CN115181940B - Optical vacuum coating equipment - Google Patents

Optical vacuum coating equipment Download PDF

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Publication number
CN115181940B
CN115181940B CN202210835662.5A CN202210835662A CN115181940B CN 115181940 B CN115181940 B CN 115181940B CN 202210835662 A CN202210835662 A CN 202210835662A CN 115181940 B CN115181940 B CN 115181940B
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China
Prior art keywords
fixedly connected
bevel gears
film plating
box door
wall
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CN202210835662.5A
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Chinese (zh)
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CN115181940A (en
Inventor
吴雪峰
陈从礼
陈穴涛
华其中
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Suzhou Dofly M & E Technology Co ltd
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Suzhou Dofly M & E Technology Co ltd
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Priority to CN202210835662.5A priority Critical patent/CN115181940B/en
Publication of CN115181940A publication Critical patent/CN115181940A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention relates to the field of film plating equipment, in particular to optical vacuum film plating equipment which comprises a film plating machine box body, wherein an opening of the film plating machine box body is arranged on one side, a sealing groove is formed in the periphery of the opening of the film plating machine box body, the sealing groove is of a frame-shaped structure, movable grooves are formed in the inner walls of the front part and the rear part of the lower end of the film plating machine box body, a second sliding groove is formed in the outer wall of the lower end of the film plating machine box body, and a second limiting shell is fixedly connected to the outer wall of the lower end of the film plating machine box body. The box door is arranged on the box body of the film plating machine through the first pulling mechanism and the second pulling mechanism, the first pulling mechanism and the second pulling mechanism are respectively connected with the driving mechanism through the first connecting mechanism and the second connecting mechanism, and when the box door is used, the first pulling mechanism and the second pulling mechanism are driven to operate through the driving mechanism, the box door is pulled out of the box body of the film plating machine, the placing frame is pulled out of the box body of the film plating machine, and a worker can conveniently take a film plating product on the placing frame.

Description

Optical vacuum coating equipment
Technical Field
The invention relates to the field of coating equipment, in particular to optical vacuum coating equipment.
Background
Optical coating refers to the process of coating a metal (or dielectric) film(s) on the surface of an optical part. The purpose of coating film on the surface of the optical part is to achieve the requirements of reducing or increasing light reflection, beam splitting, color separation, light filtering, polarization and the like, vacuum coating film is one of the methods used for optical coating film, and vacuum coating machine is the device used for optical coating film.
At present, most of vacuum coating machines used at present are used for manually placing coating products into the coating machine during operation, then manually taking out the products from the coating machine, because the internal space of the coating is small, the taking process is troublesome, when a worker takes the products, the products are easy to collide with internal parts of the coating machine to cause damage, and the workers manually open the coating machine, the whole of the coating machine is easy to shake during pulling, so that the products shake in the coating machine, and the products are easy to collide on the internal parts of the coating machine.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides optical vacuum coating equipment.
The technical scheme adopted for solving the technical problems is as follows: the utility model provides an optical vacuum coating equipment, includes the coating machine box, the opening setting of coating machine box is in one side, the seal groove has been seted up to the opening part periphery of coating machine box, the seal groove is frame structure, all set up the movable groove on the lower extreme front and back portion inner wall of coating machine box, set up the second spout on the lower extreme outer wall of coating machine box, fixedly connected with second spacing shell on the lower extreme outer wall of coating machine box, the internally mounted of second spacing shell has second pulling mechanism, set up first spout on the upper end outer wall of coating machine box, fixedly connected with first spacing shell on the upper end outer wall of coating machine box, the internally mounted of first spacing shell has first pulling mechanism, first pulling mechanism and second pulling mechanism connect the box door jointly, the box door is located one side of coating machine box, the inside upper and lower extreme of box all fixedly connected with observation window, the box is close to the one side periphery of coating machine box fixedly connected with sealing frame, sealing frame and looks phase-match, the first side of the same connecting mechanism is connected with the first bevel gear of the first connecting rod and the second connecting mechanism, seven side of the first connecting mechanism is connected with the first connecting rod and the first connecting mechanism is connected with the second connecting side of the first connecting mechanism, the first connecting mechanism is connected with the first connecting rod of the side of the first connecting mechanism, the circumference outer walls of the front part and the rear part of the fixing rod are respectively sleeved with a bearing and are fixedly connected with a third mounting plate, the third mounting plates are respectively and fixedly connected with the outer wall of the box body of the film plating machine, the middle outer wall of the fixing rod is sleeved with a conical toothed ring and is fixedly connected with a conical toothed ring, the outer wall of the other side of the box body of the film plating machine is fixedly connected with a shell, the shell covers the outside of first coupling mechanism and second coupling mechanism, install actuating mechanism on the lateral wall of one side middle part that the shell kept away from the coating film machine box, actuating mechanism and awl tooth ring meshing are connected, all fixedly connected with backup pad on the outer wall of lower extreme both sides of coating film machine box front and back portion.
