CN114813747A - System and method for detecting internal defects and testing surface morphology of ceramic rotor - Google Patents

System and method for detecting internal defects and testing surface morphology of ceramic rotor Download PDF

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CN114813747A
CN114813747A CN202210379392.1A CN202210379392A CN114813747A CN 114813747 A CN114813747 A CN 114813747A CN 202210379392 A CN202210379392 A CN 202210379392A CN 114813747 A CN114813747 A CN 114813747A
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focusing lens
ceramic rotor
focus
detector
rotor
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康慧敏
杨俊�
刘朝阳
张正逢
王佳鑫
谢华勇
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Institute of Precision Measurement Science and Technology Innovation of CAS
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Institute of Precision Measurement Science and Technology Innovation of CAS
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention discloses a ceramic rotor internal defect detecting and surface morphology testing system which comprises a laser, a rotary table, a translation table, a spectroscope, a first polarization beam splitter, a first focusing lens, a second focusing lens, a first pinhole reflector, a first detector, a second polarization beam splitter, an 1/4 wave plate, a third focusing lens, a second pinhole reflector, a second detector, a reflecting mirror, an imaging lens, a third detector, a computer and a micro-displacement platform. The invention also discloses a method for detecting the internal defects and testing the surface appearance of the ceramic rotor, which is used for identifying the internal defects of the ceramic rotor which are invisible in visual inspection, obtaining the defect distribution of the sub-surface of the ceramic rotor and reducing the possible breakage accidents of the ceramic rotor so as to avoid economic loss and health risks.

Description

System and method for detecting internal defects and testing surface morphology of ceramic rotor
Technical Field
The invention belongs to the field of nuclear magnetic resonance, and particularly relates to a system and a method for detecting internal defects and surface topography of a ceramic rotor, which are suitable for detecting internal defects and surface topography of ceramic rotors with different sizes and materials in a solid nuclear magnetic resonance experiment and can also be used for thin-wall round tubes made of other semitransparent ceramic materials.
Technical Field
Solid Nuclear Magnetic Resonance (NMR) is a powerful analytical technique. In solid-state NMR experiments, the sample is held in a ceramic tube (i.e., a rotor) that is rotated at high speed in a direction at a magic angle (54.7 degrees) from the direction of the main magnetic field. This type of rotation is called Magic-Angle Spinning (MAS). Magic angle rotation can weaken or eliminate various anisotropic interactions in a solid sample, effectively narrow the line width of a solid NMR spectral line, improve the resolution of the spectrum, and is the basis of solid NMR.
In practical application, a rotor filled with a sample is supported by an air bearing, and a turbine on the end face of the rotor is driven by high-pressure air to realize forced rotation. In order to achieve stable ultra-high speed rotation, the air bearing is required to have optimal rotor support stiffness. The air film gap between the rotor and the air bearing is only tens of microns, which puts high processing requirements on the roundness of the outer diameter of the rotor. Further, the maximum speed of the rotor is 170kHz, and the duration of the rotation is as long as several hundred hours. The rotor is subjected to a continuously large centrifugal force, which puts high demands on the strength of the material from which the rotor is made. In order to meet the conditions of no magnetism, large temperature change, high stress level and the like, the selectable materials for manufacturing the rotor are very limited, and the rotor mainly comprises ceramic materials such as zirconium oxide, silicon nitride, aluminum oxide and the like.
The outer diameter of the rotor is usually between 0.5mm and 10mm, and the main processing procedures of the hollow thin-wall cylinder with a smaller diameter comprise the procedures of sintering, machining (mainly grinding), polishing and the like. When the grinding head passes through the surface of the material, the surface of the material rebounds and generates tensile stress, which may cause lateral cracks and intermediate cracks inside the material. And the surface of the material is subjected to local high temperature generated during grinding by the abrasive, the material in the surface crushing area is sintered again, a smooth sintered layer is formed to cover the processed surface, and the cracks generated during processing are usually invisible through visual inspection.
