CN114990512A - Hanging carrier for vacuum coating, feeding and discharging equipment and continuous vacuum coating system - Google Patents

Hanging carrier for vacuum coating, feeding and discharging equipment and continuous vacuum coating system Download PDF

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Publication number
CN114990512A
CN114990512A CN202210547168.9A CN202210547168A CN114990512A CN 114990512 A CN114990512 A CN 114990512A CN 202210547168 A CN202210547168 A CN 202210547168A CN 114990512 A CN114990512 A CN 114990512A
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CN
China
Prior art keywords
pressing
limiting
workpiece
groove
hanging carrier
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Granted
Application number
CN202210547168.9A
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Chinese (zh)
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CN114990512B (en
Inventor
孙晨皓
贾逸轩
杨培勇
刘浩
陆维
卢华兴
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Spic Hydrogen Energy Technology Development Co Ltd
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Spic Hydrogen Energy Technology Development Co Ltd
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Priority to CN202210547168.9A priority Critical patent/CN114990512B/en
Publication of CN114990512A publication Critical patent/CN114990512A/en
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Publication of CN114990512B publication Critical patent/CN114990512B/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568Transferring the substrates through a series of coating stations
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a hanging carrier for vacuum coating, a feeding and discharging device and a continuous vacuum coating system. The hanging carrier includes: the coating device comprises a body, a coating film and a coating film, wherein the body is provided with a coating film window which penetrates through the body along a first preset direction; and the pressing piece is rotatably arranged on the body between a pressing position for pressing the workpiece and a disengaging position for disengaging the workpiece, and the pressing piece positioned at the pressing position is matched with the body so as to press the workpiece on the body. By utilizing the hanging carrier for vacuum coating provided by the embodiment of the invention, the automation degree of hanging and unloading of workpieces can be improved, the hanging and unloading efficiency of the workpieces can be improved, the labor cost can be reduced, and the product yield can be improved.

Description

Hanging carrier for vacuum coating, feeding and discharging equipment and continuous vacuum coating system
Technical Field
The invention relates to the technical field of plating, in particular to a hanging carrier for vacuum coating, and further relates to a feeding and discharging device and a continuous vacuum coating system comprising the hanging carrier.
Background
In order to improve the corrosion resistance of the workpiece (such as a metal bipolar plate of a fuel cell), a film or a coating can be coated on the surface of the workpiece by vacuum coating. For example, the metal bipolar plate of the fuel cell has relatively poor corrosion resistance, and in the use environment of the fuel cell, metal ions dissolved out after the metal bipolar plate is corroded pollute a proton exchange membrane of the fuel cell, so that the overall performance of the stack is reduced, and the stack fails. In addition, the passive film generated on the metal surface after corrosion increases the contact resistance of the metal bipolar plate surface and also reduces the performance of the stack. Therefore, in the process of the processing and forming technology of the metal bipolar plate, the surface coating treatment is taken as a key process, the corrosion resistance and the durability of the metal bipolar plate can be effectively improved, and the contact resistance is reduced.
The hanging loading and unloading of workpieces including metal bipolar plates is an important part in the coating production of the workpieces, and directly influences the coating efficiency, quality and cost. At present, in the film coating process of workpieces in the related technology, hanging and unloading are carried out manually, and the workpieces need to be hung and mounted on a film coating rotating frame in sequence by manpower and are hooked tightly by a spring device, so that the workpieces are prevented from falling in a film coating cavity, and good conductivity between the workpieces and the rotating frame is ensured.
Disclosure of Invention
The present invention is directed to solving, at least to some extent, one of the technical problems in the related art. Therefore, the embodiment of the invention provides a hanging carrier for vacuum coating, a feeding and discharging device and a continuous vacuum coating system.
The hanging carrier for vacuum coating according to the embodiment of the invention comprises: the coating device comprises a body, a coating film and a coating film, wherein the body is provided with a coating film window which penetrates through the body along a first preset direction; and the pressing piece is rotatably arranged on the body between a pressing position for pressing the workpiece and a disengaging position for disengaging the workpiece, and the pressing piece positioned at the pressing position is matched with the body so as to press the workpiece on the body.
By utilizing the hanging carrier for vacuum coating provided by the embodiment of the invention, the automation degree of hanging and unloading of workpieces can be improved, the hanging and unloading efficiency of the workpieces can be improved, and the labor cost can be reduced.
Optionally, the body further has an accommodating groove for accommodating a workpiece, the coating window is opposite to the accommodating groove in the first preset direction, and the coating window is communicated with the accommodating groove.
Optionally, the pressed part includes a rotating part and a pressing part, the rotating part is rotatably disposed on the body between the pressing position and the disengaging position, the pressing part is disposed on the rotating part, wherein the pressing part of the pressed part located at the pressing position and the bottom wall surface of the accommodating groove are disposed opposite to each other in the first predetermined direction so that the pressing part presses the workpiece on the bottom wall surface of the accommodating groove, and the film coating window is opened on the bottom wall surface of the accommodating groove.
Optionally, one of the rotating portion and the body has a limiting groove, and the hanging carrier further includes a limiting member movably disposed on the other of the rotating portion and the body between a limiting position and a retracted position, wherein when the pressing member is located at the pressing position, the limiting member is located at the limiting position, at least a portion of the limiting member is fitted in the limiting groove, and when the pressing member is located at the disengaging position, the limiting member is located at the retracted position, and the limiting member is disengaged from the limiting groove.
Optionally, the body has an accommodating cavity, a first portion of the rotating portion is located in the accommodating cavity, and one of the first portion and a wall surface of the accommodating cavity is provided with the limiting groove.