Specifically, two first coupling mechanism all includes first bull stick, all establish and fixedly connected with first mounting panel through the bearing housing on the upper and lower end circumference outer wall of first bull stick, the equal fixedly connected with of first mounting panel is on the outer wall of coating film machine box, the equal fixedly connected with third bevel gear of upper end of first bull stick, the equal fixedly connected with fourth bevel gear of lower extreme of first bull stick, fourth bevel gear all is connected with the meshing of homonymy seventh bevel gear.
Specifically, two the second coupling mechanism all includes the second bull stick, all establish and fixedly connected with second mounting panel through the bearing housing on the upper and lower end circumference outer wall of second bull stick, the equal fixedly connected with of second mounting panel is on the outer wall of coating film machine box, the equal fixedly connected with sixth bevel gear of lower extreme of second bull stick, the equal fixedly connected with fifth bevel gear of upper end of second bull stick, the equal and homonymy seventh bevel gear meshing of fifth bevel gear is connected.
Specifically, the first pulling mechanism comprises a first push-pull plate, the inside at first spacing shell of first push-pull plate sliding connection, one side that first push-pull plate is close to the chamber door extends to the outside of first spacing shell and fixed connection at the upper end of chamber door, first screw has all been seted up to the inside front and back side of first push-pull plate, the opening of first screw all sets up the one side that the chamber door was kept away from at first push-pull plate, the inside equal threaded connection of first screw has first screw rod, the one end that the chamber door was kept away from to first screw rod all extends to the outside of first push-pull plate, the one end that the chamber door was kept away from to first screw rod all runs through fixed connection on one side lateral wall that the chamber door was kept away from to first spacing shell through the bearing, the one end that the chamber door was kept away from to first screw rod all fixedly connected with first bevel gear, first bevel gear all is connected with the third bevel gear meshing of homonymy first coupling mechanism, one side that the chamber door was kept away from to first push-pull plate lower extreme fixedly connected with first slider, first slider sliding connection is in the inside of first spout.
Specifically, the second pulling mechanism comprises a second push-pull plate, the second push-pull plate is slidingly connected in the second limiting shell, one side of the second push-pull plate, which is close to the box door, extends to the outside of the second limiting shell and is fixedly connected to the lower end of the box door, second screw holes are formed in the front side and the rear side of the inside of the second push-pull plate, openings of the second screw holes are formed in one side, which is far away from the box door, of the second push-pull plate, a second screw rod is in threaded connection with the inside of the second screw hole, one end, which is far away from the box door, of the second screw rod extends to the outside of the second push-pull plate, one end, which is far away from the box door, of the second screw rod is fixedly connected to one side wall, which is far away from the box door, of the second screw rod is fixedly connected with a second bevel gear, the second bevel gear is in meshed connection with a sixth bevel gear of the same side second connecting mechanism, one side, which is far away from the box door, of the upper end of the second push-pull plate is fixedly connected with a second slide block, and the second slide block is slidingly connected to the inside of the second slide groove.
