CN114942100A - Device and method for detecting vacuum degree of vacuum switch - Google Patents

Device and method for detecting vacuum degree of vacuum switch Download PDF

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Publication number
CN114942100A
CN114942100A CN202111680934.0A CN202111680934A CN114942100A CN 114942100 A CN114942100 A CN 114942100A CN 202111680934 A CN202111680934 A CN 202111680934A CN 114942100 A CN114942100 A CN 114942100A
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China
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signal
vacuum
plasma
vacuum switch
vacuum degree
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CN202111680934.0A
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Chinese (zh)
Inventor
荣命哲
柯伟
陈敏源
袁欢
王小华
杨爱军
刘定新
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Xian Jiaotong University
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Xian Jiaotong University
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Priority to CN202111680934.0A priority Critical patent/CN114942100A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00Vacuum gauges

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  • General Physics & Mathematics (AREA)
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Abstract

The present disclosure discloses a device for detecting vacuum degree of a vacuum switch, including: the plasma excitation module is used for exciting the vacuum switch to be tested so as to generate a plasma signal; the first signal conversion module is used for converting the plasma signal into a current signal; the second signal conversion module is used for converting the current signal into a voltage signal; and the detection module is used for extracting the characteristic parameters of the voltage signals and obtaining the vacuum degree of the vacuum switch to be detected according to the characteristic parameters of the voltage signals.

