CN115050680B - Quick positioning device and method for wafer box - Google Patents
Quick positioning device and method for wafer box Download PDFInfo
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- CN115050680B CN115050680B CN202210978262.XA CN202210978262A CN115050680B CN 115050680 B CN115050680 B CN 115050680B CN 202210978262 A CN202210978262 A CN 202210978262A CN 115050680 B CN115050680 B CN 115050680B
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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Abstract
The invention provides a device and a method for quickly positioning a wafer box, and relates to the technical field of semiconductors. The supporting plate of the wafer box quick positioning device is provided with a first bolt hole, a second bolt hole, a first arc-shaped hole, a second arc-shaped hole and a strip-shaped groove, and the strip-shaped groove is arranged between the first bolt hole and the second bolt hole; the first positioning pin is connected to the first bolt hole through a first bolt, a first guide shaft is arranged on the end face of the first positioning pin, and the first guide shaft is in sliding fit with the first arc-shaped hole; the second positioning pin is connected to the second bolt hole through a second bolt, a second guide shaft is arranged on the end face of the second positioning pin, and the second guide shaft is in sliding fit with the second arc-shaped hole; the first connecting rod is hinged between the first guide shaft and the pin, and the pin is in sliding fit with the strip-shaped groove; the second connecting rod is hinged between the second guide shaft and the pin. Therefore, the positions of the first positioning pin and the second positioning pin are synchronously controlled by the first connecting rod and the second connecting rod respectively, and the wafer box is convenient to position.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a device and a method for quickly positioning a wafer box.
Background
When the wafer box is placed and positioned, the wafer box is manually adjusted by an operator according to experience every time, the wafer box is difficult to be adjusted in place at one time, time and labor are wasted, the requirement on the operator is high, and after the wafer box with one specification is positioned at one time, the wafer box is difficult to ensure to be over against the installation position, and the centering performance is poor.
Disclosure of Invention
The invention aims to provide a quick positioning device and a quick positioning method for a wafer box, which can enable an operator to quickly align the position, have better centering performance when the wafer box is placed and have high adjustment efficiency.
Embodiments of the invention may be implemented as follows:
the invention provides a quick positioning device for a wafer box, which comprises:
the supporting plate is provided with a first bolt hole, a second bolt hole, a first arc-shaped hole, a second arc-shaped hole and a strip-shaped groove, the first arc-shaped hole is arranged around the first bolt hole, the second arc-shaped hole is arranged around the second bolt hole, and the strip-shaped groove is arranged between the first bolt hole and the second bolt hole;
the first positioning pin is connected to the first bolt hole through a first bolt, a first guide shaft is arranged on the end face of the first positioning pin, and the first guide shaft is in sliding fit with the first arc-shaped hole;
the second positioning pin is connected to the second bolt hole through a second bolt, a second guide shaft is arranged on the end face of the second positioning pin, and the second guide shaft is in sliding fit with the second arc-shaped hole;
one end of the first connecting rod is hinged with the first guide shaft, the other end of the first connecting rod is hinged with a pin, and the pin is in sliding fit in the strip-shaped groove;
one end of the second connecting rod is hinged with the second guide shaft, and the other end of the second connecting rod is hinged with the pin.
The wafer box quick positioning device provided by the invention has the beneficial effects that:
the first positioning pin and the second positioning pin are used for clamping and positioning the wafer box, the first guide shaft on the first positioning pin slides in the first arc-shaped hole, the position of the first positioning pin can be adjusted, the second guide shaft on the second positioning pin slides in the second arc-shaped hole, the position of the second positioning pin can be adjusted, meanwhile, the first guide shaft and the second guide shaft are connected to the pin through the first connecting rod and the second connecting rod respectively, the pin slides in the strip-shaped groove, the first positioning pin and the second positioning pin synchronously rotate, and therefore the first connecting rod and the second connecting rod are used for synchronously controlling the positions of the first positioning pin and the second positioning pin respectively, the wafer box is conveniently positioned, the requirement of an operator on the skill level is lowered, the wafer box is rapidly placed and positioned, and the working efficiency is improved.
