CN114833736A - Closed casting mold system and method for manufacturing polishing pads - Google Patents
Closed casting mold system and method for manufacturing polishing pads Download PDFInfo
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- CN114833736A CN114833736A CN202210518821.9A CN202210518821A CN114833736A CN 114833736 A CN114833736 A CN 114833736A CN 202210518821 A CN202210518821 A CN 202210518821A CN 114833736 A CN114833736 A CN 114833736A
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- top cover
- base
- side wall
- temperature
- annular
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/26—Moulds or cores
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/38—Heating or cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/44—Measuring, controlling or regulating
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- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
The invention provides a closed pouring mold system for manufacturing a polishing pad, which comprises a base, an annular side wall, a top cover and a temperature controller, wherein the top cover and the base are arranged at the upper end and the lower end of the annular side wall, so that a closed pouring cavity for manufacturing the polishing pad is formed; the base, the annular side wall and the top cover are all of hollow structures, annular heat conducting grooves are formed in the base, the annular side wall and the top cover, inductance heating wires and temperature measuring devices are arranged in the annular heat conducting grooves, and the inductance heating wires and the temperature measuring devices are electrically connected with the temperature controller; the top cover is also provided with a closable pouring hole and an exhaust hole. Compared with the prior art, the method can control the temperature of each area in the pouring cavity more simply, effectively and accurately, can effectively reduce the problems of stripe defects, uneven density and the like caused by uneven temperature, and can obviously improve the quality of the prepared polishing pad.
Description
Technical Field
The invention relates to the technical field of integrated circuit manufacturing, in particular to a closed pouring mold system and a closed pouring mold method for manufacturing a polishing pad.
Background
Polishing pads are an indispensable polishing consumable in integrated circuit manufacturing, and an important one of them is polyurethane polishing pads. Polyurethane polishing pads are widely used in chemical mechanical polishing processes for integrated circuit manufacturing because of the advantages of customizable hardness, elasticity and compressibility during polishing pad production, and easy availability of required wafer surface removal rates. The polishing pad is mainly formed by mixing polyurethane and a chain extender and then adding a foaming material for pouring. The materials are mixed and then gradually cured and formed under the high-temperature condition. The casting material is good and bad in molding, and the other key point is a casting mold except for material mixing ratio and vulcanization temperature control. The mixed materials are poured into a mould, and the mould is directly sent into equipment with the mixed materials for vulcanization. The design of the mold directly influences the uniformity of temperature control of the material during vulcanization, and if the temperature control is not good, the problems of non-uniform reaction of the molding material, defective stripes or non-uniform density and the like are caused.
The existing polyurethane polishing pad is generally prepared by mixing polyurethane and a chain extender, putting the mixture into an open temperature control mold, putting the mold into a vulcanizing box for heat preservation and vulcanization, and controlling the temperature by heating a medium in the reaction process. This method has the following disadvantages:
1) in the existing method, temperature control areas are only arranged at the bottom and the side wall of the mold, the top cover is not provided with a temperature control device, and the temperature uniformity of the inner area cannot be well guaranteed by the whole mold system. When the mixed material is introduced into the mold in a large amount, the temperature of the bottom and surface of the mixed material is not uniform at the start of the reaction because the bottom material contacts the mold but the upper material does not directly contact the mold and the upper material does not have a temperature control function.
2) The internal temperature control medium of the existing method is flowing liquid, and the heat conduction in the flowing process of the liquid is influenced by the flow speed and the path, so that the temperature difference may exist in the mould, and the temperature is not uniform.
The above-mentioned disadvantages may cause the problems of defective stripes and uneven material density of the material after casting and vulcanization molding.
Disclosure of Invention
In view of the above disadvantages of the prior art, an object of the present invention is to provide a closed casting mold system and a method for manufacturing a polishing pad, which are used to solve the problems in the prior art that when an open temperature control mold is used to manufacture a polishing pad, the mixture contacting the bottom of the mold and being closer to the open portion is heated unevenly, and the temperature is controlled by a flowing heat-conducting medium in the prior art, which is difficult to achieve accurate temperature control, resulting in defective stripes and uneven material density in the material after casting, vulcanizing and molding.
To achieve the above and other related objects, the present invention provides a closed casting mold system for manufacturing a polishing pad, comprising: the top cover and the base are arranged at the upper end and the lower end of the annular side wall, so that a closed pouring cavity for manufacturing the polishing pad is formed together; the base, the annular side wall and the top cover are all of hollow structures, annular heat conducting grooves are formed in the base, the annular side wall and the top cover, inductance heating wires and temperature measuring devices are arranged in the annular heat conducting grooves, and the inductance heating wires and the temperature measuring devices are electrically connected with the temperature controller; the top cover is also provided with a closable pouring hole and an exhaust hole.
