CN114965360A - Micro-bubble aggregation forming method Brilparo structure resonant cavity sensing chip and preparation method thereof - Google Patents

Micro-bubble aggregation forming method Brilparo structure resonant cavity sensing chip and preparation method thereof Download PDF

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CN114965360A
CN114965360A CN202210514302.5A CN202210514302A CN114965360A CN 114965360 A CN114965360 A CN 114965360A CN 202210514302 A CN202210514302 A CN 202210514302A CN 114965360 A CN114965360 A CN 114965360A
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micro
quartz
sensing chip
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赵旭阳
吴翔
李宇翔
郭志和
孙允陆
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Fudan University
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    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G—PHYSICS
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    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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Abstract

The invention belongs to the technical field of optical sensing detection, and particularly relates to a micro-bubble aggregation forming type Fabry-Perot structure resonant cavity sensing chip and a preparation method thereof. The optical sensing chip of the present invention comprises: two plane reflectors, a quartz micro-tube with hollow micro-bubbles in the middle and two square quartz tubes; the two plane reflectors are arranged in parallel up and down, and the two square quartz tubes are arranged on the left side and the right side of the two plane reflectors to ensure that the two plane reflectors are kept highly parallel; the hollow quartz micro-bubble is arranged between the two plane reflectors, and two ends of the hollow quartz micro-bubble are bonded and fixed with the plane reflectors to form a micro-bubble aggregation forming type Bripaulo structure resonant cavity sensing chip; the surface of the plane reflector is plated with a metal film or a dielectric film with specific reflectivity. The invention enables the sensing chip to have the characteristics of high sensitivity, low mode volume and high quality factor based on the lens effect of the micro-bubble, and integrates a natural micro-flow channel to realize the sensing of low-concentration chemical molecules or unmarked biological molecules.

Description

Micro-bubble aggregation forming method Bripaulo structure resonant cavity sensing chip and preparation method thereof
Technical Field
The invention belongs to the technical field of optical sensors, and particularly relates to a Fabry-Perot resonant cavity sensing chip and a preparation method thereof.
Background
Optical detection techniques are often used for sensing physical parameters, biological or chemical samples, and sensors based on optical detection techniques generally have the advantages of fast response, being free from electromagnetic interference of the surrounding environment, high sensitivity and the like, and are widely applied to different fields. The Fabry-Perot resonant cavity based on the optical detection technology can realize optical amplification of weak signals due to high quality factors, extremely small mode volumes and strong interaction between light and substances caused by the cavity, and is widely applied to detection of chemical molecules and biological molecules.
In general, a Fabry-perot resonator (FP) consists of two mirrors kept highly parallel, wherein light satisfying the resonance condition is confined in the cavity due to specular reflection, thereby forming a stable standing wave. The higher the reflectivity of the plane mirror is, the more times light is reflected, which results in the stronger coherent superposition effect of the optical field in the cavity, and the narrower the optical mode output by the resonant cavity, the higher the sensing resolution. The existing fabry perot cavity can be divided into an optical fiber fabry perot cavity and a plane reflector fabry perot cavity according to different structures. Although the optical fiber fabry perot cavity has the advantages of being easy to manufacture and integrate, the optical fiber fabry perot cavity generally has a lower quality factor and a larger mode line width due to lower reflectivity and coupling efficiency of an optical fiber end face, so that the detection capability of a weak signal is limited. Compared with an optical fiber Fabry Perot cavity, the cavity mirror of the plane reflector Fabry Perot cavity can realize high reflectivity, so that the plane reflector Fabry Perot cavity is ensured to have high quality factors and extremely small mode spectrum line widths, and has a lower detection limit.
