CN114815221A - Liquid optical phase modulator with configurable adjustment range and precision - Google Patents

Liquid optical phase modulator with configurable adjustment range and precision Download PDF

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CN114815221A
CN114815221A CN202210223560.8A CN202210223560A CN114815221A CN 114815221 A CN114815221 A CN 114815221A CN 202210223560 A CN202210223560 A CN 202210223560A CN 114815221 A CN114815221 A CN 114815221A
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liquid
phase
cavity
cover plate
inner core
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CN114815221B (en
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陈陶
陈琪瑞
郑培涛
梁忠诚
丁天心
孙靖怡
陈悦
孔梅梅
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Nanjing University of Posts and Telecommunications
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Nanjing University of Posts and Telecommunications
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    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/06Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light

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Abstract

The invention relates to a liquid optical phase modulator with configurable adjusting range and precision, which comprises a solid inner core cavity, a transparent upper cover plate and a transparent lower cover plate, wherein the solid inner core cavity is sealed into a phase adjusting liquid cavity by the transparent upper cover plate and the transparent lower cover plate which are parallel, three liquids are stored in the phase adjusting liquid cavity to serve as phase adjusting liquids, the inner cavity surface of the solid inner core cavity corresponding to each phase adjusting liquid is provided with a liquid injection hole, the liquid injection holes are connected with an external force adjusting device, the height ratio of the liquids in the solid inner core cavity in the light transmission direction is changed by using the external force adjusting device, so that the optical path of a light beam passing through the liquids is changed, the optical phase adjustment is realized, and the configuration of the adjusting range and the adjusting precision is realized by configuring the refractive index difference of the liquids in the solid inner core cavity. The invention constructs the horizontal liquid level by utilizing the property of invariable contact angle, does not need to add a film, has simple structure and high precision, and has application prospect in the fields of optical synthetic aperture imaging and optical information processing.

Description

Liquid optical phase modulator with configurable adjustment range and precision
Technical Field
The invention relates to an optical phase modulation method, belongs to the technical field of optical imaging and optical information processing devices, and particularly relates to a liquid optical phase modulator which is wide in adjustment range and free in adjustment precision configuration.
Background
The optical phase modulation technology has very wide application in the fields of optical communication, optical signal processing, optical device integration, microwave signal processing, optical imaging and the like. Currently, the mainstream techniques for optical phase modulation are a phase modulation technique based on waveguide electro-optical modulation and a phase modulation technique based on mechanical modulation. The phase modulation technology based on waveguide electro-optic modulation utilizes the electro-optic effect of a medium to change the mode in a waveguide, so that the phase of output light is changed, and the purpose of phase modulation is achieved. Phase modulation based on mechanical modulation is phase modulation by mechanical means, typically a mems phase modulator and a fiber optic phase modulator based on piezoelectric ceramics.
The liquid optical phase modulator based on piezoelectric ceramics utilizes the piezoelectric effect of the piezoelectric ceramics: when some dielectrics are deformed by an external force in a certain direction, polarization occurs in the dielectrics, and opposite charges of positive and negative polarities occur on two opposite surfaces of the dielectrics. When the external force is removed, it returns to an uncharged state, and this phenomenon is called the positive piezoelectric effect. When the direction of the force changes, the polarity of the charge changes. Conversely, when an electric field is applied in the polarization direction of the dielectrics, these dielectrics also deform, and after the electric field is removed, the deformation of the dielectrics disappears, which is called the inverse piezoelectric effect. Therefore, the piezoelectric ceramic is deformed by applying voltage to the piezoelectric ceramic, the light path is changed, and the optical path difference is changed, so that the phase modulation purpose is realized. However, the piezoelectric ceramic phase modulator has a plurality of defects:
the deformation quantity of the piezoelectric ceramic generated under the action of an electric field is small and is not more than one ten-million of the size of the piezoelectric ceramic, so that the optical path difference change quantity of the liquid optical phase modulator based on the piezoelectric ceramic is small, and the phase adjusting range is small;
secondly, the liquid optical phase modulator based on the piezoelectric ceramics has complex structure and complex operation;
and the piezoelectric ceramic has high energy consumption.
Disclosure of Invention
Based on the defects of the traditional phase modulator, the invention provides the liquid optical phase modulator which is simple to operate, low in energy consumption and configurable in adjusting range and precision.