Optionally, the exhaust hole is a screw hole, and each exhaust hole is provided with the screw of adaptation.
Optionally, the annular heat conducting grooves in the base, the annular side wall and the top cover are all multiple.
Optionally, the base is a circular base, the annular side wall is a circular side wall, the top cover is a circular top cover, an annular groove is formed in the base, and the annular side wall is fixed in the annular groove.
Optionally, the diameter of the base is 40cm-100cm, the thickness is 1cm-10cm, and the annular groove with the width of 0.1cm-5cm and the depth of 0.1cm-2cm is arranged at a position 0.5cm-5cm away from the edge of the base; the inner diameter of the annular side wall is the same as that of the annular groove of the base, the thickness of the annular side wall is 0.1cm-5cm, and the height of the annular side wall is 10 cm; the diameter of the top cover is 0.5cm-5cm larger than the inner diameter of the annular side wall, the thickness of the top cover is 0.5cm-5cm, the aperture of the exhaust hole is 0.1mm-10mm, and the aperture of the pouring hole is 0.5cm-5 cm.
Optionally, the top cover is equally divided into 8 concentric equal-width regions along the diameter direction, the pouring hole is formed in the center of the top cover, the exhaust holes are distributed in 3 equal-width regions around the pouring hole, 5 equal-width regions located outside the equal-width regions where the exhaust holes are located are 5 heating regions, temperature measurement points are arranged in each heating region, the temperature measurement points of each heating region are located on the same diameter of the top cover, and the temperature measurement points in adjacent heating regions are located on two opposite sides of the center of the top cover.
Optionally, the number of the exhaust holes is 12, the 12 exhaust holes are symmetrically distributed on the top cover, and the top cover is further provided with pouring holes located at the edge of the top cover.
Optionally, the annular side wall is equally divided into 4 equal-height annular heating areas, temperature measuring points are arranged in each heating area, and the temperature measuring points of the heating areas are not in the same longitudinal direction.
Optionally, the base is divided into 8 concentric heating regions with the same width along the diameter direction, temperature measuring points are arranged in each heating region, the temperature measuring points of each heating region are located on the same diameter of the base, and the temperature measuring points in adjacent heating regions are located on two opposite sides of the central temperature measuring point of the base.
The invention also provides a method for manufacturing a polishing pad based on the closed casting mold system of any of the above aspects.
As described above, the closed casting mold system for manufacturing a polishing pad provided by the present invention has the following beneficial effects: according to the improved structural design, the inductance heating wires and the temperature measuring devices are arranged on the base, the side wall and the top cover of the mold, compared with the existing mode that only heating media are arranged on the base and the side wall of the mold for temperature control, the temperature of each area in the pouring cavity can be controlled more simply, effectively and accurately, so that a controllable and uniform temperature environment can be formed in the pouring cavity of the mold when pouring of materials is started, the temperature in the material forming process is ensured to be uniform and stable, meanwhile, gas generated in the vulcanizing process of the mixture can be effectively discharged through the exhaust holes formed in the top cover, bubbles in the formed mixture are reduced, the problems of stripe defects and uneven density caused by uneven temperature can be effectively reduced, and the quality of the prepared polishing pad can be obviously improved.
Drawings
FIG. 1 shows an exemplary top view schematic of a base of a closed casting mold system for producing a polishing pad provided in accordance with the present invention.
FIG. 2 illustrates an exemplary top view of an annular sidewall of a closed casting mold system for producing a polishing pad provided in accordance with the present invention.
Fig. 3 is a schematic cross-sectional view of fig. 2.
FIG. 4 illustrates an exemplary top view of a top cover of a closed casting mold system for polishing pad manufacture provided in accordance with the present invention.
Fig. 5 is a schematic cross-sectional view of fig. 4.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. As in the detailed description of the embodiments of the present invention, the cross-sectional views illustrating the device structures are not partially enlarged in general scale for convenience of illustration, and the schematic views are only examples, which should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
For convenience in description, spatial relational terms such as "below," "beneath," "below," "under," "over," "upper," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that these terms of spatial relationship are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the figures. Further, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present.
In the context of this application, a structure described as having a first feature "on" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed in between the first and second features, such that the first and second features may not be in direct contact.
It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated. In order to keep the drawings as concise as possible, not all features of a single figure may be labeled in their entirety.