Specifically, the rack includes bottom plate and roof, bottom plate and roof are fixed connection respectively and are close to one side lower extreme and the upper end of coating film machine box at the chamber door, one side that chamber door was kept away from to bottom plate and roof all extends to the inside of coating film machine box, the bottom plate is close to one side and the part front and back side that keeps away from the chamber door mutually all fixedly connected with riser, two the riser is close to one side middle part of chamber door all fixedly connected with medium plate, one side fixedly connected with that the riser was kept away from to the medium plate is on the part chamber door between two observation windows, the bottom plate lower extreme is kept away from one side front and back part of chamber door all fixedly connected with slide, the indent has all been seted up to the lower extreme of slide, the inside all sliding connection of indent has the ball, the lower extreme of ball all extends to the inside of the outside and sliding connection in same side indent of place slide.
Specifically, actuating mechanism includes driving motor, driving motor fixed connection is on the shell, driving motor's output is towards the awl ring, through drive shaft fixedly connected with drive gear on driving motor's the output, drive gear and awl ring meshing are connected, driving motor's outside cover is equipped with the protective housing, one side cover that the protective housing is close to the shell is established and fixedly connected with fixed frame, fixed frame passes through the bolt and can dismantle the connection on the outer wall of shell.
Specifically, the front and back parts of one side, close to the box door, of the lower end of the second push-pull plate are fixedly connected with rollers, and the lower ends of the rollers are leveled with the lower ends of the supporting plates.
The invention has the beneficial effects that:
(1) The box door is arranged on the box body of the film plating machine through the first pulling mechanism and the second pulling mechanism, the first pulling mechanism and the second pulling mechanism are respectively connected with the driving mechanism through the first connecting mechanism and the second connecting mechanism, and when the box door is used, the first pulling mechanism and the second pulling mechanism are driven to operate through the driving mechanism, the box door is pulled out of the box body of the film plating machine, the placing frame is pulled out of the box body of the film plating machine, and a worker can conveniently take a film plating product on the placing frame.
(2) Because the box door of the invention can pull the rack out of the box body of the film plating machine when being opened, the film plating product can be conveniently taken out, and meanwhile, the situation that the film plating product collides with the parts in the box body of the film plating machine in the taking process to cause damage can be prevented.
(3) Because the box door is pulled out from the box body of the film plating machine through the operation of the driving mechanism, the box door does not need to be manually pulled, and the film plating product on the placing rack can be prevented from shaking and striking on components in the box body of the film plating machine in the process of opening the box door.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic view of a cut-away structure provided by the present invention;
FIG. 2 is an enlarged view of the area A in FIG. 1;
fig. 3 is a schematic diagram of a connection structure of a first connection mechanism, a second connection mechanism and a driving mechanism provided by the present invention;
fig. 4 is a schematic view of a rack structure provided by the present invention;
FIG. 5 is a schematic diagram of a first push-pull plate and a second push-pull plate according to the present invention;
FIG. 6 is a schematic diagram of a carriage according to the present invention;
fig. 7 is a schematic side view of the present invention.
In the figure: 1. the film plating machine box body; 2. a moving groove; 3. sealing grooves; 4. a first pulling mechanism; 41. a first push-pull plate; 42. a first screw hole; 43. a first screw; 44. a first bevel gear; 45. a first slider; 5. a second pulling mechanism; 51. a second push-pull plate; 52. a second screw hole; 53. a second screw; 54. a second bevel gear; 55. a second slider; 56. a roller; 6. a first connection mechanism; 61. a first rotating lever; 62. a first mounting plate; 63. a third bevel gear; 64. a fourth bevel gear; 7. a second connection mechanism; 71. a second rotating rod; 72. a second mounting plate; 73. a fifth bevel gear; 74. a sixth bevel gear; 8. a driving mechanism; 81. a driving motor; 82. a drive gear; 83. a protective shell; 84. a fixed frame; 85. a bolt; 9. a placing rack; 91. a bottom plate; 92. a vertical plate; 93. a top plate; 94. a middle plate; 95. a slide; 96. rolling grooves; 97. a ball; 10. a door; 11. a sealing frame; 12. a first chute; 13. a second chute; 14. a first limit housing; 15. the second limiting shell; 16. a support plate; 17. a housing; 18. a seventh bevel gear; 19. a fixed rod; 20. a third mounting plate; 21. conical toothed ring; 22. and an observation window.
