CN115085581A - Stick-slip driver and method for actively inhibiting rollback movement - Google Patents

Stick-slip driver and method for actively inhibiting rollback movement Download PDF

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CN115085581A
CN115085581A CN202210879202.2A CN202210879202A CN115085581A CN 115085581 A CN115085581 A CN 115085581A CN 202210879202 A CN202210879202 A CN 202210879202A CN 115085581 A CN115085581 A CN 115085581A
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driving
module
stick
triangular
amplification mechanism
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CN115085581B (en
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闫鹏
谢可才
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Shandong University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details

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Abstract

The invention relates to the technical field of micro-nano precision manufacturing and control, in particular to a stick-slip driver and a method for actively inhibiting rollback movement, wherein the stick-slip driver comprises a moving body and a driving body thereof, and the driving body comprises: the friction head consists of a triangular amplifying mechanism; the driving module is driven by piezoelectric ceramics, the output end of the driving module is connected with one input end of the triangular amplification mechanism, and the driving module can generate transverse displacement for driving the output end of the triangular amplification mechanism to transversely move; the backspacing suppression module is driven by piezoelectric ceramics, comprises a first lever amplification mechanism capable of generating longitudinal displacement, and the output end of the first lever amplification mechanism is connected with the input end of the triangular amplifier; the invention is provided with the driving module and the backspacing suppression module, realizes the decoupling of driving and active suppression of backspacing motion by adopting a mode of dual piezoelectric ceramics cooperative driving, and effectively suppresses the backspacing motion while ensuring the driving capability.

Description

Stick-slip driver and method for actively restraining rollback movement
Technical Field
The invention relates to the technical field of micro-nano precision manufacturing and control, in particular to a stick-slip driver and a method for actively inhibiting rollback movement.
Background
The precision positioning and driving technology is a key technology in equipment manufacturing industry, and is widely applied to various fields such as precision manufacturing, micro-nano technology, biomedical treatment, measurement and the like at present. The piezoelectric material has the advantages of high bandwidth, high response speed, high resolution, small volume, electromagnetic interference resistance and the like, and becomes a main driving part in the field of precision driving. Stick-slip actuators using piezoelectric materials are widely used in the design of linear and rotary piezoelectric actuators due to their simple structure and control.
Based on the stick-slip principle, the driving process of the stick-slip driver mainly comprises two periods of sticking and slipping. In the output displacement of the piezoelectric stick-slip driver, there is a generally backward motion, i.e., a "slip" cycle of the piezoelectric stick-slip driver. I.e. the output displacement reaches a maximum value first and then a certain distance of backward movement is generated. The generation of the reverse motion affects the output performance of the stick-slip piezoelectric actuator in three ways: (1) the driving efficiency is reduced; (2) the subsequent control difficulty is increased; (3) wear and heat are generated during repeated forward and reverse relative movements.
Disclosure of Invention
The invention aims to provide a stick-slip driver and a method for actively inhibiting rollback movement, so as to solve the problem of rollback movement in the output displacement of a piezoelectric stick-slip driver in the prior art. In order to achieve the above object, the present invention is achieved by the following technical solutions:
in a first aspect, the present invention provides a stick-slip driver for actively suppressing a rollback motion, including a moving body and a drive body thereof, the drive body including:
the friction head consists of a triangular amplifying mechanism;
the driving module is driven by piezoelectric ceramics, the output end of the driving module is connected with one input end of the triangular amplification mechanism, and the driving module can generate transverse displacement for driving the output end of the triangular amplification mechanism to transversely move;
and the backspacing suppression module is driven by piezoelectric ceramics and comprises a first lever amplification mechanism capable of generating longitudinal displacement, the output end of the first lever amplification mechanism is connected with the input end of the triangular amplifier, and the backspacing suppression module enables the friction head to separate or press the moving body.
As a further technical solution, the driving module includes a bridge amplification mechanism and a second lever amplification mechanism connected to an output end thereof.
As a further technical solution, an input end of the triangular amplification mechanism connected to the driving module is higher than an input end of the triangular amplification mechanism connected to the rollback suppression module.