Optionally, the limiting groove is formed in a circumferential surface of the first portion, a limiting member groove is formed in a wall surface of the accommodating cavity, the limiting member is movably disposed in the limiting member groove between the limiting position and the retracted position, at least a portion of the limiting member located in the limiting position extends out of the limiting member groove, and at least a portion of the limiting member located in the retracted position is located in the limiting member groove.
Optionally, the hanging carrier further includes a first elastic member located in the stopper groove, one end of the first elastic member abuts against a wall surface of the stopper groove, and the other end of the first elastic member abuts against the stopper, where the first elastic member is in a deformed state so as to normally push the stopper to the stopper position.
Optionally, a wall surface of the limiting groove is an arc-shaped surface, the first end portion of the limiting member located at the limiting position is matched in the limiting groove, and a surface of the first end portion is an arc-shaped surface.
Optionally, the body has a plurality of accommodating grooves arranged at intervals along a second preset direction, the bottom wall surface of each accommodating groove is provided with the film coating window, the second preset direction is perpendicular to the first preset direction, a rotation axis of the rotating portion is parallel to the second preset direction, the pressing portions are arranged on the rotating portion at intervals along the second preset direction, and the bottom wall surface of each accommodating groove and at least one of the pressing portions of the pressing member located at the pressing position are arranged opposite to each other in the first preset direction.
Optionally, the pressing member further includes a connecting portion, one end of the connecting portion is connected to the rotating portion, and the other end of the connecting portion is connected to the pressing portion.
Optionally, the pressing member further comprises a second elastic member for pressing the workpiece, one end of the second elastic member is connected to the connecting portion, and the other end of the second elastic member is connected to the pressing portion, wherein the second elastic member of the pressing member at the pressing position is in a deformed state so as to push the workpiece toward the body.
Optionally, the number of the pressed pieces is two, the two pressed pieces are arranged at intervals along a third preset direction, and the third preset direction is perpendicular to the first preset direction.
The feeding and discharging device provided by the embodiment of the invention comprises: the hanging carrier is used for vacuum coating according to the embodiment of the invention; each of the feeding mechanical arm and the discharging mechanical arm comprises a sucker, the feeding mechanical arm is matched with the hanging carrier so as to place a workpiece on the hanging carrier, and the discharging mechanical arm is matched with the hanging carrier so as to take the workpiece away from the hanging carrier.
The loading and unloading device provided by the embodiment of the invention has the advantages of high automation degree of workpiece hanging, loading and unloading, high workpiece hanging, loading and unloading efficiency and low labor cost.
The continuous vacuum coating system comprises a hanging carrier, wherein the hanging carrier is used for vacuum coating according to the embodiment of the invention.
The continuous vacuum coating system provided by the embodiment of the invention has the advantages of high automation degree of workpiece hanging and unloading, high workpiece hanging and unloading efficiency and low labor cost.
Drawings
Fig. 1 is a schematic structural diagram of a hanging carrier for vacuum coating according to an embodiment of the present invention.
Fig. 2 is a partial sectional view of a hanging carrier for vacuum deposition according to an embodiment of the present invention.
Fig. 3 is an enlarged view of the area a in fig. 1.
Fig. 4 is an enlarged view of a region B in fig. 1.
Fig. 5 is a partial structural view of a vacuum coating system 1000 according to an embodiment of the present invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
As shown in fig. 1 to 4, a hanging carrier 100 for vacuum coating according to an embodiment of the present invention includes a body 1 and a pressing member 2 a. The body 1 is provided with a coating window 11, and the coating window 11 penetrates through the body 1 along a first preset direction. The pressing piece 2a is rotatably provided on the body 1 between a pressing position where the work 200 is pressed and a disengaged position where the work 200 is disengaged. The pressing piece 2a at the pressing position cooperates with the body 1 to press the work 200 on the body 1. In other words, the workpiece 200 is sandwiched between the body 1 and the pressing piece 2a at the pressing position.
The use of the hanging carrier 100 is briefly described below with reference to fig. 1-4. First, the body 1 is placed substantially horizontally, and then the workpiece 200 is placed on the body 1 by the loading robot so as to achieve automatic placement of the workpiece 200. At this time, the portion to be processed of the workpiece 200 is opposed to the plating window 11, i.e., the portion to be processed of the workpiece 200 is exposed from the plating window 11. After the workpiece 200 is placed on the body 1, the pressing member 2a is rotated from the escape position to the pressing position to press the workpiece 200 on the body 1 with the pressing member 2 a.
Next, the rack carrier 100 holding the workpieces 200 is placed substantially vertically, and the rack carrier 100 is moved into a functional chamber (e.g., a cleaning chamber, a coating chamber) to perform corresponding processing (cleaning, coating) on the workpieces 200 on the rack carrier 100. After the workpiece 200 is processed, the rack-mounted carrier 100 is removed from the functional chamber.
Finally, the hanging carrier 100 holding the workpiece 200 is placed substantially horizontally, and the pressed member 2a is rotated from the pressing position to the release position, at which time the pressed member 2a is no longer in contact with the workpiece 200, and the workpiece 200 is removed from the body 1 by the feeding robot.
Therefore, the manipulator can be used for automatically picking and placing the workpiece 200, and the pressed piece 2a only needs to be manually rotated between the separation position and the pressing position, so that the hanging, loading and unloading efficiency of the workpiece 200 is improved, and the labor cost is reduced. In addition, the hanging consistency of the workpiece 200 can be improved, and the coating consistency of the workpiece 200 is further improved, so that the product percent of pass is improved.
