CN114890075B - Walking state monitoring device and method for air transportation trolley - Google Patents
Walking state monitoring device and method for air transportation trolley Download PDFInfo
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention provides a walking state monitoring device and method of an air transportation trolley, which are applied to the technical field of semiconductor wafer transmission control. Wherein, the walking state monitoring devices of air transportation dolly includes: the sensor module is arranged above the traveling substrate and is used for acquiring the motion information of the air transportation trolley in real time in the operation process of the air transportation trolley and acquiring the traveling state information of the air transportation trolley according to the motion information; the judging module is used for judging the abnormal condition of the running track according to the running state information and a preset strategy, wherein the preset strategy comprises a corresponding relation between the running state information and the abnormal condition of the running track; the reminding module is used for sending corresponding reminding information according to the abnormal condition of the running track. The sensor module is additionally arranged to acquire the motion information of the air transportation trolley, so that the running state of the air transportation trolley can be automatically monitored, and the problem that the transportation safety of the wafer box is influenced due to abnormal running track is avoided.
Description
Technical Field
The specification relates to the technical field of semiconductor wafer transmission control, in particular to a walking state monitoring device and method of an air transportation trolley.
Background
The automation degree of the semiconductor integrated circuit manufacturing factory is high, wherein the wafer cassettes are required to be transported and positioned on the production line according to actual requirements. Currently, transport of the wafer cassette is typically accomplished using an air transport cart such that the wafer cassette is accurately and safely transported to a designated location.
However, in the process of transporting the wafer box by the air transportation trolley, no scheme for automatically monitoring the working state of the running rail is provided, and manual visual inspection is generally required. The long-term use of the running rail can cause the problems of deformation and the like of different degrees on the running rail, especially the formation of the break difference or the abrasion, and the air transportation trolley is easy to cause the unstable running, thereby influencing the safety in the transportation process of the wafer box.
Based on the above, the present application provides a technical solution to the above technical problems.
Disclosure of Invention
In view of this, this description embodiment provides a walking state monitoring devices of air transportation dolly, can monitor the walking state information of air transportation dolly in the motion in real time, and through the monitoring to walking state information, in time discover whether there is the abnormal condition in the orbit, improve the security of wafer box in the transportation.
The embodiment of the specification provides the following technical scheme:
The embodiment of the specification provides a walking state monitoring device of air transportation dolly, is applied to in the semiconductor wafer conveying system, and the walking state monitoring device of air transportation dolly includes: the device comprises a sensor module, a judging module and a reminding module;
The sensor module is arranged above the traveling substrate and is used for acquiring the motion information of the air transportation trolley in real time in the operation process of the air transportation trolley and acquiring the traveling state information of the air transportation trolley according to the motion information;
the judging module is used for judging the abnormal condition of the running track according to the running state information and a preset strategy, wherein the preset strategy comprises a corresponding relation between the running state information and the abnormal condition of the running track;
The reminding module is used for sending corresponding reminding information according to the abnormal condition of the running track.
The embodiment of the specification also provides a walking state monitoring method of the air transportation trolley, which comprises the following steps:
Acquiring the motion information of the air transportation trolley in real time, and acquiring the walking state information of the air transportation trolley according to the motion information;
Judging the abnormal condition of the running track according to the running state information and a preset strategy, wherein the preset strategy comprises a corresponding relation between the running state information and the abnormal condition of the running track;
And sending out corresponding reminding information according to the abnormal condition of the running track.