Detailed Description
The invention is further described in connection with the following detailed description in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the invention easy to understand.
As shown in fig. 1-7, the optical vacuum coating equipment of the present invention comprises a coating machine box 1, wherein an opening of the coating machine box 1 is arranged at one side, a sealing groove 3 is formed around the opening of the coating machine box 1, the sealing groove 3 is in a frame structure, moving grooves 2 are formed on inner walls of front and rear parts of the lower end of the coating machine box 1, a second sliding groove 13 is formed on the outer wall of the lower end of the coating machine box 1, a second limiting shell 15 is fixedly connected on the outer wall of the lower end of the coating machine box 1, a second pulling mechanism 5 is installed inside the second limiting shell 15, a first sliding groove 12 is formed on the outer wall of the upper end of the coating machine box 1, a first limiting shell 14 is fixedly connected on the outer wall of the upper end of the coating machine box 1, a first pulling mechanism 4 is installed inside the first limiting shell 14, the first pulling mechanism 4 and the second pulling mechanism 5 are connected with a box door 10 together, the box door 10 is positioned at one side of the film plating machine box body 1, the upper end and the lower end of the inner part of the box door 10 are fixedly connected with an observation window 22, the periphery of one side of the box door 10, which is close to the film plating machine box body 1, is fixedly connected with a sealing frame 11, the sealing frame 11 is matched with a sealing groove 3, a placing rack 9 is arranged at one side of the box door 10, which is close to the film plating machine box body 1, the outer walls of the upper ends of the front and the rear parts of the other side of the film plating machine box body 1 are respectively provided with a first connecting mechanism 6, the two first connecting mechanisms 6 are respectively connected with the first pulling mechanism 4, the outer walls of the lower ends of the front and the rear parts of the other side of the film plating machine box body 1 are respectively provided with a second connecting mechanism 7, the two second connecting mechanisms 7 are respectively connected with the second pulling mechanism 5, the two second connecting mechanisms 7 and the first connecting mechanisms 6 on the same side are connected with a seventh bevel gear 18 together, the two seventh bevel gears 18 are connected with a fixed rod 19 together, the circumference outer walls of the front part and the rear part of the fixed rod 19 are sleeved with bearings and fixedly connected with a third mounting plate 20, the third mounting plate 20 is fixedly connected to the outer wall of the film plating machine box 1, the middle outer wall of the fixed rod 19 is sleeved with a conical toothed ring 21 and fixedly connected with a shell 17 on the outer wall of the other side of the film plating machine box 1, the shell 17 covers the first connecting mechanism 6 and the second connecting mechanism 7, a driving mechanism 8 is arranged on the middle side wall of one side of the shell 17 far away from the film plating machine box 1, the driving mechanism 8 is connected with the conical toothed ring 21 in a meshed mode, and the outer walls of the two sides of the lower end of the front part and the rear part of the film plating machine box 1 are fixedly connected with support plates 16.
Specifically, two first coupling mechanism 6 all include first bull stick 61, establish and fixedly connected with first mounting panel 62 through the bearing housing on the upper and lower end circumference outer wall of first bull stick 61, first mounting panel 62 is all fixedly connected with on the outer wall of coating film machine box 1, the upper end of first bull stick 61 is all fixedly connected with third bevel gear 63, the lower extreme of first bull stick 61 is all fixedly connected with fourth bevel gear 64, fourth bevel gear 64 all meshes with and is connected with homonymous seventh bevel gear 18, two second coupling mechanism 7 all includes second bull stick 71, all establish and fixedly connected with second mounting panel 72 through the bearing housing on the upper and lower end circumference outer wall of second bull stick 71, all fixedly connected with sixth bevel gear 74 on the outer wall of second bull stick 71, the upper end of second bull stick 71 is all fixedly connected with fifth bevel gear 73, fifth bevel gear 73 all meshes with homonymous seventh bevel gear 18 and is connected with first chamber door 5 and is convenient for the second coupling mechanism 4 and pulling mechanism 5 to use in the pulling mechanism 5 when first chamber door 5 and pulling mechanism 5 are connected with the second coupling mechanism.