By using the hanging carrier 100 for vacuum coating according to the embodiment of the invention, the automation degree of hanging and unloading of workpieces can be improved, the hanging and unloading efficiency of the workpieces can be improved, the labor cost can be reduced, and the product yield can be improved.
As shown in fig. 1 to 4, a hanging carrier 100 for vacuum coating according to an embodiment of the present invention includes a body 1 and two pressing members 2a, 2 b. The body 1 may be polygonal in shape. Alternatively, the body 1 may be a polygonal plate (e.g., a rectangular plate).
The first predetermined direction may be identical to a thickness direction of the body 1. The body 1 has a first surface 15 and a second surface 16 opposed in its thickness direction. When the body 1 is substantially horizontally placed (as shown in fig. 2), the thickness direction of the body 1 may be coincident with the up-down direction, i.e., the first predetermined direction may be coincident with the up-down direction. The first surface 15 may be an upper surface of the body 1 and the second surface 16 may be a lower surface of the body 1. When the body 1 is placed substantially vertically, the thickness direction of the body 1 may coincide with the front-rear direction, the first surface 15 may be a front surface of the body 1, and the second surface 16 may be a rear surface of the body 1. The up-down direction is shown by arrow C in fig. 2.
As shown in fig. 1 and 2, the body 1 further has a receiving groove 12 for receiving the workpiece 200, the plating window 11 is opposite to the receiving groove 12 in the first predetermined direction, and the plating window 11 is communicated with the receiving groove 12. Therefore, when the workpiece 200 is placed, the workpiece 200 can be placed in the accommodating groove 12 by using the feeding manipulator, so that the workpiece 200 can be limited by using the accommodating groove 12, and the workpiece 200 is prevented from moving when the workpiece 200 is pressed by using the pressing member 2, so that the part to be processed of the workpiece 200 is accurately exposed. The workpiece 200 may be a metal bipolar plate of a fuel cell, among others.
The workpiece 200 has two opposing surfaces to be processed, which may be opposed in the thickness direction of the workpiece 200. After the workpiece 200 is placed in the accommodation groove 12, one surface to be processed of the workpiece 200 may be exposed through the plating window 11, and the other surface to be processed of the workpiece 200 may be exposed through the opening of the accommodation groove 12.
As shown in fig. 1, a plurality of receiving grooves 12 are disposed on the first surface 15 of the body 1, the plurality of receiving grooves 12 are arranged at intervals along a second predetermined direction, and the second predetermined direction is perpendicular to the first predetermined direction. The depth direction of each receiving groove 12 may coincide with the first preset direction. By providing the plurality of accommodating grooves 12, a plurality of workpieces 200 can be placed (held) on the rack carrier 100 at the same time, so that the plurality of workpieces 200 can be processed at the same time, and the processing efficiency of the workpieces 200 can be improved.
As shown in fig. 2, a plating window 11 is formed on the bottom wall surface 121 of each accommodating groove 12. That is, the main body 1 may have a plurality of plating windows 11, and the plating windows 11 are opened on the bottom wall surfaces 121 of the accommodating grooves 12 in a one-to-one correspondence. Therefore, the structure of the body 1 and the hanging carrier 100 can be more reasonable.
As shown in fig. 1, the pressing members 2a and 2b may be spaced apart along a third predetermined direction, which is perpendicular to the first predetermined direction, i.e., the first predetermined direction, the second predetermined direction and the third predetermined direction may be perpendicular to each other.
After the workpiece 200 is placed in the accommodating groove 12, the thickness direction of the workpiece 200 may be consistent with the first preset direction, one of the length direction and the width direction of the workpiece 200 is consistent with the second preset direction, and the other of the length direction and the width direction of the workpiece 200 is consistent with the third preset direction. The second predetermined direction is shown by arrow D in fig. 1, and the third predetermined direction is shown by arrow E in fig. 1.
The pressed piece 2a includes a rotating portion 21a and a plurality of pressing portions 22a, and the pressed piece 2b includes a rotating portion 21b and a plurality of pressing portions 22 b. The rotating portion 21a is rotatably provided on the body 1 between the pressing position and the disengaging position, and the rotating portion 21b is rotatably provided on the body 1 between the pressing position and the disengaging position.
Each of the rotating portions 21a and 21b may extend in the second preset direction, and a rotation axis of each of the rotating portions 21a and 21b is parallel to the second preset direction. Alternatively, each of the rotating portion 21a and the rotating portion 21b may be cylindrical.
As shown in fig. 1, a plurality of pressing portions 22a are provided on the rotating portion 21a at intervals in the second preset direction, and a plurality of pressing portions 22b are provided on the rotating portion 21b at intervals in the second preset direction. The bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the at least one pressed portion 22a of the pressed piece 2a at the pressing position in the first preset direction, and the bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the at least one pressed portion 22b of the pressed piece 2b at the pressing position in the first preset direction.
Alternatively, the workpiece 200 may be generally rectangular. The bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the two pressed portions 22a of the pressed piece 2a at the pressing position in the first preset direction, and the bottom wall surface 121 of each accommodating groove 12 is disposed opposite to the two pressed portions 22b of the pressed piece 2b at the pressing position in the first preset direction. Thereby, the two pressing portions 22a and the two pressing portions 22b can be pressed at the four corners of the workpiece 200, so that the workpiece 200 can be more stably pressed on the body 1 (the bottom wall surface 121 of the accommodation groove 12).