Compared with the prior art, the beneficial effects that above-mentioned at least one technical scheme that this description embodiment adopted can reach include at least:
By newly adding the sensor module, the motion information of the air transportation trolley in the running process can be obtained in real time, so that the running state information of the air transportation trolley is automatically monitored, the monitoring efficiency of the running state information of the air transportation trolley can be improved, the adverse effect on the running state of the air transportation trolley due to the abnormal factors of the running track and the like is avoided, and the transportation safety of the wafer box is ensured.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a walking state monitoring device of an air transportation trolley according to an embodiment of the present disclosure;
Fig. 2 is a diagram showing a comparison between a normal state and an abnormal state of a track guide surface of a walking state monitoring device of an air transportation trolley according to an embodiment of the present disclosure;
fig. 3 is a diagram showing a comparison between a normal state and an abnormal state of a track running surface of a running state monitoring device of an air transportation trolley according to an embodiment of the present disclosure;
fig. 4 is a schematic view of track wear of a walking state monitoring device of an air transportation trolley according to an embodiment of the present disclosure;
Fig. 5 is a flowchart of a method for monitoring a traveling state of an air transportation cart according to an embodiment of the present disclosure.
Detailed Description
Embodiments of the present application will be described in detail below with reference to the accompanying drawings.
Other advantages and effects of the present application will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present application with reference to specific examples. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. The application may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present application. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present disclosure, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, apparatus may be implemented and/or methods practiced using any number and aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should also be noted that the illustrations provided in the following embodiments merely illustrate the basic concept of the present application by way of illustration, and only the components related to the present application are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided in order to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.
Due to the practicality and the transportation accuracy of the air transportation trolley, the air transportation trolley is widely applied to the transportation process of the wafer box, but no device and no method for monitoring the walking state information of the air transportation trolley exist, so that when the running rail is abnormal due to long-term use, the running rail cannot be found in time, the air transportation trolley is easy to walk unstably in the process of transporting the wafer box, and the safety of the wafer box is affected.
In view of this, this description embodiment provides a walking state monitoring devices of air transportation dolly, can carry out automated monitoring according to the real-time motion information of air transportation dolly, and when monitoring that the walking state of air transportation dolly has unusually, send the warning information to the stability of protection air transportation dolly operation, when guaranteeing the accurate transportation of wafer box, further improves the security in the wafer box transportation.
The following describes the technical solutions provided by the embodiments of the present application with reference to fig. 1 to 5.
Example 1
The embodiment of the specification provides a walking state monitoring device of air transportation trolley, includes: the device comprises a sensor module, a judging module and a reminding module;
The sensor module 1 is arranged above the travelling base plate 2 and is used for acquiring the movement information of the air transportation trolley in real time in the running process of the air transportation trolley and acquiring the travelling state information of the air transportation trolley according to the movement information;
the judging module is used for judging the abnormal condition of the running track 3 according to the running state information and a preset strategy, wherein the preset strategy comprises a corresponding relation between the running state information and the abnormal condition of the running track 3;
the reminding module is used for sending corresponding reminding information according to the abnormal condition of the running track 3.
In implementation, as shown in fig. 1, the sensor module 1 is arranged at the upper position of the traveling substrate 2, and when the air transportation trolley runs along the running track 3, the sensor module 1 can acquire the motion information of the air transportation trolley in real time, so that the traveling state information of the air transportation trolley can be timely and accurately acquired, the automatic monitoring of the air transportation trolley is realized, the monitoring efficiency is improved, and the cost of manual monitoring is reduced.
In the implementation, the judging module judges the abnormal condition of the running rail 3 according to the movement information of the air transportation trolley. Specifically, the judging module acquires the traveling state information of the air transportation trolley output by the sensor module 1, compares the traveling state information with a preset strategy, and judges whether the running track 3 is abnormal or not.
The sensor module 1 is a device that can obtain information about the operation of the air transportation cart, and therefore, the installation manner, the number of installation, etc. of the sensor module 1 can be determined according to actual requirements, and is not limited herein.
In implementation, the reminding module is used for sending corresponding reminding information according to the abnormal condition of the running track 3. According to actual requirements, the reminding information can be set to comprise any one of the following reminding information: the voice reminder, the animation reminder, the text reminder, and the icon reminder are not limited herein.