The internal cracks generated by the processing of the rotor may cause damage failure when the rotor rotates at a high speed, the coaxial matching of the rotor and the bearing is not good, and the rotor may frequently generate collision and abrasion instability when rotating, so that the risk of damage of the rotor in the rotating process is further aggravated. The rotor is broken in the rotating process, so that a sample can be leaked and a nuclear magnetic resonance probe can be damaged, and great economic loss is caused. Aiming at the problem, the geometrical morphology and the internal defects of the rotor are detected before the rotor is used, the key matching size of the rotor and the information such as the characteristics, the size, the distribution and the like of the defects are obtained, the rotor with damage risks can be effectively identified, and further, the damage to instruments and the economic loss are avoided.
Disclosure of Invention
The invention aims to provide a system and a method for detecting internal defects and testing surface morphology of a ceramic rotor aiming at the problems in the prior art, and aims to identify the internal defects of the ceramic rotor and obtain the processing precision information of a cylindrical ceramic rotor at the same time, comprehensively evaluate the risk of damage of the ceramic rotor and reduce or avoid the accidents of breakage of the ceramic rotor.
The above purpose of the invention is realized by the following technical scheme:
a system for detecting internal defects and testing surface morphology of a ceramic rotor comprises a laser, wherein linear polarization laser emitted by the laser is transmitted through a beam splitter, reflected by a first polarization beam splitter and irradiated on the ceramic rotor to be tested by a first focusing lens to generate reflected light, back scattered light with unchanged polarization state and back scattered light with changed polarization state,
the reflected light at the focus of the first focusing lens and the back scattered light with unchanged polarization state are reflected by the first polarization beam splitter and the spectroscope in sequence, then enter the first detector after passing through the second focusing lens and the first pinhole reflector in sequence, the first detector is connected with a corresponding optical power meter, the focuses of the first pinhole reflector and the first focusing lens are conjugated,
the back scattered light with changed polarization state is transmitted through the first focusing lens, the first polarization beam splitter, the second polarization beam splitter, the 1/4 wave plate and the third focusing lens in sequence and then enters the second pinhole reflector, the second pinhole reflector is conjugated with the focus of the first focusing lens,
the back scattered light with the changed polarization state returned at the focal point of the first focusing lens is imaged on a second detector through a second pinhole reflector; the back scattering light with the changed polarization state which does not return at the focus of the first focusing lens is reflected by the second pinhole reflector, the light reflected by the second pinhole reflector sequentially transmits through the third focusing lens and the 1/4 wave plate, then is respectively reflected by the second polarization beam splitter and the reflector, and finally enters the third detector through the imaging lens.
The ceramic measuring rotor is arranged on the rotary table, the rotary table is arranged on the translation table, and the first focusing lens is driven by the micro-displacement platform to move.
The axial direction of the ceramic rotor to be measured is set to be the y-axis direction, the moving direction of the laser focus of the first focusing lens is the z-axis direction, the y direction is perpendicular to the z direction, and the x direction is perpendicular to the y direction and the z direction respectively.