Both the pressed portion 22a and the pressed portion 22b may be flat plate-shaped. The pressed portion 22a of the pressed piece 2a at the pressing position may be parallel to the workpiece 200, and the pressed portion 22b of the pressed piece 2b at the pressing position may be parallel to the workpiece 200. The pressing portions 22a and 22b can thereby press the workpiece 200 more stably on the body 1 (the bottom wall surface 121 of the accommodation groove 12).
As shown in fig. 1, the pressing member 2a further includes a connecting portion 24a, one end of the connecting portion 24a is connected to the rotating portion 21a, and the other end of the connecting portion 24a is connected to the pressing portion 22 a. The pressed piece 2b further includes a connecting portion 24b, one end of the connecting portion 24b is connected to the rotating portion 21b, and the other end of the connecting portion 24b is connected to the pressing portion 22 b. This makes it possible to further design the pressure parts 2a and 2 b.
The connection portion 24a may include a first connection section 241a, an intermediate section 242a, and a second connection section 243a, which are connected in series. When the pressed piece 2a is located at the pressing position, each of the first and second connecting sections 241a and 243a extends in the first preset direction, and the middle section 242a extends in the third preset direction. The connecting portion 24a may be plural, one end of the first connecting section 241a of each connecting portion 24a is connected to the rotating portion 21a, and one ends of the second connecting sections 243a of the plurality of connecting portions 24a are connected to the plurality of pressing portions 22a in one-to-one correspondence.
The connection portion 24b may include a first connection section 241b, an intermediate section 242b, and a second connection section 243b connected in sequence. When the pressed piece 2b is located at the pressing position, each of the first and second connecting sections 241b and 243b extends in the first preset direction, and the middle section 242b extends in the third preset direction. The connecting portion 24b may be plural, one end of the first connecting section 241b of each connecting portion 24b is connected to the rotating portion 21b, and one ends of the second connecting sections 243b of the plural connecting portions 24b are connected to the plural pressing portions 22b in one-to-one correspondence. This makes it possible to further rationalize the structures of the connection portions 24a and 24 b.
As shown in fig. 1, the pressed member 2a further includes a second elastic member 42a for pressing the workpiece 200, one end of the second elastic member 42a is connected to the connecting portion 24a, and the other end of the second elastic member 42a is connected to the pressing portion 22 a. Wherein the second elastic member 42a of the pressing member 2a located at the pressing position is in a deformed state (e.g., compressed state) so as to push the workpiece 200 toward the body 1.
The pressing member 2b further includes a second elastic member 42b for pressing the workpiece 200, one end of the second elastic member 42b is connected to the connecting portion 24b, and the other end of the second elastic member 42b is connected to the pressing portion 22 b. Wherein the second elastic member 42b of the pressing member 2b located at the pressing position is in a deformed state (e.g., compressed state) so as to push the workpiece 200 toward the body 1.
By providing the second elastic pieces 42a, 42b, it is possible to increase the pressing force exerted on the work 200 so as to press the work 200 on the body 1 more stably. Therefore, the workpiece 200 and the body 1 can be better contacted and conducted, namely the workpiece 200 and the hanging carrier 100 are better contacted and conducted, and the compactness of the surface coating of the workpiece 200 is more favorably improved.
Alternatively, the second elastic members 42a, 42b may be springs. The one end of the second elastic member 42a is connected to the second connection segment 243a, and the one end of the second elastic member 42b is connected to the second connection segment 243 b.
As shown in fig. 1, 3 and 4, one of the rotating portion 21a and the body 1 has a stopper groove 23a, and one of the rotating portion 21b and the body 1 has a stopper groove 23 b. The hanging vehicle 100 further includes stoppers 3a, 3b, the stopper 3a being movably provided on the other of the rotating portion 21a and the body 1 between a stopping position and a retracted position, and the stopper 3b being movably provided on the other of the rotating portion 21b and the body 1 between the stopping position and the retracted position.
In other words, the rotating portion 21a has the limiting groove 23a and the limiting member 3a is movably provided on the body 1 between the limiting position and the retracted position, or the body 1 has the limiting groove 23a and the limiting member 3a is movably provided on the rotating portion 21a between the limiting position and the retracted position. The rotating portion 21b has a stopper groove 23b and the stopper 3b is movably provided on the body 1 between the stopper position and the retracted position, or the body 1 has a stopper groove 23b and the stopper 3b is movably provided on the rotating portion 21b between the stopper position and the retracted position.
When the pressing member 2a is located at the pressing position, the limiting member 3a is located at the limiting position, at least a part of the limiting member 3a is fitted in the limiting groove 23a, and when the pressing member 2a is located at the disengagement position, the limiting member 3a is located at the retraction position, and the limiting member 3a is disengaged from the limiting groove 23 a. When the pressing member 2b is located at the pressing position, the limiting member 3b is located at the limiting position, at least a part of the limiting member 3b is fitted in the limiting groove 23b, and when the pressing member 2b is located at the disengagement position, the limiting member 3b is located at the retraction position, and the limiting member 3b is disengaged from the limiting groove 23 b.
That is, when the pressing members 2a, 2b (the rotating portions 21a, 21b) are moved from the disengagement position to the pressing position, the stoppers 3a, 3b are moved from the retracted position to the restricting position. When the pressing members 2a, 2b (the rotating portions 21a, 21b) are moved from the pressing position to the disengaging position, the stoppers 3a, 3b are moved from the restricting position to the retracted position.
Thus, the limit of the pressed material 2a by the limit member 3a and the limit of the pressed material 2b by the limit member 3b can be restricted, and the pressed materials 2a and 2b can be restricted at the pressing position, so that the pressed materials 2a and 2b can press the workpiece 200 on the main body 1 more stably, and the workpiece 200 is prevented from falling off from the main body 1 (the hanging carrier 100).