In order to solve the problems, the invention is realized by the following technical scheme:
the invention relates to a liquid optical phase modulator with configurable adjusting range and precision, which comprises a solid inner core cavity, a transparent upper cover plate and a transparent lower cover plate, wherein the transparent upper cover plate and the transparent lower cover plate are arranged in parallel, the solid inner core cavity is provided with a complex inner cavity surface, the solid inner core cavity is sealed into a phase adjusting liquid cavity by the parallel transparent upper cover plate and the transparent lower cover plate, and three liquids are stored in the phase adjusting liquid cavity as phase adjusting liquids, wherein: the included angle between the inner cavity surface of the solid inner core cavity and the lower bottom surface of the transparent upper cover plate is alpha 1 The contact angle of the lower layer liquid at the three-phase contact point formed by the first layer liquid and the second layer liquid in the phase adjusting liquid cavity from top to bottom and the surface of the cavity is theta 1 ,α 1 Is equal to theta 1 The two liquid contact interfaces are parallel to the lower bottom surface of the transparent upper cover plate, and the included angle between the surface of the inner cavity of the solid inner core cavity and the upper bottom surface of the transparent lower cover plate is alpha 2 The contact angle of the upper layer liquid at the three-phase contact point formed by the second layer liquid, the third layer liquid and the inner cavity surface in the phase adjusting liquid cavity from top to bottom is theta 2 ,α 2 Is equal to theta 2 The liquid contact interface is parallel to the upper bottom surfaces of the lower cover plate and the transparent lower cover plate, and the inner side of the solid inner core cavity is respectively coated with a first coating layer and a second coating layer to set a contact angle theta 1 And contact angle theta 2
The inner cavity surface of the solid inner core cavity corresponding to each phase adjusting liquid is provided with a liquid injection hole, the liquid injection hole is connected with an external force adjusting device, the external force adjusting device is utilized to change the height ratio of the liquid in the solid inner core cavity in the light passing direction, so that the optical path of a light beam passing through the liquid is changed, the optical phase adjustment is realized, and the adjustment range and the adjustment precision can be configured by configuring the refractive index difference of the liquid in the solid inner core cavity.
The invention is further improved in that: the phase adjusting liquid cavity can store two or more than three kinds of liquid, when three kinds of phase adjusting liquid are stored, the three kinds of phase adjusting liquid are different, two adjacent phase adjusting liquids have refractive index difference and are not mutually soluble, and the refractive index difference delta n of the first layer liquid and the refractive index difference delta n of the second layer liquid in the three kinds of phase adjusting liquid 12 Can be configured, has larger value, unit distance of liquid level movement and large optical path difference, thereby realizing large-range phase adjustment, and the difference delta n between the refractive indexes of the liquid in the second layer and the liquid in the third layer 23 The device can be configured, the value is small, the liquid level moves a unit distance, and the optical path difference is small, so that high-precision phase adjustment is realized. The two liquid surfaces can be always kept parallel, and parallel light waves are still parallel after passing through the device along the cavity axis direction of the phase modulator. When two kinds of phase adjusting liquid are stored, one of the three kinds of liquid can be replaced by the same liquid as the other two kinds of liquid, so that the phase adjusting liquid cavity can store the two kinds of liquid,
when the solid core cavity of the present invention stores three liquids, the inner cavity surface of the solid core cavity may have several forms:
1. the solid inner core cavity is formed by splicing two round tables up and down to form the surface of an inner cavity.
2. The solid inner core cavity is provided with an inner cavity surface formed by splicing two prismatic tables formed by splicing isosceles trapezoidal surfaces up and down.
3. The solid inner core cavity is provided with a frustum pyramid formed by splicing a circular truncated cone and an isosceles trapezoid surface, and the frustum pyramid is spliced up and down to form an inner cavity surface.
When two of three phase adjusting liquids stored in the phase adjusting liquid cavity are the same, the inner surfaces of the solid inner core cavity and the upper and lower transparent cover plates are additionally provided with the conducting layer and the insulating layer, after the solid inner core cavity and the upper and lower transparent cover plates are electrified, the liquid generates an electrowetting effect and a dielectrophoresis effect, and the radian of the liquid surface is finely adjusted.