In an alternative embodiment, the first bolt hole and the first guide shaft are both eccentrically disposed on the first dowel pin, and the second bolt hole and the second guide shaft are both eccentrically disposed on the second dowel pin.
Like this, first locating pin and second locating pin just can realize the adjustment of first locating pin and second locating pin position around first bolt hole and second bolt hole pivoted in-process respectively.
In an alternative embodiment, the center of the first arc-shaped hole coincides with the center of the first bolt hole, and the center of the second arc-shaped hole coincides with the center of the second bolt hole.
Like this, first guiding axle and second guiding axle are gliding in first arc hole and second arc hole respectively in-process, and the dead condition of card just can not appear in first guiding axle and second guiding axle, just also can make full use of the length in first arc hole and second arc hole, the scope of the adjustment of increase first locating pin and second locating pin.
In an alternative embodiment, there is a line of symmetry between the first and second bolt holes, the first and second arcuate holes being symmetrically arranged with respect to the line of symmetry.
Thus, the adjustment range of the first positioning pin and the second positioning pin is the same.
In an alternative embodiment, the first and second arcuate apertures are located between the first and second bolt apertures.
Therefore, the adjusting range of the positions of the parts, close to the wafer box, of the first positioning pin and the second positioning pin is large, and the wafer box is favorably and quickly positioned.
In an alternative embodiment, the first link and the second link are equal in length.
In an alternative embodiment, the first and second links are symmetrically arranged with respect to the line of symmetry.
Therefore, the first guide shaft, the second guide shaft, the pin, the first connecting rod and the second connecting rod form an isosceles triangle, and the adjusting positions of the first guide shaft and the second guide shaft are synchronous and have the same radian.
In an alternative embodiment, the strip-shaped groove is located on the line of symmetry.
Therefore, the pin cannot be blocked in the sliding process of the strip-shaped groove.
In an alternative embodiment, the first locating pin and the strip-shaped groove are respectively positioned at two opposite sides of the supporting plate.
In an alternative embodiment, the strip-shaped groove is a T-shaped groove.
Therefore, the pin can not fall off in the strip-shaped groove, and the stability of the sliding is good.
In an alternative embodiment, the range of the arc of the first arcuate aperture is: 45-180 degrees.
In an alternative embodiment, the center of the first positioning pin, the first bolt and the first guide shaft are located on the same line.
Therefore, in the process that the first positioning pin rotates around the first bolt, the moving distance of the first positioning pin relative to the wafer box is uniformly changed, and the first positioning pin can be conveniently and quickly rotated to a required position.
In an alternative embodiment, the moving position of the first guide shaft in the first arc-shaped hole comprises an upper limit position and a lower limit position, when the first guide shaft rotates to the upper limit position in the first arc-shaped hole, the first guide shaft is positioned on a straight line connecting the first bolt and the second bolt, and the distance between the first positioning pin and the second positioning pin is minimum; when the first guide shaft rotates to the lower limit position in the first arc-shaped hole, the distance between the first positioning pin and the second positioning pin is the largest.
The invention provides a quick positioning method of a wafer box, which adopts the quick positioning device of the wafer box and comprises the following steps:
placing the wafer cassette on a support plate;
loosening the first bolt and the second bolt to enable the first positioning pin and the second positioning pin to rotate;
moving the wafer box to a proper position, and rotating the first positioning pin and the second positioning pin to enable the first positioning pin and the second positioning pin to clamp the wafer box;
and screwing the first bolt and the second bolt to fix the positions of the first positioning pin and the second positioning pin.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is an exploded view of a wafer cassette positioning apparatus and a wafer cassette according to an embodiment of the present invention;
fig. 2 is an exploded view of a fast positioning apparatus for a wafer cassette according to an embodiment of the present invention;
fig. 3 is a top view of the wafer cassette and the apparatus for rapidly positioning a wafer cassette according to an embodiment of the present invention;
fig. 4 is a bottom view of the wafer cassette and the apparatus for rapidly positioning a wafer cassette according to the embodiment of the present invention;
fig. 5 is a perspective view of a wafer cassette and a wafer cassette rapid positioning apparatus provided in an embodiment of the invention.