As a further technical solution, the driving body further includes an adjusting plate, the driving body is provided with a straight beam type flexible hinge, and the driving body is moved away from or close to the moving body by adjusting an adjusting bolt provided on the adjusting plate.
As a further technical scheme, the adjusting plate further comprises a positioning platform, and the positioning platform is provided with a positioning surface matched with the driving body.
As a further technical scheme, the device also comprises a fixed bottom plate, and the adjusting plate and the moving body are both arranged on the fixed bottom plate.
As a further technical solution, the rollback prevention module further includes a straight beam type flexible hinge and a guide block cooperatively connected therewith, and the piezoelectric ceramic of the rollback prevention module drives the first lever amplification mechanism by driving the guide block.
As a further technical solution, the moving body is a cross roller guide, and the friction head moves on a side surface of the cross roller guide.
As a further technical scheme, each piezoelectric ceramic is respectively provided with an adjusting bolt for pre-tightening.
In a second aspect, the present invention provides a method for driving a stick-slip drive according to the first aspect, comprising:
before the driving module acts, the backspacing restraining module is electrified to act and generates longitudinal displacement, so that the output end of the triangular amplifying mechanism is close to the moving body and is pressed tightly;
the driving module is electrified to start acting, and the output end of the driving module generates transverse displacement, so that the output end of the triangular amplifying mechanism generates transverse motion and drives the moving body to generate transverse displacement;
the backspacing suppression module is powered off, so that the output end of the triangular amplification mechanism moves away from the moving body, the driving module drives the triangular amplification mechanism to generate reverse transverse output displacement at the moment, and the moving body does not generate backspacing motion.
The beneficial effects of the invention are as follows:
(1) the invention is provided with the driving module and the backspacing suppression module, adopts a dual piezoelectric ceramic cooperative driving mode, and the driving module and the backspacing suppression module are separately designed, before the reverse output of the driving module, the friction head is separated from the moving body through the backspacing suppression module, so that the decoupling of the driving and the active suppression of the backspacing motion is realized, the driving capability is ensured, and the backspacing motion is effectively suppressed.
(2) According to the invention, the straight beam type flexible hinges are arranged between the two sides of the driving body and the adjusting plate, and the driving body is far away from or close to the moving body by adjusting the adjusting bolts arranged on the adjusting plate. By rotating the third adjusting bolt, the connecting plate is pushed to generate longitudinal micro-displacement, and the fine adjustment of the longitudinal position of the driving body is realized.
(3) The input end of the triangular amplification mechanism connected with the driving module is higher than the input end of the triangular amplification mechanism connected with the backspacing suppression module, namely the input end on the left side of the triangular amplification mechanism is higher than the input end on the right side of the triangular amplification mechanism. Under the condition that triangle mechanism's right side input is less than the left side input, when the right side risees (the right side restraines piezoceramics circular telegram), thereby triangle mechanism's top of enlargiing can produce great longitudinal displacement and be close to the guide rail, reduces (the right side restraines piezoceramics circular telegram) when the right side, and triangle mechanism's top of enlargiing separates with the guide rail fast.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the invention and not to limit the invention. It will be further appreciated that the drawings are for simplicity and clarity and have not necessarily been drawn to scale. The invention will now be described and explained with additional specificity and detail through the use of the accompanying drawings in which:
FIG. 1 shows a schematic diagram of a stick-slip drive in an embodiment of the invention;
FIG. 2 illustrates a schematic top view of a driver structure in an embodiment of the invention;
FIG. 3 is a schematic front view of a driver structure in accordance with an embodiment of the invention;
FIG. 4 shows a schematic view of an embodiment of an adjustment plate according to the invention;
FIG. 5 is a schematic view of a structure of a fixed base plate in an embodiment of the invention;
FIG. 6 shows a schematic view of a cross roller guide in an embodiment of the invention;
FIG. 7 shows a schematic bottom view of a cross roller guide in an embodiment of the invention;
FIG. 8 shows a schematic diagram of the active damping of motion of the friction head in an embodiment of the invention;
FIG. 9 shows a stick-slip driver output displacement curve without the rollback motion active suppression module;
FIG. 10 shows a stick-slip driver output displacement curve with a rollback motion active suppression module;
figure 11 shows a schematic diagram of the driving voltage of a bimorph piezoelectric ceramic in an embodiment of the invention.