The liquid optical phase modulator with configurable adjustment range and precision has working limits that the lower interface of liquid 1 reaches the splicing interface and the upper interface of liquid 3 reaches the splicing interface. Exceeding the operating limit exceeds the operating range of the phase modulator. The liquid optical phase modulator with configurable adjusting range and precision has larger refractive index difference between the liquid 1 and the liquid 2, and can adjust larger optical path difference every unit distance of the liquid surface 1 to realize larger phase modulating range; the difference between the refractive indexes of the liquid 2 and the liquid 3 is small, the change range of the optical path difference is small and the phase adjustment is small every unit distance of the liquid level 2, and the high-precision phase adjustment can be realized.
The invention is further improved in that: when three kinds of liquid are contained in the liquid optical phase modulator, corresponding liquid injection holes are reserved on the side wall of the circular truncated cone; the height ratio of the three liquids in the light-transmitting direction is changed by using external drive through the three liquid injection holes, so that the optical path of a light beam passing through the three liquids is changed, and the optical phase adjustment is realized; meanwhile, the refractive index difference between the liquid 1 and the liquid 2 and the refractive index difference between the liquid 2 and the liquid 3 can be configured, and the refractive index difference between the liquid 1 and the liquid 2 is larger, so that phase modulation in a larger range can be realized; the difference between the refractive indexes of the liquid 2 and the liquid 3 is small, and high-precision adjustment precision configuration can be realized.
The invention has the beneficial effects that:
the variation range of the liquid interface can be realized from the bottom of the device to the top of the device, and the adjustment range is wide;
the optical path difference of the invention is delta (n) 1 -n 2 |)*Δh 1 +(|n 3 -n 2 |)*Δh 2 Where | n 1 -n 2 |、|n 3 -n 2 | is the absolute value Δ n of the difference in refractive index between the liquid 1 and the liquid 2, and the liquid 3 12 And Δ n 32 Wherein Δ n 12 Large value, Δ n 32 The value is small, phase modulation in a large range can be realized by changing the height ratio of the liquid 1 to the liquid 2 in the light passing direction, and phase modulation in a large range can be realized by changing the height ratio of the liquid 3 to the liquid 2 in the light passing directionPhase modulation with high precision;
the invention can lead the refractive index difference to be different by adopting different liquids, and realize configurable adjustment range and precision;
when the phase adjusting liquid is only two, the liquid level of the phase adjusting liquid is a natural liquid level, no additional driving is needed, and the operation is simple;
the liquid optical phase modulator has simple structure and convenient operation.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a structural diagram of an initial optical path of the present invention.
Fig. 3 is a structural diagram of the optical path difference in the light transmission direction of the present invention.
Fig. 4 is a schematic structural diagram of a first embodiment of the present invention.
Fig. 5 is a cross-sectional view of the first embodiment of the present invention.
Fig. 6 is a schematic structural diagram of a second embodiment of the present invention.
Fig. 7 is a side view of a second embodiment of the present invention.
Fig. 8 is a schematic structural diagram of a third embodiment of the present invention.
Fig. 9 is a side view of a third embodiment of the present invention.
Fig. 10 is a schematic structural diagram of a fourth embodiment of the present invention.
Fig. 11 is a schematic structural diagram of a fifth embodiment of the present invention.
Fig. 12 is a schematic structural diagram of a sixth embodiment of the present invention.
Detailed Description
In the following description, for purposes of explanation, numerous implementation details are set forth in order to provide a thorough understanding of the embodiments of the invention. It should be understood, however, that these implementation details are not to be interpreted as limiting the invention. That is, in some embodiments of the invention, such practical details are not necessary. In addition, some conventional structures and components are shown in simplified schematic form in the drawings.
