CN115223832B - Microwave ion source system for vacuum coating - Google Patents
Microwave ion source system for vacuum coating Download PDFInfo
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- CN115223832B CN115223832B CN202210846764.7A CN202210846764A CN115223832B CN 115223832 B CN115223832 B CN 115223832B CN 202210846764 A CN202210846764 A CN 202210846764A CN 115223832 B CN115223832 B CN 115223832B
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- microwave
- generating device
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- pipe
- vacuum coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32201—Generating means
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- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Plasma Technology (AREA)
- Particle Accelerators (AREA)
Abstract
The invention relates to the technical field of vacuum coating, in particular to a microwave ion source system for vacuum coating, which comprises a microwave generating device and an ion generating device, wherein the microwave generating device is used for generating microwaves and transmitting the microwaves to the ion generating device, the ion generating device is used for generating ions, the ion generating device comprises a shell, a magnetic structure and a cooling structure, the magnetic structure and the cooling structure are both arranged on the shell, the magnetic structure is used for generating ion clusters when the microwaves are received, and the cooling structure is used for cooling the ion generating device. According to the invention, the microwave signal is generated by the microblog generation device, and the ion generation device is triggered by the microwave signal to generate the ion cluster, so that the material can be subjected to chemical reaction at room temperature through ion cluster guidance, and high temperature is avoided.
Description
Technical Field
The invention relates to the technical field of vacuum coating, in particular to a microwave ion source system for vacuum coating.
Background
In the field of vacuum coating, the conventional method is usually adopted to realize vacuum coating at present, and the method is usually carried out at a higher temperature, so that the vacuum coating technology cannot be applied to materials which cannot resist high temperature.
Disclosure of Invention
The invention provides a microwave ion source system for vacuum coating aiming at the problems in the prior art, which can guide vacuum coating to be carried out at room temperature in a microwave ion generation mode.
In order to solve the technical problems, the invention adopts the following technical scheme:
the invention provides a microwave ion source system for vacuum coating, which comprises a microwave generating device and an ion generating device, wherein the microwave generating device is used for generating microwaves and transmitting the microwaves to the ion generating device, the ion generating device is used for generating ions, the ion generating device comprises a shell, a magnetic structure and a cooling structure, the magnetic structure and the cooling structure are both arranged on the shell, the magnetic structure is used for generating ion clusters when receiving the microwaves, and the cooling structure is used for cooling the ion generating device.
Further, the magnetic structure includes magnet, magnetic conduction spare and shield cover, and the magnetic conduction spare is provided with the cooling hole, and cooling structure installs in the cooling hole, and magnet installs in the magnetic conduction spare outside, and shield cover cladding magnetic conduction spare and magnet.
Furthermore, the number of the magnets is multiple, the magnets are sequentially arranged along the height direction of the magnetic conduction piece, and the magnetic pole directions of the magnets are the same.
Furthermore, a spacing block is arranged between the magnet and the shell, and the spacing block is made of aluminum.
Furthermore, the cooling structure comprises an outer pipe, an inner pipe and a water outlet head, the outer pipe is arranged in the shell and is positioned in the magnetic structure, the inner pipe is arranged in the outer pipe and is communicated with the outer pipe, and a gap is formed between the outer pipe and the inner pipe; the top of the inner tube is provided with a water inlet, and a water outlet head is communicated with the outer tube.
Furthermore, the cooling structure further comprises a sealing copper seat, a water connecting pipe and a pressing block, wherein the sealing copper seat is arranged on the shell, the water connecting pipe is arranged on the sealing copper seat, and the pressing block is arranged on the sealing copper seat and is used for fixing the water connecting pipe on the sealing copper seat; the water connecting pipe is internally provided with a communicating pipe, the communicating pipe is communicated with the inner pipe and the outer pipe, the water outlet head is arranged on the water connecting pipe, and the communicating pipe is used for being externally connected with a water source.
Furthermore, the shell is provided with a sealing structure, and the joint of the water connecting pipe and the outer pipe is positioned in the sealing structure.
Furthermore, the outer side wall of the outer pipe is provided with a plurality of reinforcing blocks.
Further, the microwave generating device comprises a microwave generator, an isolator and a pin tuner, wherein the microwave generator is externally connected with a high-voltage power supply and used for generating microwaves, the isolator is connected to the microwave generator and used for preventing the microwaves generated by the microwave generator from flowing reversely, the pin tuner is connected to the isolator and used for generating impedance adaptive to the microwaves, a magnetic structure is connected to the pin tuner, and a cooling structure is also used for absorbing the reflected power generated by the isolator/pin tuner.
