CN1147711C - Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation - Google Patents
Frequency output type micromechanical dual-beam resonator with autoamtic temp compensationInfo
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- CN1147711C CN1147711C CNB021146160A CN02114616A CN1147711C CN 1147711 C CN1147711 C CN 1147711C CN B021146160 A CNB021146160 A CN B021146160A CN 02114616 A CN02114616 A CN 02114616A CN 1147711 C CN1147711 C CN 1147711C
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- temperature
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Abstract
The present invention discloses a frequency output type micro-mechanical dual-beam resonator with the function of temperature self-compensation. The resonator is composed of a silicon / silicon dioxide micro-bridge resonator and a silicon / silicon dioxide dual-layer micro cantilever beam temperature sensing element which are manufactured on the same chip and are made of the same material, wherein the thickness of the silicon / silicon dioxide micro-bridge resonator is equal or closed to that of the silicon / silicon dioxide dual-layer micro cantilever beam temperature sensing element, and the two resonator and the temperature sensing element are manufactured at the same time with the same fabrication process. An output signal of the temperature sensing element can automatically compensate the cross sensitivity of temperature change to the resonance frequency of the micro-bridge resonator to decrease the temperature coefficient of the resonance frequency of the micro-bridge resonator and to improve operating temperature ranges.
Description
One, technical field
The invention belongs to microelectromechanical systems (MEMS) field, particularly a kind of frequency output type micromechanical twin beams resonator with temperature self-compensation function.
Two, background technology
The micro-resonance type sensor of making based on silicon micromachining technique with mechanics resonance frequency is the important sensor of a class.This class microsensor has the output of accurate digital signal, antijamming capability is strong, cost of manufacture is low, power consumption is little, volume is little, in light weight, the advantage that is easy to produce in batches.The micro-resonance type sensor can utilize resonance frequency, phase place and the resonance amplitude of resonant elements such as micro-cantilever, microbridge (two-end fixed beam) and square film to measure various physical quantitys, as pressure, vacuum tightness, angular velocity, acceleration, flow, temperature, humidity and gas componant etc.
Micro-bridge resonator is aspect mechanical measurement and make aspects such as wave filter, voltage controlled oscillator, frequency multiplier and have special advantages.But the resonance frequency of micro-bridge resonator is subjected to Temperature Influence very big.Temperature stability is the micro-bridge resonator most important characteristic, because variation of temperature causes the variation of bridge internal stress, thereby causes the bridge change of resonance frequency.Temperature variation causes that the bridge change of resonance frequency mainly contains the reason of the following aspects: the difference of thermal expansivity between the material of (1) composition bridge resonator; (2) difference of thermal expansivity between the material of base material and composition bridge resonator; (3) Young modulus of the material of composition bridge resonator and density are with variation of temperature; (4) bridge length and thickness are with variation of temperature.The temperature variant complicated reason of bridge resonance frequency makes structural compensation be difficult to reach perfect compensation effect.
In the intelligence sensor system,, adopt a temperature element detected temperatures to change usually, and eliminate it to measured influence by the data fusion technology in order to eliminate the interference of temperature to tested non-temperature parameters.But present existing temperature sensor volume is big, the response time is longer, if the temperature variation in zone to be measured is very fast, is difficult to guarantee that itself and survey sensor are to the temperature variation sync response.In addition, temperature element and survey sensor distance is big in this case, if the temperature field skewness, then the measured temperature of temperature element is difficult to the true temperature of reflected measurement point.
Three, summary of the invention
The objective of the invention is to overcome the shortcoming of above-mentioned prior art, a kind of frequency output type micromechanical twin beams resonator with temperature self-compensation function is provided, thereby reduce the temperature coefficient of micro-bridge resonator resonance frequency, improve operating temperature range.
The technical solution used in the present invention is for achieving the above object: the present invention is made up of the micro-bridge resonator of making on same chip, double-deck micro-cantilever temperature sensing element and substrate, micro-bridge resonator is identical with micro-cantilever temperature sensing element material, thickness equates or is close that making and technology are identical simultaneously; By the data fusion technology, the output voltage of micro-cantilever temperature sensing element or amount of deflection size energy real-Time Compensation temperature variation are to the cross sensitivity of micro-bridge resonator resonance frequency.