The plane reflector Fabry-Perot cavity sensor can be divided into an active cavity and a passive cavity according to whether a substance to be detected has a fluorescent mark or not. For an active cavity, an analyte with a fluorescent label is mainly placed in the cavity, and a fluorescent signal is converted into a laser signal through optical gain amplification, so that the sensing resolution is improved. However, the detection of fluorescently labeled molecules requires specific treatment or modification of the analyte in advance, increasing the complexity and cost of analyte detection. Fluorescent marker molecules also have an effect on the activity of biomolecules. In addition, the fluorescent molecule requires a specific wavelength of pump light for excitation, which results in its use only in a specific wavelength band, limiting its practical application. Passive cavities can effectively address the above problems, but it is often difficult to achieve high efficiency coupling of incident light. In addition, cavity mirrors that are not aligned in parallel introduce multiple reflection losses, resulting in a sharp drop in the quality factor of the microcavity. Thus, the broadened resonant modes can reduce the detection limit of the sensor. Due to the lack of lateral mode confinement, the plane mirror fabry perot cavity has a large mode volume and small optical energy density, resulting in a decrease in the intensity of the light and matter interaction.
In addition, the conventional biomolecule detection technology requires specific modification of molecules on the surface of the resonant cavity, which increases the complexity of the sensor and introduces additional uncertain factors, thereby making biomolecule detection based on the optical microcavity structure difficult to be applied to practice.
Disclosure of Invention
The invention aims to provide a micro-bubble integrated forming Fabry-Perot structure resonant cavity sensing chip which can keep high quality factor, low mode volume, high sensitivity and no mark sensing and can avoid a complex surface modification process in a biomolecule detection process and a preparation method thereof.
The structure of the micro-bubble integrated forming Fabry-Perot structure resonant cavity sensing chip provided by the invention is shown in figure 1; the method comprises the following steps: two plane reflectors, one or more quartz micro-tubes and two square quartz tubes, wherein the middle of each quartz micro-tube is provided with hollow micro-bubbles with different quantities; the two plane reflectors are arranged in parallel up and down, and the two square quartz tubes are same in height and are arranged at the edges of the left side and the right side of the two plane reflectors in parallel; the two plane reflectors are respectively bonded and fixed with the upper and lower surfaces of the two square quartz tubes, and the two plane reflectors are ensured to be highly parallel; the hollow quartz microbubbles of the microtubes are arranged between the two plane reflectors and in the middle of the two square quartz tubes, the upper surface and the lower surface of the hollow quartz microbubbles are respectively kept parallel to the two plane reflectors, and the two ends of the microtubes are bonded and fixed with the plane reflectors to form a microbubble integrated forming type Fabry-Perot structure resonant cavity sensing chip;
the plane reflector takes a quartz plate as a substrate, and the surface of the plane reflector is respectively plated with a metal film with specific reflectivity or a plurality of layers of dielectric films with high and low refractive indexes which are periodically and crossly arranged.
The reflection wave band of the plane reflector is from near ultraviolet light to intermediate infrared light.
The square quartz tube is bonded with the plane reflector, and the two ends of the microtube are bonded with the plane reflector by ultraviolet glue.
Wherein, the port of the microtube prepared with the hollow structure quartz microbubbles can be combined with a microfluidic system.
In the present invention, the height of the square quartz tube is not more than 1 mm, for example, the height is 100-.
In the present invention, the diameter of the quartz microbubbles is not more than 1 mm, for example, the height is 100-; the wall thickness is not more than 15 μm, for example 5-15 μm.
In the present invention, the hollow microbubbles prepared on the quartz microtubes have an elliptical shape, and the number of the hollow microbubbles is at least 3, and for example, the number of the hollow microbubbles can be 3 to 5.
In the invention, the two ends of the quartz microtube are provided with openings, and the quartz microtube can be combined with a microfluidic system.
In the invention, the surface of one side of the plane reflector is plated with a metal film or a dielectric film with specific reflectivity, wherein the reflectivity ranges from 80% to 100%.
In the invention, the substrate of the plane reflector is a light-transmitting quartz plate with a thickness of 300-500 μm.
The sensor chip of the invention can be used for detecting analytes such as physical parameters, chemical molecules (including gas and liquid), and the like. During specific detection, the concentration of chemical molecules is rapidly detected in real time through an optical means according to the characteristic that the refractive index of a detection object changes along with the concentration, so that the function of rapidly detecting a chemical solution in real time is realized.
