CN115128718B - Processing method of non-modified high-precision light reflecting mirror - Google Patents
Processing method of non-modified high-precision light reflecting mirror Download PDFInfo
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- CN115128718B CN115128718B CN202210909726.1A CN202210909726A CN115128718B CN 115128718 B CN115128718 B CN 115128718B CN 202210909726 A CN202210909726 A CN 202210909726A CN 115128718 B CN115128718 B CN 115128718B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0031—Machines having several working posts; Feeding and manipulating devices
- B24B13/0037—Machines having several working posts; Feeding and manipulating devices the lenses being worked by different tools, e.g. for rough-grinding, fine-grinding, polishing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Optical Elements Other Than Lenses (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention discloses a processing method of an unmodified high-precision light reflecting mirror, which comprises a reflecting mirror and a matrix, wherein the chemical components of the reflecting mirror and the matrix are SiC, and the density of the SiC is 3.2g/cm 3 And the reflector and the matrix are of an integrated structure. The invention solves the problem of the change of the mirror surface type after the supporting shaft is installed. The surface type stability is stronger, the environmental adaptability is stronger, and the density of silicon carbide is lower than titanium alloy, has more advantage in space lightweight direction.
Description
Technical Field
The invention relates to the technical field of optical systems, in particular to a processing method of a non-modified high-precision light reflecting mirror.
Background
The light reflector is used as an important optical component in an optical system, and the integral structural rigidity of the light reflector influences the deformation of the mirror surface of the reflector, and the deformation has a larger influence on the imaging quality. The weight of the existing light reflecting mirror is reduced as much as possible on the premise of ensuring the structural rigidity, and the back of the light reflecting mirror is vertically provided with a triangular, rectangular, hexagonal, fan-shaped and other matrix supporting structure.
The reflector is composed of a mirror surface and a matrix through welding or cementing, wherein the mirror surface is used for guaranteeing reflection or transmission of electromagnetic waves, and the matrix is used for guaranteeing surface type precision of the mirror surface through positioning and supporting the mirror surface. The light reflector is fixed on the equipment through a matrix arranged on the back support, and the load received after the installation is overload, impact, vibration and the like. The traditional light reflecting mirror is manufactured by sintering glass on the surface of a titanium alloy substrate, the problem that the difference of thermal expansion coefficients of glass and the titanium alloy substrate is large exists, in the actual use process, large deformation is generated, a back substrate supporting structure adopted by the traditional light reflecting mirror is not designed according to the actual loaded state of the reflecting mirror, and particularly for an elliptical light reflecting mirror, the structural rigidity of the elliptical light reflecting mirror in the direction perpendicular to the mirror surface is low, two shafts are arranged on two sides of the elliptical light reflecting mirror, and the mirror surface of the light reflecting mirror is easy to deform under the overload condition because of self gravity and axial partial stress are too large, so that the optical imaging quality is influenced.
According to the existing silicon carbide polishing method, an adhesion layer is added in a chemical mode or a coating mode, the adhesion layer is polished, and the silicon carbide is modified to meet the requirement of high-precision surface type, for example, a coating layer such as IPSSiC, CVDSiC, PVDSiC is designed on the surface of a reflecting mirror, so that the silicon carbide reflecting mirror manufactured by the process has the defects of inconsistent thermal expansion coefficient, residual stress of the coating layer and the like, and the surface type is easy to change in the practical application process.
Disclosure of Invention
The invention aims to provide a processing method of a non-modified high-precision light reflecting mirror, so as to meet the requirement of the reflecting mirror on higher surface shape precision under the gravity or supporting force and temperature-varying stress load.
The technical scheme adopted by the invention for achieving the purpose is as follows:
a non-modified high-precision light reflecting mirror comprises a reflecting mirror and a matrix, wherein the chemical components of the reflecting mirror and the matrix are SiC, and the density of the SiC is 3.2g/cm 3 And the reflector and the matrix are of an integrated structure.
Wherein, the back shaft is installed to the both sides of base member.