Specifically, the first pulling mechanism 4 includes a first push-pull plate 41, the first push-pull plate 41 is slidably connected in the first limiting shell 14, one side of the first push-pull plate 41, which is close to the door 10, extends to the outside of the first limiting shell 14 and is fixedly connected to the upper end of the door 10, first screw holes 42 are formed in front and back sides of the inside of the first push-pull plate 41, openings of the first screw holes 42 are formed in one side, far away from the door 10, of the first push-pull plate 41, first screws 43 are connected in threads in the first screw holes 42, one ends, far away from the door 10, of the first screws 43 extend to the outside of the first push-pull plate 41, one ends, far away from the door 10, of the first screws 43 are fixedly connected to one side wall, far away from the door 10, of the first limiting shell 14 through bearings, one ends, far away from the door 10, of the first screws 43 are fixedly connected with first bevel gears 44, the first bevel gears 44 are engaged with the third bevel gears 63 of the first connecting mechanism 6 on the same side, one side of the lower end of the first push-pull plate 41 away from the door 10 is fixedly connected with the first sliding block 45, the first sliding block 45 is slidingly connected inside the first sliding groove 12, the second pulling mechanism 5 comprises a second push-pull plate 51, the second push-pull plate 51 is slidingly connected inside the second limiting shell 15, one side of the second push-pull plate 51 close to the door 10 extends to the outside of the second limiting shell 15 and is fixedly connected with the lower end of the door 10, the front side and the rear side of the inside of the second push-pull plate 51 are respectively provided with a second screw hole 52, the openings of the second screw holes 52 are respectively arranged on one side of the second push-pull plate 51 away from the door 10, the inside of the second screw holes 52 are respectively connected with a second screw 53, the one end that second screw rod 53 kept away from chamber door 10 all extends to the outside of second push-and-pull board 51, the one end that second screw rod 53 kept away from chamber door 10 all runs through fixed connection through the bearing on the one side lateral wall that second spacing shell 15 kept away from chamber door 10, the one end that second screw rod 53 kept away from chamber door 10 all fixedly connected with second bevel gear 54, second bevel gear 54 all meshes with the sixth bevel gear 74 of homonymy second coupling mechanism 7 and is connected, one side fixedly connected with second slider 55 that chamber door 10 was kept away from to second push-and-pull board 51 upper end, second slider 55 sliding connection is in the inside of second spout 13, the one side front and back portion fixedly connected with gyro wheel 56 that second push-and-pull board 51 lower extreme is close to chamber door 10, the lower extreme of gyro wheel 56 is held flat with the lower extreme of backup pad 16, can be with chamber door 10 on coating machine box 1 during the use, conveniently fix chamber door 10 on coating machine box 1 and pull up chamber door 10 from coating machine box 1.
Specifically, rack 9 includes bottom plate 91 and roof 93, bottom plate 91 and roof 93 are fixed connection respectively in the door 10 and are close to one side lower extreme and the upper end of coating film machine box 1, bottom plate 91 and roof 93 keep away from the inside that one side of door 10 all extends to coating film machine box 1, bottom plate 91 and roof 93 are close to one side and keep away from the part front and back side of door 10 all fixedly connected with riser 92 jointly, two riser 92 is close to the equal fixedly connected with medium plate 94 in one side middle part of door 10, one side fixedly connected with that riser 92 was kept away from to medium plate 94 is on the part chamber door 10 between two observation windows 22, the equal fixedly connected with slide 95 in front and back portion of one side of door 10 is kept away from to the bottom plate 91 lower extreme, the rolling groove 96 has all been seted up to the lower extreme of slide 95, the inside of rolling groove 96 all sliding connection has ball 97, the lower extreme of ball 97 all extends to the outside of the lower extreme of place slide 95 and sliding connection is in the inside of same side of moving groove 2, can be used to place the coating film product, make the part in the machine box 1 draw the coating film machine box 1 to take out the product simultaneously can take out coating film machine box 1 conveniently.
