CN114885511A - Automatic pressing plate mechanism of direct-writing type photoetching machine and control method thereof - Google Patents
Automatic pressing plate mechanism of direct-writing type photoetching machine and control method thereof Download PDFInfo
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- 238000003825 pressing Methods 0.000 title claims abstract description 149
- 230000007246 mechanism Effects 0.000 title claims abstract description 102
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000001259 photo etching Methods 0.000 title claims abstract description 21
- 238000001459 lithography Methods 0.000 claims description 17
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 230000000630 rising effect Effects 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 238000003384 imaging method Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
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- 230000003287 optical effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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Abstract
The invention relates to an automatic pressing plate mechanism of a direct-writing type photoetching machine, which comprises a workbench, an X-axis pressing plate, an X-axis driving mechanism for driving the X-axis pressing plate, a Y-axis driving mechanism for driving the Y-axis pressing plate and a pressing mechanism, wherein the X-axis pressing plate is arranged at the output end of the X-axis driving mechanism, and the Y-axis pressing plate is arranged at the output end of the Y-axis driving mechanism; the pressing mechanism comprises an X-axis pressing piece, a Y-axis pressing piece and an XY-axis edge pressing piece; the control unit is used for carrying out instruction operation on the pressing mechanism; the upper computer unit is connected with the control unit. The automatic pressing plate mechanism is high in automation degree and good in pressing effect, and can ensure that the PCB is in the levelness. A control method of an automatic pressing plate mechanism of a direct-writing photoetching machine is used for controlling the automatic pressing plate mechanism and can also ensure the automation and the high efficiency of the automatic pressing plate mechanism.
Description
Technical Field
The invention relates to the technical field of photoetching machines, in particular to an automatic pressing plate mechanism of a direct-writing photoetching machine and a control method thereof.
Background
The laser direct imaging technology is abbreviated as ldi (laser direct image), and is a technology that uses a workstation to output image data and performs image formation on a printed circuit board coated with photoresist through imaging devices such as a laser, a digital micromirror device, an optical path and the like.
Direct write lithography is a direct image transfer technique that has been developed in recent years. When the direct-write lithography equipment in the present stage exposes a Printed Circuit Board (PCB), a laser direct imaging technology is generally used to image the PCB placed on a platform.
The invention discloses a sucking disc pressing plate device of a direct-writing photoetching machine and a control method thereof, wherein a PCB (printed circuit board) needs to move along with the movement of a table top, in order to fix the PCB on a workbench, the invention is published in the Chinese patent with the application number of 2020109694827, and the sucking disc pressing plate device comprises a workbench, a sucking disc, a motor, a screw rod, a moving cylinder, a pressing bar and a point pressing cylinder. The PCB is directly placed on the table board, particularly the phenomenon of edge warping happens occasionally when the thicker circuit board is used, and if only the adsorption mode is used, the levelness is not smooth, so that the imaging requirement of a photoetching machine is not met, and the defective rate is higher.
In the prior art, in order to improve the yield of products, some PCB circuit board manufacturers adopt a manual pressing plate mechanism, so that the yield of the products is improved, but when a new product is replaced each time, the pressing plate mechanism needs to be manually adjusted, and the test is also carried out, so that the circuit board is prevented from being pressed to a position needing exposure, or pressed to a vacancy, and errors are easy to generate. The mode is time-consuming and tedious, the workload of field workers is increased, and meanwhile, the production efficiency is low, so that the popularization and the application of the manual pressing plate mechanism in the market are not facilitated.
Disclosure of Invention
In order to overcome the defects in the prior art, a first object of the present invention is to provide an automatic platen mechanism of a direct-writing type lithography machine, which has high automation degree and good pressing effect, can ensure that a PCB is within a horizontal degree to meet the imaging requirements of the lithography machine, further ensure a good product yield and improve production efficiency, and is beneficial to popularization and application of the automatic platen mechanism in the technical field of lithography machines. The second purpose of the present invention is to provide a control method for an automatic platen mechanism of a direct-write lithography machine, which is used for controlling the automatic platen mechanism, so as to ensure automation and high efficiency of the automatic platen mechanism and enhance the user experience.
