CN115201945A - Terahertz lens based on pseudo surface plasmon - Google Patents
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- 239000002184 metal Substances 0.000 claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 238000009826 distribution Methods 0.000 claims abstract description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 8
- 239000010703 silicon Substances 0.000 claims abstract description 8
- 238000005530 etching Methods 0.000 claims abstract description 6
- 238000005516 engineering process Methods 0.000 claims abstract description 5
- 238000000708 deep reactive-ion etching Methods 0.000 claims abstract description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000010931 gold Substances 0.000 claims abstract description 4
- 229910052737 gold Inorganic materials 0.000 claims abstract description 4
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0087—Simple or compound lenses with index gradient
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Abstract
The invention discloses a terahertz lens based on a pseudo surface plasmon, which is formed by arranging periodic metal cuboid structures on a metal substrate; the silicon substrate is made of high-resistivity silicon with the resistivity larger than 1000 omega/cm, a periodic cuboid structure with different side lengths is obtained by etching on the silicon substrate through deep reactive ion etching and photoetching technology, and then a layer of gold with the thickness larger than 200nm is covered on the complete structure through an evaporation method; the complete lens device is divided into two parts, wherein the first part provides surface terahertz signals for the device, and the second part processes surface terahertz waves. The side length of the second part of metal cuboid structure is changed to enable the second part of metal cuboid structure to have different equivalent refractive indexes, and the second part of metal cuboid structure is arranged according to gradient refractive index distribution according to a conversion optical theory, so that three devices with different functions, namely a surface plasmon fisheye lens, a surface plasmon luneberg lens and a surface plasmon radial refractive index distribution lens, are realized.
Description
Technical Field
The invention belongs to the field of terahertz on-chip integrated systems, and particularly relates to a terahertz lens based on a pseudo surface plasmon.
Background
Terahertz waves generally refer to electromagnetic waves having a frequency of 0.1 to 10THz (a wavelength of 3mm to 30 μm), and are located between microwaves and infrared. The terahertz wave has a unique position in a spectrum, the long wave direction of the terahertz wave is the field of electronics, the short wave direction of the terahertz wave is the field of optics, the two fields have different means for controlling electromagnetic waves and are difficult to perfectly apply to a terahertz wave band, the development of the terahertz wave is restricted to a great extent, and a 'terahertz gap' is generated. Terahertz waves have unique properties such as water absorption, safety, transient property, broadband property, fingerprint spectrum property and the like at special positions in electromagnetic spectrum, people pay more attention to the application potential of terahertz waves in the aspects of imaging, communication, sensing and the like, so that the demand on functional devices in terahertz wave bands is increasing day by day, the demand is developed according to the idea of device compactness and integration, and the development direction based on Surface Plasmon Polaritons(s) is just one of the requirements.
The lens device related to the patent works in a terahertz waveband, and in the terahertz waveband, most metals have good conductivity, so that strong constraint is difficult to realize by surface plasmon polariton. A layer of periodic structure, such as a two-dimensional hole array or a three-dimensional microstructure, is artificially constructed on the metal Surface, so that a pseudo Surface Plasmon polariton (SPoof Surface Plasmon Polaritons) bound mode in a terahertz frequency band can be supported. The plasma frequency of the pseudo surface plasmon can be artificially controlled by changing the size of the metal surface microstructure, so that the propagation control of the terahertz surface wave is realized.
Gradient index lenses (GRINs) have been receiving attention due to their unique optical properties, and by artificially constructing a medium whose refractive index varies with space according to a certain rule, and analyzing the medium by using a transformation optical theory, devices with unique optical properties can be obtained, and a gradient index medium widely exists in nature, such as human eyeballs and earth atmosphere, whereas in the field of optical instruments, maxwell (Maxwell) has studied a famous "fish-eye lens" early in 1854, which can image each point in the lens medium space at its conjugate point without aberration, and thereafter, lenses which are actively developed in this field, such as Luneburg (Luneburg) lenses and Wood (Wood) lenses, have theoretically very important meanings, but have been limited by the manufacturing process and cannot be perfectly realized, and until 1970, the first gradient index lens has been successfully manufactured by people in northern wilderness (Kitano) of japan using a salt ion exchange process. Compared with the traditional gradient refractive index lens, the surface plasmon has the characteristic that the diffraction limit can be overcome and the propagation in the sub-wavelength space is realized, the surface plasmon lens can realize the gradual change of the refractive index in one plane, the advantages of the surface plasmon can be fully utilized in an integrated system on the terahertz sheet, and the surface plasmon can be more easily realized in the processing and preparation of samples.
Disclosure of Invention
The invention aims to solve the technical problems in the background technology and provide a terahertz lens based on a pseudo surface plasmon, and three different terahertz on-chip integrated gradient refractive index lenses are designed to realize the propagation processing of terahertz signals.
In order to solve the technical problem, the technical scheme of the invention is as follows:
a terahertz lens based on a pseudo surface plasmon is composed of a substrate and cuboid structures periodically arranged on the substrate.