In some embodiments, the determination module includes the following policies:
The judging module sets a first threshold value, a second threshold value and a third threshold value;
Determining a first relation between the walking state information and a first threshold value, and determining that the running track 3 has a guide surface break when the first relation meets a first preset condition, wherein the first preset condition is used for representing the condition that the running track 3 has the guide surface break;
determining a second relation between the walking state information and a second threshold value, and determining that the walking surface of the running track 3 is broken and poor when the second relation meets a second preset condition, wherein the second preset condition is used for representing the condition that the walking surface of the running track 3 is broken and poor;
Determining a third relation between the walking state information and a third threshold value, and determining that the running track 3 is worn when the third relation meets a third preset condition, wherein the third preset condition is used for representing the condition that the running track 3 is worn;
The first threshold value, the second threshold value and the third threshold value are different threshold values.
In practice, the abnormal conditions of the running rail 3 include: guide surface break, walking surface break and wear. As shown in fig. 2, the left side is a schematic diagram of the normal condition of the guide surface of the running rail 3, and the right side is a schematic diagram of the abnormal condition of the guide surface of the running rail 3, so that the situation that the air transportation trolley has a break difference in an abnormal state can be obviously seen, and the air transportation trolley can shake due to the break difference of the guide surface when passing over the air transportation trolley; as shown in fig. 3, the left side is a schematic diagram of the running surface of the running rail 3 in normal condition, and the right side is a schematic diagram of the abnormal condition of the running surface of the running rail 3, so that the situation that a break difference exists in an abnormal state can be obviously seen, and the air transportation trolley can shake due to uneven gradient when passing over the break difference; as shown in fig. 4, when the running rail 3 is worn, the hollow of the air transportation cart may cause rattle when passing over the worn portion.
In implementation, the judgment module sets a first threshold, a second threshold and a third threshold according to different abnormal conditions of the running track 3. The judging module compares the received traveling state information of the air transportation trolley with a preset strategy and determines the type of abnormal condition of the running track 3.
It should be noted that, the first threshold may be set according to a specific application condition, for example, the first preset condition is set to a range, and the range may be used to express a numerical range corresponding to a difference between the traveling state information of the air transportation trolley and the first threshold when the guiding surface of the running track 3 is broken, so the present disclosure is not limited specifically.
It should be noted that, the second threshold may be set according to a specific application condition, for example, the second preset condition is set to a range, and the range may be used to express a numerical range corresponding to a difference between the traveling state information of the air transportation trolley and the second threshold when the traveling surface deviation exists in the traveling track 3, which is not specifically limited herein.
It should be noted that, the third threshold may be set according to a specific application condition, for example, the third preset condition is set to a range, and the range may be used to express a numerical range corresponding to a difference between the traveling state information of the air transportation trolley and the third threshold when the running track 3 is worn, which is not specifically limited herein.
In implementation, according to different abnormal conditions of the running track 3, the reminding module sends out different types of reminding information so as to quickly locate the abnormal condition of the running track 3 and simultaneously locate the abnormal condition of the running track 3.
In the implementation, through the walking state information of the air transportation trolley in the operation process, the walking state information of the air transportation trolley can be automatically monitored, whether the abnormal condition exists in the operation track 3 or not can be timely judged, the type of the abnormal condition of the operation track 3 can be rapidly positioned, and the monitoring efficiency is greatly improved.
In some embodiments, the sensor module 1 comprises a gyroscopic sensor and the movement information of the air transport cart comprises: angular velocity information of the air transport trolley during operation.
In some embodiments, the sensor module 1 comprises at least one gyroscopic sensor.
In the implementation, the gyroscope sensor acquires angular velocity information of the air transportation trolley in the running process, and the walking state information of the air transportation trolley is calculated according to the angular velocity information. By using the gyroscope sensor, the acquired motion information is less influenced by external factors, the measurement precision is higher, and the information is accurate. Meanwhile, the gyroscope sensor is economical and practical in price and high in cost performance.