As shown in fig. 1-3, the present invention is an adjustment range andthe precision is the configurable liquid optics phase modulator, and liquid optics phase modulator includes solid inner core cavity 1, transparent upper cover plate 2 and transparent lower cover plate 3 parallel arrangement, solid inner core cavity 1 has complicated inner chamber surface, solid inner core cavity 1 is by parallel transparent upper cover plate 2 with transparent lower cover plate 3 seals for the phase place control liquid chamber, stores three kinds of liquid as the phase place control liquid in the phase place control liquid chamber, the inner chamber surface of solid inner core cavity 1 with the contained angle of the lower bottom surface of transparent upper cover plate 2 is alpha 1 The contact angle between the lower layer of liquid at the position where the three-phase contact point is formed by the first layer of liquid and the second layer of liquid in the phase adjusting liquid cavity from top to bottom and the surface of the inner cavity is theta 1 ,α 1 Is equal to theta 1 So as to realize that the two liquid contact interfaces are parallel to the lower bottom surface of the transparent upper cover plate 2; the included angle between the inner cavity surface of the solid inner core cavity 1 and the upper bottom surface of the transparent lower cover plate 3 is alpha 2 The contact angle of the upper layer liquid at the three-layer contact point formed by the second layer liquid and the third layer liquid in the phase adjusting liquid cavity from top to bottom and the surface of the inner cavity is theta 2 ,α 2 Is equal to theta 2 So as to realize the liquid contact interface parallel to the upper bottom surfaces of the lower cover plate 3 and the transparent lower cover plate 3.
When three phase adjusting liquids are different from each other, liquid 6, liquid 7 and liquid 8 are arranged, liquid injection holes are formed in the inner cavity surface of the solid inner core cavity 1 corresponding to each phase adjusting liquid, as shown in fig. 1, the liquid injection holes are a first liquid injection hole 9, a second liquid injection hole 10 and a third liquid injection hole 11 from top to bottom, and a first coating layer 12 and a second coating layer 13 are respectively coated on the inner side of the solid inner core cavity 1 to set a contact angle theta 1 And contact angle theta 2 . The liquid injection hole is connected with an external force adjusting device, the external force adjusting device is utilized to change the height ratio of the liquid in the solid inner core cavity 1 in the light passing direction, so that the optical path of a light beam passing through the liquid is changed, the optical phase adjustment is realized, and the configuration of both the adjusting range and the adjusting precision is realized by configuring the refractive index difference of the liquid in the solid inner core cavity 1. When the liquid in the liquid optical phase modulator of the present invention is three, the liquid is selected1. The refractive indices of the liquid 2 and the liquid 3 are n 1 、n 2 、n 3 The height of the cavity is 3s, and the middle part is a splicing interface. It is assumed that initially the two liquid levels divide the chamber high, i.e. the liquid 1, liquid 2, liquid 3 are all s high, as in fig. 2. Initial optical path
l 1 =n 1 *s+n 2 *s+n 3 *s
The interface of the liquid 1 and the liquid 2 is shifted down by delta h after external drive 1 The increase Δ h of the interface between the liquid 2 and the liquid 3 2 In this case, as shown in FIG. 3, the height of the liquid 1 is s + Δ h 1 The height of the liquid 2 is s- Δ h 1 -Δh 2 The height of the liquid 3 is s + Deltah 2 Optical path of
l 2 =n 1 (s+Δh 1 )+n 2 (s-Δh 1 -Δh 2 )+n 3 (s+Δh 2 )
The optical path difference is
Δ=(|n 1 -n 2 |)*Δh 1 +(|n 3 -n 2 |)*Δh 2
Where | n 1 -n 2 |、|n 3 -n 2 | is the absolute value Δ n of the difference in refractive index between the liquid 1 and the liquid 2, and the liquid 3 12 And Δ n 32 Wherein Δ n 12 Large value, Δ n 32 The value is small, phase modulation in a large range can be realized by changing the height ratio of the liquid 1 to the liquid 2 in the light transmission direction, and phase modulation in high precision can be realized by changing the height ratio of the liquid 3 to the liquid 2 in the light transmission direction. Δ n 12 And Δ n 32 The size of the adjustable angle can be configured according to the adjusting range and the accuracy.
The liquid optical phase modulator is driven externally, and the optical path difference in the light passing direction is
(|n 1 -n 2 |)*Δh 1 +(|n 3 -n 2 |)*Δh 2
The relationship between the optical path difference and the phase difference is as follows:
Figure BDA0003534692590000071
wherein
Figure BDA0003534692590000072
Is the phase difference; delta is the optical path difference; λ is the wavelength of the light. The phase is adjusted by changing the optical path difference. The upper interface of the liquid 2 can be adjusted from the splicing interface to the top surface, and the lower interface can be adjusted from the splicing interface to the bottom surface, namely the maximum value of the optical path difference can reach
Figure BDA0003534692590000073
The wavelength of the working light is far greater, and the adjusting range is wide.