A method for detecting internal defects and testing surface topography of a ceramic rotor comprises the following steps:
step 1, debugging a ceramic rotor internal defect detection and surface appearance test system;
step 2, mounting the ceramic rotor to be tested on a rotary table;
step 3, adjusting the position of the focus of the first focusing lens through the micro-displacement platform to ensure that the position of the focus of the first focusing lens traverses from the outside of the ceramic rotor to be tested to the surface of the ceramic rotor to be tested along the z-axis direction,
the linear polarization laser emitted by the laser transmits the beam splitter, is reflected by the first polarization beam splitter, and then is irradiated on the ceramic rotor to be measured by the first focusing lens,
when the optical power meter corresponding to the first detector detects that the light intensity is maximum, the focus of the first focusing lens is located on the surface of the ceramic rotor to be detected, the z-axis position of the focus of the first focusing lens is recorded, and the step 4 is carried out;
step 4, adjusting the position of the focus of the first focusing lens through the micro-displacement platform, continuously traversing from the surface of the ceramic rotor to be detected to the interior of the ceramic rotor to be detected along the z-axis direction, and summing optical power meters corresponding to the second detector and the third detector;
step 5, changing the rotation angle of the rotary table, repeating the step 3-4 until the ceramic rotor to be tested is traversed for one circle, and entering the step 6;
step 6, changing the translation position of the translation table, and repeating the steps 3-5 until the whole ceramic rotor to be tested is traversed along the axial direction of the ceramic rotor to be tested;
step 7, obtaining the outer contour of the rotor of the ceramic rotor to be measured according to the z-axis position of the focus of the first focusing lens obtained in the step 3, the corresponding rotating angle of the turntable and the translation position of the translation table,
and when the focus of the first focusing lens is at the same z-axis position, obtaining a light intensity sum graph according to the sum of the light intensities of the second detector and the third detector in the step 4, the corresponding rotating angle of the rotary table and the corresponding translation position of the translation table, wherein a bright spot in the light intensity sum graph is a defect, and obtaining a light intensity sum three-dimensional graph and a defect three-dimensional graph according to the light intensity sum graph of the focus of the first focusing lens at different z-axis positions.
The method for detecting the internal defects and testing the surface topography of the ceramic rotor further comprises the step of obtaining the information of the defect characteristics and the crack orientation through a three-dimensional defect map obtained by computer analysis.
Compared with the prior art, the invention has the following beneficial effects:
the invention solves the problem of detecting the internal defects of the cylindrical ceramic rotor for the solid nuclear magnetic experiment by utilizing the principle that the polarization states of the scattered light of the polarized light at the defect position and the uniform position of the semitransparent ceramic rotor to be detected are different, and simultaneously obtains the shape error of the cylinder to be detected. Furthermore, the testing of rotors made of different ceramic materials can be realized by replacing light sources with different wavelengths, and the system can be improved to realize the surface appearance measurement of other shapes.
Drawings
FIG. 1 is a schematic structural view of the present invention;
in the figure: 1-a laser; 2-a ceramic rotor to be tested; 3, rotating the platform; 4-a translation stage; 5-a spectroscope; 6-a first polarizing beam splitter; 7-a first focusing lens; 8-a second focusing lens; 9-a first pinhole reflector; 10-a first detector; 11-a second polarizing beam splitter; 12-1/4 wave plates; 13-a third focusing lens; 14-a second pinhole reflector; 15-a second detector; 16-a mirror; 17-an imaging lens; 18-a third detector; 19-a computer; 20-micro displacement platform.
Detailed Description
The present invention will be described in further detail with reference to examples for the purpose of facilitating understanding and practice of the invention by those of ordinary skill in the art, and it is to be understood that the present invention has been described in the illustrative embodiments and is not to be construed as limited thereto.
Example (b):
the ceramic rotor to be measured is used as a semitransparent material, and the optical penetration depth in a visible light wave band can reach 0.1 mm. When the laser light passing through the first focusing lens 7 is irradiated on the ceramic rotor 2 to be measured:
part of laser is directly reflected by the surface of the ceramic rotor 2 to be measured to form reflected light;
part of the laser is transmitted into the ceramic rotor 2 to be measured, part of the laser transmitted into the ceramic rotor 2 to be measured does not pass through the defect position, back scattering light with unchanged polarization state is formed, and the back scattering light with unchanged polarization state is transmitted out of the ceramic rotor 2 to be measured; the other part of the laser transmitted into the interior of the ceramic rotor 2 to be measured passes through the defect position or the multiple scattering polarization change, the polarization characteristic is destroyed, the formed back scattering light with the changed polarization state is formed, and the back scattering light with the changed polarization state transmits out of the ceramic rotor 2 to be measured.