Description

Device and method for detecting vacuum degree of vacuum switch
Technical Field
The disclosure belongs to the field of vacuum degree detection of vacuum switches, and particularly relates to a device and a method for vacuum degree detection of a vacuum switch.
Background
At present, a 126kV transmission grade vacuum circuit breaker already has actual net hanging conditions, but the lack of a vacuum degree online detection means for a high-voltage grade vacuum circuit breaker greatly limits the large-scale popularization of the 126kV transmission grade vacuum circuit breaker. The vacuum degree detection technology of the vacuum switch based on the laser-induced plasma is expected to realize the on-line detection of the vacuum switch, and the principle of the technology is derived from the LIBS technology, namely the breakdown spectrum of the laser-induced plasma, high-energy nanosecond pulse laser is utilized to bombard a vacuum switch shielding cover to induce and generate the laser plasma, the laser plasma information is collected and analyzed, the plasma characteristic parameters are extracted, and the vacuum degree information is obtained according to the characteristic parameters. However, laser-induced plasma is a transient process, and under ultrahigh vacuum, the service life of the laser plasma is only hundreds of nanoseconds, so that the laser plasma is difficult to image by a common imaging device; at present, a commonly used laser plasma imaging device is an ICCD camera, which can capture nanosecond-level plasma images. However, the ICCD camera is expensive and large in size, which greatly limits the practical engineering application of the vacuum degree detection technology of the vacuum switch based on laser-induced plasma, and also limits the large-scale use of the vacuum switch circuit breaker in medium-high voltage, extra-high voltage and above transmission grade power grids.
Disclosure of Invention
Aiming at the defects in the prior art, the disclosed device and method for detecting the vacuum degree of a vacuum switch are provided, the high-speed large-bandwidth photodiode is adopted as a plasma signal detection element, so that the detection cost of a plasma signal is greatly reduced, and compared with an ICCD camera, the device has smaller volume and lighter weight, is more suitable for being used as a plasma signal detection element used in practical engineering, and promotes the practical engineering application of the vacuum degree detection technology of the vacuum switch based on the laser-induced plasma technology.
In order to achieve the above purpose, the present disclosure provides the following technical solutions:
an apparatus for vacuum detection of a vacuum switch, comprising:
the plasma excitation module is used for exciting the vacuum switch to be tested so as to generate a plasma signal;
the first signal conversion module is used for converting the plasma signal into a current signal;
the second signal conversion module is used for converting the current signal into a voltage signal;
and the detection module is used for extracting the characteristic parameters of the voltage signal and obtaining the vacuum degree of the vacuum switch to be detected according to the characteristic parameters of the voltage signal.
Preferably, the first signal conversion module includes a signal attenuation unit and a first signal conversion unit, and the signal attenuation unit is configured to attenuate the plasma signal to a working intensity range of the first signal conversion unit.
Preferably, the second signal conversion module includes a power supply and a second signal conversion unit, and the second signal conversion unit, the signal attenuation unit and the first signal conversion unit form a loop.
Preferably, the detection module includes:
the extraction unit is used for extracting the characteristic parameters of the voltage signals;
and the detection unit is used for obtaining the vacuum degree of the vacuum switch to be detected according to the characteristic parameters of the voltage signal.
Preferably, the detection unit obtains the vacuum degree of the vacuum switch to be detected by substituting the characteristic parameters of the voltage signal into a vacuum degree detection model.
Preferably, the vacuum degree detection model is formed by fitting characteristic parameters of voltage signals obtained by the vacuum switch under different vacuum degrees with the vacuum degrees.
Preferably, the plasma excitation module comprises a nanosecond pulse laser, a dichroic mirror and a plano-convex lens which are located on the same optical path.
The present disclosure also provides a method for detecting a vacuum degree of a vacuum switch, comprising the following steps:
s100: exciting a vacuum switch to be tested to generate a plasma signal;
s200: collecting a plasma signal and converting the plasma signal into a current signal;
s300: converting the current signal into a voltage signal;
s400: and extracting characteristic parameters of the voltage signal and obtaining the vacuum degree of the vacuum switch to be detected according to the vacuum degree detection model.
Compared with the prior art, the beneficial effect that this disclosure brought does:
1. according to the method, laser plasma is induced on a vacuum switch shielding case through nanosecond pulse laser, a laser plasma optical signal is converted into an electric signal, the vacuum degree of a vacuum switch to be tested is obtained according to an electric signal characteristic parameter, and non-contact and online monitoring of the vacuum degree of the vacuum switch can be realized;
2. according to the plasma detection device, the photodiode is used as a detection element of the plasma, compared with a traditional plasma detection element ICCD camera, the cost of the photodiode is lower and can be almost ignored, and the vacuum degree detection cost of the vacuum switch is greatly reduced;
3. compared with an ICCD camera, the photoelectric diode with the volume only equal to that of soybeans is smaller in volume and lighter in weight, and is more favorable for practical engineering application of a vacuum switch vacuum degree detection technology based on laser-induced plasma;
4. the photodiode is adopted as the plasma detection element, so that the hardware cost and the use cost of the vacuum degree detection technology of the vacuum switch based on the laser-induced plasma are reduced, the popularization and the use of the vacuum degree detection technology of the vacuum switch based on the laser-induced plasma are facilitated, the large-scale popularization of the vacuum circuit breaker is promoted, the replacement of the vacuum circuit breaker on the SF6 circuit breaker is facilitated, and the carbon emission of a power grid is reduced.