Example one
As shown in fig. 4-5, the invention is a liquid optical phase modulator with configurable adjustment range and precision, which comprises a solid inner core cavity 1, a transparent upper cover plate 2 and a transparent lower cover plate 3, wherein the transparent upper cover plate 2 and the transparent lower cover plate 3 are arranged in parallel, the upper and lower transparent cover plates are made of transparent acrylic glass sheets, two circular truncated cone side walls formed by rotating by taking a straight line as a bus are vertically spliced into the solid inner core cavity, and the solid inner core cavity can be made of glass raw materials such as quartz sand, limestone, feldspar, soda ash, boric acid and the like through high temperature. And defining the splicing position of the upper circular truncated cone and the lower circular truncated cone as a splicing interface. The side walls of the circular truncated cone are separately manufactured by taking the splicing interface as a boundary. After the upper half part is manufactured, the inner wall of the cavity of the solid inner core is coated with a Teflon hydrophobic layer 12, and the included angle between the bus and the bottom surface of the solid inner core is equal to the contact angle between the liquid 1, the liquid 2 and the Teflon hydrophobic layer 12. The lower half is also made of glass in a customized mode, and the upper edge of the lower half is completely coincided with the lower edge of the upper half. The inner wall is coated with a Teflon hydrophobic layer 13, the generatrix of which forms an angle with the bottom surface equal to the contact angle of the liquid 2, the liquid 3 and the Teflon coating. After the two parts are manufactured, the two parts are spliced together along the splicing part to form a complete whole. And injecting a lithium chloride solution, silicon oil and water from bottom to top in sequence. The upper and lower parts and the splicing interface respectively leave a corresponding liquid injection hole for the flow of liquid so as to adjust the height ratio of the liquid in the light transmission direction. The outer side of the solid inner core cavity 1 is provided with an external force adjusting device, the external force adjusting device comprises a side wall formed by rotating the outer side of the solid inner core cavity 1, the two walls are separated into three liquid storage tanks by hard plates, the upper part and the lower part of the outer side of the side wall in each liquid storage tank are respectively provided with a magnet 14-1, and the magnet is externally provided with a conductive coil 15-1. After the power is switched on, the side wall is extruded by the interaction force of the magnetic field between the magnet and the conductive coil to push the liquid level to move, so that the optical path is changed to realize phase adjustment.
Example two
As shown in fig. 6-7, the invention is a liquid optical phase modulator with configurable adjustment range and precision, which comprises a solid inner core cavity 1, a transparent upper cover plate 2 and a transparent lower cover plate 3, wherein the transparent upper cover plate 2 and the transparent lower cover plate 3 are arranged in parallel, the solid inner core cavity is formed by splicing two frustum side walls formed by splicing isosceles trapezoid surfaces up and down, as shown in fig. 6, the solid inner core cavity is made of a PLA material through 3D printing, drawing software such as CAD is used for making drawings, and then a finished product is printed by a 3D printer. Isosceles trapezoid side wall of upper prismoid side wall formed by splicing isosceles trapezoid sides and prismoid side wall top surface included angle alpha 1 Equal to the contact angle theta of the liquid 1-liquid 2-frustum side wall 1 1 To ensure that the contact interface of the liquid 1 and the liquid 2 is a plane; an included angle alpha between the isosceles trapezoid side wall of the lower frustum sidewall and the bottom surface of the frustum sidewall 2 Equal to the contact angle theta of the liquid 2-liquid 3-prismoid sidewall 2 2 To ensure that the contact interface of the liquid 2 and the liquid 3 is a plane. The side view is shown in fig. 7. The liquid is bromododecane, water and phenyl silicone oil respectively. The polyolefin hydrophobic layer coated on the inner wall of the solid inner core cavity plays a role in hydrophobic modification and contact angle improvement. The upper and lower transparent acrylic glass cover plate is used for sealing, a liquid injection hole is respectively reserved at the upper and lower parts of the solid inner core main body and the splicing interface, the liquid injection holes are respectively connected with corresponding liquid pumps for filling and absorbing so as to facilitate the circulation of liquid, and the height ratio of the liquid in the light passing direction is adjusted to adjust the phase.