Please refer to fig. 1 to 5.
As shown in fig. 1 to 5, the present invention provides a closed casting mold system for manufacturing a polishing pad, comprising: a base 11, an annular side wall 12, a top cover 13 and a temperature controller (not shown), wherein the top cover 13 and the base 11 are arranged at the upper end and the lower end of the annular side wall 12 to close the openings at the upper end and the lower end of the annular side wall 12, so that the base 11, the annular side wall 12 and the top cover 13 together form a closed pouring cavity for manufacturing the polishing pad; the base 11, the annular side wall 12 and the top cover 13 are all of a hollow structure, annular heat conducting grooves (the heat conducting grooves can be considered as a space of the hollow structure) are arranged in the base 11, the annular side wall 12 and the top cover 13, and inductance heating wires (not shown) capable of heating and cooling and a temperature measuring device (not shown) for measuring the temperature of the area where the base is located are arranged in each annular heat conducting groove, so that the inner surfaces of the base 11, the annular side wall 12 and the top cover 13, which are in contact with the pouring material, can be kept as horizontal planes, and the pouring material is ensured to be heated uniformly; the temperature controller is usually located outside the base 11, the annular side wall 12 and the top cover 13, and may even be remotely controlled, and the inductance heating wire and the temperature measuring device are electrically connected to the temperature controller, the temperature controller adjusts the heating temperature of the inductance heating wire according to the temperature measurement result of the temperature measuring device and the process requirement, so as to adjust the temperature of each annular heat conducting groove, thereby achieving the purpose of controlling the temperature in the casting cavity, and the annular heat conducting grooves in the base 11, the annular side wall 12 and the top cover 13 are preferably multiple, for example, more than 3, the multiple annular heat conducting grooves are preferably uniformly and concentrically arranged, the inductance heating wire is arranged in each annular heat conducting groove, the inductance heating wire in each annular heat conducting groove may be an integral body, and is annularly arranged in the corresponding entire annular heat conducting groove, so as to perform temperature regulation and control uniformly, or the inductance of the heating wire of a single annular heat conducting groove may also be multi-section controlled, the induction heating wires in the same annular heat conduction groove are independent and are respectively and independently connected to the temperature controller, and the temperature measuring device is arranged in the area corresponding to each section of the induction heating wire, so that the local part of a single annular heat conduction groove can be controlled according to the requirement, and more accurate temperature control is realized; compared with a liquid heating medium (such as water or heat conducting oil), the inductance heating wire is not influenced by flow velocity and a flow channel, and can realize rapid temperature rise and fall; the top cover 13 is further provided with a closable pouring hole 131 and an exhaust hole 132, the aperture of the pouring hole 131 is usually much larger than that of the exhaust hole 132 (for example, more than 10 times of the aperture of the exhaust hole 132), a movable pouring hole cover 135 is arranged on the pouring hole 131, before pouring, after the mold is electrified and preheated to a set temperature, the pouring hole cover 135 is opened to convey a material to be poured into the pouring cavity, and after pouring is completed, the pouring hole 131 is closed; the vent hole 132 is provided, so that the vent hole 132 on the top cover 13 can be opened for venting or closed according to the process requirements when needed, for example, during the material pouring process. According to the improved structural design, the base, the annular side wall and the top cover of the mold are provided with the inductance heating wires and the temperature measuring devices, compared with the existing mode that only heating media are arranged on the base and the side wall of the mold for temperature control, the temperature of each area can be controlled more simply, effectively and accurately, so that a controllable and uniform temperature environment can be formed in a mold pouring cavity when material pouring is started, the temperature in the material forming process is ensured to be uniform and stable, meanwhile, gas generated in the mixture vulcanizing process can be effectively discharged through the exhaust holes formed in the top cover, bubbles in a formed mixture are reduced, the problems of stripe defects and uneven density caused by uneven temperature can be effectively reduced, and the quality of the prepared polishing pad can be obviously improved.
The specific types of the temperature measuring device and the temperature controller may need to be selected, in a preferred example, the temperature measuring device is a temperature sensor with high sensitivity, such as a thermistor and a thermocouple, and the temperature controller is preferably a device with a feedback control function, so as to achieve fast and accurate temperature control, and the temperature controller is, for example, a PID controller.
The vent hole 132 may be opened or closed in a suitable manner. In a preferred example, the exhaust holes 132 are screw holes, i.e. the inner surface thereof has threads, and each exhaust hole 132 is provided with a screw adapted to be unscrewed when exhaust is required and tightened when exhaust is not required.