It can be understood that: the invention is formed by arranging periodic metal cuboid structures on a metal substrate; the silicon substrate is made of high-resistivity silicon with the resistivity larger than 1000 omega/cm, a periodic cuboid structure with different side lengths is obtained by etching on the silicon substrate by adopting deep reactive ion etching and photoetching technology, and then a layer of gold with the thickness larger than 200nm is covered on the complete structure by utilizing an evaporation method; the complete lens device is divided into two parts, wherein the first part provides surface terahertz signals for the device, and the second part processes surface terahertz waves. The side length of the second part of metal cuboid structure is changed to enable the second part of metal cuboid structure to have different equivalent refractive indexes, and the second part of metal cuboid structure is arranged according to gradient refractive index distribution according to a conversion optical theory, so that three devices with different functions, namely a surface plasmon fisheye lens, a surface plasmon luneberg lens and a surface plasmon radial refractive index distribution lens, are realized.
Further, the terahertz lens is based on high-resistance silicon material etching.
Further, the resistivity of the high-resistance silicon is more than 1000 omega/cm.
Further, the periodically arranged cuboid structures are formed on the substrate in an etching mode.
Further, the cuboid structures periodically arranged on the substrate are formed by etching on the substrate through deep reactive ion etching and photoetching technology.
Further, a metal layer covers the terahertz lens;
specifically, a metal layer is covered on the terahertz lens by adopting an evaporation process, and specifically, the outer wall of the periodically arranged cuboid structure and the upper surface of the substrate are covered.
Further, the thickness of the metal layer is more than 200nm.
Further, the metal layer is made of gold.
Further, the height h of the cuboid structure is 80 μm, the length a and the width a of the cuboid structure are equal, and the variation range is 30-74 μm.
Further, the length a parameter and the width a parameter of the cuboid structure are changed to regulate and control the pseudo surface plasmon mode, so that the effective refractive index of the cuboid structure is changed; and arranging the cuboid structures according to the gradient refractive index distribution of the terahertz lens to realize three lens devices with different functions of a surface plasmon fisheye lens, a surface plasmon luneberg lens and a surface plasmon radial refractive index distribution lens.
Compared with the prior art, the invention has the advantages that:
1. the terahertz wave polarization splitter is a device working in a terahertz frequency band and having certain broadband, and can realize the functions of converging and deflecting terahertz signals.
2. The traditional optical device is limited by diffraction limit and cannot effectively limit the size, the electromagnetic field is limited to the sub-wavelength magnitude and controlled by the interaction between the surface plasmon electromagnetic wave and the current carrier in the conductor, and the gradient refractive index lens can realize the gradual change of the refractive index in one plane.
3. The terahertz chip can be widely applied to integrated devices on terahertz chips, and can realize single device integration and also perform multifunctional integration with other complex devices, such as coupling devices, logic devices and the like.
Drawings
Fig. 1 (a) and 1 (b) are schematic diagrams of basic unit structures of a terahertz pseudo surface plasmon lens device according to the present invention and corresponding effective refractive index ranges thereof.
Fig. 2 (a) and fig. 2 (b) are schematic diagrams of the surface plasmon fisheye lens and a surface electric field distribution simulation structure thereof according to embodiment 2 of the invention.
Fig. 3 (a) and fig. 3 (b) are schematic diagrams of a surface plasmon luneberg lens and a surface electric field distribution simulation structure thereof according to embodiment 3 of the present invention.
Fig. 4 (a) and 4 (b) are schematic diagrams of the surface plasmon radial refractive index distribution lens according to embodiment 4 of the present invention and a surface electric field distribution simulation structure thereof.
Detailed Description
The following describes embodiments of the present invention with reference to examples:
it should be noted that the structures, proportions, sizes, and the like shown in the specification are only used for matching with the contents disclosed in the specification, so that those skilled in the art can understand and read the contents, and do not limit the practical limitations of the present invention, and any modifications of the structures, changes of the proportion relation, or adjustments of the sizes, should fall within the scope of the technical contents disclosed in the present invention without affecting the efficacy and the achievable purpose of the present invention.
In addition, the terms "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the terms is not to be construed as a scope of the present invention.
Example 1:
fig. 1 (a) is a schematic diagram of a unit structure of a terahertz pseudo surface plasmon lens according to the present invention, wherein the unit structure is composed of two parts, namely a metal substrate and a plurality of metal rectangular structures arranged on the metal substrate. The thickness of the metal substrate is t, the metal rectangular structure has the same height h and period p, each metal pillar has the same length and width a, the surface wave can be transmitted above the pillar, the surface wave mode supported by the structure can be regulated and controlled by changing the size of the side length a, and the formula is utilized: n is a radical of an alkyl radical eff (f)＝k(f)/k 0 (k) We can calculate the equivalent refractive index for different elements, where f is frequency, k 0 Is the free space wavenumber. FIG. 1 (b) shows that the effective refractive index distribution of a in the range of 30-74um can substantially satisfy the refractive index range of 1-1.5. And under the influence of the size of the metal pillar, filling a cell with an equivalent refractive index of 1.5 at a position where the theoretical refractive index of the lens is greater than 1.5, and filling a cell with an equivalent refractive index of 1 at a position where the theoretical refractive index of the lens is less than 1.