EXAMPLE III
The present invention is a liquid-optic phase modulator with configurable adjustment range and precision, as shown in fig. 8-9The camera comprises a solid inner core cavity 1, a transparent upper cover plate 2 and a transparent lower cover plate 3, wherein the transparent upper cover plate 2 and the transparent lower cover plate 3 are arranged in parallel, the solid inner core cavity 1 is formed by splicing a circular truncated cone side wall and a prismoid side wall formed by splicing isosceles trapezoid surfaces up and down, as shown in figure 8, the solid inner core cavity 1 is formed by respectively manufacturing an upper part and a lower part through 3D printing of a PLA material, and the solid inner core cavity 1 and the prismoid side wall are tightly stuck together through Kaisi Mi 540AB glue. The inner wall of the solid inner core cavity 1 is coated with a polyolefin hydrophobic layer to play a role in hydrophobic modification and contact angle improvement. The included angle alpha between the circular truncated cone side wall of the circular truncated cone side wall at the upper half part of the solid inner core cavity and the top surface of the circular truncated cone 1 Equal to the contact angle theta of the side wall of the liquid 1-liquid 2-circular truncated cone 1 To ensure that the contact interface of the liquid 1 and the liquid 2 is a plane; isosceles trapezoid side wall of prismoid side wall formed by splicing lower half isosceles trapezoid side of solid inner core cavity and prismoid bottom surface included angle alpha 2 Equal to the contact angle theta of the liquid 2-liquid 3-frustum side wall 2 To ensure that the contact interface of the liquid 2 and the liquid 3 is a plane. As shown in the side view of 9, the solid core cavity 1 is sealed up and down by transparent glass cover plates, and liquid injection holes are respectively reserved at the upper and lower parts of the solid core main body and the splicing interface so as to facilitate the height ratio of the flowing liquid in the light passing direction. The three liquids are respectively selected from silicone oil, water and bromododecane. The solid inner core cavity is additionally provided with a side wall, the outer cavity is divided into three liquid storage cavities by two hard plates, and the outer wall of each liquid storage cavity is an elastic membrane so as to adjust the outer cavity to change the liquid volume of the inner cavity. So as to facilitate the liquid circulation, and the height ratio of the liquid in the light circulation direction is adjusted to adjust the phase.
Example four
As shown in figure 10, the liquid optical phase modulator with configurable adjustment range and precision comprises a solid inner core cavity 1, a transparent upper cover plate 2 and a transparent lower cover plate 3, wherein the transparent upper cover plate 2 and the transparent lower cover plate 3 are arranged in parallel, the side wall of a circular table formed by rotating by taking a straight line as a bus is taken as the solid inner core cavity 1, the inner wall of the solid inner core cavity is coated with a Teflon hydrophobic coating layer to improve a contact angle, and the circular table is sealed between an upper transparent glass cover plate 2 and the lower transparent cover plate 3. The side wall is made of plastic with slightly soft texture through melting and pouring. The liquid injection hole 9-1 is reserved between the circular truncated cone and the transparent upper cover plate 2, the liquid injection hole 11-1 is reserved between the circular truncated cone and the transparent lower cover plate, and the liquid injection hole 9-1 and the liquid injection hole 11-1 are used for flowing liquid so as to adjust the volume ratio of the liquid, namely the height ratio of the liquid in the light passing direction. The outer side of the solid inner core cavity 1 is surrounded by the side wall formed by rotation, two liquid storage tanks are formed between the two walls by a hard plate partition 16, and water 6-4 and silicon oil 7-4 are filled in the liquid storage tanks. A magnet 14-4 is additionally arranged on the outer side of the inner side wall, a conductive coil 15-4 is additionally arranged outside the magnet, and after the coil is electrified, the side wall is extruded through the interaction force of the magnetic field between the magnet and the coil to push the liquid level 17 to move, so that the height difference of the liquid in the light passing direction is changed, and the phase is adjusted.
