CN114810560A

CN114810560A - Miniature gas transmission device

Info

Publication number: CN114810560A
Application number: CN202110126865.2A
Authority: CN
Inventors: 莫皓然; 高中伟; 陈世昌; 张钧俋; 韩永隆; 黄启峰; 古旸
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2021-01-29
Filing date: 2021-01-29
Publication date: 2022-07-29

Abstract

A micro gas delivery device, comprising: a micro gas pump for delivering a gas; the micro valve is used for the arrangement of the micro gas pump and consists of a micro gas collecting plate, a micro valve plate frame, a micro valve plate and a micro gas outlet plate which are sequentially stacked; the miniature air collecting plate is provided with an excavated area and an air leakage conjunction part; the micro valve plate frame is provided with a valve plate accommodating area for positioning the micro valve plate, and the micro valve plate is provided with a plurality of valve holes; a micro air outlet plate for the micro valve plate frame and having an air outlet and an air-leakage shunt slot. The center positions of the valve holes and the center positions of the air outlet holes are in an eccentric design, so that the gas is smoothly output and completely discharged. When the air is decompressed, the air is firstly shunted and then collected and discharged by virtue of the air-leakage shunting groove of the miniature air outlet plate, so that the noise is avoided.

Description

Miniature gas transmission device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a gas transmission device, and more particularly, to a miniaturized gas transmission device.

[ background of the invention ]

With the increasing development of science and technology, the applications of gas delivery devices are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the trace of hot wearable devices is seen, and it is seen that the conventional gas delivery devices have gradually tended to be miniaturized, and maximized in flow rate.

However, the thickness of the conventional gas transmission device is still a certain value, and particularly, the thickness of the valve therein cannot be reduced, so that the whole thickness is difficult to be combined with the load device (e.g., a wearable device).

Referring to fig. 1, a schematic perspective exploded view of a valve of a conventional gas delivery device is shown, which includes a valve 3, the valve 3 including: the gas collecting plate 31 is provided with an excavated area 310, the valve plate frame 32 is provided with a positioning space 320 for positioning the valve plate 33, the valve plate is provided with a valve hole 330, the gas outlet plate 34 is provided with a gas outlet 340 and a gas outlet 341, the valve hole 330 is arranged in the middle of the gas outlet 340, and when gas is discharged, the gas outlet path is influenced because the aperture of the valve hole 330 is smaller than that of the gas outlet 340, so that the gas is not smoothly discharged. When the gas is decompressed, the valve hole 330 is disposed in the middle of the gas outlet 340, so that the gas can flow into the gas outlet 340 through the valve hole 330, the valve plate 33 cannot cling to the gas collecting plate 31, and a part of the gas is not discharged through the gas discharge hole 341, resulting in incomplete gas discharge. In addition, in order to prevent gas leakage from the gas pump when the valve 3 is provided with a gas pump (not shown), a layer of sealant (not shown) is usually coated on the surface of the valve 3 not overlapped with the gas pump, and the sealant surrounds the outside of the gas pump and seals the gas pump. However, this has the disadvantage that the volume of the valve 3 cannot be reduced when it is combined with the gas pump.

[ summary of the invention ]

The scheme is a micro gas transmission device, and mainly aims to provide a structure of combining a micro gas pump with a micro valve, so that the overall thickness of the gas transmission device is greatly reduced, and the problems of blockage and noise during gas discharge and air leakage are effectively solved.

To achieve the above object, a micro gas delivery device, a micro gas pump; a micro valve for setting the micro gas pump; wherein the micro valve comprises a micro air collecting plate, a micro valve sheet frame, a micro valve sheet and a micro air outlet plate which are sequentially stacked; the miniature air collecting plate is provided with a hollowed area, and the hollowed area is convexly provided with an air leakage fit part; the micro valve plate frame is provided with a valve plate accommodating area; the micro valve plate is positioned in the valve plate accommodating area and is provided with at least a plurality of valve holes, and the plurality of valve holes are staggered with the hollow area of the micro gas collecting plate; and a micro air outlet plate for the micro valve plate frame arrangement and having an air outlet groove and an air outlet hole. Wherein, the central point of a plurality of valve openings puts and the central point of venthole puts and forms eccentric design, makes gas output smooth and easy and lose heart complete. When the air is decompressed, the air is forced to be divided into two paths by the air-releasing shunting groove of the micro air-releasing plate, and then the two paths are shunted and collected to be discharged, so that the noise is avoided.

