable production equipment from production equipments with production conditions as a final production equipment, and instruct the handling system to send the material to the production equipment. The logic for selecting the most appropriate production equipment includes: the transport distance, the state of the production facility (for example, the old state of the facility, the recent use state, etc.), and the like.

With continued reference to FIG. 1, the data management system 100 includes a plurality of device automation programs 130 coupled to the at least one server 110 and the anticipation system 120, the plurality of device automation programs 130 being operable to: acquiring material arrival information from the arrival system 120, wherein the arrival information comprises account information; confirming whether the corresponding production equipment 140 has the production conditions or not, feeding back the results to the anticipation system 120, and downloading the corresponding process parameter files from the server to the production equipment having the production conditions according to the account information; after the materials arrive, sending a production instruction to production equipment selected by a pre-arrival system according to the account information and the process parameter file; and after the production is finished, instructing the production equipment selected by the pre-arrival system to remove the downloaded process parameter file.

The device automation program 130 has an information interaction relationship with the production device 140 and the server 110. The device automation program 130 may obtain relevant information (e.g., various data, etc.) from the server 110 and then issue instructions (e.g., download and remove data, start or stop production, etc.) to the production device 140.

In the integrated circuit manufacturing industry, where the degree of automation is high, there are independent device automation control programs (EAP programs). The EAP program can issue production instructions to production equipment according to the current material information and the account information, so that the automatic manufacturing capability is realized, and the artificial participation is reduced to a great extent.

In some embodiments of the present application, the device automation program 130 may be modified from conventional EAP programs. For example, logic required by the data management system described herein to download and remove process parameter files based on material and billing information is added to a conventional EAP program. Thus, only some logic needs to be added to the conventional EAP program to be applied to the data management system 100 described herein, and no separate additional special design program is needed. Of course, in other embodiments, the plant automation program 130 may be designed separately.

Each process has a plurality of production devices available for selection, and generally, each production device has a corresponding device automation control program (EAP), and thus, a plurality of device automation control programs.

Before the material does not reach the production equipment at the time of processing, the material arrival system 120 sends material arrival information, which includes account information, to the automatic equipment control programs 130. Specifically, the time when the anticipation system 120 sends the anticipation information may be when the material completes the previous process or before the previous process is completed.

In some embodiments of the present application, the billing information includes data relating to materials required for the processing of the materials. For example, if the material information is a cassette number and current processing equipment, the corresponding account information includes a product type, a recipe name of process parameters, adapted production equipment and procedures, and the like.

After the automatic control programs 130 acquire the material arrival information from the arrival system 120, it is necessary to determine whether the corresponding production devices 140 have the production conditions and feed back the results to the arrival system 120, and meanwhile, download the corresponding process parameter files from the server to the production devices having the production conditions according to the account information.

The determination of whether the corresponding production equipment 140 has the production condition is to screen out the production equipment that can process the current material. For example, a production facility corresponding to a certain process or material may have four production facilities a, B, C, and D, where a is already reserved by other processes or materials, and B is in a failure state, so that only two production facilities C and D are currently capable of processing the current material. After validation is complete, the results are fed back to the anticipation system 120, e.g., to the anticipation system 120 only that production facilities C and D are currently available.

Since it is not necessary to wait for the selection result of the anticipation system 120, after the production equipment with the production condition is confirmed, the corresponding process parameter file can be downloaded from the server to the production equipment with the production condition according to the account information before or after the result is fed back to the anticipation system 120 or at the same time. Specifically, the plurality of automatic control programs 130 may interact with a server, and the server obtains a process parameter file from the server.

In some embodiments of the present application, since some process parameter files that do not support the offline mode or need not be stored offline are directly stored in the production equipment, rather than being stored offline in the server, the process parameter files do not need to be downloaded from the server or removed from the production equipment when being used. In some embodiments of the present application, the step of downloading the corresponding process parameter file from the server to the production equipment with the production condition according to the account information includes: and judging the process parameter files to be downloaded, namely judging which process parameter files are required to be downloaded according to data preset in the server, and which process parameter files are directly reserved at the production equipment end so as not to be required to be downloaded. The automatic control programs of the equipment only need to download the process parameter files which are stored off-line, but not stored at the production equipment.