The automatic pressing plate mechanism of the direct-writing type photoetching machine and the control method of the automatic pressing plate mechanism of the direct-writing type photoetching machine are technically related to each other, and belong to the same invention concept.
In order to achieve the first object, the invention adopts the following technical scheme: an automatic pressing plate mechanism of a direct-writing type photoetching machine comprises a workbench, an X-axis pressing plate, an X-axis driving mechanism for driving the X-axis pressing plate, a Y-axis driving mechanism for driving the Y-axis pressing plate and a pressing mechanism, wherein the X-axis pressing plate is installed at the output end of the X-axis driving mechanism, and the Y-axis pressing plate is installed at the output end of the Y-axis driving mechanism; the pressing mechanism comprises an X-axis pressing piece, a Y-axis pressing piece and an XY-axis edge pressing piece; the X-axis servo driving unit carries out positioning driving on the X-axis driving mechanism according to an instruction provided by the control unit, the Y-axis servo driving unit carries out positioning driving on the Y-axis driving mechanism according to the instruction provided by the control unit, and the control unit carries out instruction operation on the pressing mechanism; the upper computer unit is connected with the control unit.
As a preferable aspect of the present invention, the X-axis driving mechanism and the Y-axis driving mechanism are magnetic axis linear motors.
As a preferable scheme of the present invention, the X-axis pressing member, the Y-axis pressing member, and the XY-axis edge pressing member are all cylinders.
As a preferable scheme of the present invention, the mobile terminal further includes a touch screen, and the touch screen and the control unit establish communication connection therebetween.
In order to achieve the second object, the invention adopts the following technical scheme: a control method of an automatic pressing plate mechanism of a direct-writing photoetching machine is used for controlling the automatic pressing plate mechanism of the direct-writing photoetching machine; the method comprises the following steps:
s1, after the control unit is powered on, in 30S, the pressing mechanisms are all reset to be in a rising release state;
s2, the X-axis servo drive unit and the Y-axis servo drive unit receive a zero return signal of the control unit; the X-axis servo driving unit drives the X-axis driving mechanism to the X-axis servo origin, and the Y-axis servo driving unit drives the Y-axis driving mechanism to the Y-axis servo origin;
s3, loading PCB information by the upper computer unit and transmitting the information to the control unit;
s4, if adsorption or exposure is needed, driving the X-axis driving mechanism and the Y-axis driving mechanism through the X-axis servo driving unit according to the PCB information provided by the upper computer unit, and positioning and operating to the edge of the PCB;
s5, after receiving the in-place stop signal, the pressing mechanism performs pressing action;
s6, the control unit provides a pressing plate completion signal for the upper computer unit; if the upper computer unit receives the signal of the control unit, the exposure work is carried out; if the upper computer unit does not receive the signal of the control unit, the upper computer unit gives an alarm and confirms the fault type; if the non-mechanical fault is confirmed, carrying out reset operation;
s7, after exposure is completed, the upper computer unit sends a plate placing signal, the control unit receives the signal of the upper computer unit, and the pressing mechanism is completely lifted and released;
s8, driving the Y-axis driving mechanism by the Y-axis servo driving unit, and driving the X-axis driving mechanism to retreat to a set position by the X-axis servo driving unit;
s9, after finishing the above actions, the control unit sends a pressure plate releasing completion signal to the upper computer unit;
s10, if the upper computer unit stops or quits the operation, the pressing plate mechanism stops working; if the upper computer unit continues the exposure, the operation steps after S4 are looped.
As a preferable mode of the present invention, in S2, the motion signal of the Y-axis servo drive unit resets the Y-axis hold-down before the motion, and the motion signal of the X-axis servo drive unit resets the X-axis hold-down before the motion.
As a preferable aspect of the present invention, the control unit in S5 provides a delay signal to the depressing mechanism.