[ description of the drawings ]

Fig. 1 is a perspective view of a known valve.

Fig. 2A is a schematic perspective view of the micro gas transmission device.

Fig. 2B is a schematic perspective view of the micro gas delivery device at another angle.

FIG. 3A is an exploded view of the micro gas pump of the present invention.

FIG. 3B is an exploded view of the micro gas pump of the present invention from another perspective.

FIG. 4A is a schematic cross-sectional view of the micro gas pump of the present invention.

Fig. 4B to 4D are schematic operation diagrams of the micro gas pump of the present invention.

FIG. 5A is an exploded view of the micro valve and the micro gas pump.

FIG. 5B is an exploded view of the micro-valve and the micro-gas pump from another angle.

Fig. 6 is a schematic plan view of the micro gas delivery device of the present invention.

FIG. 7 is a schematic view of the gas output section of the micro gas delivery device according to the section line A-A of FIG. 6.

Fig. 8 is a schematic view of the gas output plane of the micro gas transmission device.

FIG. 9 is a schematic cross-sectional view of the micro gas delivery device showing the pressure relief according to the section line B-B of FIG. 6.

Fig. 10 is a schematic view of a gas pressure relief plane of the micro gas transmission device.

[ description of symbols ]

1: miniature gas pump

100: miniature gas transmission device

11: air inlet plate

111: first surface

112: second surface

113: air intake

114: confluence chamber

115: air inlet flow channel

12: resonance sheet

121: center hole

122: vibrating part

123: fixing part

13: actuating element

131: vibrating plate

131 a: upper surface of

131 b: lower surface

131 c: convex part

132: frame structure

132 a: first conductive pin

133: connecting part

134: piezoelectric patch

135: gas channel

14: first insulating frame

15: conductive frame

151: frame part

152: electrode part

153: second conductive pin

16: second insulating frame

17: vibration chamber

2: micro valve

21: miniature air collecting plate

210: excavated area

211: air release conjunction part

2110: diversion end

22: micro valve plate frame

220: valve block accommodation area

23: miniature valve plate

230: valve bore

24: miniature air outlet plate

240: air outlet surface

241: air escape surface

242: air outlet groove

243: air outlet

244: air leakage shunting groove

245: pressure relief hole

246: pressure relief trench

3: valve gate

31: air collecting plate

310: excavated area

32: valve plate frame

320: positioning space

33: valve plate

330: valve bore

34: air outlet plate

340: air outlet

341: air release hole

[ detailed description ] A

Embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 2A to 2B, fig. 2A is a schematic perspective view of the micro gas transmission device, and fig. 2B is a schematic perspective view of the micro gas transmission device at another angle. The present application provides a micro gas transmission device 100, which comprises a micro gas pump 1 and a micro valve 2, wherein the micro gas pump 1 is disposed on the micro valve 2.

Referring to fig. 3A and 3B, fig. 3A is an exploded view of the micro gas pump, and fig. 3B is an exploded view of the micro gas pump from another angle. The micro gas pump 1 includes an inlet plate 11, a resonator plate 12, an actuator 13, a first insulating frame 14, a conductive frame 15 and a second insulating frame 16. The micro gas pump 1 may be a piezoelectric gas pump, and has a total thickness of 0.5 to 3mm, but not limited thereto.

The intake plate 11 has a first surface 111, a second surface 112, a plurality of intake holes 113, a converging chamber 114, and a plurality of intake runners 115. The first surface 111 and the second surface 112 are two surfaces corresponding to each other. In the present embodiment, the number of the air inlet holes 113 is 4, but not limited thereto, and the air inlet holes penetrate from the first surface 111 to the second surface 112. The converging chamber 114 is formed by the second surface 112 and is located at the center of the second surface 112. The number and position of the inlet runners 115 correspond to those of the inlet holes 113, so the number is 4 in this embodiment. One end of each of the inlet channels 115 is connected to a corresponding inlet hole 113, and the other end is connected to the collecting chamber 114, so that the gas can pass through the inlet channel 115 after entering from the inlet hole 113, and finally is collected in the collecting chamber 114.

