CN115060843A - MEMS chromatographic column and thermal conductivity detector integrated device - Google Patents
MEMS chromatographic column and thermal conductivity detector integrated device Download PDFInfo
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- CN115060843A CN115060843A CN202210809855.3A CN202210809855A CN115060843A CN 115060843 A CN115060843 A CN 115060843A CN 202210809855 A CN202210809855 A CN 202210809855A CN 115060843 A CN115060843 A CN 115060843A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/62—Detectors specially adapted therefor
- G01N30/64—Electrical detectors
- G01N30/66—Thermal conductivity detectors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses an integrated device of an MEMS chromatographic column and a thermal conductivity detector, which integrally encapsulates the MEMS chromatographic column which is easy to be polluted and damaged and needs to be calibrated and maintained at regular intervals and the MEMS thermal conductivity detector, each part connected with the outside adopts a detachable adapter, when the oil chromatogram on-line monitoring system fails or needs calibration and maintenance in a certain period, can be with dismantling the change with the whole quick of device through each adapter, the equipment of change is taken back the laboratory or is markd and maintain by the producer in batches, the time and the work load of field maintenance have been reduced, the quick maintenance of oil chromatogram on-line monitoring system has been realized, the fortune dimension efficiency has been promoted, fortune dimension cost has been reduced, the chromatographic column and the thermal conductivity detector of having solved current transformer oil chromatogram on-line monitoring system are the module of independent installation, the time length of on-the-spot demarcation and maintenance, work load is big, be difficult to the technical problem of comprehensive application in oil chromatogram on-line monitoring system.
Description
Technical Field
The invention relates to the technical field of transformer oil chromatographic detection, in particular to an integrated device of an MEMS chromatographic column and a thermal conductivity detector.
Background
Oil chromatography detection and analysis is one of important detection modes of oil-immersed transformer equipment, and through analysis of the concentration and the ratio of characteristic gas, the conditions of over-current and overheating occurring in the transformer equipment can be found in time, so that a reliable data basis is provided for inference of fault types and fault points.
The existing oil chromatogram on-line monitoring system is based on MEMS micro-machining technology, and after core devices such as a gas chromatographic column, a thermal conductivity detector and the like are miniaturized, oxygen required by monitoring is reduced by several orders of magnitude, and the time of oil-gas separation, gas separation and detection analysis can be greatly prolonged. However, the chromatographic column and the thermal conductivity detector are contaminated after long-term operation, and need to be periodically calibrated, cleaned and the like. However, the existing chromatographic column and the thermal conductivity detector are both independently installed modules, the time for on-site calibration and maintenance is long, the workload is large, and the comprehensive application in an oil chromatography online monitoring system is difficult. The maintenance workload of a chromatographic column and a thermal conductivity detector in a transformer oil chromatography online monitoring system is reduced, which is a technical problem to be solved urgently by technical personnel in the field.
Disclosure of Invention
The invention provides an integrated device of an MEMS chromatographic column and a thermal conductivity detector, which is used for solving the technical problems that the chromatographic column and the thermal conductivity detector of the existing transformer oil chromatogram online monitoring system are both independently installed modules, the on-site calibration and maintenance time is long, the workload is large, and the comprehensive application in the oil chromatogram online monitoring system is difficult.
In view of the above, the present invention provides an integrated device of an MEMS chromatographic column and a thermal conductivity detector, which includes a package housing without a bottom surface, a sample introduction adapter, an exhaust adapter, a detection signal adapter, a temperature sensing signal adapter, a chromatographic column substrate, an MEMS chromatographic column, an MEMS thermal conductivity detector, a thermal insulation board, and a thermal conductive pad;
the MEMS chromatographic column is fixed on a chromatographic column substrate, and the chromatographic column substrate and the MEMS thermal conductivity detector are respectively and fixedly connected with the inner wall of the packaging shell through a fixing piece;
the heat conducting pads are respectively arranged at the bottoms of the chromatographic column substrate and the MEMS thermal conductivity detector and are fixed at the bottom of the packaging shell through fixing pieces;
one end of a sample introduction adapter is connected with one end of a capillary column of the MEMS chromatographic column, the other end of the capillary column is fixedly connected with the input end of a packing column of the MEMS chromatographic column through a first plugging joint, the output end of the packing column is fixedly connected with the air inlet of the MEMS thermal conductivity detector through a second plugging joint, the air outlet of the MEMS thermal conductivity detector is connected with an exhaust adapter, two ends of a hot wire of the MEMS thermal conductivity detector are connected with the input end of a detection signal adapter through a lead, a first temperature sensor is arranged on a thermal conductive pad at the bottom of a chromatographic column substrate, a second temperature sensor is arranged on the thermal conductive pad at the bottom of the MEMS thermal conductivity detector, and the first temperature sensor and the second temperature sensor are respectively connected with the input end of the temperature sensing signal adapter;
the heat insulation plate is integrally arranged on the inner wall of the packaging shell, is positioned between the chromatographic column substrate and the MEMS thermal conductivity detector and is used for isolating heat conduction between the MEMS chromatographic column and the MEMS thermal conductivity detector.