Another characteristics of the present invention are: micro-bridge resonator and micro-cantilever temperature sensing element all have the silicon/silicon dioxide double-decker; Micro-bridge resonator and micro-cantilever temperature sensing element distance are in micron dimension, and temperature sensing element can accurately reflect the temperature of micro-bridge resonator; The working method of micro-bridge resonator can encourage for electric heating/voltage dependent resistor (VDR) pick-up or photothermal excitation/light signal pick-up; Temperature variation is to reflect that by the voltage-sensitive bridge of micro-cantilever temperature sensing element root or free end amount of deflection the strain of root detects by voltage dependent resistor (VDR), and the free end amount of deflection is passed through optical signal detecting.
Micro-cantilever temperature sensing element of the present invention realizes by silicon dioxide thin film growth on monocrystalline silicon, and during cool to room temperature, because the coefficient of thermal expansion of silicon dioxide is less than the coefficient of thermal expansion of silicon, double-deck micro-cantilever temperature sensing element is to the deflection of silicon side; Temperature raises, and the amount of deflection of semi-girder reduces, and the strain of beam root also reduces.Studies show that: the strain of semi-girder root (or free end amount of deflection) has linear relationship with the residing environment temperature of beam.By the data fusion technology, the output of micro-cantilever temperature sensing element energy real-Time Compensation temperature variation is to the cross sensitivity of micro-bridge resonator.
Four, description of drawings
Fig. 1 (a) is a structural representation of the present invention, and figure (b) is the A-A cut-open view of figure (a);
Fig. 2 is the device architecture of one embodiment of the present of invention and the synoptic diagram of testing circuit.
Five, embodiment
The present invention will be further described below in conjunction with drawings and Examples, but be not limited to this embodiment.
Embodiment: referring to Fig. 1,2, comprise micro-bridge resonator 1, micro-cantilever temperature sensing element 2 and substrate 3, lead-in wire 4, amplifier 8,11, bandpass filter 9, phase shifter 10, data fusion unit 12 and constant pressure source 13.
Micro-bridge resonator 1 adopts the working method of electric heating excitation/voltage dependent resistor (VDR) pick-up.The middle part of micro-bridge resonator 1 is manufactured with excitation resistance 5 and produces vibration with exciter component, Gu Zhi Duan is manufactured with voltage-sensitive bridge 6 to pick up vibration signal; A diagonal angle of the voltage-sensitive bridge 6 of micro-bridge resonator 1 root links to each other with two input ends of differential amplifier 8 by lead-in wire 4, the output terminal of differential amplifier 8 links to each other with the input end of bandpass filter 9 by lead-in wire 4, and the output terminal of bandpass filter 94 links to each other with the input end of phase shifter 10 by going between.An output terminal of phase shifter 10 4 is connected with excitation resistance 5 with data fusion unit 12 by going between, and phase shifter 10 another output terminals are connected with the other end that encourages resistance 5.Micro-bridge resonator 1, differential amplifier 8, bandpass filter 9 and phase shifter 10 are formed the resonance frequency that micro-bridge resonator 1 is detected in the close loop resonance loop;
The output voltage of 8 pairs of micro-bridge resonator 1 root voltage-sensitive bridges 6 of amplifier amplifies;
The centre frequency of bandpass filter 9 is resonance frequencies of micro-bridge resonator 1, in order to two frequency multiplication components in filtering micro-bridge resonator 1 output voltage;
The phase place that phase shifter 10 is adjusted the loop makes it satisfy closed loop self-excitation phase condition;
Temperature variation is to measure by the voltage-sensitive bridge 7 of the double-deck micro-cantilever temperature sensing element of silicon/silicon dioxide 2 roots.The solid Zhi Duan of micro-cantilever temperature sensing element 2 is manufactured with the deformation of voltage-sensitive bridge 7 with the detection beam, thereby measures the size of temperature; A diagonal angle of the voltage-sensitive bridge 7 of micro-cantilever temperature sensing element 2 roots links to each other with two input ends of differential amplifier 11 by lead-in wire 4, differential amplifier 11 by go between 4 and data fusion unit 12 link.