A processing method of an unmodified high-precision light reflecting mirror comprises the following steps:
s1, preparing a SiC optical blank, and carrying out weight reduction processing on the SiC optical blank according to the preset size parameters of the reflector and the substrate;
s2, finely grinding the reflecting surface of the reflecting mirror;
s3, polishing the reflecting surface of the reflecting mirror by using diamond powder to remove pits;
s4, aging treatment is carried out on the reflector and matrix integrated structure; the stress releasing process eliminates the material stress and has no influence on the crystal form;
s5, carrying out fine polishing on the reflecting surface of the reflecting mirror by using a single-shaft polishing machine, testing the surface type result 1 until the requirement is met, mounting a supporting shaft, testing the surface type result 2, and observing the surface type change; if the surface shape is changed, repeatedly polishing the reflecting surface of the reflecting mirror by using a single-shaft polishing machine;
s6, repeatedly assembling the mounting shaft, and repeatedly repairing and polishing the surface type according to the method S5, wherein the repeated steps are repeated for 6-7 times until the surface type is within 1/60 wavelength; wherein, according to the surface type height map, the high point position is made to be low.
S7, mounting the support shaft by using a torque screwdriver, repeatedly mounting and dismounting for 3 times, repeatedly mounting and dismounting, ensuring that the surface type precision is unchanged, and ensuring that the surface type is unchanged during assembly; and if the surface type precision of repeated disassembly and assembly is changed, repeating the steps S5-S7.
The S3 polishing process of the invention comprises the following steps: the diamond powder with different granularities is used for carrying out rough polishing on the reflecting surface, the diamond powder with granularity W0.8 is used for carrying out initial rough polishing, the rotating speed is 150-200r/min, and when the surface type precision reaches 1/20 wavelength, the diamond powder with granularity W0.5 is selected for carrying out finish polishing.
In the step S1, a high-speed machining center is used, and grinding wheels are used for grinding, so that the weight reduction requirement is met.
In the S2 step, siC or B with different particle sizes is used 4 And C, grinding the reflecting surface by the grinding material. The fine grinding process comprises the following steps: and (3) finely grinding the reflecting surface by using SiC abrasive materials with different granularities, wherein the rotating speed of a grinding head is 150-200r/min, the pressure of the grinding head is 34-40.5N, the granularity of the abrasive materials is W14 in the initial stage of fine grinding, when the roughness reaches 1.2, the abrasive materials with the granularity of W7 are selected, and in the final stage of fine grinding, the roughness reaches within 1.0, and 5-7 low diaphragms are ensured.
S5, repeatedly polishing the reflecting surface of the reflecting mirror by using a single-shaft polishing machine, wherein the method comprises the following specific operations: aiming at the surface type test high points, the surface type high points are polished down by adopting a pressure applying mode, and the reflecting surface of the reflecting mirror is polished by utilizing a single-shaft polishing machine.
After the integrated reflector is processed, the supporting shaft is repeatedly disassembled and assembled for 3 times, and the surface shape is within 1/60 wavelength.
After the integrated reflector is processed, an environmental test GJB150.5A-2009 temperature impact test is carried out, the surface type is rechecked, and the surface type is within 1/60 wavelength.
Laboratory detection results show that the reflector can ensure image quality under the temperature change condition of 4 ℃, and the mechanical test results are basically consistent with theoretical analysis; after mechanical and thermal environment tests, the shape of the reflecting mirror is stable, the surface shape accuracy (RMS) value of the reflecting mirror is better than 1/60 under the condition of axial gravity, and analysis and test results show that the reflecting mirror and the processing method thereof are reasonable and can meet the application requirements.
According to the invention, the silicon carbide reflector substrate is used as a whole to replace the titanium alloy and the glass welding body, so that the deformation of the silicon carbide reflector substrate caused by different thermal expansion coefficients can be effectively solved, the thermal expansion coefficient of silicon carbide is particularly low, and the surface type stability is higher in the use process. The density of the silicon carbide is 3.2g/cm 3 The density of the titanium alloy is 4.51g/cm 3 Silicon carbide is more advantageous in the light weight direction.
The invention solves the problem of the change of the mirror surface type after the supporting shaft is installed. The surface type stability is stronger, the environmental adaptability is stronger, and the density of silicon carbide is lower than titanium alloy, has more advantage in space lightweight direction.
Drawings
FIGS. 1 and 2 are schematic front and back views, respectively, of the present invention;
FIG. 3 is a graph showing the results of prior art mirror surface detection of a SiC mirror;
FIG. 4 shows the detection result of the mirror surface of the present invention;
fig. 5 is a schematic view of a weight-reducing structure according to the present invention.