The resonator plate 12 is coupled to the second surface 112 of the inlet plate 11, the resonator plate 12 includes a central hole 121, a vibrating portion 122 and a fixing portion 123, the central hole 121 is formed through the center of the resonator plate 12, the vibrating portion 122 is located at the peripheral region of the central hole 121, the fixing portion 123 is located at the outer edge of the vibrating portion 122, and the resonator plate 12 is coupled to the inlet plate 11 through the fixing portion 123. When the resonance plate 12 is coupled to the inlet plate 11, the central hole 121, the vibration part 122 will vertically correspond to the confluence chamber 114 of the inlet plate 11.

The actuator 13 is coupled to the resonator plate 12, and the actuator 13 includes a vibration plate 131, a frame 132, a plurality of connecting portions 133, a piezoelectric plate 134, and a plurality of gas passages 135. The vibrating plate 131 has a square shape. The frame 132 is a square frame surrounding the periphery of the vibrating plate 131 and has a first conductive pin 132a, and the first conductive pin 132a extends from the periphery of the frame 132 along the horizontal direction. The gas passages 135 are disposed between the vibrating plate 131, the frame 132 and the connecting portions 133. The actuator 13 is coupled to the fixing portion 123 of the resonator plate 12 through the frame 132, and the number of the connecting portions 133 is 4 in the embodiment, but not limited thereto. The connection parts 133 are connected between the vibration plate 131 and the frame 132, respectively, to elastically support the vibration plate 131. The piezoelectric sheet 134 has a shape and an area corresponding to those of the vibrating plate 131, and in the present embodiment, the piezoelectric sheet 134 is also in a square shape, has a side length less than or equal to that of the vibrating plate 131, and is attached to the piezoelectric sheet 134. Further, the vibration plate 131 has opposite surfaces: an upper surface 131a and a lower surface 131b, wherein the upper surface 131a has a protrusion 131c, and the piezoelectric sheet 134 is attached to the lower surface 131 b.

The first insulating frame 14 and the second insulating frame 16 are square frames having the same shape as the frame 132 of the actuator 13. The conductive frame 15 includes a frame portion 151, an electrode portion 152 and a second conductive pin 153, the frame portion 151 is a square frame as the first insulating frame 14 and the second insulating frame 16, the electrode portion 152 extends from the inner side of the frame portion 151 to the center, and the second conductive pin 153 extends from the outer periphery of the frame portion 151 in the horizontal direction.

Referring to fig. 4A, fig. 4A is a schematic cross-sectional view of a micro gas pump. The air inlet plate 11, the resonance plate 12, the actuator 13, the first insulating frame 14, the conductive frame 15 and the second insulating frame 16 are sequentially stacked, and a vibration chamber 17 is formed between the resonance plate 12 and the vibration plate 131. In addition, the electrode portion 152 of the conductive frame 15 abuts against and is electrically connected to the piezoelectric sheet 134 of the actuator 13, so that the first conductive pin 132a of the actuator 13 and the second conductive pin 153 of the conductive frame 15 can receive a driving signal (including a driving voltage and a driving frequency) to the outside and transmit the driving signal to the piezoelectric sheet 134.

Referring to fig. 4B to 4D, after receiving the driving signal, the piezoelectric sheet 134 begins to deform due to the piezoelectric effect, and then drives the vibrating plate 131 to move up and down. Referring to fig. 4B, when the vibration plate 131 moves downward, the vibration portion 122 of the resonance plate 12 is driven to move downward, so that the volume of the collecting chamber 114 increases, and external air is drawn into the collecting chamber 114 through the air inlet 113 and the air inlet channel 115. As shown in fig. 4C, when the vibrating plate 131 is driven upward by the piezoelectric plate 134, the gas in the vibrating chamber 17 is pushed outward from the center to the gas passage 135, and is guided downward through the gas passage 135, and simultaneously, the resonance plate 12 moves upward, pushing the gas in the confluence chamber 114 and transmitting downward through the central hole 121. Finally, as shown in fig. 4D, when the vibration plate 131 is displaced downward to reset, the vibration portion 122 of the resonance plate 12 is synchronously driven to move downward, the vibration portion 122 approaches the protrusion 131c of the vibration plate 131, and pushes the gas in the vibration chamber 17 to move outward to enter the gas channel 135, and the volume of the confluence chamber 114 is greatly increased due to the downward displacement of the vibration portion 122, so that the external gas is sucked into the confluence chamber 114 through the gas inlet hole 113 and the gas inlet channel 115, and the above actions are repeated continuously to transmit the gas downward to the micro valve 2.