EXAMPLE five
As shown in figure 11, the invention is a liquid optical phase modulator with configurable adjustment range and precision, which comprises a solid inner core cavity 1, a transparent upper cover plate 2 and a transparent lower cover plate 3, wherein the transparent upper cover plate 2 and the transparent lower cover plate 3 are arranged in parallel, the structure is shown in figure 11, a round table-shaped conductive electrode formed by rotating by taking a straight line as a bus is used as the solid inner core cavity, a side wall electrode 2-1 solid inner core cavity is formed by pouring conductive copper through melting, and the inner wall of the electrode is coated with an insulating layer 3-1 and a hydrophobic layer 4. The round table is sealed between the upper and lower transparent conductive electrodes 5 and the upper and lower transparent glass cover plates 1. The upper and lower transparent conductive electrodes 5 are separated from the side wall of the conductive circular truncated cone through first insulating layers 3-1, liquid in the phase adjusting liquid cavity is separated from the transparent conductive electrodes 5 through second insulating layers 6, and water and silicone oil are filled in the phase adjusting liquid cavity. The outer cavity is divided into two liquid storage cavities by a hard plate, and the outer wall of each liquid storage cavity is an elastic membrane so as to adjust the outer cavity and change the volume of liquid in the inner cavity. So as to facilitate the liquid to flow through, and the height ratio of the liquid in the light flowing direction is adjusted to adjust the phase. And a voltage U is applied to the bottom transparent electrode 5 and the side wall electrode 2-1 to generate an electrowetting effect between the two liquids, and the liquid level is adjusted by finely adjusting the curvature of the curved surface through the electrowetting effect. The upper and lower transparent conductive electrodes are separated from the liquid by a second insulating layer 6.
EXAMPLE six
The liquid optical phase modulator comprises a solid inner core cavity 1, a transparent upper cover plate 2 and a transparent lower cover plate 3, wherein the transparent upper cover plate 2 and the transparent lower cover plate 3 are arranged in parallel, the structure is shown in fig. 12, a round table-shaped conductive electrode formed by rotating by taking a straight line as a bus is used as the solid inner core cavity, conductive copper is used for forming a side wall electrode 2-1 solid inner core cavity by melt pouring, a round table-shaped conductive electrode formed by rotating by taking the straight line as the bus is used as the solid inner core cavity, the conductive copper is used for forming the side wall electrode 2-1 solid inner core cavity by melt pouring, and the inner wall of the electrode is coated with an insulating layer 3-1 and a hydrophobic layer 4. The round table is sealed between the upper and lower transparent conductive electrodes 5 and the upper and lower transparent glass cover plates 2. The upper and lower electrodes and the sidewall electrode are separated by a first insulating layer 3-1. The inner part is filled with phenyl silicone oil and glycol. The outer cavity is divided into two liquid storage cavities by a hard plate, and the outer walls of the liquid storage cavities are connected with liquid pumps for filling and absorbing liquid so as to adjust the outer cavity to change the liquid volume of the inner cavity. So as to facilitate the liquid circulation, and the height ratio of the liquid in the light circulation direction is adjusted to adjust the phase. Voltage U is applied to the bottom transparent electrode 5 and the side wall electrode 2-1 to generate a dielectrophoresis effect between the two liquids, and the curvature of the curved surface is finely adjusted through the dielectrophoresis effect to adjust the liquid level.
The liquid optical phase modulator comprises a solid inner core cavity with a special shape and internal phase adjusting liquid, wherein under the adjustment of external drive, the phase modulator changes the optical path to adjust the phase when the phase modulator is transmitted in the direction of the optical cavity. The invention constructs the horizontal liquid level by utilizing the property of invariable contact angle, does not need to add a film, has simple structure and high precision, and has application prospect in the fields of optical synthetic aperture imaging and optical information processing.