Icon: 100-a wafer cassette quick positioning device; 1-a support plate; 11-a first bolt hole; 12-a second bolt hole; 13-a first arc-shaped hole; 131-upper limit position; 132-lower limit position; 14-a second arcuate aperture; 15-a strip-shaped groove; 2-a first locator pin; 21-a first guide shaft; 3-a second locating pin; 31-a second guide shaft; 4-a first link; 5-a second link; 6-pin; 7-a first bolt; 8-a second bolt; 9-a transmitter; 10-a reflector; 101-a receiver; 200-wafer box.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. indicate an orientation or a positional relationship based on that shown in the drawings or that the product of the present invention is used as it is, this is only for convenience of description and simplification of the description, and it does not indicate or imply that the device or the element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.
Furthermore, the appearances of the terms "first," "second," and the like, if any, are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
Referring to fig. 1 to 5, the embodiment provides a fast positioning apparatus 100 for a wafer cassette, wherein the fast positioning apparatus 100 for a wafer cassette includes a supporting plate 1, a first positioning pin 2, a second positioning pin 3, a first connecting rod 4, a second connecting rod 5, a pin 6, a first bolt 7 and a second bolt 8.
The first positioning pin 2 is connected to the first bolt hole 11 through a first bolt 7, a first guide shaft 21 is arranged on the end face of the first positioning pin 2, and the first guide shaft 21 is in sliding fit in the first arc-shaped hole 13. The second positioning pin 3 is connected to the second bolt hole 12 through a second bolt 8, a second guide shaft 31 is arranged on the end face of the second positioning pin 3, and the second guide shaft 31 is in sliding fit in the second arc-shaped hole 14.
In this embodiment, the first positioning pin 2 and the second positioning pin 3 are both cylindrical structures, and in other embodiments, both may be elliptical structures, fan-shaped structures, etc., as long as they can synchronously clamp the wafer cassette 200.
One end of the first connecting rod 4 is hinged with the first guide shaft 21, the other end of the first connecting rod 4 is hinged with the pin 6, and the pin 6 is in sliding fit in the strip-shaped groove 15. One end of the second link 5 is hinged with the second guide shaft 31, and the other end of the second link 5 is hinged with the pin 6.
The first positioning pin 2 and the second positioning pin 3 are used for clamping and positioning the wafer box 200, the first guide shaft 21 on the first positioning pin 2 slides in the first arc-shaped hole 13, the position of the first positioning pin 2 can be adjusted, the second guide shaft 31 on the second positioning pin 3 slides in the second arc-shaped hole 14, the position of the second positioning pin 3 can be adjusted, meanwhile, the first guide shaft 21 and the second guide shaft 31 are respectively connected to the pin 6 through the first connecting rod 4 and the second connecting rod 5, the pin 6 slides in the strip-shaped groove 15, the first positioning pin 2 and the second positioning pin 3 synchronously rotate, and therefore the first connecting rod 4 and the second connecting rod 5 are used for respectively and synchronously controlling the positions of the first positioning pin 2 and the second positioning pin 3, the wafer box 200 is convenient to position, the skill level requirement of an operator is lowered, the wafer box 200 is rapidly placed and positioned, and the working efficiency is improved.
Referring to fig. 4 and 5, the first bolt hole 11 and the first guide shaft 21 are eccentrically disposed on the first positioning pin 2, and the second bolt hole 12 and the second guide shaft 31 are eccentrically disposed on the second positioning pin 3. Thus, in the process that the first positioning pin 2 and the second positioning pin 3 rotate around the first bolt hole 11 and the second bolt hole 12 respectively, the position adjustment of the first positioning pin 2 and the second positioning pin 3 can be realized.