The structure of the casting cavity may be determined according to the shape of the polishing pad to be manufactured. In order to meet the polishing requirements of most of the integrated circuit manufacturers in China at present, the prepared polishing pad is usually a circular pad, and correspondingly, the pouring cavity is a cylindrical cavity, so in a preferred example provided by the invention, the base 11 is a circular base 11, the annular side wall 12 is an annular side wall 12, the top cover 13 is a circular top cover 13, an annular groove is formed in the base 11, the annular side wall 12 is fixed in the annular groove, the top cover 13 can also be correspondingly provided with the annular groove, and the upper part of the annular side wall 12 is correspondingly embedded in the annular groove of the top cover 13. The design facilitates assembly and disassembly of the structures, for example, after solidification and molding of the polishing pad are completed, the mold can be easily disassembled, damage to the polishing pad in the mold disassembling process can be avoided, and the polishing pad machined by the structure can be machined into a finished product meeting requirements of customers only by simple cutting and grinding. The base 11, the annular sidewall 12 and the top cover 13 are generally made of the same material, and the specific material type is determined according to the requirement, which is not limited strictly.
In a further preferred example of the present invention, the base 11 has a diameter of 40cm to 100cm (inclusive, unless otherwise specified, when the description of the numerical range is concerned in the present specification, inclusive), a thickness of 1cm to 10cm, and the annular groove having a width of 0.1cm to 5cm and a depth of 0.1cm to 2cm is provided at a distance of 0.5cm to 5cm from the edge of the base 11; the inner diameter of the annular side wall 12 is the same as that of the annular groove of the base 11, the thickness of the annular side wall 12 is 0.1cm-5cm, and the height is 10 cm; the diameter of the top cover 13 is 0.5cm-5cm larger than the inner diameter of the annular side wall 12, the thickness is 0.5cm-5cm, the aperture of the exhaust hole 132 is 0.1mm-10mm, and the aperture of the pouring hole 131 is 0.5cm-5 cm. Such a specification can produce a polishing pad that meets most of the market needs.
In order to further improve the temperature control accuracy, in a preferred example, referring to fig. 1, the base 11 is divided into 8 concentric heating regions 111 with equal width along the diameter direction (the central heating region 111 is circular, the other 7 heating regions 111 are annular, and the radii of the annular width and the central circular are equal), each heating region 111 is provided with a temperature measuring point 112, the temperature measuring points of each heating region 111 are located on the same diameter of the base 11, the temperature measuring points 112 in the adjacent heating regions 111 are located on opposite sides of the central temperature measuring point of the base 11, for example, the temperature measuring point 112 of the outermost heating region 111 is located on the left side in fig. 1, the temperature measuring point 112 of the adjacent heating region 111 is located on the right side in fig. 1, and these are arranged in this order, the temperature condition of the bottom of the pouring cavity can be mastered more accurately, so that the temperature of each area can be adjusted more accurately, and the temperature uniformity of each area is ensured.
Similarly, in order to further improve the temperature control accuracy, in a preferred example, referring to fig. 2 and fig. 3, the annular side wall 12 is equally divided into 4 equal-height annular heating areas 121, temperature measurement points 122 are arranged in each heating area 121, and the temperature measurement points 122 of each heating area 121 are not in the same longitudinal direction, so that the temperature condition in the middle of the casting cavity can be grasped more accurately, the temperature of each area can be adjusted more accurately, and the temperature uniformity of each area can be ensured.
Also to further improve the temperature control accuracy, in a preferred example, referring to fig. 4 and 5, the top cover 13 is divided into 8 concentric equal-width regions (the center is a circle, the other 7 equal-width regions are rings, and the radii of the ring width and the center circle are equal) along the diameter direction, the center of the top cover 13 is provided with the pouring hole 131, the exhaust holes 132 are distributed in 3 equal-width regions around the pouring hole 131, that is, the exhaust holes 132 are distributed in the 3 equal-width regions at the center of the top cover 13, the 5 equal-width regions outside the equal-width region where the exhaust holes 132 are located are 5 heating regions 133, that is, the 5 heating regions 133 are annularly provided around the exhaust holes 132, each heating region 133 corresponds to the heat conducting groove, each heating region 133 is provided with a temperature measuring point 134, each temperature measuring point 134 can be provided with one temperature measuring device, the temperature measuring points 134 of the heating zones 133 are located on the same diameter of the top cover 13, the temperature measuring points 134 in the adjacent heating zones 133 are located on two opposite sides of the center of the top cover 13, for example, the temperature measuring point 134 of the outermost heating zone 133 is located on the right side in fig. 4, and the temperature measuring point 134 of the adjacent heating zone 133 is located on the left side in fig. 4, and thus the temperature condition of the upper part of the casting cavity can be grasped more accurately by sequentially setting the temperature measuring points 134, the temperature of each zone can be adjusted more accurately, and the temperature uniformity of each zone can be ensured.