The body 1 is provided with accommodating cavities 13a and 13b, a first part 211a of the rotating part 21a is positioned in the accommodating cavity 13a, one of the first part 211a and the wall surface of the accommodating cavity 13a is provided with a limiting groove 23a, a first part 211b of the rotating part 21b is positioned in the accommodating cavity 13b, and one of the first part 211b and the wall surface of the accommodating cavity 13b is provided with a limiting groove 23 b. This makes the structure of the hanging carrier 100 more rational.
As shown in fig. 3 and 4, the stopper groove 23a is provided on the circumferential surface of the first part 211a, the stopper groove 23b is provided on the circumferential surface of the first part 211b, the stopper groove 14a is provided on the wall surface of the accommodation chamber 13a, and the stopper groove 14b is provided on the wall surface of the accommodation chamber 13 b. The stopper 3a is movably disposed in the stopper groove 14a between the stopper position and the retracted position, and the stopper 3b is movably disposed in the stopper groove 14b between the stopper position and the retracted position.
At least a part of the limiting member 3a located at the limiting position extends out of the limiting member groove 14a, and at least a part of the limiting member 3a located at the retracted position is located in the limiting member groove 14 a. At least a part of the limiting member 3b located at the limiting position extends out of the limiting member groove 14b, and at least a part of the limiting member 3b located at the retracted position is located in the limiting member groove 14 b. By providing the stopper grooves 14a, 14b, the stoppers 3a, 3b can be moved between the stopper position and the retracted position more stably.
As shown in fig. 3 and 4, the hanging carrier 100 further includes first elastic members 41a and 41b, the first elastic member 41a is located in the stopper groove 14a, and the first elastic member 41b is located in the stopper groove 14 b. One end of the first elastic member 41a abuts against the wall surface of the stopper groove 14a, the other end of the first elastic member 41a abuts against the stopper 3a, one end of the first elastic member 41b abuts against the wall surface of the stopper groove 14b, and the other end of the first elastic member 41b abuts against the stopper 3 b.
The first elastic member 41a is in a deformed state (e.g., compressed state) to normally urge the limiting member 3a to the limiting position, and the first elastic member 41b is in a deformed state (e.g., compressed state) to normally urge the limiting member 3b to the limiting position. That is, when the limiting member 3a is at the retracted position, the first elastic member 41a is in a deformed state, and when the limiting member 3a is at the limiting position, the first elastic member 41a is also in a deformed state; when the limiting member 3b is located at the retracted position, the first elastic member 41b is in a deformed state, and when the limiting member 3b is located at the limiting position, the first elastic member 41b is also in a deformed state.
By providing the first elastic member 41a between the stopper 3a and the wall surface of the stopper groove 14a and the first elastic member 41b between the stopper 3b and the wall surface of the stopper groove 14b, not only the stoppers 3a, 3b can be automatically pushed from the retracted position to the stopper position by the first elastic members 41a, 41b, but also an elastic force toward the stopper position can be applied to the stoppers 3a, 3b by the first elastic members 41a, 41b, so that the stoppers 3a, 3b are more stably located at the stopper position, and further, the pressing members 2a, 2b (the rotating portions 21a, 21b) can be more stably located at the pressing position. Alternatively, the first elastic members 41a, 41b may be springs.
In order to make the technical solution of the present application easier to understand, the following description further describes the use process of the hanging carrier 100 by taking the example that the pressing members 2a and 2b extend in the front-rear direction and the pressing member 2a is located at the left side of the pressing member 2b when the body 1 is placed substantially horizontally. The front-back direction is indicated by an arrow F in fig. 1, and the left-right direction is indicated by an arrow G in fig. 1.
The front end of the rotating part 21a is positioned in the accommodating cavity 13a, the peripheral surface of the front end of the rotating part 21a is provided with a limiting groove 23a, the front end of the rotating part 21b is positioned in the accommodating cavity 13b, the peripheral surface of the front end of the rotating part 21b is provided with a limiting groove 23b, and the rotating part 21a is positioned on the left side of the rotating part 21 b. The left side surface of the body 1 is provided with a stopper groove 14a, and the right side surface of the body 1 is provided with a stopper groove 14 b. That is, a part of the left side surface of the body 1 constitutes a part of the wall surface of the housing chamber 13a, and a part of the right side surface of the body 1 constitutes a part of the wall surface of the housing chamber 13 b.
The stoppers 3a, 3b move between the stopper position and the retracted position in the left-right direction. The left end of the first elastic member 41a abuts against the stopper 3a, the right end of the first elastic member 41a abuts against the bottom wall surface of the stopper groove 14a, the right end of the first elastic member 41b abuts against the stopper 3b, and the left end of the first elastic member 41b abuts against the bottom wall surface of the stopper groove 14 b.
When the pressing members 2a, 2b (the rotating portions 21a, 21b) are located at the disengaged position, the first elastic members 41a, 41b are in a compressed state, the left end portion of the stopper 3a abuts against the peripheral surface of the front end portion of the rotating portion 21a, and the right end portion of the stopper 3b abuts against the peripheral surface of the front end portion of the rotating portion 21 b.