The center of the first arc-shaped hole 13 coincides with the center of the first bolt hole 11, and the center of the second arc-shaped hole 14 coincides with the center of the second bolt hole 12. Like this, first guiding axle 21 and second guiding axle 31 are gliding in first arc hole 13 and second arc hole 14 respectively in-process, and the dead condition of card just can not appear in first guiding axle 21 and second guiding axle 31, just also can make full use of the length in first arc hole 13 and second arc hole 14, increase the scope of first locating pin 2 and the adjustment of second locating pin 3.
A symmetry line is arranged between the first bolt hole 11 and the second bolt hole 12, and the first arc-shaped hole 13 and the second arc-shaped hole 14 are symmetrically arranged relative to the symmetry line. Thus, the adjustment ranges of the first positioning pin 2 and the second positioning pin 3 are the same.
The first and second arc-shaped holes 13 and 14 are located between the first and second bolt holes 11 and 12. Thus, the adjustment range of the respective positions of the first positioning pin 2 and the second positioning pin 3 close to the wafer box 200 is large, which is beneficial to quickly positioning the wafer box 200.
The first link 4 and the second link 5 are equal in length. The first link 4 and the second link 5 are symmetrically arranged with respect to the symmetry line. Thus, the first guide shaft 21, the second guide shaft 31, the pin 6, the first link 4 and the second link 5 form an isosceles triangle, and the positions of the first guide shaft 21 and the second guide shaft 31 can be adjusted synchronously and at the same radian.
The strip-shaped groove 15 is located on the line of symmetry. In this way, the pin 6 does not get stuck during sliding in the strip-shaped groove 15.
Preferably, the center of the first aligning pin 2, the first bolt 7 and the first guide shaft 21 are positioned on the same line, so that the distance that the first aligning pin 2 moves with respect to the wafer cassette 200 is uniformly changed during the rotation of the first aligning pin 2 around the first bolt 7, facilitating the rapid rotation of the first aligning pin 2 to a desired position. Similarly, the second positioning pin 3, the second bolt 8 and the second guide shaft 31 have the same structural relationship.
The arc of the first arc-shaped hole 13 may be 45 °. The moving position of the first guide shaft 21 in the first arc-shaped hole 13 includes an upper limit position 131 and a lower limit position 132, and when the first guide shaft 21 rotates to the upper limit position 131 in the first arc-shaped hole 13, the first guide shaft 21 is located on a straight line connecting the first bolt 7 and the second bolt 8 and passes through the longest axes of the first positioning pin 2 and the second positioning pin 3, and at this time, the distance between the first positioning pin 2 and the second positioning pin 3 is the smallest.
Referring to fig. 4, when the first guide shaft 21 rotates to the lower limit position 132 in the first arc-shaped hole 13, the first bolt 7, the first guide shaft 21 and the first link 4 are located on the same straight line, and at this time, the position of the first positioning pin 2 is most stable, and the distance between the first positioning pin 2 and the second positioning pin 3 is the largest.
In other embodiments, the arc of the first arc-shaped hole 13 may be 90 °. When the first guide shaft 21 rotates to the upper limit position 131 in the first arc-shaped hole 13, the first guide shaft 21 is still located on the straight line connecting the first bolt 7 and the second bolt 8 and passes through the longest axis of the first positioning pin 2 and the second positioning pin 3, and at this time, the distance between the first positioning pin 2 and the second positioning pin 3 is the smallest.
When the first guide shaft 21 rotates to the lower limit position 132 in the first arc-shaped hole 13, the connection line of the first bolt 7 and the first guide shaft 21 is perpendicular to the connection line of the first bolt 7 and the second bolt 8, and at this time, the distance between the first positioning pin 2 and the second positioning pin 3 is the largest.