In the figure:
1. a drive body; 101. a bridge amplification mechanism; 102. a second lever amplification mechanism; 103. a friction head; 104. a first lever amplification mechanism; 105. a guide block; 106. a first straight beam-type flexible hinge; 107. a first countersunk threaded hole; 108. a first positioning surface; 109. a first adjusting bolt; 110. a second adjusting bolt;
2. an adjusting plate; 201. a second straight beam-type flexible hinge; 202. a third adjusting bolt; 203. a first threaded hole; 204. a first positioning boss; 205. a second countersunk threaded hole; 206. a connecting plate;
3. fixing the bottom plate; 301. a second positioning boss; 302. a second threaded hole; 303. a third threaded hole; 304. a second positioning surface;
4. a cross roller guide; 401. moving the top plate; 402. a base; 403. a cross roller unit; 404. a third countersunk threaded hole;
5. driving the piezoelectric ceramic; 6. suppressing the piezoelectric ceramic.
Detailed Description
The technical solutions in the exemplary embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
Example 1
As shown in fig. 1 to 7, the present embodiment provides a stick-slip driver for actively suppressing a rollback motion, including a moving body and a driving body 1 thereof, where the driving body 1 includes:
a friction head 103 composed of a triangular amplification mechanism;
the driving module is driven by piezoelectric ceramics, the output end of the driving module is connected with one input end of the triangular amplifying mechanism, and the driving module can generate transverse displacement for driving the output end of the triangular amplifying mechanism to transversely move (here, transverse refers to the moving direction parallel to the moving body, and longitudinal refers to the moving direction vertical to the moving body); in the present embodiment, the piezoelectric ceramic of the driving module is the driving piezoelectric ceramic 5;
the backspacing suppression module is driven by piezoelectric ceramics and comprises a first lever amplification mechanism 104 capable of generating longitudinal displacement, the output end of the first lever amplification mechanism is connected with the input end of the triangular amplifier, and the backspacing suppression module enables the friction head 103 to separate or press a moving body; in the present embodiment, the piezoelectric ceramic of the rollback suppression module is the suppression piezoelectric ceramic 6.
The specific structure of the trigonal amplification structure is described in English literature "A Novel Stick-Slip Piezoelectric Actuator Based ON a Triangular compatible drive Mechanism" (IEEE TRANSACTIONS INDUSTRIAL ELECTRONICS, VOL.66, NO.7, JULY 2019).
In this embodiment, the top of the triangular amplifying mechanism is an output end, and the two bottom corners are input ends. The backspacing motion described in this embodiment occurs between the triangle amplifying mechanism and the moving body, if there is no backspacing suppression module, the driving module is powered on, the output end of the triangle amplifying mechanism outputs the transverse displacement to drive the moving body to move, and the power failure reversely outputs the transverse displacement, at this time, the moving body is driven to reversely generate a section of displacement, which causes the backspacing.
In this embodiment, the lever amplification mechanism may adopt a structure in the prior art, and the detailed structure thereof is not described in detail herein.
The embodiment is provided with the driving module and the backspacing suppression module, adopts a dual piezoelectric ceramic cooperative driving mode, and the driving module and the backspacing suppression module are designed separately, before the driving module outputs reversely, the friction head is separated from the moving body through the backspacing suppression module, so that the decoupling of driving and active suppression of backspacing motion is realized, and the backspacing motion is effectively suppressed while the driving capability is ensured.
The friction head 103 adopts a triangular amplifying mechanism which can generate parasitic motion and has the function of reducing normal contact force in the process of return motion.
As shown in fig. 2, the driving body 1 is provided with a driving module and a rollback suppression module, in this embodiment, the driving module is arranged on the left side, the rollback suppression module is arranged on the right side, and the driving output ends of the driving module and the rollback suppression module are respectively connected with the input end of the triangular amplification mechanism.