The output voltage of 11 pairs of micro-cantilever temperature sensing elements 2 of amplifier amplifies;
The output signal of 12 pairs of micro-bridge resonators 1 in data fusion unit and semi-girder temperature sensing element 2 is carried out Data Fusion;
Angle in the voltage-sensitive bridge 6 remaining diagonal angles is connected with an angle in the voltage-sensitive bridge 7 remaining diagonal angles, and voltage-sensitive bridge 6 remaining last angle are connected with two output terminals of constant pressure source 13 respectively with voltage-sensitive bridge 7 remaining last angle.Constant pressure source 13 provides operating voltage for the voltage-sensitive bridge 6,7 of bridge 1 and semi-girder 2 roots simultaneously.
Claims (5)
1, a kind of frequency output type micromechanical twin beams resonator with temperature self-compensation function, it is characterized in that: form by the micro-bridge resonator of on same chip, making [1], double-deck micro-cantilever temperature sensing element [2] and substrate [3], micro-bridge resonator [1] is identical with micro-cantilever temperature sensing element [2] material, thickness equates or is close that making and technology are identical simultaneously; By the data fusion technology, the output voltage of micro-cantilever temperature sensing element [2] or amount of deflection size energy real-Time Compensation temperature variation are to the cross sensitivity of micro-bridge resonator [1] resonance frequency.
2, a kind of frequency output type micromechanical twin beams resonator with temperature self-compensation function according to claim 1, it is characterized in that: said micro-bridge resonator [1] and micro-cantilever temperature sensing element [2] all have the silicon/silicon dioxide double-decker.
3, a kind of frequency output type micromechanical twin beams resonator according to claim 1 with temperature self-compensation function, it is characterized in that: the distance of micro-bridge resonator [1] and micro-cantilever temperature sensing element [2] is in micron dimension, and micro-cantilever temperature sensing element [2] can accurately reflect the temperature of micro-bridge resonator [1].
4, a kind of frequency output type micromechanical twin beams resonator with temperature self-compensation function according to claim 1, it is characterized in that: the working method of said micro-bridge resonator [1] can encourage for electric heating/voltage dependent resistor (VDR) pick-up or photothermal excitation/light signal pick-up.
5, a kind of frequency output type micromechanical twin beams resonator according to claim 1 with temperature self-compensation function, it is characterized in that: said temperature variation is that voltage-sensitive bridge [7] or the free end amount of deflection by micro-cantilever temperature sensing element [2] root reflects, the strain of root detects by voltage-sensitive bridge [7], and the free end amount of deflection is passed through optical signal detecting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021146160A CN1147711C (en) | 2002-06-07 | 2002-06-07 | Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021146160A CN1147711C (en) | 2002-06-07 | 2002-06-07 | Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1381710A CN1381710A (en) | 2002-11-27 |
| CN1147711C true CN1147711C (en) | 2004-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB021146160A Expired - Fee Related CN1147711C (en) | 2002-06-07 | 2002-06-07 | Frequency output type micromechanical dual-beam resonator with autoamtic temp compensation |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100411969C (en) * | 2003-08-20 | 2008-08-20 | 台达电子工业股份有限公司 | Detecting method for micromachinery structure, micro electromechanical assembly and microdetecting structure |
| CN100570755C (en) * | 2006-04-26 | 2009-12-16 | 中国计量学院 | A kind of micro-cantilever resonator of low temperature cross sensitivity |
| DE102008013098B4 (en) * | 2007-04-02 | 2012-02-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micromechanical system with temperature stabilization |
| EP2284629A1 (en) * | 2009-08-13 | 2011-02-16 | ETA SA Manufacture Horlogère Suisse | Thermocompensated mechanical resonator |
| CN103592061B (en) * | 2013-07-12 | 2015-04-22 | 西北工业大学 | High precision silicon micro resonant pressure transducer interface circuit |
| CN105953934B (en) * | 2016-04-26 | 2018-03-13 | 东南大学 | A kind of LC formula passive wireless temperature sensors based on hot double-deck execution beam |
| CN107976274B (en) * | 2018-01-18 | 2023-05-23 | 吉林大学 | Pressure detection device and method based on synchronous resonance |
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2002
- 2002-06-07 CN CNB021146160A patent/CN1147711C/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN1381710A (en) | 2002-11-27 |
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