Of course, the arc of the first arc-shaped hole 13 may be 180 °. The upper limit position 131 of the first guide shaft 21 in the first arc-shaped hole 13 is unchanged, and the lower limit position 132 of the first guide shaft 21 in the first arc-shaped hole 13 is positioned at the other side of the first bolt 7, so that the adjustable range of the distance between the first bolt 7 and the second bolt 8 is largest, and when the first guide shaft 21 rotates to the upper limit position 131 in the first arc-shaped hole 13, the distance between the first positioning pin 2 and the second positioning pin 3 is smallest; when the first guide shaft 21 is rotated to the lower limit position 132 in the first arc hole 13, the distance between the first positioning pin 2 and the second positioning pin 3 is maximized.
Likewise, the second arcuate hole 14 may be shaped in the same manner as the first arcuate hole 13.
Preferably, the diameter of the first guide shaft 21 is equal to the width of the first arc-shaped hole 13, ensuring that the first guide shaft 21 does not shake in the first arc-shaped hole 13. The diameter of the second guiding axle 31 is equal to the width of the second arc-shaped hole 14, so that the second guiding axle 31 is ensured not to shake in the second arc-shaped hole 14. The diameter of pin 6 equals the width in bar groove 15, guarantees that pin 6 does not rock in bar groove 15, and ensures that first connecting rod 4 and second connecting rod 5 rotate with the angle, and then guarantees the accuracy of location centering.
Optionally, a rotatable gear can be arranged on the pin 6, a rack is arranged in the strip-shaped groove 15, the gear is meshed with the rack, the stability of the pin 6 moving in the strip-shaped groove 15 is guaranteed, the first connecting rod 4 and the second connecting rod 5 are guaranteed to rotate at the same angle, and the accuracy of positioning and centering is further guaranteed.
Referring to fig. 2, the first positioning pin 2 and the strip groove 15 are respectively located at two opposite sides of the supporting plate 1. The strip groove 15 is a T-shaped groove. Thus, the pin 6 does not fall off in the groove 15, and the stability of sliding is good. In other embodiments, the slot 15 may be replaced by a slotted hole, or other hole, slot or track that may constrain the pin 6.
In other embodiments, the first positioning pin 2, the second positioning pin 3, the first link 4 and the second link 5 may all be disposed on the same side of the support plate 1, and after the first bolt 7 and the second bolt 8 are unscrewed, the first link 4 and the second link 5 may be pulled to adjust the positions of the first positioning pin 2 and the second positioning pin 3.
Preferably, in order to constantly detect whether the first guide shaft 21, the second guide shaft 31, the first link 4 and the second link 5 are maintained in an isosceles triangle shape, the emitter 9 and the receiver 101 may be disposed on the first link 4 and the second link 5, the reflector 10 may be disposed right above the strip-shaped groove 15, light emitted from the emitter 9 perpendicularly exits the first link 4 and is reflected to the receiver 101 by the reflector 10, and if the first guide shaft 21, the second guide shaft 31, the first link 4 and the second link 5 are not maintained in an isosceles triangle shape, no light is received by the receiver 101, and at this time, a warning signal may be emitted to remind an operator to correct the apparatus.
The embodiment provides a method for quickly positioning a wafer cassette by using a device 100 for quickly positioning a wafer cassette:
first, the wafer cassette 200 is placed on the support plate 1;
then, the operator manually unscrews the first bolt 7 and the second bolt 8, so that the first positioning pin 2 and the second positioning pin 3 can rotate;
then, moving the wafer box 200 to a proper position, and manually rotating the first positioning pin 2 and the second positioning pin 3 to enable the first positioning pin 2 and the second positioning pin 3 to clamp the wafer box 200;
finally, the first bolt 7 and the second bolt 8 are tightened to fix the positions of the first positioning pin 2 and the second positioning pin 3.