In some embodiments of the present application, after downloading the finished process parameter files, the plant automation programs 130 may also send the download to a server for recording to confirm which process parameter files should be subsequently removed.

After receiving the feedback result, the anticipation system 120 selects a production facility with the best production condition as the final production facility, and instructs the handling system to send the material to the production facility. For example, the approach system 120 selects D from production facilities C and D as the final production facility, and instructs the handling system to send the material to production facility D. The logic for selecting the most appropriate production equipment includes: the transport distance, the state of the production facility (for example, the old state of the facility, the recent use state, etc.), and the like.

After the material arrives at the production equipment (for example, after the material arrives at the production equipment D), a production instruction is sent to the production equipment (for example, the production equipment D) selected by the pre-arrival system according to the account information and the process parameter file; after production is completed, the production equipment (e.g., production equipment D) selected by the pre-arrival system is instructed to remove the downloaded process parameter file.

In some embodiments of the present application, since there is also a case where production does not end normally (for example, a reason of equipment failure, etc.), in the case where production does not end normally, the running of the several equipment automatic control programs further includes: and after the material is removed, instructing the production equipment selected by the pre-arrival system to remove the downloaded process parameter file. Generally, if the production is not normally finished due to a failure of equipment or the like, the production is manually stopped, and the materials which are not produced are removed.

In some embodiments of the present application, after removing the finished process parameter file, the plant automation programs 130 may also send the removal to the server for recordation, and to supplement the server for later work.

In addition, since other production devices (e.g., production device C) having production conditions also download the process parameter files, the process parameter files downloaded by these production devices also need to be removed.

For those production facilities that have production conditions but do not produce at all (i.e. production facilities that do not have material arriving), in some embodiments of the present application, the several equipment automation control programs are executed by: after the production equipment without the arrival of the material downloads the process parameter file for a specific time, the server instructs an equipment automatic control program corresponding to the production equipment without the arrival of the material to remove the downloaded process parameter file; and after receiving the instruction of the server, the automatic control program of the equipment corresponding to the production equipment without the arrival of the material instructs the production equipment without the arrival of the material to remove the downloaded process parameter file.

The specific time is slightly longer than the maximum time for the materials to be conveyed from the production equipment of the previous process to the production equipment of the current process. For example, if the maximum time for the material to be transported from the production facility of the previous process to the production facility of the current process is 30 minutes, the specific time may be 35 minutes to 60 minutes. The purpose of setting the specific time is to improve the efficiency of removing the process parameter file. For these production devices without material arrival, after a specific time after downloading the process parameter file, if no material arrives, it indicates that the material has been sent to another production device for processing, and at this time, the downloaded process parameter file can be removed.

In some embodiments of the present application, the timing function (i.e., timing for the particular time) is performed by the server.

In some embodiments of the present application, since not all process parameter files are saved offline, all process parameter files cannot be removed, but a part of the process parameter files is reserved at a production equipment, and for this case, the step of instructing, by the server, the equipment automatic control program corresponding to the production equipment where no material arrives to remove the downloaded process parameter file includes: and judging the process parameter files needing to be removed, namely judging which process parameter files need to be removed according to data preset in the server, and which process parameter files directly remain at the production equipment end so as not to need to be removed. The server need only instruct the plurality of equipment automation programs to remove those process parameter files that need to be saved offline rather than on the production equipment side.

In some embodiments of the present application, the step of instructing the production equipment without material arrival to remove the downloaded process parameter file by the equipment automatic control program corresponding to the production equipment without material arrival includes: and confirming whether the corresponding production equipment can remove the process parameter file needing to be removed. Because the importance of the process parameter files is higher, the automatic control programs of the plurality of devices can be used for secondary confirmation to confirm whether the process parameter files on the production devices can be removed or not, so that the fault caused by removing wrong process parameter files or removing the process parameter files at wrong time can be avoided.

The data management system downloads the process parameter file in advance before the material reaches the production equipment, so that the production time can be saved, and the production cost is reduced.