The driving module comprises a bridge amplification mechanism 101 and a second lever amplification mechanism 102 connected with the output end thereof. The bridge amplification mechanism 101 may be a bridge amplification mechanism in the university of Shandong Master's academic thesis "design, optimization and experimental research of bridge type compliant micro-positioning platform", and the specific working principle is described in pages 17-18 of the thesis.
When the driving piezoelectric ceramic 5 is electrified, the driving piezoelectric ceramic 5 is extended to push the bridge type amplification mechanism 101 to generate longitudinal deformation, and the output end (middle part) of the bridge type amplification mechanism 101 generates transverse displacement.
The output end of the bridge amplification mechanism 101 generates a lateral displacement, which acts on the input end of the second lever amplification mechanism 102, and the output end of the second lever amplification mechanism 102 generates a lateral displacement.
The lateral displacement generated by the output end of the second lever amplification mechanism 102 acts on the left end of the friction head 103 (the input end on the left side of the triangular amplification mechanism) to push the left end of the friction head 103 to generate lateral motion, and the top end of the friction head 103 generates longitudinal motion while generating lateral motion.
In this embodiment, the moving body is a cross roller guide 4. The friction head 103 moves on the side surface of the cross roller guide 4. The cross roller guide 4 is of a structure in the prior art, and comprises a base 402, a movable top plate 401, a cross roller unit 403 and the like, and the specific working principle and structure thereof are not described in detail herein.
The longitudinal motion of the tip of the friction head 103 will press against the moving top plate 401 of the cross roller guide 4 and the lateral motion of the tip of the friction head 103 will push the moving top plate 401 to produce a lateral output displacement.
The retraction suppressing module of the driving body 1 is composed of a first lever amplifying mechanism 104, a guide block 105, and a straight beam type flexible hinge 106, and suppresses the piezoelectric ceramics 6 as a power source. The first straight beam type flexible hinge 106 is connected with the guide block 105 in a matching manner, and the suppression piezoelectric ceramics 6 of the rollback suppression module drives the first lever amplification mechanism 104 by driving the guide block 105.
First straight beam type flexible hinges 106 are arranged on two sides of the guide block 105, the input end of the guide block 105 is connected with the suppression piezoelectric ceramic 6, the output end of the guide block 105 is connected with the input end of the first lever amplification mechanism 104, and the output end of the first lever amplification mechanism 104 is connected with the right end (the input end on the right side of the triangular amplification mechanism) of the friction head 103.
When the piezoelectric ceramic 6 is suppressed from being elongated when energized, the first straight beam flexible hinge 106 is deformed, and the guide block 105 is displaced in the longitudinal direction.
The longitudinal displacement generated by the guide block 105 acts on the input end of the first lever amplification mechanism 104, the output end of the first lever amplification mechanism 104 generates the longitudinal displacement and acts on the right end of the dynamic friction head 103, and the right end of the friction head 103 generates the longitudinal displacement.
It will be appreciated that when the piezoelectric ceramics 6 are inhibited from being energized, the right end of the friction head 103 will be displaced longitudinally closer to the cross roller rail 4. Similarly, when the piezoelectric ceramic 6 is inhibited from de-energizing, the right end of the friction head 103 will be displaced longitudinally away from the cross roller rail 4.
As shown in fig. 8, the broken line indicates a state of the friction head 103 when the piezoelectric ceramic 6 is suppressed from being deenergized, and the solid line indicates a state of the friction head 103 when the piezoelectric ceramic 6 is suppressed from being energized. When the piezoelectric ceramics 6 is suppressed from being electrified, the longitudinal direction of the friction head 103 is generated near the cross roller guide 4To a displacement deltay 2
When the piezoelectric ceramics 5 is driven to be electrified, the piezoelectric ceramics 6 is suppressed from being electrified to cause the tip of the friction head 103 to be longitudinally displaced close to the cross roller guide 4 and generate a pressing force. Before the driving piezoelectric ceramics 5 is powered off, the piezoelectric ceramics 6 is suppressed from being powered off, so that the tip of the friction head 103 is displaced in the longitudinal direction away from the cross roller rail 4 and is separated.