Of course, in other examples, there may be other options for the arrangement of the heating areas and the temperature measuring points on the base 11, the top cover 13 and the annular side wall 12, but the above arrangement has been proved by experiments of the inventor of the present application to be effective in achieving accurate and fast temperature control.
The number and distribution of the exhaust holes 132 and the pouring holes 131 can be flexibly arranged according to the requirement. However, in a preferred example, the number of the exhaust holes 132 is 12, 12 exhaust holes 132 are symmetrically distributed on the top cover 13, for example, as shown in fig. 4, wherein 4 exhaust holes 132 are in one group and are uniformly distributed at intervals on one circular line, another 8 exhaust holes 132 are in another group and are uniformly distributed at intervals on another circular line, two groups of the exhaust holes 132 are concentrically arranged, and the top cover 13 is further provided with a pouring hole 131 located at the edge of the top cover 13.
The invention also provides a method for manufacturing a polishing pad, which is performed based on the closed casting mold system in any of the above schemes, so that the introduction of the closed casting mold system can be fully referred to here, and is not repeated for the sake of brevity. The method for manufacturing the polishing pad generally comprises the steps of mixing a mixed material, such as polyurethane and a chain extender, adding a foaming material, pouring the mixture into a pouring cavity of the closed pouring mold system in any scheme, accurately controlling the temperature through a heating resistance wire and a temperature measuring device which are arranged on a base, a top cover and an annular side wall in the pouring process, so that a uniform and stable controllable environment is formed in the pouring process, then feeding the mold with the mixed material into equipment for vulcanization, discharging gas generated in the vulcanization process through a vent hole in the top cover, thus reducing bubbles in a molding mixture, removing the mold after curing and molding, and performing cutting inspection on the formed pouring body, wherein specific parameters such as pouring and vulcanization temperature can be set according to process requirements, and strict limitation is not required. By adopting the invention, the problems of stripe defects, density unevenness and the like caused by temperature unevenness can be effectively reduced, and the quality of the prepared polishing pad is improved.
In order to verify the effect of the invention, the inventor carried out a large number of experiments, including comparative experiments of temperature control and temperature non-control by using the closed pouring mold system of the invention. The specific experimental procedures are referred to as follows.
The polyurethane and mocha polymers become solid after vulcanization and heating, and then the solid polymers are cut into round slices with the thickness of about 2.5 mm by a slicer; the height of the casting cavity (i.e. the height of the annular side wall) is 100mm and the uppermost and lowermost sheets will be discarded, whereby about 48 sheets will be obtained (since after vulcanization the upper and bottom surfaces will have a concave-convex surface, these two sheets are not normally used as finished products). Under strong light, the sheet was observed to have defective streaks on the surface and agglomerated (uneven density) inside.
For comparison, 3 examples of temperature control and 3 examples of temperature non-control (turning off the temperature controller) are respectively carried out (the number of experiments in the actual process is far more than that, and the contents of the experiments are summarized in the specification).
Example 1 (die temperature control 65 degrees):
step 1: uniformly mixing and stirring the substance polyurethane liquid and the microsphere powder which need to be mixed according to a certain proportion, and then placing the mixture into a casting machine tank A with the controllable temperature of 105 ℃; the mixture of the two will be in liquid form;
step 2: placing a substance curing agent MOCA (MOCA) to be mixed in a tank body B with the controllable temperature of 135 ℃, wherein the MOCA is changed into a liquid state under the action of the temperature;
and step 3: combining the base, the annular side wall and the top cover of the die system, heating to 65 ℃ after the combination, (opening all exhaust holes of the top cover before heating), observing a temperature controller, and continuously heating and placing for 15 minutes after all temperature measuring devices, such as temperature sensors, reach 65 ℃ so as to uniformly distribute the temperature in the pouring cavity;
and 4, step 4: removing the pouring hole cover in the middle of the top cover of the mold, simultaneously placing the pouring pipe in the middle of the base of the mold through the pouring hole, opening a pouring machine to start pouring the three mixtures obtained in the step 1 and the step 2 into the mold through the pouring machine, slowly and uniformly lifting the pouring pipe upwards, taking out the pouring pipe after all pouring objects are set to enter the pouring cavity, and covering the pouring hole;
and 5: after 6 hours of vulcanization at 65 ℃, pouring the mixture in the cavity into a curing state; removing the top cover of the mold, removing the annular side wall, taking away the cured and molded cylindrical polymer, cutting the cured cylindrical polymer into circular polishing pad sheets of about 2.5 mm, cutting into 48 sheets, and performing light inspection on each sheet; all 48 flakes were uniform in color, no clumps, and uniform in density.