An embodiment of the present application further provides a data management method, including: before the materials arrive at the production equipment, sending material arrival information to a plurality of equipment automatic control programs through an arrival system, wherein the arrival information comprises account information; after the material arrival information is received, the automatic control programs of the devices confirm whether the corresponding production devices have production conditions or not, feed results back to the arrival system, and download corresponding process parameter files from the server to the production devices with the production conditions according to the account information; the pre-arrival system selects one production equipment from production equipment with production conditions and sends materials to the production equipment through a carrying system; after the material reaches the production equipment, an equipment automatic control program corresponding to the production equipment sends a production instruction to the production equipment according to the account information and the process parameter file; and after the production is finished, the automatic equipment control program corresponding to the production equipment instructs the production equipment to remove the downloaded process parameter file.

Fig. 2 is a flowchart of a data management method according to an embodiment of the present application. The following describes a data management method according to an embodiment of the present application in detail with reference to the drawings.

Referring to fig. 2, an embodiment of the present application further provides a data management method, including:

step S210: before the materials arrive at the production equipment, sending material arrival information to a plurality of equipment automatic control programs through an arrival system, wherein the arrival information comprises account information;

step S220: after the material arrival information is received, the automatic control programs of the devices confirm whether the corresponding production devices have production conditions or not, feed results back to the arrival system, and download corresponding process parameter files from the server to the production devices with the production conditions according to the account information;

step S230: the pre-arrival system selects one production equipment from production equipment with production conditions and sends materials to the production equipment through a carrying system;

step S240: after the material reaches the production equipment, an equipment automatic control program corresponding to the production equipment sends a production instruction to the production equipment according to the account information and the process parameter file;

step S250: and after the production is finished, the automatic control program of the equipment corresponding to the production equipment instructs the production equipment to remove the downloaded process parameter file.

The data management method described in the present application is described in further detail below.

Referring to fig. 2, in step S210, before the material arrives at the production equipment, material arrival information is sent to a plurality of equipment automatic control programs through an arrival system, where the arrival information includes account information. Specifically, the time when the anticipation system 120 sends the anticipation information may be when the material completes the previous process or before the previous process is completed.

In the current off-line storage and management mode of the process parameter files, the process parameter files are downloaded by an automatic control program of the equipment after the materials reach the production equipment, so that extra operation time is needed, the production time of the production equipment is reduced to a certain extent, and the production cost is increased. Therefore, in the technical scheme of the application, the material reaching information is sent to the automatic control program of the equipment through the reaching system before the material reaches the production equipment, so that the automatic control program of the equipment can start downloading the process parameter file in advance, the production time is saved, and the production cost is reduced.

Generally, each process will not have only one production facility to process, but a plurality of production facilities will be available for selection to improve efficiency. Generally, each production device has a corresponding device automation control program (EAP), and thus there are several EAP.

Referring to fig. 2, in step S220, after receiving the material arrival predicting information, the device automatic control programs determine whether corresponding production devices have production conditions and feed back results to the arrival predicting system, and meanwhile, download corresponding process parameter files from the server to the production devices having the production conditions according to the account information.

When the automatic control programs of the devices acquire the material arrival information from the arrival system, whether the corresponding production devices have the production conditions or not needs to be confirmed, the results are fed back to the arrival system, and meanwhile, corresponding process parameter files are downloaded from the server to the production devices with the production conditions according to the account information.

Whether the corresponding production equipment has the production conditions or not is confirmed to screen out the production equipment which can process the current materials at present. For example, a production facility corresponding to a certain process or material may have four production facilities a, B, C, and D, where a is already reserved by other processes or materials, and B is in a failure state, so that only two production facilities C and D are currently capable of processing the current material. After validation is complete, the results are fed back to the anticipation system, e.g., to the anticipation system only production facilities C and D are currently available.

Because the selection result of the pre-arrival system does not need to be waited, after the production equipment with the production condition is confirmed, the corresponding process parameter file can be downloaded from the server to the production equipment with the production condition according to the account information before or after the result is fed back to the pre-arrival system or simultaneously. Specifically, the automatic control programs may interact with a server, and a process parameter file is acquired from the server through the server.