As a preferred aspect of the present invention, the reset operation in S6 includes, but is not limited to, an initialization operation to reset the X-axis press-down member, the Y-axis press-down member, and the XY-axis edge press-down member of the press-down mechanism to the lift release state.
As a preferable aspect of the present invention, the setting position in S8 may be set according to the length and width values of the PCB circuit board.
As a preferred scheme of the present invention, the length and width position set by the upper computer unit in S8 is the length and width information of the current PCB circuit board plus the set value provided by the upper computer unit or the touch screen.
Compared with the prior art, the invention has the beneficial effects that: according to the automatic pressing plate mechanism of the direct-writing type photoetching machine and the control method thereof, the automatic pressing plate mechanism is ingenious in structure, so that even though a sucking disc occasionally generates a plate tilting phenomenon after adsorbing a circuit board, a PCB can be pressed by the pressing plate mechanism in a multi-edge pressing plate mode, namely an X-axis pressing plate, a Y-axis pressing plate and an XY-axis edge pressing piece, the PCB is guaranteed to be in the levelness, and the imaging requirement of the photoetching machine is met.
Furthermore, the vacuum suction is not required to be additionally increased, even if the PCB is easy to cause poor adsorption capacity due to multiple hole sites, the PCB can be stabilized on the table top of the sucker through the pressing plate mechanism, so that ink on the PCB is prevented from being sucked away to block the suction holes or damage products due to over-strong vacuum suction, and the yield of the products is ensured.
Furthermore, the pressing plate mechanism can be used for carrying out pressing according to the length and the width of the loaded PCB and then automatically positioning the PCB to the maximum edge position of the PCB through the servo motor.
Drawings
FIG. 1 is a functional block diagram of a motor control of an automatic platen mechanism of a direct-write lithography machine according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of an automatic platen mechanism of a direct-write lithography machine according to an embodiment of the present invention;
FIG. 3 is a schematic flow chart of an automatic platen mechanism of a direct-write lithography machine according to an embodiment of the present invention.
Reference numerals: 100. a work table; 110. a Y-axis gantry double-drive motor; 111. an X-axis single drive motor; 121. a Y-axis servo origin; 122. an X-axis servo origin; 131. rotating the edge of the XY axis to press the cylinder downwards; 132. a Y-axis pressing cylinder; 133. an X-axis pressing cylinder; 141. a Y-axis pressing plate; 142. pressing an X-axis plate; 200. a control unit; 201. y-axis servo driving; 202. x-axis servo driving; 203. an upper computer unit; 204. a touch screen.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1 to 3, an automatic platen mechanism of a direct-write lithography machine includes a worktable 100, an X-axis platen 142, an X-axis single-drive motor 111 for driving the X-axis platen 142, a Y-axis platen 141, a Y-axis gantry dual-drive motor 110 for driving the Y-axis platen 141, and a pressing mechanism, wherein the X-axis platen 142 is installed at an output end of the X-axis single-drive motor 111, and the Y-axis platen 141 is installed at an output end of the Y-axis gantry dual-drive motor 110. The pressing mechanism comprises an X-axis pressing cylinder 133, a Y-axis pressing cylinder 132 and an XY-axis edge rotating pressing cylinder 131, the X-axis pressing cylinder 133 and the Y-axis pressing cylinder 132 act simultaneously to press four sides of the PCB, so that the phenomenon that the PCB is warped is prevented, the horizontal flatness of the PCB on the workbench 100 is stabilized, and the yield of products is guaranteed.