As shown in FIG. 1, a system for detecting internal defects and testing surface topography of a ceramic rotor comprises a laser 1, a ceramic rotor 2 to be tested is arranged on a rotary table 3, the rotary table 3 is arranged on a translation table 4,
the linear polarization laser emitted by the laser 1 is transmitted through the spectroscope 5, reflected by the first polarization beam splitter 6 and irradiated on the ceramic rotor 2 to be measured through the first focusing lens 7. The first focusing lens 7 is fixed on a piezoelectric ceramic driven micro-displacement platform and can be used for adjusting the relative position of the laser focus passing through the first focusing lens 7 and the surface of the ceramic rotor 2 to be measured. The axial direction of the ceramic rotor 2 to be measured is set to be the y-axis direction, the direction (optical axis direction) in which the laser focus of the first focusing lens 7 moves is the z-axis direction, the y-axis direction is perpendicular to the z-axis direction, the x-axis direction is determined by the y-axis direction and the z-axis direction, and the x-axis direction is perpendicular to the y-axis direction and the z-axis direction respectively. The rotary table 3 is used for driving the ceramic rotor 2 to be measured to rotate by taking a self central shaft (y-axis direction) as a rotating shaft, and the translation table 4 drives the rotary table 3 to move so as to drive the ceramic rotor 2 to be measured to move along the self central shaft (y-axis direction).
When the laser light passing through the first focusing lens 7 is irradiated on the ceramic rotor 2 to be measured, reflected light, backscattered light with unchanged polarization state, and backscattered light with changed polarization state are generated:
the reflected light and the back scattering light with unchanged polarization state keep better polarization characteristics, and return in the original path, namely after transmitting the first focusing lens 7, the reflected light is reflected by the first polarization beam splitter 6, and then the reflected light is reflected by the beam splitter 5 and enters the first detection light path, the first detection light path comprises a second focusing lens 8, a first pinhole reflector 9 and a first detector 10 which are sequentially arranged according to the light path, the first detector 10 is connected with a corresponding optical power meter, and the light intensity of the reflected light at the focus of the first focusing lens 7 and the back scattering light with unchanged polarization state is obtained by the first detector 10 and the corresponding optical power meter. The focal points of the first pinhole reflector 9 and the first focusing lens 7 are conjugate. The light intensity of the back scattering light with unchanged polarization state is generally far lower than that of the reflected light, and when the focal point of the first focusing lens 7 is positioned on the surface of the ceramic rotor 2 to be detected, the light intensity of the reflected light reaches the maximum, so that the position of the focal point of the first focusing lens 7 can be adjusted through the micro-displacement platform, and when the light intensity of the reflected light reaches the maximum, the focal point of the first focusing lens 7 is positioned on the surface of the ceramic rotor 2 to be detected, and further the back scattering light can be used as an optical probe to detect the surface topography of the ceramic rotor 2 to be detected.
The back scattered light with the changed polarization state penetrates through the first focusing lens 7 and then transmits the first polarization beam splitter 6 to enter a second detection light path due to the change of the polarization state, and the second detection light path comprises a second polarization beam splitter 11, an 1/4 wave plate 12, a third focusing lens 13, a second pinhole reflector 14, a second detector 15, a reflecting mirror 16, an imaging lens 17 and a third detector 18.
The back scattering light with changed polarization state sequentially transmits through the first polarization beam splitter and the second polarization beam splitter 11, then sequentially passes through the 1/4 wave plate 12 and the third focusing lens 13, and then enters the second pinhole reflector 14, the second pinhole reflector 14 is conjugated with the focus of the first focusing lens 7, the back scattering light with changed polarization state returned from the focus of the first focusing lens 7 is imaged on the second detector 15 through the second pinhole reflector 14, and the back scattered light with changed polarization state which is not returned at the focal point of the first focusing lens 7 is returned by the second pinhole reflector 14, and after the light returned by the second pinhole reflector 14 is transmitted through the third focusing lens 13 and the 1/4 wave plate 12 in turn, and then reflected by the second polarization beam splitter 11 and the mirror 16, and finally incident on the third detector 18 through the imaging lens 17 to be imaged on the third detector 18. The second detector 15 and the third detector 18 are each connected to a corresponding optical power meter, each of which is connected to a computer 19. The computer 19 is connected to the turntable/translation stage controller, which is connected to the micro-displacement platform 20, the turntable 3, and the translation stage 4, respectively. The computer 19 controls the micro-displacement stage 20, the turntable 3, and the translation stage 4 through the turntable/translation stage controller.