After the workpiece 200 is placed in the accommodating groove 12, the rotating portion 21a is rotated clockwise (viewed from the front to the rear) so that the rotating portion 21a rotates from the disengagement position to the pressing position, the stopper 3a is opposed to the stopper groove 23a of the rotating portion 21a at the pressing position in the left-right direction, whereby the first elastic member 41a pushes the stopper 3a to move from the right to the left so that the stopper 3a moves from the retracted position to the stopper position, and the left end portion of the stopper 3a at the stopper position is fitted in the stopper groove 23a so that the rotating portion 21a (pressing member 2a) is restricted at the pressing position while the first elastic member 41a is still in the compressed state.
Rotating the rotating portion 21b counterclockwise (viewed from the front to the rear) so that the rotating portion 21b rotates from the disengagement position to the pressing position, the stopper 3b is opposed to the stopper groove 23b of the rotating portion 21b at the pressing position in the left-right direction, whereby the first elastic member 41b pushes the stopper 3b to move from the left to the right so that the stopper 3b moves from the retracted position to the stopper position, and the right end portion of the stopper 3b at the stopper position is fitted in the stopper groove 23b so as to restrict the rotating portion 21b (pressing member 2b) at the pressing position while the first elastic member 41b is still in the compressed state.
After the work 200 is processed, the turning portion 21a is rotated counterclockwise (as viewed from the front to the rear) so that the turning portion 21a is turned from the pressing position to the disengaging position. The wall surface of the stopper groove 23a pushes the stopper 3a to move rightward so that the stopper 3a moves from the stopper position to the retracted position and disengages from the stopper groove 23 a. The rotating portion 21b is rotated clockwise (viewed from the front to the rear) so that the rotating portion 21b rotates from the pressing position to the disengaging position. The wall surface of the stopper groove 23b pushes the stopper 3b to move leftward so that the stopper 3b moves from the stopper position to the retracted position and disengages from the stopper groove 23 b.
Alternatively, the wall surfaces of the stopper grooves 23a, 23b are arc-shaped surfaces. The first end 31a (e.g., the left end) of the limiting member 3a at the limiting position is fitted in the limiting groove 23a, and the surface of the first end 31a of the limiting member 3a is an arc-shaped surface. The first end 31b (e.g., the right end) of the limiting member 3b at the limiting position is fitted in the limiting groove 23b, and the surface of the first end 31b of the limiting member 3b is an arc-shaped surface. The first end 31a of the stopper 3a can be more smoothly separated from the stopper groove 23a, and the first end 31b of the stopper 3b can be more smoothly separated from the stopper groove 23b, so that the pressing members 2a and 2b (the rotating portions 21a and 21b) can be more smoothly moved from the pressing position to the separating position, and the workpiece 200 can be more easily removed from the main body 1.
For example, the wall surfaces of the limiting grooves 23a and 23b are both spherical crowns, the surface of the first end 31a of the limiting member 3a is a spherical crown, and the surface of the first end 31b of the limiting member 3b is a spherical crown. This allows the first end 31a of the stopper 3a to be more smoothly separated from the stopper groove 23a, and the first end 31b of the stopper 3b to be more smoothly separated from the stopper groove 23b, so that the pressing members 2a and 2b (the rotating portions 21a and 21b) are more smoothly moved from the pressing position to the separating position, and the workpiece 200 can be more easily removed from the body 1.
As shown in fig. 3 and 4, the pressing member 2a further includes a handle 25a provided on the rotating portion 21a, and the pressing member 2b further includes a handle 25b provided on the rotating portion 21b, whereby the rotating portions 21a, 21 can be rotated by holding the handles 25a, 25 b. Alternatively, the handle 25a is provided on an end surface of the rotating portion 21a, and the handle 25b is provided on an end surface of the rotating portion 21 b.
The invention also provides a loading and unloading device. The loading and unloading apparatus according to the embodiment of the present invention includes a loading manipulator, an unloading manipulator, and the hanging carrier 100 according to the above embodiment of the present invention. Each of the feeding robot and the discharging robot includes a suction cup, which can suck the workpiece 200. The loading robot cooperates with the rack carrier 100 to place the work pieces 200 on the rack carrier 100, and the unloading robot cooperates with the rack carrier 100 to remove the work pieces 200 from the rack carrier 100.
The loading and unloading equipment provided by the embodiment of the invention has the advantages of high automation degree of workpiece hanging, loading and unloading, high efficiency of workpiece hanging, loading and unloading, low labor cost, high product percent of pass and the like.
The present invention also provides a continuous vacuum coating system 1000. The continuous vacuum coating system 1000 according to the embodiment of the present invention includes the hanging carrier 100 according to the above-described embodiment of the present invention.
The continuous vacuum coating system 1000 according to the embodiment of the invention has the advantages of high automation degree of workpiece hanging, loading and unloading, high workpiece hanging, loading and unloading efficiency, low labor cost, high product qualification rate and the like.
As shown in fig. 5, the continuous vacuum coating system 1000 according to an embodiment of the present invention may further include a feeding chamber 300, a discharging chamber 400, and a plurality of functional units 500. Each functional unit 500 comprises a first transition chamber 510, a functional chamber 520 and a second transition chamber 530 connected in series, i.e. the functional chamber 520 is located between the first transition chamber 510 and the second transition chamber 530. The loading chamber 300, the plurality of function units 500, and the unloading chamber 400 are connected in sequence, that is, the loading chamber 300, the function units 500, and the unloading chamber 400 are arranged in sequence.
The hanging carrier 100 and the workpieces 200 hung on the hanging carrier 100 may sequentially pass through the loading chamber 300, the functional unit 500 and the unloading chamber 400.