The sensor of the invention can be used for detecting analytes such as biomolecules. During detection, the concentration of the biomolecule is detected in real time by an optical means according to the change characteristic of the refractive index caused by specific binding of the biomolecule to be detected (specific binding of the probe protein and the corresponding antibody protein), so as to realize the specific detection function of the unmarked biomolecule.
Correspondingly, the invention also provides a preparation method of the sensor chip, which comprises the following specific steps:
(1) selecting a section of quartz micro-tube, and preparing quartz micro-bubbles with the diameter close to that of the quartz micro-tube and at least three numbers of the quartz micro-bubbles on the section of quartz micro-tube in a melting blowing mode;
(2) uniformly coating a layer of ultraviolet glue on the lower surface of a square quartz tube, and horizontally laying the ultraviolet glue on the surface of a plane reflector, wherein the surface of the plane reflector plated with a reflecting film is bonded with the square tube by using the ultraviolet glue;
(3) adjusting the micro-bubbles to be parallel to the plane reflector by using a five-dimensional adjusting frame, and fixing two ends of the micro-bubbles on the surface of the plane reflector;
(4) and coating a layer of ultraviolet glue on the upper surface of the square quartz tube, and laying the other reflector on the upper surface of the square quartz tube, wherein the surface of the reflector plated with the reflecting film is bonded with the square tube.
The invention also provides a detection system based on the sensor chip, as shown in fig. 3, including: the device comprises a tunable laser (or a super-continuum spectrum light source) 5, a beam collimator 6, a beam splitter 7, a focusing objective lens 8, a micro-bubble integrated forming type Bripah structure resonant cavity sensing chip 9, a focusing objective lens 10, a focusing objective lens or lens 11 and a photoelectric detector (or a spectrum analyzer) 12 which are connected in sequence to form a sensing optical path; the device also comprises a focusing objective lens or lens 13 and a CCD imaging device 14 which are sequentially connected with the beam splitter 7 to form an imaging light path; wherein:
a tunable laser (or supercontinuum light source) 5 is used for emitting detection laser; transmitting the output laser light of the laser to a beam collimator 6 by a single mode fiber; the beam collimator is used for collimating the divergent laser output by the optical fiber into parallel light; the beam splitter 7 is used for transmitting the image formed by the focusing objective lens to the CCD imaging device; the focusing objective lens 8 is used for coupling collimated laser to a micro-bubble integrated forming type Fabry-Perot structure resonant cavity sensing chip 9, and is also used for collecting output light of the sensing chip and imaging the sensing chip; two ends of each quartz microbubble in the resonant cavity sensing chip 9 with the microbubble integrated forming method are provided with openings, one end of each quartz microbubble is connected with a micro-fluidic system such as an injector, an injection pump and the like through a Teflon tube, and the other end of each quartz microbubble is connected with an analyte to be detected through the Teflon tube; the output optical signal collected by the focusing objective lens 10 is fully collected by the large-core optical fiber bundle and is transmitted to a photoelectric detector (or a spectrum analyzer) 12; the photodetector (or spectrum analyzer) 12 receives the output optical signal, converts the output optical signal into an electrical signal and transmits the electrical signal to the oscilloscope (or directly analyzes the output spectrum); the oscilloscope is used for displaying the emergent spectral signals collected by the photoelectric detector; the CCD imaging device 14 is used for imaging the microbubble integrated Fabry Perot resonant cavity sensing chip; the microfluidic system comprises an injection pump, an injector and a Teflon tube and is used for pumping the analyte to be detected into the quartz microbubbles; the test tube is used for storing the analyte to be detected.
Correspondingly, the invention also provides a detection method of the sensing chip, which comprises the steps of starting the tunable laser (or the super-continuum spectrum light source) and emitting detection laser; coupling incident laser to a micro-bubble area of the sensing chip by using a CCD imaging system and a five-dimensional adjusting frame; a microfluidic system (comprising an injection pump, an injector and a Teflon tube) is used for pumping an analyte to be detected into the microbubbles, wherein one end of the microfluidic system is connected with one port of the quartz microbubbles, and the other port of the quartz microbubbles is connected with a test tube filled with the analyte to be detected through the Teflon tube; the photoelectric detector (or the spectrum analyzer) is used for collecting signals, and the oscilloscope is used for displaying and storing data.