Specifically, actuating mechanism 8 includes driving motor 81, driving motor 81 fixed connection is on shell 17, driving motor 81's output is towards awl ring 21, through drive shaft fixedly connected with drive gear 82 on driving motor 81's the output, drive gear 82 and awl ring 21 meshing are connected, driving motor 81's outside cover is equipped with protective housing 83, protective housing 83 is close to one side cover of shell 17 and establishes and fixedly connected with fixed frame 84, fixed frame 84 passes through bolt 85 and can dismantle the connection on the outer wall of shell 17, can drive first pulling mechanism 4 and the operation of second pulling mechanism 5 during the use, conveniently opens and closes chamber door 10.
In use, the invention is moved to a working place, a power supply is connected, a driving motor 81 is started, the driving motor 81 rotates a driving gear 82, the driving gear 82 rotates a fixed rod 19 through a bevel ring 21, the front part and the rear part of the fixed rod 19 rotate a same side fourth bevel gear 64 and a fifth bevel gear 73 through a seventh bevel gear 18, the fourth bevel gear 64 rotates a same side third bevel gear 63 through a first rotating rod 61, the third bevel gear 63 rotates a same side first bevel gear 44, the first bevel gear 44 rotates a connected first screw 43, the two first screws 43 jointly drive a first push-pull plate 41 to move in a direction away from the first bevel gear 44, the fifth bevel gear 73 rotates a same side sixth bevel gear 74 through a second rotating rod 71, the sixth bevel gear 74 rotates a same side second bevel gear 54, the second bevel gear 54 rotates a same side second screw 53, the two second screws 53 drive the second push-pull plate 51 to move towards the direction away from the second bevel gear 54 together, the second push-pull plate 51 and the first push-pull plate 41 drive the box door 10 to move towards the direction away from the film plating box body 1 together, the placing frame 9 is gradually pulled out from the interior of the film plating box body 1, then a worker can place a product to be plated on the bottom plate 91 and the middle plate 94 of the placing frame 9, then the driving motor 81 is reversely operated to enable the box door 10 to move towards the direction close to the film plating box body 1 until the sealing frame 11 on the box door 10 is clamped in the sealing groove 3 arranged at the opening of the film plating box body 1 to seal the film plating box body 1, then a film plating part on the film plating box body 1 is started, the film plating product on the placing frame 9 is subjected to film plating treatment, the worker can observe the film plating condition of the film plating product through the observation window 22 in the process, and when the film plating product is taken out, the driving motor 81 is enabled to operate positively, the placing frame 9 is pulled out of the film plating machine box body 1, then the film plating product is taken down from the placing frame 9, and the placing frame 9 is located outside the film plating machine box body 1, so that the film plating product can be prevented from being impacted on the inner parts of the film plating machine box body 1 in the taking process, and damage is caused.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the foregoing examples, and that the foregoing description and description are merely illustrative of the principles of this invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (2)

1. The utility model provides an optical vacuum coating equipment, includes coating machine box (1), its characterized in that, the opening setting of coating machine box (1) is in one side, seal groove (3) have been seted up to the opening part periphery of coating machine box (1), seal groove (3) are frame-shaped structure, all set up on the lower extreme front and back portion inner wall of coating machine box (1) and move groove (2), second spout (13) have been seted up on the lower extreme outer wall of coating machine box (1), fixedly connected with second spacing shell (15) on the lower extreme outer wall of coating machine box (1), internally mounted of second spacing shell (15) has second pulling mechanism (5), set up first spout (12) on the upper end outer wall of coating machine box (1), fixedly connected with first spacing shell (14) on the upper end outer wall of coating machine box (1), the internally mounted of first spacing shell (14) has first pulling mechanism (4), second pulling mechanism (5) are connected with second limiting shell (10) on the lower extreme outer wall of coating machine box (10), be close to one side (10) of sealing