In this embodiment, the Y-axis gantry double-drive motor 110 adopts a gantry double-drive control mode, a gantry used by the Y-axis gantry double-drive motor 110 is used as a hardware connecting piece for connecting two servo motors, so as to achieve the purpose of single-device double-drive, and can also be used as a pressing bar of the pressing plate mechanism, i.e., the Y-axis pressing plate 141, the Y-axis gantry double-drive motor 110 ensures that the pressing plate mechanism can adopt a longer pressing bar, and simultaneously, the single-drive device is used for controlling the two servo motors, so that the use cost can be saved. The Y-axis gantry double-drive motor 110 and the X-axis single-drive motor 111 both adopt magnetic axis linear motors, and compared with a lead screw motor and an electric cylinder, the magnetic axis linear motors are more flexible, reliable and noiseless, and the use experience of users can be effectively enhanced. The X-axis single-drive motor 111 is connected to the other pressing bar, i.e. the Y-axis pressing plate 141, to further ensure that the X-axis pressing plate 142 and the Y-axis pressing plate 141 are driven simultaneously. Both the Y-axis servo origin 121 and the X-axis servo origin 122 are designed to rest on the very edge of the table 100 and are fixed to the very top. XY axle edge rotation pushes down cylinder 131, and the cylinder adopts rotatory cylinder that pushes down here, and ordinary cylinder that pushes down is compared to rotatory cylinder that pushes down because of its is small, can reduce the occupation to the space, and simultaneously, its clamping speed is fast, the location is accurate, can effectively guarantee automatic clamp plate mechanism's result of use.
The implementation also comprises a control system for controlling the automatic pressing plate mechanism, wherein the control system comprises a control unit 200, an X-axis servo driving unit 202, a Y-axis servo driving unit 201 and an upper computer unit 203, and the control unit 200 performs command logic operation on the whole control scheme; the X-axis servo driving unit 202 performs positioning driving on the X-axis single-drive motor 111 according to an instruction provided by the control unit 200, the Y-axis servo driving unit 201 performs positioning driving on the Y-axis gantry double-drive motor 110 according to the instruction provided by the control unit 200, the X-axis single-drive motor 111 and the Y-axis gantry double-drive motor 110 perform positioning driving simultaneously, the control unit 200 performs instruction operation on the X-axis pressing cylinder 133, the Y-axis pressing cylinder 132 and the XY-axis edge rotation pressing cylinder 131 simultaneously, and meanwhile, the control unit 200 and the upper computer unit 203 perform simple operation and display so that an operator can observe the operation conveniently. Further, in order to facilitate the operator to manually modify and monitor the basic parameters of the entire control system, a touch screen 204 is provided, and the touch screen 204 is in communication connection with the control unit 200.
As shown in fig. 3, it is a flowchart of the operation of the platen mechanism in this embodiment: after power-on initialization, the air cylinders are in a release state, and in a rising state of the air cylinders, the X-axis single-drive motor 111 and the Y-axis gantry double-drive motor 110 both move to the maximum board placing position, namely the Home point. The control unit 200 obtains the dimension information of the PCB circuit board through a distance measuring tool such as a laser distance measuring instrument and loads the information, when the control unit 200 gives an adsorption or start signal, the X-axis single-drive motor 111 and the Y-axis gantry double-drive motor 110 move to the XY edge position of the PCB circuit board, the X-axis pressing cylinder 133, the Y-axis pressing cylinder 132 and the XY-axis edge rotation pressing cylinder 131 simultaneously perform a pressing action, and after the pressing operation is completed, a completion instruction is sent to the control unit 200. The control unit 200 exposes the PCB circuit board. After the exposure of the PCB is completed or the adsorption is closed, the X-axis down-pressing cylinder 133, the Y-axis down-pressing cylinder 132, and the XY-axis edge rotation down-pressing cylinder 131 are released and lifted at the same time, the X-axis single-drive motor 111 and the Y-axis gantry double-drive motor 110 are moved back to the standby position, and a board placing completion instruction is sent to the control unit 200. If a fault occurs during the above operation, the control unit 200 gives an alarm by means of light, sound, or combination of light and sound to remind the operator to deal with the fault. After the reset is confirmed, the servo motor can reset and return to the original point, namely the maximum position where the PCB can be placed on the PCB.