Example 2 (mold temperature control 68 degrees):
step 1: uniformly mixing and stirring the substance polyurethane liquid and the microsphere powder which need to be mixed according to a certain proportion, and then placing the mixture into a casting machine tank A with the controllable temperature of 105 ℃; the mixture of the two will be in liquid form;
step 2: placing a substance curing agent MOCA to be mixed in a tank body B with the controllable temperature of 135 ℃, wherein the MOCA is changed into a liquid state under the action of the temperature;
and step 3: combining the base, the side wall and the top cover of the pouring mold, heating to 68 ℃ simultaneously after the combination, (opening all exhaust holes of the top cover before heating), observing a temperature controller, and continuously heating and placing for 15 minutes after all temperature sensors reach 68 ℃ so as to uniformly distribute the temperature in the pouring cavity;
and 4, step 4: removing the pouring hole cover in the middle of the top cover of the mold, simultaneously placing the pouring pipe in the middle of the base of the mold through the pouring hole, opening a pouring machine to start pouring the three mixtures obtained in the step 1 and the step 2 into the mold through the pouring machine, slowly and uniformly lifting the pouring pipe upwards, taking out the pouring pipe after all pouring objects are set to enter the pouring cavity, and covering the pouring hole;
and 5: after 6 hours of vulcanization at 65 ℃, the mixture in the mold is in a cured state; removing the top cover of the mold, removing the annular side wall, taking away the cured and molded cylindrical polymer, cutting the cured cylindrical polymer into circular polishing pad sheets of about 2.5 mm, cutting into 46 sheets, and performing light inspection on each sheet; 45 slices with uniform color, no aggregation and uniform density are obtained.
Example 3 (mold temperature control 70 degrees):
step 1: uniformly mixing and stirring the substance polyurethane liquid and the microsphere powder which need to be mixed according to a certain proportion, and then placing the mixture into a casting machine tank A with the controllable temperature of 105 ℃; the mixture of the two will be in liquid form;
step 2: placing a substance curing agent MOCA to be mixed in a tank body B with the controllable temperature of 135 ℃, wherein the MOCA is changed into a liquid state under the action of the temperature;
and step 3: combining the mold base, the annular side wall and the top cover, heating to 70 ℃ after the combination, (opening all exhaust holes of the top cover before heating), observing a temperature controller, and continuously heating and placing for 15 minutes after all temperature sensors reach 70 ℃ so as to uniformly distribute the temperature in the pouring cavity;
and 4, step 4: removing the pouring hole cover in the middle of the top cover of the mold, simultaneously placing the pouring pipe in the middle of the base of the mold through the pouring hole, opening a pouring machine to start pouring the three mixtures in the step 1 and the step 2 into the pouring cavity through the pouring machine, slowly and uniformly lifting the pouring pipe upwards, taking out the pouring pipe after all pouring objects are set to enter the pouring cavity, and covering the pouring hole;
and 5: after 6 hours of vulcanization at 65 ℃, the mixture in the mold is in a cured state; removing the top cover of the mold, removing the annular side wall, taking away the cured and molded cylindrical polymer, cutting the cured cylindrical polymer into circular polishing pad sheets of about 2.5 mm, cutting into 48 sheets, and performing light inspection on each sheet; 47 slices with uniform color, no aggregates and uniform density were obtained.
Example 4 (mold not controlled, placed in clean room, mold surface temperature measured 27.6):
step 1: uniformly mixing and stirring the substance polyurethane liquid and the microsphere powder which need to be mixed according to a certain proportion, and then placing the mixture into a casting machine tank A with the controllable temperature of 105 ℃; the mixture of the two will be in liquid form;
step 2: placing a substance curing agent MOCA to be mixed in a tank body B with the controllable temperature of 135 ℃, wherein the MOCA is changed into a liquid state under the action of the temperature;
and step 3: combining the mold base, the annular side wall and the top cover, and measuring the temperature of the inner surface of the mold to be 27.6 ℃;
and 4, step 4: removing the pouring hole cover in the middle of the top cover of the mold, simultaneously placing the pouring pipe in the middle of the base of the mold through the pouring hole, opening a pouring machine to start pouring the three mixtures obtained in the step 1 and the step 2 into the mold through the pouring machine, slowly and uniformly lifting the pouring pipe upwards, taking out the pouring pipe after all pouring objects are set to enter the pouring cavity, and covering the pouring hole;
and 5: after 6 hours of vulcanization at 65 ℃, the mixture in the mold is in a cured state; removing the top cover of the mold, removing the annular side wall, taking away the cured and molded cylindrical polymer, cutting the cured cylindrical polymer into circular polishing pad sheets of about 2.5 mm, cutting into 47 sheets, and performing light inspection on each sheet; 15 slices with uniform color, no aggregates and uniform density were obtained.