The technical principle of the invention is as follows: the upper surface and the lower surface of the plane reflector and the square tube are bonded, the parallelism of the two plane reflectors is guaranteed, extra optical loss caused by the fact that the two plane reflectors cannot be parallel to each other is further reduced through the integrated micro-bubbles, and meanwhile a micro-flow channel is naturally integrated.
In the invention, due to the lens effect of the hollow micro-bubble, the optical field in the cavity is effectively constrained at the position of the optical axis in the micro-bubble region, so that the mode volume of a resonance mode can be greatly reduced, the light energy density is increased, the extra optical loss caused by the fact that the two reflectors cannot be guaranteed to be highly parallel can be effectively overcome, and the quality factor of the sensing chip is increased.
The invention has the following characteristics:
(1) the invention is significantly different from conventional fabry perot resonant cavity sensors. According to the invention, the quartz micro-bubbles are integrated in the conventional Fabry Perot resonant cavity, and due to the lens effect of the quartz micro-bubbles, the mode volume of a resonant mode is reduced, the strength of the interaction of optical substances is enhanced, and the quality factor of the Fabry Perot resonant cavity is greatly improved;
(2) according to the invention, the extra optical loss caused by the fact that two plane reflectors cannot be kept highly parallel is overcome, and the quality factor of the sensing chip is greatly improved;
(3) the integrated quartz microbubbles are microfluidic channels, so that an analyte transmission channel does not need to be additionally manufactured;
(4) the biomolecule detection mechanism realized by the invention is that the specific binding between biomolecules causes larger refractive index change, and the process does not need to label the biomolecules or modify chemical molecules inside the quartz microbubbles, thereby reducing the complexity of biomolecule detection;
(5) according to the invention, the sensor has extremely high quality factor, so that detection of biochemical molecules (protein, DNA, chemical gas, bacterial virus) with ultralow concentration and trace volume and weak physical quantity (temperature, pressure and refractive index) signals can be realized;
(6) the sensing chip provided by the invention can adopt different optical sensing wave bands according to the actual detection reagent requirements;
(7) the sensor chip provided by the invention has the advantages of simple preparation method, easy operation and repeated use;
(8) the sensing chip provided by the invention has the advantages of simple testing method, low requirement on a testing system and convenience for practical application.
Drawings
Fig. 1 is a structural diagram of a resonant cavity sensing chip with a micro-bubble aggregation forming method fabry perot structure according to the invention.
Fig. 2 is a schematic diagram of a method for manufacturing a resonant cavity sensing chip based on a micro-bubble aggregation forming method and a fabry perot structure.
Fig. 3 is a schematic diagram of a detection system of a resonant cavity sensor chip based on a micro-bubble aggregation forming method Bripauer structure.
Fig. 4 is a diagram of a transmission spectrum of a resonant cavity sensor chip based on a micro-bubble aggregation method in a fabry-perot structure.
Fig. 5 is an enlarged view based on fig. 4.
Fig. 6 is a graphical representation of the sensitivity test results of the resonant cavity sensing chip based on the micro-bubble aggregation forming method of the invention.
Reference numbers in the figures: 1 is a quartz plate substrate; 2 is a reflecting film of a specific wave band; 3 is quartz microbubble; 4 is a square quartz tube; 5 is a tunable laser (or a super-continuum spectrum light source); 6 is a beam collimator; 7 is a beam splitter; 8 is a focusing objective lens; 9 is a microbubble integrated Fabry Perot structure resonant cavity sensing chip; 10 is a focusing objective lens; 11 is a focusing objective lens or lens; 12 is a photoelectric detector (or a spectrum analyzer); 13 is a focusing objective or lens; 14 is a CCD imaging device; 15 is a sensing optical path; and 16 is an imaging optical path.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, but the present invention is not limited to these examples.