Furthermore, a mounting part is arranged between the microwave generator and the shell, the isolator and the pin tuner are both mounted on the mounting part, the mounting part is made of heat conducting materials, and the cooling structure absorbs heat generated by the microwave generator, the isolator and the pin tuner during working through the mounting part.
The invention has the beneficial effects that: according to the invention, the microwave signal is generated by the microblog generation device, and the ion generation device is triggered by the microwave signal to generate the ion cluster, so that the material can be subjected to chemical reaction at room temperature through ion cluster guidance, and high temperature is avoided.
Drawings
FIG. 1 is a schematic diagram of the present invention.
Fig. 2 is a schematic diagram of an ion generating apparatus according to the present invention.
Fig. 3 is an enlarged view of fig. 2 at a.
Fig. 4 is an enlarged view of fig. 2 at B.
Reference numerals are as follows: 1-microwave generating device, 2-ion generating device, 3-shell, 4-magnetic structure, 5-cooling structure, 11-microwave generator, 12-isolator, 13-pin tuner, 14-mounting piece, 31-sealing structure, 41-magnet, 42-magnetic conduction piece, 43-shielding cover, 44-spacing block, 51-outer tube, 52-inner tube, 53-water outlet head, 54-sealing copper seat, 55-water connecting tube, 56-pressing block, 57-reinforcing block, 421-cooling hole, 551-communicating tube.
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention is further described below with reference to the following examples and the accompanying drawings, which are not intended to limit the present invention. The present invention is described in detail below with reference to the attached drawings.
As shown in fig. 1 to 4, a microwave ion source system for vacuum coating includes a microwave generating device 1 and an ion generating device 2, the microwave generating device 1 is configured to generate microwaves and transmit the microwaves to the ion generating device 2, the ion generating device 2 is configured to generate ions, the ion generating device 2 includes a housing 3, a magnetic structure 4 and a cooling structure 5, the magnetic structure 4 and the cooling structure 5 are both disposed on the housing 3, the magnetic structure 4 is configured to generate ion clusters when receiving the microwaves, and the cooling structure 5 is configured to cool the ion generating device 2.
The hinge is applied to vacuum coating equipment, can be connected with the vacuum coating equipment through the hinge, and achieves the effect of quick assembly and disassembly. When the device works, the microwave generating device 1 generates microwaves and transmits the microwaves to the ion generating device 2, and the magnetic structure 4 enables the ion generating device 2 to have a magnetic field around, so that the microwaves can agglomerate in the magnetic field to generate ion clusters, and the ion clusters can act on the surface of a material to be coated by guiding through a structure in vacuum coating equipment, so that the effect of vacuum coating can be realized without continuous chemical reaction and the phenomenon of releasing high temperature. In the working process, because the collision motion of the ions can generate high temperature, the invention is provided with a cooling structure 5 which is used for cooling the ion generating device 2 so as to ensure the long-time stable work of the ion generating device 2.
In this embodiment, the magnetic structure 4 includes a magnet 41, a magnetic conducting member 42 and a shielding cover 43, the magnetic conducting member 42 is provided with a cooling hole 421, the cooling structure 5 is installed in the cooling hole 421, the magnet 41 is installed outside the magnetic conducting member 42, and the shielding cover 43 covers the magnetic conducting member 42 and the magnet 41.
The stable geomagnetic field is generated by the magnet 41, and the magnetic field is stronger by the way of assimilation of the magnet 41 by the magnetic conduction piece 42; the shielding cover 43 prevents the impact of the ion clusters on the magnet 41 due to the contact of the magnet 41, thereby ensuring the safety of the magnet 41.
Specifically, the number of the magnets 41 is plural, the plural magnets 41 are sequentially arranged along the height direction of the magnetic conductive member 42, and the magnetic pole directions of the plural magnets 41 are the same. The plurality of magnets 41 cooperate to form a stable magnetic field, so that the magnetic field is more uniform, and the plurality of magnets 41 are significantly less costly than one magnet 41 having a larger volume.
Specifically, a spacer 44 is disposed between the magnet 41 and the housing 3, the spacer is made of aluminum, and the housing 3 is made of copper. The spacer 44 has a magnetic isolation effect and prevents the housing 3 from being magnetized, thereby ensuring that the parameters of the generated ion clusters meet requirements.