Drawings
FIG. 1 is a schematic structural diagram of an apparatus for vacuum level detection of a vacuum switch according to an embodiment of the present disclosure;
FIG. 2 is a graph of voltage signals provided by another embodiment of the present disclosure;
FIG. 3 is a graph of voltage signature versus air pressure provided by another embodiment of the present disclosure;
the labels in FIG. 1 are illustrated below:
the device comprises a 1-nanosecond pulse laser, a 2-dichroic mirror, a 3-plano-convex lens, a 4-quartz glass window, a 5-vacuum switch shielding case, a 6-vacuum switch, a 7-optical filter, an 8-photodiode, a 9-direct current power supply, a 10-sampling resistor, an 11-high-speed signal acquisition board and a 12-controller.
Detailed Description
Specific embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings fig. 1 to 3. While specific embodiments of the disclosure are shown in the drawings, it should be understood that the disclosure can be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
It should be noted that certain terms are used throughout the description and claims to refer to particular components. As one skilled in the art will appreciate, various names may be used to refer to a component. This specification and claims do not intend to distinguish between components that differ in name but not function. In the following description and in the claims, the terms "include" and "comprise" are used in an open-ended fashion, and thus should be interpreted to mean "include, but not limited to. The description which follows is a preferred embodiment of the present disclosure, but is made for the purpose of illustrating the general principles of the disclosure and not for the purpose of limiting the scope of the disclosure. The scope of the present disclosure is to be determined by the terms of the appended claims.
To facilitate an understanding of the embodiments of the present disclosure, the following detailed description is to be considered in conjunction with the accompanying drawings, and the drawings are not to be construed as limiting the embodiments of the present disclosure.
In one embodiment, as shown in fig. 1, the present disclosure provides an apparatus for vacuum level detection of a vacuum switch, comprising:
the plasma excitation module is used for exciting the vacuum switch to be tested so as to generate a plasma signal;
the first signal conversion module is used for converting the plasma signal into a current signal;
the second signal conversion module is used for converting the current signal into a voltage signal;
and the detection module is used for extracting the characteristic parameters of the voltage signal and obtaining the vacuum degree of the vacuum switch to be detected according to the characteristic parameters of the voltage signal.
In the embodiment, the plasma signal is induced and generated on the shield cover in the vacuum switch to be detected, the plasma signal is sequentially converted into the current signal and the voltage signal, and then the characteristic parameter of the voltage signal is extracted to obtain the vacuum degree of the vacuum switch to be detected, so that the non-contact and on-line detection of the vacuum degree of the vacuum switch to be detected can be realized.
In another embodiment, the laser plasma excitation module comprises a nanosecond pulse laser, a dichroic mirror and a plano-convex lens which are located in the same optical path.
In the embodiment, the nanosecond pulse laser 1 is aligned to the vacuum switch shielding case 5 through the quartz glass window 4 on the vacuum switch, and the plano-convex lens 3 is arranged between the nanosecond pulse laser 1 and the quartz glass window 4, so that the nanosecond pulse laser generated by the nanosecond pulse laser 1 can be focused on the vacuum switch shielding case 5, and laser plasma is induced to be generated; besides, a dichroic mirror 2 is also required to be arranged between the plano-convex lens 3 and the nanosecond pulse laser 1, so that laser plasma can be separated from a focusing light path of the nanosecond pulse laser.
In another embodiment, the first signal conversion module comprises a signal attenuation unit and a first signal conversion unit, wherein the signal attenuation unit is used for attenuating the plasma signal to the working intensity range of the first signal conversion unit.
In this embodiment, the photodiode 8 is selected to convert the plasma signal separated by the dichroic mirror 2 into a current signal, and in addition, since the photodiode 8 is sensitive to the intensity of the optical signal, the optical filter 7 is further required to filter the plasma signal so as to attenuate the signal intensity to within the working intensity range of the photodiode 8, thereby protecting the photodiode 8 from being damaged.
It should be noted that, in the prior art, an ICCD camera is generally used to acquire a plasma signal, but the ICCD camera has high cost and large volume, and compared with the ICCD camera, a photodiode has low cost and small volume, and is more favorable for practical engineering application of vacuum degree detection of a vacuum switch.
In another embodiment, the second signal conversion module includes a power supply and a second signal conversion unit, and the second signal conversion unit, the signal attenuation unit and the first signal conversion unit form a loop.
In this embodiment, the power supply is a dc power supply, and the anode of the power supply is connected to the output cathode of the photodiode 8, the output anode of the photodiode 8 is connected to one end of the sampling resistor 10, and the other end of the sampling resistor 10 is connected to the cathode of the dc power supply 9, so as to form a sampling circuit; the sampling circuit converts the current signal of the photodiode 8 into a voltage signal of the sampling resistor 10.
In another embodiment, the detection module comprises:
the extraction unit is used for extracting the characteristic parameters of the voltage signals;
and the calculating unit is used for obtaining the vacuum degree of the vacuum switch to be measured according to the characteristic parameters of the voltage signal.