A control method of an automatic pressing plate mechanism of a direct-writing photoetching machine comprises the following steps:
s1, after the console is powered on, the control unit 200 defaults to 30S after being powered on, and all cylinders are reset to be in a rising release state;
s2, the Y-axis servo driving unit 201 and the X-axis servo driving unit 202 receive a zero return signal of the control unit 200, the Y-axis servo driving unit 201 drives the Y-axis gantry double-drive motor 110 to the Y-axis servo origin 121, and the X-axis servo driving unit 202 drives the X-axis single-drive motor 111 to the X-axis servo origin 122, so that the workbench 100 can be used for PCB circuit boards of various specifications; meanwhile, the motion signal of the Y-axis servo driving unit 201 resets the Y-axis down-pressing cylinder 132 before motion, and the X-axis servo driving unit 202 resets the X-axis down-pressing cylinder 133 before motion, so that the Y-axis down-pressing cylinder 132, the X-axis down-pressing cylinder 133 and the XY-axis edge rotation down-pressing cylinder 131 can be prevented from scratching the PCB in the motion process, and the yield of products is ensured;
s3, the upper computer unit 203 loads information such as the size (length and width) of the PCB circuit board, and sends the information to the control unit 200;
s4, if the PCB needs to be adsorbed or exposed, the Y-axis servo driving unit 201 drives the Y-axis gantry double-drive motor 110, the X-axis servo driving unit 202 drives the X-axis single-drive motor 111, and the X-axis pressing plate 142 and the Y-axis pressing plate 141 are positioned and operated at the length and width positions of the PCB provided by the upper computer unit 203;
s5, the XY axis edge rotation pressing air cylinder 131, the Y axis pressing air cylinder 132 and the X axis pressing air cylinder 133, all the air cylinders perform pressing actions after receiving the in-place stop signal, and a delay signal can be provided according to actual conditions to ensure that the PCB is completely pressed.
S6, the control unit 200 provides the upper computer unit 203 with a pressing plate completion signal. The upper computer unit 203 performs operations such as exposure after receiving the signal from the control unit 200. If the upper computer unit 203 does not receive the pressing plate completion signal, the upper computer unit 203 alarms to remind a fault. At this time, if it is confirmed that there is no mechanical failure, a reset operation is required; in the initialization operation, the XY axis edge rotation push-down cylinder 131, the Y axis push-down cylinder 132, and the X axis push-down cylinder 133 are all reset to the up release state. The Y-axis servo driving unit 201 and the X-axis servo driving unit 202 receive the zero-returning signal from the control unit 200, the Y-axis servo driving unit 201 drives the Y-axis gantry dual-drive motor 110 to the Y-axis servo origin 121, and the X-axis servo driving unit 202 drives the X-axis single-drive motor 111 to the X-axis servo origin 122.
S7, when the PCB exposure is completed or the pressing is stopped, the upper computer unit 203 sends a board placing signal, the control unit 200 receives the signal of the upper computer unit 203, the signals of the XY-axis edge rotation pressing cylinder 131, the Y-axis pressing cylinder 132 and the X-axis pressing cylinder 133 are reset to zero, and all the cylinders ascend and are released.
S8, the Y-axis servo driving unit 201 drives the Y-axis gantry dual-drive motor 110, the X-axis servo unit 202 drives the X-axis single-drive motor 111, after the set length and width position received by the upper computer unit 203 is returned, the length and width position can be freely set on the touch screen 204 or set as a set option on the upper computer unit 203, the set length and width are the length and width information of the current PCB circuit board and a set value provided by the upper computer unit 203 or the touch screen 204, and the purpose is that after the servo motor leaves the pressing plate, only the set length and width needs to be returned by default, enough space is available for getting the PCB circuit board, namely, the PCB circuit board does not need to be returned to the position such as the maximum original point, the time and the beat time of servo motion are saved, and the production efficiency is improved.