Referring to fig. 5A to 5B, fig. 5A is an exploded view of the micro valve and the micro gas pump, and fig. 5B is an exploded view of the micro valve and the micro gas pump at another angle. Wherein, a micro gas pump 1 is disposed on a micro valve 2, and the micro valve 2 comprises a micro gas collecting plate 21, a micro valve plate frame 22, a micro valve plate 23, and a micro gas outlet plate 24.

The micro air collecting plate 21 has a hollow 210, and the hollow 210 is protruded with an air-release engaging portion 211. The micro valve frame 22 has a valve receiving area 220. The micro valve sheet 23 is disposed in the valve sheet accommodating area 220 and has a plurality of valve holes 230, and the plurality of valve holes 230 are dislocated from the hollow area 210 of the micro air collecting plate 21. In the present embodiment, the number of the plurality of valve holes 230 is preferably an even number, and preferably 2, but not limited thereto.

The micro air outlet plate 24 has an air outlet surface 240, an air release surface 241 having two opposite surfaces with the air outlet surface 240, an air outlet groove 242 formed by recessing the air outlet surface 240, an air outlet 243 and a pressure release hole 245 arranged in the air outlet groove 242, the air outlet 243 and the pressure release hole 245 penetrate through the air outlet surface 240 and the air release surface 241, and an air release diversion trench 244 formed by recessing the air outlet surface 240, the air release diversion trench 244 is arranged corresponding to the air release matching portion 211 of the hollow area 210 and staggered with the air outlet groove 242, and a pressure release channel 246 formed by recessing the air release surface 241 and communicated with the pressure release hole 245, and the area of the pressure release channel 246 is gradually enlarged from the pressure release hole 245 to the direction far away from the pressure release hole 245. In the present embodiment, the air-leakage shunting groove 244 of the micro air-outlet plate 24 is etched by a half-etching process, and the noise-eliminating effect is best when the etching depth is 0.1-0.15 mm.

It should be noted that the center points of the two valve holes 230 of the micro valve plate 23 and the air outlet 243 of the micro air outlet plate 24 are not disposed on the same center line to form an eccentric design, so that the two valve holes 230 are not disposed at the center of the air outlet 243, the shape of the valve plate accommodating area 220 is the same as that of the micro valve plate 23, and the micro valve plate 23 is fixed and positioned therein, the micro valve plate frame 22 is disposed on the micro air collector plate 21, and the micro air collector plate 21 is disposed on the micro air pump 1. Referring to fig. 2A to 2B, fig. 2A is a schematic perspective view of a micro gas delivery device, and fig. 2B is a schematic perspective view of the micro gas delivery device at another angle. In this embodiment, the micro gas collecting plate 21, the micro valve plate frame 22, and the micro gas outlet plate 24 are all made of metal (for example, stainless steel made of the same metal), and the thickness of the micro gas collecting plate 21, the thickness of the micro valve plate frame 22, and the thickness of the micro gas outlet plate 24 are all the same, and are all 2 mm.

Referring to fig. 6 and 7, fig. 6 is a schematic plan view of the micro gas delivery device of the present invention, and fig. 7 is a schematic sectional view of a gas output from a-a of fig. 6. The micro air collecting plate 21, the micro valve plate frame 22, the micro valve plate 23 and the micro air outlet plate 24 of the micro valve 2 are sequentially stacked and fixed from bottom to top. The micro valve sheet 23 is accommodated in the sheet accommodating area 220 of the micro valve sheet frame 22, and the micro gas pump 1 is combined with the micro valve 2. When outputting gas, the micro gas pump 1 transmits gas to the micro valve 2, the gas enters from the hollow region 210 of the micro gas collecting plate 21, and at this time, the partial region of the micro valve sheet 23 located in the gas outlet groove 242 is pushed upwards by the gas extrusion, so that the gas enters into the gas outlet groove 242 and flows through the gas outlet 243 via the two valve holes 230 to be smoothly discharged to a load space (not shown).

Fig. 8 is a schematic view of a gas output plane of the micro gas transmission device. The present invention is to avoid the situation of blockage generated when the micro gas pump 1 outputs gas, so that the center points of the two valve holes 230 of the micro valve plate 23 and the gas outlet 243 of the micro gas outlet plate 24 are not arranged on the same center line to form an eccentric design, and at the same time, the two valve holes 230 and the gas outlet 243 are overlapped to form a through hole, so that gas is output to the load space through the through hole and the gas outlet 243, thereby completing gas output without causing blockage.