In this embodiment, a time corresponding to the peak value of the voltage signal may be selected as a starting point of the voltage signal, a time corresponding to the time when the intensity value of the voltage signal is 0.1353 times as an end point of the voltage signal, the voltage signal between the starting point and the end point is integrated, and the signal integration is used as the characteristic parameter of the voltage signal.
And after the characteristic parameters of the voltage signal are determined, calculating the vacuum degree of the vacuum switch to be detected according to the vacuum degree detection model.
Next, this embodiment will specifically describe the vacuum degree detection with reference to fig. 2 to 3.
FIG. 2 is a graph of voltage signals of the sampling resistor 10 under different barometric pressures obtained in the present embodiment; fig. 3 is a graph showing the relationship between the voltage signal integral obtained in the present embodiment and the ambient air pressure.
In a specific embodiment, the response time of the photodiode 10 is 150ps, the bandwidth is 2.5GHz, the response wavelength is 400-1100nm, and an optical filter is arranged between the photodiode 8 and the dichroic mirror 2 to attenuate the optical signal intensity of the plasma to be within the working light intensity range of the photodiode 8, and simultaneously filter nanosecond pulse laser which may exist, so as to protect the photodiode 8; setting the voltage of a direct current power supply 9 to be 5V, setting the resistance value of a sampling resistor 10 to be 50 omega, setting the error to be 0.01 percent, connecting the anode of the direct current power supply 9 with the output cathode of a photodiode 8, connecting the output anode of the photodiode 8 with one end of the sampling resistor 10, and connecting the other end of the sampling resistor 10 with the cathode of the direct current power supply 9 to form a sampling circuit; when the photodiode 8 collects the plasma optical signal, a weak current signal is generated, and the sampling circuit converts the weak current signal of the photodiode 8 into a voltage signal of a sampling resistor 10; adopting an oscilloscope with the bandwidth of 3.5GHz and the sampling rate of 40G/s as a high-speed signal acquisition board 11 to acquire a voltage signal of a sampling resistor 10; the collected voltage signal is output to the STM32 controller 12, the controller 12 determines the signal peak value of the voltage signal according to the collected voltage signal, and selects the voltage signal peak value time shown in fig. 2 as the starting point of the voltage signal; the voltage signal intensity shown in FIG. 2 is selected as peak value 1/e based on the principle of determining the boundary with Gaussian pulse laser 2 The time of the multiplication is taken as the end point of the voltage signal, and the voltage signal integral of the voltage signal between the time of the start point and the time of the end point is calculated and taken as the characteristic parameter of the voltage signal. Referring to fig. 3, curve fitting is performed on the voltage signal characteristic parameters obtained under each air pressure and the air pressure, and the obtained relation curve is as follows: y 34119.43287 x -0.20531 Wherein y represents a voltage signal characteristic parameter, and x represents air pressure; in this example, the vacuum degree test was performed on a vacuum bulb having a vacuum degree of 1Pa, 0.1Pa, 0.01Pa, 0.001Pa, and the results were as follows: 0.9355Pa, 0.0858Pa, 0.0131Pa and 0.0006217Pa, and the errors are respectively: -6.45%, -14.2%, 31.15%, 37.83%.
In another embodiment, the present disclosure also provides an apparatus for vacuum switch vacuum level detection, comprising:
the device comprises a nanosecond pulse laser 1, a dichroic mirror 2 and a plano-convex lens 3, wherein the nanosecond pulse laser 1, the dichroic mirror 2 and the plano-convex lens 3 are positioned in the same optical path;
the photodiode 8, there is a rate light slice 7 between dichroic mirror 2 and the said photodiode 8;
a direct current power supply 9, wherein the positive electrode of the direct current power supply 9 is connected with the output negative electrode of the photodiode 8, the output positive electrode of the photodiode 8 is connected with one end of a sampling resistor 10, and the other end of the sampling resistor 10 is connected with the negative electrode of the direct current power supply 9 to form a sampling circuit;
high-speed signal gathers board 11, the output of sampling circuit is connected to high-speed signal gathers board 11's input, the input of controller 12 is connected to high-speed signal gathers board 11's output, the output of controller 12 is connected nanosecond pulse laser 1's input.
In the embodiment, the controller 12 controls the nanosecond pulse laser 1 to output nanosecond pulse laser to align to the vacuum switch shielding case 5, and simultaneously triggers the high-speed signal acquisition board 11 to start to acquire signals; a plano-convex lens 3 is arranged between the nanosecond pulse laser 1 and a quartz glass window 4 of a vacuum switch 6, so that focused light spots of the nanosecond pulse laser on a shielding case 5 of the vacuum switch are minimum, and laser plasma is induced; a dichroic mirror 2 is arranged between the nanosecond pulse laser 1 and the plano-convex lens 3, and laser plasma optical signals are separated from a nanosecond pulse laser optical path; the optical filter 7 attenuates the plasma optical signal to the working light intensity range of the photodiode 8, and the photodiode 8 collects the plasma optical signal and converts the optical signal into a current signal; the sampling circuit converts the current signal into a voltage signal of the sampling resistor 10; the high-speed signal acquisition board 11 acquires a voltage signal of the sampling resistor 10 and outputs the voltage signal to the controller 12; the controller 12 determines the peak value of the voltage signal according to the collected voltage signal, selects the peak moment of the voltage signal as the starting point of the voltage signal, selects the moment of 0.1353 times of the intensity value of the voltage signal as the end point of the voltage signal, and calculates the voltage signal integral between the starting point and the end point moment of the voltage signal, wherein the voltage signal integral is the characteristic parameter of the voltage signal; and obtaining the vacuum degree of the vacuum switch to be tested according to the relationship between the voltage signal characteristic quantity and the vacuum degree obtained in advance.