Optionally, the thermal pad is a graphene thermal pad.
Optionally, the first plugging joint and the second plugging joint are high-temperature silica gel sleeves.
Optionally, the external connection mode of the sample introduction adapter and the exhaust adapter is threaded connection.
Optionally, the external connection mode of the detection signal adapter and the temperature sensing signal adapter is a snap connection.
According to the technical scheme, the MEMS chromatographic column and thermal conductivity detector integrated device provided by the invention has the following advantages:
the MEMS chromatographic column and the thermal conductivity detector integrated device provided by the invention integrally encapsulates the MEMS chromatographic column which is easy to be polluted and damaged and needs to be calibrated and maintained at regular intervals and the MEMS thermal conductivity detector, each part connected with the outside adopts a detachable adapter, when the oil chromatogram on-line monitoring system fails or needs calibration and maintenance in a certain period, can be with dismantling the change with the whole quick of device through each adapter, the equipment of change is taken back the laboratory or is markd and maintain by the producer in batches, the time and the work load of field maintenance have been reduced, the quick maintenance of oil chromatogram on-line monitoring system has been realized, the fortune dimension efficiency has been promoted, fortune dimension cost has been reduced, the chromatographic column and the thermal conductivity detector of having solved current transformer oil chromatogram on-line monitoring system are the module of independent installation, the time length of on-the-spot demarcation and maintenance, work load is big, be difficult to the technical problem of comprehensive application in oil chromatogram on-line monitoring system.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other related drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic top view of an integrated MEMS chromatographic column and thermal conductivity detector device provided in the present invention;
FIG. 2 is a schematic front view of an integrated MEMS chromatographic column and thermal conductivity detector device provided in the present invention;
wherein the reference numerals are:
01. a sample introduction adapter; 02. a first plugging joint; 03. a second plugging joint; 04. filling a column; 05. a chromatography column substrate; 06. an MEMS thermal conductivity detector inlet; 07. an MEMS thermal conductivity detector gas outlet; 08. an MEMS thermal conductivity detector; 09. a lead wire; 10. detecting a signal adapter; 11. an exhaust adapter; 12. a heat insulation plate; 13. a package housing; 14. a thermally conductive pad; 15. a first temperature sensor; 16. a second temperature sensor; 17. temperature sensing signal adapter.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
For easy understanding, please refer to fig. 1 and fig. 2, the present invention provides an embodiment of an integrated device of an MEMS chromatographic column and a thermal conductivity detector, which includes a package housing 13 without a bottom surface, a sample adapter 01, an exhaust adapter 11, a detection signal adapter 10, a temperature sensing signal adapter 17, a chromatographic column substrate 05, an MEMS chromatographic column, an MEMS thermal conductivity detector 08, a thermal insulation board 12, and a thermal conductive pad 14;
the MEMS chromatographic column is fixed on a chromatographic column substrate 05, and the chromatographic column substrate 05 and the MEMS thermal conductivity detector 08 are respectively and fixedly connected with the inner wall of the packaging shell 13 through fixing pieces;
the heat conducting pads 14 are respectively arranged at the bottoms of the chromatographic column substrate 05 and the MEMS thermal conductivity detector 08 and are fixed at the bottom of the packaging shell 13 through fixing pieces;
one end of a sample introduction adapter 01 is connected with one end of a capillary column of an MEMS chromatographic column, the other end of the capillary column is fixedly connected with the input end of a packing column 04 of the MEMS chromatographic column through a first plugging joint 02, the output end of the packing column 04 is fixedly connected with an air inlet 06 of an MEMS thermal conductivity detector through a second plugging joint 03, an air outlet 07 of the MEMS thermal conductivity detector is connected with an exhaust adapter 11, two ends of a hot wire of an MEMS thermal conductivity detector 08 are connected with the input end of a detection signal adapter 10 through a lead 09, a first temperature sensor 15 is arranged on a thermal conductive pad 14 at the bottom of a chromatographic column substrate 05, a second temperature sensor 16 is arranged on the thermal conductive pad 14 at the bottom of the MEMS thermal conductivity detector 08, and the first temperature sensor 15 and the second temperature sensor 16 are respectively connected with the input end of a temperature sensing signal adapter 17;
the thermal insulation board 12 is integrally arranged on the inner wall of the package housing 13, and is located between the chromatography column substrate 05 and the MEMS thermal conductivity detector 08, so as to insulate heat conduction between the MEMS chromatography column and the MEMS thermal conductivity detector 08.