Fig. 9 is a schematic cross-sectional view of the micro gas transmission device according to fig. 6 showing a pressure relief of gas B-B. When the micro gas transmission device 100 stops transmitting gas to the load space, the pressure in the load space is greater than the external pressure, and the pressure relief operation starts through the micro valve 2, when the gas is returned from the gas outlet 243 to the micro gas outlet plate 24, because the center points of the two valve holes 230 of the micro valve plate 23 and the gas outlet 243 of the micro gas outlet plate 24 are not arranged on the same center line but are eccentrically designed, the two valve holes 230 are not arranged at the center of the gas outlet 243, most of the gas cannot flow into the micro valve plate 23 through the two valve holes 230 and flow through the gas relief flow channel 244, and meanwhile, the micro valve plate 23 is pushed by the gas to be tightly attached to the micro gas collecting plate 21, and the partial region of the micro valve plate 23 above the hollow region 210 of the micro gas collecting plate 21 is pushed downwards by the pushing of the gas, so that the gas can enter the hollow region 210 through the upper portion of the micro valve plate 23, then flows through the air release shunting groove 244 and is output to the pressure release channel 246 through the pressure release hole 245 to be released outwards, so that the pressure release operation is completed smoothly. When the gas is discharged through the pressure discharge trench 246, the area of the pressure discharge trench 246 is gradually enlarged from the pressure discharge hole 245 to a direction away from the pressure discharge hole 245, so that the gas can be discharged more smoothly.

Fig. 10 is a schematic view of a gas pressure releasing plane of the micro gas transmission device. In order to avoid the noise generated during the pressure relief of the micro air pump 1, the air relief fitting portion 211 is provided at the position of the air relief flow dividing groove 244 of the micro air outlet plate 24 corresponding to the hollow area 210 of the micro air collector plate 21. When the air is discharged, the air discharging engagement portion 211 is tightly attached to the air discharging shunting groove 244, so that when the air enters through the air outlet 243 and flows to the air discharging shunting groove 244, the air is forced to be divided into two paths, and then the two paths of air are collected and discharged out of the micro air transmission device 100 through the air discharging hole 245, thereby completing the air discharging operation. By means of the design of the air-bleed flow-dividing groove 244, the noise caused by the direct impact of the air on the air-bleed flow-dividing groove 244 can be effectively reduced no matter whether the air is branched or converged. In the present embodiment, the air release shunting groove 244 is substantially V-shaped and has a V-shaped shunting structure, and the V-shaped shunting structure vertically corresponds to the air release engaging portion 211.

Accordingly, it can be understood from the above description that the structure and operation of the micro gas transmission device 100 can provide the following effects:

firstly, the overall thickness of the micro gas transmission device 100 can be greatly reduced by using the micro valve 2 composed of the micro gas collecting plate 21, the micro valve plate frame 22, the micro valve plate 23, the micro gas outlet plate 24 and the like, and particularly, the thicknesses of the micro gas collecting plate 21, the micro valve plate frame 22 and the micro gas outlet plate 24 can be reduced to 2mm, so that the overall thickness of the micro valve 2 is only 6 mm. In addition, the design of coating glue on the micro valve 2 is eliminated, so that the peripheral sizes of the micro gas pump 1 and the micro valve 2 are consistent, and the effect of reducing the overall volume of the micro gas transmission device 100 is further achieved.

In the second point, the micro valve sheet 23 of the present disclosure is changed from an original hole disposed in the middle of the air outlet 243 to two valve holes 230, and the center points of the two valve holes 230 and the air outlet 243 are not disposed on the same center line but are in an eccentric design, which can prevent incomplete pressure release operation caused by the two valve holes 230 when air is compressed back, thereby ensuring smooth air release.

And thirdly, the air-release fitting part 211 is arranged at the position, corresponding to the air-release flow-dividing groove 244 of the micro air outlet plate 24, of the hollowed area 210 of the micro air-collecting plate 21, and when air is released, the air-release fitting part 211 is tightly attached to the air-release flow-dividing groove 244, so that when the air enters through the air outlet holes 243 and flows to the air-release flow-dividing groove 244, the air is forced to be divided into two paths and then is converged and discharged out of the micro air transmission device 100 through the pressure-release holes 245, and the pressure-release operation is completed. Therefore, whether the gas is branched or converged, the noise generated by gas impact can be effectively reduced.