The above description is only an embodiment of the present invention, and is not intended to limit the present invention. Various modifications and alterations to this invention will become apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims (10)

1. The utility model provides an all configurable liquid optics phase modulation ware of control range and precision, liquid optics phase modulation ware include solid inner core cavity (1), transparent upper cover plate (2) and transparent lower cover plate (3) parallel arrangement, its characterized in that: solid inner core cavity (1) has complicated inner chamber surface, solid inner core cavity (1) by parallel transparent upper cover plate (2) with transparent lower cover plate (3) are sealed to be the phase place control liquid chamber, three kinds of liquid of phase place control liquid intracavity storage as phase place control liquid, wherein:
the included angle between the inner cavity surface of the solid inner core cavity (1) and the lower bottom surface of the transparent upper cover plate (2) is alpha 1 The contact angle between the lower layer of liquid at the position where the three-phase contact point is formed by the first layer of liquid and the second layer of liquid in the phase adjusting liquid cavity from top to bottom and the surface of the inner cavity is theta 1 ,α 1 Is equal to theta 1 So as to realize that the two liquid contact interfaces are parallel to the lower bottom surface of the transparent upper cover plate (2);
the included angle between the inner cavity surface of the solid inner core cavity (1) and the upper bottom surface of the transparent lower cover plate (3) is alpha 2 The contact angle of the upper layer liquid at the three-layer contact point formed by the second layer liquid and the third layer liquid in the phase adjusting liquid cavity from top to bottom and the surface of the inner cavity is theta 2 ,α 2 Is equal to theta 2 The liquid contact interface is parallel to the upper bottom surfaces of the lower cover plate (3) and the transparent lower cover plate (3);
every what phase control liquid corresponds the inner cavity surface of solid inner core cavity (1) all is provided with annotates the liquid hole, annotate the liquid hole and be connected with external force adjusting device, utilize external force adjusting device changes the liquid is in the altitude ratio of logical light direction in solid inner core cavity (1) to change the optical path when light beam passes liquid, realize optical phase control, through the configuration the refractivity difference of liquid realizes that control range and regulation precision are all dispose in solid inner core cavity (1).
2. A liquid optical phase modulator with configurable adjustment range and precision according to claim 1, wherein: the three phase adjusting liquids stored in the phase adjusting liquid cavity are different, and the two adjacent phase adjusting liquids have different refractive index and are not mutually soluble.
3. A liquid optical phase modulator with configurable adjustment range and precision according to claim 2, wherein: refractive index difference Δ n between the first layer and the liquid and the second layer of the three phase-adjusting liquids 12 Configurable, the liquid level moves for a unit distance, the optical path difference is large, so that the phase adjustment in a large range is realized, and the refractive index difference delta n between the liquid in the second layer and the liquid in the third layer 23 The liquid level can be configured to move by a unit distance, and the optical path difference is small, so that high-precision phase adjustment is realized.
4. A liquid optical phase modulator with configurable adjustment range and precision according to claim 3, wherein: the solid inner core cavity (1) is formed by splicing two round tables up and down to form an inner cavity surface.
5. A liquid optical phase modulator with configurable adjustment range and precision according to claim 3, wherein: the solid inner core cavity (1) is provided with an inner cavity surface formed by splicing two prismatic tables formed by splicing isosceles trapezoid surfaces up and down.
6. A liquid optical phase modulator with configurable adjustment range and precision according to claim 3, wherein: the solid inner core cavity (1) is provided with a frustum which is formed by splicing a circular truncated cone and an isosceles trapezoid surface and is spliced up and down to form an inner cavity surface.
7. A liquid optical phase modulator with configurable adjustment range and precision according to any one of claims 4-6, wherein: respectively coating a first coating layer (12) and a second coating layer (13) on the inner side of the solid inner core cavity (1) to set a contact angle theta 1 And contact angle theta 2
8. A liquid optical phase modulator with configurable adjustment range and precision according to claim 1, wherein: two of the three phase adjusting liquids stored in the phase adjusting liquid cavity are the same, and two adjacent phase adjusting liquids have different refractive indexes and are not mutually soluble.
9. A liquid optical phase modulator with configurable adjustment range and precision according to claim 8, wherein: transparent upper cover plate (2) with the inboard of transparent lower cover plate (3) all is provided with transparent conductive electrode (5), and the round platform is sealed between transparent conductive electrode (5) and the round platform lateral wall is poured through the melting for electrically conductive copper and forms, from top to bottom transparent conductive electrode (5) with electrically conductive round platform lateral wall separates through first insulating layer (3-1), liquid in the phase place control liquid intracavity with separate through second insulating layer (6) between transparent conductive electrode (5).
10. A liquid optical phase modulator with configurable adjustment range and precision according to claim 8, wherein: transparent upper cover plate (2) with the inboard of transparent lower cover plate (3) all is provided with transparent conductive electrode (5), and the round platform seals between transparent conductive electrode (5) and the round platform lateral wall is for electrically conductive copper to pour through the melting and forms, from top to bottom transparent conductive electrode (5) with electrically conductive round platform lateral wall separates through insulating layer (3).
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