up box (10) of box door (10), the sealing frame (11) is matched with the sealing groove (3), a placing frame (9) is arranged on one side, close to the film plating machine box body (1), of the box door (10), a first connecting mechanism (6) is arranged on the outer wall of the upper end of the front and rear parts of the other side of the film plating machine box body (1), the two first connecting mechanisms (6) are all connected with a first pulling mechanism (4), a second connecting mechanism (7) is arranged on the outer wall of the lower end of the front and rear parts of the other side of the film plating machine box body (1), the two second connecting mechanisms (7) are all connected with a second pulling mechanism (5), a seventh bevel gear (18) is connected between the two second connecting mechanisms (7) and the first connecting mechanism (6) on the same side, a fixing rod (19) is fixedly connected between the two seventh bevel gears (18), a third connecting mounting plate (20) is sleeved on the circumference outer wall of the front and rear parts of the fixing rod (19) through a bearing, the third connecting mechanism (20) is fixedly connected with the outer wall of the film plating machine box body (1) on the middle part of the first connecting mechanism (17), the middle part of the film plating machine box body (1) is fixedly connected with the outer wall of the second connecting mechanism (17), a driving mechanism (8) is arranged on the side wall of the middle part of one side of the shell (17) far away from the film plating machine box body (1), the driving mechanism (8) is in meshed connection with a bevel gear ring (21), and support plates (16) are fixedly connected on the outer walls of the two sides of the lower end of the front part and the rear part of the film plating machine box body (1);
the two first connecting mechanisms (6) comprise first rotating rods (61), the circumference outer walls of the upper end and the lower end of each first rotating rod (61) are sleeved with bearings and fixedly connected with first mounting plates (62), the first mounting plates (62) are fixedly connected to the outer wall of a box body (1) of the film plating machine, the upper ends of the first rotating rods (61) are fixedly connected with third bevel gears (63), the lower ends of the first rotating rods (61) are fixedly connected with fourth bevel gears (64), and the fourth bevel gears (64) are in meshed connection with seventh bevel gears (18) on the same side;
the two second connecting mechanisms (7) comprise second rotating rods (71), the circumference outer walls of the upper end and the lower end of each second rotating rod (71) are sleeved with bearings and fixedly connected with second mounting plates (72), the second mounting plates (72) are fixedly connected to the outer wall of the box body (1) of the film plating machine, the lower ends of the second rotating rods (71) are fixedly connected with sixth bevel gears (74), the upper ends of the second rotating rods (71) are fixedly connected with fifth bevel gears (73), and the fifth bevel gears (73) are in meshed connection with seventh bevel gears (18) on the same side;
the first pulling mechanism (4) comprises a first push-pull plate (41), the first push-pull plate (41) is slidably connected to the inside of a first limiting shell (14), one side of the first push-pull plate (41) close to a box door (10) extends to the outside of the first limiting shell (14) and is fixedly connected to the upper end of the box door (10), first screw holes (42) are formed in the front side and the rear side of the inside of the first push-pull plate (41), openings of the first screw holes (42) are formed in one side, far away from the box door (10), of the first push-pull plate (41), first screw rods (43) are connected with first bevel gears (43) in a threaded mode, one ends, far away from the box door (10), of the first screw rods (43) are fixedly connected to the side wall, far away from the box door (10), of the first limiting shell (14) through bearings, of the first screw rods (43) are fixedly connected with first bevel gears (44) far away from the first box door (10), one ends, far away from the first bevel gears (45) of the first bevel gears (45) are fixedly connected with the first bevel gears (45) of the first bevel gears (41), one side, the first bevel gears (45) are fixedly connected with the first bevel gears (45) of the first bevel gears (45) are meshed with the first bevel gears (45), the first sliding block (45) is connected inside the first sliding groove (12) in a sliding way;