Example 1
In this embodiment, a resonant cavity sensing chip (see fig. 1) with a micro-bubble integrated forming method and a fabry perot structure specifically includes: two plane reflectors coated with specific wave band reflection films, the reflectivity range of the reflectors is 80% -100%, and the thickness of the quartz piece substrate 1 is 300-; the height of the square quartz tube 4 is not more than 1 mm, and the height of the square quartz tube is close to the diameter of the micro-bubble; a microtube 3 prepared with quartz microbubbles having a diameter of not more than 1 mm and a wall thickness of not more than 15 μm, the microtube having openings at both ends; the square quartz tube is bonded with the film-plated surface of the plane reflector through ultraviolet glue; two ends of the microtube prepared with the quartz microbubbles are fixed in the middle of the plane reflector through ultraviolet glue.
In the present apparatus, a method for preparing a resonant cavity sensing chip with a micro-bubble aggregation forming method fabry perot structure is shown in fig. 2, and includes:
(1) selecting a section of quartz microtube, and preparing one or more microbubbles with the diameter close to the size of the microbubble by a melting blowing mode;
(2) uniformly coating a layer of ultraviolet glue on the lower surface of a square quartz tube, and horizontally laying the ultraviolet glue on the surface of a plane reflector, wherein the surface of the plane reflector plated with a reflecting film is bonded with the square quartz tube by using the ultraviolet glue, as shown in fig. 2 (b);
(3) adjusting the quartz micro-bubble to be parallel to the plane mirror by using a five-dimensional adjusting frame, and fixing two ends of the quartz micro-bubble on the surface of the plane mirror, as shown in fig. 2 (c);
(4) a layer of ultraviolet glue is coated on the upper surface of the square quartz tube, and another reflector is laid on the upper surface of the square quartz tube, wherein the side of the reflector plated with the reflecting film is bonded with the square tube, as shown in fig. 2 (d).
In the device, when laser is incident on the sensing chip, part of the laser enters the Fabry Perot cavity through the mirror surface, and only light which meets the cavity resonance condition and light which is transmitted in a direction parallel to the optical axis can generate interference constructive due to the reflection of the two plane reflectors, so that stable resonance is formed; for light that cannot satisfy the resonance condition, the final output light is 0 due to interference cancellation; for light with a certain included angle with the optical axis direction, the light is reflected out of the cavity for multiple times by the mirror surface and cannot form resonance. The resonance conditions of the fabry perot cavity are:
Figure 963704DEST_PATH_IMAGE001
（1）
wherein the content of the first and second substances,nis the effective index of refraction within the cavity,Lthe length of the cavity is taken as the length of the cavity,mis a longitudinal modulus, is a positive integer,λis the resonant wavelength. As can be seen from equation 1, when the refractive index is highnWhen the change occurs, the resonant wavelength of the cavity also changes correspondingly for the same longitudinal module. For chemical liquids with different concentrations, the refractive index of the chemical liquids generally changes with the change of the concentration, so that when the chemical liquids with different concentrations are introduced into the microbubbles, the wavelength of the resonance mode correspondingly moves, and the analyte solution with specific concentration can be tested by detecting the movement of the wavelength, thereby realizing chemical molecule sensing.
Example 2
In this embodiment, based on the parameters of embodiment 1, the transmission spectrum test of the sensor chip is performed, and the specific process is as follows: combining the micro-bubble integrated forming method Brilparo structure resonant cavity sensing chip prepared in the embodiment 1 with a microfluidic technology, namely combining one port of a micro-tube with micro-bubbles with an injector and an injection pump through a Teflon tube to realize the extraction of liquid to be detected; the other end of the micro-tube with the micro-bubbles is combined with the liquid to be detected through a Teflon tube.