In the present embodiment, the cooling structure 5 includes an outer tube 51, an inner tube 52 and a water outlet 53, the outer tube 51 is installed in the housing 3 and located in the magnetic structure 4, the inner tube 52 is installed in the outer tube 51 and communicated with the outer tube 51, and a gap is formed between the outer tube 51 and the inner tube 52; the top of the inner tube 52 has a water inlet, and the water outlet 53 communicates with the outer tube 51. That is, the inner tube 52 and the outer tube 51 are preferably communicated with each other at the bottom, so that after water enters the inner tube 52 through the water inlet, the water flows to the bottom of the inner tube 52 along the length direction of the inner tube 52, enters the outer tube 51 at the bottom of the inner tube 52, then flows upwards along the outer tube 51 under the push of subsequent water, and finally flows out from the water outlet 53, so that the cooling is more complete and sufficient.
Specifically, the cooling structure 5 further includes a sealing copper seat 54, a water connecting pipe 55 and a pressing block 56, the sealing copper seat 54 is mounted on the housing 3, the water connecting pipe 55 is mounted on the sealing copper seat 54, and the pressing block 56 is arranged on the sealing copper seat 54 and used for fixing the water connecting pipe 55 on the sealing copper seat 54; a communicating pipe 551 is arranged in the water connecting pipe 55, the communicating pipe 551 is communicated with the inner pipe 52, the water connecting pipe 55 is communicated with the outer pipe 51, the water outlet head 53 is arranged on the water connecting pipe 55, and the communicating pipe 551 is used for externally connecting a water source.
The arrangement of the sealing copper seat 54 and the water connecting pipe 55 makes the water source connection of the invention more convenient, and the pressing block 56 ensures that the impact on the water connecting pipe 55 when water enters the water connecting pipe 55 can not cause the water connecting pipe 55 to move, thereby ensuring the stability.
Specifically, the housing 3 is provided with a sealing structure 31, and the joint of the water connecting pipe 55 and the outer pipe 51 is positioned in the sealing structure 31. The sealing structure 31 may be formed by a mechanical seal and a sealing ring, and can prevent the water leakage at the joint of the water connecting pipe 55 and the outer pipe 51.
Specifically, the outer side wall of the outer tube 51 is provided with a plurality of reinforcing blocks 57. Because the outer pipe 51 is long, the strength of the outer pipe 51 is improved by the reinforcing block 57, and deformation caused by long time when the impact force of water flow is received is avoided.
In this embodiment, the microwave generating apparatus 1 includes a microwave generator 11, an isolator 12, and a pin tuner 13, wherein the microwave generator 11 is externally connected to a high voltage power supply and is used for generating microwaves, the isolator 12 is connected to the microwave generator 11 and is used for preventing the microwaves generated by the microwave generator 11 from flowing backwards, the pin tuner 13 is connected to the isolator 12 and is used for generating impedance adapted to the microwaves, the magnetic structure 4 is connected to the pin tuner 13, and the cooling structure 5 is also used for absorbing the reflected power generated by the isolator 12/the pin tuner 13.
In actual use, the microwave generating apparatus 1 generates microwave power through a magnetron (not shown). The isolator 12 is a two port device which allows microwave power to be transmitted through the microwave generating unit 1, but if reflected power is generated during operation, the isolator 12 acts as an isolator, i.e. it prevents reflected power from returning to the magnetron/microwave generating unit 1, thereby protecting the magnetron and microwave generating unit 1 from the damaging effects that reflected power may have. At the inlet of the isolator 12, the reflected power (usually generated by loads with poor microwave absorption power) is transferred into the cooling structure 5 through the corresponding transmission structure, being absorbed and carried away by the cooling structure 5. The three pin tuner 13 is able to generate an impedance corresponding to the magnetron, thereby making the present invention work more suitably.
Specifically, a mounting part 14 is arranged between the microwave generator 11 and the housing 3, the isolator 12 and the pin tuner 13 are both mounted on the mounting part 14, the mounting part 14 is made of a heat conducting material, and the cooling structure 5 absorbs heat generated by the microwave generator 11, the isolator 12 and the pin tuner 13 during operation through the mounting part 14, so that the effect of keeping the overall operating temperature of the invention below a certain value is achieved.