The wafer cassette fast positioning apparatus 100 and method provided by the embodiment have the beneficial effects that:
1. the first positioning pin 2 and the second positioning pin 3 are used for clamping and positioning the wafer box 200, the first guide shaft 21 on the first positioning pin 2 slides in the first arc-shaped hole 13 to adjust the position of the first positioning pin 2, and the second guide shaft 31 on the second positioning pin 3 slides in the second arc-shaped hole 14 to adjust the position of the second positioning pin 3, meanwhile, the first guide shaft 21 and the second guide shaft 31 are respectively connected to the pin 6 through the first connecting rod 4 and the second connecting rod 5, and the pin 6 slides in the strip-shaped groove 15 to enable the first positioning pin 2 and the second positioning pin 3 to synchronously rotate, so that the first connecting rod 4 and the second connecting rod 5 are used for respectively and synchronously controlling the positions of the first positioning pin 2 and the second positioning pin 3, the wafer box 200 is convenient to position, the skill level requirement of an operator is lowered, the wafer box 200 is rapidly placed and positioned, and the working efficiency is improved;
2. have the line of symmetry between first bolt hole 11 and the second bolt hole 12, first arc hole 13 sets up for the line of symmetry with second arc hole 14, and bar groove 15 is located the line of symmetry, and first connecting rod 4 sets up for the line of symmetry with second connecting rod 5, and like this, first guiding axle 21, second guiding axle 31, pin 6, first connecting rod 4 and second connecting rod 5 constitute isosceles triangle, can be that first guiding axle 21 and second guiding axle 31 are synchronous, with the adjusting position of radian.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are also within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. The utility model provides a quick positioner of wafer box which characterized in that, quick positioner of wafer box includes:
the supporting plate (1) is provided with a first bolt hole (11), a second bolt hole (12), a first arc-shaped hole (13), a second arc-shaped hole (14) and a strip-shaped groove (15), the first arc-shaped hole (13) is arranged around the first bolt hole (11), the second arc-shaped hole (14) is arranged around the second bolt hole (12), and the strip-shaped groove (15) is arranged between the first bolt hole (11) and the second bolt hole (12);
the first positioning pin (2) is connected to the first bolt hole (11) through the first bolt (7), a first guide shaft (21) is arranged on the end face of the first positioning pin (2), the first bolt hole (11) and the first guide shaft (21) are eccentrically arranged on the first positioning pin (2), the circle center of the first arc-shaped hole (13) is overlapped with that of the first bolt hole (11), and the first guide shaft (21) is in sliding fit in the first arc-shaped hole (13);
the second positioning pin (3) is connected to the second bolt hole (12) through the second bolt (8), a second guide shaft (31) is arranged on the end face of the second positioning pin (3), the second bolt hole (12) and the second guide shaft (31) are eccentrically arranged on the second positioning pin (3), the circle center of the second arc-shaped hole (14) is overlapped with the circle center of the second bolt hole (12), and the second guide shaft (31) is in sliding fit in the second arc-shaped hole (14);
one end of the first connecting rod (4) is hinged with the first guide shaft (21), the other end of the first connecting rod (4) is hinged with a pin (6), and the pin (6) is in sliding fit in the strip-shaped groove (15);
one end of the second connecting rod (5) is hinged with the second guide shaft (31), and the other end of the second connecting rod (5) is hinged with the pin (6);
wherein a line of symmetry exists between the first bolt hole (11) and the second bolt hole (12), the first arc-shaped hole (13) and the second arc-shaped hole (14) are symmetrically arranged relative to the line of symmetry, and the first arc-shaped hole (13) and the second arc-shaped hole (14) are located between the first bolt hole (11) and the second bolt hole (12).
2. The wafer cassette quick positioning device according to claim 1, wherein the first link (4) and the second link (5) are equal in length.
3. The wafer cassette quick positioning device according to claim 1, wherein the first connecting rod (4) and the second connecting rod (5) are symmetrically arranged relative to the symmetry line, the strip-shaped groove (15) is located on the symmetry line, and the first positioning pin (2) and the strip-shaped groove (15) are respectively located on two opposite sides of the supporting plate (1).