In the present apparatus, a test system is shown in fig. 3. Starting a tunable laser (or a super-continuum spectrum light source) to emit incident laser; after being collimated by a collimator, incident laser firstly passes through a beam splitter, then is focused on the surface of a sensing chip by using a focusing objective lens, and is coupled to a microbubble region of the sensing chip by using a CCD imaging system and a five-dimensional adjusting frame; the micro-fluidic system (comprising an injection pump, an injector and a Teflon tube) is used for pumping the analyte to be detected into the micro-bubbles; the transmission spectrum of the Fabry-Perot structure resonant cavity sensing chip with the micro-bubble aggregation forming method is shown in FIG. 4. According to formula 1 in example 1, wavelengths satisfying the resonance condition produce stable oscillation, showing sharp peaks in the transmission spectrum; meanwhile, the resonant wavelengths are different for different longitudinal moduli, so that a series of approximately periodically arranged wave peaks are finally formed in the transmission spectrum. The distance between two adjacent resonant modes is the Free Spectral Range (FSR), which can be written as:
Figure 890072DEST_PATH_IMAGE002
（2）
as shown in fig. 4, the free spectral range of the transmission spectrum of the test sensor chip is 1.71 nm. FIG. 5 is an enlarged view of FIG. 4, the quality factor of the sensor chip is 10 by Lorentzian fitting of resonance modes in the spectrum 5 . The quality factor of the resonant cavity is related to the spectral line width of the resonant mode, and can be written as:
Figure 970024DEST_PATH_IMAGE003
（3）
where Δ λ is the full width at half maximum of the spectrum of the resonant mode. Through the formula 3, the larger the quality factor of the sensing chip is, the narrower the spectral line width of the resonance mode is, the higher the corresponding resolution of the sensor is, and the easier the detection of the weak signal is.
Example 3
In this embodiment, the sensitivity of the sensor chip is tested based on the parameters of the sensor chip in embodiment 1 and the test system and the test method in embodiment 2. The specific process is as follows: based on the test system of example 2, Dimethyl sulfoxide (DMSO) solutions with concentrations of 0-1% were respectively introduced into the microbubbles, and the shift of the resonance mode in the spectrum was observed in real time using an oscilloscope, as shown in fig. 6 (a). As the concentration of the dmso solution increased, the corresponding resonant wavelength red-shifted. The peak value of the resonance mode was extracted to obtain a curve showing the variation of the resonance wavelength with the refractive index as shown in fig. 6 (b), and the sensitivity of the sensor chip was found to be 594 nm/RIU by linear fitting.
In the device, specificity detection of biomolecules can be realized while avoiding a complicated surface chemical modification process. Specific binding of biomolecules (specific binding of probe proteins and corresponding antibody proteins) can cause a large refractive index change of a corresponding biomolecule solution, and as the concentration of the probe proteins changes, the refractive index of the solution changes, so that the resonance wavelength is red-shifted. The probe protein concentration can be detected by detecting the shift of the resonance wavelength.

Claims (8)

1. A micro-bubble integrated forming method Fabry-Perot structure resonant cavity sensing chip is characterized by comprising: two plane reflectors, one or more quartz micro-tubes and two square quartz tubes, wherein the middle parts of the two plane reflectors are provided with hollow micro-bubbles with different numbers; the two plane reflectors are arranged in parallel up and down, and the two square quartz tubes are same in height and are arranged at the edges of the left side and the right side of the two plane reflectors in parallel; the two plane reflectors are respectively bonded and fixed with the upper and lower surfaces of the two square quartz tubes, and the two reflectors are ensured to be parallel; the hollow quartz micro-bubble of the micro-tube is arranged between the two plane reflectors and in the middle of the two square quartz tubes, the upper surface and the lower surface of the hollow quartz micro-bubble are respectively kept parallel to the two plane reflectors, and the two ends of the micro-tube are bonded and fixed with the plane reflectors to form a micro-bubble integrated forming type Brillouin structure resonant cavity sensing chip;
the plane reflector takes a quartz plate as a substrate, and the surface of the plane reflector is respectively plated with a metal film with specific reflectivity or a plurality of layers of medium films with high and low refractive indexes which are periodically and crossly arranged.
2. The sensing chip of claim 1, wherein the reflection band of the plane mirror is from near ultraviolet light to mid-infrared light.
3. The resonant cavity sensing chip with the micro-bubble integrated forming method Bripajo structure as claimed in claim 1, wherein the square quartz tube has a height of no more than 1 mm.