Example 5 (mold not controlled, placed in clean room, mold surface temperature measured 27.5):
step 1: uniformly mixing and stirring the substance polyurethane liquid and the microsphere powder which need to be mixed according to a certain proportion, and then placing the mixture into a casting machine tank A with the controllable temperature of 105 ℃; the mixture of the two will be in liquid form;
step 2: placing a substance curing agent MOCA to be mixed in a tank body B with the controllable temperature of 135 ℃, wherein the MOCA is changed into a liquid state under the action of the temperature;
and step 3: combining the mold base, the annular side wall and the top cover, and measuring the temperature of the inner surface of the mold to be 27.5 ℃;
and 4, step 4: removing the pouring hole cover in the middle of the top cover of the mold, simultaneously placing the pouring pipe in the middle of the mold base through the pouring hole, opening a pouring machine, pouring the three mixtures obtained in the step 1 and the step 2 into the mold through the pouring machine, slowly and uniformly lifting the pouring pipe upwards, taking out the pouring pipe after all pouring objects are set to enter the pouring cavity, and covering the pouring hole;
and 5: after 6 hours of vulcanization at 65 ℃, the mixture in the mold is in a cured state; removing the top cover of the mold, removing the annular side wall, taking away the cured and molded cylindrical polymer, cutting the cured cylindrical polymer into circular polishing pad sheets of about 2.5 mm, cutting into 48 sheets, and performing light inspection on each sheet; 16 slices with uniform color, no aggregates and uniform density were obtained.
Example 6 (mold not temperature controlled, placed in clean room, mold surface temperature measured 27.6):
step 1: uniformly mixing and stirring the substance polyurethane liquid and the microsphere powder which need to be mixed according to a certain proportion, and then placing the mixture into a casting machine tank A with the controllable temperature of 105 ℃; the mixture of the two will be in liquid form;
step 2: placing a substance curing agent MOCA to be mixed in a tank body B with the controllable temperature of 135 ℃, wherein the MOCA becomes liquid under the temperature action;
and step 3: combining the mold base, the annular side wall and the top cover, and measuring the temperature of the inner surface of the mold to be 27.5 ℃;
and 4, step 4: removing the pouring hole cover in the middle of the top cover of the mold, simultaneously placing the pouring pipe in the middle of the base of the mold through the pouring hole, opening a pouring machine to start pouring the three mixtures in the step 1 and the step 2 into the pouring cavity through the pouring machine, slowly and uniformly lifting the pouring pipe upwards, taking out the pouring pipe after all pouring objects are set to enter the mold, and covering the pouring hole;
and 5: after 6 hours of vulcanization at 65 ℃, the mixture in the mold is in a cured state; removing the top cover of the mold, removing the annular side wall, taking away the cured and molded cylindrical polymer, cutting the cured cylindrical polymer into circular polishing pad sheets with the thickness of about 2.5 millimeters, and cutting into 48 sheets, wherein each sheet is subjected to light inspection; 13 slices with uniform color, no aggregation and uniform density are obtained.
The results of the above examples are summarized in the following table.
TABLE 1 table of comparison data of yield for different examples
The results fully show that the invention can be used for accurately controlling the temperature in the pouring process, and can effectively improve the production yield.
In addition, the inventor of the present application also refers to the mode of temperature control only by means of temperature control devices on the bottom and the side wall of the mold in the prior art (i.e., closing the inductance heating wire on the top cover of the present invention, and controlling the temperature only by means of the inductance heating wire and the temperature measuring device on the base and the annular side wall), and the experimental result shows that the defects generated by the mode of temperature control only by means of the control devices on the base and the annular side wall are still more, and the number of finally cut good products is less than 20% of that generated by the mode of temperature control by means of the devices on the base, the annular side wall and the top cover.
