CN115188649A - Single electron beam time-sharing multiplexing device - Google Patents
Single electron beam time-sharing multiplexing device Download PDFInfo
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- CN115188649A CN115188649A CN202210713909.6A CN202210713909A CN115188649A CN 115188649 A CN115188649 A CN 115188649A CN 202210713909 A CN202210713909 A CN 202210713909A CN 115188649 A CN115188649 A CN 115188649A
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- electron beam
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- 238000010894 electron beam technology Methods 0.000 title claims abstract description 54
- 230000003287 optical effect Effects 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000003637 basic solution Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a single electron beam time-sharing multiplexing device, which comprises at least one stage of deflection device group, wherein the deflection device group comprises a multi-angle deflection device and a plurality of straightening deflection devices, the multi-angle deflection device is used for deflecting electron beams entering the multi-angle deflection device along the original direction to different directions at different time points, and the plurality of straightening deflection devices are arranged below the multi-angle deflection device and are respectively used for correcting the movement directions of the electron beams from the multi-angle deflection device in different directions to the directions parallel to the original direction. The invention switches the electron beam back and forth in different electron optical light paths at a certain frequency by matching the multi-angle deflection device with the corresponding plurality of straightening deflection devices, thereby realizing the purpose of parallel work of a plurality of electron beams with lower cost and simpler process.
Description
Technical Field
The invention relates to the technical field of scanning electron microscopes, in particular to a single electron beam time-sharing multiplexing device.
Background
Scanning Electron Microscope (SEM), abbreviated Scanning Electron Microscope, is a common micro-analyzer for modulating and imaging various physical signals excited by a focused Electron beam when Scanning on a sample surface. The basic working principle is that an electron gun (electron emission source) emits electron beams, the electron beams are converged through a lens system under the action of accelerating voltage and focused on the surface of a sample, the electron beams perform raster-like scanning on the sample under the action of a deflection coil, the electrons and the sample interact to generate signal electrons, and the signal electrons are collected by a detector and converted into photons and are processed and imaged on a display system.
The electron emission source comprises a single electron beam emission source and a plurality of electron beam emission sources, the single electron beam emission source has low signal acquisition efficiency, the plurality of electron beam emission sources are generally realized by adopting a filament array or a high-beam-current electron gun and matching a multi-aperture diaphragm array technology, and the two electron beam emission sources have the defects of complex structure, high manufacturing difficulty and high cost.
Disclosure of Invention
To at least partially overcome the above-mentioned deficiencies in the prior art, the present invention provides a single electron beam time division multiplexing device.
In order to achieve the purpose, the invention provides the following basic technical scheme:
a single electron beam time-sharing multiplexing device comprises at least one stage of deflection device set, wherein the deflection device set comprises a multi-angle deflection device and a plurality of straightening deflection devices, the multi-angle deflection device is used for deflecting electron beams entering the multi-angle deflection device along an original direction to different directions at different time points, and the straightening deflection devices are arranged below the multi-angle deflection device and are respectively used for correcting the moving directions of the electron beams from the multi-angle deflection device to the directions parallel to the original direction.
Based on the basic technical solution, in some embodiments, a diaphragm is disposed below at least one of the straightening and deflecting devices, and in some embodiments, a diaphragm is disposed below any one of the straightening and deflecting devices.
Based on the basic technical scheme, in some embodiments, the deflection device group comprises more than two stages, each straightening deflection device of any one front stage deflection device group corresponds to one rear stage deflection device group, and the multi-angle deflection device of the rear stage deflection device group is positioned below one of the straightening deflection devices of the front stage deflection device group. Optionally, a diaphragm is disposed below at least one of the straightening deflection devices, or a diaphragm is disposed below any one of the straightening deflection devices, or a diaphragm is disposed below each straightening deflection device of the last-stage deflection device group.
Based on this basic technical solution, in some embodiments, the plurality of straightening and deflecting devices are four straightening and deflecting devices.
Based on this basic solution, in some embodiments, the plurality of straightening deflection devices are uniformly arranged below the multi-angle deflection device.
Based on the basic technical scheme, in some embodiments, the driving sources of the multi-angle deflection device are a high-frequency signal generator and a voltage amplifier.