The gyro sensor is a device capable of acquiring the movement state of the air transportation vehicle, and therefore, the installation manner and the number of the gyro sensors can be set according to actual requirements, and are not limited herein.
In some embodiments, the sensor module 1 comprises a vibration sensor and the movement information of the air transport cart comprises: vibration parameters of the air transport trolley.
In some embodiments, the sensor module 1 comprises at least one vibration sensor.
In some embodiments, the vibration sensor comprises any one of the following sensors: displacement sensor, speed sensor, acceleration sensor.
In the implementation, the vibration sensor obtains the motion information of the air transportation trolley through the direct distance change between the end part of the sensor and the air transportation trolley, and calculates the walking state information of the air transportation trolley. The vibration sensor is simple to install and has high adaptability, so that the vibration sensor is suitable for the environmental conditions of most machines.
The vibration sensor is a device capable of acquiring the movement state of the air transportation trolley, and therefore, the installation mode and the number of the vibration sensors can be set according to actual requirements, and the vibration sensor is not limited herein.
Example two
The embodiment of the specification also provides a walking state monitoring method of the air transportation trolley, which is characterized by comprising the following steps of:
Acquiring the motion information of the air transportation trolley in real time, and acquiring the walking state information of the air transportation trolley according to the motion information;
Judging the abnormal condition of the running track 3 according to the running state information and a preset strategy, wherein the preset strategy comprises a corresponding relation between the running state information and the abnormal condition of the running track 3;
and sending out corresponding reminding information according to the abnormal condition of the running track 3.
In implementation, as shown in fig. 5, in the process that the air transportation trolley runs along the running track 3, the movement information of the air transportation trolley is acquired in real time, so that the running state information of the air transportation trolley is timely and accurately acquired. And judging whether the running track 3 is abnormal or not according to the comparison of the running state information of the air transportation trolley and a preset strategy.
In practice, according to actual application requirements, the reminding information can be set to include any one or more of the following reminding information: voice reminding information, animation reminding information, text reminding information and icon reminding information.
In some embodiments, the method for monitoring the walking state of the air transportation trolley further comprises: acquiring a first threshold value, a second threshold value and a third threshold value;
Determining a first relation between the walking state information and a first threshold value, and determining that the running track 3 has a guide surface break when the first relation meets a first preset condition, wherein the first preset condition is used for representing the condition that the running track 3 has the guide surface break;
determining a second relation between the walking state information and a second threshold value, and determining that the walking surface of the running track 3 is broken and poor when the second relation meets a second preset condition, wherein the second preset condition is used for representing the condition that the walking surface of the running track 3 is broken and poor;
Determining a third relation between the walking state information and a third threshold value, and determining that the running track 3 is worn when the third relation meets a third preset condition, wherein the third preset condition is used for representing the condition that the running track 3 is worn;
The first threshold value, the second threshold value and the third threshold value are different threshold values.
In some implementations, the motion information includes: angular velocity information of the air transport trolley during operation.
In some implementations, the motion information includes: vibration parameters of the air transport trolley.
In practice, the abnormal conditions of the running rail 3 include: guide surface break, walking surface break and wear. When the running rail 3 is abnormal, the influence on the running of the air transportation cart is different depending on the position of the abnormal situation. Specifically, three different thresholds of the first threshold, the second threshold, and the third threshold are set according to different abnormal conditions of the running rail 3. The type of the abnormal condition of the running track 3 is determined by comparing the running state information of the air transportation trolley with a preset strategy.
In implementation, according to different abnormal types of the running track 3, the control unit sends out different types of reminding information so that the abnormal condition of the running track 3 can be timely positioned when the running track 3 is positioned to be abnormal, and the monitoring efficiency of safety transportation of the air transportation trolley is greatly improved.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment focuses on differences from other embodiments. In particular, for the method embodiments described later, since they correspond to the system, the description is relatively simple, and reference should be made to the description of some of the system embodiments.