Claims (8)

1. An apparatus for vacuum switch vacuum detection, comprising:
the plasma excitation module is used for exciting the vacuum switch to be tested so as to generate a plasma signal;
the first signal conversion module is used for converting the plasma signal into a current signal;
the second signal conversion module is used for converting the current signal into a voltage signal;
and the detection module is used for extracting the characteristic parameters of the voltage signal and obtaining the vacuum degree of the vacuum switch to be detected according to the characteristic parameters of the voltage signal.
2. The apparatus of claim 1, wherein preferably, the first signal conversion module comprises a signal attenuation unit and a first signal conversion unit, and the signal attenuation unit is used for attenuating the plasma signal to an operating intensity range of the first signal conversion unit.
3. The apparatus of claim 2, wherein the second signal conversion module comprises a power supply and a second signal conversion unit, and the second signal conversion unit forms a loop with the signal attenuation unit and the first signal conversion unit.
4. The apparatus of claim 1, wherein the detection module comprises:
the extraction unit is used for extracting the characteristic parameters of the voltage signals;
and the detection unit is used for obtaining the vacuum degree of the vacuum switch to be detected according to the characteristic parameters of the voltage signal.
5. The device of claim 4, wherein the detection unit obtains the vacuum degree of the vacuum switch to be tested by substituting the characteristic parameters of the voltage signal into a vacuum degree detection model.
6. The device of claim 5, wherein the vacuum degree detection model is formed by fitting characteristic parameters of voltage signals obtained by the vacuum switch under different vacuum degrees with the vacuum degrees.
7. The apparatus of claim 1, wherein the plasma excitation module comprises a nanosecond pulsed laser, a dichroic mirror, and a plano-convex lens in the same optical path.
8. A method for detecting the vacuum degree of a vacuum switch comprises the following steps:
s100: exciting a vacuum switch to be tested to generate a plasma signal;
s200: collecting a plasma signal and converting the plasma signal into a current signal;
s300: converting the current signal into a voltage signal;
s400: and extracting characteristic parameters of the voltage signal and obtaining the vacuum degree of the vacuum switch to be detected according to the vacuum degree detection model.
CN202111680934.0A 2021-12-31 2021-12-31 Device and method for detecting vacuum degree of vacuum switch Pending CN114942100A (en)

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