In the figure: 1.2 reflecting mirrors, 3 reflecting surfaces, a matrix, 4 supporting shafts.
Description of the embodiments
An unmodified high-precision light reflecting mirror, as shown in figures 1 and 2, comprises a reflecting mirror 1 and a matrix 3, wherein the chemical components of the reflecting mirror 1 and the matrix 3 are SiC, and the density of the SiC is 3.2g/cm 3 And the reflector 1 and the substrate 3 are of an integrated structure. Wherein the supporting shafts 4 are installed at both sides of the base body 3. As shown in the figure, the two symmetry axes are not symmetrical, and the stress of the reflecting surface is distributed before the supporting shaft is installed in the prior artEven, but after the support shaft is installed, axial tension is generated, so that local stress is overlarge, the surface type precision of the reflector is greatly influenced (as shown in fig. 3), and different colors represent changes caused by axial pressure or stress and surface type. The invention uses special processing method to make the mirror surface type of the supporting shaft not changed, as shown in figure 4, the surface type of the supporting shaft is shown in the following steps: the axial pressure or stress is eliminated, the color is uniform, and the surface shape is good.
A processing method of an unmodified high-precision light reflecting mirror comprises the following steps:
s1, preparing a SiC optical blank, and carrying out weight reduction processing on the SiC optical blank according to the preset size parameters of the reflector and the substrate; grinding is carried out by using a high-speed machining center and a grinding wheel, so that the weight reduction requirement is met; fig. 5 is a schematic view of the weight-loss structure after processing according to the present invention.
S2, finely grinding the reflecting surface of the reflecting mirror to enable the roughness of the reflecting surface to be within 1.0; and (3) fine grinding: the reflective surface is refined using abrasives of different particle sizes.
S3, performing rough polishing on the reflecting surface of the reflecting mirror by using diamond powder to remove pits;
s4, aging treatment is carried out on the reflector and matrix integrated structure; the stress releasing process eliminates the material stress and has no influence on the crystal form;
s5, carrying out fine polishing on the reflecting surface of the reflecting mirror by using a single-shaft polishing machine, testing the surface type result 1 until the requirement is met, mounting a supporting shaft, testing the surface type result 2, and observing the surface type change; the surface type is changed, the reflecting surface of the reflecting mirror is repeatedly polished by using a single-shaft polishing machine, and the specific operation is as follows: aiming at the surface type high point, adopting a pressure applying mode to enable the surface type high point to be polished down, and polishing the reflecting surface of the reflecting mirror by using a single-shaft polishing machine;
s6, repeatedly assembling the mounting shaft, and repeatedly repairing and polishing the surface type according to the method S5, wherein the repeated steps are repeated for 6-7 times until the surface type is within 1/60 wavelength; according to the surface type height map, the high-point position is made low by the high-point position.
S7, mounting the support shaft by using a torque screwdriver, repeatedly mounting and dismounting for 3 times, repeatedly mounting and dismounting, ensuring that the surface type precision is unchanged, and ensuring that the surface type is unchanged during assembly; and if the surface type precision of repeated disassembly and assembly is changed, repeating the steps S5-S7.
Examples
A processing method of an unmodified high-precision light reflecting mirror comprises the following steps:
s1, preparing a SiC optical blank, and grinding the SiC optical blank by using a grinding wheel according to the preset size parameters of a reflector and a matrix by using a high-speed machining center so as to meet the weight reduction requirement;
s2, finely grinding the reflecting surface of the reflecting mirror: the reflective surface was refined using SiC abrasives of different particle sizes. The fine grinding process comprises the following steps: and (3) finely grinding the reflecting surface by using SiC abrasive materials with different granularities, wherein the rotating speed of a grinding head is 200r/min, the pressure of the grinding head is 35N, the granularity of the abrasive materials is W14 in the initial stage of fine grinding, when the roughness reaches 1.2, the abrasive materials with the granularity of W7 are selected, and in the final stage of fine grinding, the roughness reaches within 1.0, and 5-7 low apertures are ensured.