The feeding chamber 300 is connected to the first transition chamber 510 of the adjacent function unit 500, and the discharging chamber 400 is connected to the second transition chamber 530 of the adjacent function unit 500. In other words, the charging chamber 300 is connected to the first transition chamber 510 of the adjacent one of the plurality of function units 500, and the discharging chamber 400 is connected to the second transition chamber 530 of the adjacent one of the plurality of function units 500. The second transition chamber 530 of one of the two adjacent functional units 500 is connected to the first transition chamber 510 of the other of the two adjacent functional units 500, i.e. there are at least two transition chambers between the functional chambers 520 of the two adjacent functional units 500.
The rack-mounted carrier 100 from the loading chamber 300 or the previous (upstream) functional unit 500 and the workpieces 200 hung on the rack-mounted carrier 100 enter the first transition chamber 510 of the functional unit 500 and then enter the functional chamber 520 for the corresponding processing. If only one treatment of the workpiece 200 is required, the treated workpiece 200 can be introduced into the second transition chamber 530 of the present functional unit 500 and then into the subsequent (downstream) functional unit 500 or the blanking chamber 400.
If multiple processes are required for the workpiece 200, the workpiece 200 after one process may be transferred into the second transition chamber 530 and then returned to the functional chamber 520 for further processing of the workpiece 200. This is repeated until the entire processing of the workpiece 200 in the functional unit 500 is completed. Since the workpiece 200 is processed a plurality of times only by occupying the functional chamber 520 and the second transition chamber 530, the workpiece 200 in the loading chamber 300 or the workpiece 200 in the previous functional unit 500 can be moved into the first transition chamber 510 of the present functional unit 500 while the workpiece 200 is processed a plurality of times. This prevents the workpiece 200 from being retained in the loading chamber 300 or the previous functional unit 500, and thus does not affect the loading of the subsequent workpiece and the processing of the subsequent workpiece by the previous functional unit 500.
If no subsequent workpieces enter the first transition chamber 510 of the present functional unit 500, the workpieces 200 may also be returned from the functional chamber 520 to the first transition chamber 510 and then again into the functional chamber 520 for further processing of the workpieces 200.
The continuous vacuum coating system 1000 according to an embodiment of the present invention enables a plurality of processes to be performed on a workpiece 200 without affecting the subsequent workpieces to enter the functional unit 500 by making each functional unit 500 include the functional chamber 520 and the first and second transition chambers 510 and 530 located at both sides of the functional chamber 520. Thereby, not only the processing efficiency and the processing amount of the continuous vacuum coating system 1000 can be improved, but also the processing effect of the workpiece 200 can be improved.
In order to process a workpiece a plurality of times in the related art, it is necessary to provide a plurality of processing apparatuses in a functional chamber, each of which processes a workpiece once. Since the workpiece 200 can be moved back and forth (back and forth) between the function chamber 520 and the second transition chamber 530 (the first transition chamber 510) in the present application, it is only necessary to provide a small number of processing devices, even one processing device, in the function chamber 520 to perform a plurality of processes on the workpiece 200. Therefore, the structure of the functional unit 500 and the continuous vacuum coating system 1000 can be simplified, the manufacturing cost and the manufacturing difficulty of the functional unit 500 and the continuous vacuum coating system 1000 can be reduced, the space occupied by the functional unit 500 and the continuous vacuum coating system 1000 can be reduced, and the cost for maintaining the vacuum degree of the functional unit 500 can be reduced.
In addition, when the functional unit 500 and the blanking chamber 400 are temporarily unusable due to a failure or the like, the workpiece 200 having undergone the corresponding process may be temporarily stored in the second transition chamber 530 of the previous functional unit 500. At this time, the previous function unit 500 can process the subsequent workpieces by using the first transition chamber 510 and the function chamber 520 thereof, so as to avoid the whole continuous vacuum coating system 1000 from stopping operation due to temporary unavailability of the function unit 500 and the blanking chamber 400, so as to further improve the processing efficiency and throughput of the continuous vacuum coating system 1000.
Therefore, the continuous vacuum coating system 1000 according to the embodiment of the present invention has the advantages of high treatment efficiency and treatment capacity, good treatment effect, low manufacturing cost and manufacturing difficulty, low operation cost, etc.
As shown in fig. 5, the plurality of function units 500 may include a cleaning unit 500a, a first coating unit 500b, and a second coating unit 500 c. Alternatively, the feeding chamber 300, the plurality of function units 500, and the discharging chamber 400 are sequentially connected in a certain direction. For example, the loading chamber 300, the cleaning unit 500a, the first coating unit 500b, the second coating unit 500c, and the unloading chamber 400 are sequentially connected in a certain direction.
As shown in fig. 5, the cleaning unit 500a includes a first transition chamber 510a, a cleaning chamber 520a, and a second transition chamber 530a connected in sequence, and the first transition chamber 510a of the cleaning unit 500a is connected to the loading chamber 300. The first coating unit 500b includes a first transition chamber 510b, a first coating chamber 520b, and a second transition chamber 530b, which are connected in sequence, and the first transition chamber 510b of the first coating unit 500b is connected to the second transition chamber 530a of the cleaning unit 500 a. The second coating unit 500c includes a first transition chamber 510c, a second coating chamber 520c and a second transition chamber 530c connected in sequence, the first transition chamber 510c of the second coating unit 500c is connected with the second transition chamber 530b of the first coating unit 500b, and the second transition chamber 530c of the second coating unit 500c is connected with the blanking chamber 400.
Optionally, the loading chamber 300, the first transition chamber 510a, the cleaning chamber 520a, the second transition chamber 530a, the first transition chamber 510b, the first coating chamber 520b, the second transition chamber 530b, the first transition chamber 510c, the second coating chamber 520c, the second transition chamber 530c, and the unloading chamber 400 are sequentially connected in a certain direction (e.g., horizontal direction).