4. The resonant cavity sensing chip with the micro-bubble integrated forming method Bripaul structure as claimed in claim 1, wherein the diameter of the quartz micro-bubble is not more than 1 mm, and the wall thickness is not more than 15 μm.
5. The resonant cavity sensing chip with the micro-bubble integrated forming method Bripaul structure as claimed in claim 1, wherein the hollow micro-bubbles prepared on the quartz microtube are elliptical in shape and at least 3 in number.
6. The resonant cavity sensing chip with the micro-bubble aggregation forming method Brilparo structure as recited in claim 1, wherein a metal film or a dielectric film is coated on a single-side surface of the plane mirror, and the reflectivity ranges from 80% to 100%.
7. The preparation method of the resonant cavity sensing chip with the micro-bubble aggregation forming method Brilparo structure as claimed in one of claims 1 to 6, which is characterized by comprising the following steps:
(1) selecting a section of quartz micro-tube, and preparing quartz micro-bubbles with the diameter close to that of the quartz micro-tube and at least three numbers of the quartz micro-bubbles on the section of quartz micro-tube in a melting blowing mode;
(2) uniformly coating a layer of ultraviolet glue on the lower surface of a square quartz tube, and horizontally laying the ultraviolet glue on the surface of a plane reflector, wherein the surface of the plane reflector plated with a reflecting film is bonded with the square tube by using the ultraviolet glue;
(3) adjusting the micro-bubbles to be parallel to the plane reflector by using a five-dimensional adjusting frame, and fixing two ends of the micro-bubbles on the surface of the plane reflector;
(4) and coating a layer of ultraviolet glue on the upper surface of the square quartz tube, and laying the other reflector on the upper surface of the square quartz tube, wherein the surface of the reflector plated with the reflecting film is bonded with the square tube.
8. A detection system based on a micro-bubble aggregation forming method Fabry-Perot structure resonant cavity sensor chip as claimed in any one of claims 1 to 6, characterized by comprising: the device comprises a tunable laser or a super-continuum spectrum light source (5), a beam collimator (6), a beam splitter (7), a focusing objective (8), a micro-bubble integrated forming type Fabry structure resonant cavity sensing chip (9), a focusing objective (10), a focusing objective or lens (11) and a photoelectric detector or spectrum analyzer (12) which are connected in sequence to form a sensing light path; the device also comprises a focusing objective lens or lens (13) and a CCD imaging device (14) which are sequentially connected with the beam splitter (7) to form an imaging optical path; wherein:
the tunable laser or the super-continuum spectrum light source (5) is used for emitting detection laser; -transmitting the output laser light of the laser by a single mode optical fibre to a beam collimator (6); the beam collimator is used for collimating the divergent laser output by the optical fiber into parallel light; the beam splitter (7) is used for transmitting the image formed by the focusing objective lens to the CCD imaging device; the focusing objective lens (8) is used for coupling collimated laser into a micro-bubble integrated forming type Fabry-Perot structure resonant cavity sensing chip (9), and is also used for collecting output light of the sensing chip and imaging the sensing chip; two ends of each quartz microbubble in the resonant cavity sensing chip (9) of the microbubble integrated forming method Bripaul structure are provided with openings, one end of each quartz microbubble is connected with a micro-fluidic system such as an injector and an injection pump through a Teflon tube, and the other end of each quartz microbubble is connected with an analyte to be detected through the Teflon tube; the output optical signals collected by the focusing objective lens (10) are fully collected by the large-core optical fiber bundle and are transmitted to a photoelectric detector or a spectrum analyzer (12); the photoelectric detector or the spectrum analyzer (12) receives the output optical signal, converts the output optical signal into an electric signal and transmits the electric signal to the oscilloscope or directly analyzes the output spectrum; displaying the emergent spectrum signal collected by the photoelectric detector by using an oscilloscope; the CCD imaging device (14) is used for imaging the micro-bubble integrated forming method Bripauer structure resonant cavity sensing chip.
CN202210514302.5A 2022-05-11 2022-05-11 Micro-bubble aggregation forming method Brilparo structure resonant cavity sensing chip and preparation method thereof Pending CN114965360A (en)

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