The position of the focus of the first focusing lens 7 is adjusted through the micro-displacement platform, when the focus of the first focusing lens 7 moves to a defect position, the second detector 15 detects a signal, and the sum of optical power signals measured by the second detector 15 and the third detector 18 generates an optical power sum graph, wherein in the optical power sum graph, the position of a bright area is the defect. The focus of the first focusing lens 7 is adjusted at different depth positions of the ceramic rotor to be detected through the micro-displacement platform, and the position of the focus of the first focusing lens 7 on the side surface of the ceramic rotor to be detected is adjusted through the rotary table 3 and the translation table 4, so that the three-dimensional position of the defect can be detected.
A method for detecting internal defects and testing surface morphology of a ceramic rotor utilizes the system for detecting internal defects and testing surface morphology of the ceramic rotor, and comprises the following steps:
step 1, debugging a ceramic rotor internal defect detection and surface morphology test system, wherein before testing, calibration with a scribed line on the surface is used as a calibration sample to complete parameter adjustment of the intensity of a light source of a laser 1, the signal gains of a first detector 10, a second detector 15 and a third detector 18, the actual sizes corresponding to the fields of view of the first detector 10, the second detector 15 and the third detector 18 and the like; and the pose of each optical element is further adjusted, the focal point of the first focusing lens 7 can be adjusted to fall on the surface and the inside of the calibrated sample, and the motion path of the translation table 4 is parallel to the rotation central axis of the turntable 3 and is vertical to the optical axis of the first focusing lens 7.
And 2, after the light path adjustment is finished, replacing the calibration sample with a to-be-measured ceramic rotor to be measured, wherein in the embodiment, the to-be-measured ceramic rotor is a zirconia ceramic rotor. The zirconia ceramic rotor is arranged on a rotary table 3, the rotary table 3 is arranged on a translation table 4, and the focus of a first focusing lens 7 can be adjusted to fall on the surface and the inside of a calibration sample. The initial rotation angle of the turntable 3 and the initial translation position of the translation stage 4 are marked,
and 3, adjusting the position of the focus of the first focusing lens 7 through the micro-displacement platform, so that the position of the focus of the first focusing lens 7 traverses from the outside of the ceramic rotor to be measured to the surface of the ceramic rotor to be measured along the radial direction (z-axis direction).
The linear polarization laser emitted from the laser 1 is transmitted through the spectroscope 5, reflected by the first polarization beam splitter 6, and irradiated on the ceramic rotor 2 to be measured through the first focusing lens 7,
the reflected light and the back scattering light with unchanged polarization state return to the original path, namely after transmitting the first focusing lens 7, the reflected light is reflected by the first polarization beam splitter 6, then the transmitted light is transmitted by the beam splitter 5, and enters the first detection light path, and the light intensity of the reflected light at the focal point of the first focusing lens 7 and the back scattering light with unchanged polarization state is obtained by the first detector 10 and the corresponding optical power meter.
When the optical power meter corresponding to the first detector 10 detects that the light intensity is maximum, the focus of the first focusing lens 7 is located on the surface of the ceramic rotor to be measured, the z-axis position of the focus of the first focusing lens 7 is recorded, and the step 4 is carried out.
And 4, adjusting the position of the focus of the first focusing lens 7 through the micro-displacement platform, and continuously traversing from the surface of the ceramic rotor to be tested to the interior of the ceramic rotor to be tested along the z-axis direction.