Although the present invention has been described with reference to the above preferred embodiments, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (8)
1. A microwave ion source system for vacuum coating comprises a microwave generating device and an ion generating device, wherein the microwave generating device is used for generating microwaves and transmitting the microwaves to the ion generating device, and the ion generating device is used for generating ions, and is characterized in that: the ion generating device comprises a shell, a magnetic structure and a cooling structure, wherein the magnetic structure and the cooling structure are both arranged on the shell, the magnetic structure is used for generating ion clusters when receiving microwaves, and the cooling structure is used for cooling the ion generating device;
the magnetic structure comprises a magnet, a magnetic conduction piece and a shielding cover, the magnetic conduction piece is provided with a cooling hole, the cooling structure is arranged in the cooling hole, the magnet is arranged on the outer side of the magnetic conduction piece, and the shielding cover wraps the magnetic conduction piece and the magnet;
be provided with the spacer block between magnet and the casing, the spacer block is made aluminium.
2. The microwave ion source system for vacuum coating according to claim 1, wherein: the quantity of magnet is a plurality of, and a plurality of magnet set gradually along the direction of height of magnetic conduction spare, and the magnetic pole direction of a plurality of magnet is the same.
3. The microwave ion source system for vacuum coating according to claim 1, wherein: the cooling structure comprises an outer pipe, an inner pipe and a water outlet head, the outer pipe is arranged in the shell and is positioned in the magnetic structure, the inner pipe is arranged in the outer pipe and is communicated with the outer pipe, and a gap is formed between the outer pipe and the inner pipe; the top of inner tube has the water inlet, goes out the flood peak and communicates with the outer tube.
4. The microwave ion source system for vacuum coating according to claim 3, wherein: the cooling structure also comprises a sealing copper seat, a water connecting pipe and a pressing block, wherein the sealing copper seat is arranged on the shell, the water connecting pipe is arranged on the sealing copper seat, and the pressing block is arranged on the sealing copper seat and is used for fixing the water connecting pipe on the sealing copper seat; the water connecting pipe is internally provided with a communicating pipe, the communicating pipe is communicated with the inner pipe and the outer pipe, the water outlet head is arranged on the water connecting pipe, and the communicating pipe is used for being externally connected with a water source.
5. The microwave ion source system for vacuum coating according to claim 3, wherein: the shell is provided with a sealing structure, and the joint of the water connecting pipe and the outer pipe is positioned in the sealing structure.
6. The microwave ion source system for vacuum coating according to claim 3, wherein: the lateral wall of outer tube is provided with a plurality of bosses.
7. The microwave ion source system for vacuum coating according to claim 1, wherein: the microwave generating device comprises a microwave generator, an isolator and a pin tuner, wherein the microwave generator is externally connected with a high-voltage power supply and used for generating microwaves, the isolator is connected to the microwave generator and used for preventing the microwaves generated by the microwave generator from flowing reversely, the pin tuner is connected to the isolator and used for generating impedance adaptive to the microwaves, a magnetic structure is connected to the pin tuner, and a cooling structure is also used for absorbing reflected power generated by the isolator/pin tuner.
8. The microwave ion source system for vacuum coating according to claim 7, wherein: the microwave generator is characterized in that a mounting part is arranged between the microwave generator and the shell, the isolator and the pin tuner are both mounted on the mounting part, the mounting part is made of a heat conducting material, and the cooling structure absorbs heat generated when the microwave generator, the isolator and the pin tuner work through the mounting part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210846764.7A CN115223832B (en) | 2022-07-19 | 2022-07-19 | Microwave ion source system for vacuum coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210846764.7A CN115223832B (en) | 2022-07-19 | 2022-07-19 | Microwave ion source system for vacuum coating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115223832A CN115223832A (en) | 2022-10-21 |
| CN115223832B true CN115223832B (en) | 2023-03-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210846764.7A Active CN115223832B (en) | 2022-07-19 | 2022-07-19 | Microwave ion source system for vacuum coating |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014225355A (en) * | 2013-05-15 | 2014-12-04 | 住友重機械工業株式会社 | Microwave ion source and method for operating the same |
| CN105979693A (en) * | 2016-06-12 | 2016-09-28 | 浙江大学 | High-power microwave plasma generation device |
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- 2022-07-19 CN CN202210846764.7A patent/CN115223832B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014225355A (en) * | 2013-05-15 | 2014-12-04 | 住友重機械工業株式会社 | Microwave ion source and method for operating the same |
| CN105979693A (en) * | 2016-06-12 | 2016-09-28 | 浙江大学 | High-power microwave plasma generation device |
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| Publication number | Publication date |
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| CN115223832A (en) | 2022-10-21 |
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