FIG. 3 is a flowchart of downloading a process parameter file according to an embodiment of the present application. Referring to fig. 3, downloading a corresponding process parameter file from a server to a production device having production conditions according to the account information includes:

step S310: acquiring material arrival information;

step S320: judging whether a process parameter file needs to be downloaded;

step S330: downloading a process parameter file;

step S340: and reporting the file downloading condition.

Referring to fig. 3, in step S310, material arrival information is obtained. Specifically, account information in the material arrival prediction information is acquired.

Referring to fig. 3, in step S320, it is determined whether a process parameter file needs to be downloaded.

In some embodiments of the present application, since some process parameter files that do not support the offline mode or need not be stored offline are directly stored in the production equipment, rather than being stored offline in the server, the part of the process parameter files need not be downloaded from the server or removed from the production equipment when being used. In some embodiments of the present application, the step of downloading the corresponding process parameter file from the server to the production equipment with the production condition according to the account information includes: and judging the process parameter files to be downloaded, namely judging which process parameter files are required to be downloaded according to data preset in the server, and which process parameter files are directly reserved at the production equipment end so as not to be required to be downloaded. The automatic control programs of the equipment only need to download the process parameter files which are stored off-line, but not stored at the production equipment.

Referring to fig. 3, in step S330, a process parameter file is downloaded.

All equipment in the integrated circuit manufacturing industry conforms to the industrial SEMI standard, and equipment software supports the SECS communication standard, and can acquire information of an equipment end through a specific instruction or send an instruction to the equipment. The detailed information of the process parameter file can be inquired through an SECS instruction, and the process parameter file can be created through an instruction (the detailed information of the file needs to be provided). On the basis, firstly, details of the process parameter file of the equipment end are obtained through a query instruction, then the details are stored in a database, and when downloading is needed, the details are used as input of a new process parameter file, so that the downloading of the process parameter file can be realized in a mode of 'newly creating an old file'. The operation of inquiring details of a certain process parameter file and storing the details in a database is called uploading; the operation of creating an old file is called "download". Therefore, the downloading instruction and the uploading instruction of the process parameter file need to be paired for use, otherwise, the downloading fails.

Referring to fig. 3, in step S340, a file download situation is notified. In some embodiments of the present application, after downloading the finished process parameter file, the plurality of automatic plant control programs may also send the download status to the server for recording, and supplement the download status to the server for later work.

Referring to fig. 2, the approach system selects a production facility from production facilities having production conditions and delivers materials to the production facility through a handling system, step S230.

And after receiving the feedback result, the pre-arrival system selects one production equipment with the production condition as the final production equipment, and instructs the handling system to convey the material to the production equipment. For example, if the approach system selects D from production facilities C and D as the final production facility, the handling system is instructed to send material to production facility D. The logic for selecting the most appropriate production equipment includes: the transport distance, the state of the production facility (for example, the old state of the facility, the recent use state, etc.), and the like.

Referring to fig. 2, in step S240, after the material arrives at the production equipment, the automatic control program corresponding to the production equipment issues a production instruction to the production equipment according to the account information and the process parameter file.

And after the material arrives at the production equipment (for example, after the material arrives at the production equipment D), issuing a production instruction to the production equipment (for example, the production equipment D) selected by the pre-arrival system according to the account information and the process parameter file.

Referring to fig. 2, in step S250, after the production is finished, the automatic control program corresponding to the production equipment instructs the production equipment to remove the downloaded process parameter file.

After production is completed, the production equipment (e.g., production equipment D) selected by the pre-arrival system is instructed to remove the downloaded process parameter file.

FIG. 4 is a flowchart of the removal of the process parameter file of the manufacturing equipment with the arrival of the material in the embodiment of the present application. Referring to fig. 4, the process parameter file removing process of the production equipment with the material arriving comprises the following steps:

step S410: finishing the production of the materials;

step S420: judging whether the process parameter file needs to be removed or not;

step S430: removing the process parameter file;

step S440: and notifying the file removal condition.

Referring to fig. 4, the material production is ended at step S410. In some embodiments of the present application, the end of production refers to the end of production normally without failure or accident.