The drive piezoelectric ceramics 5 input voltage signal is shown by a dotted line in fig. 11, and the suppression piezoelectric ceramics 6 input voltage is shown by a solid line in fig. 11.
The output displacement curve of the piezoelectric stick-slip driver without the rollback inhibition module is shown in fig. 9, wherein the abscissa t is time, and the ordinate s is output displacement; wherein L is f Represents a displacement of advancement, L b Representing the displacement of the forward roll-back. The output displacement curve of the piezoelectric stick-slip driver with the rollback suppression module is shown in fig. 10, wherein the abscissa t is time, and the ordinate s is output displacement, wherein L is f Representing the displacement of the advance.
The input end of the triangular amplification mechanism connected with the driving module is higher than the input end of the triangular amplification mechanism connected with the backspacing suppression module, namely the input end on the left side of the triangular amplification mechanism is higher than the input end on the right side.
Under the condition that triangle mechanism's right side input is less than the left side input, when the right side risees (the right side restraines piezoceramics circular telegram), thereby triangle mechanism's top of enlargiing can produce great longitudinal displacement and be close to the guide rail, reduces (the right side restraines piezoceramics circular telegram) when the right side, and triangle mechanism's top of enlargiing separates with the guide rail fast. Although the same height can be achieved on both sides, the effect is not as significant as in the present embodiment.
Each piezoelectric ceramic is respectively provided with an adjusting bolt for pre-tightening. As shown in fig. 3, the first adjustment bolt 109 is disposed in the driving piezoelectric ceramic 5, the second adjustment bolt 110 is disposed in the suppression piezoelectric ceramic, and the piezoelectric ceramic can be pretensioned by the adjustment bolts.
The adjusting plate 2 further comprises a positioning platform, and the positioning platform is provided with a positioning surface and matched with the driving body 1. As shown in fig. 3 and 4, the driving body 1 has a first positioning surface 108 at the bottom thereof, and the driving body 1 is positioned by being engaged with the connecting plate 206 during assembly. In this embodiment, the first positioning surface 108 and the connecting plate 206 are positioned by the cooperation of the boss and the groove. The first countersunk head thread hole 107 of the driving body 1 and the first thread hole 203 of the adjusting plate 2 are connected by bolts, so that the driving body 1 is connected with the adjusting plate 2.
The driving body 1 is provided with second straight beam type flexible hinges 201, and in this embodiment, the second straight beam type flexible hinges 201 are provided at both sides of the connection plate 206, and the driving body 1 is moved away from or close to the moving body by adjusting third adjustment bolts 202 provided on the adjustment plates 2. By rotating the third adjusting bolt 202, the connecting plate 206 will be pushed to generate a longitudinal micro-displacement, so as to achieve a fine adjustment of the longitudinal position of the driving body 1.
As shown in fig. 5, it further includes a fixed base plate 3, and the adjusting plate 2 and the moving body are mounted on the fixed base plate 3.
As shown in fig. 4 and 5, the bottom of the adjusting plate 2 has a first positioning boss 204, which is engaged with a second positioning surface 304 during assembly to position the adjusting plate 2. The second countersunk head threaded hole 205 of the adjusting plate 2 is connected with the third threaded hole 303 of the fixing base plate 3 through a bolt, so that the fixing base plate 3 is connected with the adjusting plate 2.
As shown in fig. 5, 6 and 7, the fixing base plate 3 has a second positioning boss 301 for positioning the base 402. The connection of the fixed base plate 3 and the base 402 is achieved by bolting the second threaded hole 302 of the fixed base plate 3 to the third countersunk threaded hole 404 of the cross roller guide 4.