In view of the foregoing, the present invention provides a closed casting mold system for manufacturing a polishing pad, comprising: the top cover and the base are arranged at the upper end and the lower end of the annular side wall, so that a closed pouring cavity for manufacturing the polishing pad is formed together; the base, the annular side wall and the top cover are all of hollow structures, annular heat conducting grooves are formed in the base, the annular side wall and the top cover, inductance heating wires and temperature measuring devices are arranged in the annular heat conducting grooves, and the inductance heating wires and the temperature measuring devices are electrically connected with the temperature controller; the top cover is also provided with a closable pouring hole and an exhaust hole. According to the improved structural design, the inductance heating wires and the temperature measuring devices are arranged on the base, the side wall and the top cover of the mold, compared with the existing mode that only heating media are arranged on the base and the side wall of the mold for temperature control, the temperature of each area can be controlled more simply, effectively and accurately, a controllable and uniform temperature environment can be formed in a mold pouring cavity when material pouring is started, the temperature in the material forming process is ensured to be uniform and stable, meanwhile, gas generated in the mixture vulcanizing process can be effectively discharged through the exhaust holes formed in the top cover, bubbles in a formed mixture are reduced, the problems of stripe defects and uneven density caused by uneven temperature can be effectively reduced, and the quality of the prepared polishing pad can be obviously improved. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (10)
1. A closed casting mold system for manufacturing a polishing pad, comprising: the top cover and the base are arranged at the upper end and the lower end of the annular side wall, so that a closed pouring cavity for manufacturing the polishing pad is formed together; the base, the annular side wall and the top cover are all of hollow structures, annular heat conducting grooves are formed in the base, the annular side wall and the top cover, inductance heating wires and temperature measuring devices are arranged in the annular heat conducting grooves, and the inductance heating wires and the temperature measuring devices are electrically connected with the temperature controller; the top cover is also provided with a closable pouring hole and an exhaust hole.
2. The closed casting mold system according to claim 1, wherein the vent holes are screw holes, each vent hole being provided with an adapted screw.
3. The closed casting mold system according to claim 1, wherein the annular heat conducting grooves in the base, the annular sidewall and the top cover are each plural.
4. The closed casting mold system according to claim 3, wherein the base is a circular base, the annular sidewall is a circular sidewall, the top cover is a circular top cover, and an annular groove is formed in the base and the annular sidewall is fixed in the annular groove.
5. The closed casting mold system according to claim 4, wherein the base has a diameter of 40cm to 100cm, a thickness of 1cm to 10cm, and the annular groove having a width of 0.1cm to 5cm and a depth of 0.1cm to 2cm is provided at a distance of 0.5cm to 5cm from the edge of the base; the inner diameter of the annular side wall is the same as that of the annular groove of the base, the thickness of the annular side wall is 0.1cm-5cm, and the height of the annular side wall is 10 cm; the diameter of the top cover is 0.5cm-5cm larger than the inner diameter of the annular side wall, the thickness of the top cover is 0.5cm-5cm, the aperture of the exhaust hole is 0.1mm-10mm, and the aperture of the pouring hole is 0.5cm-5 cm.
6. The closed casting die system according to claim 4, wherein the top cover is divided into 8 concentric equal-width regions along the diameter direction, the casting hole is formed in the center of the top cover, the exhaust holes are distributed in 3 equal-width regions around the casting hole, the 5 equal-width regions outside the equal-width regions where the exhaust holes are located are 5 heating regions, temperature measuring points are arranged in the heating regions, the temperature measuring points of the heating regions are located on the same diameter of the top cover, and the temperature measuring points in the adjacent heating regions are located on two opposite sides of the center of the top cover.
7. The closed casting mold system according to claim 6, wherein the number of the vent holes is 12, the 12 vent holes are symmetrically distributed on the top cover, and the top cover is further provided with casting holes located at the edge of the top cover.
8. The closed casting mold system according to claim 4, wherein the annular side wall is divided into 4 equal annular heating areas, temperature measuring points are arranged in each heating area, and the temperature measuring points of the heating areas are not in the same longitudinal direction.
9. The closed casting die system according to claim 4, wherein the base is divided into 8 concentric heating zones with the same width along the diameter direction, temperature measuring points are arranged in each heating zone, the temperature measuring points of each heating zone are located on the same diameter of the base, and the temperature measuring points in the adjacent heating zones are located on two opposite sides of the central temperature measuring point of the base.
10. A method for manufacturing a polishing pad, characterized in that the method for manufacturing a polishing pad is performed based on a closed casting mold system according to any of claims 1-9.
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