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; may be mechanically coupled, may be electrically coupled or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or they may be interconnected within two elements or in a relationship where two elements interact with each other unless otherwise specifically limited. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the present disclosure, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" and the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.

Claims (14)

1. A hanging carrier for vacuum coating is characterized by comprising:
the coating device comprises a body, a coating film and a coating film, wherein the body is provided with a coating film window which penetrates through the body along a first preset direction; and
the pressing piece is rotatably arranged on the body between a pressing position for pressing the workpiece and a disengaging position for disengaging the workpiece, and the pressing piece positioned at the pressing position is matched with the body so as to press the workpiece on the body.
2. The hanging carrier for vacuum coating of claim 1, wherein the body further has a receiving groove for receiving a workpiece, the coating window is opposite to the receiving groove in the first predetermined direction, and the coating window is communicated with the receiving groove.
3. The hanging carrier for vacuum deposition as claimed in claim 2, wherein the pressing member includes a rotating portion and a pressing portion, the rotating portion is rotatably provided on the body between the pressing position and the disengaging position, the pressing portion is provided on the rotating portion, wherein the pressing portion of the pressing member located at the pressing position is disposed opposite to the bottom wall surface of the accommodating groove in the first predetermined direction so that the pressing portion presses the workpiece against the bottom wall surface of the accommodating groove, and the deposition window is opened on the bottom wall surface of the accommodating groove.
4. The hanging carrier for vacuum deposition according to claim 3, wherein one of the rotating portion and the body has a limiting groove, the hanging carrier further comprises a limiting member movably disposed on the other of the rotating portion and the body between a limiting position and a retracted position, wherein the pressing member is located at the pressing position, the limiting member is located at the limiting position, at least a portion of the limiting member is engaged in the limiting groove, and the pressing member is located at the disengaged position, the limiting member is located at the retracted position, and the limiting member is disengaged from the limiting groove.
5. The hanging carrier for vacuum coating according to claim 4, wherein the body has a receiving cavity, the first portion of the rotating portion is located in the receiving cavity, and one of the first portion and a wall surface of the receiving cavity is provided with the limiting groove.
6. The hanging carrier for vacuum deposition according to claim 5, wherein the limiting groove is formed on a circumferential surface of the first portion, a limiting member groove is formed on a wall surface of the receiving cavity, and the limiting member is movably disposed in the limiting member groove between the limiting position and the retracted position, wherein at least a portion of the limiting member in the limiting position extends out of the limiting member groove, and at least a portion of the limiting member in the retracted position is disposed in the limiting member groove.
7. The hanging carrier for vacuum coating according to claim 6, further comprising a first elastic member located in the position-limiting member groove, wherein one end of the first elastic member abuts against a wall surface of the position-limiting member groove, and the other end of the first elastic member abuts against the position-limiting member, wherein the first elastic member is in a deformed state so as to normally urge the position-limiting member to the position-limiting position.
8. The hanging carrier for vacuum coating according to claim 4, wherein the wall surface of the limiting groove is an arc surface, the first end of the limiting member at the limiting position is fitted in the limiting groove, and the surface of the first end is an arc surface.
9. The hanging carrier for vacuum deposition as claimed in claim 3, wherein the body has a plurality of receiving slots spaced along a second predetermined direction, the bottom wall of each receiving slot has the deposition window, the second predetermined direction is perpendicular to the first predetermined direction, the rotation axis of the rotation portion is parallel to the second predetermined direction, the pressing portions are disposed on the rotation portion at intervals along the second predetermined direction, and the bottom wall of each receiving slot is opposite to at least one of the pressing portions of the pressing member at the pressing position along the first predetermined direction.
10. The hanging carrier for vacuum coating according to claim 3, wherein the pressing member further comprises a connecting portion, one end of the connecting portion is connected to the rotating portion, and the other end of the connecting portion is connected to the pressing portion.
11. The hanging carrier for vacuum coating according to claim 10, wherein the pressing member further comprises a second elastic member for pressing the workpiece, one end of the second elastic member is connected to the connecting portion, and the other end of the second elastic member is connected to the pressing portion, wherein the second elastic member of the pressing member at the pressing position is in a deformed state so as to push the workpiece toward the body.
12. The hanging carrier for vacuum coating according to any one of claims 1 to 11, wherein there are two pressing members, and the two pressing members are spaced apart along a third predetermined direction, which is perpendicular to the first predetermined direction.
13. The utility model provides a go up unloading equipment which characterized in that includes:
a hanging carrier for vacuum coating according to any one of claims 1-12; and
the automatic workpiece placing device comprises a feeding mechanical arm and a discharging mechanical arm, wherein each of the feeding mechanical arm and the discharging mechanical arm comprises a sucker, the feeding mechanical arm is matched with the hanging carrier so as to place a workpiece on the hanging carrier, and the discharging mechanical arm is matched with the hanging carrier so as to take the workpiece away from the hanging carrier.
14. A continuous vacuum coating system comprising a hanging carrier, wherein the hanging carrier is the hanging carrier for vacuum coating according to any one of claims 1-12.
CN202210547168.9A 2022-05-19 2022-05-19 Hanging loading tool for vacuum coating, loading and unloading equipment and continuous vacuum coating system Active CN114990512B (en)

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CN102560408A (en) * 2012-01-20 2012-07-11 纳峰真空镀膜(上海)有限公司 Continuous vacuum coating device
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