The single-electron-beam time-sharing multiplexing device provided by the invention can switch electron beams back and forth in different electron optical light paths at a certain frequency by matching the multi-angle deflection device with the corresponding plurality of straightening deflection devices, so that the aim of realizing parallel work of a plurality of electron beams by using a lower cost and a simpler process can be fulfilled.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof taken in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily to scale. In the drawings:
FIG. 1 is a schematic diagram illustrating the principle of the single-electron-beam time-division multiplexing apparatus according to an embodiment of the present invention;
FIG. 2 is a circuit diagram of a multi-angle deflection apparatus according to an embodiment of the present invention.
Reference numerals are as follows:
1-an electron emission source, 2-a multi-angle deflection device, 3-a first straightening deflection device, 4-a second straightening deflection device, 5-a third straightening deflection device, 6-a fourth straightening deflection device, 7-a first diaphragm, 8-a second diaphragm, 9-a third diaphragm, 10-a fourth diaphragm, 11-a polar plate, 12-a high-frequency signal generator and 13-a voltage amplifier.
Detailed Description
It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to realize the parallel work of a plurality of electron beams and overcome the defects of a plurality of electron beam emission sources in the prior art, the invention provides a single electron beam time-sharing multiplexing device which comprises at least one primary deflection device group, wherein the primary deflection device group comprises a multi-angle deflection device and a plurality of straightening deflection devices. The multi-angle deflection device is used for deflecting electron beams entering the multi-angle deflection device along the original direction to different directions at different time points. The plurality of alignment deflection units are disposed below the multi-angle deflection unit to correct a moving direction of the electron beams from the multi-angle deflection unit to a direction parallel to an original direction. In some embodiments, a diaphragm is disposed below the straightening deflection device to filter the far-axis electrons and block the stray electrons. In some embodiments, the deflection device sets comprise more than two stages, each straightening deflection device of any preceding deflection device set corresponds to a subsequent deflection device set, and the multi-angle deflection device of the subsequent deflection device set is positioned below one of the straightening deflection devices of the preceding deflection device set, so that the diaphragm can be arranged below each stage of deflection device set and can be arranged below the last stage of deflection device set.
Fig. 1 shows a specific embodiment of the single-electron beam time division multiplexing device of the present invention. In this embodiment, the single-beam time-division multiplexing apparatus includes a deflection apparatus set, which includes a multi-angle deflection apparatus 2 and four straightening deflection apparatuses, i.e., a first straightening deflection apparatus 3, a second straightening deflection apparatus 4, a third straightening deflection apparatus 5, and a fourth straightening deflection apparatus 6. The four straightening deflection devices are uniformly distributed below the multi-angle deflection device 2. A first diaphragm 7, a second diaphragm 8, a third diaphragm 9 and a fourth diaphragm 10 are respectively and correspondingly arranged below the first straightening deflection device 3, the second straightening deflection device 4, the third straightening deflection device 5 and the fourth straightening deflection device 6. The working principle is as follows:
the electron beam is emitted by the electron emission source 1 and enters the multi-angle deflection device 2 along the main electron optical axis, an electric field perpendicular to the moving direction of the electron beam is applied between the polar plates of the multi-angle deflection device 2, and the electron is negatively charged, so that the electron beam moves along a parabola under the action of the electric field force when passing through the electric field area, and continues to move linearly along the deflected direction after leaving the electric field area. Fig. 2 shows a schematic circuit diagram of the multi-angle deflection apparatus 2 in this embodiment, wherein a measure combining the high-frequency signal generator 12 and the voltage amplifier 13 is adopted, that is, the high-frequency signal generator 12 and the voltage amplifier 13 are used as driving sources, and the high-frequency signal generator 12 provides a high-frequency signal source, so as to implement fast switching of deflection fields in different directions by applying different voltages to the plate 11, the related art is a mature technology, and is not described herein again, and in other embodiments, any other measure in the prior art may also be adopted to implement switching of deflection fields of the multi-angle deflection apparatus 2. At the time point t1, the multi-angle deflection device 2 deflects the electron beam towards the first alignment deflection device 3, enters from the center of the first alignment deflection device 3, is aligned to be parallel to the main electron optical axis again under the deflection action of the first alignment deflection device 3, and then enters the next stage of electron optical system through the first diaphragm 7. At the time point t2, the external voltage of the multi-angle deflection device 2 changes, the deflection direction of the electron beam is changed, the electron beam enters the second straightening deflection device 4, is straightened by the second straightening deflection device 4, and then enters the next stage of electron optical system through the second diaphragm 8. By analogy, at time points t3 and t4, the electron beams are respectively straightened by the third straightening deflection device 5 and the fourth straightening deflection device 6 and then respectively enter the next-stage electron optical system through the third diaphragm 9 and the fourth diaphragm 10, so that the time-sharing multiplexing of the single electron beams is realized, the parallel or approximately parallel work of multiple electron beams under the condition of the single electron beam source is realized, and the higher the switching frequency of the multi-angle deflection device 2 is, the more obvious the parallel work effect is.