In other embodiments of the present application, since there is also a case where production does not end normally (for example, a reason of equipment failure, etc.), in the case where production does not end normally, the running of the plurality of equipment automatic control programs further includes: and after the material is removed, instructing the production equipment selected by the pre-arrival system to remove the downloaded process parameter file. Step S410 may be after material removal. Generally, if the production is not normally finished due to a failure of equipment or the like, the production is manually stopped, and the materials which are not produced are removed.

Referring to FIG. 4, in step S420, it is determined whether the process parameter file needs to be removed.

In some embodiments of the present application, the determining logic may further include: and confirming whether the corresponding production equipment can remove the process parameter file needing to be removed. Because the importance of the process parameter files is higher, secondary confirmation can be carried out through the automatic control programs of the plurality of equipment to confirm whether the process parameter files on the production equipment can be removed or not, so that faults caused by the fact that wrong process parameter files are removed or the process parameter files are removed at wrong time are avoided.

Referring to FIG. 4, in step S430, the process parameter file is removed.

The removal of the process parameter file may also be accomplished by SECS instructions. In order to ensure smooth removal, the equipment automation control process needs to record the inclusion and calling relationship of the process recipe file and the corresponding relationship between the process parameter file and the processing material. After a certain material finishes the production process, the equipment automation control program judges which process formulas are not called according to the relation between the currently processed material and the process parameter file and the calling relation contained in the process formula file, and issues a removing instruction.

Referring to fig. 4, in step S440, a file removal situation is notified. In some embodiments of the present application, after removing the finished process parameter file, the plurality of plant automation programs may also send the removal to the server for recording and supplementing to the server for later work.

FIG. 5 is a flowchart of removing process parameter files of a manufacturing apparatus without material arrival in the embodiment of the present application. Referring to fig. 5, the process parameter file removing process of the production equipment without material arrival comprises:

step S510: finishing timing;

step S520: judging whether the process parameter file needs to be removed or not;

step S530: removing the process parameter file;

step S540: and notifying the file removal condition.

Referring to fig. 5, in step S510, the time counting is completed. Specifically, the timer is started after the arrival information is received, and the timer is completed after a specific time.

Referring to FIG. 5, in step S520, it is determined whether the process parameter file needs to be removed.

In some embodiments of the present application, since not all process parameter files are saved offline, all process parameter files cannot be removed, but a part of the process parameter files is reserved at a production equipment, and for this case, the step of instructing, by the server, the equipment automatic control program corresponding to the production equipment where no material arrives to remove the downloaded process parameter file includes: and judging the process parameter files needing to be removed, namely judging which process parameter files need to be removed according to data preset in the server, and which process parameter files directly remain at the production equipment end so as not to need to be removed. The server need only instruct the plurality of equipment automation programs to remove those process parameter files that need to be saved offline, rather than on the production equipment side. Specifically, the background application program in the server may cycle one by one according to the downloading condition of the process parameter files to determine whether each process parameter file needs to be removed.

Referring to FIG. 5, in step S530, the process parameter file is removed.

Referring to fig. 5, in step S540, a file removal situation is notified. In some embodiments of the present application, after removing the finished process parameter file, the plurality of plant automation programs may also send the removal to the server for recording and supplementing to the server for later work.

In view of the above, it will be apparent to those skilled in the art upon reading the present application that the foregoing application content may be presented by way of example only, and may not be limiting. Those skilled in the art will appreciate that the present application is intended to cover various reasonable variations, adaptations, and modifications of the embodiments described herein, although not explicitly described herein. Such alterations, modifications, and variations are intended to be within the spirit and scope of the exemplary embodiments of this application.

It is to be understood that the term "and/or" as used herein in this embodiment includes any and all combinations of one or more of the associated listed items. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present.

Similarly, it will be understood that when an element such as a layer, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. In contrast, the term "directly" means that there are no intervening elements. It will be further understood that the terms "comprises," "comprising," "includes" or "including," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It will also be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Thus, a first element in some embodiments may be termed a second element in other embodiments without departing from the teachings of the present application. The same reference numerals or the same reference characters denote the same elements throughout the specification.

