CN115112047B - 激光往复扫描***及其方法 - Google Patents
激光往复扫描***及其方法 Download PDFInfo
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- CN115112047B CN115112047B CN202210998069.2A CN202210998069A CN115112047B CN 115112047 B CN115112047 B CN 115112047B CN 202210998069 A CN202210998069 A CN 202210998069A CN 115112047 B CN115112047 B CN 115112047B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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CN202210998069.2A CN115112047B (zh) | 2022-08-19 | 2022-08-19 | 激光往复扫描***及其方法 |
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CN202210998069.2A CN115112047B (zh) | 2022-08-19 | 2022-08-19 | 激光往复扫描***及其方法 |
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CN115112047A CN115112047A (zh) | 2022-09-27 |
CN115112047B true CN115112047B (zh) | 2022-12-20 |
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CN115615357B (zh) * | 2022-12-20 | 2023-05-30 | 南京木木西里科技有限公司 | 一种测量平台振动消除补偿*** |
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JP2003083739A (ja) * | 2001-09-14 | 2003-03-19 | Minolta Co Ltd | 三次元形状計測装置 |
CN1573414A (zh) * | 2003-06-10 | 2005-02-02 | 富士胶片株式会社 | 像素位置特定方法、图像偏移修正方法、及图像形成装置 |
TWI609252B (zh) * | 2006-08-31 | 2017-12-21 | Nikon Corp | Moving body driving system and moving body driving method, pattern forming apparatus and method, exposure apparatus and method, element manufacturing method, and determination method |
CN102637018A (zh) * | 2012-04-10 | 2012-08-15 | 无锡国盛精密模具有限公司 | 点样仪的双闭环反馈定位控制***及控制方法 |
CN110645910A (zh) * | 2019-09-02 | 2020-01-03 | 北京控制工程研究所 | 一种基于激光扫描的工件三维尺寸自动检测***及方法 |
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Effective date of registration: 20221205 Address after: 2 / F, block B4, Jiulong lake international enterprise headquarters park, 19 Suyuan Avenue, Jiangning District, Nanjing City, Jiangsu Province (Jiangning Development Zone) Applicant after: Nanjing Mumusili Technology Co.,Ltd. Applicant after: Nanjing Yidi High-tech Co.,Ltd. Applicant after: Nanjing Roulin Intelligent Manufacturing Research Institute Co.,Ltd. Address before: 2 / F, block B4, Jiulong lake international enterprise headquarters park, 19 Suyuan Avenue, Jiangning District, Nanjing City, Jiangsu Province (Jiangning Development Zone) Applicant before: Nanjing Mumusili Technology Co.,Ltd. |
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Address after: 2 / F, block B4, Jiulong lake international enterprise headquarters park, 19 Suyuan Avenue, Jiangning District, Nanjing City, Jiangsu Province (Jiangning Development Zone) Patentee after: Nanjing Mumusili Technology Co.,Ltd. Patentee after: Nanjing Kaishimai Technology Co.,Ltd. Patentee after: Nanjing Roulin Intelligent Manufacturing Research Institute Co.,Ltd. Address before: 2 / F, block B4, Jiulong lake international enterprise headquarters park, 19 Suyuan Avenue, Jiangning District, Nanjing City, Jiangsu Province (Jiangning Development Zone) Patentee before: Nanjing Mumusili Technology Co.,Ltd. Patentee before: Nanjing Yidi High-tech Co.,Ltd. Patentee before: Nanjing Roulin Intelligent Manufacturing Research Institute Co.,Ltd. |