4. The wafer cassette quick positioning device according to claim 1, wherein the radian of the first arc-shaped hole (13) ranges from: 45-180 degrees.
5. The wafer cassette quick positioning device according to claim 4, wherein the center of the first positioning pin (2), the first bolt (7) and the first guide shaft (21) are located on the same line.
6. The wafer cassette quick positioning device according to claim 5, wherein the moving position of the first guide shaft (21) in the first arc-shaped hole (13) comprises an upper limit position (131) and a lower limit position (132), the first guide shaft (21) is located on a straight line connecting the first bolt (7) and the second bolt (8) when the first guide shaft (21) is rotated to the upper limit position (131) in the first arc-shaped hole (13), the interval between the first positioning pin (2) and the second positioning pin (3) is smallest, and the interval between the first positioning pin (2) and the second positioning pin (3) is largest when the first guide shaft (21) is rotated to the lower limit position (132) in the first arc-shaped hole (13).
7. A method for rapidly positioning a wafer cassette, wherein the method for rapidly positioning a wafer cassette employs the apparatus of any one of claims 1~6, the method comprising:
placing a wafer cassette (200) on the support plate (1);
loosening the first bolt (7) and the second bolt (8) to enable the first positioning pin (2) and the second positioning pin (3) to rotate;
moving the wafer box (200) to a required position, and rotating the first positioning pin (2) and the second positioning pin (3) to enable the first positioning pin (2) and the second positioning pin (3) to clamp the wafer box (200);
and tightening the first bolt (7) and the second bolt (8) to fix the positions of the first positioning pin (2) and the second positioning pin (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210978262.XA CN115050680B (en) | 2022-08-16 | 2022-08-16 | Quick positioning device and method for wafer box |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210978262.XA CN115050680B (en) | 2022-08-16 | 2022-08-16 | Quick positioning device and method for wafer box |
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| CN115050680A CN115050680A (en) | 2022-09-13 |
| CN115050680B true CN115050680B (en) | 2022-10-28 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4420909A (en) * | 1981-11-10 | 1983-12-20 | Silicon Technology Corporation | Wafering system |
| TW200814223A (en) * | 2006-09-07 | 2008-03-16 | Inotera Memories Inc | Wafer carrier and wafer load port system |
| CN104143463A (en) * | 2014-07-15 | 2014-11-12 | 胡光福 | Operating mechanism and operating method for three-position mutual protection interlocking structure |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110182373B (en) * | 2015-01-07 | 2023-01-10 | 洛德公司 | Bearing assembly for aircraft engine mount |
-
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- 2022-08-16 CN CN202210978262.XA patent/CN115050680B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4420909A (en) * | 1981-11-10 | 1983-12-20 | Silicon Technology Corporation | Wafering system |
| US4420909B1 (en) * | 1981-11-10 | 1989-11-14 | ||
| US4420909B2 (en) * | 1981-11-10 | 1997-06-10 | Silicon Technology | Wafering system |
| TW200814223A (en) * | 2006-09-07 | 2008-03-16 | Inotera Memories Inc | Wafer carrier and wafer load port system |
| CN104143463A (en) * | 2014-07-15 | 2014-11-12 | 胡光福 | Operating mechanism and operating method for three-position mutual protection interlocking structure |
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| CN115050680A (en) | 2022-09-13 |
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Address after: 226400 No.1 Jinshan Road, zuegang street, Rudong County, Nantong City, Jiangsu Province Patentee after: Jiangsu Yiwen Microelectronics Technology Co.,Ltd. Patentee after: Wuxi Yiwen Microelectronics Technology Co.,Ltd. Address before: 226400 No.1 Jinshan Road, zuegang street, Rudong County, Nantong City, Jiangsu Province Patentee before: Jiangsu Yiwen Microelectronics Technology Co.,Ltd. Patentee before: WUXI YIWEN ELECTRONIC TECHNOLOGY Co.,Ltd. |