Example 2
This embodiment provides a driving method according to the stick-slip driver as in embodiment 1, including the following:
before the driving module acts, the backspacing restraining module is electrified to act and generates longitudinal displacement, so that the output end of the triangular amplifying mechanism is close to the moving body and is pressed tightly;
the driving module is electrified to start acting, and the output end of the driving module generates transverse displacement, so that the output end of the triangular amplifying mechanism generates transverse motion and drives the moving body to generate transverse displacement;
the backspacing restraining module is powered off, so that the output end of the triangular amplifying mechanism moves away from the moving body, at the moment, the driving module drives the triangular amplifying mechanism to generate reverse transverse output displacement, and the moving body does not generate backspacing motion.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.

Claims (10)

1. A stick-slip driver for actively suppressing a rollback motion, comprising a moving body and a driving body therefor, the driving body comprising:
the friction head consists of a triangular amplifying mechanism;
the driving module is driven by piezoelectric ceramics, the output end of the driving module is connected with one input end of the triangular amplification mechanism, and the driving module can generate transverse displacement for driving the output end of the triangular amplification mechanism to transversely move;
and the backspacing suppression module is driven by piezoelectric ceramics and comprises a first lever amplification mechanism capable of generating longitudinal displacement, the output end of the first lever amplification mechanism is connected with the input end of the triangular amplifier, and the backspacing suppression module enables the friction head to separate or press the moving body.
2. The stick-slip actuator for actively damping rollback motion of claim 1, wherein the drive module comprises a bridge amplification mechanism and a second lever amplification mechanism coupled to an output thereof.
3. The stick-slip drive with active rollback inhibition as claimed in claim 1, wherein an input of said triangular amplification mechanism coupled to said drive module is higher than an input of said triangular amplification mechanism coupled to said rollback inhibition module.
4. The stick-slip driver with active rollback motion suppression as claimed in claim 1, further comprising an adjustment plate, wherein said driver body is configured with a straight beam type flexible hinge, and said driver body is moved away from or closer to said moving body by adjusting an adjustment bolt provided on said adjustment plate.
5. The stick-slip drive with active rollback motion suppression of claim 4, wherein the adjustment plate further comprises a positioning platform having a positioning surface for engaging the drive body.
6. The stick-slip drive with active rollback motion suppression of claim 4, further comprising a fixed base plate on which the adjustment plate and the moving body are mounted.
7. The stick-slip actuator for actively damping rollback motion of claim 1, wherein the rollback damping module further comprises a straight beam-type flexible hinge and a guide block cooperatively coupled thereto, wherein the piezoelectric ceramic of the rollback damping module drives the first lever amplification mechanism via the drive guide block.
8. A stick-slip drive for actively damping rollback motions as claimed in claim 1 wherein said moving body is a cross roller guide and said friction head acts on the side of said cross roller guide.
9. The stick-slip drive with active rollback motion suppression of claim 1, wherein each of the piezoelectric ceramics is configured with an adjustment bolt for pretension.
10. A method of driving a stick-slip drive according to any one of claims 1-9, comprising:
before the driving module acts, the backspacing restraining module is electrified to act and generates longitudinal displacement, so that the output end of the triangular amplifying mechanism is close to the moving body and is pressed tightly;
the driving module is electrified to start acting, and the output end of the driving module generates transverse displacement, so that the output end of the triangular amplifying mechanism generates transverse motion and drives the moving body to generate transverse displacement;
the backspacing restraining module is powered off, so that the output end of the triangular amplifying mechanism moves away from the moving body, at the moment, the driving module drives the triangular amplifying mechanism to generate reverse transverse output displacement, and the moving body does not generate backspacing motion.
CN202210879202.2A 2022-07-25 2022-07-25 Stick-slip driver and method for actively inhibiting rollback movement Active CN115085581B (en)

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CN112865593A (en) * 2021-01-08 2021-05-28 吉林大学 Bionic impact piezoelectric driver with high output performance and control method thereof
CN113258825A (en) * 2021-05-31 2021-08-13 吉林大学 Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof
CN113922701A (en) * 2021-11-15 2022-01-11 宁波大学 Four-rod stick-slip motor with force amplification characteristic and driving method
CN114759828A (en) * 2022-03-25 2022-07-15 广州大学 Translational and rotational two-degree-of-freedom piezoelectric actuation platform

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