Claims

1. A micro gas delivery device, comprising:

a micro gas pump for delivering a gas;

a micro valve for setting the micro gas pump; wherein

The micro valve comprises a micro air collecting plate, a micro valve plate frame, a micro valve plate and a micro air outlet plate which are sequentially stacked;

the micro air collecting plate is provided with a hollow area;

the micro valve plate frame is provided with a valve plate accommodating area;

the micro valve plate is positioned in the valve plate accommodating area and is provided with a plurality of valve holes, and the plurality of valve holes are staggered with the hollow area of the micro gas collecting plate; and

the miniature air outlet plate is used for the arrangement of the miniature valve plate frame and is provided with an air outlet surface, an air leakage surface, an air outlet groove, an air outlet hole and a pressure leakage hole, wherein the air outlet surface and the air outlet surface are two opposite surfaces;

wherein, these a plurality of valve openings of this miniature valve block and this venthole of this miniature air outlet plate central point between them do not set up at same central line but be eccentric design, make this a plurality of valve openings not set up the central point at this venthole, the guarantee is given vent to anger and is lost air smoothly.

2. The micro gas transmission device according to claim 1, wherein the hollowed-out area is convexly provided with a gas release fitting portion corresponding to the gas release flow-dividing groove, when releasing gas, the gas enters through the gas outlet and is forced to be divided into two paths to flow through the gas release flow-dividing groove, and then the two paths are converged to the pressure release hole to be discharged out of the micro gas transmission device, so that the gas is prevented from directly impacting the gas release flow-dividing groove to generate noise.

3. The micro gas delivery device according to claim 1, wherein the bleed flow splitter is V-shaped.

4. A micro gas delivery device according to claim 3, wherein the run-flat manifold is provided with a V-shaped manifold structure.

5. The micro gas delivery device according to claim 4, wherein the hollow area has a gas release engagement portion, and the gas release engagement portion vertically corresponds to the V-shaped flow-dividing structure.

6. The micro gas delivery device according to claim 1, wherein the micro gas pump is a piezoelectric gas pump and has a total thickness of 0.5-3 mm.

7. The micro gas delivery device according to claim 1, wherein the micro gas pump is substantially the same size as the periphery of the micro valve.

8. The micro gas transfer device according to claim 1, wherein the number of the plurality of valve holes of the micro valve plate is an even number.

9. The micro gas delivery device according to claim 1, wherein the thickness of the micro gas collecting plate, the micro valve plate frame and the micro gas outlet plate is 2 mm.

10. The micro gas delivery device according to claim 1, wherein the etching depth of the run-flat splitter of the micro gas outlet plate is 0.1-0.15 mm.

11. The micro gas delivery device according to claim 1, wherein the area of the pressure relief trench gradually increases from the pressure relief hole toward a direction away from the pressure relief hole.

12. The micro gas delivery device according to claim 1, wherein the micro gas collecting plate, the micro valve frame and the micro gas outlet plate are made of a metal material.

13. The micro gas delivery device according to claim 12, wherein the metal material is stainless steel.

14. The micro gas delivery device according to claim 1, wherein the micro gas pump comprises:

an intake plate having: a first surface and a second surface opposite to the first surface;

a plurality of air inlets respectively penetrating from the first surface to the second surface;

a converging chamber formed by recessing from the second surface and located at the center of the second surface; and

a plurality of air inlet channels formed by the second surface in a concave way, wherein one end of each air inlet channel is respectively connected with the plurality of air inlet holes, and the other end of each air inlet channel is connected with the confluence chamber;

a resonator plate, bonded to the second surface, having:

a central hole located at the center of the resonance sheet;

a vibration part located at the periphery of the central hole and corresponding to the confluence chamber; and

the fixing part is positioned at the outer edge of the vibrating part, and the resonator plate is combined to the air inlet plate through the fixing part;

an actuating member coupled to the fixing portion of the resonator plate;

a first insulating frame combined with the actuating member;

a conductive frame combined with the first insulating frame; and

a second insulating frame combined with the conductive frame.

15. The micro gas delivery device according to claim 14, wherein the actuator comprises:

a vibrating plate in a square shape;

a frame surrounding the periphery of the vibrating plate;

a plurality of connection parts respectively connected between the vibration plate and the frame to elastically support the vibration plate; and

and the shape and the area of the piezoelectric piece correspond to those of the vibration plate, and the piezoelectric piece is attached to the vibration plate.