The above embodiments are only examples, in other embodiments, the number of straightening deflection devices in the deflection device set may be 2, 3 or more than 4, the deflection device set may also be multi-stage, and in case of using multi-stage deflection device sets, the working principle of each stage of deflection device set is the same as the foregoing principle.
The single-electron-beam time-sharing multiplexing device provided by the invention can switch electron beams back and forth in different electron optical light paths at a certain frequency by matching the multi-angle deflection device with the corresponding plurality of straightening deflection devices, so that the aim of realizing parallel work of a plurality of electron beams by using a lower cost and a simpler process can be fulfilled.
While the invention has been described with reference to specific preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A single electron beam time division multiplexing device is characterized by comprising at least one stage of deflection device set, wherein the deflection device set comprises a multi-angle deflection device and a plurality of straightening deflection devices, the multi-angle deflection device is used for deflecting electron beams entering the multi-angle deflection device along the original direction to different directions at different time points, and the straightening deflection devices are arranged below the multi-angle deflection device and are respectively used for correcting the moving directions of the electron beams from the multi-angle deflection device to the directions parallel to the original direction.
2. The single electron beam time division multiplexing device according to claim 1, wherein a diaphragm is disposed below at least one of the alignment deflection units.
3. The single electron beam time division multiplexing device according to claim 2, wherein a diaphragm is disposed below any one of the alignment deflection units.
4. The single-beam time-sharing multiplexing device according to claim 1, comprising more than two deflection unit sets, wherein each of the alignment deflection units of any one of the preceding deflection unit sets corresponds to one of the succeeding deflection unit sets, and the multi-angle deflection unit of the succeeding deflection unit set is located below one of the alignment deflection units of the preceding deflection unit set.
5. The single electron beam time division multiplexing device according to claim 4, wherein a diaphragm is disposed below at least one of the alignment deflection units.
6. The single electron beam time division multiplexing device according to claim 5, wherein a diaphragm is disposed below any one of the alignment deflection units.
7. The single-beam time-sharing multiplexing device as claimed in claim 5, wherein a diaphragm is disposed under each of the aligned deflection units of the deflection unit set of the last stage.
8. The single electron beam time division multiplexing device of claim 1, wherein the plurality of alignment deflection devices are four alignment deflection devices.
9. The single electron beam time division multiplexing device according to claim 1 or 8, wherein the plurality of alignment deflection devices are uniformly arranged below the multi-angle deflection device.
10. The single electron beam time division multiplexing device according to claim 1, wherein the driving sources of the multi-angle deflection devices are a high frequency signal generator and a voltage amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210713909.6A CN115188649A (en) | 2022-06-22 | 2022-06-22 | Single electron beam time-sharing multiplexing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210713909.6A CN115188649A (en) | 2022-06-22 | 2022-06-22 | Single electron beam time-sharing multiplexing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115188649A true CN115188649A (en) | 2022-10-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210713909.6A Pending CN115188649A (en) | 2022-06-22 | 2022-06-22 | Single electron beam time-sharing multiplexing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115188649A (en) |
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2022
- 2022-06-22 CN CN202210713909.6A patent/CN115188649A/en active Pending
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