S9, after the above operation is completed, the control unit 200 sends a pressing plate releasing completion signal to the upper computer unit 203. If the upper computer unit 203 does not receive the signal, the upper computer unit 203 alarms to remind a fault, and at the moment, if the fault is determined to be a non-mechanical fault, the reset operation is required. If the operation is initialized, namely all default cylinders are reset to be in the ascending release state; the Y-axis servo driving unit 201 and the X-axis servo driving unit 202 receive the zero-returning signal from the control unit 200; the Y-axis servo driving unit 201 drives the Y-axis gantry dual-drive motor 110 to the Y-axis servo origin 121, and the X-axis servo driving unit 202 drives the X-axis single-drive motor 111 to the X-axis servo origin 122.
S10, if the upper computer unit 203 stops or quits the operation, the platen mechanism will stop working. If the upper computer 203 continues the exposure, the operation after S4 is looped.
The control flow of the single table top is described above, and the flow of the double table top and the single table top is the same. The control method is also suitable for the double-table-board.
In the embodiment, the automatic pressing plate mechanism is ingenious in structure, so that even if the sucking disc accidentally tilts after adsorbing a circuit board, the PCB can be pressed by the pressing plate mechanism by means of the multi-edge pressing plates, namely the X-axis pressing plate 142, the Y-axis pressing plate 141 and the XY-axis edge pressing pieces, and the PCB can be guaranteed to be in the levelness and meet the imaging requirement of the photoetching machine.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention; thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Although the reference numerals in the figures are used more here: 100. a work table; 110. a Y-axis gantry double-drive motor; 111. an X-axis single drive motor; 121. a Y-axis servo origin; 122. an X-axis servo origin; 131. rotating the edge of the XY axis to press the cylinder downwards; 132. a Y-axis pressing cylinder; 133. an X-axis pressing cylinder; 141. a Y-axis pressing plate; 142. pressing an X-axis plate; 200. a control unit; 201. y-axis servo driving; 202. x-axis servo driving; 203. an upper computer unit; 204. touch screen, etc., but does not exclude the possibility of using other terms. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed as being without limitation to any additional limitations that may be imposed by the spirit of the present invention.
Claims (10)
1. The utility model provides a direct-write lithography machine's automatic pressure plate mechanism which characterized in that: the X-axis pressing plate is mounted at the output end of the X-axis driving mechanism, and the Y-axis pressing plate is mounted at the output end of the Y-axis driving mechanism; the pressing mechanism comprises an X-axis pressing piece, a Y-axis pressing piece and an XY-axis edge pressing piece; the X-axis servo driving unit carries out positioning driving on the X-axis driving mechanism according to an instruction provided by the control unit, the Y-axis servo driving unit carries out positioning driving on the Y-axis driving mechanism according to the instruction provided by the control unit, and the control unit carries out instruction operation on the pressing mechanism; the upper computer unit is connected with the control unit.
2. The automatic platen mechanism of a direct-write lithography machine according to claim 1, wherein: the X-axis driving mechanism and the Y-axis driving mechanism are magnetic axis linear motors.
3. The automatic platen mechanism of a direct-write lithography machine according to claim 1, wherein: the X-axis pressing piece, the Y-axis pressing piece and the XY-axis edge pressing piece are all cylinders.
4. The automatic platen mechanism of a direct-write lithography machine according to claim 1, wherein: the touch screen is connected with the control unit in a communication mode.