It should be noted that the principle of the integrated device of the MEMS chromatographic column and the thermal conductivity detector provided in the embodiment of the present invention is as follows:
the air inlet and the sample introduction end of the MEMS chromatographic column are connected with the sample introduction end through a capillary column (namely, sections 01-02 in figure 1) and a sample introduction adapter 01, the capillary column and the sample introduction port of the MEMS chromatographic column (namely, the inlet of a packed column 04 in figure 1) are fixed through a first plugging joint 02, and the first plugging joint 02 adopts a high-temperature silica gel sleeve. An air outlet of the MEMS chromatographic column (namely an outlet of the packed column 04 in figure 1) is connected with an air inlet of the MEMS thermal conductivity detector through a capillary column (namely 03-06 in figure 1), the joint is fixed by a second plugging joint 03, and the second plugging joint 03 adopts a high-temperature silica gel sleeve. The air outlet 07 of the MEMS thermal conductivity detector is connected with an exhaust end through an exhaust adapter 11, and a detection signal is connected with a detection signal adapter 10 through a lead 09 and transmitted to a signal processing unit for signal analysis. The MEMS chromatographic column and the MEMS thermal conductivity detector 08 are fixed on a bottom-surface-free packaging shell 13 of a heat insulating material, two heat conducting pads 14 are arranged on the bottom surface of the packaging shell 13, and the heat conducting pads 14 are preferably graphene heat conducting pads and are respectively used for conducting heat generated by the chromatographic column substrate 05 and the MEMS thermal conductivity detector 08, so that the temperature control requirement in the chromatographic analysis work is met. Establish respectively on two heat conduction pads 14 and install first temperature sensor 15 and second temperature sensor 16 for gather the temperature of chromatographic column basement 05 and MEMS thermal conductivity detector 08 to at temperature sensing signal adapter 17, make temperature sensing signal adapter 17 feed back temperature information to the temperature control unit and carry out analysis processes, guaranteed temperature control's accurate nature when effectively conducting heat. The whole device integrated design, in introduction end, control by temperature change end, signal processing end, exhaust end all realize connecting through the adapter, when oil chromatogram on-line monitoring system broke down or needed demarcation, maintenance to the deadline, can change the whole quick plug of chromatographic column and detector, reduce on-the-spot maintenance time, guarantee oil chromatogram on-line monitoring system's normal operating, be favorable to in time discovering power equipment abnormal state. The external connection mode of the sample introduction adapter 01 and the exhaust adapter 11 is preferably threaded connection. The external connection mode of the detection signal adapter 10 and the temperature sensing signal adapter 17 is preferably a snap connection.
The MEMS chromatographic column and thermal conductivity detector integrated device provided by the embodiment of the invention integrally encapsulates the MEMS chromatographic column which is easily polluted and damaged and needs to be calibrated and maintained regularly, each part connected with the outside adopts the detachable adapter, when the oil chromatogram on-line monitoring system fails or needs to be calibrated and maintained within a certain period, the device can be quickly disassembled and replaced integrally through each adapter, the replaced equipment is taken back to a laboratory or is calibrated and maintained in batches by a manufacturer, the time and workload of on-site maintenance are reduced, the quick maintenance of the oil chromatogram on-line monitoring system is realized, the operation and maintenance efficiency is improved, the operation and maintenance cost is reduced, the technical problems that the chromatographic column and the thermal conductivity detector of the existing transformer oil chromatogram on-line monitoring system are independently installed modules, the time of on-site calibration and maintenance is long, the workload is large, and the comprehensive application in the oil chromatogram on-line monitoring system is difficult are solved,
the above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (5)
1. An integrated device of an MEMS chromatographic column and a thermal conductivity detector is characterized by comprising a package shell without a bottom surface, a sample introduction adapter, an exhaust adapter, a detection signal adapter, a temperature sensing signal adapter, a chromatographic column substrate, an MEMS chromatographic column, an MEMS thermal conductivity detector, a thermal insulation plate and a thermal conduction pad;
the MEMS chromatographic column is fixed on a chromatographic column substrate, and the chromatographic column substrate and the MEMS thermal conductivity detector are respectively and fixedly connected with the inner wall of the packaging shell through a fixing piece;
the heat conducting pads are respectively arranged at the bottoms of the chromatographic column substrate and the MEMS thermal conductivity detector and are fixed at the bottom of the packaging shell through fixing pieces;
one end of a sample introduction adapter is connected with one end of a capillary column of the MEMS chromatographic column, the other end of the capillary column is fixedly connected with the input end of a packing column of the MEMS chromatographic column through a first plugging joint, the output end of the packing column is fixedly connected with the air inlet of the MEMS thermal conductivity detector through a second plugging joint, the air outlet of the MEMS thermal conductivity detector is connected with an exhaust adapter, two ends of a hot wire of the MEMS thermal conductivity detector are connected with the input end of a detection signal adapter through a lead, a first temperature sensor is arranged on a thermal conductive pad at the bottom of a chromatographic column substrate, a second temperature sensor is arranged on the thermal conductive pad at the bottom of the MEMS thermal conductivity detector, and the first temperature sensor and the second temperature sensor are respectively connected with the input end of the temperature sensing signal adapter;
the heat insulation plate is integrally arranged on the inner wall of the packaging shell, is positioned between the chromatographic column substrate and the MEMS thermal conductivity detector and is used for isolating heat conduction between the MEMS chromatographic column and the MEMS thermal conductivity detector.