Example 2:
the surface plasmon fish-eye lens related to the embodiment is composed of the metal unit structure, the lens is composed of two parts, the first part is a point light source signal placing area, the second part is a lens main body for processing signals, the unit structures with different equivalent refractive indexes are obtained by changing the side length a of a metal column, and the unit structures are arranged according to a refractive index formula
The refractive index of the arrangement (n (0) as the center of the circle, 1.49 r is taken 0 Radius of a circle, r is a distance from a circular point), a plasmon fisheye lens as shown in fig. 2 (a) is obtained, which can image a terahertz point light source at one end of the lens to the other end of central symmetry. FIG. 2 (b) shows a simulation of the electric field distribution at a distance of 130 μm above the metal substrate at 0.62 THz.
Example 3:
the surface plasmon luneberg lens related to this embodiment is composed of the above metal unit structure, and the lens is composed of two parts, where the first part is a grating structure and provides an input signal for the lens, the grating size is 40 μm × 4000 μm, the period along the x direction is 428 μm, and the entire excitation region size is 2mm × 4mm; the second part is a lens area which is responsible for processing the incident signal. The refractive index distribution of the surface plasmon Luneberg lens is
(r 0 Radius of a circle and r is a distance from a circular point), the structure of which is shown in fig. 3 (a), the device can converge surface waves incident in parallel to one end of a lens, and fig. 3 (b) shows a simulation diagram showing the electric field distribution at a distance of 130 μm above a metal substrate at 0.62 THz.
Example 4:
the surface plasmon radial refractive index change lens related to the embodiment is composed of the metal unit structure, the lens is composed of two parts, the first part is an arc grating structure and provides input signals for the lens, the grating structure is composed of semi-concentric rings, the inner radius and the outer radius of the central ring are 461 micrometers and 421 micrometers respectively, the interval between the rings is 461 micrometers, and the size of the whole excitation region is 1383 micrometers x 2766 micrometers; the second part is a lens area which is responsible for processing the incident signal. The refractive index distribution of the surface plasmon radial refractive index change lens is n (r) = n (0) sech (r) (n (0) is the refractive index of the central axis position, 1.49 is taken, and r is the distance from the central axis), the structure of the surface plasmon radial refractive index change lens is shown in fig. 4 (a), the device can change the transmission position of the incident surface wave without changing the transmission direction of the incident surface wave, and fig. 4 (b) is a simulation diagram of the electric field distribution result at 130 μm above the metal substrate under 0.62 THz.
While the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the knowledge of those skilled in the art.
Many other changes and modifications can be made without departing from the spirit and scope of the invention. It is to be understood that the invention is not to be limited to the specific embodiments, but only by the scope of the appended claims.
Claims (10)
1. The terahertz lens based on the pseudo surface plasmon is characterized by comprising a substrate and cuboid structures which are periodically arranged on the substrate.
2. The terahertz lens based on the pseudo surface plasmon of claim 1, wherein the terahertz lens is based on etching of a high-resistance silicon material.
3. The pseudo surface plasmon based terahertz lens of claim 2, wherein the resistivity of the high-resistance silicon is greater than 1000 Ω/cm.
4. The terahertz lens based on the pseudo surface plasmon of claim 1, wherein the periodically arranged cuboid structures are etched and formed on the substrate.
5. The terahertz lens based on the pseudo surface plasmon of claim 4, wherein the periodically arranged cuboid structures on the substrate are etched and formed on the substrate by a deep reactive ion etching and photoetching technology.
6. The terahertz lens based on the pseudo surface plasmon of claim 1, wherein the terahertz lens is further covered with a metal layer.
7. The pseudo surface plasmon based terahertz lens of claim 6, wherein the thickness of the metal layer is greater than 200nm.
8. The terahertz lens based on the pseudo surface plasmon of claim 6, wherein the metal layer is made of gold.
9. The terahertz lens based on the pseudo surface plasmon of claim 1, wherein the height h of the cuboid structure is 80 μm, the length a and the width a of the cuboid structure are equal, and the variation range is 30-74 μm.
10. The terahertz lens based on the pseudo surface plasmon according to claim 1, wherein the effective refractive index of the cuboid structure is changed by adjusting and controlling the pseudo surface plasmon mode by changing the length a parameter and the width a parameter of the cuboid structure; the lens devices with three different functions, namely a surface plasmon fisheye lens, a surface plasmon luneberg lens and a surface plasmon radial refractive index distribution lens, are realized by arranging the cuboid structure according to the gradient refractive index distribution of the terahertz lens.
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