the second pulling mechanism (5) comprises a second push-pull plate (51), the second push-pull plate (51) is slidably connected in the second limiting shell (15), one side of the second push-pull plate (51) close to the box door (10) extends to the outside of the second limiting shell (15) and is fixedly connected to the lower end of the box door (10), second screw holes (52) are formed in the front side and the rear side of the inside of the second push-pull plate (51), openings of the second screw holes (52) are formed in one side, far away from the box door (10), of the second push-pull plate (51), second screw rods (53) are connected in a threaded mode, one end, far away from the box door (10), of the second screw rods (53) extends to the outside of the second push-pull plate (51), one end, far away from the box door (10), of the second screw rods (53) is fixedly connected to the side wall, far away from the box door (10), of the second bevel gears (54) of the second limiting shell (15) through bearings, of the second screw rods (53) is fixedly connected to one side, far away from the box door (10), of the second bevel gears (54) of the second box door (10) is fixedly connected with one side, the second bevel gears (54) of the second bevel gears (55) is fixedly connected with one side, far from the second bevel gears (55) of the second bevel gears (10), the second bevel gears (55) are fixedly connected with one end of the second bevel gears (55), and meshed with one end of the second bevel gears (55), the second sliding block (55) is connected inside the second sliding groove (13) in a sliding way;
the rack (9) comprises a bottom plate (91) and a top plate (93), the bottom plate (91) and the top plate (93) are respectively and fixedly connected to the lower end and the upper end of one side, close to the film plating machine box (1), of the box door (10), one side, far away from the box door (10), of the bottom plate (91) and the top plate (93) is respectively and fixedly connected with a vertical plate (92) on the front side and the rear side of the part, close to the side, far away from the box door (10), of the bottom plate (91) and the top plate (93), two middle plates (94) are respectively and fixedly connected to middle plates (94) on one side, far away from the vertical plate (92), of the box door (10), sliding seats (95) are respectively and fixedly connected to the front and rear parts of one side, far away from the box door (10), rolling grooves (96) are respectively formed in the lower ends of the sliding seats (95), rolling grooves (96) are respectively and the inner parts, close to the rolling balls (97) are respectively and slidingly connected to the outer sides of the rolling seats (95), and the rolling seats (97) are respectively and are connected to the outer sides of the rolling seats (2;
the driving mechanism (8) comprises a driving motor (81), the driving motor (81) is fixedly connected to the shell (17), the output end of the driving motor (81) faces towards the conical tooth ring (21), a driving gear (82) is fixedly connected to the output end of the driving motor (81) through a driving shaft, the driving gear (82) is meshed with the conical tooth ring (21), a protective shell (83) is sleeved outside the driving motor (81), one side, close to the shell (17), of the protective shell (83) is sleeved with a fixed frame (84) fixedly connected with the protective shell, and the fixed frame (84) is detachably connected to the outer wall of the shell (17) through a bolt (85).
2. An optical vacuum coating apparatus according to claim 1, wherein: the front and rear parts of one side, close to the box door (10), of the lower end of the second push-pull plate (51) are fixedly connected with rollers (56), and the lower ends of the rollers (56) are leveled with the lower end of the supporting plate (16).
CN202210835662.5A 2022-07-15 2022-07-15 Optical vacuum coating equipment Active CN115181940B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN210560700U (en) * 2019-10-28 2020-05-19 常州鑫立离子技术有限公司 But optical vacuum coating machine of automated inspection gas tightness
CN112706279A (en) * 2021-01-29 2021-04-27 李龙洋 Concrete pipe pile pouring device
CN114311628A (en) * 2021-12-30 2022-04-12 派珂纳米科技(苏州)有限公司 Plasma vacuum coating film covering machine and using method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN210560700U (en) * 2019-10-28 2020-05-19 常州鑫立离子技术有限公司 But optical vacuum coating machine of automated inspection gas tightness
CN112706279A (en) * 2021-01-29 2021-04-27 李龙洋 Concrete pipe pile pouring device
CN114311628A (en) * 2021-12-30 2022-04-12 派珂纳米科技(苏州)有限公司 Plasma vacuum coating film covering machine and using method thereof

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