When the focal point of the first focusing lens 7 is located at the defect position, the back scattering light with changed polarization state sequentially transmits through the first polarization beam splitter and the second polarization beam splitter 11, and then sequentially passes through the 1/4 wave plate 12 and the third imaging lens 17, the second pinhole reflector 14 is conjugated with the focal point of the first focusing lens 7, the back scattering light with changed polarization state returned at the focal point of the first focusing lens 7 is imaged on the second detector 15 through the second pinhole reflector 14,
when the focal point of the first focusing lens 7 is located inside the ceramic rotor 2 to be measured but not at the defect position, the back scattering light with a changed polarization state does not return at the focal point of the first focusing lens 7, and at this time, the back scattering light with a changed polarization state is reflected by the second pinhole reflector 14 in the original path, and after the light returning through the second pinhole reflector 14 sequentially transmits through the third focusing lens 13 and the 1/4 wave plate 12, the light is reflected by the second polarization beam splitter 11 and the reflecting mirror 16, and finally enters the third detector 18 through the imaging lens 17, is imaged on the third detector 18, and the light intensity of the second detector 15 and the light intensity of the third detector 18 are summed.
Step 5, changing the rotation angle of the turntable 3, repeating the steps 3-4 until the ceramic rotor to be tested is traversed for one circle, entering the step 6,
and 6, changing the translation position of the translation table 4, and repeating the steps 3-5 until the whole ceramic rotor to be tested is traversed along the axial direction of the ceramic rotor to be tested.
Step 7, obtaining the outer contour of the rotor of the ceramic rotor to be measured according to the z-axis position of the focus of the first focusing lens 7 obtained in the step 3, the corresponding rotating angle of the turntable 3 and the translation position of the translation table 4;
when the focus of the first focusing lens 7 is at the same z-axis position, obtaining a light intensity sum graph according to the sum of the light intensities of the second detector 15 and the third detector 18 in the step 4, the corresponding rotation angle of the turntable 3 and the corresponding translation position of the translation table 4, wherein a bright point (the bright point is judged by a threshold) in the light intensity sum graph is a defect, and obtaining a light intensity sum three-dimensional graph and a defect three-dimensional graph according to the light intensity sum graphs of the focus of the first focusing lens 7 at different z-axis positions.
And 8, analyzing the obtained three-dimensional graph of the defect through a computer to obtain the information of the defect characteristics (transverse cracks/central cracks) and the crack orientation and predicting the possible direction of crack expansion.
The specific embodiments described herein are merely illustrative of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.

Claims (5)

1. A ceramic rotor internal defect detection and surface morphology testing system comprises a laser (1) and is characterized in that linear polarization laser emitted by the laser (1) is transmitted through a spectroscope (5), then reflected by a first polarization beam splitter (6) and irradiated on a ceramic rotor (2) to be tested through a first focusing lens (7) to generate reflected light, back scattering light with unchanged polarization state and back scattering light with changed polarization state,
the reflected light at the focus of the first focusing lens (7) and the back scattered light with unchanged polarization state are reflected by the first polarization beam splitter (6) and the beam splitter (5) in sequence, and then enter the first detector (10) after passing through the second focusing lens (8) and the first pinhole reflector (9) in sequence, the first detector (10) is connected with a corresponding optical power meter, the focus of the first pinhole reflector (9) and the focus of the first focusing lens (7) are conjugated,
the back scattered light with changed polarization state is transmitted through a first focusing lens (7), a first polarization beam splitter (6), a second polarization beam splitter (11), an 1/4 wave plate (12) and a third focusing lens (13) in sequence and then enters a second pinhole reflector (14), the second pinhole reflector (14) is conjugated with the focus of the first focusing lens (7),
the back scattered light with the changed polarization state returned at the focal point of the first focusing lens (7) is imaged on a second detector (15) through a second pinhole reflector (14); the back scattering light with changed polarization state which does not return at the focus of the first focusing lens (7) is reflected by the second pinhole reflector (14), the light reflected by the second pinhole reflector (14) sequentially transmits through the third focusing lens (13) and the 1/4 wave plate (12), then is respectively reflected by the second polarization beam splitter (11) and the reflecting mirror (16), and finally enters the third detector (18) through the imaging lens (17).