S3, carrying out rough polishing on the reflecting surface of the reflecting mirror by using diamond powder: the reflecting surface is roughly polished by using diamond powder with different granularities, the diamond powder granularity W0.8 is initially roughly polished, the rotating speed is 200r/min, and when the surface type precision reaches 1/20 wavelength, the diamond powder with the granularity W0.5 is selected for fine polishing;
s4, aging treatment is carried out on the reflector and matrix integrated structure; the stress releasing process eliminates the material stress and has no influence on the crystal form;
s5, carrying out fine polishing on the reflecting surface of the reflecting mirror by using a single-shaft polishing machine, testing the surface type result 1 until the requirement is met, mounting a supporting shaft, testing the surface type result 2, and observing the surface type change; if the surface shape is changed, repeatedly polishing the reflecting surface of the reflecting mirror by using a single-shaft polishing machine;
s6, repeatedly assembling the mounting shaft, and repeatedly repairing and polishing the surface type according to the method S5, wherein the repeated steps are repeated for 6-7 times until the surface type is within 1/60 wavelength; wherein, according to the surface type height map, the high point position is made to be low.
S7, mounting the support shaft by using a torque screwdriver, repeatedly mounting and dismounting for 3 times, repeatedly mounting and dismounting, ensuring that the surface type precision is unchanged, and ensuring that the surface type is unchanged during assembly; and if the surface type precision of repeated disassembly and assembly is changed, repeating the steps S5-S7.
Examples
A processing method of an unmodified high-precision light reflecting mirror comprises the following steps:
s1, preparing a SiC optical blank, and carrying out weight reduction processing on the SiC optical blank according to the preset size parameters of the reflector and the substrate;
s2, finely grinding the reflecting surface of the reflecting mirror: using B of different particle sizes 4 And C, grinding the reflecting surface by the grinding material. The fine grinding process comprises the following steps: the method comprises the steps of (1) finely grinding a reflecting surface by using SiC abrasive materials with different granularities, wherein the rotating speed of a grinding head is 155r/min, the pressure of the grinding head is 40.5N, the granularity of the abrasive materials is W14 in an initial stage of fine grinding, when the roughness reaches 1.2, the abrasive materials with the granularity of W7 are selected, and in a final stage of fine grinding, the roughness reaches within 1.0, and 5-7 low apertures are ensured;
s3, carrying out rough polishing on the reflecting surface of the reflecting mirror by using diamond powder: coarse polishing the reflecting surface by using diamond powder with different granularities, wherein the diamond powder granularity W0.8 is subjected to initial coarse polishing, the rotating speed is 150r/min, when the surface type precision reaches 1/20 wavelength, the diamond powder with the granularity W0.5 is selected, and pits are removed;
s4, aging treatment is carried out on the reflector and matrix integrated structure; the stress releasing process eliminates the material stress and has no influence on the crystal form;
s5, carrying out fine polishing on the reflecting surface of the reflecting mirror by using a single-shaft polishing machine, testing the surface type result 1 until the requirement is met, mounting a supporting shaft, testing the surface type result 2, and observing the surface type change; if the surface shape is changed, repeatedly polishing the reflecting surface of the reflecting mirror by using a single-shaft polishing machine;
s6, repeatedly assembling the mounting shaft, and repeatedly repairing and polishing the surface type according to the method S5, wherein the repeated steps are repeated for 6-7 times until the surface type is within 1/60 wavelength; wherein, according to the surface type height map, the high point position is made to be low.
S7, mounting the support shaft by using a torque screwdriver, repeatedly mounting and dismounting for 3 times, repeatedly mounting and dismounting, ensuring that the surface type precision is unchanged, and ensuring that the surface type is unchanged during assembly; and if the surface type precision of repeated disassembly and assembly is changed, repeating the steps S5-S7.
According to the analysis of FIG. 4, the integrated structure reflector processed by the invention eliminates axial pressure or stress, has uniform color and better surface shape.