Further, the present specification describes example embodiments with reference to idealized example cross-sectional and/or plan and/or perspective views. Accordingly, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, example embodiments should not be construed as limited to the shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an etched region shown as a rectangle will typically have rounded or curved features. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the exemplary embodiments.

Claims

1. A data management system, comprising:

a plurality of equipment automatic control programs;

the server is used for remotely storing data and indicating the equipment to automatically control the program to work;

the system comprises a pre-arrival system, a control system and a control system, wherein the pre-arrival system is used for sending material pre-arrival information to an automatic control program of the equipment and selecting production equipment;

when the automatic control programs of the plurality of devices run:

acquiring material arrival information from the arrival system, wherein the arrival information comprises account information;

confirming whether the corresponding production equipment has the production conditions or not, feeding the results back to the pre-arrival system, and downloading the corresponding process parameter files from the server to the production equipment with the production conditions according to the account information;

after the pre-arrival system selects one production device from production devices with production conditions and sends materials to the production device, a production instruction is sent to the production device according to the account information and the process parameter file;

and after the production is finished, instructing the production equipment to remove the downloaded process parameter file.

2. The data management system of claim 1, wherein the accounting information includes data relating to materials required for the material processing.

3. The data management system of claim 1, wherein the step of downloading the corresponding process parameter file from the server to the production equipment with production conditions according to the account information comprises: and judging the process parameter file required to be downloaded.

4. The data management system of claim 1, wherein the number of device automation programs are further run by: and after the material is removed, instructing the production equipment selected by the pre-arrival system to remove the downloaded process parameter file.

5. The data management system of claim 1, wherein the number of device automation programs are further run by:

after the production equipment without the arrival of the material downloads the process parameter file for a specific time, the server instructs an equipment automatic control program corresponding to the production equipment without the arrival of the material to remove the downloaded process parameter file;

and after receiving the instruction of the server, the automatic control program of the equipment corresponding to the production equipment without the arrival of the material instructs the production equipment without the arrival of the material to remove the downloaded process parameter file.

6. The data management system of claim 5, wherein the step of the server instructing the corresponding equipment automatic control program of the production equipment without material arrival to remove the downloaded process parameter file comprises: and judging the process parameter file needing to be removed.

7. The data management system of claim 5, wherein the step of instructing the production equipment without material arrival to remove the downloaded process parameter file by the equipment automatic control program corresponding to the production equipment without material arrival comprises: and confirming whether the corresponding production equipment can remove the process parameter file needing to be removed.

8. A method for managing data, comprising:

before the materials arrive at the production equipment, sending material arrival information to a plurality of equipment automatic control programs through an arrival system, wherein the arrival information comprises account information;

after the material arrival information is received, the automatic control programs of the devices confirm whether the corresponding production devices have production conditions or not, feed results back to the arrival system, and download corresponding process parameter files from the server to the production devices with the production conditions according to the account information;

the pre-arrival system selects one production equipment from production equipment with production conditions and sends materials to the production equipment through a carrying system;

after the material reaches the production equipment, an equipment automatic control program corresponding to the production equipment sends a production instruction to the production equipment according to the account information and the process parameter file;

and after the production is finished, the automatic control program of the equipment corresponding to the production equipment instructs the production equipment to remove the downloaded process parameter file.

9. The data management method of claim 8, wherein the account information includes data relating to materials required for the material processing.

10. The data management method of claim 8, wherein the step of downloading the corresponding process parameter file from the server to the production equipment with production conditions according to the account information comprises: and judging the process parameter file required to be downloaded.

11. The data management method of claim 8, wherein after the material is removed, the corresponding equipment automatic control program of the production equipment instructs the production equipment to remove the downloaded process parameter file.

12. The data management method of claim 8, further comprising:

13. The data management method of claim 12, wherein the step of the server instructing the corresponding equipment automatic control program of the production equipment without material arrival to remove the downloaded process parameter file comprises: and judging the process parameter file needing to be removed.

14. The data management method of claim 12, wherein the step of instructing the manufacturing equipment that does not have the material to remove the downloaded process parameter file by the equipment automatic control program corresponding to the manufacturing equipment that does not have the material to reach comprises: and confirming whether the corresponding production equipment can remove the process parameter file needing to be removed.