2. The ceramic rotor internal defect detection and surface morphology testing system of claim 1, characterized in that, the ceramic rotor (2) is arranged on a turntable (3), the turntable (3) is arranged on a translation stage (4), and the first focusing lens (7) is driven by a micro-displacement stage to move.
3. The ceramic rotor internal defect detecting and surface morphology testing system of claim 1, characterized in that the axial direction of the ceramic rotor (2) to be tested is set as the y-axis direction, the direction of the laser focus movement of the first focusing lens (7) is the z-axis direction, the y-direction is perpendicular to the z-direction, and the x-direction is perpendicular to the y-direction and the z-direction respectively.
4. A method for detecting internal defects and testing surface topography of a ceramic rotor, which utilizes the system for detecting internal defects and testing surface topography of the ceramic rotor as claimed in claim 3, is characterized by comprising the following steps:
step 1, debugging a ceramic rotor internal defect detection and surface appearance test system;
step 2, mounting the ceramic rotor to be tested on a rotary table;
step 3, adjusting the position of the focus of the first focusing lens (7) through the micro-displacement platform to ensure that the position of the focus of the first focusing lens (7) traverses from the outside of the ceramic rotor to be tested to the surface of the ceramic rotor to be tested along the z-axis direction,
the linear polarization laser emitted by the laser (1) is transmitted through the spectroscope (5), then reflected by the first polarization beam splitter (6) and irradiated on the ceramic rotor (2) to be measured through the first focusing lens (7),
when the optical power meter corresponding to the first detector (10) detects that the light intensity is maximum, the focus of the first focusing lens (7) is located on the surface of the ceramic rotor to be detected, the z-axis position of the focus of the first focusing lens (7) is recorded, and the step 4 is carried out;
step 4, adjusting the position of the focus of the first focusing lens (7) through the micro-displacement platform, continuously traversing from the surface of the ceramic rotor to be detected to the interior of the ceramic rotor to be detected along the z-axis direction, and summing optical power meters corresponding to the second detector and the third detector;
step 5, changing the rotation angle of the rotary table (3), repeating the step 3-4 until the ceramic rotor to be tested is traversed for one circle, and entering the step 6;
step 6, changing the translation position of the translation table (4), and repeating the steps 3-5 until the whole ceramic rotor to be tested is traversed along the axial direction of the ceramic rotor to be tested;
step 7, obtaining the outer contour of the rotor of the ceramic rotor to be measured according to the z-axis position of the focus of the first focusing lens (7) obtained in the step 3, the corresponding rotating angle of the turntable (3) and the translation position of the translation table (4),
and when the focus of the first focusing lens (7) is at the same z-axis position, obtaining a light intensity sum graph according to the sum of the light intensities of the second detector (15) and the third detector (18) in the step 4 and the corresponding rotating angle of the rotary table (3) and the translation position of the translation table (4), wherein a bright point in the light intensity sum graph is a defect, and obtaining a light intensity sum three-dimensional graph and a defect three-dimensional graph according to the light intensity sum graphs of the focus of the first focusing lens (7) at different z-axis positions.
5. The method as claimed in claim 4, further comprising a step of obtaining information on defect characteristics and crack orientation by analyzing the obtained defect three-dimensional map by a computer.
CN202210379392.1A 2022-04-12 2022-04-12 System and method for detecting internal defects and testing surface morphology of ceramic rotor Pending CN114813747A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115356265A (en) * 2022-08-12 2022-11-18 大连理工大学 Device for detecting silicon wafer subsurface damage signal by double detectors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115356265A (en) * 2022-08-12 2022-11-18 大连理工大学 Device for detecting silicon wafer subsurface damage signal by double detectors

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