Claims (5)
1. A processing method of an unmodified high-precision light reflecting mirror comprises a reflecting mirror and a matrix, wherein the chemical components of the reflecting mirror and the matrix are SiC, and the density of the SiC is 3.2g/cm 3 And the reflector and the matrix are of an integrated structure, and the method is characterized by comprising the following steps:
s1, preparing a SiC optical blank, and carrying out weight reduction processing on the SiC optical blank according to the preset size parameters of the reflector and the substrate;
s2, finely grinding the reflecting surface of the reflecting mirror to enable the roughness of the reflecting surface to be within 1.0; wherein, the fine grinding process is as follows: grinding materials with different granularities are used for fine grinding the reflecting surface, wherein the rotating speed of a grinding head is 150-200r/min, the pressure of the grinding head is 34-40.5N, the granularity of the grinding materials is W14 in the initial stage of fine grinding, when the roughness reaches 1.2 nm, the grinding materials with the granularity of W7 are selected, and in the final stage of fine grinding, the roughness reaches within 1.0, and 5-7 low diaphragms are ensured;
s3, polishing the reflecting surface of the reflecting mirror by using diamond powder to remove pits; the polishing process comprises the following steps: polishing the reflecting surface by using diamond powder with different granularities, wherein the diamond powder granularity W0.8 is subjected to initial rough polishing, the rotating speed is 150-200r/min, and when the surface type precision reaches 1/20 wavelength, the diamond powder with the granularity W0.5 is selected for finish polishing;
s4, aging treatment is carried out on the reflector and matrix integrated structure;
s5, carrying out fine polishing on the reflecting surface of the reflecting mirror by using a single-shaft polishing machine, testing the surface type result 1 until the requirement is met, mounting a supporting shaft, testing the surface type result 2, and observing the surface type change; if the surface shape is changed, repeatedly polishing the reflecting surface of the reflecting mirror by using a single-shaft polishing machine;
s6, repeatedly assembling the mounting shaft, and repeatedly repairing and polishing the surface type according to the method S5, wherein the repeated steps are repeated for 6-7 times until the surface type is within 1/60 wavelength;
s7, mounting the support shaft by using a torque screwdriver, repeatedly mounting and dismounting for 3 times, repeatedly mounting and dismounting, ensuring that the surface type precision is unchanged, and ensuring that the surface type is unchanged during assembly; and if the surface type precision of repeated disassembly and assembly is changed, repeating the steps S5-S7.
2. The method for processing the non-modified high-precision light reflecting mirror according to claim 1, wherein the method comprises the following steps: the supporting shafts are arranged on two sides of the base body.
3. The method for processing the non-modified high-precision light reflecting mirror according to claim 1, wherein the method comprises the following steps: in the step S1, a high-speed machining center is used, and grinding wheels are used for grinding, so that the weight reduction requirement is met.
4. The method for processing the non-modified high-precision light reflecting mirror according to claim 1, wherein the method comprises the following steps: in the S2 step, siC or B with different particle sizes is used 4 And C, grinding the reflecting surface by the grinding material.
5. The method for processing the non-modified high-precision light reflecting mirror according to claim 1, wherein the method comprises the following steps: s5, repeatedly polishing the reflecting surface of the reflecting mirror by using a single-shaft polishing machine, wherein the method comprises the following specific operations: aiming at the surface type test high points, the surface type high points are polished down by adopting a pressure applying mode, and the reflecting surface of the reflecting mirror is polished by utilizing a single-shaft polishing machine.
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| CN110187467A (en) * | 2019-07-12 | 2019-08-30 | 上海乂义实业有限公司 | A kind of reflecting mirror of drum structure |
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| CN103048764B (en) * | 2012-12-14 | 2015-05-13 | 中国航空工业集团公司洛阳电光设备研究所 | Light reflector |
| CN103091743B (en) * | 2013-01-11 | 2015-06-17 | 北京驰宇空天技术发展有限公司 | Metal ceramic optical reflecting mirror and manufacturing method thereof |
| CN108318952B (en) * | 2017-09-04 | 2020-04-24 | 哈尔滨工业大学 | Manufacturing process of SiC optical reflector based on 3D printing and diamond cutting |
| CN109946812A (en) * | 2019-03-29 | 2019-06-28 | 中国科学院上海技术物理研究所 | It is a kind of use at low temperature reflecting mirror shafting support and clamping device |
| CN113030916A (en) * | 2021-03-17 | 2021-06-25 | 福州高意光学有限公司 | Reflecting mirror for laser radar scanning |
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| CN110187467A (en) * | 2019-07-12 | 2019-08-30 | 上海乂义实业有限公司 | A kind of reflecting mirror of drum structure |
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