2. The integrated MEMS chromatography column and thermal conductivity detector device of claim 1, wherein the thermal pad is a graphene thermal pad.
3. The integrated MEMS chromatography column and thermal conductivity detector device of claim 1, wherein the first and second plugging joints are high temperature silica gel sleeves.
4. The integrated MEMS chromatographic column and thermal conductivity detector device of claim 1, wherein the external connection of the sample adapter and the exhaust adapter is a threaded connection.
5. The integrated MEMS chromatographic column and thermal conductivity detector device as claimed in claim 1, wherein the external connection manner of the detection signal adapter and the temperature sensing signal adapter is a snap connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210809855.3A CN115060843B (en) | 2022-07-11 | 2022-07-11 | MEMS chromatographic column and thermal conductivity detector integrated device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210809855.3A CN115060843B (en) | 2022-07-11 | 2022-07-11 | MEMS chromatographic column and thermal conductivity detector integrated device |
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| CN115060843A true CN115060843A (en) | 2022-09-16 |
| CN115060843B CN115060843B (en) | 2023-08-04 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200968950Y (en) * | 2006-11-20 | 2007-10-31 | 河南省中分仪器有限公司 | Portable dissolved gas analytical chromatograph in insulating oil |
| CN203203968U (en) * | 2013-02-04 | 2013-09-18 | 国网电力科学研究院武汉南瑞有限责任公司 | Single-column and multi-sensor chromatogram device for online monitoring transformer oil |
| CN110060858A (en) * | 2019-04-11 | 2019-07-26 | 国网辽宁省电力有限公司电力科学研究院 | Oil-immersed current transformer internal abnormality judgment means based on accurate oil pressure acquisition method |
| CN110850013A (en) * | 2019-11-13 | 2020-02-28 | 国网福建省电力有限公司 | Chromatograph column case and thermal conductivity detector integration module |
| CN213633306U (en) * | 2020-11-26 | 2021-07-06 | 江苏海立普电力科技有限公司 | Transformer oil chromatogram on-line monitoring system |
| CN213749765U (en) * | 2020-12-01 | 2021-07-20 | 江苏海立普电力科技有限公司 | Transformer oil chromatogram on-line monitoring system that detection precision is good |
| CN114047278A (en) * | 2021-12-10 | 2022-02-15 | 杭州晟冠科技有限公司 | Calibration device and method for double-chromatographic-column oil gas online monitoring system |
-
2022
- 2022-07-11 CN CN202210809855.3A patent/CN115060843B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200968950Y (en) * | 2006-11-20 | 2007-10-31 | 河南省中分仪器有限公司 | Portable dissolved gas analytical chromatograph in insulating oil |
| CN203203968U (en) * | 2013-02-04 | 2013-09-18 | 国网电力科学研究院武汉南瑞有限责任公司 | Single-column and multi-sensor chromatogram device for online monitoring transformer oil |
| CN110060858A (en) * | 2019-04-11 | 2019-07-26 | 国网辽宁省电力有限公司电力科学研究院 | Oil-immersed current transformer internal abnormality judgment means based on accurate oil pressure acquisition method |
| CN110850013A (en) * | 2019-11-13 | 2020-02-28 | 国网福建省电力有限公司 | Chromatograph column case and thermal conductivity detector integration module |
| CN213633306U (en) * | 2020-11-26 | 2021-07-06 | 江苏海立普电力科技有限公司 | Transformer oil chromatogram on-line monitoring system |
| CN213749765U (en) * | 2020-12-01 | 2021-07-20 | 江苏海立普电力科技有限公司 | Transformer oil chromatogram on-line monitoring system that detection precision is good |
| CN114047278A (en) * | 2021-12-10 | 2022-02-15 | 杭州晟冠科技有限公司 | Calibration device and method for double-chromatographic-column oil gas online monitoring system |
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