5. A control method of an automatic pressing plate mechanism of a direct-write lithography machine, which is used for controlling the automatic pressing plate mechanism of the direct-write lithography machine as claimed in any one of claims 1 to 4; the method is characterized in that: the method comprises the following steps: s1, after the control unit is powered on, in 30S, the pressing mechanisms are all reset to be in a rising release state; s2, the X-axis servo drive unit and the Y-axis servo drive unit receive a zero return signal of the control unit; the X-axis servo driving unit drives the X-axis driving mechanism to the X-axis servo origin, and the Y-axis servo driving unit drives the Y-axis driving mechanism to the Y-axis servo origin; s3, loading PCB information by the upper computer unit, and transmitting the information to the control unit; s4, if adsorption or exposure is needed, driving the X-axis driving mechanism and the Y-axis driving mechanism through the X-axis servo driving unit according to the PCB information provided by the upper computer unit, and positioning and operating to the edge of the PCB; s5, after receiving the in-place stop signal, the pressing mechanism performs pressing action; s6, the control unit provides a pressing plate completion signal for the upper computer unit; if the upper computer unit receives the signal of the control unit, the exposure work is carried out; if the upper computer unit does not receive the signal of the control unit, the upper computer unit gives an alarm and confirms the fault type; if the non-mechanical fault is confirmed, carrying out reset operation; s7, after exposure is completed, the upper computer unit sends a plate placing signal, the control unit receives the signal of the upper computer unit, and the pressing mechanism is completely lifted and released; s8, driving the Y-axis driving mechanism by the Y-axis servo driving unit, and driving the X-axis driving mechanism to retreat to a set position by the X-axis servo driving unit; s9, after finishing the above actions, the control unit sends a pressure plate releasing completion signal to the upper computer unit; s10, if the upper computer unit stops or quits the operation, the pressing plate mechanism stops working; if the upper computer unit continues the exposure, the operation steps after S4 are looped.
6. The control method of the automatic pressing plate mechanism of the direct-writing type photoetching machine according to claim 5, characterized in that: in S2, the motion signal of the Y-axis servo drive unit resets the Y-axis pressing member before the motion, and the motion signal of the X-axis servo drive unit resets the X-axis pressing member before the motion.
7. The control method of the automatic pressing plate mechanism of the direct-writing type photoetching machine according to claim 5, characterized in that: the control unit in S5 provides a delay signal to the hold down mechanism.
8. The control method of the automatic pressing plate mechanism of the direct-writing type photoetching machine according to claim 5, characterized in that: the reset operation in S6 includes, but is not limited to, an initialization operation to reset the X-axis press-down member, the Y-axis press-down member, and the XY-axis edge press-down member in the press-down mechanism to the lift release state.
9. The control method of the automatic pressing plate mechanism of the direct-writing type photoetching machine according to claim 5, characterized in that: the set position in S8 may be set according to the length and width of the PCB circuit board.
10. The method for controlling an automatic platen mechanism of a direct-write lithography machine according to claim 9, wherein: the set length and width position received by the upper computer unit in the S8 is the length and width information of the current PCB circuit board plus the set value provided by the upper computer unit or the touch screen.
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| CN202210659974.5A CN114885511A (en) | 2022-06-13 | 2022-06-13 | Automatic pressing plate mechanism of direct-writing type photoetching machine and control method thereof |
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| CN113777890A (en) * | 2021-08-18 | 2021-12-10 | 杭州新诺微电子有限公司 | Telescopic pressing plate mechanism, exposure machine with telescopic pressing plate mechanism and pressing plate method of exposure machine |
| CN215729274U (en) * | 2021-08-18 | 2022-02-01 | 杭州新诺微电子有限公司 | Telescopic pressing plate mechanism and exposure machine with same |
| CN215735071U (en) * | 2021-09-28 | 2022-02-01 | 江苏影速集成电路装备股份有限公司 | Plate pressing device |
| CN216351773U (en) * | 2021-09-30 | 2022-04-19 | 源能智创(江苏)半导体有限公司 | Pressure plate device of direct-writing type photoetching machine |
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| CN109856928A (en) * | 2019-04-02 | 2019-06-07 | 合肥芯碁微电子装备有限公司 | A kind of direct-write lithography machine sucker presser device |
| CN112130423A (en) * | 2020-09-15 | 2020-12-25 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine sucker pressing plate device and control method thereof |
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| CN215729274U (en) * | 2021-08-18 | 2022-02-01 | 杭州新诺微电子有限公司 | Telescopic pressing plate mechanism and exposure machine with same |
| CN215735071U (en) * | 2021-09-28 | 2022-02-01 | 江苏影速集成电路装备股份有限公司 | Plate pressing device |
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