The foregoing is merely illustrative of the present application, and the present application is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present application should be included in the present application. Therefore, the protection scope of the application is subject to the protection scope of the claims.
Claims (7)
1. The utility model provides a walking track monitoring devices of air transportation dolly, is applied to in the semiconductor wafer conveying system, its characterized in that, the walking track monitoring devices of air transportation dolly includes: the device comprises a sensor module, a judging module and a reminding module;
The sensor module is arranged above a traveling substrate of the air transportation trolley and is used for acquiring the motion information of the air transportation trolley in real time in the operation process of the air transportation trolley and acquiring the traveling state information of the air transportation trolley according to the motion information;
The judging module is used for judging the abnormal condition of the running track according to the running state information and a preset strategy, wherein the preset strategy comprises a corresponding relation between the running state information and the abnormal condition of the running track;
the judging module comprises the following strategies:
the judging module sets a first threshold value, a second threshold value and a third threshold value;
Determining a first relation between the walking state information and the first threshold value, and determining that the running track has a guide surface break when the first relation meets a first preset condition, wherein the first preset condition is used for representing the condition that the running track has the guide surface break;
determining a second relation between the walking state information and the second threshold value, and determining that the walking surface of the running track is broken when the second relation meets a second preset condition, wherein the second preset condition is used for representing the condition that the walking surface of the running track is broken;
Determining a third relation between the walking state information and the third threshold value, and determining that the running track is worn when the third relation meets a third preset condition, wherein the third preset condition is used for representing the condition that the running track is worn;
wherein the first threshold, the second threshold and the third threshold are different thresholds;
the motion information includes: angular velocity information of the air transport trolley in the running process; and/or, the motion information includes: vibration parameters of the air transportation trolley;
the reminding module is used for sending corresponding reminding information according to the abnormal condition of the running track, wherein the reminding information comprises the abnormality of the running track and the type corresponding to the abnormality.
2. The overhead transport trolley travel track monitoring device of claim 1, wherein the sensor module includes a gyroscopic sensor, the motion information of the overhead transport trolley including: angular velocity information of the air transport trolley in the running process.
3. The overhead transport trolley travel track monitoring device of claim 2 wherein the sensor module includes at least one gyroscopic sensor.
4. The overhead transport trolley travel track monitoring device of claim 1, wherein the sensor module includes a vibration sensor, the movement information of the overhead transport trolley including: and the vibration parameter of the air transportation trolley.
5. The overhead transport trolley travel track monitoring device of claim 4 wherein the sensor module includes at least one vibration sensor.
6. The air transportation cart travel track monitoring device of claim 4, wherein the vibration sensor comprises any one of the following sensors: displacement sensor, speed sensor, acceleration sensor.
7. A method for monitoring a traveling track of an air transportation trolley, characterized in that the traveling track monitoring device of the air transportation trolley according to any one of claims 1 to 6 is applied, and the traveling state monitoring method of the air transportation trolley comprises:
acquiring the motion information of the air transportation trolley in real time, and acquiring the walking state information of the air transportation trolley according to the motion information;
judging the abnormal condition of the running track according to the running state information and a preset strategy, wherein the preset strategy comprises a corresponding relation between the running state information and the abnormal condition of the running track;
the motion information includes: angular velocity information of the air transport trolley in the running process; and/or, the motion information includes: vibration parameters of the air transportation trolley;
and sending out corresponding reminding information according to the abnormal condition of the running track, wherein the reminding information comprises the abnormal condition of the running track and the type corresponding to the abnormal condition.
Priority Applications (1)
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CN202210469065.5A CN114890075B (en) | 2022-04-29 | 2022-04-29 | Walking state monitoring device and method for air transportation trolley |
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CN202210469065.5A CN114890075B (en) | 2022-04-29 | 2022-04-29 | Walking state monitoring device and method for air transportation trolley |
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CN114890075A CN114890075A (en) | 2022-08-12 |
CN114890075B true CN114890075B (en) | 2024-06-25 |
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